Liquid nozzle and liquid ejection device
By setting seed layers of different thicknesses between the piezoelectric layer and the vibrating plate, the problem of easy cracking of the piezoelectric layer in the liquid ejector head is solved, and the ejection performance and durability are improved.
CN122078059APending Publication Date: 2026-05-26SEIKO EPSON CORP
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- SEIKO EPSON CORP
- Filing Date
- 2025-11-24
- Publication Date
- 2026-05-26
Smart Images
Figure CN122078059A_ABST
Abstract
This application relates to a liquid ejector head and a liquid ejection device, which reduces damage such as cracks. The liquid ejector head includes: a pressure chamber substrate having a plurality of pressure chambers arranged in a first direction; a vibrating plate disposed on the pressure chamber substrate; a first electrode disposed on the vibrating plate; a piezoelectric layer disposed on the first electrode; a second electrode disposed on the piezoelectric layer; and a seed layer located between the piezoelectric layer and the vibrating plate for controlling the orientation of the piezoelectric layer. The piezoelectric layer has: a first region that does not overlap with the first electrode in the first direction; and a second region that overlaps with the first electrode in the first direction. The thickness of the portion of the seed layer corresponding to the second region is greater than the thickness of the portion of the seed layer corresponding to the first region.
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Citation Information
Patent Citations
Piezoelectric element, piezoelectric element application device, and manufacturing method of piezoelectric element
JP2017037932A