一种用于并行批处理机作业车间调度的智能调度系统
By using an intelligent scheduling system to screen processable batches and quantify the impact of yield, and dynamically optimizing start-up timing, the problem of balancing waiting benefits and timeout risks caused by non-steady incoming material flow in semiconductor manufacturing is solved, thereby improving equipment utilization and output efficiency.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- 武汉船舶职业技术学院
- Filing Date
- 2026-04-23
- Publication Date
- 2026-07-17
AI Technical Summary
In semiconductor manufacturing, existing technologies struggle to effectively balance the "waiting benefits" and "timeout risks" caused by non-steady incoming material flows, resulting in idle equipment or high-value batches being scrapped due to waiting.
An intelligent scheduling system is adopted. The initial time of the scheduling process and semiconductor batch information are obtained by the acquisition module. Combined with the loading analysis module to screen processable and scrapped batches, the timeliness analysis module to quantify the impact of yield, and the scheduling module to perform startup scheduling. The system comprehensively evaluates the net output evaluation value and delay gain index, and dynamically optimizes the startup timing.
It effectively avoids high-value batches being scrapped due to blind waiting, while also preventing premature startup that would cause equipment to be idle, thus improving the effective output and scheduling robustness of the parallel batch processor under non-steady-state material conditions.
Smart Images
Figure CN122085953B_ABST