A multi-degree-of-freedom miniature adjustment mechanism for optical devices

Abstract

This application belongs to the field of optical equipment, specifically disclosing a multi-degree-of-freedom micro-adjustment mechanism for optical devices. It includes a fixed mounting base, a movable mounting plate, and an adjustment drive assembly. The movable mounting plate is used to mount the optical device and is elastically connected to the fixed mounting base via an elastic connection assembly. An adjustment gap is provided between the movable mounting plate and the fixed mounting base. The adjustment drive assembly is disposed on the movable mounting plate and is used to drive the movable mounting plate to adjust relative to the fixed mounting base in six degrees of freedom. These six degrees of freedom include translational motion along the X, Y, and Z axes, and rotational motion around the X, Y, and Z axes. Through the structural design of this application, this adjustment mechanism achieves multi-dimensional precision adjustment of optical devices while significantly simplifying the structure, reducing manufacturing costs, and effectively balancing the range of motion and adjustment accuracy.

Description

Technical Field

[0001] This application belongs to the field of optical equipment, and more specifically, relates to a multi-degree-of-freedom micro-adjustment mechanism for optical devices. Background Technology

[0002] In optical, optoelectronic, and precision measurement systems, the position and orientation of optical components (such as lenses, mirrors, and lasers) need to be precisely adjusted to their designed state to eliminate assembly and adjustment errors and ensure system performance. This adjustment typically requires precise control of the optical components in six degrees of freedom in space, including translational motion along the X, Y, and Z axes (translational degrees of freedom) and rotational motion around the X, Y, and Z axes (rotational degrees of freedom).

[0003] Existing six-dimensional adjustment stages typically employ complex serial mechanisms, mechanically superimposing multiple independent linear displacement stages and rotary stages in sequence to achieve movement in six directions. This serial mechanism not only results in a large overall size and complex structure, but also leads to mechanical coupling and error accumulation between the motion axes, making the adjustment process cumbersome and time-consuming. With the miniaturization and integration of optical systems, traditional serial six-dimensional adjustment stages are struggling to meet new demands in terms of size, flexibility, and integration.

[0004] Currently, some other adjustment devices use flexible hinges or parallel structures. Although they can achieve miniaturization, the high precision of the flexible hinges or complex parallel configurations requires extremely stringent processing technology, resulting in high manufacturing costs and difficulty in guaranteeing the yield. Furthermore, it is difficult to balance the motion range and accuracy of the device, and the adjustment range is generally limited. At the same time, most adjustment devices are designed with five degrees of freedom or redundant degrees of freedom, which cannot meet the needs of six-degree-of-freedom independent adjustment. Summary of the Invention

[0005] To address the shortcomings of existing technologies, this application provides a multi-degree-of-freedom micro-adjustment mechanism for optical devices, aiming to solve the problems of large size, complex structure, limited range of motion, and insufficient degree of freedom in existing optical device adjustment mechanisms.

[0006] This application provides a multi-degree-of-freedom micro-adjustment mechanism for optical devices, specifically including a fixed mounting base, a movable mounting plate, and an adjustment drive assembly. The movable mounting plate is used to mount the optical device and is elastically connected to the fixed mounting base via an elastic connection assembly. An adjustment gap is provided between the movable mounting plate and the fixed mounting base. The adjustment drive assembly is disposed on the movable mounting plate and is used to drive the movable mounting plate to adjust relative to the fixed mounting base in six degrees of freedom. The six degrees of freedom include translational motion along the X-axis, Y-axis, and Z-axis directions and rotational motion around the X-axis, Y-axis, and Z-axis directions.

[0007] Compared with the prior art, the above-described technical solution conceived in this application allows for easy adjustment of the movable mounting plate's position by using an elastic connecting component to connect it to the fixed mounting base. The movable mounting plate is then driven by an adjustment drive component, enabling precise adjustment of the optical device mounted on it across six degrees of freedom, including translation and rotation. This structure eliminates the complex mechanical superposition of traditional serial mechanisms, avoiding coupling and error accumulation between motion axes, significantly simplifying the structure and facilitating miniaturization. Furthermore, compared to traditional complex precision hinges or parallel mechanisms, its adjustment method places less stringent requirements on the manufacturing process, reducing manufacturing costs while balancing adjustment range and accuracy. This effectively solves the problems of large size, complex structure, insufficient adjustment degrees of freedom, and difficulty in balancing motion range and accuracy in existing optical device adjustment mechanisms.

[0008] As a further preferred embodiment, the fixed mounting base is a rectangular block structure with a first right-angled surface, a second right-angled surface, and a third right-angled surface that are adjacent to each other and perpendicular to each other.

[0009] As a further preferred embodiment, the movable mounting plate includes three mutually perpendicular and integrally formed first plate, second plate and third plate. In the initial state, the first plate, second plate and third plate correspond one-to-one with the first right angle surface, the second right angle surface and the third right angle surface and are arranged parallel to each other.

[0010] As a further preferred embodiment, the first plate, the second plate, and the third plate are respectively connected to the first right-angled surface, the second right-angled surface, and the third right-angled surface via the elastic connecting assembly.

[0011] As a further preferred embodiment, the elastic connection assembly includes a plurality of springs or spring sheets, the two ends of which are fixedly connected to the corresponding plate and right-angle surface, respectively, for providing a reset preload and maintaining the adjustment gap.

[0012] As a further preferred embodiment, the adjustment drive assembly includes a first drive unit, a second drive unit, and a third drive unit. The first drive unit is disposed on the first plate and is used to drive the movable mounting plate to translate along the Z-axis, rotate around the X-axis, and rotate around the Y-axis. The second drive unit is disposed on the second plate and is used to drive the movable mounting plate to translate along the Y-axis and rotate around the Z-axis. The third drive unit is disposed on the third plate and is used to drive the movable mounting plate to translate along the X-axis.

[0013] As a further preferred embodiment, the first drive unit includes three first adjustment components, all of which are threadedly connected to the first plate along the Z-axis direction. The distribution of the three first adjustment components forms an isosceles right triangle, with its two right-angled sides extending along the X-axis and Y-axis directions, respectively.

[0014] As a further preferred embodiment, the second drive unit includes two second adjustment members, both of which are threadedly connected to the second plate along the Y-axis direction, and the two second adjustment members are located on the same horizontal plane and spaced apart along the X-axis direction.

[0015] As a further preferred embodiment, the third drive unit includes a third adjustment member, which is threadedly connected to the third plate along the X-axis direction.

[0016] As a further preferred embodiment, the first, second, and third adjusting components are threaded set screws or micro-heads.

[0017] In summary, compared with the prior art, the technical solutions conceived in this application have the following main technical advantages: 1. This application uses an elastic connection component to suspend the movable mounting plate on the fixed mounting base, and uses multiple adjustment components distributed on three mutually perpendicular plates for driving. This enables independent or combined adjustment of optical devices in six degrees of freedom in space, namely translation along the X-axis, Y-axis, and Z-axis, and rotation around the X-axis, Y-axis, and Z-axis, thus meeting the needs of high-precision optical systems for multi-dimensional attitude adjustment.

[0018] 2. In this application, the adjustment mechanism adopts an integrally molded movable mounting plate and a fixed mounting base, which eliminates the complex mechanical superposition and motion axis coupling method in the traditional serial mechanism. This not only eliminates the accumulation of errors between motion axes, but also significantly simplifies the overall structure, resulting in a significant reduction in the size of the mechanism, which is conducive to miniaturization and integration.

[0019] 3. Compared with traditional adjustment schemes that use complex precision hinges or parallel mechanisms, the adjustment mechanism in this application uses elastic connection components to provide reset and pre-tightening, and is driven by simple threaded set screws or micrometer heads. This makes the requirements for the machining accuracy and assembly process of the parts more relaxed, and can effectively reduce manufacturing costs while ensuring a certain adjustment range and accuracy.

[0020] 4. The adjustment mechanism in this application, through the application of the elastic connection component to maintain the adjustment gap and the precision adjustment component, enables the mechanism to achieve smooth and gapless displacement within a certain range. Its adjustment method avoids friction and backlash, thus maintaining good adjustment resolution and stability while achieving a large adjustment stroke. This solves the problem in the prior art that it is difficult to balance the movement range and adjustment accuracy of the adjustment mechanism of optical devices. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the overall structure of the adjustment mechanism provided in the embodiments of this application; Figure 2 This is a schematic diagram of the assembly structure of the flexible connection component provided in the embodiments of this application; Figure 3 This is a schematic diagram of the assembly structure of the adjustment drive component provided in the embodiments of this application; Figure 4 This is a schematic diagram of the overall structure of the fixed mounting base provided in the embodiments of this application; Figure 5 This is a schematic diagram of the overall structure of the active mounting plate provided in the embodiments of this application.

[0022] In all the accompanying drawings, the same reference numerals are used to denote the same elements or structures, wherein: 1. Fixed mounting base; 11. First right-angled surface; 12. Second right-angled surface; 13. Third right-angled surface; 2. Movable mounting plate; 21. First plate body; 22. Second plate body; 23. Third plate body; 3. Adjustment drive assembly; 31. First drive unit; 311. First adjusting component; 32. Second drive unit; 321. Second adjusting component; 33. Third drive unit; 331. Third adjusting component; 4. Flexible connection assembly; 5. Adjustment gap; 6. Locking screw. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0024] Reference Figures 1-5 The present application discloses a multi-degree-of-freedom micro-adjustment mechanism for optical devices, which includes a fixed mounting base 1, a movable mounting plate 2, and an adjustment drive assembly 3. It is applicable to the multi-dimensional attitude adjustment and positioning of precision optical devices such as optical lenses, mirrors, prisms, and lasers.

[0025] Specifically, refer to Figure 4The fixed mounting base 1 is a rigid support component, fixedly mounted to an external structure or optical platform by screws or adhesive, serving as the positional reference for the entire adjustment mechanism. In this embodiment, the fixed mounting base 1 is a rectangular block structure with three adjacent and mutually perpendicular right-angled surfaces, namely, the first right-angled surface 11, the second right-angled surface 12, and the third right-angled surface 13. The first right-angled surface 11 is the upper surface of the fixed mounting base 1, and the second right-angled surface 12 and the third right-angled surface 13 are two adjacent side surfaces of the fixed mounting base 1. The first right-angled surface 11, the second right-angled surface 12, and the third right-angled surface 13 constitute a three-dimensional spatial reference coordinate system, providing reference for the subsequent positioning of the movable mounting plate 2. The first right-angled surface 11 is located on the XY plane, the second right-angled surface 12 is located on the XZ plane, and the third right-angled surface 13 is located on the YZ plane.

[0026] More specifically, refer to Figure 5 The movable mounting plate 2 is used to mount the optical components to be adjusted. The movable mounting plate 2 and the fixed mounting base 1 are overlapped and semi-covered, that is, the movable mounting plate 2 has a semi-covered structure relative to the fixed mounting base 1. It is elastically connected to the fixed mounting base 1 by the elastic connecting component 4. An adjustment gap 5 is reserved between the movable mounting plate 2 and the fixed mounting base 1 as the adjustment stroke of the adjustment mechanism, so that the movable mounting plate 2 is in a suspended state after installation. The size of the adjustment gap 5 between the movable mounting plate 2 and the fixed mounting base 1 can be changed according to the adjustment stroke requirements to meet the needs of different adjustment ranges.

[0027] In this embodiment, the movable mounting plate 2 includes three mutually perpendicular and integrally formed plates, namely a first plate 21, a second plate 22, and a third plate 23. In the initial assembly state, the first plate 21, the second plate 22, and the third plate 23 correspond one-to-one with and are parallel to the first right-angled surface 11, the second right-angled surface 12, and the third right-angled surface 13, respectively. Simultaneously, the first plate 21, the second plate 22, and the third plate 23 are connected to the first right-angled surface 11, the second right-angled surface 12, and the third right-angled surface 13 via elastic connecting components 4. The three mutually perpendicular plates 21, 22, and 23 provide a limiting function during the adjustment process of the adjustment mechanism; that is, when the first plate 21, the second plate 22, or the third plate 23 contacts the fixed mounting base 1, it limits the position of the movable mounting plate 2. The first plate 21 is provided with an interface for connecting optical devices, including threaded holes or an adhesive platform.

[0028] The elastic connection assembly 4 includes several springs or spring sheets. The two ends of each spring or spring sheet are fixedly connected to the corresponding plate and right-angle surface, respectively. The elastic connection assembly 4 provides a reset preload force, ensuring the movable mounting plate 2 maintains its initial position and its structural rebound is controllable when no external force is applied; it maintains the stability of the adjustment gap 5, ensuring the reliability of the adjustment process; and when the adjustment drive assembly 3 applies force, it allows the movable mounting plate 2 to move, thereby achieving multi-degree-of-freedom displacement, and provides a preload force that keeps the movable mounting plate 2 pressed against each adjusting component in the adjustment drive assembly 3. (Refer to...) Figure 2 In this embodiment, the elastic connection assembly 4 includes multiple springs. Mounting holes are provided on each plate of the movable mounting plate 2 and on each right-angled surface of the fixed mounting base 1. Fixed pins are fixedly connected to each mounting hole. The fixed mounting base 1 also has several locking holes for installing locking pins to stabilize the position of the fixed pins. Each end of a spring is connected to two fixed pins. The distribution of the mounting holes is optimized based on the arrangement and force direction of the first adjusting member 311, the second adjusting member 321, and the third adjusting member 331, resulting in a non-uniform distribution. Two springs are provided between the first plate 21 and the first right-angled surface 11, two springs are provided between the second plate 22 and the second right-angled surface 12, and one spring is provided between the third plate 23 and the third right-angled surface 13 to ensure that the necessary elastic restoring force can be provided in each direction.

[0029] Furthermore, the adjustment drive assembly 3 is disposed on the movable mounting plate 2 and is used to drive the movable mounting plate 2 to adjust relative to the fixed mounting base 1 in six degrees of freedom. The six degrees of freedom include translational movement along the X-axis, Y-axis, and Z-axis and rotational movement around the X-axis, Y-axis, and Z-axis. The adjustment drive assembly 3 includes a first drive unit 31, a second drive unit 32, and a third drive unit 33.

[0030] Furthermore, refer to Figure 1 and Figure 3The first drive unit 31 is disposed on the first plate 21 and is used to drive the movable mounting plate 2 to translate along the Z-axis, rotate around the X-axis, and rotate around the Y-axis. The first drive unit 31 includes three first adjustment members 311, all of which are threaded to the first plate 21 along the Z-axis. The first adjustment members 311 are screwed into the first plate 21 along the Z-axis and can abut against the first right-angled surface 11 of the fixed mounting base 1. The distribution of the three first adjustment members 311 forms an isosceles right triangle, with its two right-angled sides extending along the X-axis and Y-axis, respectively. Two springs between the first plate 21 and the first right-angled surface 11 are located on the two right-angled sides and are symmetrically arranged. The ends of the three first adjustment members 311 together form a triangular surface support area. By adjusting the feed amount of the three first adjustment members 311, the tilt adjustment of the movable mounting plate 2 in translation along the Z-axis and rotation around the X-axis and Y-axis can be realized. When the three first adjusting members 311 are adjusted equally, the movable mounting plate 2 is driven to translate along the Z-axis; when the two first adjusting members 311 located on the right-angled side of the triangle are adjusted differentially with the other first adjusting member 311, the movable mounting plate 2 is driven to rotate around the X-axis or Y-axis.

[0031] The second drive unit 32 is disposed on the second plate 22 and is used to drive the movable mounting plate 2 to translate along the Y-axis and rotate around the Z-axis. The second drive unit 32 includes two second adjusting members 321, both of which are threaded to the second plate 22 along the Y-axis. The second adjusting members 321 are screwed into the second plate 22 along the Y-axis and can abut against the second right-angle surface 12 of the fixed mounting base 1. The two second adjusting members 321 are located in the same horizontal plane and are spaced apart along the X-axis. Two springs between the second plate 22 and the second right-angle surface 12 are located between the two second adjusting members 321 and are symmetrically arranged. The ends of the two second adjusting members 321 together form a line segment support. By adjusting the feed amount of the two second adjusting members 321, the movable mounting plate 2 can be translated along the Y-axis and yawed around the Z-axis. When the two second adjusting members 321 are adjusted equally, the movable mounting plate 2 is driven to translate along the Y-axis; when the two second adjusting members 321 are adjusted differentially, the movable mounting plate 2 is driven to rotate around the Z-axis.

[0032] The third drive unit 33 is disposed on the third plate 23 and is used to drive the movable mounting plate 2 to translate along the X-axis. The third drive unit 33 includes a third adjusting member 331, which is threadedly connected to the third plate 23 along the X-axis. The third adjusting member 331 is screwed into the third plate 23 along the X-axis and can abut against the third right-angle surface 13 of the fixed mounting base 1. The end of the third adjusting member 331 forms a point support. By adjusting the feed amount of the third adjusting member 331, the translation adjustment of the movable mounting plate 2 along the X-axis can be realized. The first adjusting member 311, the second adjusting member 321 and the third adjusting member 331 are precision threaded set screws or micro-heads with a pitch of no more than 0.25 mm and a scale ring to achieve micron-level adjustment accuracy. The first adjusting member 311, the second adjusting member 321 and the third adjusting member 331 can also adopt other forms of micro-displacement linear actuators, such as piezoelectric screws or piezoelectric ceramics, and the adjustment accuracy can be extended to the nanometer level. The first adjusting member 311, the second adjusting member 321, and the third adjusting member 331 contact the fixed mounting base 1 to form a six-point positioning structure. By rotating the first adjusting member 311, the second adjusting member 321, and the third adjusting member 331, they can be screwed into contact with the fixed mounting base 1 to achieve the inclined plane effect or direct push. The mutual cooperation of the first adjusting member 311, the second adjusting member 321, and the third adjusting member 331, and the superposition of motion vectors in each degree of freedom, can realize the precise adjustment of the movable mounting plate 2 in six degrees of freedom.

[0033] The third plate 23 is also threaded with a locking screw 6. By screwing in the locking screw 6 to abut against the fixed mounting base 1, the movable mounting plate 2 and the fixed mounting base 1 can be further locked and fixed after the movable mounting plate 2 is adjusted, so as to avoid displacement and adjustment drift caused by vibration, external force or environmental changes.

[0034] In this embodiment, since there is relative movement between the fixed mounting base 1 and the movable mounting plate 2, the fixed mounting base 1 or the movable mounting plate 2 can be selected as the sample stage according to actual usage needs, and optical components such as optical lenses, mirrors, prisms or lasers can be fixed on the sample stage.

[0035] Initially, the spring in the elastic connection assembly 4 is stretched, and the spring force provides a unidirectional driving force to the movable mounting plate 2. Simultaneously, the spring provides preload to the overall structure, maintaining its compactness and stability. The three mutually perpendicular action surfaces of the movable mounting plate 2 partially cover and surround the lower fixed mounting base 1, acting as a limit during adjustment. The maximum unidirectional adjustment stroke is reached when the inner side of the action surface of the movable mounting plate 2 contacts the lower fixed block. After adjustment, the locking screw 6 is screwed in to secure the relative position of the movable mounting plate 2 and the lower fixed mounting base 1.

[0036] This adjustment mechanism features contactless friction during adjustment, a simple structure, and ingenious design. It utilizes point-line-plane displacement transmission to achieve six-degree-of-freedom displacement adjustment, effectively reducing coupling errors. It is suitable for precise positioning and attitude adjustment of optical devices in micro-optical systems and has the advantages of high adjustment accuracy, good stability, and easy integration.

[0037] It should be understood that expressions such as "comprising" and "may include" as used in this application indicate the existence of the disclosed functions, operations, or constituent elements, and do not limit one or more additional functions, operations, and constituent elements. In this application, terms such as "comprising" and / or "having" may be interpreted as indicating a specific characteristic, number, operation, constituent element, component, or combination thereof, but should not be interpreted as excluding the existence or possibility of adding one or more other characteristics, numbers, operations, constituent elements, components, or combinations thereof.

[0038] It should be understood that the terms “center,” “upper,” “lower,” “front,” “rear,” “left,” “right,” “vertical,” “horizontal,” “inner,” “outer,” “clockwise,” “counterclockwise,” “axial,” “radial,” and “circumferential” indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0039] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0040] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0041] Those skilled in the art will readily understand that the above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A multi-degree-of-freedom micro-adjustment mechanism for optical devices, characterized in that, The device includes a fixed mounting base (1), a movable mounting plate (2), and an adjustment drive assembly (3). The movable mounting plate (2) is used to mount optical devices and is elastically connected to the fixed mounting base (1) via an elastic connection assembly (4). An adjustment gap (5) is provided between the movable mounting plate (2) and the fixed mounting base (1). The adjustment drive assembly (3) is disposed on the movable mounting plate (2) and is used to drive the movable mounting plate (2) to adjust relative to the fixed mounting base (1) in six degrees of freedom. The six degrees of freedom include translational motion along the X-axis, Y-axis, and Z-axis and rotational motion around the X-axis, Y-axis, and Z-axis. The fixed mounting base (1) is a rectangular block structure with a first right angle (11), a second right angle (12) and a third right angle (13) that are adjacent to each other and perpendicular to each other. The movable mounting plate (2) includes three mutually perpendicular and integrally formed first plate (21), second plate (22) and third plate (23). In the initial state, the first plate (21), second plate (22) and third plate (23) correspond one-to-one with the first right angle surface (11), the second right angle surface (12) and the third right angle surface (13) respectively and are arranged in parallel. The first plate (21), the second plate (22) and the third plate (23) are respectively connected to the first right angle surface (11), the second right angle surface (12) and the third right angle surface (13) through the elastic connecting component (4).

2. The multi-degree-of-freedom micro-adjustment mechanism for optical devices as described in claim 1, characterized in that, The elastic connection assembly (4) includes several springs or spring sheets, the two ends of which are fixedly connected to the corresponding plate and right angle surface, respectively, to provide a reset preload and maintain the adjustment gap (5).

3. The multi-degree-of-freedom micro-adjustment mechanism for optical devices as described in claim 1, characterized in that, The adjustment drive assembly (3) includes a first drive unit (31), a second drive unit (32), and a third drive unit (33). The first drive unit (31) is disposed on the first plate (21) and is used to drive the movable mounting plate (2) to translate along the Z-axis, rotate around the X-axis, and rotate around the Y-axis. The second drive unit (32) is disposed on the second plate (22) and is used to drive the movable mounting plate (2) to translate along the Y-axis and rotate around the Z-axis. The third drive unit (33) is disposed on the third plate (23) and is used to drive the movable mounting plate (2) to translate along the X-axis.

4. The multi-degree-of-freedom micro-adjustment mechanism for optical devices as described in claim 3, characterized in that, The first drive unit (31) includes three first adjustment members (311). The three first adjustment members (311) are threadedly connected to the first plate (21) along the Z-axis direction. The distribution of the three first adjustment members (311) forms an isosceles right triangle, with its two right-angled sides extending along the X-axis direction and the Y-axis direction, respectively.

5. A multi-degree-of-freedom micro-adjustment mechanism for optical devices as described in claim 4, characterized in that, The second drive unit (32) includes two second adjustment members (321). Both second adjustment members (321) are threadedly connected to the second plate (22) along the Y-axis direction. The two second adjustment members (321) are located on the same horizontal plane and are spaced apart along the X-axis direction.

6. The multi-degree-of-freedom micro-adjustment mechanism for optical devices as described in claim 5, characterized in that, The third drive unit (33) includes a third adjustment member (331), which is threadedly connected to the third plate (23) along the X-axis direction.

7. A multi-degree-of-freedom micro-adjustment mechanism for optical devices as described in claim 6, characterized in that, The first adjusting member (311), the second adjusting member (321) and the third adjusting member (331) are threaded set screws or micro heads.

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