一种连续红外光谱探测的MEMS传感器及其制备方法
By employing MEMS sensor fabrication methods and combining MEMS galvanometers with pyroelectric infrared detectors, the problems of complex infrared spectral detection structures and high costs have been solved, thereby improving the accuracy and system integration of continuous infrared spectral detection.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- SHENZHEN MEISI XIANRUI ELECTRONICS CO LTD
- Filing Date
- 2026-04-30
- Publication Date
- 2026-07-17
AI Technical Summary
Existing infrared spectroscopy detection structures suffer from structural complexity and high cost, making it difficult to achieve multi-band detection and accurate detection of mixed gas composition.
Using MEMS sensor fabrication methods, an oxide layer, a metal thin film, and an infrared narrowband filter film are deposited on a silicon substrate. Combined with inductively coupled plasma etching, a movable structure and a suspended MEMS galvanometer are formed and bonded to a pyroelectric infrared detector to achieve continuous infrared spectral detection.
This technology improves the accuracy of infrared spectroscopy gas detection with a simple structure, enhances system integration and anti-interference capabilities, and reduces system costs.
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Figure CN122109000B_ABST