An optical element dispensing and curing system and method based on double-target monitoring

Abstract

The application belongs to the technical field of high-power semiconductor laser array coupling, and specifically provides an optical element dispensing and curing system and method based on double-target monitoring, which comprises a multi-degree-of-freedom precision displacement platform, a visual detection unit, a dispensing system, a double-path photoelectric feedback module and a central control unit; the double-path photoelectric feedback module comprises a light splitting unit, a light power detection unit and a light spot imaging detection unit; the light splitting unit is used for splitting the laser beam into two paths, one of which is used for beam analysis to obtain the beam arrangement; the light power detection unit is used for receiving the other path of the light beam in the light splitting unit and feeding back the light power value in real time; the light spot imaging detection unit is used for receiving the reflected sampling light beam; and the central control unit integrates an industrial computer and a motion control card. The application designs a closed-loop hardware system comprising a light splitting prism, double detectors and a multi-degree-of-freedom platform to solve the problem of low multi-degree-of-freedom coupling efficiency in the prior art.

Description

Technical Field

[0001] This invention belongs to the field of high-power semiconductor laser array coupling technology, and relates to an optical element dispensing and curing system and method based on dual-target monitoring for array beam coupling. Background Technology

[0002] High-power semiconductor laser arrays (bars) typically consist of multiple linearly arranged light-emitting units. To achieve high-brightness fiber coupling, precise beam shaping must be performed using micro-optical elements such as fast-axis collimators (FACs) and slow-axis collimators (SACs). This process requires micrometer-level positioning accuracy (<1μm) and arcsecond-level angular accuracy.

[0003] Current automated packaging equipment generally uses "active alignment" technology, and its typical process is as follows: (a) Turn on the laser; (ii) Using a robotic arm to hold the lens and scan it in the optical path; (iii) Real-time feedback of energy value via optical power meter; (iv) Use gradient descent or simplex method to find the point of maximum power for solidification.

[0004] However, it has the following problems: 1) The "Smile effect" cannot be eliminated: pursuing only the peak power often results in a small residual rotation angle (Roll) around the optical axis in the FAC lens, causing the light spot to be curved in a "banana shape". This curved light spot will lead to a sharp increase in geometric loss during subsequent fiber coupling.

[0005] 2) The search is blind: it cannot distinguish between "power drop caused by defocus" and "power drop caused by tilt", resulting in repeated iterative oscillations and low alignment efficiency.

[0006] 3) Lack of quantitative evaluation standards: There is a lack of digital monitoring of the morphology of the light spot (centroid, ellipticity, uniformity), resulting in poor product consistency. Summary of the Invention

[0007] This invention aims to provide a dispensing and curing system and method for optical components based on dual-target monitoring for array beam coupling, in order to solve the problems of "power-topography mismatch" and local optima, difficulty in guaranteeing beam quality (BPP), and low multi-degree-of-freedom coupling efficiency in the micro-optical assembly (such as FAC / SAC lens coupling) of high-power semiconductor laser arrays (LDAs) in the prior art.

[0008] This invention provides an optical component dispensing and curing system based on dual-target monitoring, including a multi-degree-of-freedom precision displacement platform, a vision inspection unit, a dispensing system, a dual-path photoelectric feedback module, and a central control unit; The multi-degree-of-freedom precision displacement platform includes an installation platform and a six-axis manipulator set on the installation platform. The six-axis manipulator clamps the optical components to be installed and adjusted. The vision inspection unit is mounted on the mounting platform and is used to identify the contours of the laser chip and various optical components, so as to guide the six-axis robot and the dispensing system to perform pose adjustment and dispensing operations. The dispensing system is set on the mounting platform and is used to perform dispensing to solidify the optical components after the orientation adjustment is completed. The dual-path photoelectric feedback module includes a beam splitting unit, an optical power detection unit, and a spot imaging detection unit; The beam splitting unit includes a high-transmittance beam splitting prism disposed at the end of the optical path. The beam splitting unit is used to split the laser beam into two paths, one of which is used for beam analysis to obtain the beam arrangement. The optical power detection unit is used to receive another beam from the beam splitter and provide real-time feedback of its optical power value. ; The light spot imaging detection unit is used to receive the reflected sampling beam and acquire a two-dimensional intensity distribution image of the light spot in real time. The central control unit integrates an industrial computer and a motion control card, and has a built-in sensitivity matrix decoupling algorithm for receiving dual-channel feedback data and outputting control commands for a multi-degree-of-freedom precision displacement platform.

[0009] Furthermore, the six-axis manipulator has the ability to achieve... axis, shaft and 3D translation of axes and , and Six degrees of freedom adjustment function for three-dimensional rotation.

[0010] Furthermore, the linear motion resolution of the six-axis manipulator is better than 0.1 μm, and the angular motion resolution is better than 0.5 arcseconds.

[0011] Furthermore, the dispensing system includes a glue tank and a glue needle; The glue bucket and the glue needle are connected by a delivery pipe.

[0012] As a further aspect of the present invention, the present invention also provides a method for dispensing and curing optical components based on dual-target monitoring, comprising the following steps: S1. Assemble and start the optical component dispensing and curing system based on dual-target monitoring as described above; S2. Initialize the optical component dispensing and curing system based on dual-target monitoring and perform coarse alignment of the optical components, while simultaneously reading the optical power value. and form and position errors Optical power value Form and position errors are obtained based on data acquired by the optical power detection unit. The light-emitting unit is image acquired based on the light spot imaging detection unit, and the center point of the light spot is extracted and fitted through image processing. The current position of the optical element is micro-scanned, and a local sensitivity matrix is ​​established based on the micro-scanning results. ; S3, Based on optical power value and form and position errors Calculate the current state vector And determine whether the dispensing curing conditions are met; If the conditions are met, the dispensing and curing process will be executed. If the conditions are not met, the poses of each axis motor of the optical element dispensing and curing system based on dual-target monitoring will be adjusted and then returned to S2.

[0013] Furthermore, the specific method for coarse alignment of optical elements is as follows: ① Visual guidance: The visual inspection unit identifies the outline of the laser chip and the optical component to be installed and guides the six-axis robot to move the optical component to be installed and installed to a safe theoretical position in front of the laser chip. ② Beam Spot Search: The system activates the laser to the threshold current, controlling the optical element to be installed to perform a wide-range beam search. Axis scan and Axial raster scanning; ③ Read the data collected by the optical power detection unit to obtain the optical power. ; If optical power If the reading exceeds the preset coarse alignment threshold, the coarse alignment is considered successful. If no valid light signal is detected after the scan is completed, the scan range will be expanded to re-perform the spot search and the light power will be read again. and the power of light The readings are compared with the preset coarse alignment threshold until the optical power requirement is met. If the reading exceeds the preset coarse alignment threshold, coarse alignment is completed. If no effective light signal is detected after expanding the scanning range multiple times, the central control unit triggers an alarm to prompt manual inspection of whether there is mechanical deviation in the fixture. After the personnel check and adjust the position of the fixture, the process returns to step ②.

[0014] Furthermore, the specific method for performing micro-scanning on the current position of the optical element is as follows: At the current position after coarse alignment, control the six drive axes of the six-axis robot to move one step at a time. Synchronously record the resulting observation vector difference vector This enables a single micro-scan of the current position of the optical element.

[0015] Furthermore, the conditions for determining whether the dispensing curing is met are as follows: and , in, Expressed as optical power The preset target value; Expressed as geometrical error The preset target value.

[0016] Furthermore, when the dispensing curing conditions are not met, the specific method for adjusting the pose of each axis motor in the optical component dispensing curing system based on dual-target monitoring is as follows: Calculate the difference vector between the current observation and the target value. ; Based on difference vector Computing Jacobi inverse decoupling That is, the pose adjustment vector of the optical element to be installed in the six-degree-of-freedom space is obtained; Based on pose adjustment vector The poses of each axis motor in the optical component dispensing and curing system based on dual-target monitoring are adjusted.

[0017] Compared with the prior art, the present invention has the following beneficial effects: (1) The optical element dispensing and curing system based on dual target monitoring provided by the present invention not only proposes a dual feedback (optical power feedback of the optical power detection unit and beam feedback of the spot imaging detection unit) control method, but also designs a closed-loop hardware system including a beam splitter prism, dual detectors and a multi-degree-of-freedom platform to solve the problem of low multi-degree-of-freedom coupling efficiency in the prior art.

[0018] (2) The optical element dispensing and curing method provided by the present invention achieves decoupled control of optical power and spot shape (Smile value, collimation) and dual-objective collaborative optimization by constructing a "element pose-beam shape" sensitivity Jacobian matrix.

[0019] In addition to the objectives, features, and advantages described above, the present invention has other objectives, features, and advantages. The invention will now be described in further detail with reference to the figures. Attached Figure Description

[0020] The accompanying drawings, which form part of this application, are used to provide a further understanding of the invention. The illustrative embodiments of the invention and their descriptions are used to explain the invention and do not constitute an undue limitation of the invention. In the drawings: Figure 1 This is a connection diagram of an optical element dispensing and curing system based on dual-target monitoring in an embodiment of the present invention; Figure 2 This is a schematic flowchart of an optical element dispensing and curing method according to an embodiment of the present invention; Figure 3(a) is a schematic diagram of the beam arrangement after coupling using the traditional method with only optical power as feedback; Figure 3(b) is a schematic diagram of the beam arrangement after coupling using the dual-target feedback method. Detailed Implementation

[0021] To make the above-mentioned objects, features, and advantages of the present invention clearer and easier to understand, the specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. It should be noted that the accompanying drawings of the present invention are all in a simplified form and use non-precise proportions, and are only used to facilitate and clearly illustrate the implementation of the present invention.

[0022] Example 1: See Figure 1 As shown, the present invention provides an optical component dispensing and curing system based on dual-target monitoring, including a multi-degree-of-freedom precision displacement platform 5, a vision inspection unit 4, a dispensing system 3, a dual-path photoelectric feedback module, and a central control unit 9. The multi-degree-of-freedom precision displacement platform 5 includes a mounting platform and a six-axis manipulator mounted on the mounting platform. The six-axis manipulator grips the optical element 2 to be installed and adjusted (specifically, in this embodiment, the optical element 2 to be installed and adjusted is set as FAC / SAC); specifically, in this embodiment, the six-axis manipulator has the ability to realize... axis, shaft and 3D translation of axes and , and The six-degree-of-freedom (6-DOF) adjustment function for three-dimensional rotation, and the linear motion resolution of the six-axis manipulator is better than 0.1 μm, and the angular motion resolution is better than 0.5 arcseconds; The visual inspection unit 4 is mounted on the mounting platform and is used to identify the contours of the laser chip 1 and each optical element, so as to guide the six-axis robot and the dispensing system 3 to perform pose adjustment and dispensing operations. The dispensing system 3 is mounted on the mounting platform and is used to perform dispensing to solidify the optical element (such as a FAC lens) after the orientation adjustment is completed. The dual-path photoelectric feedback module includes a beam splitting unit 6, an optical power detection unit 7, and a beam spot imaging detection unit 8. The beam splitting unit 6 is located at the end of the laser's optical path via a high-transmission beam splitter. The beam splitting unit 6 is used to split the laser beam into two paths, one of which is used for beam analysis to obtain the beam arrangement. The optical power detection unit 7 is used to receive the other beam from the beam splitting unit 6 and provide real-time feedback of its optical power value. The light spot imaging detection unit 8 is configured as a detection device such as a high-resolution CCD / CMOS camera or a beam quality analyzer, used to receive the reflected sampling beam and acquire a two-dimensional intensity distribution image of the light spot in real time. The central control unit 9 integrates an industrial computer and a motion control card, and has a built-in sensitivity matrix decoupling algorithm for receiving dual-channel feedback data and outputting control commands for the multi-degree-of-freedom precision displacement platform 5.

[0023] Preferably, in this embodiment, the visual inspection unit 4 is preferably configured as an industrial camera. Specifically, the visual inspection unit 4 is mounted on a displacement platform.

[0024] Preferably, in this embodiment, the dispensing system 3 includes a glue tank and a glue needle; the glue tank and the glue needle are connected by a delivery pipe.

[0025] Example 2: See Figure 2 The present invention provides a method for dispensing and curing optical components, comprising the following steps: S1. Assemble and start the optical element dispensing and curing system based on dual-target monitoring as described in Example 1; S2. Apply adhesive and cure the optical components to be assembled and adjusted. The specific process is as follows: S2.1 Start the optical component dispensing and curing system based on dual target monitoring, initialize the optical component dispensing and curing system based on dual target monitoring and perform coarse alignment of the optical components: use a vision inspection unit to identify the contours of the laser chip and optical components, and guide the multi-degree-of-freedom precision displacement platform to send the optical components to be assembled into the designated area. The current position of the optical element is micro-scanned, and a local sensitivity matrix is ​​established based on the micro-scanning results. .

[0026] Preferably, the specific method for coarse alignment of optical elements is as follows: ① Visual guidance: The visual detection unit identifies the outline of the laser chip and the optical element to be installed (specifically, in this embodiment, the optical element to be installed is an FAC lens), and guides the six-axis robot to move the optical element to be installed to a safe theoretical position in front of the laser chip. ② Beam Spot Search: The system activates the laser to the threshold current, controlling the optical element to be installed to perform a wide-range beam search. Axis (optical axis) scanning and Fast-axis (fast-axis) raster scanning; ③ Read the data collected by the optical power detection unit to obtain the optical power. ; If optical power If the reading exceeds the preset coarse alignment threshold (specifically, in this embodiment, the preset coarse alignment threshold is set to 10% of the peak power), then the coarse alignment is determined to be successful. If no valid light signal is detected after the scan, the scanning range will be expanded (specifically, in this embodiment, the scanning range is expanded by doubling the scanning step size and increasing the range by 50%) to re-execute the spot search and re-read the optical power. and the power of light The readings are compared with the preset coarse alignment threshold until the optical power requirement is met. If the reading exceeds the preset coarse alignment threshold, coarse alignment is completed. If no effective light signal is detected after expanding the scanning range multiple times, the central control unit triggers an alarm to prompt manual inspection of whether there is mechanical deviation in the fixture. After the personnel check and adjust the position of the fixture, the process returns to step ②.

[0027] Preferably, the specific method for performing micro-scanning on the current position of the optical element is as follows: At the current position after coarse alignment, control the six drive axes of the six-axis robot to move one step at a time. (Specifically, in this embodiment, the step size) (Set to displacement 0.1 μm and angle 0.01°), and synchronously record the resulting observation vector. difference vector .

[0028] Further optimized, the difference vector The expression is as follows: ; in, It is expressed as the difference between the current optical power and the target optical power.

[0029] S2.2, Synchronous reading of optical power and form and position errors ; Optical power Data acquired based on optical power detection unit; Form and position errors The light-emitting unit is image acquired based on the light spot imaging detection unit, and the center point of the light spot is extracted and fitted through image processing.

[0030] Preferably, the form and position error The expression is as follows: ; Among them, form and position error This is represented as the fitting residual obtained by extracting the center point of the light spot through image processing. This represents the total number of light-emitting units. Represented as the ordinate of the center of the light spot of all light-emitting units, It is expressed as the arithmetic mean of the ordinates of the centers of the light spots of all emitting units. It can be represented as any single light-emitting unit.

[0031] S2.3, Based on optical power and form and position errors Calculate the current state vector ; Current state vector The expression is as follows: ; Wherein, the current state vector This represents the set of pose parameters of the optical element to be installed and adjusted in a six-degree-of-freedom space. Represented as the position coordinates of the optical element to be assembled in six degrees of freedom space. This is expressed as the horizontal displacement along the length of the laser bar (i.e., the slow axis direction). This is expressed as a vertical displacement perpendicular to the plane of the laser bar PN junction (i.e., the fast axis direction). It is expressed as axial displacement along the direction of beam propagation (i.e., the optical axis direction); Represented as the angular coordinates of the optical element to be assembled in six degrees of freedom space; Indicated as around The angle of rotation of the axis, i.e., the pitch angle. ; Indicated as around The angle of rotation of the axis, i.e., the yaw angle. ; Indicated as around The angle of rotation of the axis, i.e., the roll angle. ; It is represented as the transpose of a matrix.

[0032] S2.4 Judgment and Consolidation: If satisfied and Perform the dispensing and curing process; among which, Expressed as optical power The preset target value, Expressed as geometrical error The preset target value; If not satisfied and Then calculate the difference vector between the current observed value and the target value. ; and based on the difference vector Computing Jacobi inverse decoupling This yields the pose adjustment vector of the optical element to be installed (such as a fast-axis collimator in FAC) in six degrees of freedom; and uses the pose adjustment vector... To adjust the target, the poses of each axis motor in the optical component dispensing and curing system based on dual-target monitoring are adjusted, and the process returns to S2.1 to reread the optical power. and form and position errors A closed-loop control system for the dispensing and curing of optical components based on dual-target monitoring is formed.

[0033] Preferred, The setting rules are as follows: ; The setting rules are as follows: That is, the curvature of the line connecting the centers of the light spots is less than .

[0034] Preferred, difference vector The expression is as follows: ; in, Represents the observation vector The target value, Represents the observation vector The current value.

[0035] Preferred Jacobi inverse decoupling The expression is as follows: ; ; in, Represented as a 2×6 order sensitivity Jacobian matrix, Represented as the sensitivity Jacobian matrix middle Micro-motion of the axis affects optical power Influence weight, Represented as the sensitivity Jacobian matrix middle Micro-motion of the axis affects optical power Influence weight, Represented as the sensitivity Jacobian matrix middle Micro-motion of the axis affects optical power Influence weight, Represented as the sensitivity Jacobian matrix Middle winding The micro-motion of the axis rotation angle affects the optical power Influence weight, Represented as the sensitivity Jacobian matrix Middle winding The micro-motion of the axis rotation angle affects the optical power Influence weight, Represented as the sensitivity Jacobian matrix Middle winding The micro-motion of the axis rotation angle affects the optical power Influence weight, Represented as the sensitivity Jacobian matrix middle Micro-motion of shaft affects form and position errors Influence weight, Represented as the sensitivity Jacobian matrix middle Micro-motion of shaft affects form and position errors Influence weight, Represented as the sensitivity Jacobian matrix middle Micro-motion of shaft affects form and position errors Influence weight, Represented as the sensitivity Jacobian matrix Middle winding Micro-motion of shaft rotation angle affects form and position error Influence weight, Represented as the sensitivity Jacobian matrix Middle winding Micro-motion of shaft rotation angle affects form and position error Influence weight, Represented as the sensitivity Jacobian matrix Middle winding Micro-motion of shaft rotation angle affects form and position error Influence weight; It is represented as the generalized inverse matrix of the sensitivity matrix.

[0036] A further optimized 2×6 order sensitivity Jacobian matrix In actual calculations, for the th The number of degrees of freedom (specifically, in this embodiment, the number of degrees of freedom) (A single degree of freedom refers to any one of the six degrees of freedom in space), controlling the motor's movement by increasing the step size in a single operation. Measure the change in output optical power at this time. and changing shape and position error ,but The The column elements are: ; Measure all column elements of the six degrees of freedom space in sequence, that is, fill the 2×6 order sensitivity Jacobian matrix.

[0037] In this invention, the current form and position error is eliminated through calculation. Required pose adjustment vector This allows for the control of the motion of the optical element in six degrees of freedom, achieving deterministic single-step convergence.

[0038] Referring to Figures 3(a) and 3(b), compared to the beam arrangement after coupling using only optical power as feedback in the traditional method, this application eliminates invalid gaps and overlapping interference between array beams by precisely controlling the spatial arrangement of the beams, resulting in a regular final output beam shape and giving it the following advantages: 1) Experimental data show that, compared with traditional methods, optical power loss is reduced from 5% to 2%, and the beam divergence angle and beam uniformity are significantly improved; 2) Improve fiber coupling efficiency and stability: Regular beam arrangement reduces the "waste" of fiber numerical aperture (NA), allowing high-power lasers to be injected into thinner fibers more efficiently, and reducing the risk of local thermal damage to the fiber end face, thus improving fiber coupling efficiency and stability. 3) By adopting machine vision and algorithm-based automatic optimization, the randomness of human experience differences and single power feedback is eliminated, achieving a high degree of consistency between modules in large-scale production, thus giving it the characteristics of intelligence and high consistency. 4) This invention is particularly applicable to the manufacture of ultra-high power semiconductor lasers of kW level and above, solving the "short-board effect" in multi-beam combining and breaking through the high-power bottleneck.

[0039] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A method for dispensing and curing optical components based on dual-target monitoring, characterized in that, Includes the following steps: S1. Assemble and start the optical element dispensing and curing system based on dual-target monitoring; S2. Initialize the optical component dispensing and curing system based on dual-target monitoring and perform coarse alignment of the optical components, while simultaneously reading the optical power value. and form and position errors Optical power value Form and position errors are obtained based on data acquired by the optical power detection unit. The light-emitting unit is image acquired based on the light spot imaging detection unit, and the center point of the light spot is extracted and fitted through image processing. The current position of the optical element is micro-scanned, and a local sensitivity matrix is ​​established based on the micro-scanning results. ; S3, Based on optical power value and form and position errors Calculate the current state vector And determine whether the dispensing curing conditions are met; If the conditions are met, the dispensing and curing process will be executed. If not satisfied, the position and orientation of each axis motor of the optical element dispensing and curing system based on dual-target monitoring will be adjusted and then returned to S2; The conditions for determining whether the dispensing curing is met are as follows: and , in, Expressed as optical power The preset target value; Expressed as geometrical error The preset target value; The setting rules are as follows: ; The setting rules are as follows: That is, the curvature of the line connecting the centers of the light spots is less than ; The specific method for adjusting the pose of each axis motor in an optical component dispensing and curing system based on dual-target monitoring is as follows: Calculate the difference vector between the current observation and the target value. ; Based on difference vector Computing Jacobi inverse decoupling That is, the pose adjustment vector of the optical element to be installed and adjusted in the six-degree-of-freedom space is obtained; Based on pose adjustment vector Adjust the pose of each axis motor in the optical component dispensing and curing system based on dual-target monitoring; It includes a multi-degree-of-freedom precision displacement platform (5), a vision inspection unit (4), a dispensing system (3), a dual-path photoelectric feedback module, and a central control unit (9). The multi-degree-of-freedom precision displacement platform (5) includes an installation platform and a six-axis manipulator set on the installation platform. The six-axis manipulator clamps the optical element (2) to be installed and adjusted. The vision detection unit (4) is installed on the mounting platform and is used to identify the contours of the laser chip (1) and each optical element so as to guide the six-axis robot and the dispensing system to perform pose adjustment and dispensing operations. The dispensing system (3) is set on the mounting platform and is used to perform dispensing to solidify the optical element after the pose adjustment is completed; The dual-path photoelectric feedback module includes a beam splitting unit (6), an optical power detection unit (7), and a spot imaging detection unit (8). The beam splitting unit (6) includes a high-transmittance beam splitting prism disposed at the end of the optical path. The beam splitting unit (6) is used to split the laser beam into two paths, one of which is used for beam analysis to obtain the beam arrangement. The optical power detection unit (7) is used to receive another beam from the beam splitting unit (6) and provide real-time feedback of its optical power value. ; The light spot imaging detection unit (8) is used to receive the reflected sampling beam and acquire a two-dimensional intensity distribution image of the light spot in real time. The central control unit (9) integrates an industrial computer and a motion control card, and has a built-in sensitivity matrix decoupling algorithm for receiving dual-channel feedback data and outputting control commands for the multi-degree-of-freedom precision displacement platform (5).

2. The optical component dispensing and curing method according to claim 1, characterized in that, The specific method for coarse alignment of optical elements is as follows: ① Visual guidance: The visual inspection unit identifies the outline of the laser chip and the optical component to be installed and guides the six-axis robot to move the optical component to be installed and installed to a safe theoretical position in front of the laser chip. ② Beam Spot Search: The system activates the laser to the threshold current, controlling the optical element to be installed to perform a wide-range beam search. Axis scan and Axial raster scanning; ③ Read the data collected by the optical power detection unit to obtain the optical power. ; If optical power If the reading exceeds the preset coarse alignment threshold, the coarse alignment is considered successful. If no valid light signal is detected after the scan is completed, the scan range will be expanded to re-perform the spot search and the light power will be read again. and the power of light The readings are compared with the preset coarse alignment threshold until the optical power requirement is met. Coarse alignment is completed when the reading exceeds the preset coarse alignment threshold. If no valid light signal is detected after repeatedly expanding the scanning range, the central control unit triggers an alarm to prompt manual inspection of the fixture for mechanical deviation. After the personnel have inspected and adjusted the position of the fixture, the process returns to step ②.

3. The optical component dispensing and curing method according to claim 1, characterized in that, The specific method for performing micro-scanning on the current position of the optical element is as follows: At the current position after coarse alignment, control the six drive axes of the six-axis robot to move one step at a time. Synchronously record the resulting observation vector difference vector This enables a single micro-scan of the current position of the optical element.

4. The optical element dispensing and curing method according to claim 1, characterized in that, When the dispensing curing conditions are not met, the specific method for adjusting the pose of each axis motor in the optical component dispensing curing system based on dual-target monitoring is as follows: Calculate the difference vector between the current observation and the target value. ; Based on difference vector Computing Jacobi inverse decoupling That is, the pose adjustment vector of the optical element to be installed and adjusted in the six-degree-of-freedom space is obtained; Based on pose adjustment vector The poses of each axis motor in the optical component dispensing and curing system based on dual-target monitoring are adjusted.

5. The optical element dispensing and curing method according to claim 4, characterized in that, The six-axis manipulator has the ability to achieve axis, shaft and 3D translation of axes and , and Six degrees of freedom adjustment function for three-dimensional rotation.

6. The optical element dispensing and curing method according to claim 5, characterized in that, The six-axis manipulator has a linear motion resolution better than 0.1 μm and an angular motion resolution better than 0.5 arcseconds.

7. The optical element dispensing and curing method according to claim 6, characterized in that, The dispensing system (3) includes a glue tank and a glue needle; The glue bucket and the glue needle are connected by a delivery pipe.

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