A method for calibrating the position of a micro-hemispherical resonator high-temperature blow forming torch

By establishing a linear mapping model between the position and height difference of the blowtorch and combining it with genetic algorithm optimization, the problem of real-time correction of the alignment error between the blowtorch and the mold was solved, realizing high-precision and high-consistency forming of the micro-hemispherical resonator and improving process efficiency and repeatability.

CN122045558BActive Publication Date: 2026-07-21ZHEJIANG UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
ZHEJIANG UNIV
Filing Date
2026-04-15
Publication Date
2026-07-21

AI Technical Summary

Technical Problem

During the high-temperature blow forming process of the micro-hemispherical resonator, the alignment error between the blowtorch and the mold is difficult to quantify and compensate in real time, resulting in a first-order harmonic error in the height profile of the resonator, which affects the frequency symmetry and gyroscope performance.

Method used

By establishing a linear mapping model between the position and height difference of the blowtorch, and using a genetic algorithm to optimize and solve for the optimal coordinates of the blowtorch, a closed-loop iterative process of "experiment-inversion-adjustment" is formed to achieve real-time correction of alignment errors.

Benefits of technology

It significantly improves the systematicness and repeatability of torch position calibration, suppresses first-order high harmonics caused by temperature field eccentricity, improves the geometric symmetry and process consistency of harmonic oscillator forming, and reduces the process debugging cycle and dependence on operator experience.

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Abstract

The present application relates to the technical field of micro-hemisphere resonator design and manufacturing, and particularly relates to a micro-hemisphere resonator high-temperature blow forming torch position calibration method, steps of which are as follows: a linear mapping model between alignment error and height difference is established; three high-temperature blow forming experiments are completed, and the plane coordinates of the torch and the corresponding resonator height difference measurement values in each experiment are recorded respectively; a residual target function is constructed based on the experimental data, and the torch optimal coordinates that make the theoretical height difference minimum are back calculated by using a genetic algorithm optimization solution; the obtained optimal coordinates are used as the new torch position for the next blow forming experiment, and after new height difference data are obtained, the historical data are combined to repeatedly execute the genetic algorithm solution, and the torch position is iteratively updated until the height difference meets the process tolerance requirement. The method aims to real-time evaluate and compensate the torch and mold alignment error in the high-temperature blow forming process, so as to suppress the first-order harmonic error in the height direction of the resonator and improve the forming geometric consistency.
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Description

Technical Field

[0001] This invention relates to the field of micro-hemispherical resonant gyroscope design and manufacturing technology, and in particular to a blowtorch position calibration method for high-temperature blow forming of a micro-hemispherical resonator. Background Technology

[0002] A micro-hemispherical resonator gyroscope is a high-precision inertial sensor based on the Coriolis effect. The geometry and symmetry of its core component, the micro-hemispherical resonator, directly determine the gyroscope's performance indicators, such as frequency fragmentation, quality factor, and long-term stability. In the fused silica high-temperature blow molding process, the alignment accuracy between the high-temperature torch and the graphite mold is a key factor affecting the geometric uniformity of the resonator. If there is a planar positional deviation between the torch center and the mold center, it will lead to an asymmetrical temperature field distribution, causing uneven flow of the molten material, ultimately introducing a first-order harmonic error in the resonator's height profile, manifested as a periodic distribution of height with azimuth. This error degrades the frequency symmetry and vibration mode purity of the resonator, thus reducing the overall accuracy and reliability of the gyroscope. In actual manufacturing, the alignment of the torch and mold mainly relies on visual adjustment by the operator, lacking real-time, quantitative feedback and control methods. Although positional positioning can be achieved through a precision motion platform, sub-millimeter-level deviations may still exist after initial alignment due to factors such as thermal deformation, visual errors, and process disturbances.

[0003] In existing research, improvements to the forming process of micro-hemispherical resonators are mostly focused on mold design and process optimization. For example, authorized invention CN117142749B discloses a mold structure for thermoforming micro-hemispherical resonators, authorized invention CN115231512B discloses an assembly method for curved electrodes of micro-hemispherical gyroscopes, and authorized invention CN118687596B discloses a forming method for highly symmetric micro-hemispherical resonator structures. However, none of these methods address the alignment error between the torch and the mold and its position adjustment scheme. Currently, in the forming process of micro-hemispherical resonators, the correction of alignment error still faces the following problems: (1) There is a lack of a quantitative model that can directly infer the alignment deviation from the geometric features of the formed part, making it difficult to establish a reliable mapping between high harmonics and position error; (2) Existing adjustment methods rely on manual measurement and experience adjustment during downtime, which is inefficient and cannot achieve real-time correction during the process.

[0004] Therefore, a method is needed to evaluate and compensate for the alignment error between the blowtorch and the mold in real time during the high-temperature blow molding process, so as to suppress the first harmonic error in the height direction of the harmonic oscillator and improve the geometric consistency of the forming. Summary of the Invention

[0005] The purpose of this invention is to overcome the shortcomings of the prior art and provide a method for calibrating the position of a blowtorch in a high-temperature blow-forming process for a micro-hemispherical resonator. It aims to solve the technical problems mentioned in the background section.

[0006] To achieve the above objectives, in a first aspect, the present invention proposes a method for calibrating the position of a blowtorch formed by high-temperature blowing of a micro-hemispherical resonator, the steps of which are as follows:

[0007] S1. Establish a linear mapping model between alignment error and height difference;

[0008] S2. Complete three high-temperature blowing experiments, and record the plane coordinates of the blowtorch and the corresponding height difference measurement of the harmonic oscillator in each experiment.

[0009] S3. Based on the experimental data, construct the residual objective function, use the genetic algorithm to optimize and solve it, and back-calculate the optimal coordinates of the blowtorch that minimize the theoretical height difference.

[0010] S4. Use the obtained optimal coordinates as the new torch pose for the next blowing experiment. After obtaining the new height difference data, merge the historical data and repeat S3 to iteratively update the torch position until the height difference meets the process tolerance requirements.

[0011] As a preferred embodiment, the method for establishing a linear mapping model between alignment error and height difference in S1 includes the following steps:

[0012] S101. Define the basic parameters of the alignment error model. Let the theoretical center position coordinates of the mold be ( , ), representing the target position that the blowtorch should be aimed at under ideal conditions, using the theoretical center position coordinates ( , Establish a Cartesian coordinate system with the origin as the origin. Let the actual plane coordinates of the blowtorch in one experiment be ( , The scalar distance of the alignment error is defined as: ;

[0013] S102. Establish a linear relationship model between height difference and alignment error; assume the height difference measured after the harmonic oscillator is formed. Distance from alignment error Proportional, the following linear mapping relationship is established: ,

[0014] in This is a proportionality coefficient, representing the height difference caused by a unit alignment error.

[0015] As a preferred embodiment, the specific method for completing three high-temperature blowing experiments in S2, and recording the planar coordinates of the blowtorch and the corresponding measured height difference of the harmonic oscillator in each experiment, includes the following steps:

[0016] S201. Experimental preparation and initial alignment;

[0017] S202, First Blowing Experiment and Data Acquisition;

[0018] S203. Adjust the position of the blowtorch and conduct subsequent experiments;

[0019] S204, Corresponding height difference measurement;

[0020] S205. Recording and organizing experimental data.

[0021] Preferably, for experimental preparation and initial alignment, in a clean process environment, the pretreated fused silica material is placed inside a graphite mold, and a high-temperature blowtorch is mounted on a three-axis motion platform with planar coordinate positioning function. Through visual observation or optically assisted observation, the center of the blowtorch flame is initially aligned with the center of the mold, and the initial blowtorch coordinates displayed on the motion platform at this point are recorded as ( ). , ), which served as the location of the blowtorch for the first experiment.

[0022] As a preferred method, for the initial blowing experiment and data acquisition, the current blowtorch position is maintained, the high-temperature blowtorch is activated, and the first blowing is performed according to the preset blowing time. After the formed resonator cools to room temperature, a measuring instrument is used to locate the highest point on the resonator surface. Subsequently, along the diameter direction, another extreme height point is measured at a symmetrical position. The height difference between the two extreme points is defined as the maximum height difference of the resonator. The height difference measurement value of the first experiment is recorded as follows: .

[0023] As a preferred method, the torch position is adjusted and subsequent experiments are conducted. The torch plane coordinates are randomized, and initial visual or optically assisted observations are performed again. The torch plane coordinates are then adjusted, and the torch coordinates for the second and third experiments are set as follows: , )and( , The two coordinates should be relative to ( , )exist direction and The direction has a distinguishable offset, and other process parameters are kept strictly consistent. The second and third high-temperature blowing experiments are carried out in sequence.

[0024] Preferably, the height difference is measured. For the resonator obtained in the second and third forming processes, the same measurement method as in S202 is used to obtain the height difference measurement values. and ; Experimental data recording and organization; Organize the data from the three experiments into a dataset ,in This forms the initial samples used for fitting the model parameters.

[0025] As a preferred method, the approach of constructing a residual objective function based on experimental data, optimizing and solving it using a genetic algorithm, and then back-calculating the optimal coordinates of the blowtorch that minimize the theoretical height difference includes the following steps:

[0026] S301. Define the residual objective function. Based on the three sets of experimental data obtained in step S2 and the linear model established in step S1, construct the residual sum of squares function in the least squares sense. The optimization objective is to find a set of parameters. Make the function Minimum value: ;

[0027] S302. Set the genetic algorithm search space and initial population. Set the parameters to be optimized. Reasonable physical range, proportionality coefficient The search range is [ , [Theoretical center coordinates of the mold] The search interval is a neighborhood surrounding the set of experimental coordinate points; within the above search space, randomly generated points containing... An initial population of individuals, each representing a set of parameters. ;

[0028] S303. Perform iterative optimization using the genetic algorithm and output the optimization results; at the end of the optimization, output the parameters corresponding to the individual with the highest fitness. As the solution result; where This is the optimal coordinate estimate of the blowtorch, obtained by reverse engineering based on the current data, which minimizes the theoretical height difference. This is the calibrated scaling factor. Record this set of parameters for iterative calibration in subsequent steps.

[0029] As a preferred method, the optimal coordinates obtained are used as the new torch pose for the next blowing experiment. After obtaining the new height difference data, historical data are merged and S3 is repeated to iteratively update the torch position until the height difference meets the process tolerance requirements. The steps of this method are as follows:

[0030] S401. Based on the optimal coordinates, set the torch pose and execute a new blowing experiment. The optimal coordinates output in step S3 are then used to... As the set coordinates for the blowtorch in the fourth experiment, the blowtorch was moved to that position using a motion platform. The fourth high-temperature blow molding was performed while maintaining the exact same process parameters as in step S2. After cooling, the height difference measurement value for this experiment was obtained using the same measurement method as in S202. .

[0031] S402, Iterative Judgment. Determine whether the height difference corresponding to the currently obtained optimal coordinates meets the process tolerance requirements. If it meets the requirements, the calibration is determined to be complete, and the current torch coordinates are the final calibration position. If it does not meet the requirements, continue to execute S403;

[0032] S403, Data Expansion and Model Update. (The following appears to be a separate, unrelated section:) +3 experiments ( New data obtained (and is an integer) Compared with previous historical datasets ( ) merge, forming a combination of A new dataset with +3 sets of data. ( );

[0033] S404, Repeated Parameter Optimization and Coordinate Inversion. Using the merged new dataset as input, the complete process of step S3 is re-executed, i.e., constructing the residual objective function and running the genetic algorithm to optimize and solve for the updated scaling coefficients. With the optimal coordinate estimate of the blowtorch ;

[0034] S405. Perform a new blowing experiment. Obtain the optimal coordinates output in step S404. As the first The torch coordinates for the fourth experiment were set, and the torch was moved to that position using a motion platform. The fourth high-temperature blow molding was performed while maintaining the exact same process parameters as in step S2. After cooling, the height difference measurement value for this experiment was obtained using the same measurement method as in S202. ;

[0035] S406. Return to step S402 for iterative judgment; if the requirements are met, the calibration is considered complete. If not, repeat steps S403 to S406.

[0036] To achieve the above objectives, in a second aspect, the present invention proposes a storage medium comprising a stored program, wherein, when the program is executed, the device containing the storage medium is controlled to perform the blowtorch position calibration method for high-temperature blowing of a micro-hemispherical resonator, as described in the first aspect.

[0037] To achieve the above objectives, in a third aspect, the present invention proposes a processor for running a program, wherein the program executes the torch position calibration method for high-temperature blowing forming of a micro-hemispherical harmonic oscillator according to the first aspect.

[0038] Compared with existing technologies, the beneficial effects of this invention are as follows: It proposes a blowtorch position calibration method for high-temperature blow forming of micro-hemispherical harmonic oscillators, effectively solving the problems of traditional visual alignment relying on experience, inability to quantify and compensate for errors online. Existing methods mostly rely on operator experience for manual adjustment, resulting in low efficiency, difficulty in real-time control, and poor repeatability. This invention constructs a linear mapping model between height difference and alignment error, transforming the difficult-to-measure position deviation into a measurable harmonic oscillator geometric error signal. It combines multi-round experimental data with a genetic algorithm to achieve model parameter fitting and optimal position inversion, ultimately forming a closed-loop iterative calibration process of "measurement-inversion-adjustment". In particular, the introduction of a strategy combining data-driven and optimization algorithms effectively overcomes the random errors and model uncertainties of a single experiment, significantly improving the systematicity, repeatability, and convergence efficiency of the calibration. This method focuses on the real-time detection and correction of alignment errors during the forming process, effectively suppressing first-order height harmonics caused by temperature field eccentricity, thereby improving the geometric symmetry of the harmonic oscillator. Through continuous iterative optimization of the torch position, asymptotic stability and consistency of the forming process can be achieved, laying the technological foundation for the mass production of high-precision micro-hemispherical resonators. This invention provides a reliable online calibration method for achieving high-performance, highly consistent forming of micro-hemispherical resonators, significantly reducing the process debugging cycle and dependence on operator experience, and has clear engineering application value and promotion potential in the field of precision instrument and MEMS inertial device manufacturing.

[0039] The features and advantages of the present invention will be described in detail through embodiments and in conjunction with the accompanying drawings. Attached Figure Description

[0040] Figure 1 This is a schematic flowchart illustrating a method for calibrating the position of a blowtorch in a high-temperature blow-forming process for a micro-hemispherical resonator, as provided in this invention.

[0041] Figure 2 This is a schematic diagram of the first-order error in the height direction of the harmonic oscillator caused by alignment error in this invention.

[0042] Figure 3 This is a flowchart of the alignment error iterative determination process in this invention.

[0043] Figure 4 This is a graph showing the results of the first optimization of the proportional coefficient and the estimated optimal coordinates of the blowtorch using the genetic algorithm of this invention.

[0044] Figure 5 This is a diagram showing the results of the second optimization of the proportional coefficient and the estimated optimal coordinates of the blowtorch using the genetic algorithm of this invention. Detailed Implementation

[0045] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, but the following embodiments are by no means intended to limit the present invention.

[0046] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. However, it should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of the invention. Furthermore, descriptions of well-known structures and technologies are omitted in the following description to avoid unnecessarily obscuring the concept of the invention.

[0047] In the description of this invention, it should be noted that when an element is referred to as being "fixed to" or "set on" another element, it can be directly on or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to or indirectly connected to the other element.

[0048] This invention proposes a method for calibrating the position of a blowtorch used in the high-temperature blowing process of a micro-hemispherical harmonic oscillator based on height harmonic inversion and iterative learning. By establishing a linear relationship model between height difference and alignment error, and utilizing multiple experimental data combined with a genetic algorithm for optimization, the method achieves accurate inversion of alignment deviation and calculation of position compensation. This method forms a closed-loop iterative process of "experiment-inversion-adjustment," gradually reducing alignment error and providing an online, automated calibration method for improving the symmetry of micro-hemispherical harmonic oscillator forming.

[0049] See appendix Figure 1 A method for calibrating the position of a blowtorch formed by high-temperature blowing of a micro-hemispherical resonator, comprising the following steps:

[0050] S1. Establish a linear mapping model between alignment error and height difference.

[0051] Furthermore, the specific plan for step S1 is as follows:

[0052] S101. Define the basic parameters of the alignment error model. Let the theoretical center position coordinates of the mold be ( , ), representing the target position that the blowtorch should be aimed at under ideal conditions, using the theoretical center position coordinates ( , Establish a Cartesian coordinate system with the origin as the origin. Let the actual plane coordinates of the blowtorch in one experiment be ( , The scalar distance of the alignment error is defined as: ;

[0053] S102. Establish a linear relationship model between height difference and alignment error. Assume the height difference measured after the harmonic oscillator is formed. Distance from alignment error Proportional, the following linear mapping relationship is established: ,

[0054] in This is a proportionality coefficient, representing the height difference caused by a unit alignment error. Its value is affected by the torch temperature, blowing time, material properties, and environmental conditions.

[0055] S2. Under the initial alignment state, conduct no less than three high-temperature blowing experiments, and record the plane coordinates of the blowtorch and the corresponding height difference measurement of the harmonic oscillator in each experiment.

[0056] Furthermore, the specific plan for step S2 is as follows:

[0057] S201. Experimental Preparation and Initial Alignment. In a cleanroom environment, the pretreated fused silica material is placed inside a graphite mold, and a high-temperature blowtorch is mounted on a three-axis motion platform with planar coordinate positioning capabilities. Through visual observation or optically assisted observation, the center of the blowtorch flame is initially aligned with the center of the mold. The initial blowtorch coordinates displayed on the motion platform at this point are recorded as ( ). , ), which served as the location of the blowtorch for the first experiment.

[0058] S202, First Blowing Experiment and Data Acquisition. Maintaining the current torch position, start the high-temperature torch and perform the first blowing operation according to the preset blowing time. The deviation between the flame center and the mold center will cause an eccentric error in the temperature field, resulting in a first-order harmonic error in the height direction of the harmonic oscillator. The height difference is denoted as... See appendix Figure 2 After the formed resonator cools to room temperature, a measuring instrument is used to locate the highest point on the resonator's surface. Then, along its diameter, another extreme height point is measured at a symmetrical location. The height difference between these two points is defined as the maximum height difference of the resonator. The height difference measured in the first experiment is recorded as follows: .

[0059] S203. Adjust the torch position and conduct subsequent experiments. Randomize the torch plane coordinates, perform initial visual or optically assisted observation again, adjust the torch plane coordinates, and set the torch coordinates for the second and third experiments as follows: , )and( , The two coordinates should be relative to ( , )exist direction and The direction has a distinguishable offset. Maintaining strict consistency with other process parameters, the second and third high-temperature blowing experiments were conducted sequentially.

[0060] S204. Measurement of corresponding height difference. For the resonator obtained in the second and third forming processes, the same measurement method as in S202 is used to obtain the height difference measurement values. and .

[0061] S205. Experimental Data Recording and Organization. Organize the data from the three experiments into a dataset. ,in This forms the initial samples used for fitting the model parameters.

[0062] S3. Based on the experimental data, construct the residual objective function, use the genetic algorithm to optimize and solve it, and back-calculate the optimal coordinates of the blowtorch that minimize the theoretical height difference.

[0063] Furthermore, the specific plan for step S3 is as follows:

[0064] S301. Define the residual objective function. Based on the three sets of experimental data obtained in step S2 and the linear model established in step S1, construct the residual sum of squares function in the least squares sense. The optimization objective is to find a set of parameters. Make the function Minimum value: ;

[0065] S302. Set the genetic algorithm search space and initial population. Set the parameters to be optimized. Reasonable physical range, proportionality coefficient The search range is [ , [Theoretical center coordinates of the mold] The search interval is a neighborhood surrounding the set of experimental coordinate points. Within the search space, randomly generated points containing... An initial population of individuals, each representing a set of parameters. .

[0066] S303. Perform iterative optimization using a genetic algorithm and output the optimization results. The parameters corresponding to the individual with the highest fitness at the end of the optimization process are then calculated. As the solution result. This is the optimal coordinate estimate of the blowtorch, obtained by reverse engineering based on the current data, which minimizes the theoretical height difference. This is the calibrated scaling factor. Record this set of parameters for iterative calibration in subsequent steps.

[0067] S4. Use the obtained optimal coordinates as the new torch pose for the next blowing experiment. After obtaining the new height difference data, merge the historical data and repeat S3 to iteratively update the torch position until the height difference meets the process tolerance requirements.

[0068] Furthermore, the specific plan for step S4 is as follows:

[0069] S401. Set the torch pose based on the optimal coordinates and execute a new blowing experiment. Use the optimal coordinates output in step S3... As the set coordinates for the blowtorch in the fourth experiment, the blowtorch was moved to that position using a motion platform. The fourth high-temperature blow molding was performed while maintaining the exact same process parameters as in step S2. After cooling, the height difference measurement value for this experiment was obtained using the same measurement method as in S202. .

[0070] S402, Iterative Judgment. Determine whether the height difference corresponding to the currently obtained optimal coordinates meets the process tolerance requirements. If it does, the calibration is considered complete, and the current torch coordinates are the final calibration position. If not, continue to execute S403.

[0071] S403, Data Expansion and Model Update. (The following appears to be a separate, unrelated section:) +3 experiments ( New data obtained (and is an integer) Compared with previous historical datasets ( ) merge, forming a combination of A new dataset with +3 sets of data. ( ).

[0072] S404, Repeated Parameter Optimization and Coordinate Inversion. Using the merged new dataset as input, the complete process of step S3 is re-executed, i.e., constructing the residual objective function and running the genetic algorithm to optimize and solve for the updated scaling coefficients. With the optimal coordinate estimate of the blowtorch .

[0073] S405. Perform a new blowing experiment. Obtain the optimal coordinates output in step S404. As the first The torch coordinates for the fourth experiment were set, and the torch was moved to that position using a motion platform. The fourth high-temperature blow molding was performed while maintaining the exact same process parameters as in step S2. After cooling, the height difference measurement value for this experiment was obtained using the same measurement method as in S202. .

[0074] S406. Return to step S402 for iterative judgment. If the requirements are met, the calibration is considered complete. If not, repeat steps S403 to S406, i.e., the cyclical process of "data merging → optimization inversion → experiment → judgment". See the appendix for the iterative judgment process. Figure 3 .

[0075] Furthermore, embodiments of this application also provide a storage medium for storing a computer program, wherein the computer program, when running, controls the device where the storage medium is located to execute the above-described... Figure 1-3 A method for calibrating the position of a blowtorch in the high-temperature blow forming of a micro-hemispherical resonator.

[0076] Furthermore, embodiments of this application also provide a processor for running a program, wherein the program executes the above-described... Figure 1-3 A method for calibrating the position of a blowtorch in the high-temperature blow forming of a micro-hemispherical resonator.

[0077] This invention provides a method for calibrating the position of a blowtorch during the high-temperature blow forming of a micro-hemispherical resonator. It addresses the problem that the alignment deviation between the high-temperature blowtorch and the graphite mold is difficult to quantify and compensate for in real time, leading to first-order harmonic errors in the resonator's height profile, which severely affect its frequency symmetry and gyroscope performance. This method establishes a linear mapping model between the resonator's forming height difference and the alignment error between the blowtorch and the mold plane. Using data from multiple process experiments, combined with an optimization algorithm, the optimal blowtorch coordinates are derived, forming a closed-loop iterative calibration process of "experiment-inversion-adjustment," thereby achieving automatic and precise correction of the blowtorch position. This invention transforms the difficult-to-measure alignment error into a measurable height difference signal for indirect feedback, significantly reducing reliance on operator experience and improving process consistency and repeatability. It provides a reliable technical means for the high-performance, high-consistency manufacturing of micro-hemispherical resonators.

[0078] Specific experimental procedure:

[0079] To verify the correctness of the present invention, an alignment calibration of a micro-hemispherical resonator blowing device was performed according to the method provided in the present invention.

[0080] Three blowing experiments were conducted. After each blowing experiment, visual alignment was re-checked to ensure that the coordinate positions were different for each experiment. All influencing factors were kept consistent throughout the blowing process, including using the same fused silica sheet and mold, the same blowing time, and the same gas ratio. The coordinates and measured height differences of the harmonic oscillator were recorded for each of the three experiments; see Table 1.

[0081] The datasets for the first three experiments are shown in Table 1.

[0082]

[0083] The initial optimization was performed using a genetic algorithm; see [link / reference]. Figure 4 The optimal torch coordinates were obtained as (297.603 mm, 32.1615 mm). Due to the limitations of the operating table's precision, the actual torch coordinates in the fourth experiment were (297.602 mm, 32.161 mm). Using the same process parameters, the height difference of the harmonic oscillator was measured to be 0.30 mm.

[0084] Assuming the process requires a height difference of no more than 0.1 mm, the actual torch coordinates and height difference from the fourth experiment were integrated with the datasets from the previous three experiments, and a genetic algorithm was used again for optimization. (See appendix.) Figure 5 The optimal blowtorch coordinates were obtained as (297.495 mm, 32.3312 mm). In the fifth blowing experiment, the actual blowtorch coordinates were (297.500 mm, 32.332 mm). Using the same process parameters, the measured height difference of the harmonic oscillator was 0.24 mm.

[0085] After multiple iterations, the actual torch coordinates in the tenth experiment (297.301 mm, 32.596 mm) were determined using the same process parameters. The measured height difference of the harmonic oscillator was 0.09 mm, which met the process requirements. Therefore, this coordinate position is the final optimal torch coordinate for blowing.

[0086] The parts of this invention not disclosed in detail are well-known technologies in the field.

[0087] In the above embodiments, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0088] It is understood that the relevant features in the above methods and systems can be referenced interchangeably. Furthermore, the terms "first," "second," etc., in the above embodiments are used to distinguish between embodiments and do not represent the superiority or inferiority of any particular embodiment.

[0089] Those skilled in the art will clearly understand that, for the sake of convenience and brevity, the specific working processes of the systems, devices, and units described above can be referred to the corresponding processes in the foregoing method embodiments, and will not be repeated here.

[0090] The algorithms and displays provided herein are not inherently related to any particular computer, virtual system, or other device. Various general-purpose systems can also be used in conjunction with the teachings herein. The required structure for constructing such systems is apparent from the above description. Furthermore, this application is not directed to any particular programming language. It should be understood that the content of this application described herein can be implemented using various programming languages, and the above description of specific languages ​​is for the purpose of disclosing the best mode of implementation of this application.

[0091] In addition, the memory may include non-permanent memory in computer-readable media, such as random access memory (RAM) and / or non-volatile memory, such as read-only memory (ROM) or flash RAM, and the memory includes at least one memory chip.

[0092] Those skilled in the art will understand that embodiments of this application can be provided as methods, systems, or computer program products. Therefore, this application can take the form of a completely hardware embodiment, a completely software embodiment, or an embodiment combining software and hardware aspects. Furthermore, this application can take the form of a computer program product embodied on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0093] This application is described with reference to flowchart illustrations and / or block diagrams of methods, apparatus (systems), and computer program products according to embodiments of this application. It will be understood that each block of the flowchart illustrations and / or block diagrams, and combinations of blocks in the flowchart illustrations and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, special-purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, generate instructions for implementing the flowchart... Figure 1 One or more processes and / or boxes Figure 1 A device that provides the functions specified in one or more boxes.

[0094] These computer program instructions may also be stored in a computer-readable storage medium that can direct a computer or other programmable data processing device to function in a particular manner, such that the instructions stored in the computer-readable storage medium produce an article of manufacture including instruction means, which are implemented in a process Figure 1 One or more processes and / or boxes Figure 1 The function specified in one or more boxes.

[0095] These computer program instructions may also be loaded onto a computer or other programmable data processing equipment to cause a series of operational steps to be performed on the computer or other programmable equipment to produce a computer-implemented process, thereby providing instructions that execute on the computer or other programmable equipment for implementing the process. Figure 1 One or more processes and / or boxes Figure 1 The steps of the function specified in one or more boxes.

[0096] In a typical configuration, a computing device includes one or more processors (CPU), input / output interfaces, network interfaces, and memory.

[0097] Memory may include non-persistent memory in computer-readable media, such as random access memory (RAM) and / or non-volatile memory, such as read-only memory (ROM) or flash RAM. Memory is an example of computer-readable media.

[0098] Computer-readable media includes both permanent and non-permanent, removable and non-removable media that can store information using any method or technology. Information can be computer-readable instructions, data structures, modules of programs, or other data. Examples of computer storage media include, but are not limited to, phase-change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technologies, CD-ROM, digital versatile optical disc (DVD) or other optical storage, magnetic tape, magnetic disk storage or other magnetic storage devices, or any other non-transferable medium that can be used to store information accessible by a computing device. As defined herein, computer-readable media does not include transient computer-readable media, such as modulated data signals and carrier waves.

[0099] It should also be noted that the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element.

[0100] Those skilled in the art will understand that embodiments of this application can be provided as methods, systems, or computer program products. Therefore, this application can take the form of a completely hardware embodiment, a completely software embodiment, or an embodiment combining software and hardware aspects. Furthermore, this application can take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0101] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions or improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A method for calibrating the position of a blowtorch formed by high-temperature blowing of a micro-hemispherical resonator, characterized in that, Includes the following steps: S1. Establish a linear mapping model between alignment error and height difference; S2. Complete three high-temperature blowing experiments, and record the plane coordinates of the blowtorch and the corresponding height difference measurement of the harmonic oscillator in each experiment. S3. Based on the experimental data, construct the residual objective function, use the genetic algorithm to optimize and solve it, and back-calculate the optimal coordinates of the blowtorch that minimize the theoretical height difference. S4. Use the obtained optimal coordinates as the new torch pose for the next blowing experiment. After obtaining the new height difference data, merge the historical data and repeat S3 to iteratively update the torch position until the height difference meets the process tolerance requirements. The method for establishing a linear mapping model between alignment error and height difference in S1 includes the following steps: S101. Define the basic parameters of the alignment error model. Let the theoretical center position coordinates of the mold be ( , ), representing the target position that the blowtorch should be aimed at under ideal conditions, using the theoretical center position coordinates ( , Establish a Cartesian coordinate system with the origin as the origin. Let the actual plane coordinates of the blowtorch in one experiment be ( , The scalar distance of the alignment error is defined as: ; S102. Establish a linear relationship model between height difference and alignment error, assuming the height difference measured after the harmonic oscillator is formed. Distance from alignment error Proportional, the following linear mapping relationship is established: , in This is a proportionality coefficient, representing the height difference caused by a unit alignment error; The method of constructing a residual objective function based on experimental data, optimizing and solving it using a genetic algorithm, and then back-calculating the optimal coordinates of the blowtorch that minimize the theoretical height difference includes the following steps: S301. Define the residual objective function. Based on the three sets of experimental data obtained in step S2 and the linear model established in step S1, construct the residual sum of squares function in the least squares sense. The optimization objective is to find a set of parameters. Make the function Minimum value: ; S302. Set the genetic algorithm search space and initial population, and set the parameters to be optimized. Reasonable physical range, proportionality coefficient The search range is [ , [Theoretical center coordinates of the mold] The search interval is a neighborhood surrounding the set of experimental coordinate points; within the above search space, randomly generated points containing... An initial population of individuals, each representing a set of parameters. ; S303. Perform iterative optimization using the genetic algorithm and output the optimization results; at the end of the optimization, output the parameters corresponding to the individual with the highest fitness. As a result of the solution, This is the optimal coordinate estimate of the blowtorch, obtained by reverse engineering based on the current data, which minimizes the theoretical height difference. Record the set of parameters for the calibrated proportional coefficients, which will be used for iterative calibration in subsequent steps.

2. The method for calibrating the position of a blowtorch in a high-temperature blow-forming process for a micro-hemispherical resonator as described in claim 1, characterized in that, The specific method for completing three high-temperature blowing experiments in S2, and recording the planar coordinates of the blowtorch and the corresponding height difference measurement of the harmonic oscillator in each experiment, includes the following steps: S201. Experimental preparation and initial alignment; S202, First Blowing Experiment and Data Acquisition; S203. Adjust the position of the blowtorch and conduct subsequent experiments; S204, Corresponding height difference measurement; S205. Recording and organizing experimental data.

3. The method for calibrating the position of a blowtorch in a high-temperature blow-forming process for a micro-hemispherical resonator as described in claim 2, characterized in that, The experimental preparation and initial alignment method involved placing pretreated fused silica material into a graphite mold in a cleanroom environment. A high-temperature blowtorch was then mounted on a three-axis motion platform with planar coordinate positioning capabilities. Through visual observation or optical assistance, the center of the blowtorch flame was initially aligned with the center of the mold. The initial blowtorch coordinates displayed on the motion platform at this point were recorded as ( ). , ), which served as the location of the blowtorch for the first experiment.

4. The method for calibrating the position of a blowtorch in a high-temperature blow-forming process for a micro-hemispherical resonator as described in claim 3, characterized in that, The method for the initial blowing experiment and data acquisition was as follows: Maintaining the current torch position, the high-temperature torch was activated, and the first blowing process was performed according to the preset blowing time. After the formed resonator cooled to room temperature, a measuring instrument was used to locate the highest point on the resonator surface. Subsequently, along the diameter direction, another extreme height point was measured at a symmetrical position. The height difference between the two extreme points was defined as the maximum height difference of the resonator. The measured height difference value of the first experiment was recorded as... .

5. The method for calibrating the position of a blowtorch in a high-temperature blow-forming process for a micro-hemispherical resonator as described in claim 4, characterized in that, The method for adjusting the blowtorch position and conducting subsequent experiments is to randomize the blowtorch plane coordinates, perform initial visual observation or optically assisted observation again, adjust the blowtorch plane coordinates, and set the blowtorch coordinates for the second and third experiments as follows: , )and( , The two coordinates should be relative to ( , )exist direction and The direction has a distinguishable offset, and other process parameters are kept strictly consistent. The second and third high-temperature blowing experiments are carried out in sequence.

6. The method for calibrating the position of a blowtorch in a high-temperature blow-forming process for a micro-hemispherical resonator as described in claim 5, characterized in that, The method for measuring the height difference is to use the same measurement method as S202 for the resonator obtained in the second and third forming processes to obtain the height difference measurement values ​​respectively. and ; The method for recording and organizing experimental data is to organize the data from the three experiments into a dataset. ,in This forms the initial samples used for fitting the model parameters.

7. The method for calibrating the position of a blowtorch in a high-temperature blow-forming process for a micro-hemispherical resonator as described in claim 6, characterized in that, The steps of using the obtained optimal coordinates as the new blower pose for the next blowing experiment, obtaining new height difference data, merging historical data, and repeating S3 iteratively to update the blower position until the height difference meets the process tolerance requirements are as follows: S401. The optimal coordinates output in step S3 As the set coordinates for the blowtorch in the fourth experiment, the blowtorch was moved to this position via a motion platform. Maintaining the same process parameters as in step S2, the fourth high-temperature blow molding was performed. After cooling, the height difference measurement value for this experiment was obtained using the same measurement method as in S202. ; S402. Determine whether the height difference corresponding to the currently obtained optimal coordinates meets the process tolerance requirements; If the requirements are met, the calibration is considered complete, and the current torch coordinates are the final calibration position; if not, proceed to execute S403. S403, the first +3 experiments ( New data obtained (and is an integer) Compared with previous historical datasets ( ) merge, forming a combination of A new dataset with +3 sets of data. ( ); S404. Using the merged new dataset as input, re-execute the complete process of step S3, that is, construct the residual objective function and run the genetic algorithm to optimize and solve for the updated proportional coefficient. With the optimal coordinate estimate of the blowtorch ; S405. Obtain the optimal coordinates output in step S404. As the first The torch coordinates for the fourth experiment were set, and the torch was moved to that position using a motion platform; the fourth high-temperature blow molding was performed while maintaining the exact same process parameters as in step S2; after cooling, the height difference measurement value for this experiment was obtained using the same measurement method as in S202. ; S406. If the requirements are met, the calibration is considered complete; if not, repeat steps S403 to S406.

8. A processor, characterized in that: The processor is used to run a program, wherein the program executes the torch position calibration method for high-temperature blowing forming of micro-hemispherical harmonic oscillators as described in any one of 1-7.