基于光强分布模型的微尺度六自由度运动测量方法及装置
By combining multi-core optical fiber with an optically modulated target, and using an intensity distribution model to decouple the six-degree-of-freedom pose signal, the measurement blind zone of traditional fiber optic sensors and laser interferometers is solved, realizing high-precision, non-contact synchronous measurement of microscale six-degree-of-freedom displacement, which is suitable for advanced manufacturing and micro-nano manipulation.
CN122083901BActive Publication Date: 2026-07-17DALIAN UNIV OF TECH
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- DALIAN UNIV OF TECH
- Filing Date
- 2026-04-21
- Publication Date
- 2026-07-17
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Figure CN122083901B_ABST
Abstract
基于光强分布模型的微尺度六自由度运动测量方法及装置,属于精密光学计量与微纳操控领域。装置包括激光二极管与激光耦合器、多芯光纤、光调制目标靶、多通道光电探测器、采集卡及处理器;多芯光纤由一根发射光纤及其均匀周围环绕的多根接收光纤构成;光场分布调制目标靶具有空间几何反射结构,用于打破反射光路的空间对称性。通过建立一个正向数学模型描述光调制目标靶的六自由度位姿与多路独立光功率信号之间的非线性函数关系,根据实测光功率值解算出六自由度位姿。本发明能够在保持系统结构简单、体积微小、抗干扰能力强且低成本的前提下,有效克服传统光纤传感器的测量盲区,实现对微尺度空间六自由度位移的同步、高精度和鲁棒性测量。
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