A method for monitoring the pumping speed of a vacuum furnace and judging and analyzing the state of a vacuum system

Abstract

This application provides a method for monitoring the pumping speed of a vacuum furnace and analyzing the state of the vacuum system, including: acquiring the molecular weight distribution of the residual atmosphere at the start of vacuum pumping in the vacuum furnace; simultaneously extracting the type of protective gas, replacement time, and pressure rise rate of the previous furnace from the furnace record to obtain the initial residual component information of the current furnace; collecting the pressure rise rate of the current furnace furnace furnace furnace by furnace based on the initial residual component information of the current furnace furnace, comparing the current furnace furnace pressure rise rate with the previous furnace furnace pressure rise rate, and calculating the migration amount of atmosphere components between adjacent furnace furnace furnaces; updating the residual gas components of the next furnace furnace furnace according to the adjusted atmosphere replacement cycle, and detecting the residual gas partial pressure of the updated residual gas components; correlating the detected residual gas partial pressure with the expected pressure rise rate of the current furnace furnace furnace furnace by furnace furnace to obtain a longitudinal tracking baseline for the pressure rise rate of continuous furnace furnace furnace furnaces.

Description

Technical Field

[0001] This invention relates to the field of information technology, and in particular to a method for monitoring the pumping speed of a vacuum furnace and analyzing the status of a vacuum system. Background Technology

[0002] As a core piece of equipment in heat treatment and material processing, the stability and reliability of the vacuum system in a vacuum furnace directly determine the consistency of product quality and the safety of the production process. In demanding atmosphere control scenarios, real-time monitoring of vacuum level, residual gas composition, and system evacuation capacity becomes crucial for ensuring process repeatability within the furnace and preventing material defects. Currently, most vacuum furnaces use pressure rise rate as the primary indicator of the vacuum system's health, comparing the performance of each batch by periodically measuring changes in vacuum level per unit time. However, this method reveals significant drawbacks in actual continuous production. At low frequencies, the sampling points are sparse, failing to capture the slow deterioration trend of the system in a timely manner. While increasing the frequency improves the temporal resolution, the atmosphere replacement time between batches is significantly compressed, preventing the sufficient removal of residual protective gases from the previous batch. The adsorption and desorption of these gases on the furnace wall and workpiece surface continues into the next batch. Due to the significant differences in molecular weight and desorption energy required for different types of gases, the degree of desorption of different residual gases is amplified under the same evacuation time, leading to systematic but unpredictable deviations in the pressure rise rate. Among the protective gases commonly used in vacuum furnaces, nitrogen has a molecular weight of 28 and argon has a molecular weight of 40. Their physical adsorption binding strength on stainless steel and graphite heat shield surfaces differs. Argon, with its higher molecular weight, exhibits stronger van der Waals forces with the metal surface due to its higher polarizability, requiring a longer desorption time under the same temperature conditions. Simultaneously, trace amounts of water vapor remaining in the furnace easily form chemisorbed states on metal oxide surfaces, and the activation energy required for its desorption is much higher than that of nitrogen or argon's physical adsorption. This results in significant stratification of the desorption progress of different gas components within the same vacuum cycle. This shift, mixed with actual deterioration signals such as aging or leakage of the vacuum system itself, makes the longitudinal comparison benchmark unstable. This contradiction is most pronounced when producing the same batch of workpieces in multiple consecutive furnace runs. For example, if a previous batch used nitrogen, a protective gas with a high molecular weight, resulting in the adsorption of numerous nitrogen molecules on the furnace walls and charging surfaces, and the next batch involves rapid vacuuming and short-term pressure rise testing, these nitrogen molecules may not have fully desorbed, leading to an inflated pressure rise rate. If a third batch then uses argon, a gas with a lower molecular weight, the frequent switching between gas types will cause irregular fluctuations in the pressure rise rate. This fluctuation is not caused by a decline in vacuum pump performance or an increase in leakage, but rather by an illusion resulting from the interplay between testing frequency and atmosphere replacement time. Because the inheritance of residual gas types and their desorption behaviors between batches is not effectively separated and corrected, the reliability of the pressure rise rate as a longitudinal tracking indicator is severely weakened. Summary of the Invention

[0003] To address the aforementioned technical problems, this invention provides a method for monitoring the pumping speed of a vacuum furnace and analyzing the state of a vacuum system, mainly comprising:

[0004] The molecular weight distribution of the residual atmosphere at the start of vacuuming in the vacuum furnace is obtained. At the same time, the type of protective gas, replacement time and pressure rise rate of the previous furnace are extracted from the furnace record to obtain the information of the initial residual components of the current furnace.

[0005] Based on the initial residual component information of the current furnace, the pressure rise rate of the current furnace is collected for each furnace, and the pressure rise rate of the current furnace is compared with the pressure rise rate of the previous furnace to calculate the migration amount of atmosphere components between adjacent furnaces.

[0006] The migration amount of atmospheric components in adjacent furnaces is compared with the preset component migration threshold. When the migration amount exceeds the component migration threshold, the pressure rise rate of the current furnace is corrected based on the desorption activation energy of the residual adsorbed gas on the furnace wall obtained in advance. If it does not exceed the threshold, the pressure rise rate of the current furnace is directly retained to obtain the corrected pressure rise rate.

[0007] Using the corrected pressure rise rate and the acquisition interval determined based on the pressure rise rate test frequency, the expected pressure rise rate of the current furnace is calculated by accumulating the data. The expected pressure rise rate of the current furnace is compared with the acquired pressure rise rate of the current furnace to assess whether the non-systematic degassing residue introduced by the atmosphere replacement interferes with the longitudinal tracking, and the degassing residue partial pressure distribution and vacuum system degradation assessment results are obtained.

[0008] When the vacuum system degradation assessment results indicate the presence of non-systematic degassing residual interference, the atmosphere replacement cycle is adjusted by combining the degassing residual partial pressure and the atmosphere replacement time. If there is no interference, the original atmosphere replacement cycle is directly used to obtain the adjusted atmosphere replacement cycle.

[0009] The residual gas composition for the next furnace is updated according to the adjusted atmosphere replacement cycle, and the residual gas partial pressure is detected on the updated residual gas composition. The detected residual gas partial pressure is correlated with the expected pressure rise rate of the current furnace for each furnace to obtain the longitudinal tracking baseline of the pressure rise rate of the continuous furnace.

[0010] Furthermore, the process of obtaining the molecular weight distribution of the residual atmosphere at the start of vacuum evacuation in the vacuum furnace, and simultaneously extracting the type of protective gas, replacement duration, and pressure rise rate of the previous furnace from the furnace record, yields the information on the initial residual components of the current furnace, including:

[0011] At the start of vacuuming in the vacuum furnace, mass spectrometry is used to scan and collect the residual atmosphere in the furnace cavity, and the signal intensity of nitrogen, argon and water vapor at the corresponding mass-to-charge ratio positions is obtained. The components are identified based on the signal intensity ratio of each gas mass-to-charge ratio peak, and the molecular weight spectrum distribution of the residual atmosphere in the current furnace is obtained.

[0012] The relative abundance values ​​of each component are extracted from the molecular weight spectrum distribution of the residual atmosphere in the current furnace. At the same time, the protective gas type identifier, atmosphere replacement time record, and pressure rise rate of the previous furnace are read from the furnace record database. The component with the highest proportion in the relative abundance value is compared with the protective gas type of the previous furnace to obtain the determination result of the main source components of the residual gas.

[0013] Based on the determination of the main source components of the residual gas, combined with the replacement time and pressure rise rate of the previous furnace, the partial pressure ratio of each residual component is calculated according to the ratio of the relative abundance value of each component to the total abundance, and the information of the initial residual components of the current furnace is obtained.

[0014] Furthermore, the step of collecting the pressure rise rate of the current furnace batch based on the initial residual component information of the current furnace batch, comparing the pressure rise rate of the current furnace batch with the pressure rise rate of the previous furnace batch, and calculating the atmospheric component migration amount of adjacent furnace batches includes:

[0015] After the vacuuming process is completed, the pressure rise rate of the current furnace is collected, and the change value of the vacuum degree of the furnace cavity within the preset time interval is recorded to obtain the collected value of the pressure rise rate of the current furnace.

[0016] The pressure rise rate of the current furnace is compared with that of the previous furnace to calculate the pressure rise rate difference. The pressure rise rate difference is then distributed according to the partial pressure ratio of each residual component to obtain the migration amount of atmosphere components in adjacent furnaces.

[0017] Furthermore, the process of comparing the migration amount of atmospheric components in adjacent furnace cycles with a preset component migration threshold is described. When the migration amount exceeds the component migration threshold, the pressure rise rate of the current furnace cycle is corrected based on the pre-obtained desorption activation energy of the residual adsorbed gas on the furnace wall. If the migration amount does not exceed the threshold, the pressure rise rate of the current furnace cycle is directly retained, resulting in a corrected pressure rise rate. This correction includes:

[0018] The migration values ​​of each component in the atmospheric component migration amount of the adjacent furnace are obtained, and the migration value of each component is compared with the preset component migration threshold one by one to obtain the threshold exceeding the judgment result of each component.

[0019] When the migration amount of at least one component exceeds the preset component migration threshold, the desorption activation energy value of the corresponding component is extracted from the desorption characteristic data table of the adsorbed gas on the furnace wall to obtain the desorption activation energy of the component that exceeds the activation energy threshold.

[0020] Based on the desorption activation energy of the component exceeding the activation energy threshold, the desorption activation energy value is divided by the preset benchmark activation energy value to obtain the desorption delay factor. The migration amount of each component exceeding the migration threshold is multiplied by the corresponding desorption delay factor to obtain the desorption contribution component. The current furnace pressure rise rate is subtracted from the sum of each desorption contribution component to obtain the desorption corrected pressure rise rate.

[0021] When the migration amount of all components does not exceed the preset component migration threshold, the pressure rise rate of the current furnace is retained, and the pressure rise rate after desorption correction or the retained pressure rise rate of the current furnace is used as the corrected pressure rise rate.

[0022] Furthermore, the modified pressure rise rate, combined with the acquisition interval determined based on the pressure rise rate test frequency, is used to successively accumulate and calculate the expected pressure rise rate for the current furnace batch. The expected pressure rise rate for the current furnace batch is then compared with the acquired pressure rise rate for the current furnace batch to assess whether the non-systematic degassing residue introduced by atmosphere replacement interferes with longitudinal tracking. This yields the degassing residue partial pressure distribution and vacuum system degradation assessment results, including:

[0023] The corrected pressure rise rate is obtained, and the sampling interval between adjacent furnaces is determined according to the pressure rise rate test frequency. The corrected pressure rise rate is weighted and averaged with the average corrected pressure rise rate of historical furnaces to obtain the expected pressure rise rate of the current furnace.

[0024] The cycle deviation value is calculated based on the expected pressure rise rate of the current furnace and the collected pressure rise rate of the current furnace. The presence of non-systematic degassing residual interference is determined based on whether the cycle deviation value exceeds the preset deviation threshold.

[0025] For the aforementioned periodic deviation value, the residual pressure contribution value of each residual component is allocated according to the partial pressure ratio of each residual component in the initial residual component information of the current furnace batch, and the residual partial pressure contribution value of each component is summarized to obtain the degassing residual partial pressure distribution.

[0026] The residual partial pressure of each component in the degassing residual partial pressure distribution is compared with the preset deterioration judgment threshold. When the residual partial pressure exceeds the deterioration judgment threshold, it is judged as degassing residual interference. When the residual partial pressure does not exceed the deterioration judgment threshold and the periodic deviation value continues to increase in multiple consecutive furnaces, it is judged as vacuum system deterioration. The degassing residual partial pressure distribution and vacuum system deterioration evaluation results are obtained.

[0027] Furthermore, after obtaining the corrected pressure rise rate, the process includes: determining the fluctuation pattern of the periodic deviation values ​​of multiple consecutive furnaces; when the positive and negative signs of the periodic deviation values ​​of each furnace alternate and the amplitude does not have an obvious growth pattern, it is marked as a non-systematic deviation; when the periodic deviation value is continuously positive in consecutive furnaces and the amplitude increases one after another, it is marked as a systematic deviation, thus obtaining the deviation type identifier.

[0028] Furthermore, when the vacuum system degradation assessment results indicate the presence of non-systematic degassing residual interference, the atmosphere replacement cycle is adjusted in terms of replacement duration or number of replacements, taking into account the residual degassing partial pressure and the atmosphere replacement time. If no interference exists, the original atmosphere replacement cycle is directly used, resulting in an adjusted atmosphere replacement cycle, including:

[0029] To determine the type of interference in the vacuum system degradation assessment results, when there is non-systematic residual interference from degassing, extract the residual gas partial pressure values ​​of each component and the corresponding interference level from the residual partial pressure distribution of degassing, and at the same time read the current atmosphere replacement time.

[0030] For components with severe interference, the residual gas partial pressure of the component is divided by the corresponding high threshold to obtain the extension coefficient. The original replacement time is multiplied by the extension coefficient to obtain the adjusted replacement time. For components with moderate interference, the number of replacements is increased by one to obtain the adjustment results of the replacement parameters for each component. The maximum value of the adjusted replacement time or the number of replacements is selected to update the original atmosphere replacement cycle to obtain the adjusted atmosphere replacement cycle.

[0031] Furthermore, the residual gas composition for the next furnace is updated according to the adjusted atmosphere replacement cycle, and the residual gas partial pressure is detected on the updated residual gas composition. The detected residual gas partial pressure is correlated with the expected pressure rise rate of the current furnace for each furnace to obtain a longitudinal tracking baseline for the pressure rise rate of consecutive furnaces, including:

[0032] The atmosphere is replaced for the next batch according to the adjusted atmosphere replacement cycle. After the replacement is completed, the partial pressure values ​​of each component at the beginning of the vacuuming are obtained by mass spectrometry to obtain the updated residual gas component partial pressure.

[0033] The updated residual gas component partial pressures are correlated with the expected pressure rise rate of the current furnace according to the furnace number and stored in the furnace record database;

[0034] The associated data is arranged and summarized in chronological order of the furnace batches to obtain the longitudinal tracking baseline of the pressure rise rate of consecutive furnace batches.

[0035] The technical solutions provided by the embodiments of the present invention may include the following beneficial effects:

[0036] This invention discloses a method for monitoring the pumping speed of a vacuum furnace and judging the state of the vacuum system. Its core lies in solving the problem of inaccurate longitudinal tracking of pressure rise rate caused by the migration of residual gas components within the furnace and interference from non-systematic degassing. This invention obtains the initial residual components and calculates the atmosphere migration amount in adjacent furnace cycles. When the migration amount exceeds the limit, the current pressure rise rate is corrected based on the desorption activation energy of the furnace wall. Then, the expected value is calculated using the corrected pressure rise rate. By comparing the expected value with the measured value, the partial pressure distribution of non-systematic degassing residues and their interference with tracking continuity and system degradation are identified and evaluated. Based on this evaluation result, the atmosphere replacement cycle is dynamically optimized, and the residual gas components are updated to establish a longitudinal tracking baseline for pressure rise rate in consecutive furnace cycles. This achieves accurate judgment of the vacuum system state and stable monitoring baseline under the influence of complex residual gases. Attached Figure Description

[0037] Figure 1 This is a flowchart of a method for monitoring the pumping speed of a vacuum furnace and judging and analyzing the state of a vacuum system according to the present invention.

[0038] Figure 2 This is a schematic diagram of a vacuum furnace pumping speed monitoring and vacuum system status judgment and analysis method according to the present invention.

[0039] Figure 3 This is another schematic diagram of a vacuum furnace pumping speed monitoring and vacuum system status judgment and analysis method according to the present invention. Detailed Implementation

[0040] The technical solution of the present invention will be clearly and completely described below with reference to the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0041] like Figures 1-3 This embodiment of a method for monitoring the pumping speed of a vacuum furnace and analyzing the state of the vacuum system may specifically include:

[0042] Step S101: Obtain the molecular weight distribution of the residual atmosphere at the start of vacuuming in the vacuum furnace. Simultaneously, extract the type of protective gas, replacement time, and pressure rise rate of the previous furnace from the furnace record to obtain the information on the initial residual components of the current furnace.

[0043] At the start of vacuum evacuation in the vacuum furnace, mass spectrometry is used to scan and collect the residual atmosphere inside the furnace cavity, acquiring the signal intensity of nitrogen, argon, and water vapor at their corresponding mass-to-charge ratio positions. Component identification is performed based on the signal intensity ratio of each gas's mass-to-charge ratio peak, resulting in the molecular weight distribution of the residual atmosphere for the current furnace run. The relative abundance values ​​of each component are extracted from this distribution. Simultaneously, the furnace run record database is read, including the protective gas type identifier, atmosphere replacement duration record, and pressure rise rate test value from the previous furnace run. The component with the highest relative abundance is compared with the protective gas type from the previous furnace run. If they match, the main source of the current residual gas is determined to be residual protective gas from the previous furnace run; otherwise, the main source is determined to be desorbed gas from the furnace wall, thus obtaining the determination result of the main source component of the residual gas. Based on the determination of the main source components of the residual gas, combined with the replacement time and pressure rise rate of the previous furnace, the partial pressure ratio of each residual component is calculated according to the ratio of the relative abundance of each component to the total abundance. This yields the initial residual component information for the current furnace, which includes the type of residual gas, the partial pressure ratio of each component, and the process parameters of the previous furnace. The partial pressure ratio of each component, Pi = (Ai / ΣA)*F, where Ai is the relative abundance of component i, ΣA is the total abundance, and F is a correction factor based on the determination (normalized value of pressure rise rate or replacement time).

[0044] At the start of vacuuming in the vacuum furnace, mass spectrometry is used to scan and collect the residual atmosphere in the furnace cavity. Mass spectrometry separates residual gas molecules by ionizing them and according to the mass-to-charge ratio of different molecules. The mass-to-charge ratio of nitrogen is 28, that of argon is 40, and that of water vapor is 18. The detection device records the corresponding signal intensity value at each mass-to-charge ratio position. This signal intensity reflects the relative content of the corresponding gas component in the furnace cavity.

[0045] In one embodiment, when identifying components based on the signal intensity ratio of each gas mass-to-charge ratio peak, the signal intensities of nitrogen, argon, and water vapor at the three mass-to-charge ratio positions are normalized, and the relative abundance value of each component is calculated based on the sum of the signal intensities, thereby obtaining the molecular weight spectrum distribution of the residual atmosphere in the current furnace.

[0046] For example, the furnace record database stores process parameter information for each furnace, including the type of protective gas used, the atmosphere replacement time record, and the pressure rise rate test value. At the start of the vacuuming of the current furnace, the above three data items corresponding to the previous furnace are read.

[0047] It should be noted that the determination of the main source of residual gas is based on the comparison between the component with the highest relative abundance value and the type of protective gas in the previous batch. If nitrogen was used as the protective gas in the previous batch, and nitrogen has the highest relative abundance value in the molecular weight distribution of the residual atmosphere in the current batch, then the main source of the current residual gas is determined to be the residual protective gas from the previous batch. If argon or water vapor has the highest relative abundance value in the residual atmosphere of the current batch, which is different from the nitrogen used in the previous batch, then the main source is determined to be desorbed gas from the furnace wall. This desorbed gas originates from adsorbed molecules released from the surface of the furnace wall and heat shield during the vacuuming process.

[0048] In one possible implementation, when calculating the partial pressure ratio of each residual component based on the determination of the main source components of the residual gas, the proportion of the relative abundance value of each component to the total abundance is used as the basis for calculating the partial pressure ratio. At the same time, the replacement time and pressure rise rate of the previous furnace are recorded as correlation parameters to obtain the information of the initial residual components of the current furnace, which includes the type of residual gas, the partial pressure ratio of each component, and the correlation of the process parameters of the previous furnace.

[0049] Step S102: Based on the initial residual component information of the current furnace, the pressure rise rate of the current furnace is collected for each furnace, and the pressure rise rate of the current furnace is compared with the pressure rise rate of the previous furnace to calculate the migration amount of atmosphere components in adjacent furnaces.

[0050] Based on the partial pressure ratios of each component in the initial residual component information of the current furnace batch, the pressure rise rate of the current furnace batch is collected after the vacuuming process is completed. The change in the furnace cavity vacuum degree within a preset time interval is recorded to obtain the collected pressure rise rate value of the current furnace batch. The collected pressure rise rate value of the current furnace batch is compared with the pressure rise rate value of the previous furnace batch in the furnace batch record, and the pressure rise rate difference between the two is calculated. The pressure rise rate difference is distributed according to the partial pressure ratios of each component to obtain the atmospheric component migration amount of each component corresponding to the adjacent furnace batch.

[0051] After the vacuuming process is completed, the pressure rise rate of the current furnace is collected based on the partial pressure ratio of each component recorded in the information on the initial residual components of the current furnace (referring to the residual gas components and their partial pressure ratios obtained by mass spectrometry analysis at the beginning of the furnace).

[0052] Specifically, after the furnace cavity reaches a preset vacuum level, the evacuation valve is closed, the rise in the furnace cavity vacuum level within a preset time interval is recorded, and the contribution of each component to the pressure rise rate is calculated based on the pressure ratio. This calculated value is the pressure rise rate collected for the current furnace cycle.

[0053] In one embodiment, the current furnace pressure rise rate is compared with the previous furnace pressure rise rate stored in the furnace record database, and the pressure rise rate difference between the two is calculated. This difference reflects the fluctuation range of the pressure rise rate between two adjacent furnaces due to changes in residual atmosphere.

[0054] It should be noted that when the pressure rise rate difference is allocated according to the partial pressure ratio of each component, the migration amount of each component is proportional to its partial pressure ratio in the initial residual component information.

[0055] For example, if the partial pressure ratio of nitrogen is 60%, the partial pressure ratio of argon is 30%, and the partial pressure ratio of water vapor is 10%, then the pressure rise rate difference is distributed to the three components according to the above ratios to obtain the migration amount of the atmosphere components in adjacent furnaces for each component.

[0056] Step S103: Compare the migration amount of atmospheric components in adjacent furnaces with the preset component migration threshold. When the migration amount exceeds the component migration threshold, the pressure rise rate of the current furnace is corrected based on the pre-obtained desorption activation energy of the residual adsorbed gas on the furnace wall. If it does not exceed the threshold, the pressure rise rate of the current furnace is directly retained to obtain the corrected pressure rise rate.

[0057] The migration values ​​of each component in the atmosphere migration data of adjacent furnace cycles are obtained. Each component's migration value is compared with a pre-set migration threshold to determine whether its migration exceeds the threshold, thus obtaining a threshold exceedance determination result. Based on the threshold exceedance determination result, if at least one component's migration exceeds the threshold, the desorption activation energy value of the corresponding component is extracted from a pre-established furnace wall adsorbed gas desorption characteristic data table. This desorption activation energy value represents the energy barrier that the component needs to overcome to desorb from the furnace wall and insulation screen surface, obtaining the desorption activation energy of the component exceeding the threshold. Based on the desorption activation energy of the component exceeding the threshold, a desorption delay factor is obtained by dividing the desorption activation energy value by a pre-set baseline activation energy value. The migration amount of each exceeding component is multiplied by the corresponding desorption delay factor to obtain a desorption contribution component. The current furnace pressure rise rate is subtracted from the sum of the desorption contribution components of each exceeding component to obtain the desorption-corrected pressure rise rate. If the migration amount of all components does not exceed the component migration threshold, the pressure rise rate of the current furnace is directly retained, and the pressure rise rate after desorption correction and the directly retained pressure rise rate are combined as the corrected pressure rise rate.

[0058] After obtaining the migration amount of atmosphere components in adjacent furnaces, the migration value of each component is compared with the preset component migration threshold one by one.

[0059] Specifically, the component migration threshold is pre-calibrated based on the furnace type and specifications, heat shield material, and commonly used protective gas types of the vacuum furnace. Nitrogen, argon, and water vapor each have their own independent migration threshold values. When the migration amount of a certain component exceeds its corresponding threshold, it is determined that the component has significant inter-furnace residual migration.

[0060] It should be noted that desorption activation energy is a physical quantity that characterizes the energy barrier that gas molecules need to overcome to desorb from a solid surface. In a vacuum furnace, the adsorption behaviors of nitrogen, argon, and water vapor on the furnace wall and graphite insulation screen surface differ significantly. Nitrogen has a relatively low desorption activation energy and is more easily desorbed and released from the surface during vacuuming. Argon, due to its higher molecular polarizability and stronger van der Waals forces with the metal surface, has a higher desorption activation energy than nitrogen. Water vapor forms a chemisorbed state on the metal oxide surface, resulting in a desorption activation energy far higher than the other two, and exhibiting the lowest degree of desorption within the same vacuuming time.

[0061] In one embodiment, a data table of desorption characteristics of adsorbed gases on the furnace wall is pre-established and stored in the furnace record database. The data table records the desorption activation energy values ​​of various protective gases under different furnace wall material conditions. When the judgment result shows that the migration amount of a certain component exceeds the threshold, the corresponding desorption activation energy value is extracted from the data table according to the type identifier of the component.

[0062] For example, the calculation process of the desorption delay factor reflects the difference in desorption progress of different gas components within the same vacuum cycle. The desorption delay factor corresponding to the component is obtained by dividing the desorption activation energy value of the component exceeding the threshold by a preset reference activation energy value. The reference activation energy value is selected as the desorption activation energy of nitrogen on the stainless steel surface. The higher the desorption activation energy of the component, the larger its desorption delay factor, indicating that the amount of desorption of the component in the same time period is smaller, and the greater the interference with the pressure rise rate test results.

[0063] For example, the desorption retardation factor of argon is about 1.5 times that of nitrogen, while the desorption retardation factor of water vapor is more than three times that of nitrogen.

[0064] Understandably, the differences in desorption characteristics among different gas components directly affect the accuracy of pressure rise rate test results. When argon is used as the protective gas in the previous batch, argon molecules adsorbed on the furnace wall surface are difficult to completely desorb during the short vacuuming process in the next batch. These undesorbed argon molecules will be slowly released during the pressure rise rate test, causing the measured pressure rise rate value to be higher than the actual leakage rate level. Furthermore, the migration amount of each component exceeding the threshold is multiplied by the corresponding desorption lag factor to obtain the desorption contribution component of each component. The desorption contribution component represents the additional contribution value of the component to the pressure rise rate of the current batch due to the desorption lag. The larger the desorption lag factor of the component, the higher the proportion of its desorption contribution component to the original migration amount.

[0065] In one possible implementation, the desorption-corrected pressure rise rate is obtained by subtracting the sum of the desorption contributions of each component exceeding the threshold from the current furnace pressure rise rate. This correction process eliminates the pressure rise rate offset introduced by the lag in the desorption of residual gas from the previous furnace, making the corrected pressure rise rate value more accurately reflect the leakage rate of the vacuum furnace itself, rather than the desorption interference of the residual atmosphere.

[0066] Preferably, if the migration amounts of all components do not exceed their respective preset thresholds, it indicates that the atmosphere replacement between adjacent furnaces is sufficient, and the interference of residual gas from the previous furnace on the pressure rise rate of the current furnace is within an acceptable range. In this case, the pressure rise rate of the current furnace is directly retained without desorption correction. Based on the above processing flow, the pressure rise rate after desorption correction and the directly retained pressure rise rate are uniformly labeled as the corrected pressure rise rate. This corrected pressure rise rate serves as the benchmark value for evaluating the vacuum state of the current furnace, eliminating measurement deviations caused by differences in the migration and desorption characteristics of atmosphere components.

[0067] Step S104: Using the corrected pressure rise rate and the acquisition interval determined based on the pressure rise rate test frequency, the expected pressure rise rate of the current furnace is calculated by accumulating the data. The expected pressure rise rate of the current furnace is compared with the acquired pressure rise rate of the current furnace to assess whether the non-systematic degassing residue introduced by the atmosphere replacement interferes with the longitudinal tracking, and the degassing residue partial pressure distribution and vacuum system degradation assessment results are obtained.

[0068] The corrected pressure rise rate is obtained, and the sampling interval between adjacent furnace runs is determined based on the pressure rise rate test frequency. This sampling interval represents the time span between two consecutive pressure rise rate tests. The corrected pressure rise rate is weighted and averaged with the average corrected pressure rise rate of historical furnace runs to obtain the expected pressure rise rate for the current furnace run. The expected pressure rise rate for the current furnace run is compared with the actual collected pressure rise rate for the current furnace run. The periodic deviation value is calculated by subtracting the expected value from the actual collected value. This periodic deviation value reflects the magnitude of the difference between the expected and measured values. Whether the periodic deviation value exceeds a preset deviation threshold determines whether the non-systematic degassing residue introduced by atmosphere replacement interferes with the continuity of longitudinal tracking. For the periodic deviation value, based on the partial pressure ratio of each component in the initial residual component information of the current furnace run, the periodic deviation value is allocated according to the partial pressure ratio to obtain the residual partial pressure contribution value corresponding to each component. The residual partial pressure contribution values ​​of nitrogen, argon, and water vapor are summarized to obtain the degassing residual partial pressure distribution. The residual partial pressure of each component in the degassing residual partial pressure distribution is compared with the preset deterioration judgment threshold. If the residual partial pressure exceeds the threshold, it is judged as degassing residual interference. If the residual partial pressure does not exceed the threshold and the periodic deviation value continues to increase in multiple consecutive furnace cycles, it is judged as deterioration caused by the decline in vacuum pump performance or the increase in sealing leakage rate. The degassing residual partial pressure distribution and vacuum system deterioration evaluation results are obtained.

[0069] After obtaining the corrected pressure rise rate value, the sampling interval between adjacent furnaces is determined based on the pressure rise rate test frequency.

[0070] Specifically, the sampling interval is inversely related to the test frequency. The higher the test frequency, the shorter the sampling interval, and the lower the test frequency, the longer the sampling interval. The sampling interval is recorded in the furnace record database for subsequent calculations.

[0071] It should be noted that the expected pressure rise rate for the current furnace is calculated using a weighted average method. The corrected pressure rise rate is used as the reference benchmark for the current furnace. At the same time, the corrected pressure rise rate values ​​of several recent historical furnaces are read from the furnace record database. The corrected pressure rise rate of the current furnace is assigned a higher weight, while the corrected pressure rise rates of historical furnaces are assigned decreasing weights in order of time. The corrected pressure rise rate of each furnace is multiplied by its corresponding weight, the results are summed, and then divided by the total weight to obtain the expected pressure rise rate for the current furnace.

[0072] In one embodiment, the expected pressure rise rate for the current furnace batch is determined by the following formula: , r represents the expected pressure rise rate for the current furnace run, r0 represents the corrected pressure rise rate for the current furnace run, r i This represents the corrected pressure rise rate for the i-th historical furnace. This represents a decreasing factor less than 1, with the current weight being 1, and historical weights decreasing according to... Decreasing. This expected pressure rise rate reflects the pressure rise rate level that the current furnace should exhibit under normal atmosphere replacement conditions.

[0073] In one embodiment, when comparing the expected pressure rise rate of the current furnace with the actual collected pressure rise rate of the current furnace, the cycle deviation value is calculated by subtracting the expected value from the actual collected value. The positive or negative sign and the absolute size of the deviation value are both diagnostically significant.

[0074] For example, when the periodic deviation value exceeds a preset deviation threshold, it indicates a significant difference between the actual pressure rise rate and the expected pressure rise rate. In this case, it is determined that the non-systematic degassing residue introduced by the atmosphere replacement interferes with the continuity of longitudinal tracking. The deviation threshold is pre-calibrated according to the furnace type and process requirements of the vacuum furnace; different specifications of vacuum furnaces correspond to different deviation threshold values. Furthermore, when performing component-level decomposition on the periodic deviation value, the periodic deviation value is allocated according to the partial pressure ratio of each component recorded in the initial residual component information of the current furnace batch.

[0075] For example, if the partial pressure ratio of nitrogen is 50%, the partial pressure ratio of argon is 30%, and the partial pressure ratio of water vapor is 20%, then the period deviation value is allocated to the three components according to the above ratios to obtain the residual partial pressure contribution value of each component.

[0076] In one possible implementation, the residual partial pressure contributions of nitrogen, argon, and water vapor are aggregated to form a degassed residual partial pressure distribution. This distribution is presented in tabular form, including the residual partial pressure values ​​of each component and their proportion of the total residual partial pressure. This distribution data visually reflects the degree of contribution of each type of residual gas to the period deviation value.

[0077] Understandably, the determination of degradation assessment results is based on two different combinations of conditions. When the residual partial pressure of at least one component in the degassing residual partial pressure distribution exceeds the corresponding degradation judgment threshold, the current furnace pressure rise rate deviation is determined to be mainly caused by degassing residual interference. This interference originates from the desorption hysteresis behavior of residual gas in the previous furnace and is a non-systematic factor that can be eliminated by adjusting the atmosphere replacement cycle. When the residual partial pressure of each component does not exceed the degradation judgment threshold, but the cycle deviation value shows a continuous increasing trend in multiple consecutive furnaces, the current pressure rise rate deviation is determined to be mainly caused by a decrease in vacuum pump pumping performance or an increase in furnace body sealing leakage rate. This degradation is due to aging or damage to the vacuum system itself and requires equipment maintenance or component replacement.

[0078] Preferably, the vacuum system degradation assessment results are output in the form of structured data, including degradation type identifier, residual partial pressure values ​​of each component, interference level, and degradation degree score. The assessment results are stored in the furnace record database and associated with the current furnace number, serving as benchmark data for longitudinal tracking of the vacuum system health status.

[0079] The periodic deviation between the expected pressure rise rate and the measured pressure rise rate of the current furnace is analyzed. Non-systematic degassing residual components introduced by atmosphere replacement in the deviation are identified. The degree of interference of each degassing residue on the longitudinal tracking continuity is analyzed, and the degassing residual partial pressure distribution and vacuum system degradation assessment results are obtained.

[0080] The periodic deviation value between the expected pressure rise rate and the measured pressure rise rate of the current furnace is obtained. The fluctuation pattern of the periodic deviation value of multiple consecutive furnaces is determined. If the positive and negative signs of the periodic deviation value of each furnace change alternately and the amplitude does not have a clear growth pattern, it is marked as a non-systematic deviation. If the periodic deviation value is continuously positive in consecutive furnaces and the amplitude increases with each furnace, it is marked as a systematic deviation, thus obtaining a deviation type identifier. Based on the deviation type identifier, for the periodic deviation value marked as a non-systematic deviation, combined with the partial pressure ratio of each component in the initial residual component information of the current furnace (derived from the initial measurement data of the vacuum system), the periodic deviation value is allocated to the three components of nitrogen, argon and water vapor according to the partial pressure ratio. Specifically, it is calculated using the formula Di=D*Pi / sum(P), where D is the periodic deviation value, Di is the partial pressure value of the i-th component, Pi is the initial partial pressure ratio of the i-th component, and sum(P) is the sum of all ratios, thus obtaining the residual gas partial pressure value corresponding to each component. For furnaces marked as having systematic deviations, the residual gas partial pressure values ​​of each component are first calculated using the same allocation formula. Then, the number of consecutive furnaces and the increment of the deviation are counted. If the number of consecutive furnaces exceeds the preset deterioration judgment furnace threshold of 3, deterioration is determined to exist. For the residual gas partial pressure values ​​of each component, a level is determined according to a preset interference level classification threshold. Partial pressure values ​​below the low threshold of 0.01 Pa are determined to be mild interference, partial pressure values ​​between the low threshold of 0.01 Pa and the high threshold of 0.1 Pa are determined to be moderate interference, and partial pressure values ​​above the high threshold of 0.1 Pa are determined to be severe interference, thus obtaining the interference level of each component. Based on the interference level of each component and the residual gas partial pressure values, a degassing residual pressure distribution and vacuum system deterioration assessment result, including residual gas partial pressure values, interference levels, and deterioration degree, is obtained.

[0081] After obtaining the periodic deviation value between the expected pressure rise rate and the measured pressure rise rate of the current furnace, the fluctuation pattern of the periodic deviation value of multiple consecutive furnaces is determined.

[0082] Specifically, the periodic deviation value sequence of the most recent furnaces is read from the furnace record database, and the distribution pattern of positive and negative signs and the trend of amplitude change of each value in the sequence are observed as the basis for determining the fluctuation pattern.

[0083] It should be noted that the distinction between non-systematic and systematic deviations is based on the statistical characteristics of the periodic deviation value sequence. When positive and negative values ​​alternate in the periodic deviation value sequence, and there is no obvious increasing or decreasing trend in the deviation amplitude between adjacent furnaces, it indicates that the deviation source is random, mainly caused by the uneven desorption of residual gas during atmosphere replacement. This type of deviation is labeled as non-systematic. When multiple consecutive furnaces show positive values ​​in the periodic deviation value sequence, and the deviation amplitude increases progressively in consecutive furnaces, it indicates that the deviation source is cumulative, mainly caused by a decrease in vacuum pump performance or an increase in furnace seal leakage rate. This type of deviation is labeled as systematic.

[0084] In one embodiment, the deviation type identifier is recorded in the furnace record database in binary form. The identifier value corresponding to non-systematic deviations is zero, and the identifier value corresponding to systematic deviations is one. This identifier value is stored in association with the current furnace number.

[0085] For example, when performing component-level decomposition on periodic deviation values ​​marked as non-systematic deviations, the periodic deviation values ​​are allocated to each component according to the partial pressure ratios of the three components—nitrogen, argon, and water vapor—recorded in the initial residual component information of the current furnace batch.

[0086] For example, if the partial pressure ratio of nitrogen is 45%, argon is 35%, and water vapor is 20%, then the periodic deviation value is allocated according to the above proportions to obtain the residual gas partial pressure value corresponding to each component. Furthermore, the interference level classification threshold is pre-calibrated based on the furnace type and process precision requirements of the vacuum furnace. The low and high thresholds correspond to the dividing points between mild and moderate interference, and moderate and severe interference, respectively, with different threshold values ​​corresponding to different vacuum furnace specifications.

[0087] In one possible implementation, when determining the interference level of the residual gas partial pressure values ​​of each component, the partial pressure values ​​of each component are compared with a low threshold and a high threshold, respectively. A partial pressure value below the low threshold indicates that the residual desorption of that component has a small degree of interference with the pressure rise rate test, and is judged as mild interference; a partial pressure value between the low threshold and the high threshold indicates that the degree of interference is moderate, and is judged as moderate interference; a partial pressure value above the high threshold indicates that the residual desorption of that component has a significant impact on the test results, and is judged as severe interference.

[0088] Understandably, when assessing the degree of deterioration for furnaces marked as systematic deviations, the number of furnaces with consecutive systematic deviations and the increment of deviation amplitude between each furnace are counted. The increment of deviation amplitude is the difference between the periodic deviation values ​​of two adjacent furnaces, reflecting the accelerating trend of deterioration.

[0089] Preferably, when the number of furnace cycles exhibiting continuous systematic deviations exceeds a preset threshold for determining deterioration, the vacuum system is deemed to have deteriorated. The residual gas partial pressure values, interference levels, and deterioration determination results for each component are summarized to form a degassing residual partial pressure distribution and vacuum system deterioration assessment result. This assessment result distinguishes between non-systematic degassing residual interference introduced by atmosphere replacement and systematic deterioration caused by vacuum system aging, making subsequent maintenance decisions more targeted.

[0090] Step S105: When the vacuum system degradation assessment results indicate the presence of non-systematic degassing residual interference, the atmosphere replacement cycle is adjusted by combining the degassing residual partial pressure and the atmosphere replacement time. If there is no interference, the original atmosphere replacement cycle is directly used to obtain the adjusted atmosphere replacement cycle.

[0091] The current atmosphere replacement time T0 is read from the furnace record and used as the basis for adjusting the replacement cycle. Based on this adjustment basis, for components with severe interference, the residual gas partial pressure Pi of that component is divided by the corresponding high threshold H for interference level classification to obtain the extension coefficient ki = Pi / H. The original replacement time T0 is multiplied by ki to obtain the adjusted replacement time Ti for that component. For components with moderate interference, the single replacement time T0 is kept constant, and the number of replacements is increased by one to obtain the adjustment results for the replacement parameters of each component. Based on the adjustment results of the replacement parameters for each component, if a severely interfering component exists, the maximum value Tmax among all Ti is selected to update the original atmosphere replacement cycle; if only a moderately interfering component exists, the maximum number of replacements Nmax is selected to update the original cycle; if all components have mild interference or no interference, the original atmosphere replacement cycle is directly retained to obtain the adjusted atmosphere replacement cycle.

[0092] After obtaining the vacuum system degradation assessment results, determine whether the interference type belongs to non-systematic degassing residual interference.

[0093] Specifically, the interference type identifier is read from the deterioration assessment results. If the identifier indicates the presence of non-systematic degassing residual interference, the residual gas partial pressure values ​​of nitrogen, argon and water vapor components and their corresponding interference levels are extracted from the degassing residual partial pressure distribution. At the same time, the current atmosphere replacement time value is read from the furnace record database.

[0094] It should be noted that when adjusting the replacement time for components with a severe interference level, an extension factor is used for calculation. The residual gas partial pressure of the component is divided by the corresponding high threshold value in the interference level classification; the quotient is the extension factor, which reflects the degree to which the residual gas partial pressure exceeds the severe interference threshold. The adjusted replacement time for that component is obtained by multiplying the original replacement time by this extension factor.

[0095] For example, if the residual gas partial pressure of a certain component is 1.5 times the high threshold, then the extension coefficient is 1.5, and the adjusted replacement time is 1.5 times the original replacement time.

[0096] In one embodiment, when adjusting the number of replacement cycles for components with moderate interference levels, the duration of each replacement cycle remains unchanged, and the original number of replacement cycles read from preset parameters is increased by one. This adjustment method is suitable for components with moderate interference. By increasing the number of atmosphere replacement cycles rather than extending the duration of each replacement cycle, the residual gas adsorbed on the furnace wall surface gradually desorbs during multiple replacements. Further, after obtaining the adjustment results of the replacement parameters for each component, the maximum value of the adjusted replacement duration or the maximum value of the number of replacement cycles (preferably the maximum number of replacement cycles; if they are equal, the maximum duration is used) is selected to update the original atmosphere replacement cycle, where the cycle is defined as the product of the total replacement duration and the number of replacement cycles. This maximum value selection principle ensures that the adjustment range of the atmosphere replacement cycle covers the components with the most severe interference, avoiding insufficient desorption of residual gas due to insufficient adjustment range.

[0097] Preferably, if all components are only slightly interfered with or not interfered with, it indicates that the current atmosphere replacement cycle can meet the requirements for residual gas desorption. In this case, the original atmosphere replacement cycle can be directly retained without adjustment, and the adjusted atmosphere replacement cycle can be obtained.

[0098] Step S106: Update the residual gas composition for the next furnace according to the adjusted atmosphere replacement cycle, and perform residual gas partial pressure detection on the updated residual gas composition. Correlate the detected residual gas partial pressure with the expected pressure rise rate of the current furnace for each furnace to obtain the longitudinal tracking baseline of the pressure rise rate for consecutive furnaces.

[0099] A pre-established furnace cycle database stores historical data such as residual gas partial pressure and expected pressure rise rate for each furnace cycle. Based on the adjusted atmosphere replacement cycle, the atmosphere is replaced for the next furnace cycle. After replacement, mass spectrometry is used to scan the residual gas components in the furnace cavity, obtaining the partial pressure values ​​of nitrogen, argon, and water vapor at the start of the vacuuming process for the next furnace cycle, thus obtaining updated residual gas component partial pressures. For the updated residual gas component partial pressures, the expected pressure rise rate for the next furnace cycle is simultaneously read from the furnace cycle database. The residual gas partial pressures of each component are correlated one-to-one with the expected pressure rise rate for the next furnace cycle according to the furnace cycle number and stored in the furnace cycle database, resulting in furnace-by-furnace correlation data pairs. Based on the furnace-by-furnace correlation data pairs and the historical furnace cycle data accumulated in the database, the data is arranged and summarized in chronological order to form a sequence of data containing the residual gas partial pressure values ​​and corresponding expected pressure rise rates for each furnace cycle, thus obtaining a longitudinal tracking baseline for the pressure rise rate of consecutive furnace cycles.

[0100] After obtaining the atmosphere replacement cycle adjusted by t, the atmosphere replacement process is carried out for the next furnace according to the replacement cycle.

[0101] Specifically, after the vacuum furnace completes the heat treatment process for the current batch, the furnace cavity is cyclically filled with and removed with protective gas according to the optimized replacement time and number of replacements, so that the adsorbed gas remaining from the previous batch is fully desorbed from the furnace wall and the surface of the heat insulation screen.

[0102] In one embodiment, after the atmosphere replacement process is completed, at the start of the next vacuuming cycle, mass spectrometry is used to scan the residual gas components in the furnace cavity to obtain the partial pressure values ​​of each component, namely nitrogen, argon and water vapor, and to obtain the updated residual gas component partial pressures.

[0103] It should be noted that the process of establishing the furnace-by-furnace correlation data pairs involves the correlation of two types of data. The expected pressure rise rate of the current furnace is read from the furnace record database. This value is the expected value calculated by weighted average in the previous steps. The residual gas partial pressure of each component is correlated one-to-one with the expected pressure rise rate of the current furnace according to the furnace number.

[0104] For example, for furnace number 123, the partial pressures of nitrogen, argon, and water vapor are associated with the expected pressure rise rate of that furnace, and are stored as a complete furnace-by-furnace associated data pair in the furnace record database.

[0105] For example, as multiple furnace runs continue, the number of furnace-by-furnace correlation data pairs accumulated in the furnace record database gradually increases. Each data pair includes the residual gas partial pressure value and the corresponding expected pressure rise rate for that furnace. Further, based on these furnace-by-furnace correlation data pairs, they are arranged and summarized in furnace time sequence. The correlation data pairs for each furnace are arranged from smallest to largest furnace number or from earliest to latest production time, forming a sequence of data containing the residual gas partial pressure value and the corresponding expected pressure rise rate for each furnace, thus obtaining a longitudinal tracking baseline for the pressure rise rate of consecutive furnace runs. This baseline data visually presents the corresponding change pattern of residual gas partial pressure and expected pressure rise rate between consecutive furnace runs, serving as a reference for long-term monitoring of the vacuum system's health status.

[0106] It should also be noted that the various specific technical features described in the above embodiments can be combined in any suitable manner without contradiction. To avoid unnecessary repetition, the present invention will not describe the various possible combinations separately. Furthermore, various different embodiments of the present invention can also be arbitrarily combined, as long as they do not violate the spirit of the present invention, and should also be regarded as the content disclosed by the present invention.

Claims

1. A method for monitoring the pumping speed of a vacuum furnace and analyzing the state of the vacuum system, characterized in that, The method includes: The molecular weight distribution of the residual atmosphere at the start of vacuuming in the vacuum furnace is obtained. At the same time, the type of protective gas, replacement time, and pressure rise rate of the previous furnace are extracted from the furnace record to obtain the information on the initial residual components of the current furnace. The information on the initial residual components of the current furnace includes the partial pressure ratio of each residual component. The pressure rise rate of the current furnace is collected for each furnace, and the pressure rise rate of the current furnace is compared with that of the previous furnace. The migration amount of atmosphere components in adjacent furnaces is calculated by combining the partial pressure ratio of each residual component. The pressure rise rate of the current furnace after verification is determined by comparing the migration amount of atmosphere components in adjacent furnaces with the preset component migration threshold. Obtain the expected pressure rise rate of the current furnace, compare the expected pressure rise rate of the current furnace with the verified pressure rise rate of the current furnace, assess whether the non-systematic degassing residue introduced by atmosphere replacement interferes with longitudinal tracking, and obtain the degassing residue partial pressure distribution and vacuum system degradation assessment results. When the vacuum system degradation assessment results indicate the presence of non-systematic degassing residual interference, the atmosphere replacement cycle is adjusted. If no interference is present, the original atmosphere replacement cycle is used directly to obtain the adjusted atmosphere replacement cycle. The residual gas composition for the next furnace is updated according to the adjusted atmosphere replacement cycle, and the residual gas partial pressure is detected on the updated residual gas composition. The detected residual gas partial pressure is correlated with the expected pressure rise rate of the current furnace for each furnace to obtain the longitudinal tracking baseline of the pressure rise rate of the continuous furnace.

2. The method for monitoring the pumping speed of a vacuum furnace and judging and analyzing the state of a vacuum system according to claim 1, characterized in that, The process involves obtaining the molecular weight distribution of the residual atmosphere at the start of vacuum evacuation in the vacuum furnace, and simultaneously extracting the type of protective gas, replacement duration, and pressure rise rate of the previous furnace from the furnace record to obtain the initial residual component information for the current furnace, including: At the start of vacuuming in the vacuum furnace, mass spectrometry is used to scan and collect the residual atmosphere in the furnace cavity, and the signal intensity of each component in the residual atmosphere corresponding to the mass-to-charge ratio position is obtained. The components are identified according to the ratio of the peak signal intensity of the gas mass-to-charge ratio of each component, and the molecular weight spectrum distribution of the residual atmosphere in the current furnace is obtained. Based on the molecular weight distribution of the residual atmosphere in the current furnace, the relative abundance values ​​of each component are analyzed. At the same time, the protective gas type identifier, atmosphere replacement time record, and pressure rise rate of the previous furnace are read from the furnace record database. The partial pressure ratio of each residual component is calculated according to the ratio of the relative abundance value of each component to the total abundance, thus forming the initial residual component information of the current furnace.

3. The method for monitoring the pumping speed of a vacuum furnace and judging and analyzing the state of the vacuum system according to claim 1, characterized in that, The process involves collecting the pressure rise rate of each furnace cycle, comparing it with the pressure rise rate of the previous furnace cycle, and calculating the migration amount of atmosphere components between adjacent furnace cycles based on the partial pressure ratio of each residual component. This includes: After the vacuuming process is completed, the pressure rise rate of the current furnace is collected for each furnace. The pressure rise rate of the current furnace is compared with the pressure rise rate of the previous furnace to calculate the pressure rise rate difference. The pressure rise rate difference is then distributed according to the partial pressure ratio of each residual component to obtain the migration amount of atmosphere components in adjacent furnaces.

4. The method for monitoring the pumping speed of a vacuum furnace and judging and analyzing the state of the vacuum system according to claim 1, characterized in that, The step of determining the current furnace pressure rise rate after verification based on the comparison result of the atmospheric component migration amount of adjacent furnaces with the preset component migration threshold includes: The migration values ​​of each component in the atmosphere component migration amount of adjacent furnaces are obtained. The migration value of each component is compared with the preset component migration threshold one by one to obtain the threshold exceeding the judgment result of each component. When the migration amount of at least one component exceeds the preset component migration threshold, the desorption activation energy value of the corresponding component is extracted from the desorption characteristic data table of the adsorbed gas on the furnace wall to obtain the desorption activation energy of the component that exceeds the activation energy threshold. Based on the desorption activation energy of the component exceeding the activation energy threshold, the desorption activation energy value is divided by the preset benchmark activation energy value to obtain the desorption delay factor. The migration amount of each component exceeding the migration threshold is multiplied by the corresponding desorption delay factor to obtain the desorption contribution component. The current furnace pressure rise rate is subtracted from the sum of each desorption contribution component to obtain the desorption corrected pressure rise rate. When the migration amount of all components does not exceed the preset component migration threshold, the pressure rise rate of the current furnace is retained, and the pressure rise rate after desorption correction or the retained pressure rise rate of the current furnace is used as the verified pressure rise rate of the current furnace.

5. The method for monitoring the pumping speed of a vacuum furnace and judging and analyzing the state of the vacuum system according to claim 1, characterized in that, The process involves obtaining the expected pressure rise rate for the current furnace run, comparing it with the verified pressure rise rate, assessing whether the non-systematic degassing residue introduced by atmosphere replacement interferes with longitudinal tracking, and obtaining the degassing residue partial pressure distribution and vacuum system degradation assessment results, including: The cycle deviation value is calculated based on the expected pressure rise rate of the current furnace and the collected pressure rise rate of the current furnace. The presence of non-systematic degassing residual interference is determined based on whether the cycle deviation value exceeds the preset deviation threshold. For the aforementioned periodic deviation value, the residual pressure contribution value of each residual component is allocated according to the partial pressure ratio of each residual component in the initial residual component information of the current furnace batch, and the residual partial pressure contribution value of each component is obtained by summing up the residual partial pressure contribution values ​​of each component to obtain the degassing residual partial pressure. The residual degassing pressure is compared with a preset degradation judgment threshold. When the residual degassing pressure exceeds the degradation judgment threshold, it is determined to be residual degassing interference. When the residual pressure does not exceed the degradation judgment threshold and the periodic deviation value continues to increase in multiple consecutive furnace cycles, it is determined to be vacuum system degradation. The distribution of residual degassing pressure and the evaluation results of vacuum system degradation are obtained.

6. The method for monitoring the pumping speed of a vacuum furnace and judging and analyzing the state of the vacuum system according to claim 1, characterized in that, After obtaining the corrected pressure rise rate, the following steps are taken: the fluctuation pattern of the periodic deviation values ​​of multiple consecutive furnaces is determined. When the positive and negative signs of the periodic deviation values ​​of each furnace change alternately and the amplitude does not have an obvious growth pattern, it is marked as a non-systematic deviation. When the periodic deviation value is continuously positive in consecutive furnaces and the amplitude increases one after another, it is marked as a systematic deviation, thus obtaining the deviation type identifier.

7. The method for monitoring the pumping speed of a vacuum furnace and judging and analyzing the state of a vacuum system according to claim 1, characterized in that, When the vacuum system degradation assessment results indicate the presence of non-systematic degassing residual interference, the atmosphere replacement cycle is adjusted. If no interference is present, the original atmosphere replacement cycle is directly used, resulting in the adjusted atmosphere replacement cycle, which includes: To determine the type of interference in the vacuum system degradation assessment results, when there is non-systematic residual interference from degassing, extract the residual gas partial pressure values ​​of each component and the corresponding interference level from the residual partial pressure distribution of degassing, and at the same time read the current atmosphere replacement time. The residual gas partial pressure of the component with severe interference level is divided by the corresponding high threshold to obtain the extension coefficient. The original replacement time is multiplied by the extension coefficient to obtain the adjusted replacement time. The replacement number of the component with moderate interference level is increased by one to obtain the replacement parameter adjustment result for each component. The maximum value of the adjusted replacement time or replacement number is selected to update the original atmosphere replacement cycle to obtain the adjusted atmosphere replacement cycle.

8. The method for monitoring the pumping speed of a vacuum furnace and judging and analyzing the state of the vacuum system according to claim 1, characterized in that, The process of updating the residual gas composition for the next furnace based on the adjusted atmosphere replacement cycle, detecting the residual gas partial pressure of the updated residual gas composition, and correlating the detected residual gas partial pressure with the expected pressure rise rate of the current furnace for each furnace to obtain a longitudinal tracking baseline for the pressure rise rate of consecutive furnaces includes: The atmosphere is replaced for the next batch according to the adjusted atmosphere replacement cycle. After the replacement is completed, the partial pressure values ​​of each component at the beginning of the vacuuming are obtained by mass spectrometry to obtain the updated residual gas component partial pressure. The updated residual gas component partial pressures are correlated with the expected pressure rise rate of the current furnace according to the furnace number and stored in the furnace record database; The associated data is arranged and summarized in chronological order of the furnace batches to obtain the longitudinal tracking baseline of the pressure rise rate of consecutive furnace batches.

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