A high-precision equipment assembly precision universality detection system and method

Abstract

The application discloses a high-precision equipment assembly precision universality detection system and method, and relates to the field of high-precision manufacturing equipment detection. The system comprises a universal hardware detection module, a standardized software management module, an environmental parameter acquisition module, a closed-loop adjustment control module and a whole-process management and control module. The method comprises the following steps: self-calibration is performed through the universal hardware detection module and the standardized software management module; after the self-calibration is completed, component detection is performed on each module of the equipment to be detected through the universal hardware detection module; after the component detection is qualified, the universal hardware detection module and the standardized software management module cooperatively perform multi-module combination precision verification; when the result of the multi-module combination precision verification is unqualified, deviation analysis is performed through the closed-loop adjustment control module; the universal hardware detection module is driven to perform precision adjustment according to the result of the deviation analysis; after the precision adjustment is completed, re-inspection and adjustment are performed through the whole-process management and control module until the precision requirement is met.

Description

Technical Field

[0001] This application relates to the field of high-precision manufacturing equipment testing, and in particular to a universal testing system for the assembly accuracy of high-precision equipment. Background Technology

[0002] In the assembly process of high-precision equipment, testing the assembly accuracy of its optical and mechanical modules is a crucial step in ensuring the final performance of the equipment. Currently, the industry standard practice is to use specialized testing instruments to inspect the accuracy of each individual module separately. For example, an optical inspection instrument is used to verify the resolving power of the camera module, and mechanical measuring instruments such as a laser interferometer are used to verify the motion accuracy of the platform or robotic arm. These tests are typically performed under controlled laboratory conditions.

[0003] However, this traditional testing method faces fundamental challenges in practical applications. Because the aforementioned tests are performed on each component in isolation, it is difficult to effectively assess whether the coordinated accuracy of all modules meets requirements when assembled together. Furthermore, different types or models of high-precision equipment often require different specialized testing fixtures and instruments, as well as corresponding testing process settings, limiting its versatility and efficiency. Summary of the Invention

[0004] To address the aforementioned technical problems, this application provides a universal testing system and method for the assembly accuracy of high-precision equipment.

[0005] The technical solution provided in this application is described below:

[0006] The first aspect of this application provides a universal testing system for the assembly accuracy of high-precision equipment, including: a universal hardware testing module, a standardized software management module, an environmental parameter acquisition module, a closed-loop adjustment and control module, and a full-process management and control module; The standardized software management module is connected to the generalized hardware detection module, the environmental parameter acquisition module, and the closed-loop adjustment control module, respectively, and is used as the control center to schedule instructions and process data; The full-process control module is connected to the standardized software management module and the generalized hardware testing module, and is used to send standardized testing process instructions to the generalized hardware testing module, and control the generalized hardware testing module to perform self-calibration, component testing and combined testing according to the testing process instructions; The environmental parameter acquisition module is connected to the standardized software management module and is used to collect environmental data in real time when the generalized hardware detection module is working, and send the environmental data to the standardized software management module for binding and compensation processing. The closed-loop adjustment control module is connected to the standardized software management module and the generalized hardware detection module. It is used to receive the detection result data sent by the standardized software management module, generate adjustment instructions based on the detection result data, and then drive the generalized hardware detection module to perform precision adjustment operations based on the adjustment instructions. The generalized hardware testing module is connected to the standardized software management module and the full-process control module, and is used to perform testing operations under the control of the full-process control module, and send the raw testing data generated by the testing operations to the standardized software management module for processing.

[0007] Optionally, the generalized hardware detection module includes a camera detection unit; The camera detection unit includes: a photosensor, a voice coil motor, a backlight, and a film chart; The photosensitive sensor, the voice coil motor, the backlight, and the film chart are all encapsulated within a black box assembly. The backlight is positioned at a preset position relative to the film chart; The voice coil motor is connected to the photosensor. The photosensor is connected to the standardized software management module.

[0008] Optionally, the generalized hardware detection module further includes a mechanical module detection adaptation unit; the mechanical module detection adaptation unit includes: an adjustable reference stage, a laser displacement sensor, an XYR motion trajectory simulation component, and a visual positioning module; The laser displacement sensor is located on one side of the adjustable reference stage and is connected to the standardized software management module. The XYR motion trajectory simulation component is connected to the adjustable reference platform; The visual positioning module is positioned facing the XYR motion trajectory simulation component and is connected to the standardized software management module.

[0009] Optionally, the environmental parameter acquisition module includes: a temperature sensor and a vibration sensor; Both the temperature sensor and the vibration sensor are communicatively connected to the standardized software management module, and are used to send the collected environmental parameter data to the standardized software management module for binding and compensation processing.

[0010] The second aspect of this application provides a universal method for detecting the assembly accuracy of high-precision equipment, applicable to the system described in any one of the first aspects of this application, the method comprising: Self-calibration is performed using the generalized hardware testing module and the standardized software management module. After the self-calibration operation is completed, the component testing of each module of the device under test is performed by the generalized hardware testing module. After the components pass the test, the generalized hardware testing module and the standardized software management module work together to perform multi-module combination accuracy verification. When the result of the multi-module combination accuracy verification is unqualified, deviation analysis is performed through the closed-loop adjustment control module. The generalized hardware detection module is driven to adjust its accuracy based on the results of the deviation analysis. After the accuracy adjustment is completed, the entire process control module is used for re-inspection and adjustment until the accuracy requirements are met.

[0011] Optionally, the generalized hardware testing module includes a camera testing unit, which includes a photosensor, a voice coil motor, a backlight, and a film chart; the step of performing self-calibration through the generalized hardware testing module and the standardized software management module includes: The camera detection unit dynamically adjusts the object distance between the photosensitive sensor and the film chart using the voice coil motor, thereby performing resolution self-calibration. The photosensitive sensor acquires a chart image with uniform grayscale, and the standardized software management module calculates the optical center deviation to perform optical center self-calibration. The photosensitive sensor acquires a chart image of the dot distribution, and the standardized software management module calculates the distortion rate and performs distortion self-correction.

[0012] Optionally, the generalized hardware testing module includes a camera testing unit and a mechanical module testing adaptation unit. The mechanical module testing adaptation unit includes an adjustable reference platform, a laser displacement sensor, an XYR motion trajectory simulation component, and a visual positioning module. The step of performing component testing on each module of the device under test through the camera testing unit and the mechanical module testing adaptation unit after the self-calibration operation is completed includes: The camera detection unit performs optical precision testing on the camera module of the device under test, including resolution, optical center, and distortion rate. The platform module and arm module of the device under test are subjected to static accuracy detection of flatness and levelness by the laser displacement sensor in the mechanical module detection adapter unit; and / or the platform module and arm module of the device under test are subjected to dynamic accuracy detection of motion trajectory deviation by the visual positioning module in the mechanical module detection adapter unit.

[0013] Optionally, the step of having the generalized hardware testing module and the standardized software management module collaboratively perform multi-module combination accuracy verification after the component has passed the test includes: The environmental parameter acquisition module collects ambient temperature and vibration data in real time. The standardized software management module binds the ambient temperature and vibration data to the corresponding detection data using timestamps. Based on a preset environmental compensation algorithm, the detection results affected by environmental parameters are corrected.

[0014] Optionally, the step of performing deviation analysis through the closed-loop adjustment control module when the result of the multi-module combination accuracy verification is unqualified includes: The accuracy parameters calculated by the standardized software management module are compared with the preset qualified threshold to determine the type of deviation of the unqualified parameters; The logic processing unit of the closed-loop adjustment control module analyzes the difference between the actual measured value and the theoretical reference value of the non-conforming parameter to determine the direction of the deviation.

[0015] Optionally, the step of driving the generalized hardware detection module to perform accuracy adjustment based on the result of the deviation analysis includes: The closed-loop adjustment control module generates adjustment commands for controlling the device under test based on the deviation direction. The mechanical module detection adaptation unit of the generalized hardware detection module drives the adjustment mechanism of the device under test to make adjustments through the adjustment command.

[0016] As can be seen from the above technical solutions, this application has the following beneficial effects: This application uses the standardized software management module to uniformly process data from hardware testing and environmental data collection; the closed-loop adjustment control module performs deviation analysis based on the detected data and generates instructions; and the full-process control module drives the hardware module to perform adjustments and triggers the re-inspection process. This forms an integrated closed loop of perception-decision-execution-verification, enabling the testing system to not only quickly detect assembly deviations but also automatically correct them. This shortens the adjustment and verification cycle, which can take several hours under the traditional open-loop testing mode, to a highly integrated automated process, fundamentally improving assembly efficiency and reliability. Attached Figure Description

[0017] Figure 1 A schematic diagram illustrating an embodiment of a universal method for testing the assembly accuracy of high-precision equipment provided in this application; Figure 2 A schematic diagram illustrating an embodiment of self-calibration operation using a generalized hardware testing module and a standardized software management module, provided in this application; Figure 3 This is a schematic diagram of an embodiment provided in this application, in which, after the self-calibration operation is completed, the camera detection unit and the mechanical module detection adapter unit respectively perform component detection on each module of the device under test; Figure 4 This is a schematic diagram of an embodiment provided in this application, in which a generalized hardware testing module and a standardized software management module work together to perform multi-module combination accuracy verification after the component has passed the testing. Figure 5 This is a schematic diagram of an embodiment provided in this application that performs deviation analysis through a closed-loop adjustment control module when the result of the multi-module combination accuracy verification is unqualified; Figure 6 A schematic diagram illustrating an embodiment of this application that drives a generalized hardware detection module to adjust accuracy based on the results of deviation analysis; Figure 7 This is a schematic diagram of a universal testing system for the assembly accuracy of high-precision equipment provided in this application. Detailed Implementation

[0018] In this application, the terms "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal" and other terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only used to describe the relative positional relationship between the components or parts and do not specifically limit the specific installation orientation of each component or part.

[0019] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0020] Furthermore, the terms "installation," "setup," "equipped with," "connection," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0021] Furthermore, the structures, proportions, sizes, etc., drawn in the accompanying drawings of this application are only used to complement the content disclosed in the specification for those skilled in the art to understand and read, and are not intended to limit the conditions under which this application can be implemented. Therefore, they have no substantial technical significance. Any modification to the structure, change in the proportional relationship, or adjustment of the size, without affecting the effects and purposes that this application can produce, should still fall within the scope of the technical content disclosed in this application.

[0022] The technical solutions of this application will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0023] See Figure 7 The first aspect of this application provides a universal testing system for the assembly accuracy of high-precision equipment, including: a universal hardware testing module 701, a standardized software management module 702, an environmental parameter acquisition module 703, a closed-loop adjustment and control module 704, and a full-process management and control module 705. The standardized software management module 702 is connected to the generalized hardware detection module 701, the environmental parameter acquisition module 703, the closed-loop adjustment control module 704, and the full-process management module 705, respectively, and is used as the control center to schedule instructions and process data. The full-process control module 705 is connected to the standardized software management module 702 and the generalized hardware testing module 701. It is used to send standardized testing process instructions to the generalized hardware testing module 701 and control the generalized hardware testing module 701 to perform self-calibration, component testing and combination testing according to the testing process instructions. The environmental parameter acquisition module 703 is connected to the standardized software management module 702 and is used to collect environmental data in real time when the generalized hardware detection module 701 is working, and send the environmental data to the standardized software management module 702 for binding and compensation processing. The closed-loop adjustment control module 704 is connected to the standardized software management module 702 and the generalized hardware detection module 701. It is used to receive the detection result data sent by the standardized software management module 702, generate adjustment instructions based on the detection result data, and then drive the generalized hardware detection module 701 to perform precision adjustment operations based on the adjustment instructions. The generalized hardware testing module 701 is connected to the standardized software management module 702 and the full-process control module 705. It is used to perform testing operations under the control of the full-process control module 705 and send the raw testing data generated by the testing operations to the standardized software management module 702 for processing.

[0024] The standardized software management module 702 serves as the control center of the entire testing system. It establishes communication connections with the generalized hardware testing module 701, the environmental parameter acquisition module 703, the closed-loop adjustment control module 704, and the full-process management module 705, responsible for scheduling all testing commands and aggregating and processing data. It receives raw testing data from the generalized hardware testing module 701 via a high-speed industrial Ethernet. The full-process management module 705 is connected to the standardized software management module 702 and the generalized hardware testing module 701, executing preset standardized testing procedures. The full-process management module 705 incorporates complete process logic for system self-calibration, component testing, and combined testing. Upon receiving a start command, the full-process management module 705 sequentially issues specific testing step commands to the generalized hardware testing module 701. First, it triggers the resolution self-calibration step in the system self-calibration process. After its completion, it sequentially triggers the optical center self-calibration and distortion self-calibration. In the component testing phase, it performs testing on independent modules such as the camera, platform module, and arm module of the high-precision equipment. Throughout the process, the end-to-end control module 705 monitors the execution status of each step to ensure the continuity and standardization of the process. The environmental parameter acquisition module 703, connected to the standardized software management module 702, integrates high-precision temperature and vibration sensors. These sensors continuously acquire ambient temperature data (0-50℃) and vibration data (0-50Hz) at a sampling frequency of 1Hz from the working environment of the general-purpose hardware detection module 701. The raw environmental data is sent to the standardized software management module 702 in real time. The module uses timestamps to associate and bind the environmental data at each moment with the data generated by the ongoing detection task, and calls a built-in environmental compensation algorithm to correct the detection results, eliminating the impact of environmental fluctuations on accuracy measurement. The closed-loop adjustment control module 704 connects to the standardized software management module 702 and the general-purpose hardware detection module 701, forming an intelligent feedback loop. When the standardized software management module 702 determines that a certain test result is unqualified, it sends the test result data containing the specific deviation value to the closed-loop adjustment control module 704. The logic processing unit embedded in the closed-loop adjustment control module 704 analyzes this data to determine the type and direction of the deviation. Subsequently, it generates digital instructions with clear direction and quantity based on the analysis results and sends them to the corresponding actuator in the generalized hardware testing module 701 to drive the actuator to complete the accuracy adjustment. The generalized hardware testing module 701, as the execution terminal of the testing system, is connected to the standardized software management module 702 and the full-process control module 705. Under the instruction control of the full-process control module 705, it executes various testing operations.

[0025] In this embodiment, the collaboration of the generalized hardware testing module 701, the standardized software management module 702, the environmental parameter acquisition module 703, the closed-loop adjustment control module 704, and the full-process management module 705 significantly improves testing efficiency, accuracy, and reliability. The standardized testing process enforced by the full-process management module 705 ensures the standardization of operations from system self-calibration and component testing to combined verification, avoiding human error. The collaboration between the environmental parameter acquisition module 703 and the standardized software management module 702 collects and binds environmental data in real time, using compensation algorithms to eliminate the impact of environmental fluctuations such as temperature, humidity, and vibration on the testing results, ensuring that the measurement data truly reflects the equipment's performance under actual working conditions. The intelligent feedback mechanism of the closed-loop adjustment control module 704 automatically analyzes testing deviations and generates adjustment commands, driving the actuator to complete accuracy correction and triggering targeted re-inspection, forming a closed-loop control process. This compresses the traditional adjustment process, which relies on manual experience and takes several hours, into a fully automated, precise optimization cycle, improving the efficiency and reliability of assembly accuracy optimization. The standardized software management module 702 serves as the data hub, unifying the management of data throughout the entire process. It not only provides traceability for quality issues but also offers complete data support for analyzing the causal relationships of errors and optimizing processes, thereby improving the efficiency, accuracy, and intelligence of high-precision equipment assembly precision testing.

[0026] In an optional embodiment, the generalized hardware detection module 701 includes a camera detection unit; The camera detection unit includes: a light sensor, a voice coil motor, a backlight, and a film chart; The photosensitive sensor, voice coil motor, backlight, and film chart are all encapsulated within a black box assembly. The backlight is set at a preset position relative to the film chart; The voice coil motor is connected to the photosensor. The photosensitive sensor is connected to the standardized software management module 702.

[0027] Through its integrated camera detection unit and mechanical module detection adapter unit, it completes the data acquisition of optical parameters and mechanical precision during the assembly precision detection process of high-precision equipment.

[0028] The camera inspection unit, as the execution component for optical precision inspection, has its backlight positioned at a preset location relative to the film chart. The adjustable brightness range ensures uniform and stable illumination of the film chart, eliminating ambient light interference and providing a foundation for acquiring high-contrast, uniformly grayscale chart images. Once the backlight illuminates the film chart, the photosensor begins operation, acquiring the chart image captured by the camera under inspection and converting it into pixel-level grayscale data. To achieve optimal imaging, the voice coil motor dynamically adjusts the object distance between the photosensor and the camera under inspection. The voice coil motor drives the photosensor with micron-level precision, using a built-in resolution self-calibration algorithm to find and lock onto the object distance point that achieves optimal image resolution. All the aforementioned optical components—photosensor, voice coil motor, backlight, and film chart—are encapsulated within a sealed black box assembly, effectively isolating them from external vibrations and stray light interference. This provides a highly stable physical environment for optical inspection, ensuring the repeatability and accuracy of the inspection data. Finally, the raw image data collected by the photosensitive sensor is transmitted in real time to the standardized software management module 702 via a high-speed communication interface for subsequent image processing and algorithm analysis.

[0029] In this embodiment, by integrating the photosensor, voice coil motor, backlight, and film chart into a black box assembly, external vibrations and stray light interference are effectively isolated, creating a stable physical environment for optical detection and ensuring the repeatability and accuracy of the detection data. The preset position of the backlight relative to the film chart, combined with its adjustable brightness range, provides uniform and stable illumination, ensuring high contrast and grayscale uniformity in the acquired images. The connection between the voice coil motor and the photosensor enables micron-level dynamic adjustment of the object distance, automatically and quickly locking the optimal resolution imaging point. This replaces the traditional method of relying on repeated manual adjustments, significantly reducing operational difficulty and time costs, effectively avoiding human error, and ensuring the objectivity and consistency of the detection results. Finally, the direct connection between the photosensor and the standardized software management module 702 ensures efficient and real-time uploading of raw image data, providing a timely and accurate data source for rapid analysis and judgment at the software level.

[0030] In an optional embodiment, the generalized hardware detection module 701 further includes a mechanical module detection adapter unit; the mechanical module detection adapter unit includes: an adjustable reference stage, a laser displacement sensor, an XYR motion trajectory simulation component, and a visual positioning module; The laser displacement sensor is located on one side of the adjustable reference stage and is connected to the standardized software management module 702; The XYR motion trajectory simulation component is connected to the adjustable reference platform; The visual positioning module is positioned toward the XYR motion trajectory simulation component and is connected to the standardized software management module 702.

[0031] The working principle of the mechanical module testing adapter unit is as follows: its core function is to achieve static and dynamic accuracy testing of mechanical modules such as high-precision equipment platform modules and arm modules. The adjustable reference platform serves as the mounting base for the mechanical module, with a levelness adjustment accuracy of ±0.005mm / m. It quickly fixes the tested platform or arm module using magnetic attraction. During the static accuracy testing phase, a laser displacement sensor located on one side of the adjustable reference platform begins operation. This sensor has a measurement accuracy of ±1μm and can automatically scan the surface of the mechanical module fixed on the reference platform, collecting height data from 100-200 sampling points. This data is then directly uploaded to the standardized software management module 702 via a communication link, where the module calculates key static parameters such as flatness and levelness. When dynamic accuracy testing is required, the XYR motion trajectory simulation component begins operation. Mechanically connected to the adjustable reference platform, the XYR motion trajectory simulation component drives the reference platform and the fixed tested module, simulating the motion state during actual operation. The motion speed can be precisely controlled within the range of 0.1-100mm / s. The visual positioning module is activated, capturing and recording the position information of the module under test in real time during its movement at a high sampling frequency of 500Hz. The large amount of dynamic trajectory data collected by the visual positioning module is also sent to the standardized software management module 702 in real time. After receiving the static data from the laser displacement sensor and the dynamic data from the visual positioning module, the standardized software management module 702 calls its built-in mechanical precision algorithm for processing. For static data, the algorithm calculates parameters such as flatness and levelness with the reference surface. For dynamic data, it compares the recorded actual motion trajectory with the theoretical trajectory to calculate the positional deviation. Finally, based on these calculation results, it determines whether the mechanical module's precision is qualified.

[0032] In this embodiment, the integrated static and dynamic precision testing is achieved through the synergistic effect of an adjustable reference stage, a laser displacement sensor, an XYR motion trajectory simulation component, and a visual positioning module. The adjustable reference stage provides a high-precision universal installation reference for various mechanical modules. Combined with the laser displacement sensor, it performs micron-level measurements of static parameters such as flatness and levelness. Simultaneously, the XYR motion trajectory simulation component reproduces the actual working trajectory, and the visual positioning module captures dynamic motion deviations in real time using 500Hz high-frequency sampling. This eliminates operational errors caused by tooling changes in traditional testing. Furthermore, high-precision sensing and automatic control ensure the accuracy and repeatability of the test data, providing a reliable data foundation for the intelligent judgment and closed-loop adjustment of the upper-level software system, significantly improving the efficiency of mechanical precision testing.

[0033] In an optional embodiment, the environmental parameter acquisition module 703 includes: a temperature sensor and a vibration sensor; Both the temperature sensor and the vibration sensor are connected to the standardized software management module 702 for transmitting the collected environmental parameter data to the standardized software management module 702 for binding and compensation processing.

[0034] The working principle of the environmental parameter acquisition module 703 is as follows. The core function of this module is to capture physical disturbances in the detection environment in real time and quantify them into processable data to eliminate the influence of environmental factors on detection accuracy.

[0035] Temperature and vibration sensors serve as direct data acquisition points for the environment, operating continuously at a sampling frequency of 1Hz. The temperature sensor's measurement range covers 0 to 50℃, with an accuracy of ±0.1℃. The vibration sensor's measurement range covers 0 to 50Hz, with an accuracy of ±0.01g. These sensors are deployed near the working area of ​​the general-purpose hardware detection module 701, accurately reflecting the actual environmental conditions of the detection and tested equipment. The acquired raw environmental data is transmitted to the standardized software management module 702, which performs data binding and compensation operations upon receiving the data. The standardized software management module 702 uses its internal clock to assign the same timestamp to each environmental data sample and the ongoing detection action, strictly linking specific environmental conditions with specific detection results to form a unique "data-environment" correspondence. The standardized software management module 702 calls its built-in environmental compensation algorithm to correct the detection results in real time based on the bound environmental data. When a deviation between the ambient temperature and the standard temperature is detected, the module automatically calculates the deformation caused by the temperature change based on the thermal expansion coefficient of the mechanical structure material of the tested equipment and compensates for detection results such as flatness. Vibration data is then used to correct trajectory deviations in dynamic detection.

[0036] In this embodiment, high-precision sensors collect real-time temperature and vibration data of the detection environment, and a standardized software management module 702 precisely binds the corresponding detection operations using timestamps, thereby establishing a comprehensive correlation between the detection data and the environmental state. Based on the built-in environmental compensation algorithm, it can automatically correct the deviations caused by environmental fluctuations in the detection results, calibrating ideal measurement values ​​to the true performance indicators under actual working conditions. This effectively solves the data distortion problem caused by environmental differences in traditional detection and improves the reliability of the detection results.

[0037] Please see Figure 1 The second aspect of this application provides a universal method for detecting the assembly accuracy of high-precision equipment, applicable to the system described in any one of the first aspects of this application, the method comprising: S101. Self-calibration operation is performed through a generalized hardware testing module and a standardized software management module; The standardized software management module sends a self-calibration command to the end-to-end control module, triggering the voice coil motor in the camera detection unit to dynamically adjust the object distance between the photosensitive sensor and the film chart in 0.001 mm increments, while the photosensitive sensor continuously acquires chart images. The algorithm module calculates the spatial frequency response value corresponding to each object distance in real time, and uses a binary search method combined with an adaptive threshold climbing algorithm to lock the object distance point with optimal resolution. Subsequently, optical center self-calibration is performed. After the photosensitive sensor acquires a uniform grayscale chart image, the algorithm module uses an iterative adaptive threshold method to remove noisy pixels, calculates the optical center coordinates and compares them with the physical center. If the deviation exceeds 0.01 mm, the detection unit pose is automatically adjusted. Finally, distortion self-calibration is performed, calculating the distortion rate by analyzing the coordinate deviation of the dot distribution chart image to ensure that the system's optical parameters meet the detection requirements.

[0038] S102. After the self-calibration operation is completed, the component testing of each module of the device under test is performed through the generalized hardware testing module. The general-purpose hardware testing module can be modularly configured according to the adaptability of different functional modules of the device under test, and this invention does not impose specific limitations on this. In the embodiments of this invention, the general-purpose hardware testing module may include a camera testing unit and / or a mechanical module testing adapter unit, wherein the camera testing unit further includes a photosensor, a voice coil motor, a backlight, and a film chart; the mechanical module testing adapter unit further includes an adjustable reference platform, a laser displacement sensor, an XYR motion trajectory simulation component, and a vision positioning module. Taking a semiconductor wafer inspection device as an example, the industrial camera module is first tested: the voice coil motor adjusts the photosensor to the optimal object distance, and after acquiring a 9° oblique black rectangle chart image, the algorithm module uses a Gaussian filtering-enhanced Sobel edge algorithm to extract the edge contour, and calculates the resolution SFR value by fitting a straight line using the least squares method; at the same time, optical center deviation and distortion rate are detected. Then the platform module and the arm module are tested: the laser displacement sensor scans 100 sampling points on the module surface to calculate the flatness, the XYR motion trajectory simulation component drives the platform to move at a speed of 10 mm / s, and the vision positioning module captures the motion trajectory deviation at a sampling frequency of 500 Hz. All detection data is uploaded in real time to the standardized software management module and stored in conjunction with the environmental parameters recorded by the temperature sensor (25.3℃) and the vibration sensor (0.02g).

[0039] S103. After the component passes the test, the generalized hardware testing module and the standardized software management module work together to perform multi-module combination accuracy verification. Multi-module combination accuracy verification is performed, taking the platform and upper camera combination verification as an example: A uniform grayscale chart is fixed on the platform surface, and the platform is controlled to move directly below the camera. After the upper camera acquires an image, the algorithm module calculates the optical center coordinates P1; the reference coordinates P2 of the camera during the component detection stage are retrieved, and the perpendicularity deviation of the line connecting the two points is calculated. If the deviation exceeds 0.005 mm, the combination accuracy is deemed unqualified. At this time, the system synchronously records environmental parameters to provide context for subsequent analysis.

[0040] S104. When the result of the multi-module combination accuracy verification is unqualified, deviation analysis is performed through the closed-loop adjustment control module. After receiving the test result data sent by the standardized software management module through the closed-loop adjustment control module, the deviation type is first determined to be optical axis-plane perpendicularity deviation. Then, the coordinate data (ΔX=+0.005mm, ΔY=-0.006mm) is analyzed to determine the correction scheme that requires adjustment of 0.005 mm in the negative X-axis direction and 0.006 mm in the positive Y-axis direction.

[0041] S105. Based on the results of the deviation analysis, drive the generalized hardware detection module to adjust the accuracy. Based on the deviation analysis results, the driving precision adjustment is performed: the closed-loop adjustment control module sends adjustment commands to the platform leveling motor via an RS485 interface, and the motor performs fine-tuning operations with a resolution of 0.001 mm. During the adjustment process, vibration sensors monitor mechanical vibration in real time to ensure the stability of the adjustment action.

[0042] S106. After the accuracy adjustment is completed, a re-inspection and adjustment are carried out through the full-process control module until the accuracy requirements are met.

[0043] After adjustments are completed, the end-to-end control module initiates a targeted re-inspection: only the verticality parameters of the platform and camera combination are re-verified, not the entire process is inspected. If the re-inspection result deviation decreases to 0.003 mm (qualified), the process terminates; if the deviation still exceeds the limit, the adjustment cycle of steps S104-S105 is repeated until the accuracy meets the standard or the upper limit of 3 adjustments is reached. All test data, environmental parameters, and adjustment records are linked and indexed through the backend data module to form a complete quality traceability chain.

[0044] In this embodiment, a self-verifying and self-optimizing intelligent testing system is constructed by organically integrating a series of steps, including self-calibration, component testing, assembly verification, deviation analysis, closed-loop adjustment, and re-inspection, into a coherent and standardized automated process. The self-calibration step of the testing system establishes a benchmark for all subsequent testing stages, eliminating errors introduced by the testing system itself and ensuring the accuracy and reliability of the testing results. In the component testing and assembly verification stages, the logical sequence of the process mandates that the inter-module collaborative accuracy verification can only be performed after each module has passed independent testing, ensuring the final assembly quality of the equipment.

[0045] Please see Figure 2 In one optional embodiment, the generalized hardware detection module includes a camera detection unit, which includes a photosensor, a voice coil motor, a backlight, and a film chart. This application provides an embodiment of self-calibration operation using a generalized hardware detection module and a standardized software management module, which includes: S201. The distance between the photosensitive sensor and the film chart is dynamically adjusted by the voice coil motor of the camera detection unit to perform resolution self-calibration. S202. Acquire a uniform grayscale chart image through a photosensitive sensor, and calculate the optical center deviation through a standardized software management module to perform optical center self-calibration. S203. Acquire a chart image of the dot distribution using a photosensitive sensor, and calculate the distortion rate using a standardized software management module to perform distortion self-correction.

[0046] After the detection system starts, it first performs resolution self-calibration. The voice coil motor in the camera detection unit starts working, driving the photosensor to move within a preset object distance range. The movement process is controlled by a binary search method combined with an adaptive threshold climbing algorithm. The voice coil motor first scans rapidly with a large step size of 0.1 mm to locate a general range with a high spatial frequency response value. Then, the step size is reduced to 0.001 mm, and a climbing search is performed within this range until the optimal object distance point that maximizes the SFR value and has a fluctuation of less than 0.02 for three consecutive measurements is found and locked. Next, the detection system performs optical center self-calibration. At the locked optimal object distance, the photosensor acquires a full-white film chart image uniformly illuminated by a backlight. The algorithm module of the standardized software management module processes the acquired image data and filters out effective central region pixels through an iterative adaptive thresholding method. Then, the weighted average of the gray values ​​and coordinates of these effective pixels is used to obtain the optical center coordinates. The system compares these coordinates with the pre-calibrated physical center coordinates on the film chart. If the deviation is greater than 0.01 mm, the system determines that the optical center needs calibration and automatically records the deviation value for subsequent software compensation or to prompt for hardware fine-tuning. Finally, distortion self-calibration is performed. The photosensitive sensor acquires a film chart image of a dot array specifically for distortion detection. The algorithm module runs a distortion detection algorithm based on the ISO12233 standard, automatically identifying the center coordinates of all dots in the image and comparing them with the coordinates of ideal, distortion-free grid points. By calculating the deviation between the actual and ideal coordinates and normalizing them, a comprehensive distortion rate value is obtained. If the calculated normalized distortion rate exceeds 0.005, a calibration prompt is generated, indicating that there may be an anomaly in the optical path, requiring inspection or calibration compensation through software algorithms.

[0047] In this embodiment, a three-step collaborative process of resolution self-calibration, optical center self-calibration, and distortion self-calibration achieves self-calibration and optimization of the basic parameters of the detection system. The dynamic object distance adjustment mechanism driven by the voice coil motor, through a combination of the bisection method and an adaptive threshold ramping algorithm, can quickly and accurately lock the optimal imaging point for resolution, replacing the traditional method of repeated manual adjustments based on experience, significantly improving calibration efficiency and accuracy. In optical center self-calibration, center positioning and deviation compensation based on a weighted algorithm effectively eliminate systematic deviations caused by installation errors or optical path offsets, ensuring the accuracy of the detection benchmark. Distortion self-calibration, through a standardized algorithm for quantitative evaluation of optical distortion, provides a reliable geometric benchmark for subsequent high-precision detection. The three-step self-calibration process ensures the stability and reliability of the detection system's own state, reduces reliance on professional personnel skills through fully automated operation, and avoids random errors introduced by human intervention.

[0048] Please see Figure 3In one optional embodiment, the generalized hardware detection module includes a camera detection unit and a mechanical module detection adapter unit. The mechanical module detection adapter unit includes an adjustable reference platform, a laser displacement sensor, an XYR motion trajectory simulation component, and a visual positioning module. This application provides an embodiment in which, after self-calibration, component detection is performed on each module of the device under test through the camera detection unit and the mechanical module detection adapter unit, respectively. This embodiment includes: S301. The camera module of the device under test is subjected to optical precision testing of resolution, optical center and distortion rate through the camera detection unit. S302. Static accuracy detection of flatness and levelness of the platform module and arm module of the device under test is performed by using the laser displacement sensor in the mechanical module detection adapter unit; and / or dynamic accuracy detection of motion trajectory deviation of the platform module and arm module of the device under test is performed by using the visual positioning module in the mechanical module detection adapter unit.

[0049] Firstly, optical accuracy detection is performed: the camera module of the device under test is fixed on the detection tooling, and its optical lens is aligned with the self-calibrated film chart in the camera detection unit. The voice coil motor of the camera detection unit adjusts the photosensitive sensor to the optimal object distance according to preset parameters, and then triggers the camera under test to capture an image of the film chart. The image acquisition module of the standardized software management module captures the image synchronously, and the algorithm module performs resolution calculation. Specifically, the edge of the 9° oblique black rectangular area is extracted, the edge spread function is obtained through the Sobel operator enhanced by Gaussian filtering, and then its spatial frequency response value is calculated. If the SFR value is not less than 0.5, the resolution is determined to be qualified. The algorithm module calculates the optical center coordinates based on the uniform gray-scale chart image, screens the effective pixel area through the iterative adaptive threshold method, and then obtains the gray-weighted center point. The deviation between the gray-weighted center point and the physical center needs to be controlled within 0.02 mm. The image of the dot-distributed chart is used for distortion rate calculation. The ISO12233 algorithm is used to compare the actual dot coordinates with the ideal grid, and the normalized distortion rate needs to be ≤ 0.01 to be qualified. Then the static accuracy detection of the mechanical module is carried out: the platform module is installed on the adjustable reference table of the mechanical module detection adaptation unit, and quickly fixed by the magnetic suction device. The laser displacement sensor performs matrix scanning on the platform surface at a sampling frequency of 100 points per second, obtains height data of no less than 100 sampling points, and transmits the data to the standardized software management module in real time. The algorithm module first eliminates outliers caused by surface defects, then calculates the maximum and minimum height difference of all effective points. If the flatness converted from this difference does not exceed 0.01 mm / m, it is determined to be qualified. For levelness detection, the laser displacement sensor measures the relative height difference of the platform surface relative to the reference surface of the reference table, and the deviation needs to be ≤ 0.005 mm / m. Finally, dynamic accuracy detection is performed: the XYR motion trajectory simulation component is activated to drive the fixed platform module to move uniformly along the X-axis at a speed of 10 mm / s. The visual positioning module continuously captures the high-precision marking points on the side wall of the platform at a sampling frequency of 500 Hz, and records the coordinates of its motion trajectory. The algorithm module performs least square fitting on the collected actual trajectory point set and the theoretical linear equation, and calculates the vertical deviation between each actual point and the theoretical trajectory. If the maximum deviation in the whole process is ≤ 0.005 mm, the dynamic accuracy is determined to be qualified. In this embodiment, the order and items of static accuracy detection and dynamic accuracy detection for the mechanical module are not limited.

[0050] In this embodiment, a comprehensive performance evaluation of high-precision equipment is achieved through multi-dimensional collaboration of optical precision testing, static precision testing, and dynamic precision testing. In the optical testing stage, based on a self-calibrated and optimized testing benchmark, and combined with standardized algorithms for automated measurement of resolution, optical center, and distortion rate, not only is the precise quantification of the camera module's imaging quality ensured, but external interference is also effectively eliminated through an environmental parameter binding mechanism. In the mechanical testing stage, a laser displacement sensor performs micron-level scanning of flatness and levelness, combined with stable installation conditions provided by an adjustable reference platform, ensuring high repeatability of static geometric precision testing. The visual positioning module's high-frequency sampling and algorithm fitting of motion trajectories achieves accurate capture of dynamic performance. The fully automated execution and data correlation traceability significantly reduce errors caused by manual operation, environmental fluctuations, and data disconnection in traditional testing, resulting in component testing results that are both highly accurate and highly reliable.

[0051] Please see Figure 4 In an optional embodiment, this application provides an example of a multi-module combined accuracy verification performed collaboratively by a generalized hardware testing module and a standardized software management module after the component has passed testing. This embodiment includes: S401. Real-time acquisition of ambient temperature and vibration data via an environmental parameter acquisition module; S402. The ambient temperature and vibration data are bound to the corresponding detection data by timestamp through a standardized software management module. S403. Based on a preset environmental compensation algorithm, the detection results affected by environmental parameters are corrected.

[0052] When performing combined accuracy verification, the environmental parameter acquisition module immediately begins operation. Temperature and vibration sensors continuously monitor the environmental conditions at a sampling frequency of 1 Hz. The temperature sensor records the ambient temperature with an accuracy of ±0.1 degrees Celsius, while the vibration sensor captures environmental vibration data with an accuracy of ±0.01g. These real-time acquired physical quantities are encapsulated into data packets and sent in real-time to the standardized software management module via the I²C bus. The standardized software management module performs data binding operations. Internally, it maintains a high-precision clock with timestamp accuracy down to the millisecond level. Whenever a set of environmental data is received, along with detection data uploaded by the general-purpose hardware detection module at the same time, the software module assigns identical timestamp tags to both types of data, establishing a data association basis. Finally, the detection results are corrected in real-time based on a preset environmental compensation algorithm. The standardized software management module calls the pre-set compensation model in its algorithm module. For example, for the flatness detection of a mechanical platform significantly affected by temperature, the algorithm automatically calculates the deformation caused by thermal expansion based on the difference between the bound temperature data and the standard reference temperature, combined with the thermodynamic properties of commonly used materials in the tested equipment. The compensation calculation is as follows: If the platform feature length is L millimeters, and the difference between the current temperature and the standard temperature is... Then the compensation amount mm. Then, subtract this compensation amount from the original flatness test result. This yields a corrected flatness value that more closely approximates the actual situation at standard temperatures. For dynamic detection results, the algorithm fine-tunes the data according to the amplitude of the bound vibration data, based on a preset vibration compensation coefficient. Through this series of binding and compensation operations, the final output of the combined accuracy verification result is data that has been corrected for environmental factors.

[0053] In this embodiment, the accuracy and reliability of test results under real-world conditions are improved through deep integration of environmental parameter binding and compensation mechanisms with the combined accuracy verification process. The environmental parameter acquisition module synchronously monitors key interference factors such as temperature and vibration at a fixed frequency, ensuring the real-time nature and integrity of environmental data. The standardized software management module binds environmental data with test data using millisecond-level timestamps, establishing a correspondence between test results and environmental states, thus avoiding the data-environment disconnect problem in traditional methods. The environmental compensation algorithm, built based on material properties and physical models, can dynamically correct test results, effectively offsetting errors introduced by environmental fluctuations. By transforming environmental factors from uncontrollable interference variables into quantifiable and compensable parameters, the distortion of test data caused by differences between laboratory and field environments in high-precision equipment is solved. The automated data binding and compensation process lowers the professional threshold for manually assessing environmental impact, ensuring the consistency and comparability of test results under different times and environments.

[0054] Please see Figure 5 In an optional embodiment, this application provides an embodiment for performing deviation analysis through a closed-loop adjustment control module when the result of the multi-module combined accuracy verification is unqualified. This embodiment includes: S501. Compare the accuracy parameters calculated by the standardized software management module with the preset qualified threshold to determine the deviation type of the unqualified parameters. Deviation types include: optical center deviation, flatness deviation, and motion trajectory deviation; S502. The logic processing unit of the closed-loop adjustment control module analyzes the difference between the actual measured value and the theoretical reference value of the non-conforming parameter to determine the direction of the deviation.

[0055] The closed-loop adjustment control module obtains the final accuracy parameters after environmental compensation from the standardized software management module. Then, it precisely compares the parameters with the qualified thresholds pre-stored in its database. Taking the verticality deviation as an example, the preset qualified threshold is ≤0.005 mm. Since 0.008 mm > 0.005 mm, this parameter is determined to be unqualified, and its deviation type is classified as optical center deviation according to the parameter attribute. Similarly, if the unqualified parameter is the flatness data of the platform surface, it is classified as flatness deviation; if the maximum deviation value of the arm movement trajectory exceeds the standard, it is classified as movement trajectory deviation. Next, in order to generate specific and executable adjustment instructions, the closed-loop adjustment control module activates its embedded logic processing unit to perform in-depth difference analysis on the unqualified parameter. It retrieves the original measurement data and theoretical benchmark values ​​related to the unqualified parameter. Continuing with the example of an optical axis verticality deviation of 0.008 mm, the logic processing unit analyzes its source data. This refers to the camera's optical center coordinates P1(X1,Y1) measured under combined detection conditions, and the camera's optical center reference coordinates P2(X2,Y2) measured during component detection. The coordinate difference is calculated... This allows for precise analysis of the direction and components of the deviation. Assuming the calculation yields... =+0.005 mm, = -0.006 mm. Therefore, the logic processing unit can determine the deviation direction as follows: 0.005 mm in the positive X-axis direction and 0.006 mm in the negative Y-axis direction.

[0056] In this embodiment, the precise transformation from detection results to adjustment strategies is achieved through the synergistic effect of threshold comparison and difference analysis. By automatically comparing the accuracy parameters calculated by the standardized software management module with the preset qualified threshold, non-compliant parameters can be quickly and objectively identified and their deviation types accurately classified. This avoids the experience dependence and subjective errors that may exist in traditional manual interpretation, significantly improving the efficiency and accuracy of problem identification. The logic processing unit of the closed-loop adjustment control module analyzes the numerical difference between the actual measured value and the theoretical benchmark value of the non-compliant parameter, transforming the abstract "non-compliant" state into an adjustment vector with a clear direction and magnitude.

[0057] Please see Figure 6 In an optional embodiment, this application provides an embodiment in which a generalized hardware detection module is driven to adjust accuracy based on the results of deviation analysis, the embodiment including: S601, The closed-loop adjustment control module generates adjustment commands for controlling the device under test based on the direction of the deviation; S602, the mechanical module testing adapter unit of the generalized hardware testing module adjusts the device under test by driving the adjustment mechanism through adjustment instructions.

[0058] Based on the conclusions drawn from the preceding deviation analysis, the closed-loop adjustment control module generates specific and executable control commands. These commands contain digital instructions specifying the target of the action, the adjustment direction, and the micrometer-level displacement. The commands explicitly instruct the platform leveling motor to be adjusted, its movement along the X-axis, and its movement along the Y-axis. The generation of these commands strictly adheres to the analysis results, ensuring that each displacement component directly corresponds to the previously calculated deviation vector. Subsequently, the adjustment command is sent to the mechanical module detection adapter unit of the general-purpose hardware detection module. This unit acts as a bridge for command translation and transmission. Upon receiving the command, its built-in IO control card converts the high-level digital commands into low-level pulse signals or analog voltage signals that can directly drive the adjustment mechanism of the device under test. Taking the platform leveling motor as an example, the control card converts the command "move 0.005 mm" into 50 pulse signals based on the motor's step angle. These pulse signals are transmitted to the motor driver via cable, ultimately driving the motor to precisely rotate the corresponding angle, thereby actuating the mechanical transmission mechanism and achieving micrometer-level precision posture adjustment of the platform in the specified direction. Throughout the adjustment process, the mechanical module detection and adaptation unit monitors the feedback signals from the adjustment mechanism to ensure that the instructions are executed accurately, and returns the completion status signal to the upper-level system. Through this precise conversion and execution from digital instructions to physical actions, automated and high-precision compensation for detected assembly deviations is achieved.

[0059] In this embodiment, seamless conversion and high-precision implementation from deviation analysis results to physical adjustment actions are achieved through the coordinated control of digital instruction generation and hardware execution units. The closed-loop adjustment control module automatically generates structured digital instructions based on the precise vector derived from deviation analysis. These instructions not only clearly define the adjustment object and action parameters but also ensure the reliability of instruction transmission through a standardized communication protocol, avoiding errors introduced by verbal communication or experience-based estimation in traditional manual adjustments. Subsequently, the mechanical module detection adapter unit of the generalized hardware detection module acts as the instruction execution hub, converting high-level digital instructions into low-level control signals that drive the adjustment mechanism of the device under test, and achieving precise micron-level displacement through analog voltage regulation.

Claims

1. A universal testing system for the assembly accuracy of high-precision equipment, characterized in that, include: The system includes a general-purpose hardware testing module, a standardized software management module, an environmental parameter acquisition module, a closed-loop adjustment and control module, and a full-process management and control module. The standardized software management module is connected to the generalized hardware detection module, the environmental parameter acquisition module, and the closed-loop adjustment control module, respectively, and is used as the control center to schedule instructions and process data; The full-process control module is connected to the standardized software management module and the generalized hardware testing module, and is used to send standardized testing process instructions to the generalized hardware testing module, and control the generalized hardware testing module to perform self-calibration, component testing and combined testing according to the testing process instructions; The environmental parameter acquisition module is connected to the standardized software management module and is used to collect environmental data in real time when the generalized hardware detection module is working, and send the environmental data to the standardized software management module for binding and compensation processing. The closed-loop adjustment control module is connected to the standardized software management module and the generalized hardware detection module. It is used to receive the detection result data sent by the standardized software management module, generate adjustment instructions based on the detection result data, and then drive the generalized hardware detection module to perform precision adjustment operations based on the adjustment instructions. The generalized hardware testing module is connected to the standardized software management module and the full-process control module, and is used to perform testing operations under the control of the full-process control module, and send the raw testing data generated by the testing operations to the standardized software management module for processing. The general-purpose hardware detection module includes a camera detection unit; The camera detection unit includes: a photosensor, a voice coil motor, a backlight, and a film chart; The photosensitive sensor, the voice coil motor, the backlight, and the film chart are all encapsulated within a black box assembly. The backlight is positioned at a preset position relative to the film chart; The voice coil motor is connected to the photosensor. The photosensor is connected to the standardized software management module; After the backlight illuminates the film chart, the photosensitive sensor acquires the chart image captured by the camera and converts it into pixel-level grayscale data; the voice coil motor drives the photosensitive sensor to move with micron-level precision, and finds and locks the optimal object distance between the photosensitive sensor and the film chart through a built-in resolution self-calibration algorithm. The general-purpose hardware detection module also includes a mechanical module detection adaptation unit; the mechanical module detection adaptation unit includes: an adjustable reference platform, a laser displacement sensor, an XYR motion trajectory simulation component, and a visual positioning module; The laser displacement sensor is located on one side of the adjustable reference stage and is connected to the standardized software management module. The XYR motion trajectory simulation component is connected to the adjustable reference platform; The visual positioning module is positioned toward the XYR motion trajectory simulation component and is connected to the standardized software management module. When the mechanical module detection adapter unit performs static accuracy detection, the laser displacement sensor automatically scans the surface of the mechanical module, collects preset sampling point height data, and uploads it directly to the standardized software management module through the communication link, whereby the standardized software management module calculates the static parameters.

2. The high-precision equipment assembly accuracy universal testing system according to claim 1, characterized in that, The environmental parameter acquisition module includes: a temperature sensor and a vibration sensor; Both the temperature sensor and the vibration sensor are communicatively connected to the standardized software management module, and are used to send the collected environmental parameter data to the standardized software management module for binding and compensation processing.

3. A universal method for detecting the assembly accuracy of high-precision equipment, applied to the system described in claim 1, characterized in that, The method includes: Self-calibration is performed using the generalized hardware testing module and the standardized software management module. After the self-calibration operation is completed, the optical module and mechanical module of the device under test are respectively tested for component accuracy through the camera detection unit and mechanical module detection adapter unit in the generalized hardware detection module. After the components pass the test, the generalized hardware testing module and the standardized software management module work together to perform multi-module combination accuracy verification. When the result of the multi-module combination accuracy verification is unqualified, deviation analysis is performed through the closed-loop adjustment control module. The generalized hardware detection module is driven to adjust its accuracy based on the results of the deviation analysis. After the accuracy adjustment is completed, the entire process control module is used for re-inspection and adjustment until the accuracy requirements are met.

4. The universal testing method for the assembly accuracy of high-precision equipment according to claim 3, characterized in that, The generalized hardware testing module includes a camera testing unit, which includes a photosensor, a voice coil motor, a backlight, and a film chart. The step of performing self-calibration through the generalized hardware testing module and the standardized software management module includes: The camera detection unit dynamically adjusts the object distance between the photosensitive sensor and the film chart using the voice coil motor, thereby performing resolution self-calibration. The photosensitive sensor acquires a chart image with uniform grayscale, and the standardized software management module calculates the optical center deviation to perform optical center self-calibration. The photosensitive sensor acquires a chart image of the dot distribution, and the standardized software management module calculates the distortion rate and performs distortion self-correction.

5. The universal testing method for the assembly accuracy of high-precision equipment according to claim 3, characterized in that, The mechanical module detection and adaptation unit includes an adjustable reference platform, a laser displacement sensor, an XYR motion trajectory simulation component, and a visual positioning module. After the self-calibration operation is completed, the steps of performing component testing on each module of the device under test through the camera detection unit and the mechanical module detection adapter unit respectively include: The camera detection unit performs optical precision testing on the camera module of the device under test, including resolution, optical center, and distortion rate. The platform module and arm module of the device under test are subjected to static accuracy detection of flatness and levelness using the laser displacement sensor; and / or the platform module and arm module of the device under test are subjected to dynamic accuracy detection of motion trajectory deviation using the visual positioning module in the mechanical module detection adapter unit.

6. The universal testing method for the assembly accuracy of high-precision equipment according to claim 3, characterized in that, The step of verifying the accuracy of a multi-module combination by the generalized hardware testing module and the standardized software management module in collaboration after the component has passed the test includes: The environmental parameter acquisition module collects ambient temperature and vibration data in real time. The standardized software management module binds the ambient temperature and vibration data to the corresponding detection data using timestamps. Based on a preset environmental compensation algorithm, the detection results affected by environmental parameters are corrected.

7. The universal testing method for the assembly accuracy of high-precision equipment according to claim 5, characterized in that, The step of performing deviation analysis through the closed-loop adjustment control module when the result of the multi-module combination accuracy verification is unqualified includes: The accuracy parameters calculated by the standardized software management module are compared with the preset qualified threshold to determine the type of deviation of the unqualified parameters; The logic processing unit of the closed-loop adjustment control module analyzes the difference between the actual measured value and the theoretical reference value of the non-conforming parameter to determine the direction of the deviation.

8. The universal testing method for the assembly accuracy of high-precision equipment according to claim 7, characterized in that, The step of driving the generalized hardware detection module to adjust its accuracy based on the results of the deviation analysis includes: The closed-loop adjustment control module generates adjustment commands for controlling the device under test based on the deviation direction. The mechanical module detection adaptation unit of the generalized hardware detection module drives the adjustment mechanism of the device under test to make adjustments through the adjustment command.

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