Process for the preparation of electronic grade isopropyl hydroxylamine

By employing a segmented distillation-recrystallization-solid-liquid separation process, the instability of free hydroxylamine as a base was solved, resulting in the production of high-purity isopropyl hydroxylamine. This process meets the safety and stability requirements of the electronics industry, reduces production costs, and improves efficiency.

CN122102942APending Publication Date: 2026-05-29JINING KENDRAY CHEM TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
JINING KENDRAY CHEM TECH CO LTD
Filing Date
2026-02-27
Publication Date
2026-05-29

AI Technical Summary

Technical Problem

In the existing technology, hydroxylamine free base as a photoresist stripping solution has the risks of instability and explosion, and has a short shelf life, making it difficult to meet the safety and stability requirements of the electronics industry, and there is a lack of effective alternatives.

Method used

A combined process of fractional distillation-recrystallization-solid-liquid separation was adopted. By controlling the temperature of the distillation vessel and the condenser outlet temperature, high-purity isopropyl hydroxylamine solid primary product was separated, and high-purity electronic-grade isopropyl hydroxylamine product was obtained by recrystallization and centrifugation.

Benefits of technology

This method enables the preparation of isopropyl hydroxylamine with high purity and high yield, meeting the purity, ion content, and particle requirements of SEMI C36 standards. It reduces production costs, improves production efficiency, and provides a safer and more stable raw material for photoresist stripping solution.

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Abstract

The present application relates to the technical field of isopropyl hydroxylamine preparation, and discloses a preparation method of electronic-grade isopropyl hydroxylamine, which uses a segmented rectification mode to obtain isopropyl hydroxylamine solid primary product and isopropyl hydroxylamine rectification product from isopropyl hydroxylamine product aqueous solution, and then uses a combination of recrystallization and solid-liquid separation to make the purity, impurity ions and particle number of the isopropyl hydroxylamine meet the requirements of photoresist chemicals, so that the electronic-grade isopropyl hydroxylamine can be prepared and used in photoresist stripping liquid to replace hydroxylamine free base, solve the problem that the shelf life of hydroxylamine free base is short, and it cannot be stored in large quantities and for a long time, and is highly dependent on foreign supply.
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