A vacuum motion device
By employing an air-bearing structure in the vacuum motion device, and utilizing the air supply and exhaust channels to form an air-bearing layer, the problem of low motor shaft accuracy in a vacuum environment is solved, achieving high-precision rotation in a vacuum environment.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- YINGUAN SEMICON TECH CO LTD
- Filing Date
- 2026-04-17
- Publication Date
- 2026-07-14
AI Technical Summary
In a vacuum environment, the motor shaft of existing vacuum motion devices has low precision due to housing vibration and friction, which cannot meet the requirements of high-precision scenarios.
The structure adopts an air bearing structure, forming an air layer through an air supply channel and an exhaust channel. The air supply channel supplies air to the air layer, and the exhaust channel removes the gas, ensuring that the gas does not leak out of the vacuum environment. At the same time, an air film is formed between the motor shaft and the air bearing sleeve to reduce friction.
It maintains high-precision rotation in a vacuum environment while avoiding damage to the vacuum environment, making it suitable for high-precision applications.
Smart Images
Figure CN122052404B_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of equipment manufacturing technology, and in particular to a vacuum motion device. Background Technology
[0002] In some vacuum (or low-pressure) environments, it is often necessary to use vacuum motion devices (such as motors) to precisely drive rotating parts (such as sample stages) to perform corresponding operations in the vacuum environment (such as electron beam detection).
[0003] Taking a motor as an example, a vacuum motion device typically includes a housing, a motor rotor, and a motor shaft. The motor rotor is connected to the motor shaft, which is connected to the housing via bearings, allowing the motor rotor to drive the motor shaft to rotate. However, in some cases, the housing may be subjected to impacts or vibrations due to motor operation. These vibrations can be transmitted to the motor shaft through the bearings, resulting in lower precision of the motor shaft and making it unsuitable for high-precision applications. Summary of the Invention
[0004] An embodiment of this application provides a vacuum motion device.
[0005] To achieve the above objectives, the embodiments of this application adopt the following technical solutions:
[0006] In a first aspect, embodiments of this application provide a vacuum motion device, comprising: a motor shaft, the motor shaft including a first shaft segment, a second shaft segment, and a third shaft segment connected sequentially along its axial direction, wherein the diameters of the first shaft segment and the third shaft segment are both larger than the diameter of the second shaft segment, and the first end face of the first shaft segment and the second end face of the third shaft segment are arranged opposite each other along the axial direction; and an air flotation sleeve, the air flotation sleeve being sleeved outside the second shaft segment, forming a first air flotation layer between the air flotation sleeve and the second shaft segment, the air flotation sleeve having an air supply channel, the air inlet of the air supply channel being located on the outer circumferential surface of the air flotation sleeve, and the air outlet of the air supply channel communicating with the first air flotation layer. Furthermore, the air flotation sleeve is located between the first end face and the second end face. The air flotation sleeve includes a third end face opposite to the first end face and a fourth end face opposite to the second end face. A second air flotation layer is formed between the first end face and the third end face, and a third air flotation layer is formed between the second end face and the fourth end face. A first exhaust groove opposite to the second air flotation layer is formed on the first end face or the third end face, and a second exhaust groove opposite to the third air flotation layer is formed on the second end face or the fourth end face. The first exhaust groove is used to retain part of the gas flowing through the second air flotation layer, and the second exhaust groove is used to retain part of the gas flowing through the third air flotation layer. An exhaust channel is also formed on the air flotation sleeve. The exhaust outlet of the exhaust channel is located on the outer circumferential surface of the air flotation sleeve, and the exhaust inlet of the exhaust channel is connected to the second air flotation layer and the third air flotation layer, respectively. The exhaust channel is used to extract gas from the first exhaust groove, the second exhaust groove, the second air flotation layer, and the third air flotation layer.
[0007] In the above scheme, an air bearing can be formed through an air supply channel and an air flotation layer to ensure the rotational accuracy of the vacuum motion device. Gas is extracted from the exhaust tank through an exhaust channel to prevent gas from the air flotation layer from leaking into the external vacuum environment of the vacuum motion device. In this way, the rotational accuracy of the vacuum motion device can be maintained without disrupting the vacuum environment, enabling the vacuum motion device to be used in vacuum and high-precision environments.
[0008] In one possible implementation of the first aspect described above, there are multiple first exhaust grooves, each of which is an annular groove surrounding the second shaft segment, and the radii of the multiple first exhaust grooves are different.
[0009] The exhaust can be gradually released through multiple first exhaust slots with different radii, which can improve the exhaust effect and prevent gas from overflowing from the vacuum motion device and disrupting the vacuum environment in which the vacuum motion device is located.
[0010] In one possible implementation of the first aspect described above, among the plurality of first exhaust slots, the slot body corresponding to the first exhaust slot with the smaller radius has a larger radial dimension along the motor shaft.
[0011] In this possible implementation, the larger the size of the first exhaust channel, the more gas it can hold. Therefore, during the gradual exhaust process, the smaller the radius of the first exhaust channel, the more gas it can hold, which can further prevent gas leakage and improve the exhaust effect.
[0012] In one possible implementation of the first aspect described above, there are multiple air supply channels, which are distributed at intervals along the circumference of the air flotation sleeve. A first annular channel is formed inside the air flotation sleeve, surrounding the second shaft segment, and the first annular channel connects the multiple air supply channels.
[0013] In this possible implementation, air can be supplied simultaneously through multiple air supply channels, thereby improving the uniformity of the air mold forming the first air flotation layer around the motor shaft (or the second shaft segment).
[0014] In one possible implementation of the first aspect, the air flotation sleeve is further provided with a plurality of first throttling holes, each of which corresponds to a plurality of air supply channels, and each first throttling hole is connected to the corresponding air supply channel, the second air flotation layer and the third air flotation layer.
[0015] In this possible implementation, air can be supplied to the second and third air flotation layers through the air supply channel, thereby ensuring the uniformity of the air films in the first, second, and third air flotation layers.
[0016] In one possible implementation of the first aspect described above, the first throttling orifice includes a first opening and a second opening, the first throttling orifice being connected to the second air flotation layer through the first opening and to the third air flotation layer through the second opening. Furthermore, a first exhaust channel surrounds the first opening, and a second exhaust channel surrounds the second opening.
[0017] In this possible implementation, it can be ensured that the gas flowing out from the first orifice and the second orifice can first form a gas film at the second air flotation layer and the third air flotation layer, and then enter the first exhaust channel and the second exhaust channel to be extracted.
[0018] In one possible implementation of the first aspect described above, an air guiding channel is further provided within the air flotation sleeve, and the air guiding channel and the air supply channel are spaced apart along the axial direction of the air flotation sleeve. Furthermore, the air inlet of the air guiding channel is connected to the first throttling orifice, and the air outlet of the air guiding channel is connected to the first air flotation layer.
[0019] In this possible implementation, the uniformity of air intake in the first air flotation layer along the axial direction can be ensured by the air guide channel, and the uniformity of the air film thickness of the first air flotation layer can be ensured, so as to improve the stability of the first air flotation layer supporting the rotation of the motor shaft.
[0020] In one possible implementation of the first aspect described above, there are multiple air guide channels, which are spaced apart circumferentially along the air flotation sleeve. A second annular channel surrounding the second shaft section is also provided within the air flotation sleeve, and the multiple air guide channels communicate with the second annular channel.
[0021] In this possible implementation, multiple air guide channels are spaced apart along the axial direction of the air flotation sleeve, ensuring uniform air intake circumferentially through these channels. Furthermore, the multiple air guide channels can be connected via a second annular channel to further ensure uniform air intake. This, in turn, guarantees the uniformity of the air film in the first air flotation layer, thereby improving the stability of the motor shaft rotation.
[0022] In one possible implementation of the first aspect described above, the exhaust passage includes a first sub-passage connecting the second and third air flotation layers, and a second sub-passage connecting the first sub-passage with the exhaust passage outlet.
[0023] In one possible implementation of the first aspect described above, the first sub-channel includes a first air inlet communicating with the second air flotation layer and a second air inlet communicating with the third air flotation layer. The first air inlet is opposite to the first exhaust channel, and the second air inlet is opposite to the second exhaust channel.
[0024] In this possible implementation, the gas in the second air flotation layer can enter the first sub-channel through the first air inlet, and the gas in the third air flotation layer can enter the first sub-channel through the second air inlet. This achieves the effect of extracting the gas from the second and third air flotation layers through the exhaust channel.
[0025] In one possible implementation of the first aspect described above, the exhaust channels include multiple sets, each set corresponding to a plurality of first exhaust slots. The first air inlet of each set of exhaust channels is opposite to the corresponding first exhaust slot. The second exhaust slots include multiple sets, each set of exhaust channels corresponding to a plurality of second exhaust slots. The second air inlet of each set of exhaust channels is opposite to the corresponding second exhaust slot.
[0026] In this possible implementation, the gas in each first exhaust slot has at least one exhaust channel to exhaust, thereby ensuring the exhaust effect of each first exhaust slot.
[0027] In one possible implementation of the first aspect described above, there are multiple exhaust channels in each group, and these multiple exhaust channels are spaced apart circumferentially around the motor shaft.
[0028] In this possible implementation, each set of exhaust channels corresponds to a first exhaust slot. That is, one first exhaust slot can correspond to multiple exhaust channels that are axially spaced around the motor shaft, which can improve the uniformity of the gas discharged from the exhaust channel to the corresponding first exhaust slot.
[0029] In one possible implementation of the first aspect described above, the first shaft segment, the second shaft segment, and the third shaft segment are independent components.
[0030] In this possible implementation, the first shaft segment, the second shaft segment, and the third shaft segment are independent components that can be easily assembled onto the air flotation sleeve.
[0031] In one possible implementation of the first aspect above, a sealing ring is provided between the first shaft segment and the second shaft segment; and / or, a sealing ring is provided between the second shaft segment and the third shaft segment.
[0032] In this possible implementation, the sealing between the first and second shaft sections, as well as the sealing between the second and third shaft sections, can be guaranteed to prevent gas leakage outside the vacuum motion device.
[0033] In one possible implementation of the first aspect described above, the vacuum motion device further includes a motor stator and a motor rotor, with the motor stator housed within the motor rotor, and the motor rotor connected to the motor shaft. The motor stator includes an annular wall and stator coils disposed on the annular wall, with cooling channels formed within the annular wall.
[0034] In this possible implementation, the stator coils on the motor stator can be cooled through the cooling channel to prevent heat accumulation on the stator coils, thereby preventing the air bearing sleeve from overheating and deforming, ensuring the uniformity of the air film supporting the motor shaft, and thus ensuring the rotational accuracy of the motor shaft.
[0035] In one possible implementation of the first aspect described above, the extension path of the cooling channel is a broken line path.
[0036] In this possible implementation, the path of the cooling medium within the cooling channel can be extended, thereby improving the cooling effect. Attached Figure Description
[0037] Figure 1A An assembly diagram of an electric motor is shown;
[0038] Figure 1B A schematic diagram of a split structure for an electric motor is shown;
[0039] Figure 1C A cross-sectional view of an electric motor is shown. Figure 1A (AA section diagram)
[0040] Figure 2A According to some embodiments of this application, an assembly diagram of an electric motor is shown;
[0041] Figure 2B According to some embodiments of this application, a schematic diagram of a split structure of an electric motor is shown;
[0042] Figure 2C According to some embodiments of this application, a cross-sectional view of an electric motor is shown. Figure 2A (BB cross-section diagram in the middle)
[0043] Figure 2D According to some embodiments of this application, a cross-sectional view of an electric motor is shown. Figure 2A (CC section diagram in the image)
[0044] Figure 3A According to some embodiments of this application, a cross-sectional view of a motor shaft is shown;
[0045] Figure 3B According to some embodiments of this application, a cross-sectional view of another motor shaft is shown;
[0046] Figure 4A According to some embodiments of this application, a schematic diagram of a split structure of a motor stator is shown;
[0047] Figure 4B According to some embodiments of this application, a line drawing of an electric motor stator is shown. Detailed Implementation
[0048] The specific embodiments of this application will be described in detail below with reference to the accompanying drawings.
[0049] This application provides a vacuum motion device that can operate in a vacuum environment. The vacuum motion device can be equipped with an air bearing, and includes an inlet for providing a high-pressure gas film to the air bearing, and an outlet for extracting gas. This allows gas introduced through the inlet to be extracted through the outlet, preventing gas leakage and disruption of the vacuum environment. Thus, a vacuum motion device with an air bearing can be used in a vacuum environment, ensuring the accuracy of the vacuum motion device in a vacuum environment.
[0050] It is understood that in some embodiments, the vacuum motion device can be an electric motor. To improve the accuracy of the motor, a motor with an air bearing can be used. Below, taking the vacuum motion device as an example, we will introduce a motor with an air bearing.
[0051] In the figures of this document, the X direction represents the length direction of the motor. For example, under normal operating conditions, the X direction can be a radial direction away from the center of the motor shaft. The Y direction represents the width direction of the motor. For example, under normal operating conditions, the Y direction can be a radial direction away from the center of the motor shaft. The Z direction represents the height direction of the motor. For example, under normal operating conditions, the Z direction is the extension direction of the motor shaft. The X, Y, and Z directions intersect each other. For example, the X, Y, and Z directions can be perpendicular to each other. In this application, the height or thickness dimension refers to the dimension along the Z direction, which will not be elaborated further below.
[0052] It is understood that the parallelism in this application is not absolute parallelism; approximate parallelism due to processing and assembly errors is also within the scope of parallelism in this application. For example, when the included angle between two structural features is less than or equal to 2° (e.g., 0.1°, 0.2°, 2°, etc.), they can be considered parallel. Similarly, the perpendicularity in this application is not absolute perpendicularity; approximate perpendicularity due to processing and assembly errors is also within the scope of perpendicularity in this application. For example, when the included angle between two structural features is 88° to 92° (e.g., 88°, 89°, 91°, etc.), they can be considered perpendicular. The limitations on parallelism and perpendicularity will not be repeated below.
[0053] Additionally, it should be noted that the directional terms such as "upper," "lower," "left," "right," "front," "back," "top," and "bottom" used in this document refer to the orientation of the device under normal use, and do not indicate or imply that the component referred to must have a specific orientation. These terms can change accordingly based on actual use and should not be construed as limiting this application.
[0054] As an example, Figures 1A to 1C A schematic diagram of a motor with an air-bearing shaft is shown, wherein, Figure 1AAn assembly diagram of an electric motor is shown. Figure 1B A schematic diagram of a split structure for an electric motor is shown. Figure 1C A cross-sectional view of an electric motor is shown. Figure 1A (AA section diagram).
[0055] Reference Figures 1A to 1C In some embodiments, the motor 100 includes a motor housing 10, an air flotation sleeve 20, a motor shaft 30, a motor stator 40, and a motor rotor 50.
[0056] The motor housing 10 is a frame-shaped structure extending along the Z-direction, such as a circular frame, rectangular frame, elliptical frame, or a similar circular frame structure. The embodiments of this application do not limit the frame-shaped structure of the motor housing 10.
[0057] Along the Z direction, the air flotation sleeve 20 is placed on the motor housing 10 to form a receiving cavity C1 with the motor housing 10. The receiving cavity C1 is used to place the motor stator 40 and the motor rotor 50 and other structures.
[0058] The motor shaft 30 includes a first shaft segment 31, a second shaft segment 32, and a third shaft segment 33 connected sequentially along the Z direction. The diameters of the first shaft segment 31 and the third shaft segment 33 are both larger than the diameter of the second shaft segment 32. The first end face 311 of the first shaft segment 31 and the second end face 331 of the third shaft segment 33 are arranged opposite to each other along the Z direction.
[0059] The air flotation sleeve 20 is fitted on the outside of the second shaft section 32, and a first air flotation layer Q1 is formed between the air flotation sleeve 20 and the second shaft section 32. An air supply channel 21 is provided on the air flotation sleeve 20. The air inlet 211 of the air supply channel 21 is located on the outer peripheral surface 22 of the air flotation sleeve 20, and the air outlet 212 of the air supply channel 21 is connected to the first air flotation layer Q1.
[0060] Furthermore, the air flotation sleeve 20 is located between the first end face 311 and the second end face 331. The air flotation sleeve 20 includes a third end face 23 opposite to the first end face 311 and a fourth end face 24 opposite to the second end face 331. A second air flotation layer Q2 is formed between the first end face 311 and the third end face 23, and a third air flotation layer Q3 is formed between the second end face 331 and the fourth end face 24. Both the second air flotation layer Q2 and the third air flotation layer Q3 are connected to the first air flotation layer Q1. That is, the gas supplied by the air supply channel 21 can reach the second air flotation layer Q2 and the third air flotation layer Q3 via the first air flotation layer Q1. Thus, the first air flotation layer Q1, the second air flotation layer Q2, and the third air flotation layer Q3 form an air flotation bearing.
[0061] In some embodiments, the third shaft segment 33 is disposed in the receiving cavity C1 and is fixedly connected to the motor rotor 50 via the connecting plate 60. The motor stator 40 is also disposed in the receiving cavity C1 and is fixedly connected to the fourth end face 24 of the air flotation sleeve 20. For example, the fourth end face 24 of the air flotation sleeve 20 has a stepped structure, including a first stepped surface 241, a stepped side surface 242, and a second stepped surface 243. The first stepped surface 241 and the second stepped surface 243 are perpendicular to the Z direction, and the stepped side surface 242 is parallel to the Z direction. The first stepped surface 241 is closer to the bottom of the receiving cavity C1 along the Z direction than the second stepped surface 243. The first stepped surface 241 and the second end face 331 form a third air flotation layer Q3, the second stepped surface 243 covers the motor housing 10, and the motor stator 40 is fixedly connected to the second stepped surface 243.
[0062] In some embodiments, the motor rotor 50 includes a circular groove 51 with its opening facing the Z direction. A drive end 41 of the motor stator 40 extending along the Z direction extends into the circular groove 51, enabling the motor stator 40 to drive the motor rotor 50 to rotate. For example, the drive end 41 of the motor stator 40 is provided with multiple sets of coils (not shown in the figure) at different angles. When the coils are energized, they can generate a magnetic field. By gradually switching the power supply to the multiple sets of coils, a rotating magnetic field can be generated. The groove wall of the circular groove 51 of the motor rotor 50 can be spaced with permanent magnets of different polarities (not shown in the figure) along the circumference of the circular groove 51. Thus, the rotating magnetic field can drive the permanent magnets to rotate, thereby enabling the motor stator 40 to drive the motor rotor 50 to rotate. It is understood that in other embodiments, the motor stator 40 and the motor rotor 50 may also have other assembly structures, which are not limited in the embodiments of this application.
[0063] When the motor 100 is operating, the air supply channel 21 can be filled with air through the air inlet 211. The gas flows from the air outlet 212 of the air supply channel 21 through the first air flotation layer Q1 to the second air flotation layer Q2 and the third air flotation layer Q3, and then flows from the second air flotation layer Q2 and the third air flotation layer Q3 to the outside of the motor 100. It can be understood that due to the presence of the first air flotation layer Q1, the second air flotation layer Q2, and the third air flotation layer Q3, there is no physical contact between the motor shaft 30 and the air flotation sleeve 20. Furthermore, the motor rotor 50 and the connecting plate 60 do not contact the inner wall of the receiving cavity C1. At this time, the coils on the motor stator 40 can be energized, thereby driving the motor rotor 50 to rotate, and then the motor rotor 50 drives the motor shaft 30 to rotate through the connecting plate 60. It can be understood that since there is no physical contact between the motor shaft 30 and the air flotation sleeve 20 when rotating, the friction between the motor shaft 30 and the air flotation sleeve 20 is reduced, which can improve the rotation efficiency of the motor shaft 30 and does not generate additional heat. Furthermore, if the air bearing sleeve 20 experiences vibration, the vibration will not be transmitted to the motor shaft 30, thereby ensuring the rotational accuracy of the motor shaft 30 and enabling the motor 100 to be used in high-precision rotation scenarios.
[0064] However, in a vacuum (or negative pressure) environment, if a motor with air bearings is used to improve motor precision, airflow will escape from the second and third air bearing layers, thus disrupting the vacuum environment. If a motor with ordinary bearings is used, the required precision cannot be achieved.
[0065] Therefore, this application provides an embodiment of a motor, including a motor shaft and an air bearing sleeve, wherein the air bearing sleeve is fitted onto the motor shaft and forms an air bearing layer between the air bearing sleeve and the motor shaft. An air supply channel and an air exhaust channel are provided within the air bearing sleeve, the air supply channel being used to inflate the air bearing layer. An exhaust groove is also provided at the location of the motor shaft or air bearing sleeve within the air bearing layer, the exhaust groove communicating with the exhaust channel.
[0066] The above solution allows for the formation of an air-bearing structure using an air supply channel and an air-bearing layer, ensuring the motor's rotational accuracy. Gas is extracted from the exhaust channel to prevent leakage from the air-bearing layer into the external vacuum environment. This approach maintains motor accuracy without disrupting the vacuum environment, enabling the motor to be used in vacuum and high-precision applications.
[0067] The motor in the embodiments of this application is described below.
[0068] As an example, Figures 2A to 2D A schematic diagram of a motor with an air-bearing shaft is shown, wherein, Figure 2A According to some embodiments of this application, an assembly diagram of an electric motor is shown. Figure 2B According to some embodiments of this application, a schematic diagram of a split structure for an electric motor is shown. Figure 2CAccording to some embodiments of this application, a cross-sectional view of an electric motor is shown. Figure 2A (BB cross-section diagram in the middle). Figure 2D According to some embodiments of this application, a cross-sectional view of an electric motor is shown. Figure 2A (CC section diagram).
[0069] Reference Figures 2A to 2D In some embodiments of this application, the motor 100 includes a motor housing 10, an air bearing sleeve 20, a motor shaft 30, a motor stator 40, and a motor rotor 50. The assembly relationship and detailed structure of the motor housing 10, air bearing sleeve 20, motor shaft 30, motor stator 40, and motor rotor 50 can be found in [reference needed]. Figures 1A to 1C Examples from [the document]. With [other examples]. Figures 1A to 1C Unlike the embodiments in the previous application, in the embodiments of this application, the first end face 311 of the first shaft segment 31 or the third end face 23 of the air flotation sleeve 20 is provided with a first exhaust groove 312 opposite to the second air flotation layer Q2, and the second end face 331 of the third shaft segment 33 or the fourth end face 24 of the air flotation sleeve 20 is provided with a second exhaust groove 332 opposite to the third air flotation layer Q3. The first exhaust groove 312 is used to retain part of the gas flowing through the second air flotation layer Q2, and the second exhaust groove 332 is used to retain part of the gas flowing through the third air flotation layer Q3. In addition, an exhaust channel 25 is also provided on the air flotation sleeve 20. The exhaust port 251 of the exhaust channel 25 is located on the outer peripheral surface 22 of the air flotation sleeve 20, and the exhaust port 252 of the exhaust channel 25 is connected to the second air flotation layer Q2 and the third air flotation layer Q3 respectively. The exhaust channel is used to extract gas from the first exhaust groove, the second exhaust groove, the second air flotation layer and the third air flotation layer.
[0070] For example, in the embodiments of this application, the motor 100 in the embodiments of this application is described with the example of the first exhaust groove 312 being formed on the first shaft segment 31 and the second exhaust groove 332 being formed on the third shaft segment 33.
[0071] In the embodiments of this application, there are multiple first exhaust grooves 312, each of which is an annular groove surrounding the second shaft segment 32, and the radii of the multiple first exhaust grooves 312 are different. The first exhaust grooves 312 can retain part of the gas in the second air flotation layer Q2 to prevent the gas in the second air flotation layer Q2 from overflowing the motor due to excessive gas flow rate. It can be understood that by gradually exhausting gas through multiple first exhaust grooves 312 with different radii, the exhaust effect can be improved, and gas overflow from the motor can be prevented from damaging the vacuum environment in which the motor is located. For example, the multiple first exhaust grooves 312 can be concentric annular grooves, and the centers of the multiple first exhaust grooves 312 are located on the axis of the motor shaft 30. It can be understood that the gas in the second air flotation layer Q2 flows in the radial direction away from the axis of the motor shaft 30. Therefore, the airflow will first enter the first exhaust groove 312 with the smallest radius. If the gas in the first exhaust groove 312 with the smallest radius is full or the airflow speed is too fast, the gas will continue to flow outward. That is to say, even if exhaust is only carried out through one first exhaust groove 312, some gas may still overflow. Therefore, multiple first exhaust channels 312 with different radii can be formed. When the gas in the second air flotation layer Q2 flows through the first exhaust channel 312 with a smaller radius, it will also enter the first exhaust channel 312 with a larger radius. Therefore, by forming multiple first exhaust channels 312 with different radii for gradual exhaust, the airflow can be prevented from flowing directly through the first exhaust channel 312 and out of the motor 100 too quickly, thereby improving the exhaust effect of the first exhaust channel 312. In some embodiments, the number of first exhaust channels 312 is 2 to 4. In the embodiments of this application, 3 is used as an example. The embodiments of this application do not limit the number of first exhaust channels.
[0072] In some embodiments of this application, among the plurality of first exhaust grooves 312, the groove body corresponding to the smaller radius of the first exhaust groove 312 has a larger radial dimension along the motor shaft 30. It can be understood that the larger the dimension of the first exhaust groove 312, the more gas it can retain. Therefore, during the gradual exhaust process, the smaller the radius of the first exhaust groove 312, the more gas it can retain, further preventing gas leakage and improving the exhaust effect.
[0073] In some embodiments of this application, a gas sensor can also be installed in the first exhaust trough 312 with the largest radius (corresponding to the outermost first exhaust trough 312) to detect whether there is gas leakage. If the gas sensor detects a gas leakage, a warning can be issued so that the operator can stop the gas supply in time to prevent the vacuum environment of the motor from being disrupted. Similarly, a gas sensor can also be installed in the second exhaust trough 332 with the largest radius (corresponding to the outermost second exhaust trough 332) to detect whether gas flows out of the third air flotation layer Q3, ensuring that any gas overflow from the motor 100 that disrupts the vacuum environment can be detected in time.
[0074] It is understood that the gas supplied by the gas supply channel 21 reaches the first exhaust groove 312 via the first air flotation layer Q1 and the second air flotation layer Q2. The first exhaust groove 312 can guide the gas to flow along its own groove, thereby preventing the gas from overflowing from the second air flotation layer Q2. Furthermore, the air inlet 252 of the exhaust channel 25 is connected to the second air flotation layer Q2, thus allowing the gas in the second air flotation layer Q2 and the first exhaust groove 312 to be extracted, thereby preventing gas leakage. It is understood that if the first exhaust groove 312 is not provided, and the gas flow rate in the second air flotation layer Q2 is too fast, only a portion of the gas may be extracted through the air inlet 252 of the exhaust channel 25, while another portion of the gas may overflow from the second air flotation layer Q2 into the motor 100, thereby disrupting the vacuum environment in which the motor 100 operates. Therefore, in the embodiments of this application, a first exhaust groove 312 can be opened to guide the gas in the second air flotation layer Q2 to flow in its own groove, so that the exhaust channel 25 can extract the gas from the first exhaust groove 312, so as to avoid most of the gas overflowing from the motor 100 and destroying the vacuum environment.
[0075] Similarly, the second exhaust groove 332 can retain some of the gas in the third air flotation layer Q3 to prevent the gas in the third air flotation layer Q3 from overflowing due to excessive gas flow rate. The configuration of the second exhaust groove 332 on the third shaft section 33 can refer to the configuration of the first exhaust groove 312 on the first shaft section 31, and will not be described in detail here.
[0076] Reference Figure 2D In some embodiments of this application, the exhaust channel 25 includes a first sub-channel 253 connecting the second air flotation layer Q2 and the third air flotation layer Q3, and a second sub-channel 254 connecting the first sub-channel 253 and the exhaust outlet 251 of the exhaust channel 25. For ease of description, the extension direction of one exhaust channel 25 can be referred to as the N direction. Figure 2D This is a cross-sectional view of the motor 100 in the NZ plane. The first sub-channel 253 includes a first air inlet 2521 communicating with the second air flotation layer Q2 and a second air inlet 2522 communicating with the third air flotation layer Q3. Along the Z direction, the first air inlet 2521 is opposite to the first exhaust groove 312, and the second air inlet 2522 is opposite to the second exhaust groove 332.
[0077] For example, the first sub-channel 253 can extend along the Z direction, thereby connecting the second air flotation layer Q2 and the third air flotation layer Q3. In this way, gas in the second air flotation layer Q2 can enter the first sub-channel 253 through the first air inlet 2521, and gas in the third air flotation layer Q3 can enter the first sub-channel 253 through the second air inlet 2522. This achieves the effect of extracting gas from the second air flotation layer Q2 and the third air flotation layer Q3 through the exhaust channel 25.
[0078] Furthermore, the first air inlet 2521 is opposite to the first exhaust groove 312, and the second air inlet 2522 is opposite to the second exhaust groove 332. Thus, the exhaust channel 25 can directly extract gas from the first exhaust groove 312 through the first air inlet 2521, eliminating the need for the gas in the first exhaust groove 312 to be extracted by the exhaust channel 25, thereby improving the exhaust efficiency of the exhaust channel 25. Similarly, the second air inlet 2522 can directly extract gas from the second exhaust groove 332, further improving the exhaust efficiency of the exhaust channel 25, reducing gas overflow from the second air flotation layer Q2 and the third air flotation layer Q3, and preventing gas from disrupting the vacuum environment of the motor 100.
[0079] It is understood that since there are multiple first exhaust channels 312 and multiple second exhaust channels 332, in the embodiments of this application, the exhaust channel 25 may also include multiple sets, with each set of exhaust channels 25 corresponding to one of the multiple first exhaust channels 312, and the first air inlet 2521 of each set of exhaust channels 25 opposite to the corresponding first exhaust channel 312. Similarly, each set of exhaust channels 25 corresponds to one of the multiple second exhaust channels 332, with the second air inlet 2522 of each set of exhaust channels 25 opposite to the corresponding second exhaust channel 332. In some embodiments, the radial dimension of the first sub-channel 253 matches the dimension of the corresponding first exhaust channel 312 or the second exhaust channel 332. It is understandable that since the radial dimension of the first exhaust groove 312 with a smaller radius is larger along the motor shaft 30, the radial dimension of the corresponding first sub-channel 253 can also be set larger in order to improve the efficiency of the first sub-channel 253 in extracting gas from the corresponding first exhaust groove 312 and second exhaust groove 332, thereby improving the exhaust effect of the exhaust channel 25.
[0080] For example, in an embodiment of this application, the first exhaust groove 312 includes three circular grooves with different radii. Similarly, the second exhaust groove 332 also includes three circular grooves with different radii. The first exhaust groove 312 and the second exhaust groove 332 can correspond one-to-one. The exhaust channel 25 can include three sets, with one set of exhaust channels 25 corresponding to a first exhaust groove 312 and a second exhaust groove 332 of a certain radius. That is, the first exhaust groove 312 and the second exhaust groove 332 of the same radius are opposite to the first air inlet 2521 and the second air inlet 2522 of the set of exhaust channels 25. In this way, the gas in each first exhaust groove 312 has at least one exhaust channel 25 to exhaust, thereby ensuring the exhaust effect of each first exhaust groove 312. It can be understood that in some embodiments, the gas sensor can also be set at the location of the first air inlet 2521 and the second air inlet 2522 corresponding to the first exhaust groove 312 with the largest radius and the second exhaust groove 332 with the largest radius. That is, the gas sensors are located at both ends of the first sub-channels 253 of the outermost group to detect whether airflow is still passing through the first sub-channels 253 of the outermost group. If the gas sensors detect airflow, it means that gas is still flowing through the first exhaust groove 312 and / or the second exhaust groove 332 with the largest radius, which can trigger an alarm indicating that airflow is breaking the vacuum environment of the motor 100. In other embodiments, the gas sensors can also be located in other locations that can detect whether gas is overflowing, such as on the air flotation sleeve 20 or at the edge of the second air flotation layer Q2. The embodiments of this application do not limit the location of the gas sensors.
[0081] In some embodiments of this application, there are multiple exhaust channels 25 in each group, and these multiple exhaust channels 25 are circumferentially spaced around the motor shaft 30. It can be understood that each group of exhaust channels 25 corresponds to a first exhaust groove 312 of one radius. That is, a first exhaust groove 312 of one radius can correspond to multiple exhaust channels 25 axially spaced around the motor shaft 30. Multiple exhaust channels 25 can extract gas from the first exhaust groove 312 at different positions, thus preventing excessive gas retention at a certain position in the first exhaust groove 312, which would cause the gas in the second air flotation layer Q2 at that position to detach from the first exhaust groove 312 and flow out of the motor 100. This improves the uniformity of gas discharged from the first exhaust groove 312 of the corresponding radius by the exhaust channels 25 and enhances the exhaust effect. Similarly, a second exhaust groove 332 of one radius can also be vented through multiple exhaust channels 25 axially spaced around the motor shaft 30, so that multiple exhaust channels 25 in the same group vent for the second exhaust groove 332 of the same radius, thereby improving the uniformity and exhaust effect of the second exhaust groove 332.
[0082] In some embodiments of this application, the first shaft segment 31, the second shaft segment 32, and the third shaft segment 33 can be independent components, thus facilitating their assembly onto the air bearing sleeve 20 and the receiving cavity C1. For example, in an embodiment of this application, when assembling the motor 100, the second shaft segment 32 and the third shaft segment 33 can be fixedly connected. Then, the third shaft segment 33 is fixedly connected to the motor rotor 50 via the connecting plate 60 and placed inside the frame-shaped motor housing 10. The motor stator 40 is then fixed to the second stepped surface 243 of the air bearing sleeve 20. The air bearing sleeve 20 and the motor housing 10 are then covered along the Z-direction. Finally, the first shaft segment 31 and the second shaft segment 32 are fixedly connected, thereby achieving the assembly of the motor 100.
[0083] like Figure 3A In some embodiments of this application, to improve the rotational efficiency of the motor shaft 30, a channel 34 extending in the Z direction can be opened at the axial center of the motor shaft 30, thereby reducing the weight of the motor shaft 30. In this case, the first shaft segment 31, the second shaft segment 32, and the third shaft segment 33 are all annular structures. It is understood that since the first shaft segment 31, the second shaft segment 32, and the third shaft segment 33 are independent components, there may be a gap along the Z direction between the fifth end face 321 of the first shaft segment 31 and the second shaft segment 32. For example, if the first shaft segment 31 and the second shaft segment 32 are fixed by multiple bolts, and if both the fifth end face 321 and the first end face 311 are rough surfaces, a gap will exist between the fifth end face 321 and the first end face 311, allowing the gas in the second air flotation layer Q2 to overflow from the motor 100 through this gap and the channel 34. Therefore, in some embodiments of this application, a first sealing ring 71 is provided between the first shaft segment 31 and the second shaft segment 32, and / or a second sealing ring 72 is provided between the second shaft segment 32 and the third shaft segment 33. This ensures the sealing between the first shaft segment 31 and the second shaft segment 32, as well as the sealing between the second shaft segment 32 and the third shaft segment 33.
[0084] As an example, Figure 3A According to some embodiments of this application, a cross-sectional view of a motor shaft is shown.
[0085] Reference Figure 3AIn some embodiments of this application, a first sealing groove 3111 is formed on the portion of the first end face 311 of the first shaft segment 31 of the motor shaft 30 that is opposite to the fifth end face 321 of the second shaft segment 32 along the Z direction. Similarly, a second sealing groove 3211 is formed on the portion of the fifth end face 321 opposite to the first sealing groove 3111. The first and second sealing grooves 3111 and 3211 can be annular grooves. A first sealing ring 71 can be disposed in the space where the first and second sealing grooves 3111 and 3211 mate to improve the sealing performance between the first end face 311 and the fifth end face 321. Similarly, a second sealing ring 72 is also provided between the sixth end face 322 of the second shaft segment 32, which is opposite to the second end face 331 along the Z direction, and the second end face 331. The arrangement of the second sealing ring 72 can refer to the arrangement of the first sealing ring 71, and will not be described in detail here.
[0086] In other embodiments, the first end face 311 and the fifth end face 321 may also have a knife-edge structure, and the first sealing ring 71 can be assembled in the knife-edge groove, which can also ensure the sealing performance of the first end face 311 and the fifth end face 321, and the first sealing ring 71 is easy to assemble. In some embodiments, the first sealing ring 71 may be a metal sealing ring.
[0087] As an example, Figure 3B According to some embodiments of this application, a cross-sectional view of another motor shaft is shown.
[0088] Reference Figure 3B In some embodiments of this application, the first shaft segment 31 has a first cutting edge 3112 at the edge of the channel 34 on the first end face 311, and the fifth end face 321 of the second shaft segment 32 has a second cutting edge 3212 at the edge of the channel 34. The first sealing ring 71 can be disposed in the space where the first cutting edge 3112 and the second cutting edge 3212 mate. Furthermore, since the first sealing ring 71 is exposed within the channel 34, it is convenient to maintain or replace the first sealing ring 71. Similarly, a second sealing ring 72 is also disposed between the sixth end face 322 of the second shaft segment 32, which is opposite to the second end face 331 along the Z direction, and the second end face 331. The arrangement of the second sealing ring 72 can refer to the arrangement of the first sealing ring 71, and will not be described in detail here.
[0089] Continue to refer to Figure 2B and Figure 2C In some embodiments of this application, in order to improve the uniformity of air supply, the number of air supply channels 21 can be multiple, and the multiple air supply channels 21 are distributed at intervals along the circumference of the air flotation sleeve 20. That is, air can be supplied simultaneously through multiple air supply channels 21, thereby improving the uniformity of the air mold forming the first air flotation layer Q1 around the motor shaft 30 (or the second shaft segment 32).
[0090] In some embodiments, a first annular channel 81 is formed within the air flotation sleeve 20, surrounding the second shaft segment 32. The first annular channel 81 connects multiple air supply channels 21. That is, multiple air supply channels 21 can be connected through the first annular channel 81, thereby further improving the uniformity of air supply to the air supply channels 21.
[0091] In some embodiments, the air flotation sleeve 20 is further provided with a plurality of first throttling holes 28, each of which corresponds one-to-one with a plurality of air supply channels 21. Each first throttling hole 28 is connected to the corresponding air supply channel 21, the second air flotation layer Q2, and the third air flotation layer Q3. In this way, air can also be supplied to the second air flotation layer Q2 and the third air flotation layer Q3 through the air supply channels 21, thereby ensuring the uniformity of the air film of the first air flotation layer Q1, the second air flotation layer Q2, and the third air flotation layer Q3.
[0092] In some embodiments, the first throttling orifice 28 includes a first orifice 281 and a second orifice 282. The first throttling orifice 28 is connected to the second air flotation layer Q2 through the first orifice 281 and to the third air flotation layer Q3 through the second orifice 282. Furthermore, a first exhaust groove 312 surrounds the first orifice 281, and a second exhaust groove 332 surrounds the second orifice 282. That is, both the first orifice 281 and the second orifice 282 of the first throttling orifice 28 are surrounded within the first exhaust groove 312 and the second exhaust groove 332. This ensures that the gas flowing out from the first orifice 281 and the second orifice 282 can first form an air film at the second air flotation layer Q2 and the third air flotation layer Q3 before entering the first exhaust groove 312 and the second exhaust groove 332 and being extracted.
[0093] In some embodiments of this application, an air guide channel 29 is also provided inside the air flotation sleeve 20. The air guide channel 29 and the air supply channel 21 are spaced apart along the axial direction of the air flotation sleeve 20. Furthermore, the air inlet 291 of the air guide channel 29 is connected to the first throttling orifice 28, and the air outlet 292 of the air guide channel 29 is connected to the first air flotation layer Q1. It can be understood that the air guide channel 29 can ensure the uniformity of air intake into the first air flotation layer Q1 along the Z direction, and ensure the uniformity of the air film thickness of the first air flotation layer Q1, thereby improving the stability of the first air flotation layer Q1 in supporting the rotation of the motor shaft 30.
[0094] In some embodiments of this application, there are multiple air guide channels 29, which are spaced apart circumferentially along the air flotation sleeve 20. A second annular channel 82 surrounding the second shaft segment 32 is also provided within the air flotation sleeve 20, and the multiple air guide channels 29 communicate with the second annular channel 82. It can be understood that the multiple air guide channels 29 being spaced apart axially along the air flotation sleeve 20 ensures the uniformity of air intake along the circumference of the air flotation sleeve 20. Furthermore, the second annular channel 82 connects the multiple air guide channels 29 to ensure the uniformity of air intake. Thus, the uniformity of the air film in the first air flotation layer Q1 can be ensured, thereby improving the stability of the motor shaft 30 rotation.
[0095] It is understood that in the embodiments of this application, the motor 100 is used in a vacuum environment, where the heat conduction effect is poor. Although no heat is generated between the motor shaft 30 and the air bearing sleeve 20 due to friction, a portion of the electrical energy in the coils of the motor stator 40 within the receiving cavity C1 will be converted into heat. If the motor stator 40 is not cooled, the heat will continue to accumulate, potentially causing the air bearing sleeve 20 to deform due to increased heat. Consequently, the air bearing layer between the air bearing sleeve 20 and the motor shaft 30 will have uneven thickness, thus affecting the rotational accuracy of the motor shaft 30. Therefore, in some embodiments of this application, cooling channels can also be formed inside the motor stator 40.
[0096] As an example, Figures 4A to 4B A schematic diagram of a motor stator is shown, wherein, Figure 4A According to some embodiments of this application, a schematic diagram of a split structure for a motor stator is shown. Figure 4B According to some embodiments of this application, a line drawing of an electric motor stator is shown.
[0097] Reference Figure 4A and Figure 4B In some embodiments of this application, the motor stator 40 includes a stator base 42 and a drive end 41, and the stator base 42 and the drive end 41 are fixedly connected along the Z direction.
[0098] The drive end 41 includes an annular wall 411 and a stator coil 412 disposed on the annular wall 411. A cooling channel 413 is formed inside the annular wall 411. The motor stator 40 also includes an annular sealing wall 43 and a sealing plate 44. The radius of the annular sealing wall 43 is smaller than the radius of the annular wall 411. The annular sealing wall 43 is disposed inside the annular wall 411 and is used to seal the stator coil 412 on the annular wall 411. The sealing plate 44 is disposed along the Z direction on the end of the annular wall 411 away from the stator base 42. The sealing plate 44 is used to seal the cooling channel 413 formed on the annular wall 411. A liquid inlet 4131 and a liquid outlet 4132 are also formed on the annular wall 411. Both the liquid inlet 4131 and the liquid outlet 4132 are connected to the cooling channel 413, thereby allowing the cooling medium to be input or output to the cooling channel 413. The stator coil 412 on the motor stator 40 can be cooled through the cooling channel 413 to prevent heat accumulation on the stator coil 412, thereby preventing the air float sleeve 20 from heating and deforming, ensuring the uniformity of the air film supporting the motor shaft 30, and thus ensuring the rotational accuracy of the motor shaft 30.
[0099] In some embodiments of this application, the extension path of the cooling channel 413 is a zigzag path, which can extend the path of the cooling medium within the cooling channel 413, thereby improving the cooling effect.
[0100] The above description illustrates the implementation of this application through specific embodiments. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. Although the description of this application is presented in conjunction with some embodiments, this does not mean that the features of this application are limited to this embodiment. On the contrary, the purpose of describing the application in conjunction with embodiments is to cover other options or modifications that may be derived from this application. This application may also be implemented without using these details. Furthermore, to avoid confusion or obscuring the focus of this application, some specific details have been omitted in the description. It should be noted that, unless otherwise specified, the embodiments and features in the embodiments of this application can be combined with each other.
[0101] In the description of this application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "outer", "inner", "circumferential", "radial", "axial", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.
[0102] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "set," "install," "connect," and "fit" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal communication between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.
[0103] Obviously, those skilled in the art can make various modifications and variations to this application without departing from the spirit and scope of this application. Therefore, if such modifications and variations fall within the scope of this application and its equivalents, this application also intends to include such modifications and variations.
Claims
1. A vacuum motion device, characterized in that, include: The motor shaft includes a first shaft segment, a second shaft segment, and a third shaft segment connected sequentially along its axial direction, wherein the diameters of the first shaft segment and the third shaft segment are both larger than the diameter of the second shaft segment, and the first end face of the first shaft segment and the second end face of the third shaft segment are disposed opposite to each other along the axial direction. An air flotation sleeve is fitted on the outside of the second shaft segment, and a first air flotation layer is formed between the air flotation sleeve and the second shaft segment. An air supply channel is provided on the air flotation sleeve, the air inlet of the air supply channel is located on the outer peripheral surface of the air flotation sleeve, and the air outlet of the air supply channel is connected to the first air flotation layer. Furthermore, the air flotation sleeve is located between the first end face and the second end face. The air flotation sleeve includes a third end face opposite to the first end face and a fourth end face opposite to the second end face. A second air flotation layer is formed between the first end face and the third end face, and a third air flotation layer is formed between the second end face and the fourth end face. A first exhaust groove opposite to the second air flotation layer is formed on the first end face or the third end face, and a second exhaust groove opposite to the third air flotation layer is formed on the second end face or the fourth end face. The first exhaust groove is used to retain part of the gas flowing through the second air flotation layer, and the second exhaust groove is used to retain part of the gas flowing through the third air flotation layer. The air flotation sleeve is also provided with an exhaust channel. The outlet of the exhaust channel is located on the outer peripheral surface of the air flotation sleeve. The inlet of the exhaust channel is connected to the second air flotation layer and the third air flotation layer respectively. The exhaust channel is used to extract gas from the first exhaust groove, the second exhaust groove, the second air flotation layer and the third air flotation layer.
2. The vacuum motion device as described in claim 1, characterized in that, There are multiple first exhaust grooves, each of which is an annular groove surrounding the second shaft segment, and the radii of the multiple first exhaust grooves are different.
3. The vacuum motion device as described in claim 2, characterized in that, Among the multiple first exhaust slots, the slot with the smaller radius has a larger radial dimension along the motor shaft.
4. The vacuum motion device as described in claim 1, characterized in that, The number of air supply channels is multiple, and the multiple air supply channels are distributed at intervals along the circumference of the air flotation sleeve; The air flotation sleeve has a first annular channel that surrounds the second shaft segment, and the first annular channel connects to multiple air supply channels.
5. The vacuum motion device as described in claim 4, characterized in that, The air flotation sleeve also has multiple first throttling holes, each of which corresponds to a multiple air supply channel. Each first throttling hole is connected to the corresponding air supply channel, the second air flotation layer, and the third air flotation layer.
6. The vacuum motion device as described in claim 5, characterized in that, The first throttling orifice includes a first opening and a second opening. The first throttling orifice is connected to the second air flotation layer through the first opening and to the third air flotation layer through the second opening. Furthermore, the first exhaust groove surrounds the first orifice, and the second exhaust groove surrounds the second orifice.
7. The vacuum motion device as described in claim 5, characterized in that, The air flotation sleeve is also provided with an air guiding channel, and the air guiding channel and the air supply channel are arranged at intervals along the axial direction of the air flotation sleeve. Furthermore, the air inlet of the air guide channel is connected to the first throttling orifice, and the air outlet of the air guide channel is connected to the first air flotation layer.
8. The vacuum motion device as described in claim 7, characterized in that, The number of air guiding channels is multiple, and the multiple air guiding channels are arranged at intervals along the circumference of the air flotation sleeve; The air flotation sleeve also has a second annular channel surrounding the second shaft section, and multiple air guide channels are connected to the second annular channel.
9. The vacuum motion device as described in claim 2, characterized in that, The exhaust passage includes a first sub-passage connecting the second air flotation layer and the third air flotation layer, and a second sub-passage connecting the first sub-passage with the exhaust passage outlet.
10. The vacuum motion device as described in claim 9, characterized in that, The first sub-channel includes a first air inlet communicating with the second air flotation layer and a second air inlet communicating with the third air flotation layer; The first air inlet is opposite to the first exhaust slot, and the second air inlet is opposite to the second exhaust slot.
11. The vacuum motion device as described in claim 10, characterized in that, The exhaust channel includes multiple sets, and each set of exhaust channels corresponds one-to-one with multiple first exhaust slots; The first air inlet of each group of exhaust channels is opposite to the corresponding first exhaust slot; The second exhaust groove includes multiple ones, and the multiple sets of exhaust channels correspond one-to-one with the multiple second exhaust grooves; The second air inlet of each set of exhaust channels is opposite to the corresponding second exhaust slot.
12. The vacuum motion device as described in claim 11, characterized in that, The number of exhaust channels in each group is multiple; The multiple exhaust channels are arranged circumferentially around the motor shaft.
13. The vacuum motion device as described in claim 1, characterized in that, The first shaft segment, the second shaft segment, and the third shaft segment are independent components.
14. The vacuum motion device as described in claim 13, characterized in that, A sealing ring is provided between the first shaft segment and the second shaft segment; and / or, a sealing ring is provided between the second shaft segment and the third shaft segment.
15. The vacuum motion device as described in claim 1, characterized in that, It also includes a motor stator and a motor rotor, wherein the motor stator is sleeved in the motor rotor and the motor rotor is connected to the motor shaft; The motor stator includes an annular wall and stator coils disposed on the annular wall, and a cooling channel is provided inside the annular wall.
16. The vacuum motion device as described in claim 15, characterized in that, The extension path of the cooling channel is a broken line path.