A large range high-precision three-dimensional four-beam resonant quartz sensor

Abstract

The application relates to the field of sensors, and aims to solve the problem of a small measuring range of a quartz sensor, and provides a large-range high-precision three-dimensional four-beam resonant quartz sensor, which comprises a quartz fixing block and a plurality of quartz resonant pieces; the quartz resonant pieces are arranged in a ring between the two quartz fixing blocks with the center of the end face of the quartz fixing block as a reference and are connected with the quartz fixing block; the quartz fixing block is provided with electrode leading-out pieces, the inner and outer sides of the quartz resonant pieces are provided with electrode pieces, and the two electrode pieces on the same quartz resonant piece are connected with different electrode leading-out pieces. The verticality of assembly can be guaranteed, the quartz resonant pieces are assembled in multiple directions, the sensor does not deviate when subjected to a large pressure, the measuring range of the sensor is improved by 10 times, there is no amplitude at the edge of the sensor, the standing wave effect is obvious, the energy dissipation is low, the frequency change is still very stable even when a tiny force acts, the sensor has high discrimination, and high-precision measurement is realized.

Description

Technical Field

[0001] This invention relates to the field of sensors, and more specifically, to a large-range, high-precision, three-dimensional four-beam resonant quartz sensor. Background Technology

[0002] Single-crystal quartz, due to its high Q value, possesses characteristics such as fast response frequency, good long-term stability, small temperature drift, and high temperature resistance, making it widely used in high-standard and high-requirement environments involving high temperature, high pressure, and high precision measurements. The high Q value of a material refers to its performance index of lower energy loss and more significant resonance characteristics at a specific frequency, typically used to measure the efficiency and stability of components such as inductors and resonators. However, due to the piezoelectric properties of quartz, it is a passive sensor, and a weak charge leakage occurs during measurement. Therefore, piezoelectric quartz sensors can only be used for dynamic measurements and cannot achieve static measurements. Later, resonant quartz sensors utilizing the inverse piezoelectric effect of quartz emerged. Because it also uses quartz material, most of the advantages of quartz are utilized. The alternating electric field causes the quartz material to vibrate, which solves the problem of static testing of quartz. However, the disadvantage is that because vibration is required, the thickness of quartz material is very thin (less than 1 mm), and a force is applied in the thickness direction. Therefore, the measurement range of quartz resonant sensors cannot be large, generally limited to a maximum range of 10-20 kg, and cannot achieve large range measurements of over 100 kg. Summary of the Invention

[0003] The purpose of this invention is to provide a large-range, high-precision three-dimensional four-beam resonant quartz sensor to solve the problem of the small measuring range of existing quartz sensors.

[0004] The embodiments of the present invention are achieved through the following technical solutions:

[0005] A high-precision, large-range, three-dimensional four-beam resonant quartz sensor includes: a quartz fixing block and several quartz resonant plates; with the center of the end face of the quartz fixing block as a reference, several quartz resonant plates are arranged in a ring between two quartz fixing blocks and connected to the quartz fixing blocks; the quartz fixing block is provided with electrode lead-out plates, and the inner and outer sides of the quartz resonant plates are provided with electrode plates, and two electrode plates on the same quartz resonant plate are connected to different electrode lead-out plates.

[0006] Preferably, the electrode lead-out sheet includes: an outer sheet and an inner sheet disposed opposite to each other on the inner and outer sides of the quartz fixing block, wherein the electrode sheet on the inner side of the quartz resonator is connected to the inner sheet, and the electrode sheet on the outer side of the quartz resonator is connected to the outer sheet.

[0007] Preferably, the edge of the outer sheet is connected to the edge of the inner sheet via a connector, and the connector abuts against or is connected to the side wall of the quartz fixing block.

[0008] Preferably, the outer sheet and the inner sheet are rectangular, and there are at least four connectors; one end of each connector is connected to a corner of the outer sheet, and the other end of each connector is connected to a corner of the inner sheet.

[0009] Preferably, the corner points of the outer sheet and the corner points of the inner sheet are positioned corresponding to each other on the horizontal plane.

[0010] Preferably, the electrode sheet is connected to the center of the edge of the electrode lead sheet.

[0011] Preferably, a gap is left between adjacent quartz resonators, and the connector passes through the gap.

[0012] Preferably, the quartz fixing block includes: a substrate and a boss connected to the inner side of the substrate, the end of the quartz resonator is connected to the substrate, and the inner sidewall of the quartz resonator is connected to the boss.

[0013] Preferably, the force direction of the quartz sensor is along the length direction of the quartz resonator.

[0014] Preferably, the quartz fixing block and the quartz resonator are connected by glass sintering; the sintering temperature is 800-900℃, the holding time is 8-12min, the heating rate is 1-3℃ / min, and the sintering atmosphere is nitrogen.

[0015] The present invention has at least the following beneficial effects:

[0016] This invention employs AT-cut quartz resonators and quartz fixing blocks, which are polished with high precision and have dimensional tolerances within 2µm. They are then sintered into a whole at high temperature to ensure the perpendicularity of the assembly. Furthermore, the quartz resonators are assembled in multiple directions to ensure that the sensor does not shift under significant pressure, thus increasing the sensor's measurement range by tens of times. The sensor has no amplitude at the edges, exhibits a significant standing wave effect, and has low energy dissipation, resulting in a very high quality factor (Q) and excellent stability. Even under minute forces, the frequency change remains very stable, thus the sensor has high discrimination power and achieves high-precision measurement. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the first structure of a quartz sensor;

[0019] Figure 2 This is a schematic diagram of the connection structure of the electrode sheets;

[0020] Figure 3 This is a schematic diagram of the second structure of a quartz sensor;

[0021] Figure 4 This is a force analysis diagram;

[0022] Reference numerals: 1-quartz fixing block, 11-substrate, 12-protrusion, 2-quartz resonator, 3-electrode lead-out plate, 31-outer plate body, 32-inner plate body, 33-connector, 4-electrode plate, 5-gap. Detailed Implementation

[0023] To make the objectives, methods, and advantages of the embodiments of the present invention clearer, the methods in the embodiments of the present invention will be clearly and completely described. Obviously, the described embodiments are some embodiments of the present invention, but not all embodiments.

[0024] Example 1: As Figure 1-3 As shown, a large-range, high-precision three-dimensional four-beam resonant quartz sensor includes: a quartz fixing block 1 and several quartz resonant plates 2; with the center of the end face of the quartz fixing block 1 as a reference, several quartz resonant plates 2 are arranged in a ring between two quartz fixing blocks 1 and connected to the quartz fixing blocks 1; the quartz fixing block 1 is provided with electrode lead-out plates 3, and the inner and outer sides of the quartz resonant plates 2 are provided with electrode plates 4, and two electrode plates 4 on the same quartz resonant plate 2 are connected to different electrode lead-out plates 3.

[0025] In specific implementation, the end face of the quartz fixing block 1 refers to... Figure 1 From a certain perspective, the upper or lower end face of the quartz fixing block 1. The end face of the quartz fixing block 1 can be square, with the center being the intersection of the diagonals of the square. Existing resonant quartz sensors utilizing the inverse piezoelectric effect of quartz utilize most of the advantages of quartz material. Furthermore, the use of an alternating electric field to couple the vibration of the quartz material solves the static testing problem. However, because vibration is required, and the thickness of the quartz resonator 2 used is very thin, typically less than 1 mm, and a force is applied in the thickness direction, the measurement range of the quartz resonant sensor cannot be large, generally limited to a maximum range of 10-20 kg, making it impossible to achieve a large range measurement of over 100 kg. Based on the foregoing, the applicant aims to conceive of a quartz sensor capable of achieving a large range measurement.

[0026] The main reason why a single-chip resonant sensor cannot measure high forces is that its installation cannot guarantee absolute perpendicularity, resulting in a slight angle. As the measured force gradually increases, the bending moment component becomes larger. Since the chip is thin and hard, it may break, preventing the measurement of a large range. This embodiment uses an AT-cut quartz resonant chip 2 and a quartz fixing block 1, which are polished with high precision, ensuring dimensional tolerances within 2µm. They are then sintered at high temperature to form a whole, guaranteeing the perpendicularity of the assembly. Furthermore, the quartz resonant chip 2 is assembled in multiple directions to ensure that the sensor does not shift under high pressure, thus increasing the sensor's measurement range by tens of times.

[0027] As an example, electrode sheet 4 and electrode lead sheet 3 can be made of materials with good conductivity, such as platinum, gold, silver and nickel.

[0028] As an example, electrode sheet 4 and electrode lead sheet 3 can be connected to the quartz by welding or bonding.

[0029] like Figure 1-2 As shown, opposing electrode plates 4 are arranged on the inner and outer sides of the quartz resonator 2. The two electrode plates 4 are connected to different electrode leads 3, and an alternating electric field is applied to achieve measurement. The measurement principle is as follows: When an alternating voltage is applied to the electrodes on both sides of the quartz crystal, the crystal vibrates mechanically due to the inverse piezoelectric effect. When the voltage frequency is close to the crystal's natural frequency, the vibration amplitude is at its maximum, forming a piezoelectric resonance. When external pressure is applied to the quartz resonator 2, stress is generated inside the crystal, causing changes in its thickness shear modulus or equivalent stiffness, thus shifting the resonant frequency. The frequency shift is linearly related to the pressure, and the pressure value can be easily obtained from the frequency shift.

[0030] Example 2: To simplify the manufacturing process of the quartz sensor, improvements were made based on Example 1, such as... Figure 3 As shown, in this embodiment, the electrode lead-out sheet 3 includes an outer sheet 31 and an inner sheet 32 ​​disposed opposite to each other on the inner and outer sides of the quartz fixing block 1. The electrode sheet 4 on the inner side of the quartz resonator 2 is connected to the inner sheet 32, and the electrode sheet 4 on the outer side of the quartz resonator 2 is connected to the outer sheet 31.

[0031] In practice, when a through hole is provided in the middle of the quartz fixing block 1, and a columnar lead-out electrode is placed in the through hole, the connection between the inner electrode of the quartz resonator 2 and the lead-out electrode can be easily achieved. However, the manufacturing process of the quartz sensor involves additional steps such as drilling the quartz fixing block 1 and installing and fixing the lead-out electrode, making the process more complicated. In addition, the quartz block is brittle, and in the field of sensors, structural defects in the quartz block can easily affect the detection accuracy, making drilling difficult. In this embodiment, the connection between the electrode sheet 4 and the electrode lead-out sheet 3 can be easily achieved by combining the outer sheet 31 and the inner sheet 32, and the drilling of the quartz block can be avoided.

[0032] Example 3: To increase the structural strength of the sensor and ensure an improved measurement range, improvements were made based on Example 2, such as... Figure 3 As shown, in this embodiment, the edge of the outer sheet 31 is connected to the edge of the inner sheet 32 ​​through the connecting body 33, and the connecting body 33 abuts against or connects to the side wall of the quartz fixing block 1.

[0033] In practice, the connector 33, outer sheet 31, and inner sheet 32 ​​can be made of the same material. The connector 33 can be tightly attached to the quartz fixing block 1, or it can be glued or welded to the quartz fixing block 1. The outer sheet 31, connector 33, and inner sheet 32 ​​can form a six-directional wrapping structure, covering the quartz fixing block 1 between the inner sheet 32 ​​and the outer sheet 31, and then the connector 33 restricts the relative displacement between the quartz fixing block 1, the inner sheet 32, and the outer sheet 31.

[0034] As an example, when the quartz fixing block 1 is subjected to oblique pressure, the outer plate 31 at the upper end is subjected to a horizontal component force in addition to the vertical downward force. The horizontal component force may affect the positional stability of the outer plate 31. However, under the constraints of the inner plate 32 and the connecting body 33, the possibility of displacement of the outer plate 31 due to the influence of the horizontal component force can be greatly reduced, thereby broadening the applicable scenarios of the quartz sensor and increasing the measurement range.

[0035] Example 4: To further improve the structural stability of the quartz sensor, improvements were made based on Example 3, such as... Figure 3 As shown, in this embodiment, the outer sheet 31 and the inner sheet 32 ​​are rectangular, and there are at least four connecting bodies 33; one end of the connecting body 33 is connected to the corner of the outer sheet 31, and the other end of the connecting body 33 is connected to the corner of the inner sheet 32.

[0036] In practical implementation, a corner point refers to the vertex of a certain corner of the outer sheet 31. When subjected to force, the outer sheet 31 may exhibit a rotational tendency. (See also...) Figure 4 When the connecting body 33 is connected to the midpoint of one side of the outer body 31, its rotation trend can be seen in the lower left figure. It only needs to break one connection point, while the other connection points are more subjected to compressive force than tensile force. Therefore, it can smoothly achieve the rotation of the outer body 31 without breaking. When the connecting body 33 is connected to the vertex of one corner of the outer body 31, its rotation trend can be seen in the lower right figure. It needs to break two connection points to achieve rotation. That is, the structure in the right figure has a higher restriction on the rotation of the outer body 31. While ensuring the stability of the quartz sensor, the outer body 31 can withstand higher forces, thereby increasing the range of the sensor.

[0037] Example 5: Figure 3As shown, in this embodiment, the corner points of the outer sheet 31 and the corner points of the inner sheet 32 ​​correspond to each other on the horizontal plane.

[0038] In practical implementation, the correspondence of positions on the horizontal plane means that when the quartz resonator 2 is placed vertically, the X-axis and Y-axis coordinates of the corner points of the outer plate 31 and the inner plate 32 are the same in the same coordinate system. When the corner point coordinates of the two plates correspond, the extension direction of the end of the connector 33 is consistent with the extension direction of the edge of the outer plate 31, which can improve the restraining strength of the connector 33 on the outer plate 31.

[0039] Example 6: To further improve the structural strength of the sensor, improvements were made based on Example 5, such as... Figure 2 As shown, in this embodiment, the electrode sheet 4 is connected to the center of the edge of the electrode lead-out sheet 3.

[0040] In the specific implementation process, after the electrode plate 4 is connected to one side of the electrode lead plate 3, it cooperates with the connecting body 33, making the positional stability of the outer plate body 31 stronger when subjected to force. Connecting the center of one side of the electrode plate 4 to the electrode lead plate 3 can improve the uniformity of force, thereby improving the performance uniformity of the outer plate body 31, thus improving the uniformity of current transmission between the electrode lead plate 3 and the four electrode plates 4. Ultimately, the vibration of each quartz resonator 2 tends to be consistent, with no amplitude at the sensor edge, obvious standing wave effect, and low energy dissipation, resulting in a very large quality factor Q value and excellent stability. Even under the action of a small force, the frequency change is still very stable, so the sensor has high discrimination power and achieves high-precision measurement.

[0041] Example 7: To further improve the detection accuracy of the quartz sensor, improvements were made based on Example 3, such as... Figure 1 As shown, in this embodiment, a gap 5 is left between adjacent quartz resonators 2, and the connector 33 passes through the gap 5.

[0042] In practice, four quartz resonators 2 can be used. Ideally, to increase the range of the quartz sensor, the width of the quartz resonators 2 should be as large as possible, meaning adjacent quartz resonators 2 should be as close as possible. However, since the detection accuracy of the quartz sensor is affected by temperature changes, to reduce the temperature difference between the inner and outer spaces of the quartz resonators 2 and improve heat dissipation, this embodiment provides a gap 5 between adjacent quartz resonators 2 to allow air circulation between the inner and outer spaces of the quartz resonators 2. Furthermore, a channel is provided for the connector 33 to connect with the inner plate body 32.

[0043] Example 8: To further increase the connection strength between the quartz fixing block 1 and the quartz resonator 2, improvements were made based on Example 1, such as... Figure 1As shown, in this embodiment, the quartz fixing block 1 includes: a base 11 and a boss 12 connected to the inner side of the base 11, the end of the quartz resonator 2 is connected to the base 11, and the inner sidewall of the quartz resonator 2 is connected to the boss 12.

[0044] In the specific implementation process, the addition of the boss 12 increases the connection points along the thickness direction of the quartz resonator 2. When the quartz resonator 2 is bent under force, the bending direction is along the thickness direction of the quartz resonator 2. Increasing the number of connection points along the thickness direction enhances the positional stability between the quartz resonator 2 and the quartz fixing block 1. Furthermore, the design of the boss 12 facilitates the positioning of the quartz resonator 2. When the quartz resonator 2 abuts against the side wall of the boss 12, its positioning is achieved. This not only facilitates its connection with the quartz fixing block 1 but also ensures the uniformity of the four quartz resonators 2's positions, improving the overall measurement accuracy of the sensor.

[0045] Example 9: In this example, the force direction of the quartz sensor is along the length direction of the quartz resonator 2.

[0046] In the specific implementation process, the quartz sensor can be set with multiple quartz resonators 2 under pressure by applying force along the length direction of the quartz resonator 2. When using the force along the length direction to achieve measurement, it is necessary to ensure the perpendicularity of the quartz resonator 2. Therefore, after the quartz resonator 2 is connected to the quartz fixing block 1, it is necessary to ensure that it is perpendicular as much as possible, and to maintain perpendicularity as much as possible after multiple uses. Therefore, the connection method of the quartz resonator 2 is quite important.

[0047] Example 10: In order to further increase the connection stability between the quartz fixing block 1 and the quartz resonator 2, an improvement was made based on Example 9. In this example, the quartz fixing block 1 and the quartz resonator 2 are connected by glass sintering; the sintering temperature is 800-900℃, the holding time is 8-12min, the heating rate is 1-3℃ / min, and the sintering atmosphere is nitrogen.

[0048] In the specific implementation process, glass sintering can be performed using glass dielectric slurry. Glass dielectric slurry is a paste-like material used for sealing, insulating, or protecting electronic components. Its basic components include inorganic glass powder and an organic carrier. The particle size of the inorganic glass powder is controlled between 0.1-1 μm. Existing products can be used as the glass dielectric slurry in this embodiment. Using a nitrogen atmosphere can suppress the volatilization loss of active ingredients such as zinc oxide. The optimal sintering process is to heat to 850°C at a rate of 2°C / min, and then hold at that temperature for 10 minutes.

[0049] The above are merely preferred embodiments of the present invention and are not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A large-range, high-precision, three-dimensional four-beam resonant quartz sensor, characterized in that, include: Quartz fixing block (1) and several quartz resonator plates (2); With the center of the end face of the quartz fixing block (1) as the reference, a number of quartz resonators (2) are arranged in a ring between two quartz fixing blocks (1) and connected to the quartz fixing blocks (1); The quartz fixing block (1) is provided with electrode lead-out pieces (3), and the inner and outer sides of the quartz resonator (2) are provided with electrode pieces (4). The two electrode pieces (4) on the same quartz resonator (2) are connected to different electrode lead-out pieces (3). The electrode lead-out piece (3) includes an outer piece (31) and an inner piece (32) disposed opposite to each other on the inner and outer sides of the quartz fixing block (1), the electrode piece (4) on the inner side of the quartz resonator (2) is connected to the inner piece (32), and the electrode piece (4) on the outer side of the quartz resonator (2) is connected to the outer piece (31). The edge of the outer sheet (31) is connected to the edge of the inner sheet (32) through the connector (33), and the connector (33) abuts against or connects to the side wall of the quartz fixing block (1). The outer sheet (31) and the inner sheet (32) are rectangular, and there are at least four connecting bodies (33); one end of the connecting body (33) is connected to the corner of the outer sheet (31), and the other end of the connecting body (33) is connected to the corner of the inner sheet (32); The quartz fixing block (1) includes: a base (11) and a boss (12) connected to the inner side of the base (11), the end of the quartz resonator (2) is connected to the base (11), and the inner sidewall of the quartz resonator (2) is connected to the boss (12).

2. The quartz sensor according to claim 1, characterized in that, The corner points of the outer sheet (31) and the corner points of the inner sheet (32) are positioned on the horizontal plane in a corresponding manner.

3. The quartz sensor according to claim 2, characterized in that, The electrode sheet (4) is connected to the center of the edge of the electrode lead-out sheet (3).

4. The quartz sensor according to claim 1, characterized in that, A gap (5) is left between adjacent quartz resonators (2), and the connector (33) passes through the gap (5).

5. The quartz sensor according to any one of claims 1-4, characterized in that, The force on the quartz sensor is directed along the length of the quartz resonator (2).

6. The quartz sensor according to claim 5, characterized in that, The quartz fixing block (1) and the quartz resonator (2) are connected by glass sintering; the sintering temperature is 800-900℃, the holding time is 8-12min, the heating rate is 1-3℃ / min, and the sintering atmosphere is nitrogen.

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