X-ray guiding device for multi-sample measurement and x-ray detection apparatus

Abstract

The application provides an X-ray guiding device and an X-ray detection equipment for multi-sample measurement. An incident light splitting component is configured to split an incident light beam into a first incident sub-beam and a second incident sub-beam. A detection light limiting component is provided with a first detection channel matched with the shape of a first detection area and a second detection channel matched with the shape of a second detection area. A first detection light beam generated by the first detection area is transmitted to a first detection area of a detector through the first detection channel, and a second detection light beam generated by the second detection area is transmitted to a second detection area of the detector through the second detection channel. The incident light splitting component splits the incident light beam, and the detection light beam can be transmitted to different detection areas of the detector through the detection light limiting component, so that parallel measurement of multiple samples is realized, and the utilization rate of the light source is improved to meet the demand of high-throughput analysis.

Description

Technical Field

[0001] This application relates to the field of X-ray optical technology, specifically to an X-ray guiding device and X-ray detection equipment for multi-sample measurement. Background Technology

[0002] X-ray diffraction (XRD) and X-ray fluorescence spectroscopy (XRF) are widely used in materials research. In existing X-ray detection equipment (such as X-ray diffraction equipment and X-ray fluorescence equipment), an incident beam is usually emitted by an X-ray tube as the light source. After the incident beam is modulated by optical devices (such as masks, knife slits, and Sola slits), it forms a single beam that irradiates a single sample.

[0003] As a large electron emission source, the long axis of the linear focal spot produced by a closed X-ray tube in XRD measurement is usually greater than 10 mm, and the diameter of the focal spot in XRF measurement is usually greater than 10 mm.

[0004] During sample measurement, the incident beam must be spatially clipped using optical devices based on the X-ray divergence and sample size. This ensures that the projected area on the sample surface does not exceed the sample's detection area, preventing the beam from spilling over into the sample holder or non-target areas. Especially when measuring smaller samples, it is often necessary to further restrict the width and height of the beam spot to ensure it is effectively projected within the sample's effective detection range.

[0005] However, in existing X-ray detection equipment, in order to effectively measure small-sized samples, the beam generated by the closed X-ray tube is cut to a size no larger than the sample detection surface. This results in a significant reduction in the spot size of the incident beam compared to the focal spot size generated by the closed X-ray tube, leading to low utilization of the X-ray source. At the same time, when measuring a large number of samples, existing X-ray detection equipment requires a long total measurement time.

[0006] It should be noted that the information in the background section above is only used to enhance the understanding of the background technology of this application, and therefore may include technical information that does not constitute technical information known or easily inferred by a person skilled in the art. Summary of the Invention

[0007] In view of the aforementioned problems, this application is made to provide an X-ray guiding device and X-ray detection equipment for multi-sample measurement that overcomes or at least partially solves the aforementioned problems, comprising: An X-ray guiding device for multi-sample measurement, the device being used to guide an X-ray incident beam to irradiate the detection area corresponding to different samples, and to guide the generated probe beam to different detection areas of the detector; the device includes: an incident light splitting component and a probe light limiting component; The incident light splitting component is configured to split the incident light beam into a first incident sub-beam and a second incident sub-beam; wherein the illumination area of ​​the first incident sub-beam matches a first detection area, and the illumination area of ​​the second incident sub-beam matches a second detection area. The detection light limiting component is provided with a first detection channel that matches the shape of the first detection area and a second detection channel that matches the shape of the second detection area; The first detection beam generated in the first detection area is transmitted to the first detection area of ​​the detector through the first detection channel, and the second detection beam generated in the second detection area is transmitted to the second detection area of ​​the detector through the second detection channel.

[0008] Furthermore, the probe light limiting component is a mask structure; the first probe channel and the second probe channel are aperture structures.

[0009] Furthermore, the incident light splitting assembly is provided with a first incident channel and a second incident channel; The incident light splitting component is configured to split the incident beam into a first incident sub-beam through the first incident channel, and to split the incident beam into a second incident sub-beam through the second incident channel.

[0010] Furthermore, the incident light splitting component is a mask structure; the first incident channel and the second incident channel are aperture structures.

[0011] Furthermore, it also includes: a connecting plate; The incident light splitting component is connected to the side of the connecting plate corresponding to the incident light beam; The detection light limiting component is connected to the side of the connecting plate closest to the detector.

[0012] Furthermore, the connecting plate has a cutting edge on one side near the first detection area and the second detection area; The blade is configured to define the transverse cross-sections of the first incident sub-beam and the second incident sub-beam near the side of the connecting plate, and to define the transverse cross-sections of the first detection beam and the second detection beam near the side of the connecting plate.

[0013] Furthermore, the probe light limiting component includes a first probe light limiting member, a second probe light limiting member, and a third probe light limiting member; The second detection light limiting member is disposed between the first detection light limiting member and the third detection light limiting member, such that the first detection light limiting member and the second detection light limiting member form the first detection channel, and the third detection light limiting member and the second detection light limiting member form the second detection channel.

[0014] Furthermore, the incident light splitting assembly includes a first incident light splitter, a second incident light splitter, and a third incident light splitter; The second incident light splitter is disposed between the first incident light splitter and the third incident light splitter, so that the first incident light splitter and the second incident light splitter form the first incident channel, and the third incident light splitter and the second incident light splitter form the second incident channel.

[0015] Furthermore, it also includes: a connecting plate; The first incident light splitter, the second incident light splitter, and the third incident light splitter are connected to the side of the connecting plate corresponding to the incident light beam. The first detection light limiting member, the second detection light limiting member, and the third detection light limiting member are connected to the side of the connecting plate near the detector.

[0016] Furthermore, the connecting plate has a cutting edge on one side near the first detection area and the second detection area; The blade is configured to define the transverse cross-sections of the first incident sub-beam and the second incident sub-beam near the side of the connecting plate, and to define the transverse cross-sections of the first detection beam and the second detection beam near the side of the connecting plate.

[0017] Furthermore, it also includes: an incident light blocking device and a probe light blocking device; The incident light blocking component is disposed between the first detection area and the second detection area; The detection light blocking component is disposed on the side of the detection light limiting component near the detector, and the detection light blocking component is disposed between the first detection channel and the second detection channel.

[0018] Furthermore, it also includes: a diverging slit, a first cable slit, and a second cable slit; The diverging slit and the first Sola slit are disposed on the light-inlet side of the incident light splitting assembly; the second Sola slit is disposed on the light-outlet side of the probe light limiting assembly; The diverging slit is configured to guide the incident beam to the first Sola slit; The first Sola slit is configured to guide the incident beam to the incident beam splitting assembly.

[0019] An X-ray inspection device, the device comprising: an X-ray source, a multi-sample stage, and an apparatus as described in any embodiment of this application; The device is positioned within the irradiation path of the X-ray source; The first sample placement area of ​​the multi-sample stage matches the first detection area, and the second sample placement area of ​​the multi-sample stage matches the second detection area; When performing measurement and analysis, the X-ray source emits the incident beam to the device.

[0020] Furthermore, the device also includes: a rotary drive mechanism; the multi-sample stage is provided with a first sample stage and a second sample stage; The sample placement area of ​​the first sample stage matches the first detection area, and the sample placement area of ​​the second sample stage matches the second detection area; The output end of the rotary drive mechanism is connected to the first sample stage and the second sample stage, respectively. When the first probe beam and the second probe beam are generated, the rotary drive mechanism is configured to drive the first sample stage and the second sample stage to rotate.

[0021] This application has the following advantages: In the embodiments of this application, addressing the problems of low utilization rate and long measurement time of existing X-ray detection equipment, this application provides a solution that spatially divides the incident beam into multiple sub-beams adapted to different sample regions, and independently acquires the detection beams of different samples through different detection areas of the detector. Specifically, it is an X-ray guiding device for multi-sample measurement, the device being used to guide the X-ray incident beam to irradiate the detection regions corresponding to different samples, and to guide the generated detection beams to different detection areas of the detector; the device includes: an incident light splitting component and a detection light limiting component; the incident light splitting component is... The system is configured to split the incident light beam into a first incident sub-beam and a second incident sub-beam; wherein the illumination area of ​​the first incident sub-beam matches a first detection area, and the illumination area of ​​the second incident sub-beam matches a second detection area; the probe light limiting component has a first detection channel matching the shape of the first detection area and a second detection channel matching the shape of the second detection area; the first probe beam generated by the first detection area is transmitted to the first detection area of ​​the detector through the first detection channel, and the second probe beam generated by the second detection area is transmitted to the second detection area of ​​the detector through the second detection channel. This application splits the incident light beam using an incident light splitting component, allowing the probe beam to be transmitted to different detection areas of the detector through the probe light limiting component, thus enabling parallel measurement of multiple samples and improving light source utilization to meet high-throughput analysis requirements. Attached Figure Description

[0022] To more clearly illustrate the technical solution of this application, the drawings used in the description of this application will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the first overall structure of an X-ray guiding device for multi-sample measurement provided in an embodiment of this application; Figure 2 yes Figure 1 A top view of an X-ray guiding device for multi-sample measurement. Figure 3 This is a schematic diagram of the second overall structure of an X-ray guiding device for multi-sample measurement provided in an embodiment of this application; Figure 4 This is a schematic diagram of the third overall structure of an X-ray guiding device for multi-sample measurement provided in one embodiment of this application; Figure 5 yes Figure 4 A side view of an X-ray guiding device for multi-sample measurement. Figure 6 yes Figure 4 A schematic diagram of the combined three-dimensional structure of the connecting plate, the incident light splitting component, and the probe light limiting component; Figure 7 This is a schematic diagram of data imaging for diffraction analysis using aluminum and copper sheets as measurement samples in a specific implementation of this application; Figure 8 This is a data curve diagram of diffraction analysis performed using aluminum and copper sheets as measurement samples in a specific implementation of this application; Figure 9 This is a two-dimensional diffraction data diagram of LaB6 and Si powders used as measurement samples in a specific implementation of this application for diffraction analysis. Figure 10 This is a three-dimensional structural schematic diagram of a 96-bit high-throughput sample tray in one example of this application; Figure 11 This is a three-dimensional structural diagram of the combination of the X-ray guiding device, the first sample stage, and the second sample stage in one embodiment of this application; Figure 12 This is a three-dimensional structural diagram of the combination of the first sample stage, the second sample stage, and the rotary drive mechanism in one embodiment of this application; The attached figures are labeled as follows: 1. Incident light splitting assembly; 11. First incident channel; 12. Second incident channel; 13. First incident light splitter; 14. Second incident light splitter; 15. Third incident light splitter; 2. Probe light limiting assembly; 21. First probe channel; 22. Second probe channel; 23. First probe light limiting member; 24. Second probe light limiting member; 25. Third probe light limiting member; 3. Connecting plate; 31. Knife edge; 41. Incident light blocking member; 42. Probe light blocking member; 51. Divergence narrow 52. First cable slit; 53. Second cable slit; 6. X-ray source; 61. Incident beam; 611. First incident sub-beam; 612. Second incident sub-beam; 7. Multi-sample stage; 71. First sample stage; 711. First detection area; 7111. First probe beam; 72. Second sample stage; 721. Second detection area; 7211. Second probe beam; 73. Rotation drive mechanism; 8. Detector; 81. First detection area; 82. Second detection area. Detailed Implementation

[0024] To make the objectives, features, and advantages of this application more apparent and understandable, the application will be further described in detail below with reference to the accompanying drawings and specific embodiments. Obviously, the described embodiments are only some, not all, of the embodiments of this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0025] The inventors discovered through analysis of existing technologies that high-throughput analysis refers to a technical strategy that enables rapid, automated, and parallel detection and data acquisition of a large number of samples per unit time, thereby significantly improving experimental efficiency and data output rate. It is commonly used in scenarios such as drug polymorph screening, combinatorial materials science research, and wafer surface distribution analysis (Mapping) detection.

[0026] However, existing X-ray detection equipment typically only measures a single sample with a single beam at a time when performing high-throughput analysis, and the existing technology has the following significant drawbacks: First, when measuring small samples, to suppress background noise interference caused by the beam overflowing the sample area, the incident beam must be spatially clipped using a mask structure. While this design effectively reduces background signals, it results in most photons emitted by the X-ray source being physically blocked and failing to effectively participate in signal detection, thus significantly reducing the utilization rate of the light source. For example, for a sample placed in a 96-bit high-throughput sample tray with a single slot diameter of less than 6 mm, the length and width of the incident beam spot after clipping are typically less than 5 mm, while the size of the focal spot produced by a closed X-ray tube is typically greater than 10 mm. This is much larger than the size of the incident beam spot after clipping, meaning there is a significant clipping loss in the incident beam, resulting in low light source utilization.

[0027] Second, when there are a large number of samples, using a sequential measurement method will result in an excessively long total measurement time. Compressing the measurement time for a single sample will sacrifice the signal-to-noise ratio and data quality, thereby affecting the reliability of the measurement results.

[0028] Third, in long-cycle sequential measurements, the samples in the later rows need to remain in a state of readiness for an extended period, which places stringent requirements on the material stability of the samples. If the sample undergoes structural or compositional changes during the waiting period, it may cause measurement deviations, thereby affecting the reliability of the measurement results.

[0029] Based on the above analysis, one of the core technical concepts of this application is to provide a high-throughput analysis solution that can make full use of the space covered by the divergence angle of the light source and achieve simultaneous measurement of multiple samples without sacrificing the measurement quality and efficiency of a single channel.

[0030] Reference Figures 1 to 2This application illustrates an X-ray guiding device for multi-sample measurement according to an embodiment of the present application. The device is used to guide an X-ray incident beam 61 to irradiate the detection area corresponding to different samples, and to guide the generated probe beam to different detection areas of a detector 8. The device includes: an incident light splitting component 1 and a probe light limiting component 2. The incident light splitting component 1 is configured to split the incident light beam 61 into a first incident sub-beam 611 and a second incident sub-beam 612; wherein the illumination area of ​​the first incident sub-beam 611 matches the first detection area 711, and the illumination area of ​​the second incident light beam 612 matches the second detection area 721. The detection light limiting component 2 is provided with a first detection channel 21 that matches the shape of the first detection area 711 and a second detection channel 22 that matches the shape of the second detection area 721; The first detection beam 7111 generated by the first detection area 711 is transmitted to the first detection area 81 of the detector 8 through the first detection channel 21, and the second detection beam 7211 generated by the second detection area 721 is transmitted to the second detection area 82 of the detector 8 through the second detection channel 22.

[0031] In the embodiments of this application, addressing the problems of low utilization rate and long measurement time of the X-ray source 6 in existing X-ray detection equipment, this application provides a solution that spatially divides the incident beam 61 into multiple sub-beams adapted to different detection areas, and independently collects the detection beams of different samples through different detection areas of the detector 8. Specifically, it is an X-ray guiding device for multi-sample measurement, wherein the device is used to guide the X-ray incident beam 61 to irradiate the detection areas corresponding to different samples, and guide the generated detection beams to different detection areas of the detector 8; the device includes: an incident light splitting component 1 and a detection light limiting component 2; the incident light splitting component 1 is configured to split the incident beam 61 into a first incident sub-beam. The first incident sub-beam 611 and the second incident sub-beam 612 are respectively positioned. The irradiation area of ​​the first incident sub-beam 611 matches the first detection area 711, and the irradiation area of ​​the second incident sub-beam 612 matches the second detection area 721. The probe light limiting component 2 is provided with a first detection channel 21 matching the shape of the first detection area 711 and a second detection channel 22 matching the shape of the second detection area 721. The first probe beam 7111 generated by the first detection area 711 is transmitted to the first detection area 81 of the detector 8 through the first detection channel 21, and the second probe beam 7211 generated by the second detection area 721 is transmitted to the second detection area 82 of the detector 8 through the second detection channel 22. This application divides the incident beam 61 by the incident light splitting component 1, allowing the probe beams to be transmitted to different detection areas of the detector 8 through the probe light limiting component 2. This enables parallel measurement of multiple samples and improves the utilization rate of the light source to meet the needs of high-throughput analysis.

[0032] The following will further describe an X-ray guiding device for multi-sample measurement in this exemplary embodiment.

[0033] It should be noted that the device is applicable to various X-ray detection equipment, such as for guiding the incident beam 61 in X-ray diffraction (XRD) or X-ray fluorescence (XRF) equipment. When beam guidance is performed in an X-ray diffraction device, the detection beam is the diffracted beam produced by X-rays irradiating the sample.

[0034] When performing high-throughput analysis, a certain interval should be set between different samples so that the detection areas corresponding to different samples in the device are spatially discontinuous regions, in order to avoid beam contamination between different samples.

[0035] The irradiation area of ​​the first incident sub-beam 611 should not exceed the boundary of the first detection area 711, and the irradiation area of ​​the second incident sub-beam 612 should not exceed the boundary of the second detection area 721, so as to avoid beam overflow.

[0036] The first detection channel 21 can be used to define the lateral cross-section of the first detection beam 7111, and the second detection channel 22 can be used to define the lateral cross-section of the second detection beam 7211, thereby controlling the projection size of the first detection beam 7111 and the second detection beam 7211 on the detector 8. The first detection channel 21 and the second detection channel 22 are matched with the shape of the corresponding detection area, so that the corresponding detection beam can be fully transmitted to the detector 8 through the first detection channel 21 and the second detection channel 22, thereby ensuring the quality of the detection signal received by the detector 8.

[0037] As an example, the detector 8 may also include at least two, with the first detection area 81 and the second detection area 82 located in different independent detectors. Provided that the detection area can receive the corresponding detection beam, the detector 8 may be of type 0D (0-dimensional), 1D (1-dimensional), or 2D (2-dimensional).

[0038] It is worth noting that the incident light splitting component 1 can also split the incident light beam 61 into at least three incident sub-beams, and the at least three incident sub-beams correspond one-to-one with the corresponding number of detection areas; the probe light limiting component 2 can also be provided with probe channels corresponding to the number of at least three detection areas and matching their shapes; the probe beams generated by the at least three detection areas are respectively transmitted to the at least three detection areas of the detector 8 through the corresponding probe channels. Therefore, those skilled in the art should understand that the number of beams split by the incident light splitting component 1, the number of samples or detection areas to be tested, and the number of detection areas in the detector 8 can all be adaptively adjusted according to actual detection needs, and are not limited to the specific situation shown in the embodiments of this application. Similarly, the device is also suitable for measuring different detection areas of a single sample, but it should be ensured that the probe beams generated by different detection areas do not interfere with each other, so as to achieve independent parallel detection of different detection areas of a single sample.

[0039] Reference Figures 1 to 2 In one embodiment of this application, the incident light splitting component 1 is provided with a first incident channel 11 and a second incident channel 12; The incident light splitting component 1 is configured to split the incident beam 61 into a first incident sub-beam 611 through the first incident channel 11, and to split the incident beam 61 into a second incident sub-beam 612 through the second incident channel 12.

[0040] It should be noted that the irradiation area of ​​the first incident sub-beam 611 can be defined by the size and shape of the first incident channel 11; the irradiation area of ​​the second incident sub-beam 612 can be defined by the size and shape of the second incident channel 12.

[0041] In one embodiment of this application, the incident light splitting component 1 and the probe light limiting component 2 can both be sheet-like mask structures, and the first probe channel 21, the second probe channel 22, the first incident channel 11 and the second incident channel 12 can all be hole-like structures.

[0042] Reference Figures 3 to 4 In one embodiment of this application, the detection light limiting component 2 includes a first detection light limiting member 23, a second detection light limiting member 24, and a third detection light limiting member 25; The second detection light limiting member 24 is disposed between the first detection light limiting member 23 and the third detection light limiting member 25, so that the first detection light limiting member 23 and the second detection light limiting member 24 form the first detection channel 21, and the third detection light limiting member 25 and the second detection light limiting member 24 form the second detection channel 22.

[0043] It should be noted that the first detection light limiting member 23, the second detection light limiting member 24, and the third detection light limiting member 25 can be plate-shaped structures. In this embodiment, the first detection channel 21 and the second detection channel 22 are groove-shaped structures, which can absorb scattered light.

[0044] Reference Figure 3 In one specific embodiment of this application, the probe light limiting component 2 is installed on the light-incoming side of the detector 8, so as to directly serve as a physical connection structure integrated with the detector 8.

[0045] As an example, refer to Figure 3 The first incident sub-beam 611 and the second incident sub-beam 612 can be transmitted from one side of the first detection area 711 and the second detection area 721, respectively, and generate the first detection beam 7111 and the second detection beam 7211 on the other side.

[0046] Reference Figure 4 In one embodiment of this application, the incident light splitting component 1 includes a first incident light splitter 13, a second incident light splitter 14, and a third incident light splitter 15; The second incident light splitter 14 is disposed between the first incident light splitter 13 and the third incident light splitter 15, so that the first incident light splitter 13 and the second incident light splitter 14 form the first incident channel 11, and the third incident light splitter 15 and the second incident light splitter 14 form the second incident channel 12.

[0047] It should be noted that the first incident light splitter 13, the second incident light splitter 14, and the third incident light splitter 15 can be plate-shaped structures. In this embodiment, the first incident channel 11 and the second incident channel 12 are groove-shaped structures, which can absorb scattered light.

[0048] In one specific implementation, the first incident light splitter 13, the second incident light splitter 14, the third incident light splitter 15, the first probe light limiting member 23, the second probe light limiting member 24, and the third probe light limiting member 25 may be made of molybdenum, brass, or other heavy metal materials with high X-ray absorption rates.

[0049] Reference Figures 4 to 6 In one embodiment of this application, it further includes: a connecting plate 3; The first incident light splitter 13, the second incident light splitter 14 and the third incident light splitter 15 are connected to the side of the connecting plate 3 corresponding to the incident beam 61; The first detection light limiting member 23, the second detection light limiting member 24 and the third detection light limiting member 25 are connected to the side of the connecting plate 3 near the detector 8.

[0050] It should be noted that by using the connecting plate 3 as the connecting structure between the incident light splitting component 1 and the probe light limiting component 2, the above structure is formed into a simple and continuous whole, which makes the device more integrated and easier to process and install compared to a discrete structure.

[0051] In one specific implementation, when the device is installed in an X-ray detection equipment, the first incident light splitter 13, the second incident light splitter 14, and the third incident light splitter 15 are disposed between the X-ray source 6 and the multi-sample stage 7.

[0052] Reference Figures 5 to 6 In one embodiment of this application, the connecting plate 3 is provided with a blade 31 on the side close to the first detection area and the second detection area; The blade portion 31 is configured to define the transverse cross-sections of the first incident sub-beam 611 and the second incident sub-beam 612 near the side of the connecting plate 3, and to define the transverse cross-sections of the first detection beam 7111 and the second detection beam 7211 near the side of the connecting plate 3.

[0053] It should be noted that the blade portion 31 may be a thin sheet of high-absorption material with extremely high straightness, which is disposed on the edge of the connecting plate 3 and can be used to define the transverse cross section of the beam on one side and block the scattered light.

[0054] In a specific embodiment of this application, the side of the first incident light splitter 13, the second incident light splitter 14, and the third incident light splitter 15 corresponding to the incident beam 61 is an arc-shaped edge structure, and the side of the first detection light limiting member 23, the second detection light limiting member 24, and the third detection light limiting member 25 near the detector 8 is also an arc-shaped edge structure.

[0055] It should be noted that the aforementioned arc-shaped edge structure enables the first incident sub-beam 611 and the second incident sub-beam 612 to propagate uniformly in the corresponding opening channels, and also enables the first detection beam 7111 and the second detection beam 7211 to propagate uniformly in the corresponding opening channels, thereby ensuring the uniformity of the signal received by the detector 8. The width of the corresponding beam in the illumination direction can also be controlled by adjusting the dimensions of the arc-shaped edge structure and the spacing between the parallel plates.

[0056] Reference Figure 1 In one embodiment of this application, it further includes: an incident light blocking member 41 and a probe light blocking member 42; The incident light blocking member 41 is disposed between the first detection area 711 and the second detection area 721; The detection light blocking member 42 is disposed on the side of the detection light limiting component 2 near the detector 8, and the detection light blocking member 42 is disposed between the first detection channel 21 and the second detection channel 22.

[0057] It should be noted that the incident light blocking member 41 and the probe light blocking member 42 can be plate-shaped structures. The incident light blocking member 41 can prevent the scattered beam of the incident sub-beam from illuminating the non-corresponding detection area, for example, preventing the scattered light of the first incident sub-beam 611 from illuminating the second detection area 721; at the same time, the incident light blocking member 41 can also prevent the scattered light generated by the detection area from illuminating the non-corresponding detection area.

[0058] The detection light blocking member 42 can prevent the detection beam from shining on a non-corresponding detection area, for example, prevent the scattered light of the first detection beam 7111 from shining on the second detection area 82 of the detector 8.

[0059] In one embodiment of this application, it further includes: a diverging slit 51, a first cable slit 52, and a second cable slit 53; The diverging slit 51 and the first Sola slit 52 are disposed on the light-inlet side of the incident light splitting component 1; the second Sola slit 53 is disposed on the light-outlet side of the probe light limiting component 2; The diverging slit 51 is configured to guide the incident beam 61 to the first Sola slit 52; The first Sola slit 52 is configured to guide the incident beam 61 to the incident beam splitting assembly 1.

[0060] It should be noted that the diverging slit 51 can be used to control the projection length of the illumination area of ​​the first incident sub-beam 611 and the second incident sub-beam 612.

[0061] The first Solar slit 52 and the second Solar slit 53 are composed of a set of parallel high-absorption metal sheets, with a spacing of tens to thousands of micrometers. Both the first Solar slit 52 and the second Solar slit 53 can be used to block and absorb portions of the beam with excessive tilt angles. Specifically, the first Solar slit 52 can also be used to control the projection width of the illumination areas of the first incident sub-beam 611 and the second incident sub-beam 612, and the second Solar slit 53 can also be used to control the projection width of the first detection beam 7111 and the second detection beam 7211 on the detector 8.

[0062] It should be noted that the dimensions of the first detection channel 21, the second detection channel 22, the first incident channel 11, and the second incident channel 12 can all have a certain length, width, and depth. The width and depth of the first detection channel 21 and the second detection channel 22, together with the axial resolution of the second Solar slit 53, are used to limit the imaging width of the detection beam in the detection area. The height of the first detection channel 21 and the second detection channel 22, as well as their distance from the detector 8, are used to limit the coverage of the detection beam in the 2θ direction of the detection area, and should be set to not obstruct the detector 8 in the 2θ direction.

[0063] The dimensions of the first incident channel 11 and the second incident channel 12, together with the axial resolution of the first Solar slit 52, are used to limit the irradiation width of the incident beam 61 in the detection area of ​​the sample.

[0064] It is worth noting that, Figure 1 and Figure 2 The incident light splitting component 1 uses a thin mask. The optical path is split by the incident light splitting component 1 and the first Solar slit 52, and the probe beam is defined by the probe light limiting component 2 and the second Solar slit 53. This can be applied to the measurement of powder samples to obtain data curves. For comparison, Figure 3 The incident light splitting component 1 uses a mask with a large thickness to achieve optical path splitting, while the probe light limiting component 2 uses a plate-shaped splitting component with a long length to achieve beam limiting. In this scenario, the Sola slit can be omitted, and it can be applied to 2D measurement to obtain two-dimensional diffraction data.

[0065] In one specific implementation, aluminum and copper sheets, each 5mm*5mm in size, are used as measurement samples. A single diffraction analysis is performed on these samples using the apparatus described in this application embodiment, and a two-dimensional diffraction data map (2D-XRD) of the diffraction signal is obtained at the detector 8. A schematic diagram of the resulting data imaging is shown below. Figure 7 As shown.

[0066] It can be seen that for different 2θ angles and detector channels, the two-dimensional diffraction data map simultaneously contains the diffraction data corresponding to both the aluminum and copper sheets. Specifically, by superimposing the upper half of the detector region within the two-dimensional diffraction data map, the diffraction data for the aluminum sheet can be obtained, as shown below. Figure 8 As shown in curve 8a; by superimposing the calculations on only the lower half of the detection region of the two-dimensional diffraction data map, the diffraction data of the copper sheet can be obtained, as shown in curve 8a. Figure 8 The curve is shown in 8b.

[0067] In one specific implementation, LaB6 and Si powders with a spacing of 10 mm are used as the measurement samples. A single diffraction analysis is performed using the device described in this application embodiment, and a two-dimensional diffraction data map (2D-XRD) of the diffraction signal is obtained at the detector 8. The resulting data imaging schematic diagram is shown below. Figure 9 As shown.

[0068] It should be noted that, in this embodiment, when performing 2D-XRD measurements, since the diffraction data of different samples can be separated by an algorithm, it is not necessary to set up a corresponding physical isolation structure in the diffraction optical path.

[0069] For other embodiments of this application, since they are basically similar in principle to the device embodiments, they are described in a relatively simple manner, and relevant parts can be referred to in the description of the device embodiments.

[0070] Reference Figures 10 to 12 The embodiments of this application also provide an X-ray detection device, the device comprising: an X-ray source 6, a multi-sample stage 7, and an apparatus as described in any embodiment of this application; The device is positioned within the irradiation path of the X-ray source 6; The first sample placement area of ​​the multi-sample stage 7 is matched with the first detection area 711, and the second sample placement area of ​​the multi-sample stage 7 is matched with the second detection area 721. When performing measurement and analysis, the X-ray source 6 emits the incident beam 61 to the device.

[0071] It should be noted that the surface of the multi-sample stage 7 can be a continuous planar plate structure. The first sample placement area and the second sample placement area can be a groove structure, and a certain interval should be set between them to ensure the discontinuity between the first detection area 711 and the second detection area 721.

[0072] As an example, refer to Figure 10 The multi-sample stage 7 can be a 96-position high-throughput sample tray, which has 96 slots for placing samples, corresponding to 96 different detection areas; the connecting plate 3 can be movably disposed on the sample-carrying side of the multi-sample stage 7 to select the target sample to be tested.

[0073] Reference Figure 12 In one embodiment of this application, the device further includes: a rotary drive mechanism 73; the multi-sample stage 7 is provided with a first sample stage 71 and a second sample stage 72; The sample placement area of ​​the first sample stage 71 matches the first detection area 711, and the sample placement area of ​​the second sample stage 72 matches the second detection area 721. The output end of the rotary drive mechanism 73 is connected to the first sample stage 71 and the second sample stage 72 respectively. When the first probe beam 7111 and the second probe beam 7211 are generated, the rotary drive mechanism 73 is configured to drive the first sample stage 71 and the second sample stage 72 to rotate.

[0074] It should be noted that when measuring powder samples, the samples need to be rotated to ensure the uniformity of the detection signal. The rotation drive mechanism 73 can drive the first sample stage 71 and the second sample stage 72 to rotate at the same speed or different speeds. A certain interval should be set between the first sample stage 71 and the second sample stage 72 to ensure that the rotation of the first sample stage 71 and the second sample stage 72 will not interfere with each other, and to ensure the discontinuity between the first detection area 711 and the second detection area 721.

[0075] In one specific embodiment of this application, the device further includes: an incident goniometer arm and a diffraction goniometer arm; The X-ray source 6, the diverging slit 51, the first Sola slit 52, and the incident light splitting assembly 1 can be disposed on the incident goniometer arm; The second Sola slit 53, the probe light limiting component 2, and the detector 8 can be disposed on the diffraction goniometer arm.

[0076] It should be noted that when performing X-ray diffraction (XRD) analysis, the incident goniometer arm and the diffraction goniometer arm can be used to carry optical elements, or as moving parts that constitute the θ–2θ scanning geometry in the device.

[0077] As an example, when the connecting plate 3, the incident light splitting component 1 and the probe light limiting component 2 form a structurally continuous whole, the above-mentioned overall structure can also be installed in other parts of the device. This embodiment does not impose any special limitation on the installation position of the above-mentioned overall structure.

[0078] In the above embodiments of this application, by dividing the large-area incident beam 61 upstream into multiple sub-beams adapted to the sample size and independently collecting signals downstream, parallel detection of multiple samples is achieved, thereby improving the sample measurement throughput and light source utilization efficiency.

[0079] It should be noted that the above embodiments of this application are not limited to specific XRD / XRF measurement methods or beam geometry, including but not limited to: Bragg-Brentano reflection geometry, transmission geometry, parallel beam geometry, grazing incidence (GIXRD), small angle scattering (SAXS), thin film reflectivity (XRR), residual stress (Stress), rocking curve (RC), reciprocal space (RSM), pair distribution function (PDF), topography, in-situ XRD (Non-Ambient XRD), XRD measurement (including 0D, 1D, 2D), XRF measurement, and TR-XRF measurement. All of these can achieve beam splitting and parallel collection through the above embodiments of this application, enabling the measurement and analysis of multiple samples.

[0080] Although preferred embodiments of the present application have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of the embodiments of the present application.

[0081] Finally, it should be noted that in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or terminal device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or terminal device. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or terminal device that includes said element.

[0082] The above provides a detailed description of an X-ray guiding device and X-ray detection equipment for multi-sample measurement provided in this application. Specific examples have been used to illustrate the principles and implementation methods of this application. The description of the above embodiments is only for the purpose of helping to understand the method and core ideas of this application. At the same time, for those skilled in the art, there will be changes in the specific implementation methods and application scope based on the ideas of this application. Therefore, the content of this specification should not be construed as a limitation of this application.

Claims

1. An X-ray guiding device for multi-sample measurement, characterized in that, The device is used to guide an X-ray incident beam to irradiate the detection area corresponding to different samples, and to guide the generated probe beam to different detection areas of the detector; the device includes: an incident light splitting component and a probe light limiting component; The incident light splitting component is configured to split the incident light beam into a first incident sub-beam and a second incident sub-beam; wherein the illumination area of ​​the first incident sub-beam matches a first detection area, and the illumination area of ​​the second incident sub-beam matches a second detection area. The detection light limiting component is provided with a first detection channel that matches the shape of the first detection area and a second detection channel that matches the shape of the second detection area; The first detection beam generated in the first detection area is transmitted to the first detection area of ​​the detector through the first detection channel, and the second detection beam generated in the second detection area is transmitted to the second detection area of ​​the detector through the second detection channel.

2. The apparatus according to claim 1, characterized in that, The detection light limiting component is a mask structure; the first detection channel and the second detection channel are aperture structures.

3. The apparatus according to claim 1, characterized in that, The incident light splitting component is provided with a first incident channel and a second incident channel; The incident light splitting component is configured to split the incident beam into a first incident sub-beam through the first incident channel, and to split the incident beam into a second incident sub-beam through the second incident channel.

4. The apparatus according to claim 3, characterized in that, The incident light splitting component is a mask structure; the first incident channel and the second incident channel are aperture structures.

5. The apparatus according to claim 1, characterized in that, Also includes: Connecting plate; The incident light splitting component is connected to the side of the connecting plate corresponding to the incident light beam; The detection light limiting component is connected to the side of the connecting plate closest to the detector.

6. The apparatus according to claim 5, characterized in that, The connecting plate has a cutting edge on one side near the first detection area and the second detection area; The blade is configured to define the transverse cross-sections of the first incident sub-beam and the second incident sub-beam near the side of the connecting plate, and to define the transverse cross-sections of the first detection beam and the second detection beam near the side of the connecting plate.

7. The apparatus according to claim 1, characterized in that, The probe light limiting component includes a first probe light limiting member, a second probe light limiting member, and a third probe light limiting member; The second detection light limiting member is disposed between the first detection light limiting member and the third detection light limiting member, such that the first detection light limiting member and the second detection light limiting member form the first detection channel, and the third detection light limiting member and the second detection light limiting member form the second detection channel.

8. The apparatus according to claim 7, characterized in that, The incident light splitting assembly includes a first incident light splitter, a second incident light splitter, and a third incident light splitter; The second incident light splitter is disposed between the first incident light splitter and the third incident light splitter, so that a first incident channel corresponding to the first incident sub-beam is formed between the first incident light splitter and the second incident light splitter, and a second incident channel corresponding to the second incident sub-beam is formed between the third incident light splitter and the second incident light splitter.

9. The apparatus according to claim 8, characterized in that, Also includes: Connecting plate; The first incident light splitter, the second incident light splitter, and the third incident light splitter are connected to the side of the connecting plate corresponding to the incident light beam. The first detection light limiting member, the second detection light limiting member, and the third detection light limiting member are connected to the side of the connecting plate near the detector.

10. The apparatus according to claim 1, characterized in that, Also includes: Incident light blocking device and probe light blocking device; The incident light blocking component is disposed between the first detection area and the second detection area; The detection light blocking component is disposed on the side of the detection light limiting component near the detector, and the detection light blocking component is disposed between the first detection channel and the second detection channel.

11. The apparatus according to claim 1, characterized in that, Also includes: Diverging slit, first Sola slit, and second Sola slit; The diverging slit and the first Sola slit are disposed on the light-inlet side of the incident light splitting assembly; The second Sola slit is disposed on the light-emitting side of the probe light limiting component; The diverging slit is configured to guide the incident beam to the first Sola slit; The first Sola slit is configured to guide the incident beam to the incident beam splitting assembly.

12. An X-ray inspection device, characterized in that, The device includes: an X-ray source, a multi-sample stage, and the apparatus as described in any one of claims 1-11; The device is positioned within the irradiation path of the X-ray source; The first sample placement area of ​​the multi-sample stage matches the first detection area, and the second sample placement area of ​​the multi-sample stage matches the second detection area; When performing measurement and analysis, the X-ray source emits the incident beam to the device.

13. The device according to claim 12, characterized in that, The device further includes: a rotary drive mechanism; the multi-sample stage is provided with a first sample stage and a second sample stage; The sample placement area of ​​the first sample stage matches the first detection area, and the sample placement area of ​​the second sample stage matches the second detection area; The output end of the rotary drive mechanism is connected to the first sample stage and the second sample stage, respectively. When the first probe beam and the second probe beam are generated, the rotary drive mechanism is configured to drive the first sample stage and the second sample stage to rotate.

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