光斑位置校准装置及其方法、带电粒子束系统

By using a spot position calibration device in a charged particle beam system, the positional relationship of the spot is identified by a microscopic reference structure and a detection module, and the charge adjustment device is driven to adjust the spot alignment. This solves the problem of spot position deviation, achieves rapid and accurate automatic calibration, and improves equipment efficiency and detection accuracy.

CN122091457BActive Publication Date: 2026-07-17WUXI GENXINYUE TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
WUXI GENXINYUE TECH CO LTD
Filing Date
2026-04-23
Publication Date
2026-07-17

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Abstract

本申请涉及一种光斑位置校准装置及其方法、带电粒子束系统。该光斑位置校准装置包括校准样品、探测模块和第一控制模块。校准样品设有一个或多个微观参考结构；微观参考结构的中心区域设有带电粒子束定位点；微观参考结构响应电荷调节装置所发射的激光光束的照射变化产生反馈光信号。探测模块用于接收反馈光信号，将反馈光信号转换为反馈电信号。第一控制模块连接电荷调节装置和探测模块，配置为：根据反馈电信号识别激光光束照射至校准样品上的光斑与微观参考结构之间的相对位置关系，并根据所述相对位置关系驱动电荷调节装置，调整激光光束照射至校准样品上的光斑与带电粒子束定位点进行对准。本申请用于自动校准电荷调节装置的激光光斑位置。
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Citation Information

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