Method for determining the profile parameters of an invar coil

Abstract

The application provides a method for determining the profile parameters of an invar coil, and relates to the field of metal mask manufacturing. The method comprises the following steps: providing a three-coordinate measuring device; cutting a target invar coil to obtain a plurality of sample coils; measuring the plurality of sample coils based on the three-coordinate measuring device to obtain the straightness, length deviation value and wave shape value of each of the plurality of sample coils, and performing linear fitting on the length, straightness, length deviation value and wave shape value of the plurality of sample coils respectively, and creating a parameter determination model according to the linear correlation degree; and obtaining at least one of the straightness, length deviation value and wave shape value of the invar coil to be measured based on the parameter determination model. The application can avoid the accumulation of positioning errors without segmental measurement, and does not need to develop a three-coordinate measuring device suitable for large-generation invar coils, which is not limited by the installation site, can improve the measurement efficiency and ensure the measurement accuracy, and greatly reduces the equipment cost and energy consumption.

Description

Technical Field

[0001] This invention relates to the field of metal mask manufacturing technology, and more specifically, to a method for determining the pattern parameters of Invar rolls. Background Technology

[0002] Invar alloys, also known as low-expansion alloys, are typically represented by Fe-Ni36 series alloys (iron-nickel based alloys, such as grade 4J36). They are widely used in fields with extremely high requirements for dimensional accuracy and environmental adaptability, such as semiconductors, aerospace, and precision instruments, for example, precision metal masks in the semiconductor field.

[0003] Before manufacturing precision metal photomasks, Invar alloy coils need to be produced through processes such as smelting and rolling. The template parameters of the Invar alloy coils (such as straightness, length deviation, and waviness) are measured to facilitate subsequent operations such as coil selection and photomask design. Generally, a coordinate measuring machine (CMM) is used to measure the spatial coordinates (X, Y, Z) of points on the coil surface, and the straightness, length deviation, and waviness of the Invar coil are calculated, i.e., the template parameters of the Invar coil.

[0004] However, due to the limited measurement range of coordinate measuring machines (CMMs), when the size of the invar roll exceeds this range, it is impossible to complete the overall measurement in a single clamping operation. Specifically, semiconductor device production lines are called generation lines. Different generation lines have different substrate sizes for their semiconductor devices, and consequently, different sizes for their metal masks and the invar rolls used to manufacture those masks. Typical lengths of unit invar rolls used to manufacture metal masks in smaller generation lines are 400mm to 1200mm, while those in larger generation lines generally exceed 1700mm. CMMs designed for smaller generation lines are often incompatible with the rolls used in larger generation lines.

[0005] Existing technologies typically employ two approaches: First, the multiple displacement measurement method, which involves measuring the workpiece in segments and then stitching the data together to obtain complete dimensional information. However, this method suffers from problems such as the accumulation of positioning errors and low measurement efficiency. Second, the use of larger-scale coordinate measuring equipment. However, the equipment cost increases exponentially and is limited by installation site conditions, resulting in poor economic efficiency. Summary of the Invention

[0006] This application addresses the shortcomings of existing methods by proposing a method for determining the pattern parameters of insulated roofing membranes, thereby solving technical problems such as low measurement efficiency and poor economic efficiency in related technologies.

[0007] In one aspect, embodiments of this application provide a method for determining the pattern parameters of Invar rolls, including:

[0008] Provide coordinate measuring equipment;

[0009] Cut the target invar roll to obtain multiple sample rolls; the multiple sample rolls have the same width but different lengths, and the length of each sample roll corresponds to the length of at least one generation line metal mask; the size of the target invar roll exceeds the measurement range of the coordinate measuring machine, while the size of the sample rolls falls within the measurement range of the coordinate measuring machine.

[0010] Multiple sample rolls were measured using a coordinate measuring machine to obtain the straightness, length deviation, and waviness values ​​of each sample roll. The lengths of the multiple sample rolls were linearly fitted with the straightness, length deviation, and waviness values, and parameters were created and models were determined based on the linear correlation.

[0011] Based on the parameter determination model, at least one of the following values ​​is obtained: straightness, length deviation, and waviness of the insulated roofing membrane to be tested.

[0012] In some embodiments, the parameter determination model includes at least one of linear models and extreme value calculation models, and the straightness, length deviation, and waviness of the invar roll material to be tested are each determined by at least one parameter determination model.

[0013] In some embodiments, the lengths of multiple sample rolls are linearly fitted with straightness, length deviation, and waviness values, respectively, and parameters are created based on the linear correlation to determine the model, including:

[0014] By linearly fitting the length and straightness of multiple sample rolls, a linear model with a correlation of no less than 90% was obtained.

[0015] ;

[0016] in, To measure the straightness of the roofing membrane, The length of the insulated roofing membrane to be measured is... This represents the median length of multiple sample rolls. This is the median value of the straightness of multiple sample rolls.

[0017] In some embodiments, cutting the target invar roll includes:

[0018] The target roofing membrane was flattened and cut to obtain multiple sample rolls.

[0019] Apply a design tension to both ends of each sample roll along its length and then release it; the design tension is determined based on the following formula:

[0020] ;

[0021] in, For the design tensile force, C is a fixed coefficient, E is the elastic modulus, b is the width of the sample roll, t is the thickness of the sample roll, and k is the curvature of the sample roll warping.

[0022] In some embodiments, the lengths of multiple sample rolls are linearly fitted with straightness, length deviation, and waviness values, respectively, and parameters are created based on the linear correlation to determine the model, including:

[0023] Linear fitting was performed on the length and length deviation values ​​of multiple sample rolls, and the correlation of the obtained linear model was less than 30%. An extreme value calculation model was established with the median value of the length deviation values ​​of multiple sample rolls as the benchmark, the length deviation values ​​outside the ±20% range were removed, and the maximum value of the remaining length deviation values ​​was taken as the length deviation value of the test Inwa roll.

[0024] Linear fitting was performed on the length and waviness values ​​of multiple sample rolls, and the correlation of the obtained linear model was less than 30%. An extreme value calculation model was established with the median waviness value of multiple sample rolls as the benchmark, removing waviness values ​​outside the ±20% range, and taking the maximum value among the remaining waviness values ​​as the extreme value calculation model of the waviness value of the invar roll to be tested.

[0025] In some embodiments, the target invar roll is cut to obtain multiple sample rolls, including:

[0026] Cut the target Invar roll material to obtain multiple initial roll materials, preprocess the multiple initial roll materials to obtain multiple sample roll materials;

[0027] Preprocessing includes:

[0028] If wrinkles appear at the edge after the initial roll material is cut and / or at the edge after the design tension is applied, determine whether the length and / or width of the wrinkles does not exceed 10%. If so, cut off the entire width of the area where the wrinkles are located. If not, discard the initial roll material and resample.

[0029] In some embodiments, the preprocessing also includes: discarding the initial roll and resampling if the initial roll is deformed or twisted.

[0030] In some embodiments, cutting the target invar roll to obtain multiple sample rolls further includes:

[0031] Mark the face, head, and tail on each sample roll;

[0032] In addition, multiple sample rolls were measured using a coordinate measuring machine, including:

[0033] Multiple sample rolls are sequentially placed on the measuring platform of a coordinate measuring machine in the order they were on the target invar roll before cutting. During each measurement, the facets and the direction from head to tail of the sample rolls are the same.

[0034] In some embodiments, multiple sample rolls are sequentially present on the target invar roll before cutting.

[0035] In some embodiments, the length of the sample roll increases sequentially according to the order on the target invar roll before cutting.

[0036] The beneficial effects of the technical solutions provided in this application include:

[0037] (1) In this embodiment, the target invar roll is cut into multiple sample rolls of different lengths. The data of the sample rolls are measured by a coordinate measuring machine adapted to the small generation line and the data is analyzed and linearly fitted to create a suitable parameter determination model. Then, the pattern parameters of the invar roll to be tested with the large generation line size are derived. There is no need for segmented measurement, which can avoid the accumulation of positioning error. There is also no need to develop a coordinate measuring machine adapted to the large generation line invar roll. It is not limited by the installation site. It can significantly reduce equipment cost and energy consumption while improving measurement efficiency and ensuring measurement accuracy.

[0038] (2) The template parameters of Invar rolls include straightness, length deviation and waviness. The correspondence between these three template parameters and the length of Invar rolls is different. In this application, a suitable parameter determination model is created for each template parameter to ensure the accuracy of template parameter determination.

[0039] (3) The lengths of metal masks for different generations are different. When using the same Invar roll to manufacture metal masks for different generations, it is necessary to cut the Invar roll into small sections of different lengths and then manufacture the metal masks for different generations accordingly. In the embodiments of this application, the lengths of the sample rolls are set to correspond to the lengths of the metal masks for different generations. By detecting and analyzing the template parameters of the sample rolls, the template parameters of the Invar roll to be tested are inferred. This ensures that the template parameters of the Invar rolls accurately correspond to the manufacturing requirements of the metal masks from the source, avoiding production deviations caused by mismatched template parameters, reducing production costs and improving production yield. Moreover, the cut sample rolls can also be used to manufacture metal masks after testing, which can avoid waste of sample rolls.

[0040] Additional aspects and advantages of this application will be set forth in part in the description which follows, and will become apparent from the description or may be learned by practice of this application. Attached Figure Description

[0041] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments of the present invention will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0042] Figure 1 This is a flowchart illustrating a method for determining the pattern parameters of an invar roll material, as provided in an embodiment of this application. Detailed Implementation

[0043] The embodiments of this application are described below with reference to the accompanying drawings. It should be understood that the embodiments described below with reference to the accompanying drawings are exemplary descriptions for explaining the technical solutions of the embodiments of this application, and do not constitute a limitation on the technical solutions of the embodiments of this application.

[0044] Those skilled in the art will understand that, unless specifically stated otherwise, the terms "described" and "the" as used herein may also include plural forms. It should be further understood that the term "comprising" as used in this application's specification means the presence of the stated features, integers, steps, operations, elements, and / or components, but does not exclude other features, information, data, steps, operations, elements, components, and / or combinations thereof supported by this art. It should be understood that when we say an element is "connected" to another element, the element may be directly connected to the other element, or it may mean that the element and the other element are connected through an intermediate element. The term "and / or" as used herein refers to at least one of the items defined by the term; for example, "A and / or B" can be implemented as "A," or as "B," or as "A and B."

[0045] First, let's explain the technical terms used in this application:

[0046] Straightness: The maximum distance that the roll material deviates from the ideal straight line (the line connecting the first and last points of the long side) along its length. It is calculated by measuring the coordinates (x, y) of multiple points along the actual long side, and then calculating the perpendicular distance d from each point to the ideal straight line. The straightness is the difference between the maximum and minimum values ​​of d at these multiple points. .

[0047] Length deviation value: IU value, IU is an international unit, short for I-Unit, which can be defined as the relative deviation between the actual length and the ideal length. The smaller the IU value, the smoother the roll material. The ideal length can be understood as the axial length without undulations along the length direction, while the actual length is the actual length longer than the ideal length due to undulations in the roll material. This application measures the length deviation value along the length direction, quantified as follows: Along the length direction, the coordinates (x, y, z) of a point are measured every 1 mm. The distance between any two adjacent points is calculated, and the sum of the distances of all points approximates the actual length. , For ideal length.

[0048] Wave value: The wave value refers to the visible wavy undulations exhibited by the roll material due to uneven internal stress. It can be defined as the height difference. The smaller the wave value, the lower the degree of undulation and the milder the wave. This application measures the height difference along the length direction, quantified as follows: Divide the roll of material into small regions along its width and obtain the coordinates of the highest point within each region. The coordinates of the lowest point of the entire roll material .

[0049] To make the objectives, technical solutions, and advantages of this application clearer, the embodiments of this application will be described in further detail below with reference to the accompanying drawings.

[0050] This application provides a method for determining the pattern parameters of Invar roll material, and the flowchart of the method is shown below. Figure 1 As shown, the method includes steps S101-S104:

[0051] S101: Provides coordinate measuring equipment.

[0052] S102: Cut the target invar roll to obtain multiple sample rolls; the multiple sample rolls have the same width but different lengths, and the length of each sample roll corresponds to the length of at least one generation line metal mask; the size of the target invar roll exceeds the measurement range of the coordinate measuring machine, while the size of the sample rolls falls within the measurement range of the coordinate measuring machine.

[0053] S103: Based on the measurement of multiple sample rolls using a coordinate measuring machine, the straightness, length deviation, and waviness values ​​of each sample roll are obtained. The lengths of the multiple sample rolls are linearly fitted with the straightness, length deviation, and waviness values, respectively. Parameters are created and the model is determined based on the linear correlation.

[0054] S104: Based on the parameter determination model, obtain at least one of the straightness, length deviation, and waviness values ​​of the insulated roofing material to be tested.

[0055] In this embodiment, the measurement range of the provided coordinate measuring machine (CMM) is adapted to the low-generation line invar roll material. However, the generation line of the target invar roll material is larger than that of the low-generation line invar roll material adapted to the CMM, and its pattern parameters cannot be measured by the CMM. For example, low-generation line invar roll material refers to G6 generation line and below, with a length not exceeding 1200mm, while high-generation line invar roll material refers to G8.5, G8.6, or even larger generation lines, with a length exceeding 1700mm.

[0056] This application embodiment cuts the target invar roll into multiple sample rolls of different lengths, measures the data of the sample rolls using a coordinate measuring machine adapted to the small generation line, performs data analysis and linear fitting, creates a suitable parameter determination model, and then derives the predicted values ​​of the pattern parameters of the invar roll to be measured for the large generation line size. It does not require segmented measurement, can avoid the accumulation of positioning errors, and does not require the separate development of a coordinate measuring machine adapted to the large generation line invar roll. It is not limited by the installation site, and can significantly reduce equipment costs and energy consumption while improving measurement efficiency and ensuring measurement accuracy.

[0057] It should be noted that the pattern parameters of Invar rolls include straightness, length deviation, and waviness. The correspondence between these three pattern parameters and the length of Invar rolls is different. In this application embodiment, a suitable parameter determination model is created for each pattern parameter to ensure the accuracy of pattern parameter determination.

[0058] Furthermore, the lengths of metal photomasks differ for different generation lines. When manufacturing metal photomasks for different generation lines using the same Invar roll, the Invar roll needs to be cut into small sections of different lengths before manufacturing the corresponding metal photomasks for each generation line. In this embodiment, the length of the sample roll is set to correspond to the length of the metal photomask for different generation lines. By detecting and analyzing the template parameters of the sample roll, the predicted template parameters of the Invar roll to be tested are derived. This ensures from the source that the template parameters of the Invar roll accurately correspond to the manufacturing requirements of the metal photomask, avoiding production deviations caused by template parameter mismatch, reducing production costs, and improving production yield. Moreover, the cut sample roll can also be used to manufacture metal photomasks after testing, avoiding waste of sample roll.

[0059] Optionally, the invar roll to be tested is an invar roll for which the pattern parameters need to be measured, and the target invar roll is a test sample used to create a parameter determination model, which facilitates the estimation of pattern parameters for other invar rolls based on the model. The invar roll to be tested and the target invar roll can be invar rolls from the same batch, and their lengths may be the same or different. The target invar roll may also be a portion cut from the invar roll to be tested.

[0060] Optionally, the parameter determination model includes three parameter determination models: one parameter determination model for determining straightness, one parameter determination model for determining length deviation value, and one parameter determination model for determining waviness value.

[0061] In some embodiments, the parameter determination model includes at least one of a linear model and an extreme value calculation model, and the straightness, length deviation, and waviness of the insulated roll material to be tested are each determined by at least one parameter determination model.

[0062] In this embodiment, linear fitting is performed on the lengths of multiple sample rolls and the measured straightness, length deviation, waviness, and other pattern parameters of the sample rolls. In each linear fitting, the type of model to be created is determined based on the linear correlation. For example, if the linear correlation is high, up to 90%, a linear model can be used to characterize the correspondence between the length of the sample rolls and the pattern parameters. Then, by inputting the length of the invar roll to be tested, the pattern parameters of the invar roll are obtained. If the linear correlation is low, the pattern parameters predicted by the linear model are less accurate. If data analysis reveals no corresponding relationship between the length and the changes in the pattern parameters, an extreme value calculation model can be used to select the largest or smallest pattern parameter data as the pattern parameters of the invar roll to be tested.

[0063] Optionally, a linear model can be used when the correlation is greater than 90%, an extreme value calculation model can be used when the correlation is less than 30%, and when the correlation is between 30% and 90%, the appropriate model can be determined through experiments based on the actual situation. Alternatively, when the correlation is between 30% and 90%, other suitable methods can be selected to measure the pattern parameters of the insulated roofing material to be tested.

[0064] The parameter determination models corresponding to straightness, length deviation, and waviness are introduced below.

[0065] In some embodiments, in step S103 above, the lengths of multiple sample rolls are linearly fitted with straightness, length deviation, and waviness values, respectively, and a model is determined based on the linear correlation. This includes the following steps:

[0066] By linearly fitting the length and straightness of multiple sample rolls, a linear model with a correlation of no less than 90% was obtained.

[0067] .

[0068] in, To measure the straightness of the roofing membrane, The length of the insulated roofing membrane to be measured is... This represents the median length of multiple sample rolls. This is the median value of the straightness of multiple sample rolls.

[0069] In this embodiment, by performing linear simulations on the length and straightness of multiple sample rolls, the following linear model is obtained:

[0070] .

[0071] The linear correlation reached 95%, indicating a strong linear correlation between length and straightness, which was used as a parameter to determine the straightness model. Therefore, the straightness of the invar roll to be tested can be obtained by substituting the actual length of the invar roll into the linear model.

[0072] It is understood that the median value of the straightness of the multiple sample rolls described in this application refers to the value located in the middle when the straightness data of the multiple sample rolls are arranged in ascending order. The length deviation value and the waviness value are similar and will not be described in detail here.

[0073] This embodiment also provides the following measurement data for sample rolls.

[0074] Specifically, in this embodiment, multiple sample rolls were labeled 1-5, and the measured length and straightness data of the multiple sample rolls are shown in Table 1:

[0075] Table 1. Length and straightness of multiple sample rolls

[0076]

[0077] Linear fitting was performed on the data of the sample rolls to obtain the linear model with a correlation of up to 95%. Therefore, the linear model obtained by fitting was used as the parameter determination model for straightness. By substituting the actual length of the invar roll to be tested into the linear model, the straightness can be obtained.

[0078] For example, based on Table 1 above, the median straightness value is 18 and the median length value is 800. When the length of the insulated roofing material to be tested is 1700mm, the straightness is calculated as follows: .

[0079] In some embodiments, in step S103 above, the lengths of multiple sample rolls are linearly fitted with straightness, length deviation, and waviness values, respectively, and a model is determined based on the linear correlation to create parameters, including:

[0080] Linear fitting was performed on the length and length deviation values ​​of multiple sample rolls, and the correlation of the obtained linear model was less than 30%. An extreme value calculation model was established with the median value of the length deviation values ​​of multiple sample rolls as the benchmark, the length deviation values ​​outside the ±20% range were removed, and the maximum value of the remaining length deviation values ​​was taken as the extreme value calculation model of the length deviation value of the test Invar roll.

[0081] In this embodiment, a linear fit was performed between the length of the sample roll material and its length deviation value. The results showed low correlation, indicating that the linear model created using linear fitting was not highly accurate. However, data analysis revealed no significant pattern in the length deviation values ​​of the multiple sample roll materials. Therefore, considering that smaller length deviation values ​​generally indicate a flatter roll material, this embodiment establishes an extreme value calculation model. This model eliminates abnormal influences by removing length deviation values ​​outside the ±20% range, and selects the maximum value from the remaining valid length deviation values ​​as the length deviation value of the Invar roll material to be tested. Extreme value calculation model:

[0082]

[0083] in, Let be the length deviation value of the invar roll to be tested, and n be the number of sample rolls, where n is a positive integer greater than 2. The length deviation values ​​for all sample rolls. The median of the length deviations of all sample rolls is given, where k is a positive integer. This refers to the length deviation value that falls between 0.8 and 1.2 times the median length deviation value, after removing length deviation values ​​outside the ±20% range. This refers to the maximum value among all length deviations that meet the aforementioned requirements.

[0084] Therefore, the length deviation value of the invar roll obtained from the maximum value has covered the data range of all length deviation values. When the maximum value can meet the design requirements of the invar roll, it can increase the possibility that the actual length deviation value of the invar roll meets the design requirements, improve the accuracy of selecting qualified invar rolls based on the predicted length deviation value, and thus avoid the problem of roll selection failure due to the large difference between the actual length deviation value and the predicted length deviation value.

[0085] This embodiment also provides the following measurement data for sample rolls.

[0086] Specifically, in this embodiment, multiple sample rolls were labeled 1-5, and the measured lengths and length deviations of the multiple sample rolls are shown in Table 2:

[0087] Table 2 Length and length deviation values ​​of multiple sample rolls

[0088]

[0089] Therefore, it can be seen that the linear correlation between the length of the sample roll and the length deviation value is poor. Thus, an extreme value calculation model was created as a parameter determination model for the length deviation value. Based on the above extreme value calculation model, the length deviation values ​​were analyzed, and the median value was found to be 0.39. Further analysis showed that all length deviation values ​​were between 0.8 and 1.2 times the median value of the length deviation value. =0.41.

[0090] In some embodiments, in step S103 above, the lengths of multiple sample rolls are linearly fitted with straightness, length deviation, and waviness values, respectively, and a model is determined based on the linear correlation to create parameters, including:

[0091] Linear fitting was performed on the length and waviness values ​​of multiple sample rolls, and the correlation of the obtained linear model was less than 30%. An extreme value calculation model was established with the median waviness value of multiple sample rolls as the benchmark, removing waviness values ​​outside the ±20% range, and taking the maximum value among the remaining waviness values ​​as the extreme value calculation model of the waviness value of the Invar roll to be tested.

[0092] Similar to the parameter determination model for length deviation, this embodiment linearly fits the length of the sample roll material with the waviness value. However, the correlation of the fitting results is low, indicating that the accuracy of the linear model created using linear fitting is not high. Data analysis reveals that the waviness values ​​of multiple sample roll materials do not exhibit a clear pattern of change. Therefore, considering that a smaller waviness value indicates a smoother roll material, this embodiment establishes an extreme value calculation model. By removing waviness values ​​outside the ±20% range to eliminate abnormal influences, the maximum value among the remaining waviness values ​​is selected as the waviness value of the invar roll material to be tested. This improves the accuracy of selecting qualified invar roll materials based on the predicted waviness value.

[0093] Extreme value calculation model:

[0094]

[0095] in, Let n be the corrugation value of the invar roll to be tested, and n be the number of sample rolls, where n is a positive integer greater than 2. For the waviness values ​​of all sample rolls, The median value of the waviness of all sample rolls is given, where k is a positive integer. This refers to wave values ​​that fall between 0.8 and 1.2 times the median wave value, after removing wave values ​​outside the ±20% range. This refers to the maximum value among all wave values ​​that meet the aforementioned requirements.

[0096] This embodiment also provides the following measurement data for sample rolls.

[0097] Specifically, in this embodiment, multiple sample rolls were labeled 1-5, and the measured length and waviness data of the multiple sample rolls are shown in Table 3:

[0098] Table 3 Length and waviness values ​​of multiple sample rolls

[0099]

[0100] Therefore, it can be seen that the linear correlation between the length of the sample roll and the waviness value is poor. Thus, an extreme value calculation model is created as a parameter determination model for the waviness value. Based on the above extreme value calculation model, the waviness values ​​are analyzed, and the median value is found to be 100. Further analysis reveals that the waviness values ​​between 0.8 and 1.2 times the median value include 95, 100, and 115. =115.

[0101] In this field, it is generally believed that the pattern of an independently existing sample roll is basically the same as that of the overall sample roll before cutting, and the changes are negligible. However, considering that the sample roll is an independent roll obtained by cutting from the target invar roll, there may still be slight changes in the pattern of multiple sample rolls from an interdependent whole to independent individuals. Therefore, in some embodiments, cutting the target invar roll in step S102 above includes:

[0102] The target roofing membrane is flattened and cut to obtain multiple sample rolls.

[0103] Apply a design tension to both ends of each sample roll along its length and then release it; the design tension is determined based on the following formula:

[0104] ;in, For the design tensile force, C is a fixed coefficient, E is the modulus of elasticity, b is the width of the sample roll, t is the thickness of the sample roll, and k is the curvature of the sample roll warping. It should be noted that the meaning of k here differs from the k value in the aforementioned extreme value calculation models for length deviation and waviness. Curvature can be calculated by measuring the chord length and bow height. The curvature here is the degree of spontaneous warping caused by changes in internal stress after the sample roll has been flattened for a period of time, not the curvature of the roll itself.

[0105] In this embodiment, by applying a designed tensile force to both ends of the cut sample roll and then releasing it, the roll automatically and smoothly unfolds under its own elasticity. This allows the shape of the individual sample roll to be as close as possible to the shape when the entire sample roll is on the target Invar roll, compensating for errors in the shape parameters caused by stress changes after cutting, and further improving the accuracy of shape parameter determination. According to the formula, the applied design tensile force can be determined by the elastic modulus, width, thickness, and warpage curvature of the sample roll. Here, C is a fixed coefficient, which may vary between different batches of Invar rolls and can be determined through tensile testing for subsequent application.

[0106] The tensile test can use a sample roll of material. By measuring the difference between the overall pattern parameters of the sample roll of material and the pattern parameters after cutting it into small segments and applying the design tensile force to each segment, the maximum design tensile force can be determined to minimize the difference, thus determining the specific value of C.

[0107] In addition, the duration of applying tension can be determined according to the situation, for example, between 1 second and 60 seconds, only needing to slightly compensate for changes in internal stress.

[0108] In some embodiments, step S102 above, cutting the target invar roll to obtain multiple sample rolls, includes the following steps:

[0109] Cut the target Invar roll material to obtain multiple initial roll materials. Preprocess the multiple initial roll materials to obtain multiple sample roll materials.

[0110] Pre-processing includes: if wrinkles occur at the edge after the initial roll material is cut and / or at the edge after the design tension is applied, determine whether the length and / or width of the wrinkles does not exceed 10%. If so, cut off the entire width of the area where the wrinkles are located. If not, discard the initial roll material and resample.

[0111] In this embodiment, considering that the cutting process may damage the sample roll, the sample roll can be pre-processed. The edge wrinkles caused by the cutting can be judged by means of detection camera or visual observation. If the length and / or width of the wrinkles is not greater than 10%, it is determined that the wrinkles have little impact on the sample roll. The wrinkled area can be removed by edge cutting. The remaining sample roll is still roughly rectangular and can be used for subsequent sample measurement operations.

[0112] If the length and / or width of the folds account for more than 10%, it is determined that the folds have a significant impact on the sample roll material and may affect the measurement results. In this case, the initial roll material can be discarded and a new sample taken to ensure the accuracy of the measurement.

[0113] If a design tension is applied to the sample roll, the wrinkles generated during the application of the design tension can also be removed in accordance with the method provided in this embodiment to ensure measurement accuracy.

[0114] Optionally, resampling can be done by resampling all sample rolls as a whole to ensure the continuity of the sample rolls, or by resampling only the discarded sample rolls, depending on the actual situation.

[0115] It should be noted that when wrinkles are generated at the edge after the initial roll material is cut and / or when wrinkles are generated at the edge after the design tension is applied, it means that the wrinkle removal method of this embodiment is applicable to wrinkles generated by cutting and wrinkles generated after the design tension is applied. If at least one type of wrinkle is generated, it can be removed by the method of this embodiment.

[0116] It should be noted that the percentage of pleat length and / or width not exceeding 10% means that at least one of the pleat's length and width, along with the corresponding edge of the roll material, accounts for no more than 10%. For example, considering that the length direction of the pleat during the cutting process may be consistent with the cutting direction, which corresponds to the wide side of the roll material, the percentage of pleat length and / or width not exceeding 10% includes two cases: the pleat length accounting for no less than 10% of the wide side of the roll material, and the pleat width accounting for no less than 10% of the long side of the roll material.

[0117] In some embodiments, the preprocessing further includes the following steps: if the initial roll material is deformed or twisted, discard the initial roll material and resample.

[0118] In this embodiment, the deformation and distortion caused by cutting are determined by means of a detection camera or visual observation. The distortion and deformation have a significant impact and can easily lead to complete distortion of the pattern of the sample roll material. Therefore, it is necessary to resample to ensure the accuracy of the measurement.

[0119] In some embodiments, the step S102 above, which involves cutting the target Invar roll to obtain multiple sample rolls, further includes the following steps:

[0120] Mark the face number, head, and tail on each sample roll.

[0121] Furthermore, the measurement of multiple sample rolls based on a coordinate measuring machine in step S103 above includes the following steps:

[0122] Multiple sample rolls are sequentially placed on the measuring platform of a coordinate measuring machine in the order they were on the target invar roll before cutting. During each measurement, the facets and the direction from head to tail of the sample rolls are the same.

[0123] In this embodiment, the sample roll can be marked after cutting, marking the face information (such as front and back), and marking the head and tail. This facilitates subsequent measurements by strictly following the arrangement order and face number of the sample roll, restoring the existence state of the independent sample roll on the target invar roll as much as possible, and improving measurement accuracy.

[0124] In some embodiments, multiple sample rolls are sequentially present on the target invar roll before cutting.

[0125] In this embodiment, multiple sample rolls of material exist sequentially and continuously on the target invar roll before cutting. Continuous sampling can capture the longitudinal variation trend of the target invar roll, determine whether the roll quality is stable, and more easily detect systematic deviations, avoiding missing critical intervals. Furthermore, it can also reduce the waste of target invar roll material.

[0126] In some embodiments, the length of the sample roll increases sequentially according to the order on the target invar roll before cutting.

[0127] In this embodiment, the length of the sample roll increases sequentially according to the continuous sampling order. This allows for a systematic observation of the continuous influence of length on the pattern parameters under the same measurement test, the same material, and the same process conditions. This enables a more accurate representation of the existence of individual sample rolls on the target invar roll, thus improving measurement accuracy.

[0128] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A method for determining the pattern parameters of insulated roofing membrane, characterized in that, include: Provide coordinate measuring equipment; Cut the target insulated roofing material to obtain multiple sample roofing materials; The sample rolls have equal widths but different lengths, and the length of each sample roll corresponds to the length of at least one generation line metal mask; the size of the target Invar roll exceeds the measurement range of the coordinate measuring machine, while the size of the sample roll falls within the measurement range of the coordinate measuring machine. Based on the coordinate measuring device, multiple sample rolls are measured to obtain the straightness, length deviation and waviness values ​​of each sample roll. The lengths of the multiple sample rolls are linearly fitted with the straightness, length deviation and waviness values ​​respectively. Parameters are created and models are determined based on the linear correlation. Based on the parameters, a model is determined to obtain at least one of the straightness, length deviation, and waviness values ​​of the insulated roofing material to be tested.

2. The method for determining pattern parameters according to claim 1, characterized in that, The parameter determination model includes at least one of linear model and extreme value calculation model, and the straightness, length deviation value and waviness value of the tested insulated roofing membrane are each determined by at least one of the parameter determination models.

3. The method for determining pattern parameters according to claim 1, characterized in that, The lengths of multiple sample rolls are linearly fitted to straightness, length deviation, and waviness values, respectively. A model is then created based on the linear correlation to determine parameters, including: By linearly fitting the length and straightness of multiple sample rolls, a linear model with a correlation of not less than 90% is obtained: ； in, The straightness of the invar roll to be tested, The length of the invar roll to be tested, The median value of the length of the multiple sample rolls. The median value of the straightness of the multiple sample rolls.

4. The method for determining pattern parameters according to claim 1, characterized in that, Cutting the target insulated roofing membrane includes: The target insulated roll material is flattened and cut to obtain multiple sample roll materials; A design tension is applied to both ends of each sample roll along its length and then released; the design tension is determined based on the following formula: ； in, For the design tensile force, C is a fixed coefficient, E is the elastic modulus, b is the width of the sample roll, t is the thickness of the sample roll, and k is the curvature of the sample roll warping.

5. The method for determining pattern parameters according to claim 1, characterized in that, The lengths of multiple sample rolls are linearly fitted to straightness, length deviation, and waviness values, respectively. A model is then created based on the linear correlation to determine parameters, including: Linear fitting was performed on the length and length deviation values ​​of multiple sample rolls, and the correlation of the obtained linear model was less than 30%. An extreme value calculation model was established with the median value of the length deviation values ​​of multiple sample rolls as the benchmark, the length deviation values ​​outside the ±20% range were removed, and the maximum value of the remaining length deviation values ​​was taken as the length deviation value of the test Invar roll. Linear fitting was performed on the lengths and waviness values ​​of multiple sample rolls, and the correlation of the resulting linear model was less than 30%. An extreme value calculation model was established with the median waviness value of the multiple sample rolls as the benchmark, removing waviness values ​​outside the ±20% range, and taking the maximum value among the remaining waviness values ​​as the extreme value of the waviness value of the invar roll to be tested.

6. The method for determining pattern parameters according to claim 1, characterized in that, Cut the target Invar roll material to obtain multiple sample roll materials, including: Cut the target Invar roll to obtain multiple initial rolls, preprocess the multiple initial rolls to obtain multiple sample rolls; The preprocessing includes: If wrinkles appear at the edge after the initial roll material is cut and / or at the edge after the design tension is applied, determine whether the length and / or width of the wrinkles is no more than 10%. If yes, cut off the entire width of the area where the wrinkles are located. If no, discard the initial roll material and resample.

7. The method for determining pattern parameters according to claim 6, characterized in that, The preprocessing also includes: if the initial roll material is deformed or twisted, discarding the initial roll material and resampling.

8. The method for determining pattern parameters according to claim 1, characterized in that, Cutting the target Invar roll material yields multiple sample roll materials, including: Mark the facets, head, and tail on each of the sample rolls; And, based on the coordinate measuring device, measuring multiple sample rolls, including: Multiple sample rolls are sequentially placed on the measuring platform of the coordinate measuring device in the order they were on the target invar roll before cutting. During each measurement, the facets and the direction from head to tail of the sample rolls are the same.

9. The method for determining pattern parameters according to claim 8, characterized in that, The sample rolls were sequentially and continuously present on the target invar roll before being cut.

10. The method for determining pattern parameters according to claim 8, characterized in that, The length of the sample roll increases sequentially according to the order on the target invar roll before cutting.

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