Multi-stage rotor synchronous transmission mechanism of vacuum pump

Abstract

This invention discloses a multi-stage rotor synchronous transmission mechanism for a vacuum pump, comprising a vacuum pump housing, cover plates, rotor modules, rotor bodies, connecting shafts, universal joints, partitions, and cooling components. Cover plates are fixed to both ends of the vacuum pump housing, sealing them together to form a vacuum chamber. Rotor modules are installed within the chambers, and these modules achieve synchronous reverse rotation via a drive module. The rotor assembly comprises multiple rotor bodies, with connecting shafts passing through them and connected by connecting components. The connecting shafts of adjacent rotor bodies are connected via universal joints. Multiple partitions within the housing separate protective cavities, with the rotor assembly passing through the partitions and the universal joints placed within these protective cavities. The housing also includes a cooling component. This invention employs a split shaft design, utilizing universal joints to offset shaft errors and deformation transmission, ensuring rotor coaxiality, reducing high-speed sway and axial movement, and facilitating the disassembly and maintenance of individual rotor bodies, thereby improving the mechanism's operational stability and service life.

Description

Technical Field

[0001] This invention belongs to the field of vacuum pump technology, and more specifically, relates to a multi-stage rotor synchronous transmission mechanism for vacuum pumps. Background Technology

[0002] The multi-stage rotor synchronous transmission mechanism of a vacuum pump is the core structure of a dry vacuum pump. It mainly achieves gas intake, compression and discharge through the synchronous counter-rotation of two sets of rotors. Its transmission stability and service life directly determine the pumping efficiency and ultimate vacuum of the vacuum pump. It is widely applicable to industries such as semiconductors and photovoltaics that have high requirements for vacuum environment and operational reliability.

[0003] In the prior art, in order to achieve synchronous transmission of multiple rotor bodies, the multiple rotor bodies in the traditional rotor group are usually fixedly mounted on an integral shaft, and all rotor bodies are driven to operate synchronously by the overall rotation of the shaft.

[0004] However, when the shaft exhibits machining errors, assembly deviations, or deformation after long-term operation, these defects are directly transmitted to all rotor bodies, making it difficult to guarantee the coaxiality of multiple rotor bodies. This can easily lead to friction or uneven clearance between the rotor body and the inner wall of the vacuum pump, affecting gas compression efficiency. At the same time, the length of the integral shaft increases with the number of rotor bodies, making its rigidity susceptible to damage. During high-speed rotation, radial runout and axial movement are prone to occur, exacerbating component wear. Furthermore, if a rotor body malfunctions and requires repair or replacement, the entire shaft and all rotor bodies must be disassembled together, which is cumbersome and time-consuming, increasing maintenance difficulty and costs. Summary of the Invention

[0005] To address the shortcomings of existing technologies, this invention provides a multi-stage rotor synchronous transmission mechanism for vacuum pumps. This solves the problems of poor coaxiality, severe wear and tear, and cumbersome maintenance associated with traditional integral shaft transmissions.

[0006] To achieve the above objectives, the present invention provides the following technical solution: A multi-stage rotor synchronous transmission mechanism for a vacuum pump includes: The vacuum pump housing and the cover plate are provided at both ends of the vacuum pump housing, and the two are connected to form a vacuum chamber; The rotor module is installed inside the vacuum chamber. The rotor module includes a mounting frame and two sets of rotors. Both sets of rotors are installed on the mounting frame and rotate synchronously through a drive module. The rotor assembly includes a rotor body and a connecting shaft. Each rotor body is provided with a connecting shaft, which is connected to the rotor body through a connecting assembly. The connecting shafts of adjacent rotor bodies are connected by a universal joint. The vacuum pump housing is provided with multiple sets of partitions, which separate multiple sets of protective chambers within the vacuum chamber. The rotor assembly passes through the multiple sets of partitions, and each universal joint is located in one of the protective chambers. A cooling component is installed on the vacuum pump housing and is used to dissipate heat and cool the vacuum chamber and its internal components.

[0007] According to a preferred embodiment, the driving module includes: The driving gear and driven gear are arranged vertically, with the driving gear mounted on one set of rotors and the driven gear mounted on the other set of rotors. The two sets of rotors are meshed with each other while a gap is provided between them. Both the driving gear and the driven gear are magnetic structures with the same magnetic poles. The driving gear and the driven gear repel each other in the meshing position. The drive motor is mounted on one end of the vacuum pump housing, and the shaft end of the drive motor is connected to the drive gear.

[0008] According to a preferred embodiment, the driving module further includes: The rotating shaft has end plates at both ends of the mounting frame, and the rotating shaft is rotatably connected to the end plates. The two rotating shafts are respectively connected to the connecting shaft on the outermost rotor body of the rotor assembly. A transmission sleeve is provided at one end of the rotating shaft. Both the driving gear and the driven gear are provided with annular grooves. One end of the rotating shaft is provided as a transmission end. The transmission end passes through the driving gear and is connected to the shaft end of the driving motor. The transmission sleeve is inserted into the annular groove. The ring groove is further provided with multiple sets of limiting blocks. The transmission sleeve is provided with a limiting groove corresponding to the limiting block. The limiting block is locked in the limiting groove. The drive motor drives the rotating shaft to rotate. The rotating shaft drives the drive gear to rotate through the transmission sleeve.

[0009] According to a preferred embodiment, the outer side of the end plate contacts the inner side of the cover plate, and both the cover plate and the end plate are provided with sealing rings; The sealing ring provided on the cover plate is located at the inner edge of the cover plate and is sandwiched between the vacuum pump housing and the cover plate; The sealing ring provided on the end plate is located around the end plate and is sandwiched between the vacuum pump housing and the end plate; A heat-conducting pipe is provided on the side of the partition facing the protective cavity, and the heat-conducting pipe is connected to the cooling component through a conduit.

[0010] According to a preferred embodiment, the connecting assembly includes multiple sets of connecting rods disposed on the connecting shaft, and the rotor body has a connecting through hole corresponding to each of the connecting rods, with the connecting rods passing through the connecting through holes; The connecting assembly also includes a limiting component and a sealing valve. The connecting rod is hollow and the limiting component is provided on the connecting rod. The sealing valve is provided at one end of the connecting rod. Hydraulic oil can be injected or extracted into the connecting rod through the sealing valve to make the connecting rod in a locked or unlocked state. The rotor body has a limiting hole corresponding to the limiting member. When the connecting rod is in the locked state, the connecting rod is filled with hydraulic oil. The injected hydraulic oil pushes the limiting member part to extend out of the connecting rod and into the limiting hole. When the connecting rod is in the unlocked state, and the connecting rod is not filled with hydraulic oil, the limiting member retracts into the connecting rod. The limiting members on the multiple sets of connecting rods are all arranged to protrude upwards.

[0011] According to a preferred embodiment, the multi-stage rotor synchronous transmission mechanism of the vacuum pump further includes: The vacuum pump housing has a housing cover and a partition plate. The housing cover is provided at both ends of the vacuum pump housing. The housing cover covers the outside of the cover plate, and the partition plate is provided inside the housing cover. A first partition cavity is formed between one side of the partition plate and the cover plate. The cover plate is provided on one side of the outer casing, and a second partition cavity is formed between the other side of the partition plate and the cover plate. The drive gear and the driven gear are both located in the first partition cavity. The drive motor is mounted on the cover plate, and the shaft end of the drive motor extends through the second partition cavity into the first partition cavity and is connected to the drive gear.

[0012] According to a preferred embodiment, the cooling component includes a fan impeller and a first airbag. The fan impeller is located in the second partition cavity and is sleeved on the shaft end of the drive motor. An air outlet is provided on the cover plate. The first airbag is inserted into the air outlet and communicates with the second partition cavity. The fan impeller is driven to rotate by the drive motor, thereby blowing gas into the second partition cavity. The gas enters the first airbag so that the first airbag is in an inflated state. The first airbag is H-shaped and has multiple exhaust zones. The vacuum pump housing has multiple cooling zones on both sides, and the number of cooling zones is the same as the number of exhaust zones. The exhaust zone is provided with multiple sets of air outlets, and the cooling zone is provided with multiple sets of cooling channels, which are close to the inner wall of the vacuum pump housing.

[0013] According to a preferred embodiment, the cooling component further includes: Gas detection element, multiple sets of gas detection elements are provided at the other end of the vacuum pump housing, the gas detection elements are installed in the second partition cavity, the cooling channel in the same cooling zone is connected to the gas outlet in the same exhaust zone and the same set of gas detection elements; The gas detection device includes a detection shell, a detection cover plate, and a second airbag. The detection shell is T-shaped and divided into a vertical section and a horizontal section. The detection cover plate covers the detection shell and together with the detection shell, forms a detection cavity. The detection cavity is located in the vertical section, and the second airbag is located in the horizontal section and extends along the horizontal section. The detection cavity is connected to multiple sets of cooling channels and the second airbag. The cooling component also includes an observation plate and a positioning plate. The observation plate is provided at one end of the second airbag, and the positioning plate is provided at one end of the detection shell. A compression structure for driving the observation plate back to its original position is provided between the observation plate and the positioning plate.

[0014] According to a preferred embodiment, the observation plate is provided with a colored coating on its periphery, and the detection housing has an observation groove in the horizontal section for observing the displacement of the observation plate; The detection housing is provided with an exhaust section for discharging excess gas from the detection chamber, and one set of the cover plates is provided with an observation window for observing the status of the gas detection element.

[0015] According to a preferred embodiment, multiple sets of air inlet pipes and multiple sets of air outlet pipes are respectively provided on both sides of the vacuum pump housing, and each air inlet pipe and each air outlet pipe corresponds to the rotor body. Both the air inlet pipe and the air outlet pipe are equipped with dustproof nets, and the dustproof nets in the air inlet pipe are cone-shaped.

[0016] Compared with the prior art, the present invention provides a multi-stage rotor synchronous transmission mechanism for a vacuum pump, which has the following advantages: 1. This application adopts a split shaft design, which splits a single integral shaft into connecting shafts corresponding to individual rotor bodies. Adjacent connecting shafts are flexibly connected by universal joints, which can effectively offset the transmission effects of shaft machining errors, assembly deviations, and long-term operational deformation, preventing errors from being transmitted to all rotor bodies, ensuring the coaxiality of each rotor body, preventing friction and uneven clearance between the rotor body and the inner wall of the vacuum pump, and stabilizing gas compression efficiency. At the same time, the split connecting shaft combined with the universal joint structure can weaken the defects of insufficient rigidity of long shafts, reduce radial runout and axial movement during high-speed operation of the rotor assembly, and reduce additional wear of components. Furthermore, the rotor body and connecting shaft are assembled through independent connecting components. When a single rotor body fails and needs repair or replacement, it is not necessary to disassemble the entire shaft assembly and the remaining rotors, simplifying disassembly and assembly operations, significantly reducing maintenance difficulty and time costs, and adapting to the long-term stable operation requirements of multi-stage rotors.

[0017] 2. The hydraulically controlled connection components enable quick locking and unlocking of the rotor body and the connecting shaft. In case of a single rotor body failure, the entire shaft can be repaired and replaced without disassembling it, greatly reducing maintenance difficulty and cost. The two-stage sealing structure enhances the sealing performance of the vacuum chamber. The cooling components, through the cooperation of the fan impeller, heat pipe and cooling channel, achieve precise heat dissipation of the vacuum chamber and internal components, extending the service life of the mechanism.

[0018] 3. The dustproof nets inside the inlet and outlet pipes can prevent impurities from entering the vacuum chamber. The conical dustproof nets improve the filtration effect without obstructing gas flow. The gas detection component can intuitively monitor the airflow status through the linkage between the second airbag and the observation plate, making it easy to detect faults in a timely manner. Combined with the partitioned exhaust and cooling zones, heat dissipation and detection are more targeted, comprehensively improving the practicality and reliability of the mechanism. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of a multi-stage rotor synchronous transmission mechanism for a vacuum pump in one embodiment of this application. Figure 2 This is an exploded schematic diagram of a multi-stage rotor synchronous transmission mechanism for a vacuum pump in one embodiment of this application. Figure 3 This is a schematic diagram of the rotor module of a multi-stage rotor synchronous transmission mechanism for a vacuum pump in one embodiment of this application. Figure 4 This is an exploded schematic diagram of the rotor module of a multi-stage rotor synchronous transmission mechanism for a vacuum pump in one embodiment of this application. Figure 5 This is a schematic diagram of the structure of the vacuum pump multi-stage rotor synchronous transmission mechanism after the outer casing and the first airbag are separated in one embodiment of this application; Figure 6This is a schematic diagram of the structure of the vacuum pump multi-stage rotor synchronous transmission mechanism after the outer casing and gas detection element are separated in one embodiment of this application; Figure 7 This is an exploded schematic diagram of the gas detection element of a multi-stage rotor synchronous transmission mechanism for a vacuum pump in one embodiment of this application. Figure 8 This is a front view of the rotor body of a multi-stage rotor synchronous transmission mechanism for a vacuum pump according to one embodiment of this application. Figure 9 for Figure 8 A partial cross-sectional view of region AA in the middle; Figure 10 This is a front view of a multi-stage rotor synchronous transmission mechanism for a vacuum pump according to an embodiment disclosed in this application; Figure 11 for Figure 10 Cross-sectional view of the BB region; Figure 12 This is a front view of the vacuum pump housing of a multi-stage rotor synchronous transmission mechanism for a vacuum pump according to an embodiment of this application. Figure 13 for Figure 12 Cross-sectional view of the CC region; Figure 14 This is a schematic diagram of the drive gear of a multi-stage rotor synchronous transmission mechanism for a vacuum pump in one embodiment of this application. Figure 15 for Figure 4 A magnified view of a portion of region a; Figure 16 This is an exploded schematic diagram of the drive gear and driven gear of a multi-stage rotor synchronous transmission mechanism for a vacuum pump in one embodiment of this application. Figure 17 This is a schematic diagram of the cover plate of the multi-stage rotor synchronous transmission mechanism of a vacuum pump in one embodiment of this application; Figure 18 This is a schematic diagram of the end plate of the multi-stage rotor synchronous transmission mechanism of a vacuum pump in one embodiment of this application; Figure 19 for Figure 4 A magnified view of a portion of region b.

[0020] In the diagram, the correspondence between component names and their corresponding reference numerals is as follows: 11. Vacuum pump housing; 12. Cover plate; 13. Inlet pipe; 14. Outlet pipe; 15. Dustproof net; 16. Cooling channel; 17. Sealing ring; 201. Mounting bracket; 202. Rotor body; 203. Connecting shaft; 204. Universal joint; 205. Rotating shaft; 206. End plate; 207. Transmission sleeve; 208. Annular groove; 209. Limiting block; 210. Limiting groove; 211. Partition plate; 212. Heat pipe; 213. Connecting rod; 214. Connecting through hole; 215. Limiting component; 216. 31. Sealing valve; 32. Drive gear; 33. Drive motor; 41. Outer casing; 42. Partition plate; 43. Cover plate; 44. Air outlet; 51. Fan impeller; 52. First airbag; 53. Air outlet; 61. Detection casing; 62. Detection cover plate; 63. Second airbag; 64. Observation plate; 65. Positioning plate; 66. Observation slot; 71. Gear body; 72. Fixing plate; 73. Magnetic repulsion ring; 74. First partition cavity; 75. Second partition cavity; 81. Compression rod; 82. Compression spring. Detailed Implementation

[0021] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0022] Please see Figure 1-4 as well as Figure 16 As shown, the multi-stage rotor synchronous transmission mechanism of the vacuum pump includes a rotor module, a vacuum pump housing 11, and a cover plate 12. The vacuum pump housing 11 is a hollow cavity structure, serving as the basic mounting carrier for the entire transmission mechanism and providing mounting support for each component. At the same time, cover plates 12 are provided at both axial ends of the vacuum pump housing 11. The connection between the vacuum pump housing 11 and the cover plates 12 forms a sealed vacuum chamber. This vacuum chamber provides a closed working space for the intake, compression, and exhaust of gas. The rotor module is installed entirely inside the vacuum chamber to achieve gas compression.

[0023] The rotor module includes a mounting frame 201 and two rotor sets. The mounting frame 201 is a rigid frame structure and is set inside the vacuum chamber. It serves as the mounting base for the two rotor sets and provides stable mounting positioning for the rotor sets. Both rotor sets are rotatably mounted on the mounting frame 201 and are connected to each other through a drive module. The drive module enables the two rotor sets to rotate synchronously in opposite directions, which is the core actuator for realizing gas compression.

[0024] The rotor assembly includes multiple rotor bodies 202, all of which are housed within the internal space of the mounting frame 201. The rotor bodies 202 are arranged at equal intervals along the length of the mounting frame 201. Corresponding rotor bodies 202 in two rotor assemblies are arranged opposite each other. The cooperating rotor bodies 202 rotate synchronously in opposite directions, which can perform staged intake and compression of gas in the vacuum chamber, enabling the vacuum pump to perform multi-stage compression of the intake gas. The multiple equally spaced rotor bodies 202 can improve the gas compression efficiency and adapt to the pumping requirements of the vacuum pump.

[0025] A connecting shaft 203 is installed at the central axis of the rotor body 202. The connecting shaft 203 is a rigid shaft structure and serves as the mounting and transmission carrier for the rotor body 202. The connecting shaft 203 is connected to the rotor body 202 through a connecting assembly to achieve a fixed fit between the connecting shaft 203 and the rotor body 202, so that the rotation of the connecting shaft 203 can drive the rotor body 202 to rotate synchronously. The connecting shafts 203 corresponding to two adjacent rotor bodies 202 are connected by a universal joint 204. The universal joint 204 serves as a transmission connector between the connecting shafts 203, enabling power transmission between adjacent connecting shafts 203 and driving adjacent rotor bodies 202 to rotate synchronously. At the same time, the universal joint 204 can generate flexible radial and axial compensation displacement, which can adaptively compensate for the radial runout deviation generated by multiple sets of rotor bodies 202 during processing and assembly, as well as the axial displacement deviation caused by temperature rise deformation during vacuum pump operation, ensuring the transmission stability of multiple sets of rotor bodies 202.

[0026] Meanwhile, the universal joint 204 allows adjacent connecting shafts 203 to transmit torque normally even when there is axial offset or angular deviation. It prevents transmission jamming due to assembly errors or deformations that occur after the multi-stage rotor bodies 202 are connected in series, maintains continuous transmission of the entire rotor group during operation, reduces additional stress between transmission components, and extends the overall service life of the rotor group.

[0027] Two sets of partitions 211 are provided between adjacent rotor bodies 202. The partitions 211 are fixedly connected to the mounting bracket 201. The partitions 211 are arranged close to the rotor bodies 202 and a gap is maintained between them and the outer surface of the rotor bodies 202. This gap can prevent friction between the rotor bodies 202 and the partitions 211 when they rotate, and at the same time, it can separate the rotation area of ​​the rotor bodies 202.

[0028] Both sets of rotors pass through the partition 211. The outer edge of the partition 211 contacts the inner wall of the vacuum pump housing 11, and the contact points are sealed to ensure the airtightness of the partition area. The two sets of partitions 211, together with the vacuum pump housing 11 and the mounting bracket 201, divide the vacuum chamber into independent protective cavities, and the universal joint 204 is completely arranged inside the protective cavity. The protective cavity completely isolates the gas compression working area of ​​the universal joint 204 from that of the rotor body 202, reducing the interference of the rapid gas flow during compression on the operation of the universal joint 204. At the same time, it prevents tiny impurities that may be carried in the gas from contacting the connecting shaft 203 connected to the universal joint 204, reducing the probability of wear on the connecting shaft 203. In addition, the protective cavity also prevents fragments from flying into the working area of ​​the rotor body 202 when the universal joint 204 is suddenly damaged, preventing the fragments from impacting the tooth surface or surface of the rotor body 202, ensuring the normal operation of the rotor body 202, and reducing secondary failures caused by damage to the universal joint 204.

[0029] A cooling structure is provided on the vacuum pump housing 11. The cooling structure works in conjunction with the vacuum chamber and internal transmission components to dissipate the heat generated by friction and high-speed operation of each component during the operation of the vacuum pump in a timely manner, thereby reducing the temperature inside the vacuum chamber and each transmission component and preventing the operating status and service life of each component from being affected by excessive temperature.

[0030] The drive module includes a drive gear 31 and a driven gear 32. The drive gear 31 is mounted on one set of rotors, and the driven gear 32 is mounted on the other set of rotors. The two sets of rotors are arranged vertically. The drive gear 31 and the driven gear 32 mesh with each other with a gap between them. While there is a gap between the drive gear 31 and the driven gear 32, in order to ensure that the two sets of gears can maintain stable torque transmission and achieve reliable synchronous and opposite rotation of the two sets of rotors, both the drive gear 31 and the driven gear 32 are set as magnetic structures. Moreover, the drive gear 31 and the driven gear 32 are also set with the same pole, so that they repel each other at the meshing position, forming a non-contact meshing transmission.

[0031] Specifically, when the rotor assembly is mounted on the mounting bracket 201, the drive gear 31 and the driven gear 32 mesh with each other and generate a repulsive force through their own magnetic structure to maintain the gap between the tooth surfaces. This ensures the synchronous transmission accuracy and operational stability of the two rotor assemblies, while also avoiding wear caused by rigid contact of the tooth surfaces, effectively improving the service life of the drive module. At the same time, in conjunction with the flexible transmission structure of the split shaft and the universal joint 204, the overall operational reliability and service life of the mechanism are further improved.

[0032] A drive motor 33 for driving the rotor assembly to rotate is installed on the outer wall of the vacuum pump housing 11. The drive motor 33 provides power output for the entire transmission mechanism and is a power source component. The output shaft end of the drive motor 33 passes through the vacuum pump housing 11 and is connected to the drive gear 31. It can transmit its own rotational power to the corresponding rotor assembly, causing the rotor assembly to rotate around its own axis. Then, through the meshing transmission of the drive gear 31 and the driven gear 32, the power is transmitted to another rotor assembly, realizing the synchronous reverse rotation of the two rotor assemblies.

[0033] The specific operation process is as follows: the drive motor 33 drives the drive gear 31 to rotate. The drive gear 31, through meshing with the driven gear 32 and magnetic repulsion, drives the driven gear 32 to rotate synchronously in the opposite direction, so that the two sets of rotors can achieve non-contact synchronous transmission. During this process, the connecting shaft 203 rotates with the rotor set. The adjacent connecting shafts 203 are flexibly transmitted through the universal joint 204, which adaptively compensates for the deviations caused by machining, assembly and operation deformation, ensuring that each rotor body 202 operates coaxially and avoiding radial runout and axial movement. At the same time, there is no rigid friction between the drive gear 31 and the driven gear 32, which significantly reduces gear wear and extends the service life of the transmission components. The whole system achieves efficient, stable and low-wear synchronous transmission operation.

[0034] The drive gear 31 and the driven gear 32 have the same specific structure, both being magnetic gear structures. Specifically, they consist of a gear body 71 and a magnetic repulsion ring 73. The magnetic repulsion ring 73 is sleeved on the gear body 71 and is the core magnetic repulsion component for realizing the same-pole repulsion structure. The magnetic repulsion ring 73 on the drive gear 31 and the magnetic repulsion ring 73 on the driven gear 32 are set with the same pole, thereby generating a mutual repulsive magnetic force between the two magnetic repulsion rings 73. This allows the drive gear 31 and the driven gear 32 to transmit torque while maintaining a gap, ensuring that the two sets of rotors rotate synchronously in opposite directions and operate reliably. This reduces the contact friction of the gear tooth surfaces and lowers the possibility of tooth surface wear.

[0035] Meanwhile, in order to ensure the stable installation of the magnetic repulsion ring 73, fixing plates 72 are provided on both sides of the gear body 71. The gear body 71 and the magnetic repulsion ring 73 are both locked between the two sets of fixing plates 72. The main function of the fixing plates 72 is to position and limit the installation between the gear body 71 and the magnetic repulsion ring 73, prevent the magnetic repulsion ring 73 from sliding circumferentially or moving axially on the outside of the gear body 71, ensure the stable installation position of the magnetic repulsion ring 73, and ensure that the magnetic repulsion force of the like pole repulsion structure can work stably.

[0036] Please see Figure 4 , 14 and Figure 15As shown, the mounting frame 201 has rotating shafts 205 at both ends corresponding to the ends of the two rotor groups. The rotating shafts 205 are the transmission connection structure between the rotor group and the external power component. The rotating shaft 205 at the end of each rotor group is connected to the connecting shaft 203 on the outermost rotor body 202 of that rotor group, realizing the power transmission between the rotating shaft 205 and the connecting shaft 203. The external power is transmitted to the connecting shaft 203 through the rotating shaft 205, and then to each rotor body 202 through the connecting shaft 203, driving the entire rotor body 202 to rotate synchronously. At the same time, the rotating shaft 205 and the mounting frame 201 are in rotational fit, providing support for the overall rotation of the rotor group.

[0037] Both ends of the mounting frame 201 are provided with end plates 206, which form an integral frame structure with the mounting frame 201, providing a support position for the rotating shaft 205. The rotating shaft 205 and the end plates 206 are in a rotational fit, and the end plates 206 provide radial support for the rotating shaft 205, allowing the rotating shaft 205 to rotate around its own axis. The drive gear 31 and the driven gear 32 are respectively connected to the rotating shafts 205 corresponding to different rotor groups, so that the rotational motion of the drive gear 31 and the driven gear 32 can be transmitted to the corresponding rotor groups.

[0038] A transmission sleeve 207 is provided at one end of the rotating shaft 205, and the transmission sleeve 207 moves synchronously with the rotating shaft 205. Both the driving gear 31 and the driven gear 32 have annular grooves 208 on their outer circumferences, providing space for the transmission sleeve 207. The end of the rotating shaft 205 is configured as a transmission end, which passes through the center of the corresponding gear and connects to the shaft end of the drive motor 33 to receive the rotational power output by the drive motor 33.

[0039] Taking the drive gear 31 as an example, the transmission sleeve 207 is fitted inside the annular groove 208, forming a circumferential fit with the drive gear 31. Multiple sets of limiting blocks 209 are also provided inside the annular groove 208, distributed circumferentially along the groove. A limiting groove 210 is formed on the outer wall of the transmission sleeve 207 at the position corresponding to the limiting block 209. The limiting block 209 engages inside the limiting groove 210, restricting circumferential relative sliding between the transmission sleeve 207 and the drive gear 31.

[0040] When the drive motor 33 is running, it drives the rotating shaft 205 to rotate. The rotating shaft 205 drives the transmission sleeve 207 to rotate synchronously. The transmission sleeve 207 then drives the drive gear 31 to rotate through the cooperation of the limit block 209 and the limit groove 210, so that the power is stably transmitted to the drive gear 31 and the driven gear 32.

[0041] This transmission method disperses the stress generated during transmission, reduces the stress concentration at the connection point between the drive gear 31 and the shaft, and minimizes wear on components during long-term operation. Compared to the traditional method where the drive motor 33 shaft is directly connected to the drive gear 31, and then the drive gear 31 is connected to the rotating shaft 205, this structure reduces the risk of loosening in the power transmission links, making the power transmission process more continuous. It also facilitates the assembly and disassembly of the drive gear 31 and the rotating shaft 205, reducing the difficulty of later maintenance.

[0042] Please see Figure 2 , Figure 17 and Figure 18 As shown, the outer surface of the end plate 206 on the mounting bracket 201 is in contact with the inner surface of the cover plate 12. The end plate 206 and the cover plate 12 cooperate to seal the end of the vacuum chamber. A sealing ring 17 is sandwiched between the inner edge of the cover plate 12 and the vacuum pump housing 11, and a sealing ring 17 is also sandwiched between the outer periphery of the end plate 206 and the vacuum pump housing 11. The two sealing rings 17 cooperate with each other to improve the sealing effect of the vacuum chamber.

[0043] A heat-conducting pipe 212 is installed on the side of the partition 211 facing the protective cavity. The heat-conducting pipe 212 extends along the surface of the partition 211 and is interconnected with the cooling structure. The heat generated by the operation of the internal components of the protective cavity can be transferred to the partition 211, then absorbed by the heat-conducting pipe 212 and transported to the cooling structure. The cooling structure dissipates the heat to the outside, reducing the temperature inside the protective cavity. The connection between the heat-conducting pipe 212 and the cooling component is detachable. One end of the heat-conducting pipe 212 is connected to the first airbag 52 or the second partition cavity 75, allowing the airflow generated by the fan impeller 51 to enter the interior of the heat-conducting pipe 212. As the airflow flows inside the heat-conducting pipe 212, it can carry away the heat on the pipe wall. The other end of the heat-conducting pipe 212 extends outwards from the mechanism, directly expelling the heat-absorbing airflow to the outside. This achieves heat dissipation without affecting the normal operation of the internal components of the device.

[0044] Please see Figure 4 , Figure 8 and Figure 9 as well as Figure 19As shown, the connecting assembly includes multiple sets of connecting rods 213 mounted on the connecting shaft 203. The connecting rods 213 are evenly distributed circumferentially along the connecting shaft 203, and the symmetrical arrangement of the multiple sets of connecting rods 213 ensures balanced force distribution. They are primarily used to achieve assembly and stable power transmission between the connecting shaft 203 and the rotor body 202, preventing relative slippage during operation. Multiple sets of matching connecting through holes 214 are provided on the rotor body 202 corresponding to the positions of the connecting rods 213. The connecting rods 213 are precisely inserted into the connecting through holes 214, allowing the connecting shaft 203 and the rotor body 202 to quickly establish a preliminary assembly and positioning relationship, providing a stable foundation for subsequent locking and fixing, and preventing misalignment or displacement during assembly.

[0045] The connecting rod 213 adopts a hollow, sealed design, forming a complete, sealed cavity that allows hydraulic oil to flow. The cavity has excellent sealing performance, preventing hydraulic oil leakage from affecting the locking effect. A limiting member 215 is movable inside the connecting rod 213. The limiting member 215 can move up and down along the inner cavity of the connecting rod 213, either completely retracting inside the connecting rod 213 without protruding beyond its outer wall, or protruding and extending to the outside of the connecting rod 213 under thrust, achieving a locking engagement. A sealing valve 216 is fixedly installed at one end of the connecting rod 213 near the connecting shaft 203. The sealing valve 216 adopts a one-way sealing structure, specifically used to control the inflow and outflow of hydraulic oil. Hydraulic oil can be smoothly injected into the connecting rod 213 through the sealing valve 216, and hydraulic oil can also be completely extracted from the connecting rod 213, thus achieving smooth switching between the locked and unlocked states of the connecting rod 213, making operation simple and quick.

[0046] In the locked state, the connecting rod 213 is filled with hydraulic oil through the sealing valve 216. Once filled, the hydraulic oil generates a uniform upward thrust, which continuously acts on the bottom of the limiting member 215, pushing it smoothly upward to protrude outside the connecting rod 213 without jamming or shifting. A limiting hole is provided inside the rotor body 202 corresponding to the position of the limiting member 215. The protruding limiting member 215 is precisely inserted into the limiting hole, fully engaging and firmly restricting circumferential relative rotation between the connecting shaft 203 and the rotor body 202, achieving rigid transmission between the two and ensuring lossless power transmission.

[0047] In the unlocked state, the hydraulic oil inside the connecting rod 213 is completely drawn out through the sealing valve 216, or if no hydraulic oil was initially filled, the limiting member 215 completely loses the upward support force of the hydraulic oil. At this time, due to its own gravity, the limiting member 215 will smoothly fall back downward and automatically retract into the connecting rod 213 without the need for additional external force or elastic components, resulting in a simple and reliable structural design. After the limiting member 215 is fully retracted, it completely disengages from the limiting hole on the rotor body 202 without any jamming resistance, allowing the connecting shaft 203 and the rotor body 202 to be freely disassembled and assembled independently without involving other components.

[0048] The limiting members 215 on the multiple sets of connecting rods 213 are all set to protrude upwards. In the locked state, all the limiting members 215 simultaneously and precisely engage with the corresponding limiting holes on the rotor body 202, so that the circumferential force between the connecting shaft 203 and the rotor body 202 is uniform, avoiding excessive force at a single point and effectively maintaining stability during high-speed transmission. When the hydraulic oil in the connecting rod 213 is slowly withdrawn, the limiting member 215 loses the support of the hydraulic oil and, under the vertical action of its own gravity, naturally slides down and retracts along the inner cavity of the connecting rod 213. Without the need for additional structures such as springs or elastic elements, it can automatically reset by gravity alone, completely disengaging from the limiting hole and automatically retracting back into the connecting rod 213. At this time, the locking state between the rotor body 202 and the connecting shaft 203 is completely released, and the faulty rotor body 202 can be directly removed for repair and replacement. Then, the connecting rod 213 is aligned with the connecting through hole 214 and inserted. Hydraulic oil is injected through the sealing valve 216 to re-lock and restore normal transmission.

[0049] The split-shaft design breaks down the traditional single integral long shaft into independent connecting shafts 203 corresponding to individual rotor bodies 202. Adjacent connecting shafts 203 are flexibly connected by universal joints 204. This design effectively offsets the transmission effects of shaft machining errors, assembly deviations, and deformation caused by long-term high-speed operation. It prevents local errors from being transmitted along the integral shaft to all rotor bodies 202, ensuring the coaxiality of each rotor body 202 from the source. This prevents friction between the rotor body 202 and the inner wall of the vacuum pump, or uneven operating clearances, stabilizing gas compression efficiency and ensuring the pumping performance of the vacuum pump. Furthermore, the flexible structure of the split connecting shafts 203 combined with the universal joints 204 further enhances this effect. It can significantly mitigate the shortcomings of traditional long shafts, such as insufficient rigidity and easy deformation caused by the increase in the number of rotors. It effectively reduces radial runout and axial movement of the rotor assembly at high speed, reduces additional wear between components, and extends the overall service life. Furthermore, the rotor body 202 and the connecting shaft 203 can be disassembled and assembled through independent connecting components. When a single rotor body 202 fails and needs to be repaired or replaced, it is not necessary to disassemble the entire shaft assembly and the other intact rotors. Only the corresponding connecting components need to be depressurized and unlocked for individual operation. This greatly simplifies the disassembly and assembly process, significantly reduces maintenance difficulty and time costs, and perfectly adapts to the long-term stable operation requirements of multi-stage rotors. It is also suitable for high-frequency and high-reliability application scenarios in industries such as semiconductors and photovoltaics.

[0050] Please see Figure 5 as well as Figure 10-13As shown, both axial ends of the vacuum pump housing 11 are provided with housing covers 41. The housing covers 41 are cover structures that cover the outer side of the cover plate 12, forming a protective enclosure for the components outside the cover plate 12. Inside the housing covers 41, a partition plate 42 is provided, dividing the interior of the housing covers 41 into two regions. The side of the partition plate 42 closest to the cover plate 12 forms a first partition cavity 74 with the cover plate 12. The side of the housing covers 41 furthest from the cover plate 12 is provided with a cover plate 43, and the side of the partition plate 42 closest to the cover plate 43 forms a second partition cavity 75 with the cover plate 43. The first partition cavity 74 and the second partition cavity 75 are independent of each other, allowing for the partitioned arrangement of internally installed components and reducing operational interference between different components.

[0051] Both the drive gear 31 and the driven gear 32 are arranged inside the first partition cavity 74. The first partition cavity 74 provides space for the rotation of the gears and also acts as a barrier against dust and impurities from the external environment, reducing the impact of impurities on the meshing parts of the gears. The drive motor 33 is fixedly mounted on the cover plate 43, which provides a mounting support position for the drive motor 33 and maintains the stability of the drive motor 33 during operation. The output shaft of the drive motor 33 passes sequentially through the cover plate 43, the second partition cavity 75, and the partition plate 42, extending into the first partition cavity 74 and connecting to the rotating shaft 205 of one of the rotor groups. This allows the power output by the drive motor 33 to be transmitted through the second partition cavity 75 to the rotor group, driving the rotor group to rotate.

[0052] The cooling assembly includes a fan impeller 51 and a first air chamber 52. The fan impeller 51 is arranged inside the second partition cavity 75 and sleeved on the output shaft end of the drive motor 33, allowing it to rotate synchronously with the output shaft of the drive motor 33. An air outlet 44 is provided on the cover plate 43, and the first air chamber 52 is snapped into the air outlet 44. The internal channel of the first air chamber 52 communicates with the second partition cavity 75. When the drive motor 33 is running, it drives the fan impeller 51 to rotate. During rotation, the fan impeller 51 pushes airflow into the second partition cavity 75. Under pressure, the airflow enters the first air chamber 52, inflating it and providing conditions for subsequent airflow delivery.

[0053] The first airbag 52 is arranged in an H-shape. The H-shape structure increases the coverage area of ​​the first airbag 52, allowing airflow to be delivered to more areas. The first airbag 52 has multiple exhaust zones, and both sides of the vacuum pump housing 11 have multiple cooling zones. The number of cooling zones matches the number of exhaust zones, ensuring that the airflow from the exhaust zones can correspondingly enter the cooling zones. Multiple air outlets 53 are provided within the exhaust zones, and multiple cooling channels 16 are formed within the cooling zones. The cooling channels 16 are arranged close to the inner wall of the vacuum pump housing 11, allowing airflow to flow along the inner wall of the vacuum pump housing 11 and absorb heat generated by the housing and internal components.

[0054] A drive motor 33 is installed at one end of the vacuum pump housing 11, and multiple gas detection elements are provided at the other end. The gas detection elements are fixedly installed inside the second partition chamber 75. One end of the cooling channel 16 is connected to the gas outlet 53, and the other end is connected to the gas detection element. The cooling channels 16 in the same cooling zone are connected to the gas outlet 53 and the same set of gas detection elements in the same exhaust zone, so that the airflow can flow along a fixed path and enter the interior of the gas detection element.

[0055] Please see Figure 6-7 As shown, the gas detection device includes a detection housing 61, a detection cover 62, and a second airbag 63. The detection housing 61 is generally T-shaped and divided into a vertical section and a horizontal section. The detection cover 62 covers the detection housing 61, forming a detection cavity, which is located in the vertical section of the detection housing 61. The second airbag 63 is arranged inside the horizontal section of the detection housing 61 and extends along the length of the horizontal section. The detection cavity is connected to multiple cooling channels 16 and the second airbag 63. Airflow can enter the detection cavity through the cooling channels 16 and then enter the second airbag 63.

[0056] An observation plate 64 is provided at one end of the second airbag 63, and a positioning plate 65 is provided at one end of the detection housing 61. A compression structure is installed between the observation plate 64 and the positioning plate 65. This compression structure can drive the observation plate 64 back to its initial position when the gas inside the second airbag 63 decreases, so that the position of the observation plate 64 changes accordingly with the inflation and deflation state of the second airbag 63.

[0057] The compression structure is as follows: multiple sets of compression rods 81 are provided on one side of the positioning plate 65, the observation plate 64 extends out of the upper and lower sides of the detection housing 61, the compression rods 81 extend toward the detection cover plate 62 and pass through the observation plate 64; a compression spring 82 is also provided between the positioning plate 65 and the observation plate 64, and the compression spring 82 is sleeved on the compression rods 81.

[0058] As the second airbag 63 is inflated, the airbag expands and pushes the observation plate 64 along the compression rod 81 toward the positioning plate 65. The compression spring 82 is gradually compressed, and the operator can directly see the position change of the observation plate 64 through the observation slot 66. When the second airbag 63 is deflating, the internal pressure of the airbag decreases, the expansion thrust disappears, the compression spring 82 resets under its own elasticity, and pushes the observation plate 64 to move in the opposite direction along the compression rod 81, returning to the initial position, thus realizing the automatic return of the observation plate 64.

[0059] It should be added that the compression structure is not limited to the above structures. Any elastic reset structure that can provide elastic reset force for the observation plate 64 and cooperate with the second airbag 63 to achieve telescopic displacement is within the protection scope of this invention.

[0060] The peripheral surface of the observation plate 64 is coated with a color to facilitate external identification of its position. An observation slot 66 is provided in the transverse section of the detection housing 61 to expose the observation plate 64, allowing external personnel to observe its displacement. An exhaust section is also provided on the detection housing 61 to expel excess gas from the detection chamber, preventing excessive pressure inside the chamber from affecting the detection results. On the cover plate 43 at the same end as the gas detection element, an observation window is provided corresponding to the position of each gas detection element. External personnel can directly observe the position of the observation plate 64 through the observation windows and observation slots 66, thereby determining the airflow and operating status inside the device.

[0061] Please see Figure 2 and Figure 10 As shown, multiple sets of inlet pipes 13 and multiple sets of outlet pipes 14 are respectively arranged on both sides of the vacuum pump housing 11. The inlet pipes 13 are used to introduce gas from the external environment into the vacuum chamber, and the outlet pipes 14 are used to discharge the compressed gas in the vacuum chamber. The inlet pipes 13 and outlet pipes 14 correspond to the positions of the rotor body 202, so that the gas can directly enter the working area of ​​the corresponding rotor body 202, improving the efficiency of gas intake and exhaust. At the same time, each set of inlet pipes 13 corresponds to the rotor bodies 202 distributed vertically in two sets of rotors, and with the help of the partition 211, the vacuum chamber is divided into multiple independent and non-communicating pumping working spaces by the partition 211. Each working space corresponds to a set of rotor bodies 202 working independently, forming an independent gas compression and extraction unit. The inlet pipes 13 are connected to multiple working targets, each The independent evacuation workspace can be connected to a single target to be evacuated. Each pipeline is completely isolated from the workspace, enabling simultaneous independent evacuation of multiple targets. This design effectively avoids gas crossflow and mutual interference between different targets. Even if airflow fluctuations or local malfunctions occur in one workspace, it will not affect the normal evacuation operation of other workspaces. This ensures that multiple targets obtain a stable and uniform vacuum environment simultaneously, significantly improving the overall working efficiency and applicable scenarios of the vacuum pump, while further ensuring the stability and reliability of the vacuum level.

[0062] Both the intake pipe 13 and the exhaust pipe 14 are equipped with dustproof nets 15 inside their internal channels. These nets prevent solid impurities carried in the gas from entering the pipes and vacuum chamber, reducing wear on moving parts such as the rotor body 202 and connecting shaft 203. The dustproof net 15 inside the intake pipe 13 is tapered. This tapered structure increases the contact area between the net and the gas, blocking impurities while reducing obstruction to gas flow and maintaining smooth gas flow within the intake pipe 13.

[0063] The foregoing has shown and described the basic principles and main features of the present invention and its advantages. It will be apparent to those skilled in the art that the present invention is not limited to the details of the above exemplary embodiments.

Claims

1. A multi-stage rotor synchronous transmission mechanism for a vacuum pump, characterized in that, include: The vacuum pump housing (11) and the cover plate (12) are provided at both ends of the vacuum pump housing (11), and the two are connected to form a vacuum chamber; The vacuum pump housing (11) is provided with housing cover (41) at both ends. The housing cover (41) covers the outside of the cover plate (12) and the sectional plate (42) is provided inside the housing cover (41). A first partition cavity (74) is formed between one side of the sectional plate (42) and the cover plate (12). Cover plate (43), the cover plate (43) is provided on one side of the outer shell cover (41), and a second partition cavity (75) is formed between the other side of the partition plate (42) and the cover plate (43). The rotor module is installed inside the vacuum chamber. The rotor module includes a mounting frame (201) and two sets of rotors. Both sets of rotors are installed on the mounting frame (201). The two sets of rotors rotate synchronously through a drive module. The drive module includes a drive motor (33), which is mounted on the cover plate (43). The shaft end of the drive motor (33) extends through the second partition cavity (75) into the first partition cavity (74) and is connected to one of the rotor groups in a transmission connection. The rotor assembly includes a rotor body (202) and a connecting shaft (203). Each rotor body (202) is provided with a connecting shaft (203). The connecting shaft (203) is connected to the rotor body (202) through a connecting assembly. The connecting shafts (203) of adjacent rotor bodies (202) are connected by a universal joint (204). The vacuum pump housing (11) is provided with multiple sets of partitions (211). Multiple sets of partitions (211) are used to separate multiple sets of protective chambers in the vacuum chamber. The rotor assembly passes through multiple sets of partitions (211). Each universal joint (204) is located in one of the protective chambers. A cooling component is disposed on the vacuum pump housing (11) and is used to dissipate heat and cool the vacuum chamber and internal components. The cooling component includes a fan impeller (51) and a first airbag (52). The fan impeller (51) is located in the second partition cavity (75) and sleeved on the shaft end of the drive motor (33). An air outlet (44) is provided on the cover plate (43). The first airbag (52) is locked in the air outlet (44). The first airbag (52) is connected to the second partition cavity (75). The fan impeller (51) is driven to rotate by the drive motor (33), thereby blowing gas into the second partition cavity (75) and the gas enters the first airbag (52) so that the first airbag (52) is in an inflated state. The first airbag (52) is H-shaped and has multiple exhaust zones. Multiple cooling zones are provided on both sides of the vacuum pump housing (11). The number of cooling zones is the same as the number of exhaust zones. Multiple sets of air outlets (53) are provided in the exhaust zone, and multiple sets of cooling channels (16) are provided in the cooling zone. The cooling channels (16) are close to the inner wall of the vacuum pump housing (11). The cooling component also includes multiple sets of gas detection elements. Multiple sets of gas detection elements are provided at the other end of the vacuum pump housing (11). The gas detection elements are installed in the second partition cavity (75). The cooling channel (16) in the same cooling zone is connected to the air outlet (53) in the same exhaust zone and the same set of gas detection elements. The gas detection device includes a detection housing (61), a detection cover plate (62), and a second airbag (63). The detection housing (61) is T-shaped and divided into a vertical section and a horizontal section. The detection cover plate (62) covers the detection housing (61) and together with the detection housing (61) forms a detection cavity. The detection cavity is located in the vertical section. The second airbag (63) is located in the horizontal section and extends along the horizontal section. The detection cavity is connected to multiple sets of cooling channels (16) and the second airbag (63). The cooling component also includes an observation plate (64) and a positioning plate (65). The observation plate (64) is provided at one end of the second airbag (63), and the positioning plate (65) is provided at one end of the detection shell (61). A compression structure for driving the observation plate (64) to return to its original position is provided between the observation plate (64) and the positioning plate (65).

2. The multi-stage rotor synchronous transmission mechanism for a vacuum pump according to claim 1, characterized in that, The driving module includes: A drive gear (31) and a driven gear (32) are provided. The drive gear (31) is mounted on one of the rotor groups, and the driven gear (32) is mounted on the other rotor group. The two rotor groups are arranged vertically. While the drive gear (31) and the driven gear (32) are meshing relative to each other, a gap is provided between the drive gear (31) and the driven gear (32). Both the drive gear (31) and the driven gear (32) are magnetic structures with the same magnetic poles. The drive gear (31) and the driven gear (32) repel each other in the meshing position.

3. The multi-stage rotor synchronous transmission mechanism for a vacuum pump according to claim 2, characterized in that, The driver module also includes: The rotating shaft (205) is provided with end plates (206) at both ends of the mounting bracket (201). The rotating shaft (205) is rotatably connected to the end plates (206), and the two rotating shafts (205) are respectively connected to the connecting shaft (203) on the outermost rotor body (202) of the rotor assembly. A transmission sleeve (207) is provided at one end of the rotating shaft (205). Both the driving gear (31) and the driven gear (32) are provided with annular grooves (208). One end of the rotating shaft (205) is set as a transmission end. The transmission end passes through the driving gear (31) and is connected to the shaft end of the driving motor (33). The transmission sleeve (207) is inserted into the annular groove (208). The limiting block (209) is provided in the annular groove (208) and multiple sets of the limiting blocks (209) are provided. The transmission sleeve (207) is provided with a limiting groove (210) corresponding to the limiting block (209). The limiting block (209) is locked in the limiting groove (210). The drive motor (33) drives the rotating shaft (205) to rotate. The rotating shaft (205) drives the drive gear (31) to rotate through the transmission sleeve (207).

4. The multi-stage rotor synchronous transmission mechanism for a vacuum pump according to claim 3, characterized in that, The outer side of the end plate (206) contacts the inner side of the cover plate (12), and both the cover plate (12) and the end plate (206) are provided with sealing rings (17). The sealing ring (17) provided on the cover plate (12) is located at the inner edge of the cover plate (12) and is sandwiched between the vacuum pump housing (11) and the cover plate (12); The sealing ring (17) provided on the end plate (206) is located around the end plate (206) and sandwiched between the vacuum pump housing (11) and the end plate (206); A heat-conducting pipe (212) is provided on the side of the partition (211) facing the protective cavity, and the heat-conducting pipe (212) is connected to the cooling component through a conduit.

5. The multi-stage rotor synchronous transmission mechanism for a vacuum pump according to claim 1, characterized in that, The connecting assembly includes multiple sets of connecting rods (213) provided on the connecting shaft (203), and the rotor body (202) has a connecting through hole (214) for each of the connecting rods (213), and the connecting rods (213) pass through the connecting through holes (214); The connecting assembly also includes a limiting member (215) and a sealing valve (216). The connecting rod (213) is hollow. The limiting member (215) is provided on the connecting rod (213). The sealing valve (216) is provided at one end of the connecting rod (213). Hydraulic oil can be injected into or extracted into the connecting rod (213) through the sealing valve (216) so that the connecting rod (213) is in a locked state or an unlocked state. The rotor body (202) has a limiting hole corresponding to the limiting member (215). When the connecting rod (213) is in the locked state, the connecting rod (213) is filled with hydraulic oil. The injected hydraulic oil pushes the limiting member (215) to extend out of the connecting rod (213) and into the limiting hole. When the connecting rod (213) is in the unlocked state, the connecting rod (213) is not filled with hydraulic oil, and the limiting member (215) retracts into the connecting rod (213); The limiting members (215) on the multiple sets of connecting rods (213) are all arranged to protrude upwards.

6. The multi-stage rotor synchronous transmission mechanism for a vacuum pump according to claim 1, characterized in that, The observation plate (64) is provided with a colored coating around its periphery, and the detection housing (61) has an observation groove (66) in the horizontal section for observing the displacement of the observation plate (64). The detection housing (61) is provided with an exhaust section for discharging excess gas from the detection chamber, and a set of cover plates (43) is provided with an observation window for observing the state of the gas detection element.

7. The multi-stage rotor synchronous transmission mechanism for a vacuum pump according to claim 1, characterized in that, The vacuum pump housing (11) has multiple sets of air inlet pipes (13) and multiple sets of air outlet pipes (14) on both sides, and the air inlet pipes (13) and the air outlet pipes (14) correspond one-to-one with the rotor body (202). Both the air inlet pipe (13) and the air outlet pipe (14) are provided with dustproof nets (15), and the dustproof nets (15) in the air inlet pipe (13) are arranged in a cone shape.

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