Regeneration rate test system and test method for cryogenic pumps

Abstract

The application discloses a regeneration rate test system and method of a cryogenic pump, and belongs to the technical field of cryogenic pump testing. The regeneration rate test system of the cryogenic pump comprises a test box body, a regeneration heating device, a pumping device, a data acquisition module and a control module. The test box body forms a test cavity. The outlet end of the test cavity is selectively communicated with the inlet end of a containing cavity. The regeneration heating device is used for regenerative heating of a trapping element. The pumping device is used for vacuumizing at least one of the containing cavity and the test cavity. The data acquisition module is used for acquiring state parameters of the containing cavity and the test cavity. The state parameters include the total amount Q0 of test gas input into the containing cavity and the total amount Q1' of test gas discharged from the test cavity. The control module is configured to determine the regeneration rate a of the cryogenic pump according to Q0 and Q1'. The quantitative, controllable and repeatable evaluation of the regeneration effect of the cryogenic pump is realized, so that a more suitable regeneration process can be selected for different cryogenic pumps.

Description

Technical Field

[0001] This application belongs to the field of cryogenic pump testing technology, and in particular relates to a regeneration rate testing system and testing method for cryogenic pumps. Background Technology

[0002] Cryogenic pumps are a core structure of fusion reactor devices, achieving high vacuum by trapping gas molecules onto cryogenic plates through condensation and / or adsorption. However, due to the saturation point of gas trapping during long-term operation, periodic regeneration processes (such as heating, purging, or baking) are often necessary to remove the trapped gas molecules and restore the pump's trapping capacity. Therefore, developing a corresponding regeneration process for cryogenic pumps to meet the long-term operational requirements of fusion reactor devices is the technical problem this application aims to solve. Summary of the Invention

[0003] This application aims to address at least one of the technical problems existing in the prior art. To this end, this application proposes a regeneration rate testing system and method for cryogenic pumps, which enables quantitative, controllable, and repeatable evaluation of the regeneration effect of cryogenic pumps. This allows for the selection of more suitable regeneration processes for different cryogenic pumps, ensuring the long-term reliable operation of fusion reactor devices.

[0004] In a first aspect, this application provides a regeneration rate testing system for a cryogenic pump, wherein the cryogenic pump has a receiving cavity, and a trapping element is disposed within the receiving cavity. The regeneration rate testing system for the cryogenic pump includes:

[0005] The test chamber has a test cavity, and the outlet end of the test cavity is optionally connected to the inlet end of the receiving cavity;

[0006] A regeneration heating device is used to regenerate and heat the collecting element;

[0007] A vacuum device is used to evacuate at least one of the receiving cavity and the test cavity;

[0008] The data acquisition module is used to acquire the status parameters of the receiving cavity and the test cavity;

[0009] The control module is electrically connected to the regenerative heating device, the air extraction device, the data acquisition module, and the cryogenic pump, respectively; wherein,

[0010] The state parameters include the total amount of test gas Q0 input into the containment cavity and the total amount of test gas Q1' discharged from the test cavity. The control module is configured to determine the regeneration rate α of the cryogenic pump based on Q0 and Q1', where Q0 is obtained when the pressure value of the test cavity is P0 and Q1' is obtained when the pressure value of the test cavity is P1 and the temperature value is T.

[0011] According to the cryogenic pump regeneration rate testing system of this application, the control module first controls the pumping device to operate, thereby achieving a vacuum state inside the containment chamber and the test chamber. Then, after inputting test gas into the containment chamber, the control module operates the cryogenic pump to capture the test gas. Next, the control module controls the regeneration heating device to heat the capturing element, causing the capturing element to release the captured test gas into the test chamber, thus executing a complete regeneration rate test process. Simultaneously, the control module, based on the total amount of test gas Q0 input into the containment chamber and the total amount of test gas Q1' discharged from the test chamber obtained by the data acquisition module, quantitatively calculates the regeneration rate α of the cryogenic pump, thereby quickly determining whether the regeneration is qualified. Furthermore, under the premise of qualified regeneration, multiple regeneration rate tests can be compared to select the optimal regeneration rate test process (e.g., using the shortest regeneration time or the highest regeneration rate as the optimization target) as the subsequent regeneration process used in actual operation of the cryogenic pump, achieving dual optimization of regeneration efficiency and regeneration effect.

[0012] According to one embodiment of this application, the control module is configured as follows:

[0013] The containment chamber and the test chamber are disconnected and the cryogenic pump is started to obtain Q0 and the current pressure value P0 of the test chamber;

[0014] Control the start-up of the regeneration heating device and connect the receiving cavity and the test cavity;

[0015] When the partial pressure of the remaining gas in the containment chamber is equal to P2, the regeneration heating device is stopped and the containment chamber and the test chamber are disconnected, and the current pressure value P1 and temperature value T of the test chamber are obtained.

[0016] The test gas is discharged from the test chamber to obtain Q1';

[0017] The desorption amount Q1'' of the test gas is determined based on P0, P1, and T;

[0018] The average desorption amount Q1 of the test gas is determined based on Q1' and Q1''.

[0019] The regeneration rate α of the cryogenic pump is determined based on Q0 and Q1.

[0020] According to one embodiment of this application, it also includes:

[0021] A gas source device, electrically connected to the control module, is used to supply the test gas to the receiving cavity;

[0022] The first vacuum valve, electrically connected to the control module, is located between the gas source device and the inlet end of the receiving cavity;

[0023] The second vacuum valve, electrically connected to the control module, is located between the outlet end of the receiving cavity and the inlet end of the test cavity;

[0024] The third vacuum valve, electrically connected to the control module, is located between the outlet end of the receiving cavity and the pumping device.

[0025] The fourth vacuum valve and the first vacuum pump, connected in parallel with the second vacuum valve and electrically connected to the control module, are disposed between the outlet end of the receiving cavity and the inlet end of the test cavity;

[0026] The fifth vacuum valve, electrically connected to the control module, is located between the outlet end of the test chamber and the pumping device.

[0027] The sixth vacuum valve and the second vacuum pump are electrically connected to the control module and are located at the outlet end of the test chamber to discharge the test gas.

[0028] According to one embodiment of this application, it also includes:

[0029] A recovery device, wherein the sixth vacuum valve and the second vacuum pump are disposed between the outlet end of the test chamber and the recovery device, the recovery device being used to receive the test gas discharged from the test chamber; and / or,

[0030] Both the first vacuum pump and the second vacuum pump include molecular pumps and mechanical pumps.

[0031] According to one embodiment of this application, the regeneration rate testing system further includes a safety device disposed at the outlet end of the test chamber, adapted to depressurize the test chamber; and / or,

[0032] The regeneration rate testing system further includes a leak detector, which is connected to both the air extraction device and the control module. The leak detector is used to obtain the actual leakage rate when the receiving cavity and the test cavity are connected; and / or

[0033] The regenerative heating device includes an armored heating wire and a temperature sensor. The armored heating wire is wound around the collecting element, and the collecting element is equipped with the temperature sensor. The temperature sensor is electrically connected to the control module; and / or...

[0034] The data acquisition module includes a vacuum gauge, a flow meter, and a gas analyzer.

[0035] Secondly, this application provides a method for testing the regeneration rate of a cryogenic pump, applied to the cryogenic pump regeneration rate testing system described above. The method includes:

[0036] The system controls the start and stop of the regeneration heating device, the air extraction device, and the cryogenic pump, as well as the connection and disconnection between the containment cavity formed by the cryogenic pump and the test cavity formed by the test chamber. Based on the data acquisition module, the system obtains the state parameters of the containment cavity and the test cavity. The state parameters include the total amount of test gas Q0 input into the containment cavity and the total amount of test gas Q1' discharged from the test cavity.

[0037] The regeneration rate α of the cryogenic pump is determined based on Q0 and Q1', where Q0 is obtained when the pressure value of the test chamber is P0 and Q1' is obtained when the pressure value of the test chamber is P1 and the temperature value is T.

[0038] According to the regeneration rate testing method of this application, quantitative evaluation of the regeneration effect of cryogenic pumps and automation of the regeneration rate testing process can be realized, improving the efficiency and repeatability of regeneration rate testing, and providing reliable data support for the optimization of the operating cycle of cryogenic pumps and the improvement of regeneration process.

[0039] According to one embodiment of this application, the steps of controlling the start and stop of the regeneration heating device, the vacuum device, and the cryogenic pump, as well as the connection and disconnection between the receiving cavity formed by the cryogenic pump and the test cavity formed by the test chamber, and obtaining the state parameters of the receiving cavity and the test cavity based on the data acquisition module, include:

[0040] The control chamber and the test chamber are disconnected, and the cryogenic pump and gas source device are started, and Q0 is obtained;

[0041] After the cryogenic pump has been running for a preset time, the regeneration heating device is started and the containment chamber and the test chamber are connected.

[0042] When the partial pressure of the remaining gas in the containment chamber is equal to P2, the regeneration heating device is stopped and the containment chamber and the test chamber are disconnected.

[0043] Control the test chamber to discharge the test gas and obtain Q1'.

[0044] According to one embodiment of this application, the step of disconnecting the containment cavity and the test cavity, and starting the cryogenic pump and gas source device to obtain Q0 includes:

[0045] The control unit connects the receiving cavity and the test cavity, and activates the air extraction device.

[0046] When the vacuum level of the containment cavity reaches the first preset vacuum level, the cryogenic pump is started and the containment cavity and the test cavity are disconnected, and the partial pressure value P2 of the current remaining gas in the containment cavity is obtained;

[0047] The pumping device is controlled to pump air from the test chamber until the current vacuum level of the test chamber is lower than the second preset vacuum level.

[0048] The control gas source device is started and the test gas is input into the containment cavity, and Q0 is obtained.

[0049] According to one embodiment of this application,

[0050] Prior to controlling the start-up of the regenerative heating device and connecting the receiving cavity and the test cavity, the following steps were also included:

[0051] Obtain the current pressure value P0 of the test chamber;

[0052] The process of controlling the test chamber to discharge the test gas and obtaining Q1' further includes, before:

[0053] Obtain the current pressure value P1 and temperature value T of the test chamber;

[0054] The regeneration rate α of the cryogenic pump is determined based on Q0 and Q1', including:

[0055] The desorption amount Q1'' of the test gas is determined based on P0, P1, and T;

[0056] The average desorption amount Q1 of the test gas is determined based on Q1' and Q1''.

[0057] The regeneration rate α of the cryogenic pump is determined based on Q0 and Q1.

[0058] According to one embodiment of this application, after controlling the connection between the receiving cavity and the test cavity and activating the vacuum device, the method further includes:

[0059] The actual leakage rate when the containment cavity and the test cavity are connected is determined by a leak detector;

[0060] If the actual leakage rate is less than the preset leakage rate, the pumping device is controlled to pump air from both the containment chamber and the test chamber simultaneously.

[0061] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0062] The above and / or additional aspects and advantages of this application will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0063] Figure 1 This is a schematic diagram of the regeneration rate testing system for cryogenic pumps provided in an embodiment of this application;

[0064] Figure 2 This is a schematic flowchart of the regeneration rate testing method for a cryogenic pump provided in the embodiments of this application.

[0065] Figure label:

[0066] 10. Cryogenic pump; 11. Receiving cavity;

[0067] 100. Test chamber; 110. Test cavity; 200. Regenerative heating device;

[0068] 300. Integrated air extraction and leak detection device; 410. Vacuum monitoring device; 420. Flow meter;

[0069] 500. Gas source device;

[0070] 610, First vacuum valve; 620, Second vacuum valve; 630, Third vacuum valve; 640, Fourth vacuum valve; 670, First vacuum pump; 650, Fifth vacuum valve; 660, Sixth vacuum valve; 680, Second vacuum pump;

[0071] 700. Recycling device; 800. Safety device. Detailed Implementation

[0072] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0073] The following is for reference. Figure 1 The regeneration rate testing system for a cryogenic pump provided according to an embodiment of this application is described. The cryogenic pump regeneration rate testing system includes a test chamber 100, a regeneration heating device 200, an air extraction device, a data acquisition module, and a control module.

[0074] It should be noted that the cryogenic pump 10 has a receiving cavity 11, and a trapping element is disposed inside the receiving cavity 11. The size and shape of the receiving cavity 11 can be designed according to actual needs, and this embodiment does not impose specific limitations on this.

[0075] In some embodiments, the trapping element includes a condenser plate and an adsorption plate. The condenser plate uses low temperature to freeze and solidify high-condensation-point components (including hydrogen and its isotopes) in the test gas onto its surface. The adsorption plate uses physical adsorption to capture low-condensation-point and non-condensable gases (including helium) in the test gas onto its surface, thereby achieving the trapping of the test gas.

[0076] The test chamber 100 has a test cavity 110, the outlet of which is optionally connected to the inlet of the receiving cavity 11. It should be noted that the size and shape of the test cavity 110 can be designed according to actual needs, and this embodiment does not impose specific limitations on this. The material of the test cavity 110 includes, but is not limited to, stainless steel.

[0077] It is understandable that by introducing an independent and constant-volume test chamber 110 into the regeneration rate test system, it is easier to improve the measurement of the test gas volume, and it can also buffer the large amount of test gas released in the early stage of regeneration by the cryogenic pump 10, thereby improving the stability of the test gas output.

[0078] It should be noted that the test gas includes at least one of hydrogen and helium, and the total amount of test gas does not exceed the volume of the test chamber 110 to ensure the reliability of the regeneration rate test system.

[0079] The regeneration heating device 200 is used to regenerate and heat the collecting element.

[0080] Understandably, the regeneration heating device 200 provides the thermal energy required for the regeneration of the cryogenic pump 10 to the trapping element, thereby triggering the desorption and release of the test gas. Simultaneously, the regeneration heating device 200 allows control of regeneration parameters such as heating temperature and heating rate, simulating different regeneration conditions that the cryogenic pump 10 may experience during actual use, thus improving the accuracy of the regeneration rate test results and their engineering reference value.

[0081] It should be noted that the regeneration of the cryogenic pump 10 includes rapid regeneration and complete regeneration. Rapid regeneration refers to heating only the condenser plate or only the adsorption plate to desorb and release a single specific gas (hydrogen and its isotopes or helium); complete regeneration refers to heating both the condenser plate and the adsorption plate to desorb and release multiple captured gases. The regeneration rate of the cryogenic pump 10 mentioned in this scheme refers to the rapid regeneration rate, i.e., the desorption efficiency for a specific gas. For example, when targeting hydrogen and its isotopes, only the regeneration heating device 200 needs to heat the condenser plate; when targeting helium, only the regeneration heating device 200 needs to heat the adsorption plate.

[0082] The evacuation device is used to evacuate at least one of the receiving chamber 11 and the test chamber 110. The evacuation device includes, but is not limited to, at least one of a mechanical pump and a molecular pump.

[0083] Understandably, the evacuation device evacuates at least one of the containment chamber 11 and the test chamber 110 to establish the required vacuum environment for the test system and improve the efficiency of the regeneration rate test, and also to meet the vacuum conditions required for the start-up of the cryogenic pump 10.

[0084] The data acquisition module is used to collect the status parameters of the receiving cavity 11 and the test cavity 110. The control module is electrically connected to the regeneration heating device 200, the vacuum device, the data acquisition module, and the cryogenic pump 10, respectively; wherein,

[0085] The status parameters include the total amount of test gas Q0 input to the containment chamber 11 and the total amount of test gas Q1' discharged from the test chamber 110. The control module is configured to determine the regeneration rate α of the cryogenic pump 10 based on Q0 and Q1', where Q0 is obtained when the pressure value of the test chamber 110 is P0 and Q1' is obtained when the pressure value of the test chamber 110 is P1 and the temperature value is T.

[0086] In actual operation, the control module first controls the pumping device to achieve a vacuum state inside the containment chamber 11 and the test chamber 110; then, after the test gas is input into the containment chamber 11, the cryogenic pump 10 is controlled to collect the test gas; then, the regeneration heating device 200 is controlled to heat the collecting element so that the collecting element releases the collected test gas into the test chamber 110 to perform a complete regeneration rate test process.

[0087] Meanwhile, the control module calculates the regeneration rate α of the cryogenic pump 10 based on the total amount of test gas Q0 in the input cavity 11 and the total amount of test gas Q1' discharged from the test cavity 110 obtained by the data acquisition module, thereby quickly determining whether the regeneration is qualified (for example, when α is greater than or equal to the preset regeneration rate (such as 95%), it is determined to be qualified).

[0088] Q0 is obtained when the pressure value of the test chamber 110 is P0, and Q1' is obtained when the pressure value of the test chamber 110 is P1 and the temperature value is T. This means that the change in pressure value of the test chamber 110 is used to accurately characterize the amount of gas before and after desorption. Combined with a temperature compensation mechanism, this reduces the cumulative error caused by changes in gas state (such as temperature fluctuations and pressure transients) in traditional flow measurement, thereby improving the accuracy of regeneration rate measurement. Furthermore, by introducing an independent, constant-volume test chamber 110, the release, buffering, and metering of gas are all concentrated in the same closed cavity, improving the repeatability and reliability of the test data.

[0089] In addition, under the premise of qualified regeneration, multiple regeneration rate tests can be compared to select the optimal regeneration rate test process (for example, the shortest regeneration time or the highest regeneration rate as the optimization target) as the regeneration process for the subsequent actual use of the cryogenic pump 10, so as to achieve dual optimization of regeneration efficiency and regeneration effect.

[0090] It should be noted that, as Figure 1 As shown, dashed lines represent electrical connections between devices, and solid lines represent pneumatic connections between devices.

[0091] The regeneration rate testing system for cryogenic pumps provided in this application embodiment enables quantitative, controllable, and repeatable evaluation of the regeneration effect of cryogenic pump 10, thereby enabling the selection of more suitable regeneration processes for different cryogenic pumps 10 and ensuring the long-term reliable operation of fusion reactor devices.

[0092] In some embodiments, the regeneration rate testing system has multiple adapter interfaces for adapting to different models of cryogenic pumps 10 under test, thereby improving the versatility of the regeneration rate testing system.

[0093] In some embodiments, such as Figure 1 As shown, the regeneration rate testing system also includes a gas source device 500, a first vacuum valve 610, a second vacuum valve 620, a third vacuum valve 630, a fourth vacuum valve 640, a first vacuum pump 670, a fifth vacuum valve 650, a sixth vacuum valve 660, and a second vacuum pump 680. The gas source device 500 is electrically connected to the control module and is used to supply test gas to the receiving chamber 11. The first vacuum valve 610 is electrically connected to the control module and is located between the gas source device 500 and the inlet end of the receiving chamber 11. The second vacuum valve 620 is electrically connected to the control module and is located between the outlet end of the receiving chamber 11 and the test chamber 1. Between the inlet end of cavity 10; the third vacuum valve 630 is electrically connected to the control module and is located between the outlet end of cavity 11 and the pumping device; the fourth vacuum valve 640 and the first vacuum pump 670 are both connected in parallel with the second vacuum valve 620 and are electrically connected to the control module, located between the outlet end of cavity 11 and the inlet end of test cavity 110; the fifth vacuum valve 650 is electrically connected to the control module and is located between the outlet end of test cavity 110 and the pumping device; the sixth vacuum valve 660 and the second vacuum pump 680 are electrically connected to the control module and are located at the outlet end of test cavity 110 for discharging test gas.

[0094] Understandably, by installing a gas source device 500 and a first vacuum valve 610 at the inlet end of the receiving cavity 11, the composition, proportion, and Q0 of the test gas entering the cryogenic pump 10 can be precisely controlled, improving the flexibility and reliability of the regeneration rate test. The second vacuum valve 620 to the fifth vacuum valve 650 and the first vacuum pump 670 can flexibly switch between establishing a vacuum environment, cryogenic pump 10 collection, and regeneration rate testing. The sixth vacuum valve 660 and the second vacuum pump 680 can precisely control the rate and duration of the test gas discharge from the test cavity 110 and obtain Q1', while also reducing mutual interference with the pumping device and improving the reliability of the regeneration rate test.

[0095] In some embodiments, such as Figure 1As shown, the gas source device 500, the receiving cavity 11, the test cavity 110 and the air extraction device are all connected by metal pipes to increase the structural strength and airtightness of the regeneration rate test system, while reducing the decrease in vacuum caused by gas release or seepage from the pipes, thereby improving the stability of the regeneration rate test process and the reliability of the regeneration rate.

[0096] In some embodiments, such as Figure 1 As shown, the regeneration rate testing system also includes a recovery device 700, a sixth vacuum valve 660 and a second vacuum pump 680 disposed between the outlet end of the test chamber 110 and the recovery device 700. The recovery device 700 is used to receive the test gas discharged from the test chamber 110.

[0097] It is understandable that the test gas released in the containment chamber 11 passes sequentially through the test chamber 110, the sixth vacuum valve 660, and the second vacuum pump 680 before being collected in the recovery device 700, thereby enabling the reuse of the test gas, reducing the cost of regeneration rate testing, and improving the safety of the regeneration rate testing system.

[0098] In some embodiments, such as Figure 1 As shown, both the first vacuum pump 670 and the second vacuum pump 680 include a molecular pump and a mechanical pump.

[0099] Understandably, mechanical pumps can rapidly improve efficiency through coarse pumping, while molecular pumps can improve vacuum levels through fine pumping. The two complement each other to improve the efficiency and accuracy of regeneration rate testing.

[0100] In some embodiments, such as Figure 1 As shown, the regeneration rate testing system also includes a safety device 800, which is disposed at the outlet end of the test chamber 110 and is adapted to depressurize the test chamber 110. Exemplarily, the safety device 800 may be one or more combinations of a mechanical safety valve, a metal rupture disc, a check valve, or a solenoid valve controlled by a control module; this embodiment does not impose specific limitations on this.

[0101] Understandably, when a leak in the regeneration rate testing system causes the cryogenic pump 10 to trap additional gas, and / or the total amount of test gas desorbed from the containment chamber 11 during regeneration exceeds the pressure-bearing capacity of the test chamber 110, the pressure inside the test chamber 110 may rise abnormally. In this case, the safety device 800 activates to release pressure, reducing the risk of damage to the regeneration rate testing system or causing a safety accident due to overpressure, thereby improving the reliability of the regeneration rate testing system.

[0102] In some embodiments, such as Figure 1 As shown, the safety device 800 is connected to the outlet end of the test chamber 110 and the recovery device 700 respectively, so as to directly release the overpressure gas to the recovery device 700, improve the recovery and utilization rate of the test gas and the reliability of the regeneration test system, and reduce the test cost.

[0103] In some embodiments, such as Figure 1 As shown, the regeneration rate testing system also includes a leak detector, which is connected to the air extraction device and the control module respectively. The leak detector is used to obtain the actual leakage rate when the containment chamber 11 and the test chamber 110 are connected.

[0104] Understandably, the control module determines the validity of the regeneration rate test based on the actual leakage rate. For example, if the actual leakage rate is not higher than the preset leakage rate, the regeneration rate test is deemed valid.

[0105] In actual operation, the control module first uses a leak detector to determine the overall airtightness of the regeneration rate testing system. If the actual leakage rate is not higher than the preset leakage rate, test gas is introduced into the containment chamber 11 to begin the regeneration rate test. If the actual leakage rate is higher than the preset leakage rate, it indicates a leak in the regeneration rate testing system, requiring leak detection and sealing until the actual leakage rate is no higher than the preset leakage rate, thus improving the reliability of the regeneration rate.

[0106] In some embodiments, such as Figure 1 As shown, the leak detector and the air extraction device are integrated to form an integrated air extraction and leak detection device 300, which improves the integration and space utilization of the regeneration rate testing system, simplifies the air circuit connection, reduces potential leak points, and ensures the synergy between the leak detection and air extraction processes, thereby improving the efficiency and reliability of the regeneration rate test.

[0107] In some embodiments, such as Figure 1 As shown, the regenerative heating device 200 includes an armored heating wire and a temperature sensor. The armored heating wire is wound around the collecting element, and the collecting element is equipped with a temperature sensor. The temperature sensor and the control module are electrically connected.

[0108] Understandably, the armored heating wire is wound around the collecting element to improve the heating area and heating uniformity. At the same time, the real-time feedback from the temperature sensor allows the control module to accurately adjust the heating power and obtain regeneration parameters. It also makes it easier for the control module to determine the start and end of regeneration heating, providing a hardware foundation for the automation of the regeneration rate testing process.

[0109] In some embodiments, the cryogenic pump 10 includes a housing forming a receiving cavity 11 and is provided with a temperature sensor to monitor the temperature change of the cryogenic pump 10 during the regeneration process, thereby improving the reliability and accuracy of the regeneration rate test.

[0110] In some embodiments, such as Figure 1 As shown, the data acquisition module includes a vacuum gauge, a flow meter 420, and a gas analyzer.

[0111] Understandably, the vacuum gauge is used to measure the pressure values ​​of the containment chamber 11 and the test chamber 110 in real time during the regeneration rate test. The flow meter 420 is used to monitor the instantaneous flow rate to obtain the total amount of test gas Q0 entering the containment chamber 11 and the total amount of test gas Q1' exiting the test chamber 110. The gas analyzer is used to analyze the gas composition and partial pressure in the containment chamber 11 and the test chamber 110 to identify whether there are leaks in the system and to determine whether the regeneration of the cryogenic pump 10 is complete, thereby improving the reliability of the regeneration rate test system.

[0112] In some embodiments, such as Figure 1 As shown, the data acquisition module also includes a temperature sensor to obtain the temperature values ​​of the containment cavity 11 and the test cavity 110 in real time, which can be used for regeneration rate calculation and monitoring of the regeneration rate test process, thereby improving the reliability of the regeneration rate test.

[0113] In some embodiments, such as Figure 1 As shown, the vacuum gauge and gas analyzer are integrated to form a vacuum monitoring device 410, which simplifies the structure of the regeneration rate test system and improves the synergy of the data acquisition module.

[0114] In some embodiments, such as Figure 1 As shown, a flow meter 420 is provided between the second vacuum pump 680 and the recovery device 700 to obtain Q1'. Of course, in other embodiments, the flow meter 420 may also be provided between the sixth vacuum valve 660 and the test chamber 110, and this embodiment does not impose any specific limitations on this.

[0115] In some embodiments, such as Figure 1 As shown, the gas source device 500 integrates the gas source and flow meter 420 to obtain Q0. Of course, in other embodiments, the flow meter 420 may also be installed between the first vacuum valve 610 and the receiving cavity 11; this embodiment does not impose specific limitations on this.

[0116] In some embodiments, the control module is configured to:

[0117] The control chamber 11 and the test chamber 110 are disconnected and the cryogenic pump 10 is started to obtain Q0 and the current pressure value P0 of the test chamber 110.

[0118] The control regeneration heating device 200 is started and the receiving chamber 11 and the test chamber 110 are connected;

[0119] When the partial pressure of the remaining gas in the containment chamber 11 is equal to P2, the regeneration heating device 200 is stopped and the containment chamber 11 and the test chamber 110 are disconnected, and the current pressure value P1 and temperature value T of the test chamber 110 are obtained.

[0120] Control the test chamber 110 to discharge the test gas and obtain Q1';

[0121] Determine the amount of desorption of the test gas Q1'' based on P0, P1, and T;

[0122] Determine the average desorption amount Q1 of the test gas based on Q1' and Q1'';

[0123] The regeneration rate α of the cryogenic pump 10 is determined based on Q0 and Q1.

[0124] It should be noted that "Q0 is obtained when the pressure value of the test chamber 110 is P0" mentioned above refers to the flow meter 420 accumulating the total amount of test gas entering the receiving chamber 11 when the pressure value of the test chamber 110 reaches P0 and is in a stable state; "Q1' is obtained when the pressure value of the test chamber 110 is P1 and the temperature value is T" refers to the flow meter 420 accumulating the total amount of test gas discharged from the test chamber 110 after the pressure value of the test chamber 110 has reached P1 and the temperature value is T and is in a stable state.

[0125] Understandably, compared to directly calculating the regeneration rate α using only Q0 and Q1', this scheme first calculates Q1'' using P0, P1, and T, then obtains Q1 by averaging Q1' and Q1'', and finally calculates the regeneration rate α by combining it with Q0. This utilizes two measurement methods with completely different physical principles: flow integral (obtaining Q1') and pressure-temperature-volume conversion (obtaining Q1''). Through mutual verification, the systematic error of a single measurement method is reduced, thereby improving the reliability and robustness of the regeneration rate calculation.

[0126] Meanwhile, the partial pressure of the remaining gas in the containment chamber drops to P2 as a precise criterion for the completion of regeneration, and this is used to control the entire testing process, thereby improving the testing accuracy.

[0127] In some embodiments, Q1'', Q1, and α are calculated as follows:

[0128] First, based on the pressure change in test chamber 110 before and after regeneration heating and the ideal gas law, the amount of substance n of the test gas desorbed from the trapping element is calculated:

[0129] n = (P1 - P0) × V / (R × T), where V is the volume of test chamber 110 (unit: m³); R is the ideal gas constant, R = 8.314 J / (mol·K);

[0130] Then, n is converted to the volume Q1'' under standard conditions (Tstd=273.15K, Pstd=101325Pa):

[0131] Q1''=n×R×Tstd / Pstd;

[0132] Then take the average of Q1'' and Q1'' to get Q1;

[0133] Finally, the regeneration rate α = Q1 / Q0 is obtained.

[0134] In practice,

[0135] First, the control module opens the second vacuum valve 620 to the fifth vacuum valve 650 and controls the pumping device to evacuate the containment chamber 11 and the test chamber 110 so that the cryogenic pump 10 meets the vacuum environment for startup. Then, the second vacuum valve 620 to the fifth vacuum valve 650 are closed, and the partial pressure value of the remaining gas in the containment chamber 11 is obtained as P2.

[0136] Secondly, the control module opens the first vacuum valve 610 and controls the gas source device 500 to introduce test gas into the receiving cavity 11, so that the cryogenic pump 10 works and captures the test gas, and obtains Q0 and the current pressure value P0 of the test cavity 110.

[0137] Furthermore, the control module controls the regeneration heating device 200 to start, so as to heat the collecting element and open the second vacuum valve 620 to connect the test chamber 110 and the receiving chamber 11; when the current temperature value of the collecting element reaches the preset regeneration temperature, the second vacuum valve 620 is closed, the fourth vacuum valve 640 and the first vacuum pump 670 are opened to accelerate the discharge of the test gas in the receiving chamber 11; when the partial pressure value of the remaining gas in the receiving chamber 11 is equal to P2, the regeneration heating device 200 is controlled to stop and the fourth vacuum valve 640 and the first vacuum valve 610 are closed, so that the receiving chamber 11 and the test chamber 110 are disconnected, and the current pressure value P1 and temperature value T of the test chamber 110 are obtained.

[0138] Finally, the control module controls the sixth vacuum valve 660 and the second vacuum pump 680 to open, allowing the test gas in the test chamber 110 to flow into the recovery device 700, and closes the fourth vacuum valve 640 and the second vacuum pump 680 when the current pressure value of the test chamber 110 is restored to P0, thus obtaining Q1'.

[0139] In some embodiments, the test steps of the cryogenic pump regeneration rate testing system are as follows:

[0140] Step 1: Initialization Preparation

[0141] Connect the cryogenic pump 10 to the regeneration rate testing system. After confirming that all vacuum valves 610 to 660 are closed, open the second vacuum valve 620 to 550 and start the evacuation and leak detection integrated device 300 for evacuation and leak detection. Evacuation continues as long as the actual leakage rate is confirmed to be no higher than the preset leakage rate. When the vacuum level in the containment chamber 11 reaches 10 Pa, close the second vacuum valve 620 to 440, start the cryogenic pump 10, and cool it to its operating temperature. Simultaneously, maintain evacuation of the test chamber 110 until the vacuum level in the test chamber 110 is lower than 10 Pa. -6 When Pa, the pumping device is stopped and the fifth vacuum valve 650 is closed, and the partial pressure value P2 of the remaining gas in the containment chamber 11 is obtained at the same time.

[0142] Step 2: Introduce the test gas

[0143] First, open the first vacuum valve 610 to allow the gas source device 500 to introduce test gas into the receiving cavity 11. Then, close the first vacuum valve 610 and obtain the total amount Q0 of test gas input into the receiving cavity 11. Simultaneously, the data acquisition module records real-time flow rate, real-time temperature value, vacuum pressure, and other status parameters.

[0144] Step 3: Regeneration Heating

[0145] The collecting element is heated by the regenerative heating device 200, while the data acquisition module records status parameters such as heating power, real-time temperature value and vacuum pressure.

[0146] Step 4: Test Gas Desorption and Measurement

[0147] When the vacuum level in the containment chamber 11 begins to rise, the second vacuum valve 620 is opened, and the pressure value P0 of the test chamber 110 is obtained through the data acquisition module before the second vacuum valve 620 is opened; when the current temperature value of the trapping element reaches the preset regeneration temperature, the second vacuum valve 620 is closed, and the fourth vacuum valve 640 and the first vacuum pump 670 are opened; when the partial pressure value of the remaining gas in the containment chamber 11 reaches P2, the regeneration heating device 200 is controlled to stop and the fourth vacuum valve 640 and the first vacuum valve 610 are closed, and the current pressure value P1 and temperature value T of the test chamber 110 are obtained; the sixth vacuum valve 660 and the second vacuum pump 680 are controlled to open, so that the test gas in the test chamber 110 is discharged into the recovery device 700; when the current pressure value of the test chamber 110 returns to P0, the fourth vacuum valve 640 and the second vacuum pump 680 are closed, and the total amount Q1' of the test gas discharged from the test chamber 110 is obtained.

[0148] Step 5: Regeneration Rate Calculation and Evaluation

[0149] Determine the amount of desorption of the test gas Q1'' based on P0, P1, and T;

[0150] Determine the average desorption amount Q1 of the test gas based on Q1' and Q1'';

[0151] The regeneration rate α of cryogenic pump 10 is determined based on Q0 and Q1;

[0152] If α is not less than the preset regeneration rate, the regeneration rate test is deemed to be qualified, and the regeneration rate test is recorded as the reference regeneration rate test, and its corresponding state parameters are recorded as the reference state parameters.

[0153] Multiple reference regeneration rate tests are compared (e.g., the highest regeneration rate, shortest regeneration time, or best overall score is used as the optimization goal), and the optimal reference regeneration rate test is determined. The corresponding state parameters are then used as the preferred regeneration process parameters for the cryogenic pump 10 for subsequent actual regeneration operations.

[0154] This application also provides a method for testing the regeneration rate of a cryogenic pump, which is applied to the regeneration rate testing system described above.

[0155] like Figure 2 As shown, the test method includes steps 910 and 920.

[0156] Step 910: Control the start and stop of the regeneration heating device 200, the air extraction device and the cryogenic pump 10 respectively, and control the connection and disconnection between the receiving cavity 11 formed by the cryogenic pump 10 and the test cavity 110 formed by the test chamber 100. Based on the data acquisition module, obtain the status parameters of the receiving cavity 11 and the test cavity 110. The status parameters include the total amount of test gas Q0 input to the receiving cavity 11 and the total amount of test gas Q1' discharged from the test cavity 110.

[0157] Understandably, the data acquisition module converts the detected physical quantities into electrical signals and transmits them to the control module. The control module outputs corresponding control signals based on the obtained state parameters to control the start and stop of the regeneration heating device 200, the air extraction device and the cryogenic pump 10, as well as the connection and disconnection between the containment cavity 11 formed by the cryogenic pump 10 and the test cavity 110 formed by the test chamber 100.

[0158] Step 920: Determine the regeneration rate α of the cryogenic pump 10 based on Q0 and Q1'. Q0 is obtained when the pressure value of the test chamber 110 is P0, and Q1' is obtained when the pressure value of the test chamber 110 is P1 and the temperature value is T.

[0159] The regeneration rate testing method for cryogenic pumps provided in the embodiments of this application can realize the quantitative evaluation of the regeneration effect of cryogenic pump 10 and the automation of the regeneration rate testing process, improve the efficiency and repeatability of regeneration rate testing, and provide reliable data support for the optimization of the operating cycle and improvement of the regeneration process of cryogenic pump 10.

[0160] In some embodiments, step 910 includes:

[0161] Step 911: Control the disconnection of the containment chamber 11 and the test chamber 110, and start the cryogenic pump 10 and the gas source device 500 to obtain Q0;

[0162] Step 912: After the cryogenic pump 10 has been running for a preset time, control the regeneration heating device 200 to start and connect the receiving chamber 11 and the test chamber 110.

[0163] Step 913: When the partial pressure of the remaining gas in the containment chamber 11 is equal to P2, control the regeneration heating device 200 to stop and disconnect the containment chamber 11 and the test chamber 110.

[0164] Step 914: Control the test chamber 110 to discharge the test gas and obtain Q1'.

[0165] Understandably, with the test chamber 110 and the receiving chamber 11 disconnected, test gas is input into the receiving chamber 11 via the gas source device 500, and Q0 is obtained through the flow meter 420 of the data acquisition module. Simultaneously, the cryogenic pump 10 captures the test gas through the trapping element. After the cryogenic pump 10 runs for a preset time, it can be determined that the trapping element is close to saturation, thus restarting the cryogenic pump 10 and connecting the receiving chamber 11 and the test chamber 110, allowing the desorbed test gas in the receiving chamber 11 to flow into the test chamber 110. When the partial pressure of the remaining gas in the receiving chamber 11, obtained by the gas analyzer of the data acquisition module, is equal to P2, regeneration can be determined to be complete, heating of the cryogenic pump 10 is stopped, and the receiving chamber 11 and the test chamber 110 are disconnected. Finally, the test chamber 110 is controlled to discharge the internal test gas, and Q1' is obtained through the flow meter 420 of the data acquisition module. This realizes the entire process of regeneration rate testing, improving the stability and repeatability of regeneration rate testing.

[0166] In some embodiments, step 911 includes:

[0167] Step 9111: Connect the containment chamber 11 and the test chamber 110 and start the air extraction device;

[0168] Step 9112: When the vacuum degree of the containment cavity 11 reaches the first preset vacuum degree, control the cryogenic pump 10 to start and disconnect the containment cavity 11 and the test cavity 110, and obtain the partial pressure value P2 of the current remaining gas in the containment cavity 11.

[0169] Step 9113: Control the pumping device to pump air from the test chamber 110 until the current vacuum level of the test chamber 110 is lower than the second preset vacuum level.

[0170] Step 9114: Start the control gas source device 500 and input the test gas into the receiving cavity 11, and obtain Q0.

[0171] For example, the first preset vacuum degree is 10 Pa, and the second preset vacuum degree is 10 Pa. -6 Pa, in this embodiment, no specific limits are placed on the specific values ​​of the first preset vacuum degree and the second preset vacuum degree.

[0172] Understandably, both the receiving chamber 11 and the test chamber 110 are evacuated simultaneously to improve pumping efficiency. Once the vacuum level in the receiving chamber 11 reaches the first preset vacuum level, the vacuum conditions required for the cryogenic pump 10 to operate are met, and the receiving chamber 11 and test chamber 110 are disconnected. P2 is then obtained as the condition for the test chamber 110 to discharge test gas during this regeneration rate test. The pumping device continues to evacuate the test chamber 110 until its vacuum level is lower than the second preset vacuum level to minimize background interference and ensure that Q1 closely approximates the actual desorbed gas volume in the receiving chamber 11, thus improving the reliability of the regeneration rate test. Finally, the gas source device 500 is controlled to input test gas into the receiving chamber 11, and Q0 is obtained. This improves the reliability and accuracy of the regeneration rate test.

[0173] In some embodiments,

[0174] Before step 912, the following steps are also included: obtaining the current pressure value P0 of the test chamber 110;

[0175] Before step 914, the method also includes: obtaining the current pressure value P1 and temperature value T of the test chamber 110;

[0176] Step 920 includes:

[0177] Step 921: Determine the desorption amount Q1'' of the test gas based on P0, P1, and T;

[0178] Step 922: Determine the average desorption amount Q1 of the test gas based on Q1' and Q1'';

[0179] Step 923: Determine the regeneration rate α of the cryogenic pump 10 based on Q0 and Q1.

[0180] Understandably, compared to directly calculating the regeneration rate α using only Q0 and Q1', this scheme first calculates Q1'' using P0, P1, and T, then obtains Q1 by averaging Q1' and Q1'', and finally calculates the regeneration rate α by combining it with Q0. This utilizes two measurement methods with completely different physical principles: flow integral (obtaining Q1') and pressure-temperature-volume conversion (obtaining Q1''). Through mutual verification, the systematic error of a single measurement method is reduced, thereby improving the reliability and robustness of the regeneration rate calculation.

[0181] In some embodiments, between steps 9111 and 9112, the following further step is included:

[0182] The actual leakage rate when the containment cavity 11 and the test cavity 110 are connected is determined by a leak detector;

[0183] If the actual leakage rate is less than the preset leakage rate, the pumping device is controlled to pump air from both the containment chamber 11 and the test chamber 110 simultaneously.

[0184] Understandably, the validity of the regeneration rate test is judged based on the actual leakage rate. For example, if the actual leakage rate is not higher than the preset leakage rate, the regeneration rate test is considered valid. If the actual leakage rate is higher than the preset leakage rate, it indicates that there is a leak in the regeneration rate test system, and leak detection and plugging treatment are required until the actual leakage rate is not higher than the preset leakage rate, thus improving the reliability of the regeneration rate.

[0185] In some embodiments, the regeneration rate test process for cryogenic pumps is as follows:

[0186] Connect the cryogenic pump 10 to the regeneration rate test system, and after confirming that the first vacuum valve 610 to the sixth vacuum valve 660 are closed, open the second vacuum valve 620 to the fifth vacuum valve 650 to connect the receiving chamber 11 and the test chamber 110, and control the pumping device to start.

[0187] The actual leakage rate when the containment cavity 11 and the test cavity 110 are connected is determined by a leak detector;

[0188] If the actual leakage rate is less than the preset leakage rate, the evacuation device is controlled to evacuate both the containment chamber 11 and the test chamber 110 simultaneously.

[0189] When the vacuum level of the containment chamber 11 reaches the first preset vacuum level, the cryogenic pump 10 is started, the second vacuum valve 620 to the fourth vacuum valve 640 are closed to disconnect the containment chamber 11 and the test chamber 110, and the partial pressure value P2 of the current remaining gas in the containment chamber 11 is obtained.

[0190] Control the pumping device to pump air from the test chamber 110 until the current vacuum level of the test chamber 110 is lower than the second preset vacuum level, then close the pumping device and the fifth vacuum valve 650.

[0191] The control gas source device 500 is started and inputs test gas into the receiving cavity 11, and the total amount Q0 of test gas input into the receiving cavity 11 and the current pressure value P0 of the test cavity 110 are obtained;

[0192] After the cryogenic pump 10 has been running for a preset time, the first vacuum valve 610 is closed, and the regeneration heating device 200 is started to heat the collecting element and obtain relevant status parameters such as heating power, real-time temperature value and vacuum pressure.

[0193] When the current vacuum level in the containment chamber 11 begins to rise, the second vacuum valve 620 is opened to connect the containment chamber 11 and the test chamber 110.

[0194] When the current temperature of the collecting element reaches the preset regeneration temperature, the second vacuum valve 620 is closed and the fourth vacuum valve 640 and the first vacuum pump 670 are opened.

[0195] When the partial pressure of the remaining gas in the containment chamber 11 is equal to P2, the regeneration heating device 200 is stopped and the fourth vacuum valve 640 and the first vacuum valve 610 are closed, so that the containment chamber 11 and the test chamber 110 are disconnected, and the current pressure value P1 and temperature value T of the test chamber 110 are obtained.

[0196] The sixth vacuum valve 660 and the second vacuum pump 680 are opened to discharge the test gas in the test chamber 110 to the recovery device 700.

[0197] When the current pressure value of the test chamber 110 is restored to P0, the fourth vacuum valve 640 and the second vacuum pump 680 are closed, and the total amount of test gas discharged from the test chamber 110, Q1', is obtained.

[0198] Determine the amount of desorption of the test gas Q1'' based on P0, P1, and T;

[0199] Determine the average desorption amount Q1 of the test gas based on Q1' and Q1'';

[0200] The regeneration rate α of cryogenic pump 10 is determined based on Q0 and Q1;

[0201] If α is not less than the preset regeneration rate, the regeneration rate test is deemed to be qualified, and the regeneration rate test is recorded as the reference regeneration rate test, and its corresponding state parameters are recorded as the reference state parameters.

[0202] Multiple reference regeneration rate tests are compared (e.g., the highest regeneration rate, shortest regeneration time, or best overall score is used as the optimization goal), and the optimal reference regeneration rate test is determined. The corresponding state parameters are then used as the preferred regeneration process parameters for the cryogenic pump 10 for subsequent actual regeneration operations.

[0203] Through the above description of the embodiments, those skilled in the art can clearly understand that the methods according to the above embodiments can be implemented by means of software plus necessary general-purpose hardware platforms. Of course, they can also be implemented by hardware, but in many cases the former is a better implementation method.

[0204] Embodiments of this application also provide a computer program product, including an acquisition unit, a processing unit, and a calculation unit. The acquisition unit is used to acquire the state parameters of the receiving cavity 11 and the test cavity 110 obtained by the data acquisition module. The processing unit is used to control the start and stop of the regeneration heating device 200, the air extraction device, and the cryogenic pump 10, as well as the connection and disconnection between the receiving cavity 11 formed by the cryogenic pump 10 and the test cavity 110 formed by the test chamber 100. The calculation unit is used to determine the regeneration rate α of the cryogenic pump 10.

[0205] The computer program product provided in this embodiment can realize the quantitative evaluation of the regeneration effect of the cryogenic pump 10 and the automation of the regeneration rate test process, improve the efficiency and repeatability of the regeneration rate test, and provide reliable data support for the optimization of the operating cycle of the cryogenic pump 10 and the improvement of the regeneration process.

[0206] For a description of the features in the embodiments corresponding to the computer program product, please refer to the relevant description of the embodiments corresponding to the regeneration rate test method of the cryogenic pump, which will not be repeated here.

[0207] Embodiments of this application also provide a computer-readable storage medium storing a computer program configured to execute the steps in any of the above-described embodiments of the cryogenic pump regeneration rate testing method.

[0208] In one exemplary embodiment, the aforementioned computer-readable storage medium may include, but is not limited to, various media capable of storing computer programs, such as a USB flash drive, read-only memory (ROM), random access memory (RAM), portable hard disk, magnetic disk, or optical disk.

[0209] The embodiments of this application also provide a computer program product, which includes a computer program that, when executed by a processor, implements the steps in any of the above-described embodiments of the cryogenic pump regeneration rate testing method.

[0210] Embodiments of this application also provide another computer program product, including a non-volatile computer-readable storage medium storing a computer program, which, when executed by a processor, implements the steps in any of the above-described embodiments of the cryogenic pump regeneration rate testing method.

[0211] Those skilled in the art will further recognize that the units and algorithm steps of the various examples described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, computer software, or a combination of both. To clearly illustrate the interchangeability of hardware and software, the components and steps of the various examples have been generally described in terms of functionality in the foregoing description. Whether these functions are implemented in hardware or software depends on the specific application and design constraints of the technical solution. Those skilled in the art can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of this application.

[0212] The above provides a detailed description of the regeneration rate testing system, method, and procedure for a cryogenic pump provided in this application. Specific examples have been used to illustrate the principles and implementation methods of this application. The descriptions of the embodiments above are merely for the purpose of helping to understand the method and core ideas of this application. It should be noted that those skilled in the art can make various improvements and modifications to this application without departing from its principles, and these improvements and modifications also fall within the protection scope of the claims of this application.

[0213] The terms "first," "second," etc., used in the specification and claims of this application are used to distinguish similar objects and not to describe a specific order or sequence. It should be understood that such use of data can be interchanged where appropriate so that embodiments of this application can be implemented in orders other than those illustrated or described herein, and the objects distinguished by "first," "second," etc., are generally of the same class and the number of objects is not limited; for example, a first object can be one or more. Furthermore, in the specification and claims, "and / or" indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship.

[0214] In the description of this application, it should be understood that the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0215] In the description of this application, "first feature" and "second feature" may include one or more of the features.

[0216] In the description of this application, "multiple" means two or more.

[0217] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0218] Although embodiments of this application have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of this application, the scope of which is defined by the claims and their equivalents.

Claims

1. A regeneration rate testing system for a cryogenic pump, wherein the cryogenic pump has a receiving cavity, and a collection element is disposed within the receiving cavity, characterized in that, The regeneration rate testing system for the cryogenic pump includes: The test chamber has a test cavity, and the outlet end of the test cavity is optionally connected to the inlet end of the receiving cavity; A regeneration heating device is used to regenerate and heat the collecting element; A vacuum device is used to evacuate at least one of the receiving cavity and the test cavity; The data acquisition module is used to acquire the status parameters of the receiving cavity and the test cavity; The control module is electrically connected to the regeneration heating device, the air extraction device, the data acquisition module, and the cryogenic pump, respectively; wherein, The state parameters include the total amount Q0 of the test gas input into the containment cavity and the total amount Q1' of the test gas discharged from the test cavity. The control module is configured to: The containment chamber and the test chamber are disconnected and the cryogenic pump is started to obtain Q0 and the current pressure value P0 of the test chamber; Control the start-up of the regeneration heating device and connect the receiving cavity and the test cavity; When the partial pressure of the remaining gas in the containment chamber is equal to P2, the regeneration heating device is stopped and the containment chamber and the test chamber are disconnected, and the current pressure value P1 and temperature value T of the test chamber are obtained. The test gas is discharged from the test chamber to obtain Q1'; The desorption amount Q1'' of the test gas is determined based on P0, P1, and T; The average desorption amount Q1 of the test gas is determined based on Q1' and Q1''. The regeneration rate α of the cryogenic pump is determined based on Q0 and Q1, where α = Q1 / Q0; If α is not less than the preset regeneration rate, the regeneration rate test is deemed to be qualified, and the regeneration rate test is recorded as the reference regeneration rate test, and its corresponding state parameters are recorded as the reference state parameters. By comparing multiple reference regeneration rate tests, the optimal reference regeneration rate test is determined, and its corresponding state parameters are used as the preferred regeneration process parameters for the cryogenic pump.

2. The regeneration rate testing system for cryogenic pumps according to claim 1, characterized in that, Also includes: A gas source device, electrically connected to the control module, is used to supply the test gas to the receiving cavity; The first vacuum valve, electrically connected to the control module, is located between the gas source device and the inlet end of the receiving cavity; The second vacuum valve, electrically connected to the control module, is located between the outlet end of the receiving cavity and the inlet end of the test cavity; The third vacuum valve, electrically connected to the control module, is located between the outlet end of the receiving cavity and the pumping device. The fourth vacuum valve and the first vacuum pump, connected in parallel with the second vacuum valve and electrically connected to the control module, are disposed between the outlet end of the receiving cavity and the inlet end of the test cavity; The fifth vacuum valve, electrically connected to the control module, is located between the outlet end of the test chamber and the pumping device. The sixth vacuum valve and the second vacuum pump are electrically connected to the control module and are located at the outlet end of the test chamber to discharge the test gas.

3. The regeneration rate testing system for cryogenic pumps according to claim 2, characterized in that, Also includes: A recovery device, wherein the sixth vacuum valve and the second vacuum pump are disposed between the outlet end of the test chamber and the recovery device, the recovery device being used to receive the test gas discharged from the test chamber; and / or, Both the first vacuum pump and the second vacuum pump include molecular pumps and mechanical pumps.

4. The regeneration rate testing system for cryogenic pumps according to claim 1, characterized in that, The regeneration rate testing system also includes a safety device located at the outlet end of the test chamber, adapted to depressurize the test chamber; and / or, The regeneration rate testing system further includes a leak detector, which is connected to both the air extraction device and the control module. The leak detector is used to obtain the actual leakage rate when the receiving cavity and the test cavity are connected; and / or The regenerative heating device includes an armored heating wire and a temperature sensor. The armored heating wire is wound around the collecting element, and the collecting element is equipped with the temperature sensor. The temperature sensor is electrically connected to the control module; and / or... The data acquisition module includes a vacuum gauge, a flow meter, and a gas analyzer.

5. A method for testing the regeneration rate of a cryogenic pump, applied to the cryogenic pump regeneration rate testing system as described in any one of claims 1 to 4, characterized in that, include: The system controls the start and stop of the regeneration heating device, the air extraction device, and the cryogenic pump, as well as the connection and disconnection between the containment cavity formed by the cryogenic pump and the test cavity formed by the test chamber. Based on the data acquisition module, the system obtains the state parameters of the containment cavity and the test cavity. The state parameters include the total amount of test gas Q0 input into the containment cavity and the total amount of test gas Q1' discharged from the test cavity.

6. The method for testing the regeneration rate of a cryogenic pump according to claim 5, characterized in that, The control of the start and stop of the regeneration heating device, the vacuum device, and the cryogenic pump, as well as the connection and disconnection between the receiving cavity formed by the cryogenic pump and the test cavity formed by the test chamber, and the acquisition of state parameters of the receiving cavity and the test cavity based on the data acquisition module, includes: The control chamber and the test chamber are disconnected, and the cryogenic pump and gas source device are started, and Q0 is obtained; After the cryogenic pump has been running for a preset time, the regeneration heating device is started and the containment chamber and the test chamber are connected. When the partial pressure of the remaining gas in the containment chamber is equal to P2, the regeneration heating device is stopped and the containment chamber and the test chamber are disconnected. Control the test chamber to discharge the test gas and obtain Q1'.

7. The method for testing the regeneration rate of a cryogenic pump according to claim 6, characterized in that, The control of disconnecting the containment chamber and the test chamber, and starting the cryogenic pump and gas source device to obtain Q0 includes: The control unit connects the receiving cavity and the test cavity, and activates the air extraction device. When the vacuum level of the containment cavity reaches the first preset vacuum level, the cryogenic pump is started and the containment cavity and the test cavity are disconnected, and the partial pressure value P2 of the current remaining gas in the containment cavity is obtained; The pumping device is controlled to pump air from the test chamber until the current vacuum level of the test chamber is lower than the second preset vacuum level. The control gas source device is started and the test gas is input into the containment cavity, and Q0 is obtained.

8. The method for testing the regeneration rate of a cryogenic pump according to claim 6, characterized in that, Prior to controlling the start-up of the regenerative heating device and connecting the receiving cavity and the test cavity, the following steps were also included: Obtain the current pressure value P0 of the test chamber; The process of controlling the test chamber to discharge the test gas and obtaining Q1' further includes, before: Obtain the current pressure value P1 and temperature value T of the test chamber; The desorption amount Q1'' of the test gas is determined based on P0, P1, and T; The average desorption amount Q1 of the test gas is determined based on Q1' and Q1''. The regeneration rate α of the cryogenic pump is determined based on Q0 and Q1.

9. The method for testing the regeneration rate of a cryogenic pump according to claim 7, characterized in that, The process of connecting the receiving cavity and the test cavity and activating the suction device further includes: The actual leakage rate when the containment cavity and the test cavity are connected is determined by a leak detector; If the actual leakage rate is less than the preset leakage rate, the pumping device is controlled to pump air from both the containment chamber and the test chamber simultaneously.

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