Tray adjustment device for semiconductor apparatus, mounting method, and semiconductor apparatus

Abstract

The application provides a tray adjusting device for a semiconductor device, a mounting method and the semiconductor device. The tray adjusting device comprises an adjusting platform fixedly connected above a driving mechanism; a first adjusting assembly and a second adjusting assembly, each comprising a fixed seat and an adjusting member, a first end of the fixed seat being fixedly connected with a housing, and a second end of the fixed seat being connected with the adjusting platform; and an adjusting shaft mechanism comprising a first shaft and a second shaft perpendicular to each other, the first shaft extending in a second direction, and the second shaft extending in a third direction, in the second direction, the first and second adjusting assemblies being located on two sides of the adjusting shaft mechanism respectively, and in the third direction, the first and second adjusting assemblies being located on the same side of the adjusting shaft mechanism; when the first and second adjusting assemblies jointly adjust the position of the adjusting platform in a first direction, the adjusting platform rotates around the second direction; and when the first or second adjusting assembly adjusts the position of the adjusting platform in the first direction, the adjusting platform rotates around the third direction.

Description

Technical Field

[0001] This application relates primarily to the field of semiconductor technology, and in particular to a tray adjustment device, a tray mounting method, and a semiconductor device for semiconductor equipment. Background Technology

[0002] In semiconductor epitaxy, ultrathin films need to be deposited on the wafer surface. This process places strict requirements on the balance of the tray supporting the wafer. The balance of the tray may be affected during initial equipment installation or component replacement, necessitating leveling. Currently, the commonly used leveling method involves rotating a long rod to adjust the tray's position. However, existing leveling mechanisms (including the aforementioned long rod) suffer from significant adjustment difficulties. Summary of the Invention

[0003] This application discloses a tray adjustment device, mounting method, and semiconductor device for semiconductor equipment. The tray adjustment device and semiconductor device with such a device can conveniently adjust the balance of the tray. The mounting method disclosed in this application enables the resultant force on the adjusted mechanism to be collinear with the central axis of the support shaft, thereby protecting the balance of the tray from changes in pressure difference inside and outside the reaction chamber.

[0004] To address the aforementioned technical problems, this application provides a tray adjustment device for a semiconductor device. The semiconductor device includes a housing, a support shaft, a reaction chamber disposed within the housing, and a drive mechanism disposed outside the housing. The tray is disposed within the reaction chamber, and the support shaft connects the tray and the drive mechanism. The tray adjustment device includes: an adjustment platform fixedly connected above the drive mechanism and located below the housing; a first adjustment component and a second adjustment component, each including a fixed base and an adjustment member, wherein a first end of the fixed base is fixedly connected to the housing, and a second end of the fixed base is connected to the adjustment platform, and the adjustment member is used to adjust the position of the adjustment platform along a first direction; and an adjustment shaft mechanism connected to the adjustment platform. The first end of the structure is fixedly connected to the housing. The adjustment shaft mechanism includes a first shaft and a second shaft that are perpendicular to each other. The first shaft extends along a second direction, and the second shaft extends along a third direction. In the second direction, the first adjustment component and the second adjustment component are located on opposite sides of the adjustment shaft mechanism, and in the third direction, the first adjustment component and the second adjustment component are located on the same side of the adjustment shaft mechanism. The tray adjustment device is configured such that when the first adjustment component and the second adjustment component jointly adjust the position of the adjustment platform along the first direction, the adjustment platform rotates about the second direction; when either the first adjustment component or the second adjustment component adjusts the position of the adjustment platform along the first direction, the adjustment platform rotates about the third direction.

[0005] In one embodiment of this application, viewed from above the tray, the first adjustment component and the second adjustment component are symmetrically arranged on both sides of the tray with respect to a diameter of the tray, and the adjustment shaft mechanism is located on the extension line of the diameter.

[0006] In one embodiment of this application, the adjusting member includes a pressure block, an elastic member, and a movable member. The pressure block is fixedly connected to the second end of the fixed base. A portion of the adjusting platform is disposed between the pressure block and the second end of the fixed base. The elastic member is disposed between the adjusting platform and the pressure block, and the movable member is disposed between the adjusting platform and the second end of the fixed base. Alternatively, the elastic member is disposed between the adjusting platform and the second end of the fixed base, and the movable member is disposed between the adjusting platform and the pressure block. The adjusting member is configured such that when the movable member moves along the first direction, the deformation of the elastic member changes and the position of the adjusting platform changes.

[0007] In one embodiment of this application, at least one of the opposing surfaces of the pressure block and the adjustment platform is provided with a first groove, and part of the elastic element is disposed in the first groove; or, at least one of the opposing surfaces of the second end of the fixing seat and the adjustment platform is provided with a second groove, and the elastic element is disposed in the second groove.

[0008] In one embodiment of this application, the adjusting shaft mechanism includes a shaft mounting base, the first shaft is rotatably mounted on the shaft mounting base, and the first ends of the first shaft and the second shaft are fixedly connected.

[0009] In one embodiment of this application, the adjusting shaft mechanism includes a shaft end cover, which is disposed on the first sidewall of the shaft mounting base and abuts against the first end of the first shaft.

[0010] In one embodiment of this application, the second sidewall of the shaft mounting base is provided with a blind hole, and the second end of the first shaft abuts against the bottom of the blind hole, wherein the second sidewall is disposed opposite to the first sidewall.

[0011] In one embodiment of this application, the adjusting shaft mechanism further includes a bearing seat fixing plate, a bearing mounting base, and a bearing. The bearing seat fixing plate is fixedly connected to the adjusting platform, the bearing mounting base is fixedly connected to the bearing seat fixing plate, the bearing is disposed in the bearing mounting base, and the second end of the second shaft passes through the bearing.

[0012] In one embodiment of this application, the adjusting shaft mechanism includes a fastener disposed at the second end of the second shaft.

[0013] To address the aforementioned technical problems, this application also proposes a semiconductor device, including the tray adjustment device described above.

[0014] To address the aforementioned technical problems, this application also proposes a pallet installation method applied to the pallet adjustment device described above, comprising: calculating the initial force applied to the adjustment platform by the first adjustment component and / or the second adjustment component, such that the torque value generated by the initial force on the adjustment platform is equal to the torque value generated by the gravity of the adjusted mechanism on the adjustment platform; calculating the initial positions of the moving part and the elastic part in the first adjustment component and / or the second adjustment component based on the initial force; and setting the adjustment platform according to the initial positions so that the resultant force on the adjusted mechanism is collinear with the central axis of the support shaft.

[0015] The pallet adjustment device of this application, by defining the positional relationship between the adjustment shaft mechanism, the first adjustment component, and the second adjustment component, enables the adjustment platform to rotate in a third direction around a second axis when either the first or second adjustment component adjusts the position of the adjustment platform along a first direction. When both the first and second adjustment components adjust the position of the adjustment platform along the first direction, the adjustment platform rotates in a second direction around the first axis. Since the adjustment platform is fixedly connected to the drive mechanism, changes in the position of the adjustment platform will cause changes in the positions of the drive mechanism, the support shaft, and the pallet, thereby adjusting the pallet's balance. The pallet adjustment device of this application is convenient for adjustment. When the pallet installation method of this application is applied to the pallet adjustment device of this application, it ensures that after the pallet is installed, the resultant force on the adjusted mechanism is collinear with the central axis of the support shaft, thereby overcoming the influence of the vacuum force in the process cavity during the extension process on the pallet's balance. Attached Figure Description

[0016] The accompanying drawings are included to provide a further understanding of this application; they are incorporated into and constitute a part of this application. The drawings illustrate embodiments of this application and, together with this specification, serve to explain the principles of this application. In the drawings:

[0017] Figure 1 This is a schematic diagram of a semiconductor device including a tray adjustment device according to an embodiment of this application;

[0018] Figure 2 This is a simplified schematic diagram of a semiconductor device, including a tray adjustment device according to an embodiment of this application.

[0019] Figure 3 This is a three-dimensional structural schematic diagram of a tray adjustment device according to an embodiment of this application;

[0020] Figure 4 This is a schematic diagram of the structure of a tray adjustment device according to an embodiment of this application;

[0021] Figure 5 yes Figure 4 Enlarged schematic diagram of region A in the middle;

[0022] Figure 6 It is along Figure 5 A cross-sectional view obtained by BB line cutting;

[0023] Figure 7 This is a three-dimensional schematic diagram of the adjusting shaft mechanism in a tray adjusting device according to an embodiment of this application;

[0024] Figure 8 This is a cross-sectional schematic diagram of the adjusting shaft mechanism in a tray adjusting device according to an embodiment of this application;

[0025] Figure 9 This is a schematic diagram of the structure of a tray adjusting device according to an embodiment of this application;

[0026] Figure 10 This is a three-dimensional structural schematic diagram of an adjustment platform according to an embodiment of this application;

[0027] Figure 11 This is a top view schematic diagram including a tray adjustment device according to an embodiment of this application. Detailed Implementation

[0028] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are merely some examples or embodiments of this application. For those skilled in the art, these drawings can be applied to other similar scenarios without creative effort. Unless obvious from the context or otherwise specified, the same reference numerals in the drawings represent the same structures or operations.

[0029] As indicated in this application and claims, unless the context clearly indicates otherwise, the words "a," "an," "an," and / or "the" are not specifically singular and may include plural forms. Generally speaking, the terms "comprising" and "including" only indicate the inclusion of explicitly identified steps and elements, which do not constitute an exclusive list, and the method or apparatus may also include other steps or elements.

[0030] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps described in these embodiments do not limit the scope of this application. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following drawings denote similar items; therefore, once an item is defined in one drawing, it need not be further discussed in subsequent drawings.

[0031] In the description of this application, it should be understood that the orientation or positional relationship indicated by directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" is usually based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing this application and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this application; the directional terms "inner" and "outer" refer to the inner and outer contours relative to the outline of each component itself.

[0032] For ease of description, spatial relative terms such as "above," "on top of," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "on top of" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein will be interpreted accordingly.

[0033] Furthermore, it should be noted that the use of terms such as "first" and "second" to define components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, these terms have no special meaning and therefore should not be construed as limiting the scope of protection of this application. In addition, although the terminology used in this application is selected from commonly known and used terms, some terms mentioned in this application's specification may have been chosen by the applicant according to his or her judgment, and their detailed meanings are explained in the relevant sections of this description. Moreover, this application should be understood not only through the actual terms used, but also through the meaning implied by each term.

[0034] It should be understood that when a component is referred to as "on another component," "connected to another component," "coupled to another component," or "in contact with another component," it can be directly on, connected to, coupled to, or in contact with that other component, or there may be an inserting component. In contrast, when a component is referred to as "directly on another component," "directly connected to," "directly coupled to," or "directly in contact with" another component, there is no inserting component.

[0035] The tray adjustment device of this application can be used in any type of semiconductor manufacturing equipment that requires the use of a tray, including but not limited to semiconductor epitaxy equipment.

[0036] Figure 1 This is a schematic diagram of a semiconductor device, including a tray adjustment device according to an embodiment of this application. (Reference) Figure 1 As shown, the semiconductor device includes a housing 110, a support shaft 120, a reaction chamber 130 disposed within the housing 110, and a drive mechanism 140 disposed outside the housing 110. A tray 150 is disposed within the reaction chamber 130, and the support shaft 120 connects the tray 150 and the drive mechanism 140. It is understood that the support shaft 120 passes through the reaction chamber 130; therefore, the reaction chamber 130 has a hole through which the support shaft 120 passes and a corresponding sealing structure. In some embodiments, the sealing structure includes a bellows and a magnetic fluid sealing assembly. Both the bellows and the magnetic fluid sealing assembly are located above the drive mechanism 140. The upper end of the bellows can be directly or indirectly connected to the bottom of the reaction chamber 130, the lower end of the bellows is fixedly connected to the upper end of the magnetic fluid sealing assembly, and the lower end of the magnetic fluid sealing assembly is drively connected to the drive mechanism 140. The magnetic fluid sealing assembly provides a dynamic seal for the support shaft 120. The drive mechanism 140 is capable of generating rotational and lifting forces, thereby driving the support shaft 120 to move up and down along the Z direction and rotate about the Z-axis. Generally, the drive mechanism 140 includes a lifting mechanism and a rotating mechanism, which are used to provide lifting and rotation functions, respectively. The semiconductor device also includes an upper heating element 161 and a lower heating element 162 for heating the reaction chamber 130.

[0037] Figure 2 This is a simplified schematic diagram of a semiconductor device, including a tray adjustment device according to an embodiment of this application. Figure 2 and Figure 1 The perspectives differ and the simplification process varies slightly, as shown in the figure. Figure 2 Not shown in the middle Figure 1 The shell 110, reaction chamber 130, and tray 150, etc., are equivalent to Figure 1 The part of the structure located below the housing 110. Figure 3 This is a perspective structural schematic diagram of a tray adjustment device according to an embodiment of this application, which also shows a tray 150. (In conjunction with...) Figures 1 to 3 As shown, the tray adjustment device includes an adjustment platform 210, a first adjustment component 2201, a second adjustment component 2202, and an adjustment shaft mechanism 230. The adjustment platform 210 is fixedly connected above the drive mechanism 140 and located below the housing 110. Figure 1 As shown in the illustrated embodiment, the tray adjustment device is located entirely below the housing 110, that is, below the bottom surface of the housing 110.

[0038] In some embodiments, the adjustment platform 210 may be fixedly connected above the drive mechanism 140.

[0039] refer to Figure 2 As shown, in this embodiment, the semiconductor device includes a connector 240, fixedly connected between the adjustment platform 210 and the drive mechanism 140. According to this embodiment, the adjustment platform 210 and the drive mechanism 140 are fixedly connected via the connector 240. Thus, when the adjustment platform 210 is adjusted and moves, the connector 240 can drive the drive mechanism 140 to move, which in turn drives the support shaft 120 to move, and consequently the tray 150 to move, thereby adjusting the position and balance of the tray 150. In some embodiments, the connector 240 is a connecting plate with guide rails. The drive mechanism 140 can move up and down along the guide rails on the connector 240, thereby achieving the function of lifting and lowering the tray 150. During the lifting and lowering process of the drive mechanism 140, the positions of the connector 240 and the adjustment platform 210 remain fixed.

[0040] like Figure 3 As shown, the tray adjustment device includes a first adjustment component 2201 and a second adjustment component 2202. In this embodiment, the number of the first adjustment component 2201 and the second adjustment component 2202 is one. It should be noted that in Figure 3 The adjustment platform 210 is tilted from the perspective shown, but since the tilt angle is not large and the X-axis, Y-axis and Z-axis indicator lines in the XYZ three-dimensional coordinate system are too short to easily show the angle, for convenience, the state of the XYZ three-dimensional coordinate system shown in the figure is still the position before tilting.

[0041] Figure 4 This is a schematic diagram of the structure of a tray adjusting device according to an embodiment of this application. (Reference) Figure 4As shown, the first adjustment component 2201 and the second adjustment component 2202 have the same structure, so one of them will be used as an example for explanation. Both the first adjustment component 2201 and the second adjustment component 2202 include a fixed base 221 and an adjusting member 222. The first end 2211 of the fixed base 221 is directly or indirectly fixedly connected to the housing 110, and the second end 2212 of the fixed base 221 is connected to the adjustment platform 210. The adjusting member 222 is used to adjust the position of the adjustment platform 210 along a first direction. In this embodiment, the first direction is the Z direction, which is also the extension direction of the support shaft 120, and will be referred to as "first direction Z" below. The adjustment shaft mechanism 230 is connected to the adjustment platform 210. The first end 2301 of the adjustment shaft mechanism 230 is directly or indirectly fixedly connected to the housing 110. The adjustment shaft mechanism 230 includes a first shaft and a second shaft that are perpendicular to each other, wherein the first shaft extends along a second direction and the second shaft extends along a third direction. The second direction, namely the X direction, will be referred to as "second direction X" below; the third direction, namely the Y direction, will be referred to as "third direction Y" below. In the second direction X, the first adjusting component 2201 and the second adjusting component 2202 are located on opposite sides of the adjusting shaft mechanism 230, respectively. In the third direction Y, the first adjusting component 2201 and the second adjusting component 2202 are located on the same side of the adjusting shaft mechanism 230. Figure 3 As shown, in the X direction, the first adjustment component 2201 is located above the adjustment shaft mechanism 230 (here, above means above). Figure 3 Above the paper (i.e., at end T1 of the adjustment platform 210); the second adjustment component 2202 is located below the adjustment shaft mechanism 230 (here, below is...). Figure 3 (located below the paper), specifically at end T2 of the adjustment platform 210. In the Y direction, both the first adjustment component 2201 and the second adjustment component 2202 are located to the left of the adjustment shaft mechanism 230 (here, left side is...). Figure 3 (Located on the left side of the paper).

[0042] The tray adjustment device is configured such that when the first adjustment component 2201 and the second adjustment component 2202 jointly adjust the position of the adjustment platform 210 along the first direction Z, the adjustment platform 210 rotates about the first axis in the second direction X; when the first adjustment component 2201 or the second adjustment component 2202 adjusts the position of the adjustment platform 210 along the first direction Z, the adjustment platform 210 rotates about the second axis in the third direction Y.

[0043] By defining the positional relationship between the adjusting shaft mechanism 230 and the first adjusting component 2201 and the second adjusting component 2202 as follows: in the second direction X, the first adjusting component 2201 and the second adjusting component 2202 are located on opposite sides of the adjusting shaft mechanism 230; in the third direction Y, the first adjusting component 2201 and the second adjusting component 2202 are located on the same side of the adjusting shaft mechanism 230. This achieves the following: when the first adjusting component 2201 or the second adjusting component 2202 adjusts the position of the adjusting platform 210 along the first direction Z, the end of the adjusting platform 210 where the adjusting component 220 is located moves, thereby enabling the adjusting platform 210 to rotate around the third direction Y. This adjustment method is also referred to as "single-sided adjustment" below. When the first adjusting component 2201 and the second adjusting component 2202 jointly adjust the position of the adjusting platform 210 along the same direction of the first direction Z, the adjusting platform 210 can rotate around the second direction X. This adjustment method is also referred to as "double-sided synchronous adjustment" below. Since the adjustment platform 210 is fixedly connected to the drive mechanism 140, a change in the position of the adjustment platform 210 will cause a change in the position of the drive mechanism 140, the support shaft 120, and the tray 150, thereby adjusting the balance of the tray 150. It should be noted that in some cases, balance is also referred to as levelness.

[0044] This application does not limit the specific number of the first adjustment component 2201 and the second adjustment component 2202. When the number of the first adjustment component 2201 or the second adjustment component 2202 exceeds two, the positional relationship between the first adjustment component 2201, the second adjustment component 2202, and the adjustment shaft mechanism 230 satisfies the above-mentioned positional relationship limitation. For example, when there are two first adjustment components 2201 and two second adjustment components 2202, in the second direction X, two first adjustment components 2201 are located on one side (T1 end) of the adjustment shaft mechanism 230, and two second adjustment components 2202 are located on the other side (T2 end) of the adjustment shaft mechanism 230. At the same time, in the third direction Y, both the two first adjustment components 2201 and the two second adjustment components 2202 are located on the same side of the adjustment shaft mechanism 230. It should be noted that during unilateral adjustment, one or more first adjustment components 2201 or one or more second adjustment components 2202 are adjusted together. During bilateral synchronous adjustment, all of the first adjustment components 2201 and the second adjustment components 2202 are adjusted together.

[0045] The tray adjustment device of this application is easy to use. The first adjustment component 2201 or the second adjustment component 2202 can be adjusted separately, or the first adjustment component 2201 and the second adjustment component 2202 can be adjusted simultaneously to adjust the balance of the tray.

[0046] When adjusting the balance of the pallet using the pallet adjustment device, the balance of the pallet 150 can be observed while adjusting via the adjusting element 222 until the required balance is achieved. Specific observation methods can employ conventional techniques in the art, such as laser ranging, and this application does not limit this approach. The following further describes specific embodiments of the pallet adjustment device.

[0047] Figure 3 In the diagram, dashed line D represents a straight line containing a diameter of tray 150, and dashed line D' represents the projection of this straight line onto the adjustment platform 210. Viewed downwards from above on tray 150, in the second direction X, the first adjustment component 2201 and the second adjustment component 2202 are arranged on opposite sides of tray 150 about this diameter as an axis of symmetry. Furthermore, in some embodiments, the adjustment shaft mechanism 230 is located on the line of symmetry between the first adjustment component 2201 and the second adjustment component 2202, i.e., on the straight line represented by dashed line D'. This arrangement ensures that the first adjustment component 2201 and the second adjustment component 2202 are also symmetrical about the adjustment shaft mechanism 230. More specifically, the first adjustment component 2201 and the second adjustment component 2202 are symmetrical about the central axis of the second axis. Thus, when the first adjustment component 2201 and the second adjustment component 2202 are adjusted simultaneously, the forces on the adjustment platform 210 can be balanced, thereby allowing the adjustment platform 210 to move stably upwards or downwards, ensuring a stable adjustment process.

[0048] Figure 5 yes Figure 4 A magnified view of region A in the middle. (Reference) Figure 5 As shown, in some embodiments, the adjusting member 222 includes a pressure block 2221, an elastic member 2222, and a moving member 2223. The pressure block 2221 is fixedly connected to the second end 2212 of the fixed base 221. A receiving space exists between the pressure block 2221 and the second end 2212 of the fixed base 221, and the adjusting platform 210 is disposed within this receiving space. Figure 5 In the illustrated embodiment, the elastic element 2222 is disposed between the adjusting platform 210 and the pressure block 2221. The movable element 2223 is disposed between the adjusting platform 210 and the second end 2212 of the fixed base 221. The adjusting element 222 is configured such that when the movable element 2223 moves along the first direction Z, the deformation amount of the elastic element 2222 (corresponding to the compression state hereinafter) changes and the position of the adjusting platform 210 changes.

[0049] In this embodiment, the adjustment platform 210 is clamped between the pressure block 2221 and the second end 2212 by the elastic member 2222 and the movable member 2223. When the movable member 2223 moves upward, it can push the adjustment platform 210 upward and compress the elastic member 2222. When the movable member 2223 moves downward, the compression state of the elastic member 2222 changes, and the adjustment platform 210 moves downward. During the movement of the end of the adjustment platform 210, the adjustment platform 210 as a whole rotates in a second direction X or a third direction Y around the first axis of the adjustment shaft mechanism 230, thereby realizing the change of position of the adjustment platform 210.

[0050] exist Figure 5 In the illustrated embodiment, the elastic element 2222 is disposed between the upper surface of the adjusting platform 210 and the pressure block 2221, and the movable element 2223 is disposed below the adjusting platform 210 and abuts against the lower surface of the adjusting platform 210. In other embodiments not shown, the elastic element 2222 may be disposed between the lower surface of the adjusting platform 210 and the second end 2212 of the fixed base 221, and the movable element 2223 may be disposed above the adjusting platform 210 and abut against the upper surface of the adjusting platform 210. According to these embodiments, when the movable element moves upward, the compression state of the elastic element is changed, and the degree of compression decreases, causing the adjusting platform 210 to move upward; when the movable element moves downward, it can push the adjusting platform 210 downward and compress the elastic element.

[0051] In the illustrated embodiment, the pressure block 2221 is an independently configured structure, which is fixedly connected to the second end 2212 of the fixing base 221 by means of screws or other methods during installation. This design facilitates the placement of the elastic element 2222 between the pressure block 2221 and the adjusting platform 210, or between the second end 2212 and the adjusting platform 210, to form a compressed state. Then, the fixed connection between the pressure block 2221 and the second end 2212 positions the elastic element 2222 in a pre-designed position, and simultaneously positions the adjusting platform 210 in a pre-designed initial position.

[0052] In one embodiment, the elastic element 2222 is a spring.

[0053] In some embodiments, both the first adjustment component 2201 and the second adjustment component 2202 include a plurality of elastic elements 2222. For example, two elastic elements 2222 are arranged along the Y direction.

[0054] In one embodiment, the movable member 2223 is a bolt (or screw), and its second end 2212 has a threaded hole that mates with the bolt. After the movable member 2223 is screwed through the threaded hole, it abuts against the adjusting platform 210. When the bolt is rotated, the position of the adjusting platform 210 changes.

[0055] In one embodiment, the movable member 2223 also has a locking function. That is, after the movable member 2223 moves into place, it can lock its position, thereby fixing the adjusted position. This locking function can be implemented using conventional locking methods in the art. In some embodiments, the movable member 2223 is a locking screw. By rotating the locking screw, the position of the adjustment platform 210 can be adjusted along the first direction Z, and the position is automatically locked after it is in place.

[0056] In another embodiment, with Figure 5 In the illustrated embodiment, the second end 2212 has a clearance hole or clearance structure to form a clearance space, allowing the movable member 2223 to move freely up and down within this clearance space. It can also be used in conjunction with other locking structures, so that when the movable member 2223 moves to a suitable position, it is locked in that position by the other locking structures.

[0057] Figure 6 It is along Figure 5 A cross-sectional view obtained by cutting along the BB line. (Reference) Figure 6 As shown, in an embodiment where the elastic element 2222 is disposed between the upper surface of the adjusting platform 210 and the pressure block 2221, a first groove may be provided on the lower surface of the pressure block 2221 and / or the upper surface of the adjusting platform 210, and part of the elastic element 2222 is disposed in the first groove. These embodiments include three implementation methods: first, the first groove is provided only on the lower surface of the pressure block 2221; second, the first groove is provided only on the upper surface of the adjusting platform 210; and third, the first groove is provided on both the lower surface of the pressure block 2221 and the upper surface of the adjusting platform 210. Figure 6 The third method is shown: a first groove is provided on both the lower surface of the pressure block 2221 and the upper surface of the adjusting platform 210. The upper end of the elastic member 2222 abuts against the bottom of the first groove in the pressure block 2221, and the lower end abuts against the bottom of the first groove on the upper surface of the adjusting platform 210. According to these embodiments, a portion of the elastic member 2222 can be embedded in the first groove, which serves to limit and position the elastic member 2222, enabling it to work more stably. In some embodiments, the upper end of the elastic member 2222 is fixedly connected to the bottom of the first groove in the pressure block 2221, and / or, the lower end of the elastic member 2222 is fixedly connected to the bottom of the first groove on the upper surface of the adjusting platform 210.

[0058] In an embodiment where the elastic element is disposed between the lower surface of the adjustment platform 210 and the second end 2212 of the fixing seat 221, the upper surface of the second end 2212 of the fixing seat 221 and / or the lower surface of the adjustment platform 210 are provided with a second groove, and the elastic element is disposed in the second groove.

[0059] like Figure 6As shown, the lower end of the movable part 2223 may have an internal hexagonal socket for use with an internal hexagonal wrench. During installation, the movable part 2223 is rotated manually or with a tool. For example, rotating the movable part 2223 clockwise moves it upwards, thereby pushing the adjustment platform 210 upwards, further compressing the elastic element 2222 within the groove. Rotating the movable part 2223 counterclockwise moves it downwards, causing the adjustment platform 210 to move downwards under the influence of gravity and elastic force, and extending the elastic element 2222 as the adjustment platform 210 moves downwards.

[0060] According to the above embodiments, the adjustment member 222, which includes a pressure block 2221, an elastic member 2222, and a moving member 2223, can achieve micro-adjustment of the adjustment platform with high adjustment accuracy.

[0061] Figure 7 This is a perspective view of the adjusting shaft mechanism in a tray adjusting device according to an embodiment of this application. Figure 8 This is a cross-sectional schematic diagram of the adjusting shaft mechanism in a tray adjusting device according to an embodiment of this application. (In conjunction with...) Figure 7 and Figure 8 As shown, in some embodiments, the adjusting shaft mechanism 230 includes a shaft mounting base 231, on which a first shaft 810 is rotatably mounted. The first ends 821 of the first shaft 810 and the second shaft 820 are fixedly connected by shoulder screws 232. The first shaft 810 extends along a second direction X, and the second shaft 820 extends along a third direction Y.

[0062] In some embodiments, the shaft mounting base 231 is provided with a mounting hole for the first shaft 810. Specifically, the shaft mounting base 231 may include a first sidewall 2311 and a second sidewall 2312 disposed opposite to each other, and the mounting hole includes a through hole penetrating the first sidewall 2311 and a blind hole disposed on the second sidewall 2312. The mounting hole extends along a second direction X.

[0063] Furthermore, the adjusting shaft mechanism 230 also includes a shaft end cap 233, which is disposed on the first sidewall 2311 of the shaft mounting base 231 and abuts against the first end of the first shaft 810. The second end of the first shaft 810 is located in the aforementioned blind hole and abuts against the bottom of the blind hole. By providing the shaft end cap 233, the position of the first shaft 810 in the second direction X can be limited, thereby preventing the first shaft 810 from moving along the second direction X.

[0064] Furthermore, in some embodiments, the shaft end cap 233 has a protrusion that extends into a through hole in the first sidewall 2311 of the shaft mounting base 231 for housing the first shaft 810 and abuts against the first end of the first shaft 810. Simultaneously, the second end of the first shaft 810 abuts against the bottom of a blind hole on the second sidewall 2312. By having the protrusion of the shaft end cap 233 extend into the through hole and abut against the first end of the first shaft 810, the overall machining precision of the shaft end cap 233 is reduced; only the contact surface of the protrusion abutting against the first end of the first shaft 810 needs to be precision machined.

[0065] By providing a blind hole, the second end of the first shaft 810 is accommodated, and the bottom of the blind hole serves to limit the movement of the second end of the first shaft 810, eliminating the need for a separate structure similar to the shaft end cap 233. The diameter of the blind hole should be larger than the diameter of the second end of the first shaft 810 to allow the first shaft 810 to rotate within the blind hole.

[0066] Furthermore, the second shaft 820 in the adjusting shaft mechanism 230 is rotatably connected to the adjusting platform 210 about a third direction Y. More specifically, for example, please refer to the illustrated embodiment: the adjusting shaft mechanism 230 includes a bearing housing fixing plate 234, a bearing mounting base 235, and a bearing 236. The bearing housing fixing plate 234 is fixedly connected to the adjusting platform 210. (Reference) Figure 8 The lower surface of the bearing housing fixing plate 234 can be fixedly connected to the upper surface of the adjusting platform 210. With this configuration, the entire adjusting shaft mechanism 230 is fixedly connected to the adjusting platform 210 only through the bearing housing fixing plate 234. (Reference) Figure 8 The first end 2301 of the adjusting shaft mechanism 230 is the top end of the shaft mounting base 231. This first end 2301 is fixedly connected to the housing 110. The position of the housing 110 is fixed, so the shaft mounting base 231 remains stationary. There is a gap between the shaft mounting base 231 and the bearing housing fixing plate 234, and the two are connected by a first shaft 810 and a second shaft 820. During adjustment, the up-and-down movement of the adjusting platform 210 drives the bearing housing fixing plate 234 to move. By setting the gap, the bearing housing fixing plate 234 is independent of the shaft mounting base 231, and the bearing housing fixing plate 234 can move independently.

[0067] The bearing mounting base 235 is fixedly connected to the bearing housing fixing plate 234. The bearing mounting base 235 is used to mount the bearing 236, therefore the interior of the bearing mounting base 235 has space for accommodating the bearing 236. The bearing 236 is disposed within the bearing mounting base 235. The second end 822 of the second shaft 820 passes through the bearing 236. It should be noted that the bearing 236 includes an inner ring, an outer ring, and rolling elements disposed between the inner and outer rings. The outer ring of the bearing 236 is fixedly connected to the bearing mounting base 235, and the inner ring of the bearing 236 is fixedly connected to the second shaft 820. The outer ring of the bearing 236 is rotatable. When adjusting the first adjusting component 2201 or the second adjusting component 2202, the movement of the adjusting platform 210 causes the bearing housing fixing plate 234 and the bearing mounting base 235 to move, thereby causing the outer ring of the bearing 236 to rotate around the second shaft 820.

[0068] refer to Figure 3 , Figure 7 and Figure 8 Assume that the adjusting member 222 in the second adjusting assembly 2202 located at end T2 adjusts upward or downward, causing end T2 of the adjusting platform 210 to move upward or downward. At this time, since the adjusting platform 210 is fixedly connected to the bearing housing fixing plate 234, the upward or downward force causes the bearing housing fixing plate 234 to move upward or downward. Since the point of application of this force is located on one side of the adjusting shaft mechanism 230, and one end of the second shaft 820 is fixed to the first shaft 810, which restricts multiple degrees of freedom of the second shaft 820, under this force, the adjusting platform 210, the bearing housing fixing plate 234, the bearing mounting seat 235, and the outer ring of the bearing 236 will rotate around the centerline of the second shaft 820, i.e., in the third direction Y.

[0069] When the adjusting members 222 in the first adjusting assembly 2201 and the second adjusting assembly 2202 are adjusted simultaneously, for example, the T2 end and the T1 end are simultaneously subjected to upward or downward forces. The resultant force from the two ends is transmitted to the second shaft 820 through the bearing seat fixing plate 234, causing the second end 822 of the second shaft 820 to move upward or downward. Since the first shaft 810 and the first end 821 of the second shaft 820 are fixedly connected, the upward or downward movement of the second end 822 of the second shaft 820 will drive the first shaft 810 to rotate, thereby realizing that the entire adjusting platform 210 rotates upward or downward around the second direction X extending from the first shaft 810.

[0070] In some embodiments, the first end 821 of the second shaft 820 is connected to the midpoint of the first shaft 810, so that when performing bilateral synchronous adjustment, the second shaft 820 can be subjected to balanced force and drive the first shaft 810 to rotate more stably.

[0071] In some embodiments, the adjusting shaft mechanism 230 further includes a fastener 237 disposed at the second end 822 of the second shaft 820 to fix the position of the second shaft 820 and prevent the second shaft 820 from moving upward in a third direction. Figure 8 As shown, a shim 238 can also be provided between the fastener 237 and the bearing 236. The shim 238 is used to prevent the fastener 237 and the bearing 236 from sliding at the contact surface and to enhance the locking degree of the fastener 237.

[0072] It should be noted that the first shaft 810 can rotate about the second direction X, that is, it can rotate about the second direction X that it extends from. However, the first end 821 of the second shaft 820 is fixedly connected to the first shaft 810 by a shoulder screw 232. Therefore, the second shaft 820 cannot rotate about the third direction that it extends from.

[0073] exist Figure 7 and Figure 8 In the illustrated embodiment, the first shaft 810 is rotatably mounted on the shaft mounting base 231. In other embodiments not shown, the first shaft 810 is fixed to the shaft mounting base 231, the first end of the second shaft 820 is rotatably sleeved on the first shaft 810, and the second end of the second shaft 820 is connected to... Figure 7 and Figure 8 The embodiments shown are the same. According to these embodiments, when the two adjusting members jointly adjust the position of the adjusting platform 210 along the first direction Z, the second end of the second shaft 820 moves in the first direction Z, while the first end of the second shaft 820 rotates around the first shaft 810, so that the adjusting platform 210 rotates around the second direction X; when either adjusting member adjusts the position of the adjusting platform 210 along the first direction Z, the movement of the adjusting platform 210 drives the bearing seat fixing plate 234 and the bearing mounting seat 235 to move, thereby driving the outer ring of the bearing 236 to rotate around the second shaft 820, so that the adjusting platform 210 rotates around the third direction Y.

[0074] It should be understood that, in addition to the two specific configurations of the first and second axes mentioned above, other specific implementations that can achieve "when two adjusting members jointly adjust the position of the adjusting platform along the first direction, the adjusting platform rotates around the second direction; when any one adjusting member adjusts the position of the adjusting platform along the first direction, the adjusting platform rotates around the third direction" should also be included within the scope of protection of this application.

[0075] Figure 9 This is a schematic diagram of the structure of a tray adjustment device including an embodiment of this application. Figure 10 This is a three-dimensional structural schematic diagram of an adjustment platform according to an embodiment of this application. (Reference) Figure 9 and Figure 10As shown, the adjustment platform 210 in this embodiment includes three flat plates: a top plate 1001, a middle plate 1002, and a bottom plate 1003. The first adjustment component 2201, the second adjustment component 2202, and the adjustment shaft mechanism 230 are directly mounted on the top plate 1001. For example... Figure 3 The upper surface of the adjustment platform 210 shown is the upper surface of the top plate 1001. The bottom plate 1003 is fixedly connected to the connector 240. The adjustment platform 210 also includes a first micrometer 1010 fixedly connected to the bottom plate 1003. The moving end 10101 of the first micrometer 1010 engages with the fixing member 10021 on the middle plate 1002. When the adjusting nut on the first micrometer 1010 is rotated, the moving end 10101 abuts against the fixing member 10021, pushing the bottom plate 1003 to move upward relative to the middle plate 1002 and the top plate 1001. The tray adjustment device also includes a second micrometer 1020 fixedly connected to the top plate 1001. The moving end 10201 of the second micrometer 1020 engages with the fixing member 10022 on the middle plate 1002. When the adjusting nut of the second micrometer 1020 is rotated, the moving end 10201 abuts against the fixing member 10022, pushing the middle plate 1002 and the bottom plate 1003 (a structure is provided between the middle plate 1002 and the bottom plate 1003 to prevent relative movement between the two in the second direction X) to move relative to the top plate 1001 in the second direction X. It can be understood that, in order to achieve movement in both directions, the three plates are internally equipped with corresponding tracks and sliders. Since the micrometer has both adjustment and measurement functions and a certain degree of accuracy, the position of the adjusting platform 210 on the horizontal plane can be precisely adjusted.

[0076] In some embodiments, the adjustment platform 210 may be specifically implemented as a slide table. This slide table can be a structure commonly used in the art, comprising three flat plates, capable of movement in at least one direction within a horizontal plane. When applied to this application, the slide table as a whole serves as the adjustment platform 210. When adjusted by the first adjustment component 2201 and the second adjustment component 2202, the slide table moves as a whole, and consequently drives the support shaft 120 and the tray 150 to move via the connector 240, thereby achieving leveling of the tray 150.

[0077] According to the above embodiments, the position of the pallet on the horizontal plane can be adjusted by the first micrometer 1010 and the second micrometer 1020, and the balance of the pallet can be adjusted by the pallet adjustment device. The adjustment process is simple and quick, and the adjustment accuracy is high.

[0078] It should be noted that, without conflicting with the technical solution itself, the fixed connection methods involved in this application can be either detachable fixed connection methods, such as screw connection, or non-detachable fixed connection methods, such as welding.

[0079] This application also proposes a pallet installation method, which is applied to the pallet adjusting device described above, including:

[0080] Calculate the initial force applied to the adjustment platform by the first adjustment component 2201 and / or the second adjustment component 2202, such that the torque value generated by the initial force on the adjustment platform is equal to the torque value generated by the gravity of the adjusted mechanism on the adjustment platform;

[0081] The initial positions of the moving parts and elastic parts in the first adjustment assembly 2201 and / or the second adjustment assembly 2202 are calculated based on the initial force.

[0082] The adjustment platform is set according to its initial position so that the resultant force on the adjusted mechanism is collinear with the central axis of the support shaft.

[0083] This tray mounting method can overcome the influence of vacuum force in the epitaxial process cavity on the tray balance.

[0084] Semiconductor epitaxial equipment is the core equipment used for "epitaxy growth" in semiconductor manufacturing. Its function is to precisely deposit atomic layers of specific semiconductor materials (such as silicon, gallium nitride, silicon carbide, etc.) onto the surface of a wafer substrate in a clean environment to form a single-crystal thin film (epitaxy layer). The inventors of this application discovered that, before performing the epitaxial process, even after the wafer tray's balance is adjusted, the film quality is not ideal, especially during depressurized epitaxy. After analysis (but our invention is not limited to this), the inventors believe that the reason for this problem may be that during wafer tray leveling, the epitaxial reaction chamber is under normal pressure, while during the epitaxial process, the chamber is under depressurized pressure, meaning the internal pressure is lower than atmospheric pressure. This results in the adjusted mechanism experiencing an additional force during the epitaxial process compared to when it is being adjusted: a vacuum force, i.e., a force exerted on the adjusted mechanism due to the pressure inconsistency between the inside and outside of the chamber. Force analysis revealed that the resultant force of this vacuum force is located on the central axis of the tray's support shaft and points towards the reaction chamber. The gravity of the adjusted mechanism often differs from the point of application and direction of the vacuum force. This can easily lead to additional disturbances from the vacuum force during depressurization epitaxy after the tray balance adjustment is completed. These disturbances can cause positional changes in the adjusted mechanism, resulting in unsatisfactory film deposition quality.

[0085] Figure 11 This is a top view schematic diagram including a tray adjustment device according to an embodiment of this application. Figure 11As shown, the central axis 121 of the support shaft 120 and the center of gravity 1110 of the adjustable mechanism are illustrated. In this application, "adjustable mechanism" includes all structures whose position changes during adjustment by the adjusting member 222, including the aforementioned adjusting platform 210, connector 240, support shaft 120, tray 150, and drive mechanism 140. Adjustable mechanisms are related to semiconductor devices; any structure within the semiconductor device whose position changes during adjustment by the adjusting member 222 is considered an adjustable mechanism. Figure 11 The center of gravity 1110 shown does not coincide with the central axis 121. Therefore, during the depressurized epitaxy process, the adjusted mechanism will be subjected to additional disturbances from the vacuum force. However, the tray mounting method described above ensures that the resultant force on the adjusted mechanism is collinear with the central axis 121 of the support shaft 120. Thus, during depressurized epitaxy, if a vacuum force occurs, since the resultant force of this vacuum force is located on the central axis 121 of the support shaft 120 and points towards the reaction chamber, and the resultant force on the adjusted mechanism has been adjusted to be collinear with the central axis 121, the vacuum force will have almost no impact on the position of the tray 150, thereby ensuring the balance of the tray 150.

[0086] The following is for reference Figure 5 This application describes one specific implementation of the pallet mounting method:

[0087] Before the process begins, install the tray adjustment device so that the adjustment platform 210 is positioned between the pressure block 2221 and the second end 2212 of the fixed base 221. The adjustment platform 210 is in an initial position. This initial position can be determined using the following method:

[0088] Calculate the elastic force of all elastic elements 2222 at the fixed base 221 and the pressure block 2221, such that the torque value generated by the initial force applied to the adjustment platform 210 by all elastic elements 2222 in the first adjustment assembly 2201 and / or the second adjustment assembly 2202 is equal to the torque value generated by the gravity of the adjusted mechanism on the adjustment platform 210. Calculate the initial compression of the elastic elements 2222 based on this initial force; in other words, calculate the initial positions of the moving parts 2223 and elastic elements 2222 in the first adjustment assembly 2201 and / or the second adjustment assembly 2202, which is also the initial position of the adjustment platform 210. Setting the adjustment platform 210 according to this initial position ensures that the resultant force of the gravity of the adjusted mechanism and the elastic force exerted on the adjustment platform 210 by the elastic elements 2222 is substantially located on the central axis 121 of the support shaft 120, thus preventing the position of the tray 150 from being affected by vacuum force.

[0089] Secondly, the balance of the tray 150 is detected using laser ranging. For example, four laser beams are used to illuminate four equally spaced points along the circumference of the tray 150, and the distances between these four points and the laser source are measured. The balance of the tray 150 is determined based on these distances. If a distance at a certain point is found to be relatively large, indicating that the position is too low, the corresponding moving part 2223 is adjusted using the tray adjustment device to raise the position. This adjustment is minor and will not significantly affect the characteristic that the resultant force on the adjusted mechanism is collinear with the central axis 121 of the support shaft 120.

[0090] With this setup, if a vacuum force occurs during subsequent decompression extension, it will not affect the position of the tray 150 because the vacuum force is collinear with the combined force of the gravity and the elastic force of the elastic element 2222 on the adjusted mechanism.

[0091] In some embodiments, the laser remains in a measuring state during the leveling process of the tray 150.

[0092] The tray adjustment device of this application is easy to adjust. According to the tray installation method of this application, the resultant force on the adjusted mechanism can be made collinear with the central axis 121 of the support shaft 120, which can overcome the influence of the vacuum force in the epitaxial process cavity on the balance of the tray 150.

[0093] This application also proposes a semiconductor device including the tray adjusting device described above. This semiconductor device is preferably an epitaxial device. This semiconductor device enables convenient and rapid tray leveling.

[0094] The basic concepts have been described above. Obviously, for those skilled in the art, the above disclosure is merely illustrative and does not constitute a limitation of this application. Although not explicitly stated herein, those skilled in the art may make various modifications, improvements, and corrections to this application. Such modifications, improvements, and corrections are suggested in this application, and therefore remain within the spirit and scope of the exemplary embodiments of this application.

[0095] Furthermore, this application uses specific terms to describe embodiments of the application. For example, "an embodiment," "one embodiment," and / or "some embodiments" refer to a particular feature, structure, or characteristic related to at least one embodiment of the application. Therefore, it should be emphasized and noted that "an embodiment," "one embodiment," or "an alternative embodiment" mentioned twice or more in different locations in this specification do not necessarily refer to the same embodiment. In addition, certain features, structures, or characteristics in one or more embodiments of the application can be appropriately combined.

[0096] Similarly, it should be noted that, in order to simplify the description of the present application and thus aid in the understanding of one or more embodiments, the foregoing description of the embodiments of the present application sometimes combines multiple features into a single embodiment, drawing, or description thereof. However, this disclosure method does not imply that the subject matter of the present application requires more features than those mentioned in the claims. In fact, the embodiments contain fewer features than all the features of the single embodiments disclosed above.

[0097] In some embodiments, numbers describing the quantity of components and attributes are used. It should be understood that such numbers used in the description of embodiments are modified in some examples with the terms "approximately," "approximately," or "generally." Unless otherwise stated, "approximately," "approximately," or "generally" indicates that the numbers are allowed to vary by ±20%. Accordingly, in some embodiments, the numerical parameters used in the specification and claims are approximate values, which may be changed depending on the characteristics required by individual embodiments. In some embodiments, numerical parameters should take into account specified significant digits and employ a general method of digit reservation. Although the numerical ranges and parameters used to confirm their breadth of scope in some embodiments of this application are approximate values, in specific embodiments, such values ​​are set as precisely as feasible.

Claims

1. A tray adjustment device for a semiconductor device, the semiconductor device comprising a housing, a support shaft, a reaction chamber disposed within the housing, and a drive mechanism disposed outside the housing, the tray being disposed within the reaction chamber, and the support shaft connecting the tray and the drive mechanism, characterized in that, include: An adjustment platform is fixedly connected above the drive mechanism and located below the housing; The first adjustment component and the second adjustment component each include a fixed base and an adjustment component. The first end of the fixed base is fixedly connected to the housing, and the second end of the fixed base is connected to the adjustment platform. The adjustment component is used to adjust the position of the adjustment platform along a first direction. An adjustment shaft mechanism is connected to the adjustment platform. The first end of the adjustment shaft mechanism is fixedly connected to the housing. The adjustment shaft mechanism includes a first shaft and a second shaft that are perpendicular to each other. The first shaft extends along a second direction, and the second shaft extends along a third direction. In the second direction, the first adjustment component and the second adjustment component are located on opposite sides of the adjustment shaft mechanism, and in the third direction, the first adjustment component and the second adjustment component are located on the same side of the adjustment shaft mechanism. The tray adjustment device is configured such that: when the first adjustment component and the second adjustment component jointly adjust the position of the adjustment platform along the first direction, the adjustment platform rotates around the second direction; when the first adjustment component or the second adjustment component adjusts the position of the adjustment platform along the first direction, the adjustment platform rotates around the third direction.

2. The tray adjusting device as described in claim 1, characterized in that, Viewed from above, the first adjustment component and the second adjustment component are symmetrically arranged on both sides of the tray with respect to a diameter of the tray, and the adjustment shaft mechanism is located on the extension line of the diameter.

3. The tray adjusting device as described in claim 1, characterized in that, The adjusting component includes a pressure block, an elastic element, and a movable element. The pressure block is fixedly connected to the second end of the fixed base. A portion of the adjusting platform is disposed between the pressure block and the second end of the fixed base. The elastic element is disposed between the adjusting platform and the pressure block, and the movable element is disposed between the adjusting platform and the second end of the fixed base; or, the elastic element is disposed between the adjusting platform and the second end of the fixed base, and the movable element is disposed between the adjusting platform and the pressure block. The adjusting member is configured such that when the moving member moves along the first direction, the deformation of the elastic member changes and the position of the adjusting platform changes.

4. The tray adjusting device as described in claim 3, characterized in that, At least one of the opposing surfaces of the pressure block and the adjustment platform is provided with a first groove, and part of the elastic element is disposed in the first groove; or, at least one of the opposing surfaces of the second end of the fixed base and the adjustment platform is provided with a second groove, and the elastic element is disposed in the second groove.

5. The tray adjusting device as described in claim 1, characterized in that, The adjusting shaft mechanism includes a shaft mounting base, on which the first shaft is rotatably mounted, and the first ends of the first shaft and the second shaft are fixedly connected.

6. The tray adjusting device as described in claim 5, characterized in that, The adjusting shaft mechanism includes a shaft end cover, which is disposed on the first side wall of the shaft mounting base and abuts against the first end of the first shaft.

7. The tray adjusting device as described in claim 6, characterized in that, The second sidewall of the shaft mounting base has a blind hole, and the second end of the first shaft abuts against the bottom of the blind hole, wherein the second sidewall is disposed opposite to the first sidewall.

8. The tray adjusting device as described in claim 5, characterized in that, The adjusting shaft mechanism further includes a bearing seat fixing plate, a bearing mounting base, and a bearing. The bearing seat fixing plate is fixedly connected to the adjusting platform, the bearing mounting base is fixedly connected to the bearing seat fixing plate, the bearing is disposed in the bearing mounting base, and the second end of the second shaft passes through the bearing.

9. The tray adjusting device as described in claim 8, characterized in that, The adjusting shaft mechanism includes a fastener, which is disposed at the second end of the second shaft.

10. A semiconductor device, characterized in that, Includes the tray adjustment device as described in any one of claims 1-9.

11. A pallet installation method, applied to the pallet adjusting device as described in any one of claims 1-9, characterized in that, include: Calculate the initial force applied to the adjustment platform by the first adjustment component and / or the second adjustment component, such that the torque value generated by the initial force on the adjustment platform is equal to the torque value generated by the gravity of the adjusted mechanism on the adjustment platform; The initial positions of the moving parts and elastic parts in the first adjustment assembly and / or the second adjustment assembly are calculated based on the initial force. The adjustment platform is set according to the initial position so that the resultant force on the adjusted mechanism is collinear with the central axis of the support shaft.

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