一种高可靠陶瓷封装气密性封帽的在线质量评估方法
By synchronously collecting and fusing vibration, capacitance, and phase angle information during the solder solidification process, the problem of synchronization and response delay of multi-dimensional physical quantities in existing technologies has been solved, achieving highly reliable online assessment of the airtightness of the cap and improving the accuracy of the assessment and production efficiency.
CN122108458BActive Publication Date: 2026-07-17NANJING RUIXINFENG ELECTRONIC TECH CO LTD
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- NANJING RUIXINFENG ELECTRONIC TECH CO LTD
- Filing Date
- 2026-04-27
- Publication Date
- 2026-07-17
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Figure CN122108458B_ABST
Abstract
本发明提供的一种高可靠陶瓷封装气密性封帽的在线质量评估方法,属于半导体封装与气密性检测技术领域,本发明实现了对封帽焊料凝固全过程的动态监测,克服了单一传感器易受干扰的局限性,显著提升了评估的鲁棒性与准确性;确保了振动与电容信号在时间轴上的物理一致性,为后续特征提取奠定了可靠基础,且基于振动信号自适应拟合衰减时间常数,并结合电容信号滑动窗口积分动态判定凝固收缩结束点,避免了固定时间窗带来的偏差,使凝固收缩完成度的计算更具物理意义。本发明融合多特征判据,实现了对封帽气密性的快速、非破坏性在线全检,有效替代传统氦质谱检漏的抽检模式,大幅提升了生产效率与质量控制水平。
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