A baffle position detection device and method

Abstract

The application provides a baffle position detection device and method, which comprises a shell, an interaction unit integrated on the shell, a sensing unit integrated in the shell, and a signal processing unit in communication connection with the interaction unit and the sensing unit; the interaction unit is configured to receive detection configuration information and send it to the signal processing unit and perform visual display; the sensing unit is configured to sense the baffle and output a sensing signal to the signal processing unit; the signal processing unit is configured to calculate the current position of the baffle according to the sensing signal and the detection configuration information, determine the position detection result of the baffle according to the position state signal, the current position and the detection configuration information, control the display state of the interaction unit according to the position detection result, and transmit the position detection result to a host computer when the position detection result is abnormal. Thus, the application can realize accurate detection of the baffle position through the sensing unit and the position judgment of the signal processing unit.

Description

Technical Field

[0001] This invention belongs to the field of semiconductor manufacturing equipment technology, and is applicable to physical vapor deposition (PVD) process chambers with shutters, particularly relating to a device and method for detecting the position of the shutter. Background Technology

[0002] In the manufacturing process of semiconductor chips, PVD is a key process for forming metal interconnect layers. PVD chambers typically contain a shutter disk, whose core function is to precisely shield the chamber pedestal during non-sputtering periods to prevent unintended material deposition onto the chamber pedestal.

[0003] Currently, the baffle position sensors commonly used in PVD chamber baffle drive and position feedback systems are movable. During long-term use, vibrations from mechanisms such as slit valves, coupled with mechanical failures, frequently cause the sensor receiver to shift or become inaccurate, preventing the sensor from accurately detecting the position of the sutter arm or baffle plate. This is particularly evident in large-scale, high-intensity production applications, where significant reliability issues are exposed. Specifically, after a certain period of use, the failure rate of the baffle position sensor increases significantly, frequently triggering machine alarms and causing the entire equipment to enter a protective shutdown state, thus interrupting the production process and resulting in lost production capacity. Furthermore, frequent emergency repairs and sensor replacements not only incur manpower and spare parts costs, but also increase the risk of particulate contamination due to chamber cavitation during maintenance, further impacting product yield. Summary of the Invention

[0004] The purpose of this invention is to provide a device and method for detecting the position of a baffle, so as to solve one or more technical problems in the prior art that make it impossible to accurately detect the position of the baffle due to the fact that the sensor itself is movable, and that the sensor position shifts due to long-term use and mechanical vibration.

[0005] To achieve the above objectives, the present invention provides a baffle position detection device, comprising: a housing, an interactive unit integrated on the housing, a sensing unit integrated within the housing, and a signal processing unit communicatively connected to the interactive unit and the sensing unit; the interactive unit is configured to receive detection configuration information and send it to the signal processing unit, and is also configured to visualize the received signal from the signal processing unit; the sensing unit is configured to sense the baffle and output the acquired sensing signal to the signal processing unit; the signal processing unit is configured to receive a position status signal of the baffle sent by a host and control the sensing unit to sense the baffle, calculate the current position of the baffle based on the sensing signal and the detection configuration information, determine the position detection result of the baffle based on the position status signal, the current position, and the detection configuration information, control the display state of the interactive unit based on the position detection result, and transmit the position detection result to the host when the position detection result is abnormal.

[0006] Optionally, the sensing unit includes multiple pairs of sensing modules, which are arranged linearly and numbered sequentially. Each pair of sensing modules includes a transmitting module and a receiving module installed opposite each other on the upper and lower sides of the housing. The transmitting module is configured to transmit an optical signal, and the receiving module is configured to obtain the sensing signal based on the received optical signal and output the sensing signal to the signal processing unit.

[0007] Optionally, the transmitting module includes a first base, an infrared light emitter fixed on the first base, and a first mounting cover detachably connected to the first base and surrounding the infrared light emitter; the receiving module includes a second base, an infrared light receiver fixed on the second base, and a second mounting cover detachably connected to the second base and surrounding the infrared light receiver.

[0008] Optionally, the multiple transmitting modules / receiving modules are arranged linearly and equally spaced.

[0009] Optionally, the baffle includes a baffle arm, a baffle plate, and a drive mechanism for driving the baffle arm to move the baffle plate into and out of the process chamber; the drive mechanism is communicatively connected to the host to transmit the position status signals of the baffle arm and the baffle plate to the host; the sensing unit includes a first sensing unit and a second sensing unit; the first sensing unit is configured to sense the baffle arm and output the acquired sensing signal of the baffle arm to the signal processing unit, and the second sensing unit is configured to sense the baffle plate and output the acquired sensing signal of the baffle plate to the signal processing unit.

[0010] Optionally, the interaction unit includes a target position setting button, a position display screen, an allowable offset setting button, an allowable offset display screen, and a status indicator unit; the target position setting button is configured to receive the target position setting signal and transmit it to the signal processing unit; the position display screen is configured to display the current position and the target position of the baffle in the detection configuration information; the allowable offset setting button is configured to receive the allowable offset setting and transmit it to the signal processing unit; the allowable offset display screen is configured to display the allowable offset; and the status indicator unit is configured to receive the position detection result signal and respond.

[0011] Optionally, the outer casing is C-shaped; the baffle position detection device further includes a baffle storage unit for storing the baffle arm and the baffle plate, the baffle storage unit is partially placed in the central accommodating space of the C-shape, and the area where the baffle storage unit is aligned with the installation positions of the first sensing unit and the second sensing unit is provided with a transparent window.

[0012] Based on the same inventive concept, the present invention also proposes a method for detecting the position of a baffle, wherein the method for detecting the position of the baffle uses the baffle position detection device as described in any of the preceding claims, and the method for detecting the position of the baffle includes:

[0013] The interaction unit receives the target position and allowable offset of the baffle from the detection configuration information and transmits them to the signal processing unit.

[0014] The signal processing unit receives the position status signal of the baffle sent by the host and controls the sensing unit to sense the baffle. The sensing unit outputs the acquired sensing signal to the signal processing unit.

[0015] The signal processing unit calculates the current position of the baffle based on the sensing signal and the detection configuration information, and transmits the current position to the interaction unit. It also determines the position detection result of the baffle based on the position status signal, the current position, the target position, and the allowable offset. Based on the position detection result, it controls the display state of the interaction unit and determines whether the position detection result is abnormal. If so, the signal processing unit transmits the position detection result to the host.

[0016] Optionally, the detection configuration information further includes the spacing between the sensing modules. The signal processing unit calculates the current position of the baffle based on the sensing signal and the detection configuration information, transmits the current position to the interaction unit, and determines the position detection result of the baffle based on the position status signal, the current position, the target position, and the allowable offset, including:

[0017] The current position of the baffle is calculated based on the acquired sensing signal and the spacing between the sensing modules; the target position range is determined based on the target position and the allowable offset; and the position detection result is determined based on the position status signal, the current position, and the target position range.

[0018] Optionally, the baffle includes a baffle arm and a baffle plate, and the sensing unit includes a first sensing unit that senses the baffle arm and a second sensing unit that senses the baffle plate.

[0019] The target position of the baffle includes the target position of the baffle arm and the target position of the baffle disk. The allowable offset of the baffle includes the allowable offset of the baffle arm and the allowable offset of the baffle disk. The first sensing unit senses the baffle arm to obtain a first sensing signal, and the second sensing unit senses the baffle disk to obtain a second sensing signal.

[0020] The signal processing unit calculates the current position of the baffle arm based on the first sensing signal and the distance between the sensing module, determines the target position range of the baffle arm based on the target position of the baffle arm and the allowable offset of the baffle arm, and determines the position detection result of the baffle arm based on the position status signal, the current position of the baffle arm and the target position range of the baffle arm.

[0021] The signal processing unit calculates the current position of the baffle plate based on the second sensing signal and the distance between the sensing module, determines the target position range of the baffle plate based on the target position of the baffle plate and the allowable offset of the baffle plate, and determines the position detection result of the baffle plate based on the position status signal, the current position of the baffle plate and the target position range of the baffle plate.

[0022] Compared with the prior art, the baffle position detection device and method provided by the present invention have the following beneficial effects: The baffle position detection device provided by the present invention includes a housing, an interactive unit integrated on the housing, a sensing unit integrated within the housing, and a signal processing unit communicatively connected to the interactive unit and the sensing unit; the interactive unit is configured to receive detection configuration information and send it to the signal processing unit, and is also used to visualize the received signal from the signal processing unit; the sensing unit is configured to sense the baffle and output the acquired sensing signal to the signal processing unit; the signal processing unit is configured to calculate the current position of the baffle based on the sensing signal and the detection configuration information, determine the position detection result of the baffle based on the current position and the detection configuration information, control the display state of the interactive unit based on the position detection result, and is also used to transmit the position detection result to the host when the position detection result is abnormal. Therefore, by employing a sensing unit without moving mechanical structures combined with a signal processing unit, this invention can achieve non-contact, real-time detection of the current position of the baffle and compare it with a preset target position, thereby achieving high-precision and high-reliability detection of the baffle position. Simultaneously, by receiving detection configuration information through an interactive unit and visually displaying the received signals, the intuitiveness and interactivity of the operation are significantly improved. Furthermore, by establishing a linkage communication mechanism between the signal processing unit and the host, when the signal processing unit detects that the position exceeds the allowable deviation or an anomaly occurs, it can send alarm or status signals to the host in real time, thereby achieving dynamic feedback and proactive intervention on the baffle position status, effectively avoiding misoperation caused by inaccurate baffle position.

[0023] Furthermore, since the baffle position detection method proposed in this invention belongs to the same inventive concept as the baffle position detection device provided in this invention, the baffle position detection method provided in this invention has at least all the advantages of the baffle position detection device provided in this invention. For details on the beneficial effects of the baffle position detection method provided in this invention, please refer to the above description of the beneficial effects of the baffle position detection device provided in this invention, which will not be repeated here. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the structure of a baffle position detection device provided in one embodiment of the present invention;

[0025] Figure 2 This is a schematic diagram of the sensing unit in a baffle position detection device provided in one embodiment of the present invention;

[0026] Figure 3aThis is a schematic diagram of the transmitting module in the sensing module of the baffle position detection device provided in one embodiment of the present invention;

[0027] Figure 3b This is a schematic diagram of the receiving module in the sensing module of the baffle position detection device provided in one embodiment of the present invention;

[0028] Figure 4 A schematic diagram of the structure of the interaction unit of the baffle position detection device provided in one embodiment of the present invention;

[0029] Figure 5 This is a flowchart illustrating a method for detecting the position of a baffle according to one embodiment of the present invention.

[0030] Figure 6a An example diagram showing the position of the baffle plate at the target position, detected by the baffle position detection method provided in one embodiment of the present invention;

[0031] Figure 6b An example diagram showing the position of the baffle plate detected by the baffle position detection method provided in one embodiment of the present invention within the allowable offset range of the target position;

[0032] Figure 6c An example diagram showing that the position of the baffle plate detected by the baffle position detection method provided in one embodiment of the present invention exceeds the allowable offset value range of the target position;

[0033] Figure 7 This is an example diagram showing the visualization of the detected baffle position in the interactive unit after the baffle position is detected using the baffle position detection method provided in one embodiment of the present invention.

[0034] 1-Outer casing, 2-Interaction unit, 21-Target position setting button, 22-Position display screen, 23-Allowable offset setting button, 24-Allowable offset display screen, 25-Status indicator unit, 251-Power indicator light, 252-Baffle arm normal status light, 253-Baffle arm abnormal status light, 254-Baffle plate normal status light, 255-Baffle plate abnormal status light, 3-Sensing unit, 31-Sensing module, 311-Transmitting module, 3111-First base, 3112-Infrared light transmitter, 3113-First mounting cover, 312-Receiving module, 3121-Second base, 3122-Infrared light receiver, 3123-Second mounting cover, 4-Signal processing unit, 3X-First sensing unit, 3Y-Second sensing unit, 5-Main unit, 6-Baffle plate, h-Spacing, Spec-Allowable offset value range. Detailed Implementation

[0035] The following detailed description, in conjunction with the accompanying drawings and specific embodiments, provides a further detailed explanation of the baffle position detection device and method proposed in this invention. The advantages and features of this invention will become clearer from the following description. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of this invention.

[0036] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0037] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0038] The core idea of ​​this invention is to provide a device and method for detecting the position of a baffle. By employing a sensing unit without moving mechanical structures combined with a signal processing unit, this invention enables non-contact, real-time detection of the baffle's current position and comparison with a preset target position, thereby achieving high-precision and high-reliability detection of the baffle's position. Simultaneously, by receiving detection configuration information through an interactive unit and visually displaying the received signals, the invention significantly improves the intuitiveness and interactivity of the operation. Furthermore, by establishing a linkage communication mechanism with the host computer, when the detected position exceeds the allowable deviation or an anomaly occurs, the invention can send alarm or status signals to the host computer in real time, thereby achieving dynamic feedback and proactive intervention on the baffle's position status, effectively avoiding misoperation caused by inaccurate baffle positioning.

[0039] To achieve the above-mentioned idea, one embodiment of the present invention provides a device for detecting the position of a baffle. For example, please refer to... Figures 1-4 , Figure 1 This is a schematic diagram of the structure of a baffle position detection device provided in one embodiment of the present invention. Figure 2 This is a schematic diagram of the sensing unit in a baffle position detection device according to one embodiment of the present invention. Figure 3a This is a schematic diagram of the transmitting module in the sensing module of the baffle position detection device provided in one embodiment of the present invention. Figure 3b This is a schematic diagram of the receiving module in the sensing module of the baffle position detection device provided in one embodiment of the present invention. Figure 4 This is a schematic diagram of the interactive unit of the baffle position detection device provided in one embodiment of the present invention.

[0040] like Figure 1 As shown, the baffle position detection device includes: a housing 1, an interaction unit 2 integrated on the housing 1, a sensing unit 3 integrated within the housing 1, and a signal processing unit 4 communicatively connected to the interaction unit 2 and the sensing unit 3; the interaction unit 2 is configured to receive detection configuration information and send it to the signal processing unit 4, and is also used to visualize the received signal from the signal processing unit 4; the sensing unit 3 is configured to sense the baffle (not shown in the figure) and output the acquired sensing signal to the signal processing unit 4; the signal processing unit 4 is configured to receive the baffle position status signal sent by the host and control the sensing unit 3 to sense the baffle, calculate the current position of the baffle based on the sensing signal and the detection configuration information, determine the position detection result of the baffle based on the position status information, the current position, and the detection configuration information, control the display state of the interaction unit 2 based on the position detection result, and transmit the position detection result to the host 5 when the position detection result is abnormal.

[0041] This invention uses a sensing unit 3 without a moving mechanical structure to detect the position of the baffle, avoiding the receiver position shift problem caused by vibration within the cavity (such as the action of a slit valve) and mechanical wear and aging of traditional movable sensors. This reduces the sensor failure rate and effectively avoids unplanned equipment downtime caused by sensor false alarms or failures, ensuring the continuous and stable operation of the production line. At the same time, the signal processing unit 4 enables accurate judgment of the baffle position and timely reporting to the host when the baffle position is abnormal, further avoiding misoperation. In addition, the use of a visual and operable interactive unit 2 not only intuitively displays the baffle position status but also further improves the flexibility of the device. Therefore, by employing a sensing unit 3 without moving mechanical structures combined with a signal processing unit 4, this invention can achieve non-contact real-time detection of the current position of the baffle. By comparing it with a preset target position, it achieves high-precision and high-reliability detection of the baffle position. Simultaneously, the interaction unit 2 receives detection configuration information and visualizes the received signals, significantly improving the intuitiveness and interactivity of the operation. Furthermore, by establishing a linkage communication mechanism between the signal processing unit 4 and the host 5, when the signal processing unit 4 detects that the position exceeds the allowable deviation or an anomaly occurs, it can send an alarm or status signal to the host 5 in real time, thereby achieving dynamic feedback and active intervention on the baffle position status, effectively avoiding misoperation caused by the baffle position being inaccurate.

[0042] For example, in some of the exemplary embodiments, please continue to refer to Figure 1 and Figure 2 ,like Figure 1 and Figure 2 As shown, the sensing unit 3 includes multiple pairs of sensing modules 31, which are arranged linearly and numbered sequentially (for example, such as...). Figure 2The sensor modules 31 shown are numbered sequentially from 0 to 40. Each pair of sensor modules 31 includes a transmitting module 311 and a receiving module 312 mounted opposite each other on the upper and lower sides of the housing 1. The transmitting module 311 is configured to transmit an optical signal, and the receiving module 312 is configured to obtain the sensing signal based on the received optical signal and output the sensing signal to the signal processing unit 4. Therefore, this invention employs multiple pairs of sensing modules 31 to form a sensing unit 3, ensuring the accuracy and reliability of the baffle position detection. Furthermore, the multiple pairs of sensing modules 31 are arranged linearly to achieve wide-range position monitoring. This configuration ensures that the sensing unit 3 can naturally expand its effective detection range without needing to adjust its position, while maintaining consistency and continuity in detection. This design concept of a sensing unit without moving mechanical structures further reduces the sensor failure rate. Sequentially numbering the sensing modules 31 simplifies the position determination calculation method. Simultaneously, the transmitting module 311 and the receiving module 312 of each sensing module 31 are installed facing each other on the upper and lower sides of the housing, ensuring the accuracy of signal reception and thus guaranteeing the accuracy of the baffle position detection.

[0043] It should be noted that the present invention does not strictly limit the specific value of "multiple pairs," and "multiple pairs" includes all configurations with two or more pairs. It is understood that, in order to ensure the accuracy and reliability of the baffle position detection, a configuration scheme with no fewer than two pairs is preferred.

[0044] Preferably, in some exemplary embodiments, please refer to Figure 2 ,like Figure 2 As shown, the sensing unit 3 also includes a C-shaped mounting housing, within which multiple sets of sensing modules 31 are integrated. This integrated layout not only provides stable mechanical support and reliable physical protection for the sensing unit 3, but also ensures the accuracy and consistency of the relative positions of the sensing modules 31. This design improves the spatial stability of signal acquisition and simplifies the assembly method of installing the sensing unit 3 in the housing 1.

[0045] For example, in some of the exemplary embodiments, please continue to refer to Figure 3a and Figure 3b ,like Figure 3a and Figure 3bAs shown, the transmitting module 311 includes a first base 3111, an infrared light emitter 3112 fixed on the first base 3111, and a first mounting cover 3113 detachably connected to the first base 3111 and surrounding the infrared light emitter 3112; the receiving module 312 includes a second base 3121, an infrared light receiver 3122 fixed on the second base 3121, and a second mounting cover 3123 detachably connected to the second base 3121 and surrounding the infrared light receiver 3122. Therefore, the present invention achieves the installation and fixation of the transmitting module 311 and the receiving module 312 by mounting them on a base; by adding a first mounting cover 3113 surrounding the infrared light emitter 3112 on the outside of the first base 3111, the emission path of the infrared light is effectively constrained, significantly reducing the scattering of light in non-target directions, thereby avoiding optical interference to surrounding sensors; at the same time, by setting a second mounting cover 3123 surrounding the infrared light receiver 3122 on the outside of the second base 3121, scattered light from the external environment and other light sources can be effectively shielded, preventing the infrared light receiver 3112 from being falsely triggered or misjudged due to interference.

[0046] For example, in some of the exemplary embodiments, please continue to refer to Figure 2 ,like Figure 2 As shown, the plurality of transmitting modules 311 / receiving modules 312 are arranged linearly and equally spaced (exemplarily, such as...). Figure 2 The spacing h in the middle. Therefore, by configuring the multiple transmitting modules 311 / receiving modules 312 with linear equal spacing, it is beneficial to the standardization and modularization of the sensing unit 31, reduces the complexity of installation and debugging, and facilitates subsequent maintenance, expansion or replacement; in addition, the equal spacing distribution can provide regular input for data acquisition and processing, which is beneficial for the signal processing module 3 to achieve accurate position determination.

[0047] It should be noted that the present invention does not limit the specific value of the spacing h. Those skilled in the art will understand that determining the spacing h requires considering factors such as conventional technical capabilities, detection accuracy requirements, and reliability. In one preferred embodiment, the spacing h is 1 mm. In specific implementations, without departing from the concept of the present invention, the spacing h can be adaptively adjusted according to actual technical conditions and design requirements, for example, by selecting a smaller or larger value. It should be understood that although this example uses a linear, equally spaced configuration of multiple transmitting modules 311 / receiving modules 312 as an example, this is not a limitation of the present invention; the spacing between each transmitting module 311 / receiving module 312 can be the same or different.

[0048] For example, in some of the exemplary embodiments, please continue to refer to Figure 1 ,like Figure 1 As shown, the baffle (not shown) includes a baffle arm, a baffle plate, and a drive mechanism that drives the baffle arm to move the baffle plate into and out of the process chamber. The drive mechanism is communicatively connected to the host 5 to transmit the position status signals of the baffle arm and the baffle plate to the host 5. The sensing unit 3 includes a first sensing unit 3X and a second sensing unit 3Y. The first sensing unit 3X is configured to sense the baffle arm and output the acquired sensing signal of the baffle arm to the signal processing unit 4. The second sensing unit 3Y is configured to sense the baffle plate and output the acquired sensing signal of the baffle plate to the signal processing unit 4. Therefore, by detecting the position status of the baffle arm and the baffle plate respectively and making a comprehensive judgment by the signal processing unit, the present invention can achieve accurate fault location, making maintenance more convenient and reducing device malfunctions.

[0049] For example, in some of the exemplary embodiments, please continue to refer to Figure 4 ,like Figure 4As shown, the interaction unit 2 includes a target position setting button 21, a position display screen 22, an allowable offset setting button 23, an allowable offset display screen 24, and a status indicator unit 25. The target position setting button 21 is configured to receive the target position setting signal and transmit it to the signal processing unit 4. The position display screen 22 is configured to display the current position and the target position of the baffle in the detection configuration information. The allowable offset setting button 23 is configured to receive the allowable offset setting and transmit it to the signal processing unit 4. The allowable offset display screen 24 is configured to display the allowable offset. The status indicator unit 25 is configured to receive the position detection result signal and respond. Therefore, this invention enables adaptive adjustment of the target positions of the baffle arm and the baffle plate through the target position setting button 21 to meet different process requirements and scenarios, thereby improving the adaptability and flexibility of the device. The position display screen 22 provides a visual display of the current position and the target positions of the baffle arm and the baffle plate, allowing for intuitive detection of their positional status and providing a basis for subsequent target position adjustments. The allowable offset setting button 23 and the allowable offset display screen 24 allow for real-time adjustment of the target position offset, thus avoiding false alarms caused by rough edges of the baffle arm and the baffle plate. Simultaneously, the combined design of the status indicator unit 25 and the integrated information display screen ensures that the displayed content (specifically, the current position) and the hardware status (specifically, status indicator lights) remain synchronized, improving the overall integrity and smoothness of human-computer interaction.

[0050] Preferably, in some exemplary embodiments, the status indication unit 25 includes a power indicator light 251, a baffle arm normal status light 252, a baffle arm abnormal status light 253, a baffle plate normal status light 254, and a baffle plate abnormal status light 255. This arrangement provides operators with intuitive position status monitoring and fault indication, thereby significantly improving the convenience of detecting the position status of the baffle arm and the baffle plate and increasing the efficiency of fault diagnosis. It should be noted that the type of status lights in the status indication unit 25 is only one specific embodiment, and the scope of protection of this invention is not limited thereto. Those skilled in the art can add, remove, or change the specific form of the status indication according to actual needs. This invention does not limit the specific models of the display lights, setting buttons, and display screen in the interaction unit 2; those skilled in the art can make adaptive selections according to actual conditions.

[0051] For example, in some exemplary embodiments, the outer casing 1 is C-shaped; the baffle position detection device further includes a baffle storage unit (not shown in the figure) for storing the baffle arm and the baffle plate, the baffle storage unit is partially placed in the central receiving space of the C-shape, and the area of ​​the baffle storage unit aligned with the installation positions of the first sensing unit 3X and the second sensing unit 3Y is provided with a transparent window.

[0052] Preferably, in some exemplary embodiments, the number of sensing modules 31 included in the first sensing unit 3X and the second sensing unit 3Y can be adaptively configured according to the length of the transparent window to ensure full coverage of the baffle arm and the baffle plate; simultaneously, the spacing between the transmitting module 311 and the receiving module 312 within each sensing module is set according to the thickness of the baffle storage unit to ensure reliable signal reception. Furthermore, to ensure the accuracy and reliability of position detection, the total number of sensing modules 31 should be greater than the minimum required number calculated solely based on the length of the transparent window.

[0053] Based on the same inventive concept, this invention also proposes a method for detecting the position of a baffle. Please refer to [link to relevant documentation]. Figure 1 as well as Figures 4-7 , Figure 5 This is a schematic flowchart of a baffle position detection method according to one embodiment of the present invention. Figure 6a This is an example diagram showing the position of the baffle plate at the target position, detected by the baffle position detection method provided in one embodiment of the present invention. Figure 6b This is an example diagram showing the position of the baffle plate detected by the baffle position detection method provided in one embodiment of the present invention within the allowable offset range of the target position. Figure 6c This is an example diagram showing that the position of the baffle plate detected by the baffle position detection method provided in one embodiment of the present invention exceeds the allowable offset value range of the target position. Figure 7 This is an example diagram illustrating the visualization of a baffle position detected using the baffle position detection method provided in one embodiment of the present invention, displayed in an interactive unit. The baffle position detection method utilizes the baffle position detection device as described in any of the preceding claims, and includes:

[0054] S10: Receive the target position and allowable offset of the baffle from the detection configuration information through the interaction unit 2, and transmit it to the signal processing unit 4;

[0055] S20: The signal processing unit 4 receives the position status information of the baffle sent by the host 5 and controls the sensing unit 3 to sense the baffle. The sensing unit 3 outputs the acquired sensing signal to the signal processing unit 4.

[0056] S30: The signal processing unit 4 calculates the current position of the baffle based on the sensing signal and the detection configuration information, and transmits the current position to the interaction unit 2. It also determines the position detection result of the baffle based on the position status information, the current position, the target position, and the allowable offset. Based on the position detection result, it controls the display state of the interaction unit 2 and determines whether the position detection result is abnormal. If so, the signal processing unit 4 transmits the position detection result to the host 5.

[0057] Preferably, in some exemplary embodiments, please continue to refer to Figure 4 The detection configuration information also includes a preset time. The baffle includes a baffle arm and a baffle plate. The interaction unit 2 receives the target position and allowable offset of the baffle in the detection configuration information and transmits them to the signal processing unit 4, including: placing the baffle plate in its normal position; when the position display screen 22 displays the current position of the baffle plate, pressing the target position setting button 21 corresponding to the baffle plate, and pressing the target position setting button 21 again within the preset time to set the current position as the target position of the baffle plate; otherwise, the position display screen 22 returns to the interface displaying the current position; and using the offset range button in the allowable offset setting button 23 of the baffle plate (for example, ... Figure 4 (Use the plus or minus sign in the allow offset setting button 23) to determine the offset value and display it on the allow offset display screen 24. Press the confirm setting button in the allow offset setting button 23 (for example, as shown in...) Figure 4 If the "OK" button is pressed again within the preset time (as indicated by the circle in the "Allow Offset Setting" button 23), the offset range will be set to the allowable offset of the baffle plate; otherwise, the allowable offset display screen 24 will return to its initial state.

[0058] It should be noted that the setting of the target position and allowable offset of the baffle arm can be performed with reference to the configuration method of the baffle plate described above. Since the specific steps are consistent with the aforementioned principles, they will not be repeated here. Furthermore, the specific method used in this invention to set the target position and allowable offset of the baffle arm and the baffle plate is not limited, and its implementation is flexible. For example, independent control buttons can be provided for the baffle arm and the baffle plate respectively; alternatively, a single multi-function button can be used to select and set between the baffle arm and the baffle plate through mode switching.

[0059] For example, in some exemplary embodiments, the detection configuration information further includes the spacing h between the sensing modules. The signal processing unit 4 calculates the current position of the baffle based on the sensing signal and the detection configuration information, transmits the current position to the interaction unit 2, and determines the position detection result of the baffle based on the position status information, the current position, the target position, and the allowable offset. This includes: calculating the current position of the baffle based on the acquired sensing signal and the spacing h between the sensing modules; determining the target position range based on the target position and the allowable offset; and determining the position detection result of the baffle based on the position status signal, the current position, and the target position range.

[0060] For example, in some of the exemplary embodiments, please continue to refer to Figure 1 The baffle includes a baffle arm and a baffle plate. The sensing unit 3 includes a first sensing unit 3X that senses the baffle arm and a second sensing unit 3Y that senses the baffle plate. The target position of the baffle includes the target position of the baffle arm and the target position of the baffle plate. The allowable offset of the baffle includes the allowable offset of the baffle arm and the allowable offset of the baffle plate. The first sensing unit 3X senses the baffle arm to obtain a first sensing signal, and the second sensing unit 3Y senses the baffle plate to obtain a second sensing signal. The signal processing unit 4 calculates the current position of the baffle arm based on the first sensing signal and the distance h between the sensing modules 31. The signal processing unit 4 determines the target position range of the baffle arm based on its target position and allowable offset, and determines the position detection result of the baffle arm based on the position status signal, the current position of the baffle arm, and the target position range of the baffle arm. The signal processing unit 4 calculates the current position of the baffle plate based on the second sensing signal and the distance h between the sensing modules 31, determines the target position range of the baffle plate based on its target position and allowable offset, and determines the position detection result of the baffle plate based on the position status signal, the current position of the baffle plate, and the target position range of the baffle plate.

[0061] Preferably, in some exemplary embodiments, the position status signal includes a first position status signal in which both the baffle arm and the baffle disk are located in the baffle storage unit, and a second position status signal in which the baffle arm is located in the baffle storage unit and the baffle disk is located in the process cavity; determining the position detection result of the baffle based on the position status signal, the current position, and the target position range includes: when the signal processing unit 4 receives the first position status signal, determining whether the current position of the baffle arm is within the maximum sensing range of the first sensing unit 3X; if so, determining whether the current position of the baffle disk is within the target position range of the baffle disk; if so, the position detection result is normal; if not, the position detection result is abnormal; if the current position of the baffle arm is not within the maximum sensing range of the first sensing unit 3X, the position detection result is abnormal. When the signal processing unit 4 receives the second position status signal, it determines whether the second sensing unit 3Y has not sensed the baffle plate. If so, it determines whether the current position of the baffle arm is within the target position range of the baffle arm. If so, the position detection result is normal; if not, the position detection result is abnormal. If the second sensing unit 3Y senses the baffle plate, the position detection result is abnormal.

[0062] Preferably, in some exemplary embodiments, the position status signal further includes a third position status signal indicating that both the baffle arm and the baffle plate are located in the process cavity. When the signal processing unit 4 receives the third position status signal, the signal processing unit 4 automatically triggers a self-test process for the sensing unit 3, including: determining whether all sensing signals from the sensing modules 31 have been received; if any sensing module 31 fails to output a valid sensing signal, the signal processing unit 4 determines that the sensing module 31 is a faulty module; if the total number of faulty modules does not exceed five, and there are no three or more consecutive faulty modules, the signal processing unit 4 automatically blocks the signal of the faulty module and maintains the normal operation of the detection device. Simultaneously, the signal processing unit 4 sends a prompt signal to the host 5 to remind maintenance personnel to replace the faulty module. Specifically, in one specific embodiment, the sensing module 31 adopts a hot-swappable mounting structure. This design allows for the swapping of the positions of a normal module located in a non-critical detection area with the faulty module in the absence of a spare module, thereby ensuring that the detection function of the baffle position status is not affected.

[0063] To better understand the baffle position detection device and method proposed in this invention, the following will refer to the accompanying drawings. Figures 6a-7The present invention provides a detailed description of one specific embodiment of the baffle position detection device and method proposed in this invention when detecting the position of the baffle plate.

[0064] The second sensing unit 3Y is configured to include 40 pairs of sensing modules 31, wherein the spacing h between each sensing module 31 is 1 mm, and the target position of the baffle plate is determined in the following manner before the position detection of the baffle plate: the baffle plate is placed as shown in the figure. Figure 6a In the normal position state shown, the sensing signal acquired by the second sensing unit 3Y is: the 0th to 20th sensing modules sense the baffle plate, and the 21st sensing module does not sense the baffle plate; the second sensing unit 3Y transmits the sensing signal to the signal processing unit 4. The signal processing unit 4 obtains the current position of the baffle plate as 20mm~21mm based on the sensing signal and the distance, and transmits the current position to the interaction unit 2, which displays it on the position display screen 22 of the interaction unit 2. Based on the current position, the target setting button 21 is used to set the current position as the target position of the baffle plate, and the allowable offset setting button 23 is used to set the allowable offset to ±3mm and display it on the allowable offset display screen 24. At the same time, the interaction unit 2 transmits the target position and the allowable offset to the signal processing unit 4. When the signal processing unit 4 receives the first position state signal, and the current position of the baffle plate is between 17-24mm (specifically, ... Figure 6b and 6c When the position is within the allowable offset range (Spec) of the example, the signal processing unit 4 determines that the position detection result of the baffle plate is normal based on the first position status signal, the current position, the target position, and the allowable offset; otherwise, it determines that the position detection result of the baffle plate is abnormal.

[0065] For example, please see Figure 6b , Figure 6b If the baffle plate shown is located within the allowable offset range Spec, then the signal processing unit 4 determines that the position detection result of the baffle plate is normal; please refer to Figure 6c , Figure 6c If the baffle plate exceeds the allowable offset range Spec and the current position of the baffle plate is 1mm, then the signal processing unit 4 transmits the current position and the allowable offset to the interaction unit 2 and controls the position display screen 22 of the interaction unit 2 to display the current position, the allowable offset display screen 23 to display the allowable offset, and the baffle plate abnormality light 255 to illuminate (see details). Figure 7The device determines that the position detection result of the baffle is abnormal and reports the position detection result to the host. It should be noted that during the normal power-on operation of the device, the power indicator light 251 remains on.

[0066] Compared with the prior art, the baffle position detection device and method provided by the present invention have the following beneficial effects: The baffle position detection device provided by the present invention includes a housing, an interactive unit integrated on the housing, a sensing unit integrated within the housing, and a signal processing unit communicatively connected to the interactive unit and the sensing unit; the interactive unit is configured to receive detection configuration information and send it to the signal processing unit, and is also used to visualize the received signal from the signal processing unit; the sensing unit is configured to sense the baffle and output the acquired sensing signal to the signal processing unit; the signal processing unit is configured to calculate the current position of the baffle based on the sensing signal and the detection configuration information, determine the position detection result of the baffle based on the current position and the detection configuration information, control the display state of the interactive unit based on the position detection result, and is also used to transmit the position detection result to the host when the position detection result is abnormal.

[0067] Therefore, by employing a sensing unit without moving mechanical structures combined with a signal processing unit, this invention can achieve non-contact, real-time detection of the current position of the baffle and compare it with a preset target position, thereby achieving high-precision and high-reliability detection of the baffle position. Simultaneously, by receiving detection configuration information through an interactive unit and visually displaying the received signals, the intuitiveness and interactivity of the operation are significantly improved. Furthermore, by establishing a linkage communication mechanism between the signal processing unit and the host, when the signal processing unit detects that the position exceeds the allowable deviation or an anomaly occurs, it can send alarm or status signals to the host in real time, thereby achieving dynamic feedback and proactive intervention on the baffle position status, effectively avoiding misoperation caused by inaccurate baffle position.

[0068] In the description of this specification, references to terms such as "one embodiment," "some embodiments," "example," or "specific example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments. In addition, those skilled in the art can combine and integrate the different embodiments or examples described in this specification.

[0069] The above are merely preferred embodiments of the present invention and do not constitute any limitation on the present invention. Any equivalent substitutions or modifications made by those skilled in the art to the technical solutions and content disclosed in the present invention without departing from the scope of the present invention shall be deemed to have remained within the protection scope of the present invention.

Claims

1. A device for detecting the position of a baffle, characterized in that, The baffle position detection device includes: a housing, an interactive unit integrated on the housing, a sensing unit integrated within the housing, and a signal processing unit communicatively connected to the interactive unit and the sensing unit; the interactive unit is configured to receive detection configuration information and send it to the signal processing unit, and is also configured to visualize the received signal from the signal processing unit; the sensing unit is configured to sense the baffle and output the acquired sensing signal to the signal processing unit; the signal processing unit is configured to receive the baffle position status signal sent by the host and control the sensing unit to sense the baffle, calculate the current position of the baffle based on the sensing signal and the detection configuration information, determine the position detection result of the baffle based on the position status signal, the current position, and the detection configuration information, control the display state of the interactive unit based on the position detection result, and transmit the position detection result to the host when the position detection result is abnormal.

2. The baffle position detection device as described in claim 1, characterized in that, The sensing unit includes multiple pairs of sensing modules, which are arranged linearly and numbered sequentially. Each pair of sensing modules includes a transmitting module and a receiving module installed opposite each other on the upper and lower sides of the housing. The transmitting module is configured to transmit an optical signal, and the receiving module is configured to obtain the sensing signal based on the received optical signal and output the sensing signal to the signal processing unit.

3. The baffle position detection device as described in claim 2, characterized in that, The transmitting module includes a first base, an infrared light emitter fixed on the first base, and a first mounting cover detachably connected to the first base and surrounding the infrared light emitter; the receiving module includes a second base, an infrared light receiver fixed on the second base, and a second mounting cover detachably connected to the second base and surrounding the infrared light receiver.

4. The baffle position detection device as described in claim 2, characterized in that, The multiple transmitting modules / receiving modules are arranged linearly and equally.

5. The baffle position detection device as described in claim 1, characterized in that, The baffle includes a baffle arm, a baffle plate, and a drive mechanism for driving the baffle arm to move the baffle plate into and out of the process chamber; the drive mechanism is communicatively connected to the host computer to transmit the position status signals of the baffle arm and the baffle plate to the host computer; the sensing unit includes a first sensing unit and a second sensing unit; the first sensing unit is configured to sense the baffle arm and output the acquired sensing signal of the baffle arm to the signal processing unit, and the second sensing unit is configured to sense the baffle plate and output the acquired sensing signal of the baffle plate to the signal processing unit.

6. The baffle position detection device as described in claim 5, characterized in that, The interaction unit includes a target position setting button, a position display screen, an allowable offset setting button, an allowable offset display screen, and a status indicator unit; the target position setting button is configured to receive a target position setting signal and transmit it to the signal processing unit; the position display screen is configured to display the current position and the target position of the baffle in the detection configuration information; the allowable offset setting button is configured to receive the allowable offset setting and transmit it to the signal processing unit; the allowable offset display screen is configured to display the allowable offset. The status indication unit is configured to receive the location detection result signal and respond accordingly.

7. The baffle position detection device as described in claim 5, characterized in that, The outer casing is C-shaped; the baffle position detection device further includes a baffle storage unit for storing the baffle arm and the baffle plate. The baffle storage unit is partially placed in the central accommodating space of the C-shape, and a transparent window is provided in the area where the baffle storage unit is aligned with the installation positions of the first sensing unit and the second sensing unit.

8. A method for detecting the position of a baffle, characterized in that, The method for detecting the position of the baffle uses the baffle position detection device as described in any one of claims 1-7, and the method for detecting the position of the baffle includes: The interaction unit receives the target position and allowable offset of the baffle from the detection configuration information and transmits them to the signal processing unit. The signal processing unit receives the position status signal of the baffle sent by the host and controls the sensing unit to sense the baffle. The sensing unit outputs the acquired sensing signal to the signal processing unit. The signal processing unit calculates the current position of the baffle based on the sensing signal and the detection configuration information, and transmits the current position to the interaction unit. It also determines the position detection result of the baffle based on the position status signal, the current position, the target position, and the allowable offset. Based on the position detection result, it controls the display state of the interaction unit and determines whether the position detection result is abnormal. If so, the signal processing unit transmits the position detection result to the host.

9. The method for detecting the position of a baffle as described in claim 8, characterized in that, The detection configuration information also includes the spacing between the sensing modules. The signal processing unit calculates the current position of the baffle based on the sensing signal and the detection configuration information, transmits the current position to the interaction unit, and determines the position detection result of the baffle based on the position status signal, the current position, the target position, and the allowable offset, including: The current position of the baffle is calculated based on the acquired sensing signal and the spacing between the sensing modules; the target position range is determined based on the target position and the allowable offset; and the position detection result is determined based on the position status signal, the current position, and the target position range.

10. The method for detecting the position of a baffle as described in claim 9, characterized in that, The baffle includes a baffle arm and a baffle plate, and the sensing unit includes a first sensing unit that senses the baffle arm and a second sensing unit that senses the baffle plate. The target position of the baffle includes the target position of the baffle arm and the target position of the baffle disk. The allowable offset of the baffle includes the allowable offset of the baffle arm and the allowable offset of the baffle disk. The first sensing unit senses the baffle arm to obtain a first sensing signal, and the second sensing unit senses the baffle disk to obtain a second sensing signal. The signal processing unit calculates the current position of the baffle arm based on the first sensing signal and the distance between the sensing module, determines the target position range of the baffle arm based on the target position of the baffle arm and the allowable offset of the baffle arm, and determines the position detection result of the baffle arm based on the position status signal, the current position of the baffle arm and the target position range of the baffle arm. The signal processing unit calculates the current position of the baffle plate based on the second sensing signal and the distance between the sensing module, determines the target position range of the baffle plate based on the target position of the baffle plate and the allowable offset of the baffle plate, and determines the position detection result of the baffle plate based on the position status signal, the current position of the baffle plate and the target position range of the baffle plate.

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