A semiconductor device based on a hot-plate circulating coolant waste heat insulation inlet air pipe

Abstract

This invention relates to the field of wafer processing equipment technology, and more particularly to a semiconductor device based on a hot-stage circulating coolant waste heat insulation inlet gas pipe, comprising a process chamber, a coolant source, connecting pipes, and heating pipes; a hot stage is provided inside the process chamber, and a tungsten hexafluoride pipe is provided on the process chamber, with the free end of the tungsten hexafluoride pipe connected to a gas holder; the heating pipes are sleeved outside the tungsten hexafluoride pipe, forming a closed heating chamber between their inner sidewall and the outer sidewall of the tungsten hexafluoride pipe; one end of the connecting pipe is located on the hot stage and communicates with the coolant channel inside the hot stage, and the other end of the connecting pipe is located on the heating pipes and communicates with the heating chamber; the outlet end of the coolant source is connected to the coolant channel; this invention can effectively maintain the gaseous state of tungsten hexafluoride without relying on an external heating belt, significantly reducing the system's additional energy consumption and improving the overall energy efficiency of the equipment while achieving the same process objectives.

Description

Technical Field

[0001] This invention relates to the field of wafer processing equipment technology, and in particular to a semiconductor device based on a hot-stage circulating coolant waste heat insulation air intake pipe. Background Technology

[0002] Chemical vapor deposition (CVD) of tungsten is a crucial step in semiconductor manufacturing. It involves reacting a tungsten precursor (such as tungsten hexafluoride, WF6) with a reducing agent (such as hydrogen (H2) or silane (SiH4)) at high temperatures to form a tungsten thin film. This process is widely used for metallizing high aspect ratio structures due to its excellent void-filling ability, low resistivity, and good adhesion. However, WF6 is a highly liquefiable gas. In conventional processes, to prevent liquefaction in the pipes, heating tape is typically wrapped around the WF6 inlet pipe to maintain its gaseous state (e.g., keeping it at approximately 45°C). This use of heating tape introduces additional energy loss. Summary of the Invention

[0003] This invention relates to a semiconductor device based on a hot-stage circulating coolant waste heat insulation inlet pipe, the purpose of which is to enable the tungsten hexafluoride pipe to effectively maintain the gaseous state of tungsten hexafluoride without relying on an external heating belt.

[0004] To achieve the above objectives, the present invention provides a semiconductor device based on a hot-stage circulating coolant waste heat insulation air intake pipe, including a process chamber, a coolant source, connecting pipes and heating pipes; The process chamber is equipped with a hot stage, and a tungsten hexafluoride pipe is installed on the process chamber. The free end of the tungsten hexafluoride pipe is connected to a gas holder, and the gas holder introduces tungsten hexafluoride gas into the process chamber through the tungsten hexafluoride pipe. The heating element is sleeved outside the tungsten hexafluoride pipe and forms a closed heating chamber between its inner wall and the outer wall of the tungsten hexafluoride pipe. One end of the connecting pipe is located on the heating platform and communicates with the coolant channel in the heating platform; the other end of the connecting pipe is located on the heating pipe and communicates with the heating chamber. The outlet end of the coolant source is connected to the coolant channel, and the inlet end of the coolant source is connected to the heating chamber. The coolant output by the coolant source at a first temperature flows through the coolant channel through the heating platform and exchanges heat with the heating platform to rise to a second temperature. The heated coolant flows into the heating chamber through the connecting pipe and heats the tungsten hexafluoride pipe in the heating chamber to prevent the tungsten hexafluoride in the tungsten hexafluoride pipe from condensing.

[0005] Optionally, the connecting pipe fitting includes a first pipe section, a second pipe section, and a third pipe section; The second pipe section is disposed outside the heating pipe and extends along the axial direction of the heating pipe. The second pipe section is connected to the coolant channel through the first pipe section. The third pipe section is disposed between the second pipe section and the heating pipe and connects the cavity of the second pipe section and the heating chamber.

[0006] Optionally, the number of the third tubes is set to several, and the several third tubes are arranged at intervals along the axial direction of the second tubes to form multiple coolant inlets flowing into the heating chamber in the axial direction of the heating tube.

[0007] Optionally, a shrink tube is coaxially provided inside the third tube section, and an elastic seal is provided between the outer wall of the shrink tube and the inner wall of the third tube section. The elastic seal connects the shrink tube and the third tube section and is used for sealing between the two. The shrink tube adaptively adjusts the cross-sectional area of ​​the coolant flow in its tube cavity according to the temperature of the coolant on the tungsten hexafluoride pipe and / or in the heating chamber to control the flow rate of the coolant.

[0008] Optionally, the shrink tube includes a retaining portion and an extension portion. The retaining portion is provided in a plurality of such portions and is coupled end to end. The docking portion of one of any two adjacent retaining portions is provided with a receiving groove extending in the circumferential direction, and the docking portion of the other is provided with an extension portion. At least part of the extension portion is slidably inserted into the receiving groove and can move toward or away from the bottom of the receiving groove to reduce or increase the coolant flow cross-sectional area of ​​the shrink tube cavity.

[0009] Optionally, the semiconductor device based on the waste heat insulation air intake pipe of the hot-platform circulating coolant further includes a circumferential rotation drive. The circumferential rotation drive includes a main body and a connecting part. The main body is coaxially disposed inside the third pipe section, and its top extends into the heating chamber and is connected to the tungsten hexafluoride pipe. One end of the connecting part is connected to the main body and the other end is connected to the enclosure part. When the main body performs thermal expansion and contraction or rotational movement according to the temperature of the coolant on the tungsten hexafluoride pipe and / or in the heating chamber, the connecting part causes any two adjacent enclosure parts to move in the opposite direction or in the opposite direction, thereby reducing or increasing the coolant flow cross-sectional area of ​​the constriction pipe cavity.

[0010] Optionally, the main body includes a rotating base and a heat-conducting rod. The rotating base is coaxially disposed within the third tube. The top of the rotating base is recessed into a storage cavity towards the bottom. The heat-conducting rod is at least partially spirally disposed within the storage cavity, and its top extends into the heating chamber and connects to the tungsten hexafluoride pipe. A thermally expanding and contracting liquid is stored in the cavity between the bottom of the heat-conducting rod and the bottom of the storage cavity. One end of the connecting part is hinged to the side wall of the rotating base, and the other end is hinged to the enclosure part. When the thermally expanding and contracting liquid receives heat conducted by the heat-conducting rod and undergoes thermal expansion and contraction, and when the elastic seal loses external force and undergoes a reset movement, the rotational movement of the rotating base causes any two adjacent enclosure parts to move in opposite directions or towards each other through the connecting part.

[0011] Optionally, an elastic heat insulation element is fixedly sleeved on the outside of the heat rod conductor, and the bottom of the elastic heat insulation element abuts against the top of the rotating base. The top of the elastic heat insulation element extends at least partially into the heating chamber. While ensuring that the rotating base and the heat rod conductor are sealed at the opening of the storage chamber, the elastic heat insulation element ensures that the heat rod conductor can conduct the temperature of the coolant on the tungsten hexafluoride pipe and / or in the heating chamber to the storage chamber without loss.

[0012] Optionally, the main body includes a first sub-main body and a second sub-main body fixedly connected. The second sub-main body is fixedly connected to the connecting part. The end of the connecting part away from the second sub-main body abuts against the enclosure part. The second sub-main body is made of a material that expands and contracts with temperature, so that when its volume increases or decreases according to temperature changes, the coolant flow cross-sectional area of ​​the shrinkage fitting cavity is increased by the pushing of the connecting part, or the coolant flow cross-sectional area of ​​the shrinkage fitting cavity is decreased by the reset movement of the elastic seal.

[0013] Optionally, a heat pipe conductor is connected to the top of the main body. The heat pipe conductor is fixedly sleeved outside the tungsten hexafluoride pipe, and the heat pipe conductor at least partially covers the orthographic projection structure of the heating pipe in the third pipe section in the orthographic projection structure of the heating pipe, so that the main body accurately receives the temperature on the tungsten hexafluoride pipe.

[0014] The beneficial effects of this invention are as follows: In this invention, the coolant output from the coolant source at a first temperature first flows through the heating platform. After heat exchange, its temperature rises to a second temperature. The heated coolant does not return directly to the coolant source but is guided to a heating element fitted around the tungsten hexafluoride (THF) pipe, where it heats the THF pipe within the resulting heating chamber. This method achieves heat recycling, directly using the waste heat from the liquid that was originally used for cooling the heating platform to prevent the condensation of the THF gas. Therefore, this invention effectively maintains the gaseous state of THF without relying on external heating elements, significantly reducing additional energy consumption and improving overall equipment energy efficiency while achieving the same process objectives. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the structure of a semiconductor device based on a hot-plate circulating coolant waste heat insulation air intake pipe in an embodiment of the present invention; Figure 2 For the present invention Figure 1 An enlarged structural diagram of position A in the embodiment; Figure 3 For the present invention Figure 2 A schematic diagram of the rotating base and the shrink tube in the embodiment.

[0016] Explanation of reference numerals in the attached figures 1. Process chamber; 2. Heating platform; 3. Coolant source; 4. Tungsten hexafluoride pipe; 5. Connecting fittings; 51. First pipe section; 52. Second pipe section; 53. Third pipe section; 6. Heating fittings; 8. Shrink fittings; 81. Enclosure section; 82. Receiving groove; 83. Extension section; 9. Elastic seal; 10. Circumferential rotation drive; 101. Rotating base; 1011. Storage chamber; 102. Connecting section; 103. Heat transfer rod; 11. Elastic insulation; 12. Heat transfer tube. Detailed Implementation

[0017] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions in the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without inventive effort are within the scope of protection of this invention. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but do not exclude other elements or objects.

[0018] To address the problems existing in the prior art, embodiments of the present invention provide a semiconductor device based on a hot-plate circulating coolant waste heat insulation inlet air pipe, such as... Figure 1 As shown, the semiconductor device based on the waste heat insulation inlet gas pipeline of the hot stage circulating coolant includes a process chamber 1, a coolant source 3, connecting pipes 5, and heating pipes 6. This embodiment cleverly combines the temperature management of the hot stage 2 in the process chamber 1 with the insulation problem of the tungsten hexafluoride gas delivery pipeline. This setup not only eliminates the additional energy consumption of traditional independent heating elements and converts the originally lost waste heat into useful insulation heat energy, but also simplifies the system structure and reduces equipment costs and operating energy consumption.

[0019] In one embodiment, such as Figure 1 As shown, a hot plate 2 is provided inside the process chamber 1, and a tungsten hexafluoride pipe 4 is provided on the process chamber 1. The free end of the tungsten hexafluoride pipe 4 (at...) Figure 1 In the embodiment, it can be understood that the right end is connected to the gas holder, and the gas holder inputs tungsten hexafluoride gas into the process chamber 1 through the tungsten hexafluoride pipe 4.

[0020] In one embodiment, such as Figure 1 As shown, the heating element 6 is sleeved outside the tungsten hexafluoride pipe 4, forming a closed heating chamber (unlabeled) between its inner wall and the outer wall of the tungsten hexafluoride pipe 4. This provides an efficient, uniform, and controllable heating environment for the tungsten hexafluoride pipe 4, ensuring a stable gas state within the pipe. This "jacketed" structure significantly increases the heat exchange area, allowing the waste heat of the coolant to be transferred evenly and efficiently to the tungsten hexafluoride pipe 4, avoiding localized overheating or underheating. The closed heating chamber also serves to insulate and concentrate heat, reducing heat loss to the environment and ensuring that limited waste heat is concentrated to maintain the pipe temperature. This effectively prevents condensation of the tungsten hexafluoride gas due to excessively low pipe wall temperature, thus maximizing thermal energy utilization while achieving insulation.

[0021] In one embodiment, the heating tube 6 can be a sleeve extending along the length of the tungsten hexafluoride pipe 4. The inner wall of this sleeve is tightly fitted onto the outer wall of the tungsten hexafluoride pipe 4, and its end (e.g., through an end cap, seal, etc.) is sealed to the outer wall of the tungsten hexafluoride pipe 4, thereby forming a closed annular heating chamber surrounding the tungsten hexafluoride pipe 4.

[0022] In one embodiment, such as Figure 1As shown, one end of the connecting pipe 5 is located on the heating platform 2 and communicates with the coolant channel inside the heating platform 2, and the other end of the connecting pipe 5 is located on the heating pipe 6 and communicates with the heating chamber; thus, an efficient and closed heat energy circulation and transfer path is established, directly and tightly connecting the "heat source" (heating platform 2) and the "hot spot" (tungsten hexafluoride pipe 4).

[0023] In one embodiment, such as Figure 1 As shown, the outlet end of the coolant source 3 is connected to the coolant channel, and the inlet end of the coolant source 3 is connected to the heating chamber. The coolant output from the coolant source 3 at a first temperature flows through the coolant channel through the heating platform 2 and exchanges heat with the heating platform 2 to reach a second temperature. The heated coolant flows into the heating chamber through the connecting pipe 5 and heats the tungsten hexafluoride pipe 4 in the heating chamber to prevent the tungsten hexafluoride in the tungsten hexafluoride pipe 4 from condensing. An outlet pipe is provided at the end of the heating chamber near the process chamber 1. The free end of the outlet pipe (in... Figure 1 In the embodiment, it can be understood that the left end is connected to the coolant source 3.

[0024] This embodiment constructs a highly efficient closed-loop thermal energy circulation and recovery system, realizing the tiered utilization of energy. Specifically, the coolant plays a dual role in the system: from heat absorption to heat transfer. It first flows out of the coolant source 3 at a first temperature (e.g., room temperature) and enters the coolant channel of the heating platform 2, absorbing excess heat generated during the operation of the heating platform 2, raising its own temperature to a second temperature, thus effectively cooling the heating platform 2. Subsequently, the heated coolant does not return directly to the coolant source 3 for forceful cooling as in a traditional cooling circuit. Instead, it is guided and flows into the heating chamber surrounding the tungsten hexafluoride pipe 4. Here, the residual heat carried by the coolant is transferred to the wall of the tungsten hexafluoride pipe 4 through heat conduction, maintaining its temperature to prevent condensation of the tungsten hexafluoride gas inside the pipe. The cooled coolant then returns to the coolant source 3. This process cleverly converts the waste heat that would otherwise be dissipated into useful heat energy for insulation, eliminating the need for an additional independent heating device (such as a heating belt) for the tungsten hexafluoride pipeline 4. While ensuring process stability (preventing tungsten hexafluoride gas liquefaction), it significantly reduces the overall energy consumption of the system, achieving energy saving and efficiency improvement.

[0025] In one embodiment, such as Figure 1As shown, the connecting pipe 5 includes a first pipe section 51, a second pipe section 52, and a third pipe section 53. The second pipe section 52 is disposed outside the heating pipe 6 and extends along the axial direction of the heating pipe 6. The second pipe section 52 communicates with the coolant channel through the first pipe section 51. The third pipe section 53 is disposed between the second pipe section 52 and the heating pipe 6 and communicates the cavity of the second pipe section 52 and the heating chamber. A plurality of third pipe sections 53 are provided, and these third pipe sections 53 are arranged at intervals along the axial direction of the second pipe section 52 to form multiple coolant inlets flowing into the heating chamber along the axial direction of the heating pipe 6.

[0026] This embodiment features a clearly structured and functionally distinct connecting pipe system 5, enabling efficient, controllable, and stable delivery of coolant from the heating platform 2 to the heating chamber. The first pipe section 51 collects the heated coolant flowing from the heating platform 2 and introduces it into the main channel of the connecting pipe system 5, namely the second pipe section 52. The second pipe section 52 extends axially along the heating pipe 6 (i.e., the tungsten hexafluoride pipe 4), forming a longitudinally distributed main distribution pipe. Multiple third pipe sections 53 serve as branch pipes, extending from the second pipe section 52 and evenly connecting to different locations within the heating chamber. This arrangement optimizes the point-to-point connection into a multi-point, axially distributed connection, allowing the heated coolant from the heating platform 2 to be buffered and distributed through the axially extending second pipe section 52, and then evenly injected into the heating chamber from different locations along the length of the heating pipe 6 through the multiple axially spaced third pipe sections 53. This ensures that the heated coolant can enter the heating chamber evenly and stably, thereby achieving more uniform and sufficient circumferential heating of the entire tungsten hexafluoride pipe 4. It effectively avoids the problem of local overheating or uneven heat distribution caused by a single coolant injection point, and further improves the heat utilization efficiency and the uniformity and reliability of the pipe insulation effect.

[0027] In one embodiment, such as Figure 1 and Figure 2 As shown, the number of the third tube sections 53 can be designed according to the length of the tungsten hexafluoride pipe 4, the required insulation effect, and the coolant flow rate. For example, there can be two, three, four, or even more. Multiple third tube sections 53 are arranged at intervals, equidistantly, or irregularly along the axial direction of the second tube section 52.

[0028] In one embodiment, such as Figure 2As shown, a contraction fitting 8 is coaxially arranged inside the third tube section 53. An elastic seal 9 is provided between the outer wall of the contraction fitting 8 and the inner wall of the third tube section 53. The elastic seal 9 connects the contraction fitting 8 and the third tube section 53 and serves to seal between them. The contraction fitting 8 adaptively adjusts the cross-sectional area of ​​its cavity for coolant flow according to the temperature of the coolant on the tungsten hexafluoride pipe 4 and / or in the heating chamber, thereby controlling the flow rate of the coolant. This introduces an automatic and adaptive flow regulation mechanism to the system, thereby achieving precise and dynamic control of the insulation temperature of the tungsten hexafluoride pipe 4. The contraction fitting 8 can adaptively change the cross-sectional area of ​​its cavity according to the temperature changes of the tungsten hexafluoride pipe 4 or the coolant temperature in the heating chamber that it senses. When the temperature is too low, indicating a risk of condensation in tungsten hexafluoride, the contraction fitting 8 automatically expands the flow area, allowing more of the warmer coolant flowing from the heating platform 2 to quickly enter the heating chamber, enhancing the heating effect on the tungsten hexafluoride pipe 4. Conversely, when the temperature is too high, it automatically contracts to reduce the flow rate, preventing overheating, energy waste, or damage to other parts. The elastic seal 9 ensures a tight seal during the adjustment process. This purely mechanical feedback adjustment, requiring no external sensors or complex controllers, significantly improves the system's intelligence and energy efficiency, ensuring that the tungsten hexafluoride pipe 4 is always maintained within the ideal temperature range to prevent tungsten hexafluoride condensation, while avoiding heat waste caused by a constant high flow rate.

[0029] In one embodiment, the shrink tube 8 can be made of a material with excellent heat resistance, chemical corrosion resistance, and good elasticity or thermal responsiveness. For example, stainless steel can be selected to balance strength and corrosion resistance, or a specific high-temperature resistant engineering plastic (such as polyetheretherketone, PEEK) can be selected to reduce weight while meeting operating requirements. More importantly, in order to achieve its core function of "adaptively adjusting the flow cross-sectional area according to temperature," at least some of its key structures can be selected to use metals with significant coefficients of thermal expansion (such as copper, aluminum) or thermosensitive shape memory alloys (such as nitinol), so that its volume or shape can automatically change with the sensed temperature change, thereby driving the opening and closing of the entire shrink tube 8 and realizing adaptive flow control.

[0030] It is worth noting that the elastic seal 9 can be made of a shape memory material. After the contraction tube 8 performs contraction, axial, and circumferential movements, it can drive the contraction tube 8 to perform a reset movement. This provides a reliable and automatic reset function for the adaptive adjustment mechanism of the contraction tube 8, ensuring the stability and cyclic controllability of the flow control process. The elastic seal 9 uses a shape memory material (such as a shape memory alloy or polymer), which not only has the basic functions of sealing and elastic connection, but also adds the ability to "remember" the initial shape and recover under specific stimuli. When temperature changes drive the contraction tube 8 to contract, move axially, or move circumferentially to change the flow area, once the temperature returns to normal or the driving force disappears, the elastic seal 9 with shape memory characteristics can automatically generate a restoring force based on its material properties, driving the contraction tube 8 to reset to the initial default opening position. This realizes a complete closed loop in the adjustment process, allowing the system state to automatically recover without external intervention, thereby ensuring the dynamic balance and long-term reliability of flow regulation and avoiding adjustment failure caused by component jamming or drift.

[0031] In one embodiment, such as Figure 3 As shown, the shrink tube 8 includes a surrounding portion 81 and an extension portion 83. The surrounding portions 81 are arranged in a plurality of units and are coupled end to end. The coupling can be understood as the ends of two adjacent surrounding portions 81 abutting at the initial opening. One of any two adjacent surrounding portions 81 has a receiving groove 82 extending circumferentially at its docking portion, and the other has an extension portion 83 at its docking portion. Preferably, the plurality of surrounding portions 81 form a ring structure. The cavity of the receiving groove 82 and the extension portion 83 are both arc-shaped structures in the axial direction. At least a portion of the extension portion 83 is slidably inserted into the receiving groove 82 and can move toward or away from the bottom of the receiving groove 82 to reduce or increase the coolant flow cross-sectional area of ​​the tube cavity of the shrink tube 8.

[0032] This design creates a radially expandable mechanical structure, similar to a "variable aperture," allowing for precise, uniform, and controllable adjustment of the coolant flow channel cross-sectional area. Several end-to-end coupled enclosure sections 81 together form a complete annular or near-annular pipe wall. Each enclosure section 81 has a receiving groove 82, while adjacent enclosure sections 81 have arc-shaped extensions 83 that slide into this receiving groove 82. This groove-and-tenon sliding fit ensures that the enclosure sections 81 can slide relative to each other to change the overall enclosure diameter while maintaining good sealing to prevent coolant leakage. When flow adjustment is needed, the adjacent enclosure sections 81 move relative to each other, causing the extensions 83 to slide towards the bottom (contraction) or away from the bottom (expansion) of the receiving groove 82. This movement directly results in a uniform change in the overall flow cross-sectional area of ​​the central cavity enclosed by all the enclosure sections 81. Such adjustment actions occur synchronously and uniformly along the entire circumference, thereby ensuring the linearity and stability of flow control, avoiding turbulence or pressure fluctuations caused by local deformation or uneven opening and closing, and achieving smooth and precise control of coolant flow.

[0033] In one embodiment, such as Figure 2 and Figure 3 As shown, the semiconductor device based on the waste heat insulation air intake pipe of the hot plate circulating coolant also includes a circumferential rotation drive 10; the purpose of this arrangement is to provide a core mechanical drive and transmission mechanism for the adaptive and automatic adjustment of the flow channel cross-sectional area of ​​the shrink tube 8.

[0034] In one embodiment, such as Figure 2 and Figure 3 As shown, the circumferential rotation drive 10 includes a main body and a connecting part 102. The main body is coaxially disposed inside the third tube 53, and its top extends into the heating chamber and is connected to the tungsten hexafluoride pipe 4. It is preferably a fixed connection. Of course, in other embodiments, it is not limited to a fixed connection, which will not be described in detail here.

[0035] In one embodiment, such as Figure 2 and Figure 3 As shown, one end of the connecting part 102 is connected to the main body and the other end is connected to the enclosure part 81. When the main body undergoes thermal expansion and contraction or rotational movement according to the temperature of the coolant in the tungsten hexafluoride pipe 4 and / or the heating chamber, the connecting part 102 causes any two adjacent enclosure parts 81 to move towards or away from each other, thereby reducing or increasing the coolant flow cross-sectional area of ​​the cavity of the contraction fitting 8.

[0036] This embodiment constructs an automatic control link directly driven by temperature changes and executed by a purely mechanical linkage mechanism. The connecting part 102, acting as a transmission component, cleverly connects the temperature-sensing "main body" with the flow-regulating "enclosure part 81." When the main body undergoes thermal expansion and contraction (axial extension and contraction) or rotational movement due to temperature changes in the tungsten hexafluoride pipe 4 or the coolant in the heating chamber, this physical displacement is converted into a direct force on the adjacent enclosure parts 81 through the pushing, pulling, or rotation of the connecting part 102. This force drives the enclosure parts 81 to either "move towards each other" (moving closer to each other, reducing the central flow cross-sectional area) or "move away from each other" (moving away from each other, increasing the central flow cross-sectional area). This configuration achieves a closed loop from temperature signal to mechanical transmission to flow control, automatically adjusting the coolant flow rate injected into the heating chamber based on real-time temperature without any external power supply or electronic controller. This precisely controls the insulation intensity, ultimately ensuring that the tungsten hexafluoride pipe 4 remains within the ideal temperature range where condensation does not occur.

[0037] In one embodiment, such as Figure 2 and Figure 3 As shown, the main body includes a rotating base 101 and a heat rod conductor 103. The rotating base 101 is coaxially disposed within the third tube 53. The top of the rotating base 101 is recessed into a storage cavity 1011 towards the bottom. The heat rod conductor 103 is at least partially spirally disposed within the storage cavity 1011, and its top extends into the heating chamber and connects to the tungsten hexafluoride pipe 4. A thermally expanding and contracting liquid is stored in the cavity between the bottom of the heat rod conductor 103 and the bottom of the storage cavity 1011. One end of the connecting part 102 is hinged to the side wall of the rotating base 101, and the other end is hinged to the enclosure part 81. When the thermally expanding and contracting liquid receives heat conducted by the heat rod conductor 103 and undergoes thermal expansion and contraction, and when the elastic seal 9 loses external force and undergoes a reset movement, the rotational movement of the rotating base 101 causes any two adjacent enclosure parts 81 to move in opposite directions or towards each other through the connecting part 102.

[0038] This embodiment is based on a highly adaptive precision flow regulation mechanism that converts thermal energy into mechanical energy. Its core utilizes a thermally expanding and contracting liquid as the intermediate medium for sensing and actuation. The heat transfer rod 103 efficiently conducts the temperature of the tungsten hexafluoride pipe 4 to the storage chamber 1011. The thermally expanding and contracting liquid (such as a specific oil or liquid metal) within the chamber expands upon heating, pushing the rotating base 101 downwards and in a rotating motion. This rotational motion, through the hinged connection 102, is converted into a pushing and pulling motion on the enclosure 81, thereby changing the flow area of ​​the contraction fitting 8. When the temperature of the tungsten hexafluoride pipe 4 is high and the insulation requirement is low, the liquid expands significantly, driving the base to rotate and causing the enclosure 81 to move in the opposite direction, reducing the flow area and decreasing the flow rate. When the temperature decreases and the demand increases, the liquid contracts. With the assistance of the restoring force of the elastic seal 9, the rotating base 101 rotates in the opposite direction, and the enclosure 81 moves away, increasing the flow rate and enhancing heating. This setup creates a completely temperature-triggered, purely mechanical closed-loop feedback system that automatically and precisely adjusts the insulation intensity based on the actual temperature of the pipeline without requiring external energy or control signals, maximizing energy savings while ensuring condensation prevention.

[0039] In this embodiment, as the thermally expanding and contracting liquid undergoes volume changes due to temperature variations, the spiral engagement structure between the heat transfer rod 103 and the inner wall of the storage cavity 1011 plays a crucial guiding and transmission role. When the thermally expanding liquid is heated, it pushes the heat transfer rod 103 to generate axial displacement along the spiral path. Since the heat transfer rod 103 is connected to the tungsten hexafluoride pipe 4, this axial displacement is converted into a downward rotational motion of the rotating base 101 along the thread direction. Conversely, when the thermally expanding and contracting liquid cools and contracts, with the assistance of the reset force of the elastic seal 9, the rotating base 101 can rotate and reset in the opposite direction (upward) along the thread. This "spiral to rotation" mechanical conversion mechanism ensures that the driving process is smooth and continuous, avoiding friction jamming or motion stagnation problems that occur when components move in a single direction (such as purely axial). By converting volume change into rotational motion, the equipment can evenly distribute the driving force, making the opening and closing adjustment of the shrink tube 8 smoother and more reliable. This effectively prevents mechanical jamming of the system under long-term temperature cycling and ensures the long-term stable operation of the adaptive flow regulation function.

[0040] In one embodiment, such as Figure 2As shown, an elastic heat insulation element 11 (which can be an elastic heat insulation sleeve) is fixedly sleeved on the outside of the heat transfer rod 103, and the bottom of the elastic heat insulation element 11 abuts against the top of the rotating base 101. The top of the elastic heat insulation element 11 extends at least partially into the heating chamber. The elastic heat insulation element 11 ensures that the rotating base 101 and the heat transfer rod 103 are sealed at the opening of the storage chamber 1011, while also ensuring that the heat transfer rod 103 can transfer the temperature of the tungsten hexafluoride pipe 4 and / or the coolant in the heating chamber to the storage chamber 1011 without loss. This embodiment cleverly solves the potential contradiction between temperature conduction and structural sealing and motion isolation. The elastic thermal insulation element 11 (e.g., made of low thermal conductivity, highly elastic silicone or flexible ceramic fiber material) serves as a flexible seal, forming a reliable dynamic seal between the rotating base 101 and the heat transfer rod 103. This effectively prevents leakage of the thermally expanding and contracting liquid in the storage cavity 1011 due to the movement of the rotating base 101, ensuring the airtightness and long-term stability of the drive mechanism. Furthermore, due to its elasticity and thermal insulation properties, while providing a good seal, its low thermal conductivity significantly reduces radial heat loss in the heat transfer rod 103 during temperature conduction to the storage cavity 1011, and its flexibility does not impede the axial or rotational movement of the rotating base 101. This allows the heat transfer rod 103 to maintain close contact with the tungsten hexafluoride pipe 4 or the cooling fluid in the heating chamber, thereby transmitting temperature changes to the thermally expanding and contracting liquid in the storage cavity 1011 with almost no loss and high fidelity. This ensures the accuracy and sensitivity of temperature sensing, and consequently guarantees the precise response and reliable operation of the entire adaptive flow control system.

[0041] Preferably, the top of the elastic heat insulation element 11 is fixedly connected to or abuts against the tungsten hexafluoride pipe 4.

[0042] In one embodiment, the main body includes a first sub-main body and a second sub-main body fixedly connected. The second sub-main body is fixedly connected to the connecting part 102. One end of the connecting part 102 away from the second sub-main body abuts against the enclosure part 81. The second sub-main body is made of a material that expands and contracts with temperature, so that when its volume increases or decreases according to temperature changes, the coolant flow cross-sectional area of ​​the cavity of the shrinkage tube 8 is increased by the pushing of the connecting part 102, or the coolant flow cross-sectional area of ​​the cavity of the shrinkage tube 8 is decreased by the reset movement of the elastic seal 9.

[0043] This embodiment provides a simpler and more direct purely mechanical drive scheme based on the principle of thermal expansion and contraction. The design consists of a first sub-body (providing structure and fixed support) and a second sub-body made of a thermally expandable and contractible material (serving as the core temperature-sensing and drive element). When the temperature of the tungsten hexafluoride pipe 4 or the coolant in the heating chamber changes, the volume of the second sub-body increases or decreases accordingly. When it expands, it pushes the enclosure 81 outwards directly through the fixedly connected connecting part 102, separating them and increasing the flow cross-sectional area of ​​the contraction fitting 8, allowing more heated coolant to flow in to enhance heating. Conversely, when the temperature decreases and the volume of the second sub-body contracts, its thrust on the connecting part 102 disappears. At this time, the elastic seal 9's own restoring force pulls the enclosure 81 back, reducing the flow cross-sectional area and thus decreasing the coolant flow rate. This combination of "thermal expansion drive and elastic reset" eliminates the need for complex rotation or threaded structures. It utilizes the physical properties of the material itself to achieve linear conversion of temperature and displacement and bidirectional, automatic regulation of flow rate. The structure is simple, reliable, and has a direct response.

[0044] In one embodiment, both the first sub-body portion and the second sub-body portion can be cylindrical structures; the connecting portion 102 is a rod-shaped structure, or it can be cylindrical. Of course, in other embodiments, it is not limited to a cylindrical structure, which will not be elaborated here.

[0045] In one embodiment, such as Figure 2As shown, a heat pipe conductor 12 is connected to the top of the main body. The heat pipe conductor 12 is fixedly sleeved on the outside of the tungsten hexafluoride pipe 4, and the heat pipe conductor 12 at least partially covers the orthographic projection structure of the third pipe section 53 on the orthographic projection structure of the heating pipe 6, so that the main body can accurately receive the temperature on the tungsten hexafluoride pipe 4. This embodiment provides an efficient and directional temperature conduction structure, ensuring the accuracy and rapid response of temperature sensing of the tungsten hexafluoride pipe 4, thereby improving the accuracy and efficiency of the entire adaptive flow control system. The heat pipe conductor 12 is fixedly sleeved on the outside of the tungsten hexafluoride pipe 4, directly contacting the outer wall of the pipe over a large area, and can efficiently capture and conduct the actual temperature of the pipe wall. Its ingenuity lies in the fact that it at least partially covers the orthographic projection structure of the third pipe section 53 on the orthographic projection structure of the heating pipe 6. This means that the heat pipe conductor 12 not only directly senses the temperature of the third pipe section 53, but its position and structure are also "aligned" with the inlet area of ​​the coolant injection. In this way, it monitors precisely the temperature of the critical pipe section that is about to be heated or is being heated by the coolant flow, providing a more accurate and direct reflection of the actual insulation requirements and heating effect of the pipe. This precise temperature signal is transmitted to the main body via a conductive component, avoiding control deviations caused by poor sensing point location (such as monitoring the coolant temperature within the heating chamber, which suffers from hysteresis and thermal uniformity issues). This allows the main body and its drive mechanism to make more precise and sensitive adjustments to changes in pipe temperature, thereby optimizing the automatic regulation of coolant flow.

[0046] At the same time, this arrangement can cover a larger area of ​​the tungsten hexafluoride pipe 4, thereby transferring more heat from the tungsten hexafluoride pipe 4 to the main body, making the movement of the equipment more precise and timely.

[0047] In one embodiment, the number of heat pipe conductive elements 12 corresponds one-to-one with the number of third pipe sections 53, and preferably, the structure and material of several heat pipe conductive elements 12 are the same.

[0048] In one embodiment, the heat pipe conductor 12 can be made of a metal material with high thermal conductivity, good mechanical strength, and corrosion resistance. Since it needs to be fixedly sleeved outside the tungsten hexafluoride pipe 4 and in close contact with the wall of the tungsten hexafluoride pipe 4 for efficient temperature conduction, and is also connected to the top of the main body, copper, aluminum and their alloys with excellent thermal conductivity, or stainless steel with sufficient strength and corrosion resistance are preferred.

[0049] It is worth noting that in the above embodiment, by controlling the flow rate of coolant flowing through each third pipe section 53 (i.e., each injection point), it can be ensured that the coolant temperature injected into the heating chamber from multiple injection points axially distributed from the second pipe section 52, or the coolant temperature in the heating chamber at the corresponding injection point, is nearly uniform. This fundamentally guarantees that the coolant flowing in the heating chamber provides a uniform and stable heating effect along the entire axial length of the tungsten hexafluoride pipe 4. If the coolant temperature or flow rate at each injection point differs significantly, the heating intensity in different areas of the tungsten hexafluoride pipe 4 will be uneven. Locally low temperatures will still cause tungsten hexafluoride condensation, while locally high temperatures will result in wasted heat energy. Therefore, achieving uniform injection temperature at multiple points through precise flow control is key to achieving efficient, reliable, and uniform pipe insulation.

[0050] Of course, as the coolant flows axially within the heating chamber and continuously heats the tungsten hexafluoride pipe 4, its own temperature gradually decreases due to heat transfer to the pipe 4. This results in a temperature gradient: in the region near the gas holder (i.e., the coolant inlet), the coolant temperature is relatively high, and its heating capacity for the tungsten hexafluoride pipe 4 is stronger; while in the region near the process chamber 1 (i.e., the coolant flow end), the coolant temperature has decreased due to heat release, and its heating capacity for the tungsten hexafluoride pipe 4 is correspondingly weakened. If this temperature gradient is not effectively managed, it will lead to uneven axial heating of the tungsten hexafluoride pipe 4, and the section of the tungsten hexafluoride pipe 4 near the process chamber 1 will be at risk of condensation due to insufficient temperature. To address this issue, the present invention optimizes the temperature distribution of the coolant in the heating chamber by setting multiple axially distributed coolant injection points (third pipe section 53) and combining them with a shrink tube 8 structure that can adaptively adjust the flow rate of each injection point. This ensures that the tungsten hexafluoride pipe 4 obtains a uniform and sufficient heating effect in the axial direction, and avoids insufficient local heat preservation caused by the temperature drop of the coolant itself.

[0051] In one embodiment, the semiconductor device based on the waste heat insulation of the hot-stage circulating coolant intake pipe can be used in various devices requiring precise temperature management of process gas pipelines (especially pipelines transporting easily liquefied gases such as tungsten hexafluoride). For example, the system is suitable for etching equipment to maintain the gaseous state of etching gases (such as tungsten hexafluoride) during transport and prevent condensation; it is suitable for deposition equipment (such as tungsten chemical vapor deposition CVD equipment) to utilize the waste heat of the coolant in the hot stage 2 to insulate the precursor gas pipeline; it is also suitable for resist stripping equipment in processes that require the use of specific gases and need to prevent their condensation in the pipeline.

[0052] While embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of the present invention. Furthermore, the present invention described herein may have other embodiments and can be implemented or carried out in various ways.

Claims

1. A semiconductor device based on a hot-plate circulating coolant waste heat insulation inlet air pipe, characterized in that, This includes process chambers, coolant sources, connecting pipes, and heating pipes; The process chamber is equipped with a hot stage, and a tungsten hexafluoride pipe is installed on the process chamber. The free end of the tungsten hexafluoride pipe is connected to a gas holder, and the gas holder introduces tungsten hexafluoride gas into the process chamber through the tungsten hexafluoride pipe. The heating element is sleeved outside the tungsten hexafluoride pipe and forms a closed heating chamber between its inner wall and the outer wall of the tungsten hexafluoride pipe. One end of the connecting pipe is located on the heating platform and communicates with the coolant channel in the heating platform; the other end of the connecting pipe is located on the heating pipe and communicates with the heating chamber. The outlet end of the coolant source is connected to the coolant channel, and the inlet end of the coolant source is connected to the heating chamber. The coolant output by the coolant source at a first temperature flows through the coolant channel through the heating platform and exchanges heat with the heating platform to rise to a second temperature. The heated coolant flows into the heating chamber through the connecting pipe and heats the tungsten hexafluoride pipe in the heating chamber to prevent the tungsten hexafluoride in the tungsten hexafluoride pipe from condensing. The connecting pipe fitting includes a first pipe section, a second pipe section, and a third pipe section; The second pipe section is disposed outside the heating pipe and extends along the axial direction of the heating pipe. The second pipe section communicates with the coolant channel through the first pipe section. The third pipe section is disposed between the second pipe section and the heating pipe and communicates with the cavity of the second pipe section and the heating chamber. The third tube section is coaxially provided with a shrink tube, and an elastic seal is provided between the outer wall of the shrink tube and the inner wall of the third tube section. The elastic seal connects the shrink tube and the third tube section and is used for sealing between the two. The shrink tube adaptively adjusts the coolant flow cross-sectional area of ​​its cavity according to the temperature on the tungsten hexafluoride pipe to control the flow rate of the coolant. The shrink tube includes a retaining portion and an extension portion. The retaining portion is provided in a plurality of such portions and is coupled end to end. The docking portion of one of any two adjacent retaining portions is provided with a receiving groove extending in the circumferential direction, and the docking portion of the other is provided with an extension portion. At least part of the extension portion is slidably inserted into the receiving groove and can move toward or away from the bottom of the receiving groove to reduce or increase the coolant flow cross-sectional area of ​​the shrink tube. It also includes a circumferential rotation drive, which includes a main body and a connecting part. The main body is coaxially disposed inside the third tube section, and its top extends into the heating chamber and is connected to the tungsten hexafluoride pipe. One end of the connecting part is connected to the main body and the other end is connected to the enclosure section. When the main body rotates according to the temperature on the tungsten hexafluoride pipe, the connecting part causes any two adjacent enclosure sections to move towards or away from each other, thereby reducing or increasing the coolant flow cross-sectional area of ​​the tube cavity of the shrink tube. The main body includes a rotating base and a heat-conducting rod. The rotating base is coaxially disposed within the third tube. The top of the rotating base is recessed into a storage cavity towards the bottom. The heat-conducting rod is at least partially spirally disposed within the storage cavity, and its top extends into the heating chamber and connects to the tungsten hexafluoride pipe. A thermally expanding and contracting liquid is stored in the cavity between the bottom of the heat-conducting rod and the bottom of the storage cavity. One end of the connecting part is hinged to the side wall of the rotating base, and the other end is hinged to the enclosure part. When the thermally expanding and contracting liquid receives heat conducted by the heat-conducting rod and undergoes thermal expansion and contraction, and when the elastic seal loses external force and undergoes a reset movement, the rotational movement of the rotating base causes any two adjacent enclosure parts to move towards or away from each other through the connecting part. The heat transfer rod efficiently conducts the temperature of the tungsten hexafluoride pipe to the storage chamber. The thermally expanding liquid in the chamber expands upon heating, pushing the rotating base downwards and rotating. This rotational motion, through the hinged connection, is converted into a push-pull action on the enclosure, thereby changing the flow area of ​​the contraction fitting. When the temperature of the tungsten hexafluoride pipe is high and the insulation requirement is low, the liquid expands significantly, driving the base to rotate and causing the enclosure to move in the opposite direction, reducing the flow area and decreasing the flow rate. When the temperature decreases and the demand increases, the liquid contracts. With the assistance of the restoring force of the elastic seal, the rotating base rotates in the opposite direction, and the enclosure moves away, increasing the flow rate and enhancing heating.

2. The semiconductor device based on the waste heat insulation and air intake pipe of the hot-plate circulating coolant according to claim 1, characterized in that, The number of the third tubes is provided in a plurality of them, and the plurality of the third tubes are arranged at intervals along the axial direction of the second tubes to form a plurality of coolant inlets flowing into the heating chamber in the axial direction of the heating tube.

3. The semiconductor device based on the waste heat insulation and air intake pipe of the hot-plate circulating coolant according to claim 1, characterized in that, An elastic heat insulation element is fixedly sleeved on the outside of the heat rod conductor, and the bottom of the elastic heat insulation element abuts against the top of the rotating base. The top of the elastic heat insulation element extends at least partially into the heating chamber. While ensuring that the rotating base and the heat rod conductor are sealed at the opening of the storage chamber, the elastic heat insulation element ensures that the heat rod conductor can conduct the temperature on the tungsten hexafluoride pipe to the storage chamber without loss.

4. The semiconductor device based on the waste heat insulation and air intake pipe of the hot-plate circulating coolant according to claim 1, characterized in that, A heat pipe conductor is connected to the top of the main body. The heat pipe conductor is fixedly sleeved outside the tungsten hexafluoride pipe, and the heat pipe conductor at least partially covers the orthographic projection structure of the third pipe section in the orthographic projection structure of the heating pipe in the heating pipe, so that the main body can accurately receive the temperature on the tungsten hexafluoride pipe.

Images