A single crystal furnace and a method for pulling a single crystal from a single crystal furnace

By compensating for surface tension and fluid drag force interference in the single crystal furnace weighing system through visual measurement and temperature monitoring, high-precision crystal diameter control was achieved, solving the problem of weighing signal distortion in existing technologies and improving production stability and economic efficiency.

CN122105602APending Publication Date: 2026-05-29XIAN ESWIN MATERIAL TECHNOLOGY CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
XIAN ESWIN MATERIAL TECHNOLOGY CO LTD
Filing Date
2026-03-06
Publication Date
2026-05-29

AI Technical Summary

Technical Problem

Existing single crystal furnace weighing systems suffer from distorted weighing signals and low crystal diameter control accuracy due to neglecting the surface tension and adhesion of the molten molten material, the change of surface tension coefficient with temperature, and the interference of hydrodynamic drag force. This is especially prone to control errors and material waste during the shoulder formation and finishing stages.

Method used

A visual measurement unit is used to capture real-time images of the interface between the crystal rod and the molten liquid. Combined with a temperature monitoring unit and a weighing unit, the controller calculates the real weight signal of the crystal rod in real time, compensating for surface tension and fluid drag force interference, and achieving multi-physics field decoupling.

Benefits of technology

It significantly improves weighing accuracy and process stability, reduces wire breakage rate and crystal defects, saves silicon material costs, and improves production efficiency.

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Abstract

The present disclosure provides a single crystal furnace and a single crystal furnace pulling method, belonging to the technical field of semiconductor crystal growth equipment. The single crystal furnace comprises a furnace body, a pulling mechanism arranged above the furnace body, a controller, a weighing unit, a visual measurement unit and a temperature monitoring unit. The weighing unit is used to detect the original pulling force signal borne by the suspension component; the visual measurement unit is used to shoot the image of the contact interface between the crystal bar and the melt, and output the crystal bar diameter signal based on the image; the temperature monitoring unit is used to detect the temperature signal of the melt surface; the controller is electrically connected with the weighing unit, the visual measurement unit and the temperature monitoring unit respectively, and is configured to obtain the real weight signal of the crystal bar based on the original pulling force signal, the crystal bar diameter signal and the temperature signal. Through comprehensive measurement and correction, the present disclosure can accurately obtain the real weight of the crystal bar, and provide a reliable basis for the control of the crystal pulling process.
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