Gas safety purification pretreatment mechanism for special gas production

Abstract

The application discloses a kind of gas safety purification pretreatment mechanisms for special gas production, it is related to atmospheric control and pollution control related technical field, including the filter cartridge being set, the filter cartridge other end is connected with adsorption cartridge by pipeline, filter cartridge inside is equipped with filter assembly, the filter assembly includes the filter plate being installed in filter cartridge inside, the filter plate is close to the filter cartridge side bottom end of special gas pipeline communication end and is equipped with push plate, adsorption cartridge inside is equipped with adsorption particle.The gas safety purification pretreatment mechanism for special gas production, move along guide rod by magnetic attraction and repulsion drive sliding block, and then drive filter plate to shake, auxiliary particle falls off, by mechanical shaking and magnetic force cooperation, strengthen particle falling-off effect, further relieve filter plate blockage problem, adsorption particle in adsorption cartridge carries out adsorption purification to impurity in gas, heating piece can heat adsorption particle and regenerate, substantially reduce consumable cost.

Description

Technical Field

[0001] This invention relates to the technical field of atmospheric control and pollution treatment, specifically to a gas safety purification and pretreatment mechanism for the production of special gases. Background Technology

[0002] In high-tech fields such as semiconductor manufacturing, biomedicine, and new energy materials, the purity of specialty gases directly determines product performance and production safety, making the purification and pretreatment process crucial.

[0003] Existing technology 1 (Chinese patent CN216023665U, published on March 15, 2022) discloses a novel gas purification pretreatment device, comprising a tank, a servo motor fixedly connected to the bottom of the tank, the output end of the servo motor penetrating the bottom of the tank, a rotating shaft fixedly connected to the output end of the servo motor, an isolation plate fixedly sleeved on the outside of the rotating shaft, filter frames fixedly connected to both sides of the isolation plate, a circular sliding plate fixedly installed inside the tank, two filter frames slidably connected within the circular sliding plate, a left chamber and a right chamber provided inside the tank, the two filter frames respectively located in the left and right chambers, a baffle provided on the inner wall of the tank, a bearing fixedly installed inside the baffle, the bearing rotatably connected to the rotating shaft, the device is small in size, saves floor space, and can continuously perform pretreatment of gas drying and impurity removal, with high working efficiency. Convenient and reliable, prior art 2 (Chinese patent CN218794989U, published on April 7, 2023) discloses a novel gas purification pretreatment device, including a tank. A rotary drying mechanism is installed inside the tank near the bottom. The rotary drying mechanism includes a motor, a second rotating shaft, and a second filter screen. The motor is fixedly installed at the bottom of the tank, and the second filter screen is fixedly installed on the inner wall of the tank. A long rotating shaft is fixedly installed at the output end of the motor, penetrating the bottom of the tank. The outer wall of the long rotating shaft is rotatably connected to the tank via a bearing. By setting up the rotary drying mechanism, the airflow below the second filter screen can be increased within the first filter screen, expanding the drying range of the desiccant and improving the drying quality and efficiency of the air. This solves the problem in the prior art where the filter screen is tilted, resulting in less contact between the air and the desiccant within the filter screen, leading to low drying efficiency of the desiccant.

[0004] Existing technologies achieve preliminary gas purification through gas purification pretreatment structures, but their filter plates are prone to clogging after adsorbing impurities. Clogging requires manual disassembly and cleaning, leading to production interruptions and low operating efficiency. Furthermore, the short replacement cycle of the adsorption material and frequent replacement operations not only increase the workload of manual maintenance but also raise the overall operating cost.

[0005] To address the aforementioned issues, there is an urgent need for innovative designs based on existing gas safety purification and pretreatment mechanisms for special gas production. Therefore, we propose that gas safety purification and pretreatment mechanisms for special gas production can effectively solve these problems. Summary of the Invention

[0006] The purpose of this invention is to provide a gas safety purification and pretreatment mechanism for special gas production, in order to solve the problems mentioned in the background art. Currently, gas purification and pretreatment structures on the market achieve preliminary gas purification, but their filter plates are prone to clogging after adsorbing impurities. After clogging, the machine needs to be stopped for manual disassembly and cleaning, resulting in production interruption and low operating efficiency. In addition, the short replacement cycle of the adsorption material and the frequent replacement operations not only increase the workload of manual maintenance, but also increase the overall operating cost.

[0007] To achieve the above objectives, the present invention provides the following technical solution: a gas safety purification and pretreatment mechanism for special gas production, comprising a filter cylinder, one end of which is connected to a special gas pipeline via a pipe, and the other end of which is connected to an adsorption cylinder via a pipe, both of which are equipped with solenoid valves. A filter assembly is installed inside the filter cylinder, the filter assembly including a filter plate installed inside the filter cylinder, a push plate being provided at the bottom end of the filter cylinder near the end of the special gas pipeline connection of the filter plate, a cyclone dust collector being connected to the bottom of the filter cylinder via a chip conveying pipe located at the side end of the push plate, adsorption particles being installed inside the adsorption cylinder, and a first cavity being formed in the side wall of the adsorption cylinder, with a first heating element installed inside the first cavity.

[0008] Preferably, a slider is installed on the outside of the filter plate, and a storage groove is opened inside the filter cylinder. The storage groove is opened at an equal angle and is located above the inside of the filter cylinder. A guide rod is installed inside the storage groove and is connected through the outside of the slider.

[0009] Preferably, a first spring is sleeved on the outside of the guide rod, and a magnetic block structure is provided inside the storage slot. The magnetic block structure includes an ordinary magnetic block installed on one side of the slider and an electromagnetic block provided at one end of the guide rod, and the electromagnetic block is connected to an external electromagnetic structure through a wire.

[0010] Preferably, an auxiliary component is installed inside the adsorption cylinder. The auxiliary component includes an inner heating cylinder that is equiaxially mounted inside the adsorption cylinder. The inner heating cylinder is hollow, and a second cavity is formed in the inner wall of the inner heating cylinder. A second heating element is installed inside the second cavity.

[0011] Preferably, a protective cover is installed on the outside of the adsorption cylinder. The protective cover is hollow and is connected to an external air pump through a pipe. A gas supply pipe is connected through the side end of the adsorption cylinder and is connected to the inner cavity of the inner heating cylinder. The inner cavity of the inner heating cylinder is connected to a first pipe and a second pipe. The first pipe is arranged at an equal angle inside the adsorption cylinder, and a through hole is opened on the outside of the first pipe. The diameter of the through hole is smaller than the diameter of the adsorbed particles.

[0012] Preferably, the second pipe extends through the side wall of the adsorption cylinder into the interior of the filter cylinder. A cleaning component is provided inside the filter cylinder. The cleaning component includes a bracket installed inside the filter cylinder, and a delivery box is installed on the bracket. The second pipe is connected to the inner cavity of the delivery box. The side end of the delivery box is connected to a first fixed pulse nozzle through a pipe. The first fixed pulse nozzle is mounted on the bracket.

[0013] Preferably, a sleeve is installed on the bracket, and a moving rod is connected inside the sleeve via a second spring. The side end of the conveying box is connected to the inner cavity of the sleeve via a third pipe, and the third pipe is located at the bottom of the sleeve side.

[0014] Preferably, the inner cavity of the sleeve is connected to a second fixed pulse nozzle via a fourth pipe. The second fixed pulse nozzle is mounted on a bracket, and the fourth pipe is located in the middle section of the sleeve side.

[0015] Preferably, a rotating rod is provided inside the filter cylinder, and a rotating pulse nozzle and a gear are installed on the rotating rod. The rotating pulse nozzle is connected to the inner cavity of the delivery box through a fifth pipe. A toothed plate is meshed with the side end of the gear, and the toothed plate is located at the top of the moving rod.

[0016] Compared with the prior art, the beneficial effects of this invention are as follows: This gas safety purification and pretreatment mechanism for special gas production uses magnetic attraction and repulsion to drive the slider to move along the guide rod, thereby causing the filter plate to shake and assisting in particle detachment. The combination of mechanical shaking and magnetic force enhances the particle detachment effect, further alleviating the filter plate clogging problem. The adsorbed particles in the adsorption cylinder adsorb and purify impurities in the gas, and the heating element can regenerate the adsorbed particles, significantly reducing consumable costs. The specific details are as follows: (1) After the special gas enters the filter cartridge through the pipeline, the filter plate in the filter assembly can accurately filter the solid particles in the gas, effectively remove impurities, avoid solid particles entering the subsequent purification equipment and causing blockage problems, and ensure that the entire pretreatment process is carried out stably and orderly.

[0017] (2) The slider on the outside of the filter plate is fitted onto the guide rod in the storage groove. The storage groove is opened at an equal angle inside the filter cylinder. No additional power is required. Solid particles can fall naturally by gravity alone. The magnetic attraction and repulsion drive the slider and filter plate to shake, which helps the particles fall off and further alleviates the clogging problem.

[0018] (3) When the special gas enters the filter cartridge, the gas pressure will push the filter plate to move. At this time, the magnetic block structure is controlled by the external electromagnetic structure to generate intermittent repulsive force, which drives the filter plate to shake. By utilizing the synergistic effect of the gas pressure and the magnetic force, a dynamic filtration mode is achieved. The whole system does not require an additional power device, thus improving the adaptability of the equipment.

[0019] (4) When the special gas pipeline is closed, the repulsive force generated by the magnetic block structure can push the filter plate to move. The push plate at the bottom of one side of the filter plate will push the solid particles accumulated on the filter plate to the chip conveying pipe. The particles enter the cyclone dust collector through the chip conveying pipe to complete centralized collection and realize the automated processing of solid particles.

[0020] (5) The adsorption particles in the adsorption cylinder can further adsorb and purify the filtered gas, improve the purity of special gases, and the heating elements on the side wall of the adsorption cylinder and the inner wall of the inner heating cylinder can heat and regenerate the adsorption particles, restore the adsorption performance, realize the reuse of adsorption particles, and greatly reduce the cost of consumables. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the overall structure of the present invention; Figure 2 This is a schematic diagram of the overall side view structure of the present invention; Figure 3 This is a cross-sectional view of the filter cartridge and adsorption cartridge of the present invention; Figure 4 This is a schematic diagram of the cross-sectional structure of the filter cartridge of the present invention; Figure 5 This is a schematic diagram of the connection structure between the guide rod and the slider of the present invention; Figure 6 This is a schematic diagram of the adsorption cylinder and the first cavity structure of the present invention; Figure 7 This is a schematic diagram of the cross-sectional structure of the inner heating cylinder of the present invention; Figure 8 This is a side view of the conveyor box structure of the present invention; Figure 9 This is a schematic diagram of the connection structure between the sleeve and the moving rod of the present invention; Figure 10 This is a schematic diagram of the cross-sectional structure of the sleeve of the present invention; Figure 11 This is a schematic diagram of the connection structure between the toothed plate and the gear of the present invention; Figure 12This is a schematic diagram of the internal structure of the filter cartridge of the present invention.

[0022] In the diagram: 1. Filter cylinder; 2. Adsorption cylinder; 3. Filter plate; 4. Push plate; 5. Chip conveying pipe; 6. Cyclone dust collector; 7. Storage trough; 8. Guide rod; 9. Sliding block; 10. First spring; 11. Magnetic block structure; 12. First cavity; 13. Internal heating cylinder; 14. Second cavity; 15. Protective cover; 16. Air conveying pipe; 17. First pipe; 18. Through hole; 19. Second pipe; 20. Conveying box; 21. First fixed pulse nozzle; 22. Third pipe; 23. Sleeve; 24. Second spring; 25. Moving rod; 26. Fourth pipe; 27. Second fixed pulse nozzle; 28. Toothed plate; 29. ​​Gear; 30. Rotating rod; 31. Fifth pipe; 32. Rotating pulse nozzle. Detailed Implementation

[0023] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0024] Example 1: In this example, the protective cover 15 on the outside of the adsorption cylinder 2 is connected to an external air pump through a pipe. This allows for the preheating of the adsorption cylinder 2 by transferring waste heat in advance, and also enables the heated gas to be transported to the outside for resource utilization, achieving efficient energy use. Figures 1-6The technical solution shown includes a filter cylinder 1, one end of which is connected to a special gas pipeline via a pipe, and the other end of which is connected to an adsorption cylinder 2 via a pipe. Both pipes are equipped with solenoid valves. A filter assembly is installed inside the filter cylinder 1, including a filter plate 3 installed inside the filter cylinder 1. A pusher plate 4 is located at the bottom of the filter cylinder 1 near the end of the filter plate 3 connected to the special gas pipeline. A cyclone dust collector 6 is connected to the bottom of the filter cylinder 1 via a chip conveying pipe 5 located on the side of the pusher plate 4. Adsorption particles are installed inside the adsorption cylinder 2. A first cavity 12 is formed on the side wall of the adsorption cylinder 2, and a first heating element is installed inside the first cavity 12. A slider 9 is installed on the outside of the filter plate 3, and a storage groove 7 is formed inside the filter cylinder 1. The storage slot 7 is angled and located above the interior of the filter cylinder 1. A guide rod 8 is installed inside the storage slot 7, extending through and connecting to the outside of the slider 9. A first spring 10 is fitted onto the outside of the guide rod 8. A magnetic block structure 11 is installed inside the storage slot 7. The magnetic block structure 11 includes a common magnetic block installed on one side of the slider 9 and an electromagnetic block located at one end of the guide rod 8. The electromagnetic block is connected to an external electromagnetic structure via a wire. Special gas enters the filter cylinder 1 through a special gas pipeline. A solenoid valve on the pipeline controls the gas flow. The gas first contacts the filter assembly, where the filter plate 3 filters the solid particles in the gas, effectively removing solid impurities. The slider 9 outside the filter plate 3 is fitted onto the guide rod 8 inside the storage slot 7. The filter plate 3 is positioned at an equal angle inside the filter cylinder 1, allowing particles to fall due to gravity and reducing clogging. A first spring 10 on the outside of the guide rod 8 works in conjunction with a magnetic block structure 11. The magnetic block structure 11 includes a common magnetic block on one side of the slider 9 and an electromagnetic block at one end of the guide rod 8. The electromagnetic block is connected to an external electromagnetic structure. Magnetic attraction and repulsion cause the slider 9 to move along the guide rod 8, which in turn causes the filter plate 3 to shake, assisting in particle detachment. The filter plate 3, through mechanical shaking and magnetic force, enhances the particle detachment effect, further alleviating the clogging problem of the filter plate 3, reducing the frequency of manual cleaning, and lowering maintenance costs. When special gas enters the filter cylinder 1 through a special gas pipeline, the gas pressure pushes the filter plate 3 to move. At this time, intermittent repulsive force can cause the filter plate 3 to shake. Furthermore, when special gas enters the filter cylinder 1 through a special gas pipeline... After the gas pipeline is closed, the filter plate 3 can be moved by repulsion. At this time, the push plate 4 at the bottom of one side of the filter plate 3 can push the particles accumulated on the filter plate 3 towards the chip conveying pipeline 5. The particles enter the cyclone dust collector 6 through the chip conveying pipeline 5 for collection. The filtered gas enters the adsorption cylinder 2 through the pipeline. The solenoid valve on the pipeline controls the on and off. The adsorbent particles in the adsorption cylinder 2 adsorb and purify the impurities in the gas. The first heating element in the first cavity 12 on the side wall of the adsorption cylinder 2, together with the second heating element in the second cavity 14 on the inner wall of the inner heating cylinder 13, can heat and regenerate the adsorbent particles, restoring the adsorption performance. There is no need to frequently replace the adsorption material, which greatly reduces the cost of consumables and improves the economic efficiency of the equipment. The protective cover 15 on the outside of the adsorption cylinder 2 is connected to the external air pump through the pipeline.It can both preheat the adsorption cylinder 2 with waste heat and transport the heated gas to the outside for resource utilization, achieving efficient energy use and meeting the requirements of energy conservation and consumption reduction.

[0025] Example 2: In this example, the gas heated from the inner cavity of the inner heating cylinder 13 is transported between the adsorption particles, allowing the heated gas to fully contact the adsorption particles, resulting in more uniform heating and significantly improving the regeneration efficiency and effect of the adsorption particles. Specifically, as follows... Figures 3-7 As shown, the following is disclosed: An auxiliary assembly is installed inside the adsorption cylinder 2. The auxiliary assembly includes an inner heating cylinder 13, which is equiaxially mounted inside the adsorption cylinder 2. The inner heating cylinder 13 is hollow, and a second cavity 14 is formed on the inner wall of the inner heating cylinder 13. A second heating element is installed inside the second cavity 14. A protective cover 15 is installed on the outside of the adsorption cylinder 2. The protective cover 15 is hollow and connected to an external air pump via a pipe. A gas supply pipe 16 is connected through the side end of the adsorption cylinder 2, and the gas supply pipe 16 is connected to the inner cavity of the inner heating cylinder 13. A first pipe 17 and a second pipe 19 are connected to the inner cavity of the inner heating cylinder 13. The first pipe 17 is set at an equal angle inside the adsorption cylinder 2, and a through hole 18 is formed on the outside of the first pipe 17. The diameter of the through hole 18 is smaller than the diameter of the adsorbed particles. The gas supply pipe 16 at the side end of the auxiliary cylinder 2 is connected to the inner cavity of the inner heating cylinder 13. The valve on the pipe that supplies the special gas is closed, and the valve on the outlet pipe that supplies the treated gas is indirectly opened and closed. The gas is supplied by an external gas pump. The gas passes through the inner cavity of the inner heating cylinder 13 and is then ejected through the through hole 18 on the outside of the first pipe 17. Since the first pipe 17 is equiangularly inserted into the adsorption particles, the gas heated from the inner cavity of the inner heating cylinder 13 can be transported between the adsorption particles, so that the heated gas can fully contact the adsorption particles, the heating is more uniform, and the regeneration efficiency and regeneration effect of the adsorption particles are greatly improved, ensuring stable recovery of adsorption performance. The gas in the inner cavity of the inner heating cylinder 13 is also transported to the inside of the delivery box 20 through the second pipe 19, which facilitates the effective utilization of waste heat and reduces energy waste.

[0026] Example 3: In this example, the filter plate 3 can be cleaned by pulse cleaning in all directions, further improving the cleaning effect of the filter assembly and ensuring the continuity and safety of the purification pretreatment. Specifically, as follows... Figure 3 and Figures 8-12As shown, the second pipe 19 extends through the side wall of the adsorption cylinder 2 into the interior of the filter cylinder 1. A cleaning assembly is installed inside the filter cylinder 1. The cleaning assembly includes a bracket installed inside the filter cylinder 1, and a delivery box 20 is mounted on the bracket. The second pipe 19 is connected to the inner cavity of the delivery box 20. The side end of the delivery box 20 is connected to a first fixed pulse nozzle 21 via a pipe. The first fixed pulse nozzle 21 is mounted on the bracket, and a sleeve 23 is mounted on the bracket. A moving rod 25 is connected inside the sleeve 23 via a second spring 24. The delivery box 2... The 0-side end is connected to the inner cavity of the sleeve 23 via a third pipe 22, and the third pipe 22 is located at the bottom of the sleeve 23. The inner cavity of the sleeve 23 is connected to a second fixed pulse nozzle 27 via a fourth pipe 26. The second fixed pulse nozzle 27 is mounted on a bracket. The fourth pipe 26 is located in the middle section of the sleeve 23. A rotating rod 30 is provided inside the filter cylinder 1. A rotating pulse nozzle 32 and a gear 29 are mounted on the rotating rod 30. The rotating pulse nozzle 32 is connected to the inner cavity of the conveying box 20 via a fifth pipe 31. The gear 29 is engaged at its side end. A toothed plate 28 is attached, located at the top of the moving rod 25. The side end of the delivery box 20 is connected to the first fixed pulse nozzle 21 via a pipe, allowing direct gas spraying to perform preliminary cleaning of the filter plate 3. The delivery box 20 is connected to the inner cavity of the sleeve 23 via a third pipe 22. The inside of the sleeve 23 is connected to the moving rod 25 via a second spring 24. When the gas pressure reaches a certain value, the gas pushes the moving rod 25 upward against the elastic force of the second spring 24. When the bottom end of the moving rod 25 moves to the position of the fourth pipe 26 in the middle section of the sleeve 23, the gas... The filter plate 3 is cleaned by pulse cleaning through the fourth pipe 26 to the second fixed pulse nozzle 27. The toothed plate 28 at the top of the moving rod 25 meshes with the gear 29 on the rotating rod 30. When the moving rod 25 moves up and down, it drives the gear 29 to rotate, which in turn drives the rotating rod 30 and the rotating pulse nozzle 32 to rotate. The rotating pulse nozzle 32 is connected to the inner cavity of the delivery box 20 through the fifth pipe 31. Therefore, the filter plate 3 can be cleaned by pulse cleaning in all directions, which further improves the cleaning effect of the filter assembly and ensures the continuity and safety of the purification pretreatment.

[0027] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A gas safety purification and pretreatment mechanism for special gas production, comprising a filter cartridge (1), characterized in that, One end of the filter cylinder (1) is connected to a special gas pipeline through a pipe, and the other end of the filter cylinder (1) is connected to an adsorption cylinder (2) through a pipe. Both pipes are equipped with solenoid valves. A filter assembly is installed inside the filter cylinder (1). The filter assembly includes a filter plate (3) installed inside the filter cylinder (1). A push plate (4) is provided at the bottom of the filter cylinder (1) near the end of the special gas pipeline. A cyclone dust collector (6) is connected to the bottom of the filter cylinder (1) through a chip conveying pipe (5). The chip conveying pipe (5) is located at the side end of the push plate (4). Adsorption particles are installed inside the adsorption cylinder (2). A first cavity (12) is opened on the side wall of the adsorption cylinder (2). A first heating element is installed inside the first cavity (12). A slider (9) is installed on the outside of the filter plate (3), and a storage groove (7) is opened inside the filter cylinder (1). The storage groove (7) is opened at equal angles and is located above the inside of the filter cylinder (1). A guide rod (8) is installed inside the storage groove (7), and the guide rod (8) is connected through to the outside of the slider (9). The guide rod (8) is fitted with a first spring (10) on the outside, and the storage slot (7) is provided with a magnetic block structure (11). The magnetic block structure (11) includes an ordinary magnetic block installed on one side of the slider (9) and an electromagnetic block installed at one end of the guide rod (8). The electromagnetic block is connected to an external electromagnetic structure through a wire. An auxiliary component is installed inside the adsorption cylinder (2). The auxiliary component includes an inner heating cylinder (13) that is equiaxially installed inside the adsorption cylinder (2). The inner heating cylinder (13) is hollow. A second cavity (14) is opened on the inner wall of the inner heating cylinder (13). A second heating element is installed inside the second cavity (14). A protective cover (15) is installed on the outside of the adsorption cylinder (2). The protective cover (15) is hollow and is connected to an external air pump through a pipe. A gas supply pipe (16) is connected through the side end of the adsorption cylinder (2). The gas supply pipe (16) is connected to the inner cavity of the inner heating cylinder (13). The inner cavity of the inner heating cylinder (13) is connected to a first pipe (17) and a second pipe (19). The first pipe (17) is set at an equal angle inside the adsorption cylinder (2). A through hole (18) is opened on the outside of the first pipe (17). The diameter of the through hole (18) is smaller than the diameter of the adsorbed particles.

2. The gas safety purification and pretreatment mechanism for special gas production according to claim 1, characterized in that: The second pipe (19) extends through the side wall of the adsorption cylinder (2) into the interior of the filter cylinder (1). A cleaning component is provided inside the filter cylinder (1). The cleaning component includes a bracket installed inside the filter cylinder (1) and a delivery box (20) is installed on the bracket. The second pipe (19) is connected to the inner cavity of the delivery box (20). The side end of the delivery box (20) is connected to the first fixed pulse nozzle (21) through a pipe. The first fixed pulse nozzle (21) is installed on the bracket.

3. The gas safety purification and pretreatment mechanism for special gas production according to claim 2, characterized in that: A sleeve (23) is installed on the bracket. Inside the sleeve (23) is a moving rod (25) connected by a second spring (24). The side end of the conveying box (20) is connected to the inner cavity of the sleeve (23) through a third pipe (22), and the third pipe (22) is located at the bottom of the side of the sleeve (23).

4. A gas safety purification and pretreatment mechanism for special gas production according to claim 3, characterized in that: The inner cavity of the sleeve (23) is connected to a second fixed pulse nozzle (27) through a fourth pipe (26). The second fixed pulse nozzle (27) is mounted on the bracket, and the fourth pipe (26) is located in the middle section of the sleeve (23).

5. A gas safety purification and pretreatment mechanism for special gas production according to claim 4, characterized in that: The filter cylinder (1) is provided with a rotating rod (30), and a rotating pulse nozzle (32) and a gear (29) are installed on the rotating rod (30). The rotating pulse nozzle (32) is connected to the inner cavity of the delivery box (20) through the fifth pipe (31). The gear (29) is meshed with a toothed plate (28) on its side end. The toothed plate (28) is located at the top of the moving rod (25).

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