Parallelism adjustment assembly, bonding device and thermo-compression bonding apparatus

By combining the constraint part of the base and the connecting structure with the adaptable curved surface, the problems of structural size and complexity of traditional bonding devices are solved, and precise attitude adjustment and efficient bonding of the pressing head are achieved.

CN122055038BActive Publication Date: 2026-06-19LEISHEN TECH (SHENZHEN) CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
LEISHEN TECH (SHENZHEN) CO LTD
Filing Date
2026-04-14
Publication Date
2026-06-19

AI Technical Summary

Technical Problem

When traditional bonding devices adjust their orientation using a rotating shaft mechanism, the overall size of the device and the number of components increase significantly, affecting the alignment accuracy and bonding quality between the chip and the substrate.

Method used

By employing a parallelism adjustment component, the rolling and pitching motions of the pressing head are achieved through the cooperation of the base and the constraint part of the connecting structure with the adapting curved surface, reducing dependence on the rotating shaft and lowering the overall structural size and complexity.

Benefits of technology

It enables precise attitude adjustment of the bonding head, improves the alignment accuracy and bonding quality between the chip and the substrate, and reduces the overall structural size and complexity of the device.

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Abstract

This application relates to a parallelism adjustment component, a bonding device, and a hot-press bonding equipment. The parallelism adjustment component includes a base, a connecting structure, operating components, and a locking component. The connecting structure is disposed on the base for mounting a pressing head. At least two operating components are disposed on the base and connected to the connecting structure to drive the connecting structure to move along at least two intersecting directions. The locking component can lock the base and the connecting structure to keep them fixed. One of the base and the connecting structure has a fitting curved surface, and the other has a constraint portion. The constraint portion is adapted to and abuts against the curved surface contour of the fitting surface, so that the connecting structure can perform roll and pitch movements under constraint when driven.
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