Locking assembly, camera adjusting device and detection equipment
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- SHENZHEN JINGJI MICRO SEMICONDUCTOR TECHNOLOGY CO LTD
- Filing Date
- 2024-11-01
- Publication Date
- 2026-05-08
AI Technical Summary
Existing camera locking components are prone to rotational displacement during the locking process, which affects the accuracy of wafer pattern inspection, especially in scenarios where angular accuracy requirements are within a few micro-radians.
The anti-rotation connection structure of the anti-rotation connecting shaft and the anti-rotation guide hole ensures that only axial pressure is transmitted and no rotational torque is generated during the locking process. The anti-rotation function of the locking component is achieved through the design of the clamping and tightening parts.
This effectively avoids the impact of the locking process on the camera's rotation adjustment accuracy, improves the camera's rotation adjustment accuracy, and reduces the difficulty and time required for locking.
Smart Images
Figure CN121993698A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of testing equipment, and more specifically, to a locking assembly, a camera adjustment device, and a testing device. Background Technology
[0002] In the field of wafer pattern inspection, it is often necessary to align the camera's pixel array with the direction of the wafer being inspected or its movement. Typically, the rotational error of the pixel array must not exceed one pixel or even less. To achieve this, the angular accuracy of the camera's target surface must be controlled within a few microradians, requiring stringent angular precision. Furthermore, after adjusting the camera to the required accuracy range, it must be locked promptly to ensure accurate positioning.
[0003] In related camera rotation adjustment devices, the camera is typically manually locked using a set screw after adjustment. However, manual locking generates a certain amount of rotational displacement, which significantly impacts wafer pattern inspection where angular accuracy requirements are within a few micro-radians, thus affecting the accuracy of wafer pattern inspection. Summary of the Invention
[0004] In view of this, the present invention provides a locking component, a camera adjustment device, and a detection device to at least solve the problem of large rotational displacement when locking the locking component of a conventional camera.
[0005] On one hand, embodiments of the present invention provide a locking assembly for locking a rotating member, comprising:
[0006] The fixing plate has a through anti-rotation guide hole;
[0007] An anti-rotation connecting shaft is inserted into an anti-rotation guide hole. The anti-rotation connecting shaft and the anti-rotation guide hole are in a non-rotational fit, and the anti-rotation connecting shaft can move along the axial direction of the anti-rotation guide hole.
[0008] A clamping component is connected to one end of the anti-rotation connecting shaft. The clamping component and one side surface of the fixed plate cooperate to form a clamping space for accommodating the rotating component.
[0009] A tightening member is connected to the other end of the anti-rotation connecting shaft. The tightening member abuts against the other side surface of the fixing plate. When the tightening member is tightened, it can move along the anti-rotation connecting shaft toward the clamping member.
[0010] In some embodiments, the anti-rotation connecting shaft has a first anti-rotation member located on the outer periphery, and the anti-rotation guide hole has a second anti-rotation member located on the inner wall;
[0011] The anti-rotation fit between the anti-rotation connecting shaft and the anti-rotation guide hole is achieved through the following structure: the first anti-rotation component is a flat key protruding from the outer circumferential surface of the anti-rotation connecting shaft, and the second anti-rotation component is a guide groove recessed in the inner wall of the anti-rotation guide hole, with the flat key placed in the guide groove;
[0012] or,
[0013] The first anti-rotation component is a protruding ridge on the outer peripheral surface of the anti-rotation connecting shaft, and the second anti-rotation component is a guide groove recessed in the inner wall of the anti-rotation guide hole, with the protruding ridge placed in the guide groove.
[0014] or,
[0015] The first anti-rotation component is a guide groove recessed on the outer circumferential surface of the anti-rotation connecting shaft, and the second anti-rotation component is a protruding ridge protruding from the inner wall of the anti-rotation guide hole, with the ridge placed in the guide groove.
[0016] In some embodiments, the clamping member includes:
[0017] The first screw connecting one end of the anti-rotation connecting shaft;
[0018] A first washer, a flexible member, and a second washer are sequentially fitted onto the first screw. The first washer and the second washer are spaced apart and respectively abut against the flexible member.
[0019] In some embodiments, the tightening element includes:
[0020] The second screw connects to the other end of the anti-rotation connecting shaft;
[0021] A third washer is fitted onto the second screw, and the third washer abuts against the second screw. When the second screw is tightened, the second screw can drive the third washer to move toward the clamping part.
[0022] On the other hand, embodiments of the present invention also provide a camera adjustment device, comprising:
[0023] The aforementioned locking components;
[0024] The rotating component is used to mount the camera and can be locked and fixed to the mounting plate by a locking assembly.
[0025] In some embodiments, the camera adjustment device further includes an axial clamping member connected to the fixed plate;
[0026] The axial clamping component makes contact with the side of the rotating component opposite to the fixed plate along the axial direction of the rotating component.
[0027] In some embodiments, the camera adjustment device further includes a first radial support and a second radial clamping member connected to the fixed plate;
[0028] The first radial support member rolls and abuts against the lower arc-shaped outer circumferential surface of the rotating member along the radial direction of the rotating member;
[0029] The second radial clamping member rolls and abuts against the upper arc-shaped outer circumference of the rotating member along the radial direction of the rotating member.
[0030] In some embodiments, there are at least two first radial supports, and the resultant force of the supporting force of the first radial supports on the rotating member points towards the second first radial support.
[0031] In some embodiments, the camera adjustment device further includes: a rotation adjustment component;
[0032] The rotary adjustment assembly includes an extension handle fixedly connected to the arc-shaped outer circumference of the rotating component, a fixed base fixedly connected to the fixed plate, and a micrometer connected to the fixed base.
[0033] When the micrometer rotates, it moves axially relative to the fixed base and provides rotational torque to the rotating part through the extension handle, so as to drive the rotating part to rotate relative to the fixed plate along the axis of the rotating part.
[0034] In another aspect, embodiments of the present invention also provide a detection device, comprising:
[0035] camera;
[0036] The aforementioned camera adjustment device;
[0037] The camera is connected to the rotating component in the camera adjustment device.
[0038] The locking assembly, camera adjustment device, and detection equipment of the present invention, through the anti-rotation connecting shaft and the anti-rotation guide hole in the locking assembly, can ensure that the locking assembly only transmits axial pressure to the rotating part during the locking process after the camera rotation adjustment is completed, without generating rotational torque, thereby ensuring that the rotating part does not generate additional rotational displacement and avoiding the impact of the locking process on the rotation adjustment accuracy of the camera. Attached Figure Description
[0039] The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the invention and, together with the description, serve to explain the principles of the invention. It is obvious that the drawings described below are merely some embodiments of the invention, and those skilled in the art can obtain other drawings based on these drawings without any inventive effort.
[0040] Figure 1 This is an assembly diagram of a locking component provided in an embodiment of the present invention;
[0041] Figure 2 yes Figure 1 Schematic diagram of the middle fixing plate;
[0042] Figure 3 This is a schematic diagram of the structure of a guide shaft support provided in an embodiment of the present invention;
[0043] Figure 4 yes Figure 3 A schematic diagram of the anti-rotation fit between the guide shaft support and the anti-rotation connecting shaft;
[0044] Figure 5 yes Figure 3 A schematic diagram of the cross-section of the guide shaft support and the anti-rotation connecting shaft in the middle;
[0045] Figure 6 This is an exploded view of another locking component provided in an embodiment of the present invention;
[0046] Figure 7 yes Figure 6 Assembly diagram of the clamping component;
[0047] Figure 8 This is a front perspective view of a camera adjustment device provided in an embodiment of the present invention;
[0048] Figure 9 yes Figure 8 A three-dimensional structural diagram of the rear of the camera adjustment device;
[0049] Figure 10 yes Figure 8 Front view of the camera adjustment device;
[0050] Figure 11 This is a schematic diagram of the structure of an axial clamping member provided in an embodiment of the present invention;
[0051] Figure 12 yes Figure 8 Left view of the camera adjustment device;
[0052] Figure 13 yes Figure 8 Front view of the central camera adjustment device axial clamping component when not assembled;
[0053] Figure 14 This is a schematic diagram of the structure of a first radial support member provided in an embodiment of the present invention;
[0054] Figure 15 This is a schematic diagram of the structure of a second radial clamping member provided in an embodiment of the present invention;
[0055] Figure 16 This is a schematic diagram of the structure of a detection device provided in an embodiment of the present invention;
[0056] Figure 17 This is a schematic diagram of the assembly of the locking component and the camera of the present invention.
[0057] Figure label:
[0058] 100. Locking assembly; 110. Fixing plate; 111. Anti-rotation guide hole; 112. Second anti-rotation component; 113. Guide shaft support; 120. Anti-rotation connecting shaft; 121. First anti-rotation component; 130. Clamping component; 131. First screw; 132. First washer; 133. Flexible component; 134. Second washer; 140. Tightening component; 141. Second screw; 142. Third washer; 200. Camera adjustment device; 210. Rotating component; 220. 221. Axial clamping component; 222. First ball head; 223. First compression spring; 230. First radial support component; 231. Screw; 232. Inner shaft; 233. Rolling element; 234. Outer ring; 240. Second radial clamping component; 241. Second ball head; 242. Second compression spring; 250. Rotary adjustment assembly; 251. Extension handle; 252. Fixing base; 253. Micrometer; 300. Testing equipment; 310. Camera. Detailed Implementation
[0059] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that the invention will be thorough and complete, and will fully convey the concept of the exemplary embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and therefore repeated descriptions of them will be omitted.
[0060] The use of terms such as "first," "second," and similar terms in the specific description does not indicate any order, quantity, or importance, but is merely used to distinguish different components. Furthermore, in the description of this invention, terms such as "upper," "lower," etc., indicate orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings. These are merely for ease of description and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation; therefore, they should not be construed as limitations on the invention.
[0061] It should be noted that, unless otherwise specified, the embodiments of the present invention and the features in different embodiments can be combined with each other.
[0062] Through meticulous and in-depth research, the inventors of this invention have provided a solution to the problems existing in the prior art. This invention provides a locking assembly, a camera adjustment device, and a detection device. The locking assembly, used to lock a rotating component, includes: a fixed plate with a through anti-rotation guide hole; an anti-rotation connecting shaft inserted into the anti-rotation guide hole, the anti-rotation connecting shaft and the anti-rotation guide hole having an anti-rotation fit, and the anti-rotation connecting shaft being movable along the axial direction of the anti-rotation guide hole; a clamping member connected to one end of the anti-rotation connecting shaft, the clamping member engaging with one side surface of the fixed plate to form a clamping space for accommodating the rotating component; and a tightening member connected to the other end of the anti-rotation connecting shaft, the tightening member abutting against the other side surface of the fixed plate, and when the tightening member is tightened, the tightening member is movable along the anti-rotation connecting shaft towards the clamping member. The locking assembly, camera adjustment device, and detection equipment of the present invention, through the anti-rotation connecting shaft and the anti-rotation guide hole in the locking assembly, can ensure that the locking assembly only transmits axial pressure to the rotating part during the locking process after the camera rotation adjustment is completed, without generating rotational torque, thereby ensuring that the rotating part does not generate additional rotational displacement and avoiding the impact of the locking process on the rotation adjustment accuracy of the camera.
[0063] The above is the core idea of this invention. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention. The technical solutions in the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings.
[0064] like Figure 1 As shown, in one aspect, an embodiment of the present invention provides a locking assembly 100 for locking a rotating member 210, comprising: a fixing plate 110, an anti-rotation connecting shaft 120, a clamping member 130, and a tightening member 140.
[0065] Specifically, such as Figure 1 and Figure 2 As shown, the fixing plate 110 has a through anti-rotation guide hole 111. The anti-rotation guide hole 111 has an anti-rotation structure for engaging with the anti-rotation connecting shaft 120 to prevent rotation, ensuring that the anti-rotation connecting shaft 120 and the anti-rotation guide hole 111 only have axial relative displacement during the locking process of the locking assembly 100, and no rotational displacement. Furthermore, the fixing plate 110 is generally rectangular, with another square hole in the center for the camera 310 to pass through, and a gap is left when the camera 310 passes through the square hole.
[0066] Furthermore, such as Figure 1 , Figure 3 and Figure 4As shown, the fixing plate 110 may further include a guide shaft support 113, which has a through anti-rotation guide hole 111. The fixing plate 110 also has a through hole, in which the guide shaft support 113 is disposed and locked to the main body of the fixing plate 110. The end face of the guide shaft support 113 may have multiple through holes for a locking member to pass through and lock the guide shaft support 113 and the main body of the fixing plate 110. Specifically, the aforementioned through holes may be threaded holes, and the locking member may be a screw. The anti-rotation guide hole 111 of different guide shaft supports 113 may have different shapes. The fixing plate 110 can detachably lock different guide shaft supports 113 according to different locking members, so as to cooperate with different anti-rotation connecting shafts 120 to prevent rotation and improve the versatility of the fixing plate 110.
[0067] In some alternative embodiments, the fixing plate 110 may also not include the guide shaft support 113, and the through anti-rotation guide hole 111 is integrally provided on the fixing plate 110 to simplify the preparation of the fixing plate 110.
[0068] Specifically, the anti-rotation connecting shaft 120 is inserted into the anti-rotation guide hole 111. The anti-rotation connecting shaft 120 has another anti-rotation structure for cooperating with the anti-rotation guide hole 111, so that the anti-rotation connecting shaft 120 and the anti-rotation guide hole 111 have a non-rotational fit. The anti-rotation guide hole 111 of the fixing plate 110 forms an axially extending channel inside for accommodating the anti-rotation connecting shaft 120. The cross-sectional shape of the anti-rotation connecting shaft 120 matches the cross-sectional shape of the channel inside the anti-rotation guide hole 111, so that the anti-rotation connecting shaft 120 can move along the axial direction of the anti-rotation guide hole 111.
[0069] Specifically, the clamping member 130 is connected to one end of the anti-rotation connecting shaft 120. The clamping member 130 and one side surface of the fixing plate 110 cooperate to form a clamping space for accommodating the rotating member 210. Since the rotating member 210 is an annular structure with a through hole in the center, the clamping space is also annular, so that the rotating member 210 is sleeved on the anti-rotation connecting shaft 120, and the two sides of the rotating member 210 abut against the clamping member 130 and the fixing plate 110 respectively. The clamping member 130 can be entirely rigid, or entirely or partially flexible.
[0070] Specifically, the tightening member 140 connects to the other end of the anti-rotation connecting shaft 120. The tightening member 140 abuts against the opposite surface of the fixing plate 110 and the rotating member 210. Further, the tightening member 140 abuts against the end face of the guide shaft support 113 of the fixing plate 110 near the tightening member 140. This end face may protrude from the opposite surface of the fixing plate 110 and the rotating member 210, or it may be flush with the opposite surface of the fixing plate 110 and the rotating member 210. When the tightening member 140 is tightened, the tightening member 140 can move along the anti-rotation connecting shaft 120 toward the clamping member 130 to lock the rotating member 210 to the fixing plate 110. By using the anti-rotation connecting shaft 120 in the locking assembly 100 to prevent rotation with the anti-rotation guide hole 111, the locking assembly 100 can always transmit axial pressure to the rotating part 210 during the locking process after the camera 310 has been rotated and adjusted, without generating rotational torque. This ensures that the rotating part 210 does not generate additional rotational displacement and avoids affecting the rotation adjustment accuracy of the camera 310 during the locking process.
[0071] Furthermore, the locking operation of the tightening member 140, which is also the locking process of the locking assembly 100, can be achieved simply by using a wrench or screwdriver without any additional operation. This reduces the difficulty of locking the locking assembly 100 and saves locking time, thereby reducing the adjustment time of the camera 310.
[0072] like Figure 3 , Figure 4 and Figure 5 As shown, in some embodiments, the anti-rotation connecting shaft 120 has a first anti-rotation member 121 located on its outer periphery, and the anti-rotation guide hole 111 has a second anti-rotation member 112 located on its inner wall. The anti-rotation fit between the anti-rotation connecting shaft 120 and the anti-rotation guide hole 111 can be achieved by the following structure: the first anti-rotation member 121 is a flat key protruding from the outer peripheral surface of the anti-rotation connecting shaft 120, and the second anti-rotation member 112 is a guide groove recessed in the inner wall of the anti-rotation guide hole 111, with the flat key placed in the guide groove. Specifically, the outer peripheral surface of the anti-rotation connecting shaft 120 has a keyway, and the flat key is embedded in the keyway of the anti-rotation connecting shaft 120. The width of the flat key is equal to the width of both the guide groove and the keyway, and the flat key can slide axially within the guide groove of the guide shaft support 113. Due to the anti-rotation fit between the flat key and the guide groove, the anti-rotation connecting shaft 120 can only move axially during the locking process without rotation, thereby ensuring that the rotating member 210 does not generate additional rotational displacement. Furthermore, the keyway that matches the flat key can be located between the screw holes on both sides of the anti-rotation connecting shaft 120 to improve the structural strength of the anti-rotation connecting shaft 120.
[0073] In some alternative embodiments, the anti-rotation fit between the anti-rotation connecting shaft 120 and the anti-rotation guide hole 111 can also be achieved through the following structure: the first anti-rotation member 121 is a protruding ridge on the outer peripheral surface of the anti-rotation connecting shaft 120, and the second anti-rotation member 112 is a guide groove recessed in the inner wall of the anti-rotation guide hole 111, with the protruding ridge placed in the guide groove. Specifically, the protruding ridge of the anti-rotation connecting shaft 120 is integrally formed with the anti-rotation connecting shaft 120, the width of the protruding ridge is equal to the width of the guide groove, and the protruding ridge can slide axially within the guide groove of the guide shaft support 113. Due to the anti-rotation fit between the protruding ridge and the guide groove, the anti-rotation connecting shaft 120 can only move axially during the locking process without rotation, thereby ensuring that the rotating member 210 does not generate additional rotational displacement.
[0074] In some alternative embodiments, the anti-rotation fit between the anti-rotation connecting shaft 120 and the anti-rotation guide hole 111 can also be achieved through the following structure: the first anti-rotation member 121 is a guide groove recessed on the outer peripheral surface of the anti-rotation connecting shaft 120, and the second anti-rotation member 112 is a protruding ridge protruding from the inner wall of the anti-rotation guide hole 111, with the ridge placed in the guide groove. Specifically, the ridge of the anti-rotation guide hole 111 is integrally formed with the anti-rotation guide hole 111, the width of the ridge is equal to the width of the guide groove, and the ridge can slide axially within the guide groove of the guide shaft support 113. Due to the anti-rotation fit between the ridge and the guide groove, the anti-rotation connecting shaft 120 can only move axially during the locking process without rotation, thereby ensuring that the rotating member 210 does not generate additional rotational displacement.
[0075] In some alternative embodiments, the anti-rotation fit between the anti-rotation connecting shaft 120 and the anti-rotation guide hole 111 can also be achieved through the following structure: the cross-sections of the anti-rotation connecting shaft 120 and the anti-rotation guide hole 111 are non-circular. For example, the cross-sections of the anti-rotation connecting shaft 120 and the anti-rotation guide hole 111 can be rectangular, rhomboid, triangular, trapezoidal, or star-shaped, and the dimensions of the cross-sections of the anti-rotation connecting shaft 120 and the anti-rotation guide hole 111 are also the same. This also ensures that during the locking process, the anti-rotation connecting shaft 120 only moves axially and does not rotate, thereby ensuring that the rotating component 210 does not generate additional rotational displacement.
[0076] like Figure 1 , Figure 6 and Figure 7 As shown, in some embodiments, the clamping member 130 includes: a first screw 131, a first washer 132, a flexible member 133, and a second washer 134.
[0077] Specifically, the first screw 131 is connected to one end of the anti-rotation connecting shaft 120. The first screw 131 can be a stepped screw, with its radial width divided into three steps that gradually decrease along the direction close to the rotating member 210. The first washer 132, the flexible member 133, and the second washer 134 are sequentially fitted onto the middle step of the first screw 131, while the steps on both sides are screwed into one end of the anti-rotation connecting shaft 120 and abut against the first washer 132, respectively.
[0078] Specifically, the first washer 132 and the second washer 134 are spaced apart and abut against the flexible member 133 respectively. The first washer 132 and the second washer 134 can be made of rigid material. The first washer 132 can be a recessed washer, the flexible member 133 can be a wave spring washer, and the second washer 134 can be a compression washer. The recess of the recessed washer faces the compression washer, and the inner edge of the recessed washer is larger than the outer diameter of the wave spring washer, allowing the wave spring washer to be fully compressed radially within the inner ring of the recessed washer. The wave spring washer is partially located in the recess along the axial direction and partially protrudes from the recess. The recessed washer and the compression washer are spaced apart by the wave spring washer and abut against it respectively. The wave-shaped elastic washer has a certain amount of compression, and the recessed washer and the clamping washer have a certain amount of gap. When the locking assembly 100 is initially installed, the recessed washer and the clamping washer do not directly contact each other, thereby preventing the rotational torque of the recessed washer from being directly transmitted to the clamping washer, and thus preventing the rotating part 210 from generating additional rotational displacement.
[0079] Continue to refer to Figure 1 and Figure 6 In some embodiments, the tightening member 140 includes a second screw 141 and a third washer 142. Specifically, the second screw 141 is connected to the other end of the anti-rotation connecting shaft 120 opposite to the first screw 131. The second screw 141 is a locking screw, and the third washer 142 is fitted onto the second screw 141. The third washer 142 makes abutting contact with the second screw 141. Furthermore, the third washer 142 can be a circular washer and can be made of rigid or flexible material. When the second screw 141 is tightened, the second screw 141 can drive the third washer 142 to move towards the clamping member 130.
[0080] Understandably, when the wrench begins to tighten the second screw 141, the third washer 142 will come close to the end face of the guide shaft support 113, causing the anti-rotation guide shaft to move along the anti-rotation guide hole 111 of the guide shaft support 113. The anti-rotation guide shaft first transmits the locking force through the flexible member 133, causing the second washer 134 to come into contact with the rotating member 210. Due to the rotational torque, one side of the rotational torque direction of the first anti-rotation member 121 of the anti-rotation guide shaft will contact and abut against one side of the second anti-rotation member 112 of the anti-rotation guide hole 111, while the other side of the two contacts but does not generate force, causing the guide shaft to move only axially and not transmit rotational torque to the rotating member 210. Simultaneously, due to the compression of the flexible component 133, pressure exists between the first washer 132, the flexible component 133, the second washer 134, the rotating component 210, the fixing plate 110, and the third washer 142. This generates friction, preventing the first anti-rotation component 121 and its mating side from separating. When the first washer 132 is a recessed washer, as the second screw 141 is tightened further, the anti-rotation guide shaft will be tightly pressed against the second washer 134 through the outer edge of the recessed washer. Since one side of the first anti-rotation component 121 of the anti-rotation guide shaft is always tightly pressed against the second anti-rotation component 112 of the anti-rotation guide hole 111, when the wrench applies a tightening torque, the anti-rotation guide shaft can only continue to move axially without rotation, thus ensuring that the rotating component 210 does not generate additional rotational displacement.
[0081] Due to manufacturing errors, there may be a slight gap between the first anti-rotation component 121 of the anti-rotation guide shaft and the second anti-rotation component 112 of the anti-rotation guide hole 111. Therefore, when the second screw 141 is tightened, the first anti-rotation component 121 does not contact the anti-rotation guide hole 111 side, and the anti-rotation guide shaft may still rotate to some extent. At this time, the torque of the rotation of the anti-rotation guide shaft is transmitted to the first washer 132 through the first screw 131. When the rotational torque is transmitted from the first washer 132 to the second washer 134 through the flexible component 133, since the flexible component 133 is a flexible material, the torque transmitted to the flexible component 133 will be converted into the deformation of the flexible component 133 itself. As a result, the second washer 134 is not affected by the rotational torque or the rotational torque it receives is minimal, thereby reducing or even avoiding additional rotational displacement of the rotating component 210.
[0082] As the locking action continues, the first anti-rotation component 121 of the anti-rotation guide shaft and the second anti-rotation component 112 of the anti-rotation guide hole 111 are pressed together on one side. At this time, the anti-rotation guide shaft no longer rotates, and the locking torque directly drives the second screw 141 to rotate, so that the second screw 141 is screwed into the anti-rotation guide shaft, thereby reducing the gap between the third washer 142 and the second washer 134, and achieving the pressing of the rotating component 210.
[0083] Therefore, the locking assembly 100 of the present invention, through the anti-rotation connection between the anti-rotation connecting shaft 120 and the anti-rotation guide hole 111, ensures that during the locking process after the camera 310 has been rotated and adjusted, the locking assembly 100 always transmits axial pressure to the rotating component 210 without generating rotational torque, thereby ensuring that the rotating component 210 does not generate additional rotational displacement. Furthermore, since the camera 310 and the locking assembly are locked together, the locking process avoids affecting the rotational adjustment accuracy of the camera 310. Moreover, the locking process only requires tightening the second screw 141 with a wrench or screwdriver, which reduces the difficulty of locking the locking assembly 100 and saves locking time, thus reducing the adjustment time of the camera 310.
[0084] like Figure 8 and Figure 9 As shown, in another aspect, embodiments of the present invention also provide a camera adjustment device 200, including the aforementioned locking assembly 100 and rotating member 210.
[0085] Specifically, the specific implementation of the locking assembly 100 can be referred to the aforementioned embodiments, and will not be repeated here. The main body of the rotating component 210 is an annular ring with a central through hole. The inner surface of the annular ring with the central through hole of the rotating component 210 has a through threaded hole for screwing with the camera 310. The rotating component 210 is used to mount the camera 310, and the rotating component 210 can be locked and fixed to the fixing plate 110 by the locking assembly 100. Since the locking assembly 100 only transmits axial pressure to the rotating component 210 and does not generate rotational torque, it ensures that the rotating component 210 does not generate additional rotational displacement. Furthermore, since the camera 310 and the rotating component 210 are locked together, the locking process avoids affecting the rotation adjustment accuracy of the camera 310.
[0086] In the field of wafer pattern inspection, it is often necessary to align the pixel array of the camera 310 with the direction of the wafer being inspected or its movement. Typically, the rotation error of the pixel array must not exceed one pixel or even less. To achieve this, the angular accuracy of the camera 310 target surface must be controlled within a few micro-radians, requiring stringent angular precision. However, in related camera 310 rotation adjustment devices, the camera 310 is usually rotated manually via a circular dovetail groove connected to it. This method has relatively poor adjustment accuracy, impacting the inspection accuracy of the wafer image.
[0087] To achieve high-precision adjustment of the camera 310's rotation angle, such as Figure 8 and Figure 10As shown, in some embodiments, the camera adjustment device 200 further includes an axial clamping member 220 connected to the fixed plate 110. Specifically, the camera adjustment device 200 also includes an axial clamping platform 221 screwed to the fixed plate 110. The axial clamping platform 221 has a table surface opposite to the side of the rotating member 210 facing away from the fixed plate 110, and the axial clamping member 220 is disposed on the table surface. The axial clamping member 220 is connected to the axial clamping platform 221. The axial clamping member 220 abuts against the side of the rotating member 210 facing away from the fixed plate 110 along the axial direction of the rotating member 210, applying axial pressure to the rotating member 210, so that the rotating member 210 is tightly attached to the fixed plate 110, achieving axial positioning, preventing the rotating member 210 from overturning due to external forces such as gravity, and preventing the rotating member 210 from having displacement other than rotation, thereby affecting the adjustment accuracy of the camera 310. Optionally, the camera adjustment device 200 includes three or more non-collinear axial clamping members 220 to axially clamp and position the rotating member 210. If there are fewer than three, it cannot be completely ensured that the rotating member 210 is tightly attached to the fixed plate 110 under the action of gravitational torque. The axial clamping members 220 are evenly or symmetrically distributed relative to the rotating member 210 to avoid uneven force on the rotating member 210, which would affect the accuracy of the rotation adjustment of the rotating member 210 and the camera 310.
[0088] like Figure 11 As shown, in some embodiments, the axial clamping member 220 includes a first ball head 222 and a first compression spring 223. The first ball head 222 is located at the front end of the axial clamping member 220 and abuts against the side of the rotating member 210 opposite to the fixed plate 110, applying axial pressure to the rotating member 210. The first compression spring 223 is located inside the axial clamping member 220 and provides pressure to the first ball head 222.
[0089] like Figure 12As shown, it can be understood that the pressure of the axial clamping member 220 can be adjusted according to actual needs. The pressure of the first compression spring 223 on the first ball head 222 inside the axial clamping member 220 can be adjusted by rotating a wrench. When the rotating member 210 rotates, the first ball head 222 can rotate with the rotating member 210. The rotating member 210 and the first ball head 222 of the axial clamping member 220 perform rolling friction motion, which can reduce the friction between the two, thereby avoiding the "creeping effect" in sliding friction, improving the rotation adjustment accuracy of the rotating member 210 to the microradian (μrad) level, and thus improving the adjustment accuracy of the camera 310's rotation around the center of the camera 310 target surface. Here, the creeping effect specifically refers to the fact that, since the static friction coefficient is greater than the sliding friction coefficient, when the force overcomes the static friction and turns into sliding friction, the friction between the rotating member 210 and the axial clamping member 220 decreases instantaneously, thereby generating an instantaneous acceleration, causing the rotating member 210 to lurch forward, which will affect the minimum rotation adjustment radian of the rotating member 210.
[0090] like Figure 8 and Figure 13 As shown, in some embodiments, the camera adjustment device 200 further includes a first radial support 230 and a second radial clamping member 240 connected to the fixed plate 110.
[0091] Specifically, the first radial support 230 rolls and abuts against the lower arc-shaped outer circumferential surface of the rotating member 210 along its radial direction. Because the rotating member 210 abuts against the first radial support 230 under gravity, the first radial support 230 provides radial positioning preload to the rotating member 210. Optionally, there are two first radial supports 230, symmetrically distributed on both sides of the rotating member 210.
[0092] Specifically, the second radial clamping member 240 rolls and abuts against the upper arcuate outer peripheral surface of the rotating member 210 along the radial direction of the rotating member 210, providing radial pressure to the rotating member 210 and achieving radial limiting of the rotating member 210. Optionally, there is at least one second radial clamping member 240, distributed on the opposite side of the rotating member 210 away from the first radial support member 230. The cooperation between the first radial support member 230 and the second radial clamping member 240 can prevent the rotating member 210 from generating displacement other than rotation, thereby affecting the adjustment accuracy of the camera 310.
[0093] Continue to refer to Figure 8 and Figure 13The first radial support member 230 has at least two members, and the resultant force of the supporting force of the first radial support member 230 on the rotating member 210 points towards the second radial clamping member 240 to ensure that the rotating member 210 is in contact with the outer ring 234 of the first radial support member 230. In addition, the camera adjustment device 200 includes two axial clamping platforms 221 arranged vertically, and the second radial clamping member 240 is fixed to the upper axial clamping platform 221.
[0094] like Figure 14 As shown, in some embodiments, the first radial support 230 can be a cam bearing follower, including: a screw 231, an inner shaft 232, a rolling element 233, and an outer ring 234. The rolling element 233 can be a roller or a ball bearing. The screw 231 and the inner shaft 232 are arranged along the axial direction of the screw 231, which is screwed to the fixed plate 110. The outer ring 234 surrounds the outer periphery of the inner shaft 232, and the rolling element 233 is located between the outer ring 234 and the inner shaft 232, making rolling contact with both, so that the outer ring 234 can rotate relative to the inner shaft 232. The outer ring 234 makes rolling contact with the lower arcuate side of the rotating element 210. When the rotating component 210 rotates, the outer ring 234 of the first radial support 230 contacts the outer edge of the rotating component 210, causing the rotating component 210 and the first radial support 230 to perform relative rolling friction motion. This can reduce the friction between the two, thereby avoiding the "creeping effect" in sliding friction, improving the rotation adjustment accuracy of the rotating component 210 and the camera 310, and further improving the adjustment accuracy of the camera 310's rotation around the center of the camera 310 target surface.
[0095] like Figure 15 As shown, in some embodiments, the second radial clamping member 240 includes a second ball head 241 and a second compression spring 242. The second ball head 241 is located at the front end of the second radial clamping member 240 and rolls against the upper arcuate outer peripheral surface of the rotating member 210, applying radial pressure to the rotating member 210. The second compression spring 242 is located inside the axial clamping member 220 and provides pressure to the second ball head 241.
[0096] Continue to refer to Figure 12It is understandable that the pressure of the second radial clamping member 240 can be adjusted according to actual needs. The pressure of the second compression spring 242 on the second ball head 241 inside the second radial clamping member 240 can be adjusted by rotating a wrench. When the rotating member 210 rotates, the second ball head 241 can rotate with the rotating member 210. The rotating member 210 and the second ball head 241 of the second radial clamping member 240 perform rolling friction motion, which can reduce the friction between the two, thereby avoiding the "creeping effect" in sliding friction, improving the rotation adjustment accuracy of the rotating member 210, and thus improving the adjustment accuracy of the camera 310's rotation around the center of the camera 310 target surface.
[0097] Continue to refer to Figure 8 , Figure 10 and Figure 13 The camera adjustment device 200 further includes a rotation adjustment assembly 250. The rotation adjustment assembly 250 includes an extension handle 251, a fixed base 252, and a micrometer 253. The extension handle 251 is screwed to the arc-shaped outer circumference of the rotating component 210, the fixed base 252 is screwed to the fixed plate 110, and the micrometer 253 is connected to the fixed base 252. When the micrometer 253 rotates, it moves axially relative to the fixed base 252 and provides rotational torque to the rotating component 210 via the extension handle 251, causing the rotating component 210 to rotate relative to the fixed plate 110 along its axis. The outer circle of the rotating component 210 is concentric with the center of the camera 310 target surface. The micrometer 253 improves the rotation adjustment accuracy of the rotating component 210, thereby improving the adjustment accuracy of the camera 310's rotational movement around the center of the camera 310 target surface.
[0098] The camera adjustment device 200 of the present invention, through the locking assembly 100, always transmits axial pressure to the rotating member 210 without generating rotational torque, thereby ensuring that the rotating member 210 does not generate additional rotational displacement, thus avoiding the impact of the locking process on the rotation adjustment accuracy of the camera 310; at the same time, the locking process only requires tightening the second screw 141 with a wrench or screwdriver, which can reduce the locking difficulty of the locking assembly 100 and save locking time, thereby reducing the adjustment time of the camera 310; during the rotation adjustment process, since the axial clamping member 220, the first radial support member 230 and the second radial clamping member 240 respectively perform rolling friction motion with the rotating member 210, the "creeping effect" in sliding friction is avoided, improving the rotation adjustment accuracy of the rotating member 210 and the camera 310, thereby improving the adjustment accuracy of the camera 310's rotational motion around the center of the camera 310 target surface; at the same time, the axial clamping member 220 and the second radial clamping member 240 only need to be tightened with a wrench, which can reduce the locking difficulty of the camera adjustment device 200 and reduce the adjustment time of the camera 310.
[0099] like Figure 16 and Figure 17 As shown, in another aspect, embodiments of the present invention also provide a detection device 300, including a camera 310 and the aforementioned camera adjustment device 200. The camera 310 is connected to the rotating component 210 in the camera adjustment device 200. Specific implementations of the camera adjustment device 200 are described in the foregoing embodiments and will not be repeated here. The technical effects of the detection device 300 of the present invention can be seen in the foregoing camera adjustment device 200 and will not be repeated here.
[0100] In summary, the locking assembly, camera adjustment device, and detection equipment of the present invention, through the anti-rotation connection shaft and the anti-rotation guide hole in the locking assembly, can ensure that the locking assembly only transmits axial pressure to the rotating part during the locking process after the camera rotation adjustment is completed, without generating rotational torque, thereby ensuring that the rotating part does not generate additional rotational displacement and avoiding the impact of the locking process on the rotation adjustment accuracy of the camera.
[0101] The above description, in conjunction with specific optional embodiments, provides a further detailed explanation of the present invention. It should not be construed that the specific implementation of the present invention is limited to these descriptions. For those skilled in the art, various simple deductions or substitutions can be made without departing from the concept of the present invention, and all such modifications and substitutions should be considered within the scope of protection of the present invention.
Claims
1. A locking assembly for locking a rotating component, characterized in that, include: A fixing plate, wherein the fixing plate is provided with a through anti-rotation guide hole; An anti-rotation connecting shaft is inserted into the anti-rotation guide hole, the anti-rotation connecting shaft and the anti-rotation guide hole are in a non-rotational fit, and the anti-rotation connecting shaft can move along the axial direction of the anti-rotation guide hole; A clamping member is connected to one end of the anti-rotation connecting shaft. The clamping member cooperates with one side surface of the fixing plate to form a clamping space for accommodating the rotating part. A tightening member is connected to the other end of the anti-rotation connecting shaft. The tightening member abuts against the other side surface of the fixing plate. When the tightening member is tightened, the tightening member can move along the anti-rotation connecting shaft toward the clamping member.
2. The locking assembly according to claim 1, characterized in that, The anti-rotation connecting shaft has a first anti-rotation component located on the outer periphery, and the anti-rotation guide hole has a second anti-rotation component located on the inner wall; The anti-rotation connection between the anti-rotation connecting shaft and the anti-rotation guide hole is achieved by the following structure: the first anti-rotation component is a flat key protruding from the outer peripheral surface of the anti-rotation connecting shaft, and the second anti-rotation component is a guide groove recessed in the inner wall of the anti-rotation guide hole, with the flat key placed in the guide groove; or, The first anti-rotation component is a protruding ridge on the outer peripheral surface of the anti-rotation connecting shaft, and the second anti-rotation component is a guide groove recessed in the inner wall of the anti-rotation guide hole, with the protruding ridge placed in the guide groove; or, The first anti-rotation component is a guide groove recessed on the outer peripheral surface of the anti-rotation connecting shaft, and the second anti-rotation component is a protruding ridge protruding from the inner wall of the anti-rotation guide hole, with the protruding ridge placed in the guide groove.
3. The locking assembly according to claim 1, characterized in that, The clamping element includes: The first screw connecting one end of the anti-rotation connecting shaft; A first washer, a flexible member, and a second washer are sequentially fitted onto the first screw. The first washer and the second washer are spaced apart and respectively abut against the flexible member.
4. The locking assembly according to claim 1, characterized in that, The tightening component includes: The second screw connecting the other end of the anti-rotation connecting shaft; A third washer is fitted onto the second screw, and the third washer abuts against the second screw. When the second screw is tightened, the second screw can drive the third washer to move toward the clamping member.
5. A camera adjustment device, characterized in that, include: The locking assembly according to any one of claims 1 to 4; A rotating component for mounting a camera, the rotating component being able to be locked and fixed to the mounting plate by the locking assembly.
6. The camera adjustment device according to claim 5, characterized in that, The camera adjustment device also includes an axial clamping member connected to the fixed plate; The axial clamping member abuts against the side of the rotating member opposite to the fixed plate along the axial direction of the rotating member.
7. The camera adjustment device according to claim 6, characterized in that, The camera adjustment device further includes a first radial support and a second radial clamping member connected to the fixed plate; The first radial support member rolls and abuts against the lower arc-shaped outer circumferential surface of the rotating member along the radial direction of the rotating member; The second radial clamping member rolls and abuts against the upper arc-shaped outer peripheral surface of the rotating member along the radial direction of the rotating member.
8. The camera adjustment device according to claim 7, characterized in that, The first radial support member has at least two members, and the resultant force of the supporting force of the first radial support member on the rotating member points towards the second radial clamping member.
9. The camera adjustment device according to claim 5, characterized in that, The camera adjustment device further includes: a rotation adjustment component; The rotary adjustment assembly includes an extension handle fixedly connected to the arc-shaped outer circumferential surface of the rotating component, a fixed base fixedly connected to the fixed plate, and a micrometer connected to the fixed base. When the micrometer rotates, it moves axially relative to the fixed base and provides rotational torque to the rotating component through the extension handle, thereby driving the rotating component to rotate relative to the fixed plate along the axis of the rotating component.
10. A testing device, characterized in that, include: camera; The camera adjustment device according to any one of claims 5 to 9; The camera is connected to the rotating component in the camera adjustment device.