Detection method, device and equipment of diffractive optical waveguide and storage medium
By setting sampling points in the coupling and pupil expansion regions of the diffractive waveguide, and using a diffraction spectrometer and laser to detect abnormal sampling points and regions, the problem of low testing efficiency in the existing technology is solved, and detection with a wider range and faster speed is achieved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- GOERTEK OPTICAL TECH CO LTD
- Filing Date
- 2024-11-27
- Publication Date
- 2026-05-29
Smart Images
Figure CN122109092A_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of optical testing technology, and in particular to a method, apparatus, device and storage medium for detecting diffractive waveguides. Background Technology
[0002] Diffractive waveguides are the most common optical display devices in the AR field. Common diffractive waveguides are divided into 1D architecture and 2D structure. The 1D architecture diffractive waveguide has three regions: the coupling region, the pupil expansion region, and the coupling out region.
[0003] In the fabrication of diffractive optical waveguides, a master mold is first prepared on a silicon wafer using micro-nano fabrication techniques such as electron beam lithography (EBL) and inductively coupled plasma etching (ICP). Then, nanoimprint lithography is typically used to replicate the master mold, producing an imprint sheet. Finally, the imprint sheet undergoes processes such as cutting and ink rolling to produce the diffractive optical waveguide sheet.
[0004] In the fabrication of 1D diffraction gratings, the fabrication quality of the grating structure in each region plays a decisive role in the final imaging effect. If the imaging effect deviates, it is necessary to trace back and inspect the grating structure of each region. However, in this scenario, commonly used scanning electron microscopy (SEM) and atomic force microscopy (AFM) testing methods are not suitable because they are relatively slow and have a limited range for each test, resulting in low testing efficiency.
[0005] In summary, improving the testing efficiency of the grating structure region of diffractive waveguides has become a pressing technical problem to be solved in this field.
[0006] The above content is only used to help understand the technical solution of this application and does not represent an admission that the above content is prior art. Summary of the Invention
[0007] The main objective of this application is to provide a detection method, apparatus, device, and storage medium for diffractive waveguides, aiming to solve the technical problem of how to improve the testing efficiency of the grating structure region of diffractive waveguides.
[0008] To achieve the above objectives, this application proposes a detection method for diffractive optical waveguides, the method comprising:
[0009] Obtain the target diffraction spectrum at multiple sampling points in the coupling region and pupil expansion region of the target diffraction waveguide;
[0010] Each target diffraction spectrum is compared with a preset simulated diffraction spectrum to determine whether there are any abnormal sampling points in each sampling point, wherein the target diffraction spectrum of the abnormal sampling point is different from the simulated diffraction spectrum;
[0011] By illuminating the coupling region with a laser, the light energy values of each sampling region in the coupling region of the target diffracted waveguide are collected to obtain a target light energy distribution map, wherein the region formed by each sampling region is consistent with the coupling region;
[0012] The target light energy distribution map is compared with a preset simulated light energy distribution map to determine whether there is an abnormal sampling region in the coupled region, wherein the light energy value of the abnormal sampling region is different from the light energy value corresponding to the abnormal sampling region in the simulated light energy distribution map.
[0013] In one embodiment, the sampling points include: a coupling sampling point and a pupil diffraction sampling point, and the target diffraction spectrum includes a coupling diffraction spectrum and a pupil diffraction spectrum; the step of acquiring the target diffraction spectrum of multiple sampling points in the coupling region and pupil region of the target diffraction waveguide includes:
[0014] The coupling diffraction spectra at each coupling sampling point in the coupling region are obtained sequentially by a diffraction spectrometer, wherein each coupling sampling point in the coupling region is uniformly distributed in the coupling region;
[0015] The diffraction spectra of each of the pupil diffraction sampling points in the pupil diffraction region are obtained sequentially using a diffraction spectrometer, wherein each of the pupil diffraction sampling points in the pupil diffraction region is uniformly distributed in the pupil diffraction region.
[0016] In one embodiment, the simulated diffraction spectrum includes: simulated coupled-in diffraction spectrum and simulated expanded-pupil diffraction spectrum;
[0017] Before the step of comparing each of the target diffraction spectra with a preset simulated diffraction spectrum, the method further includes:
[0018] Obtain the simulated coupling diffraction spectrum of the first simulated structure corresponding to the coupling region, wherein the grating structure of the first simulated structure is the same as the grating structure of the coupling region;
[0019] Obtain the simulated pupil diffraction spectrum of the second simulated structure corresponding to the pupil expansion region, wherein the grating structure of the second simulated structure is the same as the grating structure of the pupil expansion region.
[0020] In one embodiment, the step of comparing each of the target diffraction spectra with a preset simulated diffraction spectrum includes:
[0021] Each of the stated coupling diffraction spectra is compared with the simulated coupling diffraction spectra;
[0022] Each of the described expanded pupil diffraction spectra is compared with the simulated expanded pupil diffraction spectra.
[0023] In one embodiment, the step of determining whether there are abnormal sampling points among the sampling points includes:
[0024] Traverse each of the target diffraction spectra and compare the target diffraction spectra with the simulated diffraction spectra;
[0025] If the difference between the target diffraction spectrum and the simulated diffraction spectrum exceeds a preset threshold, then the sampling point corresponding to the target diffraction spectrum is determined to be an abnormal sampling point.
[0026] In one embodiment, the step of acquiring the light energy values of each sampling region in the coupling region of the target diffracting waveguide to obtain the target light energy distribution map includes:
[0027] The light energy value of each sampling area in the coupled region is collected by a pinhole detector array;
[0028] The target light energy distribution map is generated by arranging the light energy values according to the pinhole detector array.
[0029] In one embodiment, the step of determining whether an abnormal sampling region exists in the coupled region includes:
[0030] When the area of the sampling area is a preset minimum detection area, the light energy values corresponding to each sampling area in the target light energy distribution map are traversed to determine the simulated light energy value corresponding to the light energy value in the simulated light energy distribution map.
[0031] If the light energy value is different from the simulated light energy value, then the sampling area corresponding to the light energy value is determined to be an abnormal sampling area.
[0032] In one embodiment, the step of determining whether an abnormal sampling region exists in the coupled region includes:
[0033] If the area of the sampling region is greater than the preset minimum detection area, the light energy values corresponding to each sampling region in the target light energy distribution map are traversed to determine the simulated light energy value corresponding to the light energy value in the simulated light energy distribution map.
[0034] If the light energy value is different from the simulated light energy value, the sampling area is regarded as an abnormal area to be tested;
[0035] New sampling areas are identified within the abnormal areas;
[0036] Collect the light energy values of each of the new sampling areas in the abnormal region to obtain a new target light energy distribution map;
[0037] Return to the step of traversing the light energy values corresponding to each sampling area in the target light energy distribution map until the area of the abnormal area is less than or equal to the preset minimum detection area, and then take the current abnormal area as the abnormal sampling area.
[0038] Furthermore, to achieve the above objectives, this application also proposes a detection device for a diffractive optical waveguide, the detection device comprising:
[0039] The direct detection module is used to acquire the target diffraction spectrum of multiple sampling points in the coupling region and pupil expansion region of the target diffraction waveguide;
[0040] The first anomaly detection module is used to compare the diffraction spectra of each target with the preset simulated diffraction spectra to determine whether there are any abnormal sampling points in each sampling point, wherein the target diffraction spectra of the abnormal sampling points are different from the simulated diffraction spectra.
[0041] A single positioning module is used to irradiate the coupling region with a laser, collect the light energy values of each sampling region in the coupling region of the target diffractive waveguide, and obtain a target light energy distribution map, wherein the region formed by each sampling region is consistent with the coupling region;
[0042] The second anomaly detection module is used to compare the target light energy distribution map with a preset simulated light energy distribution map to determine whether there is an abnormal sampling area in the coupled region, wherein the light energy value of the abnormal sampling area is different from the light energy value corresponding to the abnormal sampling area in the simulated light energy distribution map.
[0043] In addition, to achieve the above objectives, this application also proposes a detection device for a diffractive optical waveguide, the device comprising: a memory, a processor, and a computer program stored in the memory and executable on the processor, the computer program being configured to implement the steps of the detection method for the diffractive optical waveguide as described above.
[0044] In addition, to achieve the above objectives, this application also proposes a storage medium, which is a computer-readable storage medium, on which a computer program is stored, and when the computer program is executed by a processor, it implements the steps of the detection method for diffractive waveguides as described above.
[0045] In addition, to achieve the above objectives, this application also provides a computer program product, which includes a computer program that, when executed by a processor, implements the steps of the detection method for diffractive waveguides as described above.
[0046] This application provides a method for detecting diffractive waveguides. Multiple sampling points are set in the coupling region and the pupil expansion region. By comparing the target diffraction spectrum of each sampling point with a pre-set simulated diffraction spectrum, abnormal sampling points are detected in each sampling point. The coupling region and the pupil expansion region are then investigated. Furthermore, the coupling region is irradiated with a laser, and the light energy of the coupled light rays at multiple sampling areas in the coupling region is collected to obtain a target light energy distribution map. The target light energy distribution map is compared with a pre-set simulated light energy distribution map to detect abnormal sampling areas in each sampling region, and the coupling region is then investigated.
[0047] In summary, by setting multiple sampling points, this application can uniformly detect all points in the entire area. Compared with the method of using SEM and AFM to detect a small area, this application can test a larger area and faster each time, thereby improving the testing efficiency of the grating structure region of the diffractive waveguide. Attached Figure Description
[0048] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application.
[0049] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, for those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0050] Figure 1 This is a schematic flowchart of the detection method for diffractive optical waveguides provided in Embodiment 1 of this application;
[0051] Figure 2 This is a schematic diagram of the 1D architecture diffractive waveguide of this application;
[0052] Figure 3 This is a schematic diagram of dense sampling in the coupling region involved in the embodiment of the detection method for diffractive waveguides of this application;
[0053] Figure 4 This is a schematic diagram of dense sampling in the pupil expansion region involved in the embodiment of the detection method for diffractive waveguides in this application;
[0054] Figure 5 This is a schematic diagram of the coupling region testing device involved in the embodiment of the detection method for diffractive optical waveguides of this application;
[0055] Figure 6 This is a schematic diagram of the coupling region cyclic positioning test device involved in the embodiment of the detection method for diffractive optical waveguides of this application;
[0056] Figure 7 This is a schematic diagram of the module structure of the detection device for the diffractive waveguide in an embodiment of this application;
[0057] Figure 8 This is a schematic diagram of the hardware operating environment involved in the detection method of the diffractive waveguide in the embodiments of this application.
[0058] The purpose, features, and advantages of this application will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation
[0059] It should be understood that the specific embodiments described herein are merely illustrative of the technical solutions of this application and are not intended to limit this application.
[0060] To better understand the technical solution of this application, a detailed description will be provided below in conjunction with the accompanying drawings and specific implementation methods.
[0061] The main solution of this application embodiment is as follows: 1. Obtain the target diffraction spectra of multiple sampling points in the coupling region and pupil expansion region of the target diffractive waveguide; 2. Compare each target diffraction spectrum with a preset simulated diffraction spectrum to determine whether there are any abnormal sampling points in each sampling point, wherein the target diffraction spectrum of the abnormal sampling point is different from the simulated diffraction spectrum; 3. Irradiate the coupling region with a laser and collect the light energy values of each sampling region in the coupling region of the target diffractive waveguide to obtain a target light energy distribution map; 4. Compare the target light energy distribution map with a preset simulated light energy distribution map to determine whether there are any abnormal sampling regions in the coupling region, wherein the light energy value of the abnormal sampling region is different from the light energy value corresponding to the abnormal sampling region in the simulated light energy distribution map.
[0062] In this embodiment, for ease of description, the following description uses the detection device of the diffractive waveguide as the main body.
[0063] Diffractive waveguides are the most common optical display devices in the AR field. Common diffractive waveguides are divided into 1D architecture and 2D structure. The 1D architecture diffractive waveguide has three regions: the coupling region, the pupil expansion region, and the coupling out region.
[0064] In the fabrication of diffractive optical waveguides, a master mold is first prepared on a silicon wafer using micro-nano fabrication techniques such as electron beam lithography (EBL) and inductively coupled plasma etching (ICP). Then, nanoimprint lithography is typically used to replicate the master mold, producing an imprint sheet. Finally, the imprint sheet undergoes processes such as cutting and ink rolling to produce the diffractive optical waveguide sheet.
[0065] In the fabrication of 1D diffraction gratings, the fabrication quality of the grating structure in each region plays a decisive role in the final imaging effect. If the imaging effect deviates, it is necessary to trace back and inspect the grating structure of each region. However, in this scenario, commonly used scanning electron microscopy (SEM) and atomic force microscopy (AFM) testing methods are not suitable because they are relatively slow and have a limited range for each test, resulting in low testing efficiency.
[0066] In summary, improving the testing efficiency of the grating structure region of diffractive waveguides has become a pressing technical problem to be solved in this field.
[0067] To address the aforementioned issues, this application provides a method for detecting diffractive waveguides. This method involves setting multiple sampling points in the coupling region and the pupil expansion region. By comparing the target diffraction spectrum of each sampling point with a pre-set simulated diffraction spectrum, abnormal sampling points are detected in each sampling point. The coupling region and pupil expansion region are then investigated. Furthermore, by illuminating the coupling region with a laser, the light energy of the coupled light rays at multiple sampling areas in the coupling region is collected to obtain a target light energy distribution map. This target light energy distribution map is compared with a pre-set simulated light energy distribution map to detect abnormal sampling areas in each sampling region, and the coupling region is then investigated.
[0068] In summary, by setting multiple sampling points, this application can uniformly detect all points in the entire area. Compared with the method of using SEM and AFM to detect a small area, this application can test a larger area and faster each time, thereby improving the testing efficiency of the grating structure region of the diffractive waveguide.
[0069] It should be noted that the executing entity in this embodiment can be a computing service device with data processing, network communication, and program execution functions, such as a tablet computer, personal computer, or mobile phone, or an electronic device capable of performing the above functions, such as a detection device for diffractive optical waveguides. The following description uses a detection device for diffractive optical waveguides as an example to illustrate this embodiment and the subsequent embodiments.
[0070] Based on this, embodiments of this application provide a method for detecting diffractive optical waveguides, referring to... Figure 1 , Figure 1 This is a flowchart illustrating the first embodiment of the detection method for diffractive waveguides in this application.
[0071] In this embodiment, the detection method for the diffractive waveguide includes steps S10 to S50:
[0072] Step S10: Obtain the target diffraction spectrum of multiple sampling points in the coupling region and pupil expansion region of the target diffraction waveguide;
[0073] It should be noted that in this embodiment, please refer to... Figure 2 , Figure 2 This is a schematic diagram of a 1D architecture diffractive waveguide, as shown below. Figure 2 As shown, the 1D architecture diffractive waveguide has three regions: the coupling region (IC), the pupil expansion region (EPE), and the coupling out region (OC).
[0074] In this embodiment, when detecting a diffractive waveguide, the coupling region and the pupil expansion region need to be investigated first. Firstly, multiple sampling points are selected within the coupling region and pupil expansion region of the target diffractive waveguide. Then, the target diffraction spectra at these sampling points are measured and recorded; the target diffraction spectra reflect the diffraction characteristics of the waveguide at these points.
[0075] Furthermore, in a feasible implementation, the sampling points include: a coupled-in sampling point and a dilated-pupil sampling point, and the target diffraction spectrum includes a coupled-in diffraction spectrum and a dilated-pupil diffraction spectrum; the above step S10 may include steps S11 to S12:
[0076] Step S11: The coupling diffraction spectra at each coupling sampling point in the coupling region are obtained sequentially by a diffraction spectrometer, wherein each coupling sampling point in the coupling region is uniformly distributed in the coupling region.
[0077] In this embodiment, a diffraction spectrometer is used to measure each coupling sampling point in the coupling region individually. These coupling sampling points are uniformly distributed within the coupling region to ensure the comprehensiveness and accuracy of the measurement. The coupling diffraction spectrum at each coupling sampling point can be obtained through measurement.
[0078] Step S12: The diffraction spectra of each of the diffraction sampling points in the diffraction region are obtained sequentially by a diffraction spectrometer, wherein each of the diffraction sampling points in the diffraction region is uniformly distributed in the diffraction region.
[0079] In this embodiment, a diffraction spectrometer is also used to measure each pupil sampling point in the pupil expansion region. The pupil sampling points are also evenly distributed within the pupil expansion region, and the pupil diffraction spectrum at each pupil sampling point can be obtained through measurement.
[0080] Step S20: Compare each of the target diffraction spectra with the preset simulated diffraction spectra to determine whether there are any abnormal sampling points in each of the sampling points, wherein the target diffraction spectra of the abnormal sampling points are different from the simulated diffraction spectra;
[0081] In this embodiment, after acquiring each sampling point, the acquired target diffraction spectrum is compared one by one with a preset simulated diffraction spectrum. The preset simulated diffraction spectrum is an ideal diffraction spectrum obtained based on theoretical calculations or previous experimental data. By comparison, the device can determine which sampling points have differences between the target diffraction spectrum and the simulated diffraction spectrum; these sampling points with differences are defined as abnormal sampling points.
[0082] Furthermore, in one feasible implementation, the simulated diffraction spectrum includes: simulated coupled-in diffraction spectrum and simulated expanded-pupil diffraction spectrum; prior to step S20 above, the method may further include steps A10 to A20:
[0083] Step A10: Obtain the simulated coupling diffraction spectrum of the first simulated structure corresponding to the coupling region, wherein the grating structure of the first simulated structure is the same as the grating structure of the coupling region.
[0084] In this embodiment, the device acquires the simulated coupling-in diffraction spectrum corresponding to the coupling region. Utilizing a known first simulation structure, the grating design of which is completely identical to the grating structure of the coupling region of the target diffractive waveguide. Through simulation or calculation, the device obtains the diffraction spectrum of this simulation structure under ideal conditions, i.e., the simulated coupling-in diffraction spectrum.
[0085] Step A20: Obtain the simulated pupil diffraction spectrum of the second simulated structure corresponding to the pupil expansion region, wherein the grating structure of the second simulated structure is the same as the grating structure of the pupil expansion region.
[0086] In this embodiment, the device acquires the simulated expanded pupil diffraction spectrum corresponding to the expanded pupil region. Similarly, the device employs a second simulation structure, the grating design of which matches the expanded pupil region grating structure of the target diffractive waveguide. The simulated expanded pupil diffraction spectrum is obtained through the same simulation or calculation process.
[0087] Furthermore, in a feasible implementation, the step of comparing each target diffraction spectrum with a preset simulated diffraction spectrum in step S20 above may include steps S21 to S22:
[0088] Step S21: Compare each of the stated insertion diffraction spectra with the simulated insertion diffraction spectra;
[0089] In this embodiment, the coupling diffraction spectrum of each coupling sampling point in the coupling region is compared with the preset simulated coupling diffraction spectrum. This checks whether the actual diffraction performance of the coupling region matches the theoretical expectation. By comparing the diffraction spectrum of each coupling sampling point one by one, it is possible to identify which sampling points deviate from the simulation results, thereby determining whether these sampling points are part of the abnormal sampling points.
[0090] Step S22: Compare each of the pupil diffraction spectra with the simulated pupil diffraction spectra.
[0091] In this embodiment, the diffraction spectrum of each diffraction sampling point in the diffraction region is compared with the preset simulated diffraction spectrum. By comparing the diffraction spectrum of each diffraction sampling point, it is possible to identify which sampling points in the diffraction region do not match the simulation results, and thus determine whether these sampling points are another part of the abnormal sampling points.
[0092] Furthermore, in a feasible implementation, the step of determining whether there are abnormal sampling points among the sampling points in step S20 above may include steps S23 to S24:
[0093] Step S23: Traverse each of the target diffraction spectra and compare the target diffraction spectra with the simulated diffraction spectra;
[0094] In this embodiment, all target diffraction spectra are traversed, including both coupled-in diffraction and expanded-pupil diffraction spectra. For each target diffraction spectrum, the device compares it with the corresponding simulated diffraction spectrum.
[0095] Step S24: If the difference between the target diffraction spectrum and the simulated diffraction spectrum exceeds a preset threshold, then the sampling point corresponding to the target diffraction spectrum is determined to be an abnormal sampling point.
[0096] In this embodiment, during the comparison process, the difference between the target diffraction spectrum and the simulated diffraction spectrum is examined. This difference can be quantified by calculating some metric between the two (such as mean square error, peak difference, etc.). If the difference between a target diffraction spectrum and the simulated diffraction spectrum exceeds a preset threshold, the device will determine that the sampling point corresponding to the target diffraction spectrum is an abnormal sampling point. This threshold is preset based on factors such as actual needs, manufacturing precision, and performance requirements, and is used to determine whether the difference is significant enough to be considered abnormal.
[0097] Specifically, as an example, the coupling region of the diffractive waveguide is a 1D grating structure, commonly including blazed gratings, tilted gratings, and straight gratings. Assuming the designed grating structure is a blazed grating, structural simulation can be performed to obtain the diffraction spectrum. A diffraction spectrometer can then be used to detect the diffraction spectrum of the grating in this coupling region. To troubleshoot problems in the coupling region, dense sampling tests are required. Please refer to... Figure 3 , Figure 3 This is a schematic diagram of dense sampling in the coupling region involved in the embodiment of the detection method for diffractive waveguides of this application, as shown below. Figure 3As shown, the black circles represent the detection points. After detecting these points, the corresponding diffraction spectra can be obtained. These diffraction spectra are compared with the simulation results. If there are no abnormalities, the coupling region is correct. If there are deviations, the structure at the corresponding position has changed, and the position can be located.
[0098] When testing the pupil dilation area, the testing methods and apparatus are similar to those described above for the coupling area. However, to troubleshoot problems in the pupil dilation area, dense sampling testing of the pupil dilation area is required. Please refer to [the relevant documentation]. Figure 4 , Figure 4 This is a schematic diagram of dense sampling in the pupil expansion region involved in the embodiment of the detection method for diffractive waveguides of this application, as shown below. Figure 4 As shown, the black circles represent the detection points. After detecting these points, the corresponding diffraction spectra can be obtained. These diffraction spectra are compared with the simulation results. If there are no abnormalities, the pupil expansion area is correct. If there are deviations, the structure at the corresponding position has changed, and the position can be located.
[0099] In another feasible implementation, the coupling region and the pupil expansion region can be indirectly detected. This method involves measuring the light efficiency at the front end of the pupil expansion region and comparing it with the light efficiency at the front end of the pupil expansion region of a normal waveguide to indicate whether there is an anomaly in the coupling region. Parallel light is projected by a projection optical engine to cover the coupling region (IC). A row of pinhole detectors is placed at the front end of the pupil expansion region (TG)—the edge closest to the IC—to collect the light energy at that location. Since this is the very front end of the TG, all the light originates from the IC, thus indirectly reflecting whether the IC structure has changed. This yields the intensity distribution at the front end of the pupil expansion region: (..., 175, 180, 175, ...), while a reference intensity distribution can be obtained by testing or simulating a normal waveguide: (..., 180, 185, 180, ...).
[0100] If the intensity distributions of the two are the same, then the structure of the coupled region has not changed. If the distributions are different, then detailed detection of different sampling points in the coupled region is required.
[0101] When indirectly detecting the pupil expansion region, the approximate range of variation in the pupil expansion region is indirectly reflected by detecting the light intensity distribution at the front end of the coupling region. A laser projects a point light source into the coupling region, and then a one-dimensional array of pinhole detectors is placed at the front end of the coupling region to detect the light intensity distribution at the front end. For example, the light intensity distribution obtained by simulation or detection of a normal waveguide is (..., 181, 178, 175, 170, 168, 164, 162, 160, ...), while the light intensity distribution obtained by detecting an abnormal waveguide is (..., 181, 178, 175, 170, 168, 164, 140, 160, ...). It can be seen that the location of the abrupt change is within the pupil expansion range corresponding to the region with different light intensities. This range can be confirmed by the following method: First, based on the vector relationship between the coupling region, the pupil expansion region, and the coupling region, the source path of the light intensity corresponding to the detection point at the front end of the coupling region can be obtained. Next, based on the path of the light source, the range of the pupil expansion area corresponding to the anomaly point is locked. Two extension lines parallel to the above propagation path are drawn on the lower edge of the previous detector and the upper edge of the next detector of the anomaly point detector. The part enclosed by the extension lines and the pupil expansion area is the range where the anomaly may occur. Subsequently, only detailed SEM or AFM detection is needed in this small area.
[0102] Step S30: Irradiate the coupling region with a laser and collect the light energy values of each sampling region in the coupling region of the target diffractive waveguide to obtain a target light energy distribution map, wherein the region formed by each sampling region is consistent with the coupling region;
[0103] It should be noted that in this embodiment, each sampling area is evenly distributed in the coupling area, covering the entire coupling area. The smaller the area of the sampling area, the greater the sampling density, and vice versa.
[0104] In this embodiment, the device uses a laser to illuminate the coupling region, simulating the light source input in actual use. Subsequently, the device collects the light energy values of each sampling area in the coupling region of the target diffracting waveguide. These light energy values reflect the distribution of light energy output from the coupling region after the waveguide is irradiated by the laser, thereby generating a target light energy distribution map.
[0105] Furthermore, in one feasible implementation, step S30 above may include steps S31 to S32:
[0106] Step S31: Collect the light energy value of each sampling area in the coupling region using a pinhole detector array;
[0107] In this embodiment, when detecting the coupling region, when the coupling region is irradiated by a laser, the light energy value of each sampling area in the coupling region is collected by setting a pinhole detector array in the coupling region. Similarly, each sampling area is also evenly arranged in the coupling region.
[0108] Step S32: Generate the target light energy distribution map by arranging each light energy value according to the pinhole detector array.
[0109] In this embodiment, after collecting the light energy values of all sampling areas, the device organizes these light energy values and generates a target light energy distribution map according to the arrangement of the pinhole detector array. This light energy distribution map can be a two-dimensional image, where the value of each region corresponds to the light energy value of a certain sampling area in the coupling region. Through this image, the device can intuitively see the distribution of light energy in the coupling region, including the intensity and uniformity of light energy, and whether there are any abnormal light energy distribution areas.
[0110] Step S40: Compare the target light energy distribution map with the preset simulated light energy distribution map to determine whether there is an abnormal sampling area in the coupling region, wherein the light energy value of the abnormal sampling area is different from the light energy value corresponding to the abnormal sampling area in the simulated light energy distribution map.
[0111] In this embodiment, after obtaining the target light energy distribution map, the obtained target light energy distribution map is compared with a preset simulated light energy distribution map. The preset simulated light energy distribution map is an ideal light energy distribution obtained based on theoretical calculations or design expectations. By comparison, the device can identify which sampling areas have light energy values that do not match the corresponding light energy values in the simulated light energy distribution map. These sampling points with discrepancies are defined as abnormal sampling areas.
[0112] Furthermore, in a feasible implementation, the step of determining whether there is an abnormal sampling region in the coupled region in step S40 above may include steps S41 to S42:
[0113] Step S41: When the area of the sampling area is the preset minimum detection area, traverse the light energy values corresponding to each sampling area in the target light energy distribution map, and determine the simulated light energy value corresponding to the light energy value in the simulated light energy distribution map.
[0114] It should be noted that in this embodiment, the preset minimum detection area is set according to actual needs, and the preset minimum detection area can be set to the minimum area that the pinhole detector can detect.
[0115] In this embodiment, when it is necessary to perform comprehensive detection on each preset minimum detection area in the coupled region at once, the area of the sampling region is set as the preset minimum detection area. First, the light energy value corresponding to each sampling region in the target light energy distribution map is traversed. For each light energy value in the target light energy distribution map, the corresponding simulated light energy value is found in the simulated light energy distribution map.
[0116] Step S42: If the light energy value is different from the simulated light energy value, then the sampling area corresponding to the light energy value is determined to be an abnormal sampling area.
[0117] In this embodiment, after finding the corresponding light energy value, the difference between the actual measured light energy value and the simulated light energy value is compared. If the light energy value of a certain sampling area differs from the simulated light energy value, and this difference exceeds a preset tolerance range (this tolerance range can be set according to actual needs, manufacturing precision, performance requirements, etc.), then the sampling area corresponding to that light energy value will be determined as an abnormal sampling area. This means that the light energy output of this sampling point does not match expectations, possibly due to manufacturing defects, design deviations, or other factors.
[0118] Specifically, as an example, please refer to Figure 5 , Figure 5 This is a schematic diagram of the coupling region testing device involved in the embodiment of the detection method for diffractive waveguides of this application, as shown below. Figure 5 As shown, a laser projects a point light source, and a dense array of two-dimensional pinhole detectors is placed in the coupling region to collect the light energy at that location. This allows us to obtain the light energy distribution maps of the coupling regions of normal and abnormal waveguide sheets. It was found that there were two locations in the light intensity distribution map of the abnormal sheet where the light intensity changed significantly. Therefore, it can be inferred that there is an anomaly at these locations, and AFM can be used for detailed inspection.
[0119] In another feasible implementation, the step of determining whether there is an abnormal sampling region in the coupled region in step S40 above may further include steps B10 to B60:
[0120] Step B10: If the area of the sampling region is greater than the preset minimum detection area, traverse the light energy values corresponding to each sampling region in the target light energy distribution map, and determine the simulated light energy value corresponding to the light energy value in the simulated light energy distribution map.
[0121] It should be noted that in this embodiment, the area of the sampling region is larger than the preset minimum detection area, and a large area is detected in a general way to initially detect whether there are any abnormalities in the region. In addition, the arrangement of each sampling region needs to be consistent with the vector direction of the coupled region.
[0122] In this embodiment, similarly, when performing anomaly detection on the coupled region, the light energy value corresponding to each sampling region in the target light energy distribution map is first traversed. For each light energy value in the target light energy distribution map, the corresponding simulated light energy value is found in the simulated light energy distribution map.
[0123] Step B20: If the light energy value is different from the simulated light energy value, then the sampling area is regarded as an abnormal area to be tested;
[0124] In this embodiment, due to the sparse arrangement of sampling points, if the light energy value of a sampling area is different from the corresponding light energy value in the simulated light energy distribution map after sampling comparison, it indicates that there is an anomaly in the coupling area. Therefore, the sampling area is identified as an abnormal area.
[0125] Step B30: Determine new sampling areas in the abnormal areas;
[0126] In this embodiment, similarly, multiple new sampling regions are determined in the abnormal region. These new sampling regions are also sparsely distributed in the abnormal region, and the arrangement of each sampling region needs to be consistent with the vector direction of the coupled region.
[0127] Step B40: Collect the light energy values of each of the new sampling areas in the abnormal region to obtain a new target light energy distribution map;
[0128] In this embodiment, light energy is measured in a newly defined sampling area within the abnormal region. Based on the new sampling points and their light energy values, a more detailed light energy distribution map of the abnormal region is generated.
[0129] Step B50: Return to the step of traversing the light energy values corresponding to each sampling area in the target light energy distribution map until the area of the abnormal area is less than or equal to the preset minimum detection area, and then take the current abnormal area as the abnormal sampling area.
[0130] In this embodiment, steps B10 to B40 are repeated to continuously narrow down the range of the abnormal region until the area of the abnormal region is smaller than a preset minimum detection area. Abnormal points in the coupled region are located using a cyclic positioning method.
[0131] Specifically, as an example, please refer to Figure 6 , Figure 6 This is a schematic diagram of the coupling region cyclic positioning test device involved in the embodiment of the detection method for diffractive waveguides of this application, as shown below. Figure 6 As shown, the coupling region can be detected by cyclic positioning. The idea of this method is the same as the method mentioned above. The difference is that this method does not require a dense array of pinhole detectors. Instead, it only needs to build a sparse array and gradually reduce the test range.
[0132] First, a sparse array of pinhole detectors is used to acquire a light intensity distribution map. The map reveals a significant abrupt change in light intensity at the center, indicating that the grating abrupt change must occur before or exactly at this location. During the second detection, detectors are placed before this location, and the abrupt change point is again found. This process is repeated in a third step to further narrow the test area, followed by a fourth step, and so on, until the abrupt change point is located. Subsequent detailed measurements of this extremely small area are then performed using SEM and AFM.
[0133] Through the above steps, the equipment can comprehensively inspect the diffraction performance and light energy distribution of the target diffractive waveguide. By identifying abnormal sampling points and regions, the equipment can locate potential manufacturing defects, design deviations, or areas in the waveguide that do not meet performance expectations. Furthermore, it can perform a comprehensive inspection of the entire area in a single test, improving inspection efficiency.
[0134] It should be noted that the above examples are only for understanding this application and do not constitute a limitation on the detection method of the diffractive waveguide of this application. Any simple modifications based on this technical concept are within the protection scope of this application.
[0135] This application also provides a detection device for a diffractive waveguide, please refer to... Figure 7 The detection device for the diffractive waveguide includes:
[0136] The direct detection module 10 is used to acquire the target diffraction spectrum of multiple sampling points in the coupling region and the pupil expansion region of the target diffraction waveguide;
[0137] The first anomaly detection module 20 is used to compare the diffraction spectra of each target with the preset simulated diffraction spectra to determine whether there are any abnormal sampling points in each sampling point, wherein the target diffraction spectra of the abnormal sampling points are different from the simulated diffraction spectra.
[0138] The single positioning module 30 is used to irradiate the coupling region with a laser, collect the light energy values of each sampling region in the coupling region of the target diffractive waveguide, and obtain a target light energy distribution map, wherein the region formed by each sampling region is consistent with the coupling region;
[0139] The second anomaly detection module 40 is used to compare the target light energy distribution map with a preset simulated light energy distribution map to determine whether there is an abnormal sampling area in the coupled region, wherein the light energy value of the abnormal sampling area is different from the light energy value corresponding to the abnormal sampling area in the simulated light energy distribution map.
[0140] Optionally, the sampling points include: a coupled-in sampling point and a dilated-pupil sampling point, and the target diffraction spectrum includes a coupled-in diffraction spectrum and a dilated-pupil diffraction spectrum; the direct detection module 10 is further configured to:
[0141] The coupling diffraction spectra at each coupling sampling point in the coupling region are obtained sequentially by a diffraction spectrometer, wherein each coupling sampling point in the coupling region is uniformly distributed in the coupling region;
[0142] The diffraction spectra of each of the pupil diffraction sampling points in the pupil diffraction region are obtained sequentially using a diffraction spectrometer, wherein each of the pupil diffraction sampling points in the pupil diffraction region is uniformly distributed in the pupil diffraction region.
[0143] Optionally, the simulated diffraction spectrum includes: simulated coupled-in diffraction spectrum and simulated expanded-pupil diffraction spectrum; the detection device of the diffraction waveguide is further used for:
[0144] The detection device for the diffractive waveguide includes:
[0145] Optionally, the first anomaly detection module 20 is also used for:
[0146] Each of the stated coupling diffraction spectra is compared with the simulated coupling diffraction spectra;
[0147] Each of the described expanded pupil diffraction spectra is compared with the simulated expanded pupil diffraction spectra.
[0148] Optionally, the first anomaly detection module 20 is also used for:
[0149] Traverse each of the target diffraction spectra and compare the target diffraction spectra with the simulated diffraction spectra;
[0150] If the difference between the target diffraction spectrum and the simulated diffraction spectrum exceeds a preset threshold, then the sampling point corresponding to the target diffraction spectrum is determined to be an abnormal sampling point.
[0151] Optionally, the single-positioning module 30 is also used for:
[0152] The light energy value of each sampling area in the coupled region is collected by a pinhole detector array;
[0153] The target light energy distribution map is generated by arranging the light energy values according to the pinhole detector array.
[0154] Optionally, the second anomaly detection module 40 is also used for:
[0155] When the area of the sampling area is a preset minimum detection area, the light energy values corresponding to each sampling area in the target light energy distribution map are traversed to determine the simulated light energy value corresponding to the light energy value in the simulated light energy distribution map.
[0156] If the light energy value is different from the simulated light energy value, then the sampling area corresponding to the light energy value is determined to be an abnormal sampling area.
[0157] Optionally, the second anomaly detection module 40 is also used for:
[0158] If the area of the sampling region is greater than the preset minimum detection area, the light energy values corresponding to each sampling region in the target light energy distribution map are traversed to determine the simulated light energy value corresponding to the light energy value in the simulated light energy distribution map.
[0159] If the light energy value is different from the simulated light energy value, the sampling area is regarded as an abnormal area to be tested;
[0160] New sampling areas are identified within the abnormal areas;
[0161] Collect the light energy values of each of the new sampling areas in the abnormal region to obtain a new target light energy distribution map;
[0162] Return to the step of traversing the light energy values corresponding to each sampling area in the target light energy distribution map until the area of the abnormal area is less than or equal to the preset minimum detection area, and then take the current abnormal area as the abnormal sampling area.
[0163] The detection apparatus for diffractive waveguides provided in this application, employing the detection method for diffractive waveguides in the above embodiments, can solve the technical problem of how to improve the testing efficiency of the grating structure region of diffractive waveguides. Compared with the prior art, the beneficial effects of the detection apparatus for diffractive waveguides provided in this application are the same as those of the detection method for diffractive waveguides provided in the above embodiments, and other technical features in the detection apparatus for diffractive waveguides are the same as those disclosed in the methods of the above embodiments, and will not be repeated here.
[0164] This application provides a detection device for a diffractive optical waveguide. The detection device for a diffractive optical waveguide includes: at least one processor; and a memory communicatively connected to the at least one processor; wherein the memory stores instructions executable by the at least one processor, and the instructions are executed by the at least one processor to enable the at least one processor to perform the detection method for the diffractive optical waveguide in the first embodiment described above.
[0165] The following is for reference. Figure 8This document illustrates a schematic diagram of a detection device suitable for implementing the diffractive waveguide embodiments of this application. The detection device for the diffractive waveguide in these embodiments may include, but is not limited to, mobile terminals such as mobile phones, laptops, digital broadcast receivers, PDAs (Personal Digital Assistants), PADs (Portable Application Descriptions), PMPs (Portable Media Players), and in-vehicle terminals (e.g., in-vehicle navigation terminals), as well as fixed terminals such as digital TVs and desktop computers. Figure 8 The detection device for the diffractive waveguide shown is merely an example and should not impose any limitations on the functionality and scope of use of the embodiments of this application.
[0166] like Figure 8 As shown, the detection device for the diffractive waveguide may include a processing unit 1001 (e.g., a central processing unit, a graphics processor, etc.), which can perform various appropriate actions and processes according to a program stored in a read-only memory (ROM) 1002 or a program loaded from a storage device 1003 into a random access memory (RAM) 1004. The RAM 1004 also stores various programs and data required for the operation of the detection device for the diffractive waveguide. The processing unit 1001, ROM 1002, and RAM 1004 are interconnected via a bus 1005. An input / output (I / O) interface 1006 is also connected to the bus. Typically, the following systems can be connected to I / O interface 1006: input devices 1007 including, for example, touchscreens, touchpads, keyboards, mice, image sensors, microphones, accelerometers, gyroscopes, etc.; output devices 1008 including, for example, liquid crystal displays (LCDs), speakers, vibrators, etc.; storage devices 1003 including, for example, magnetic tapes, hard disks, etc.; and communication devices 1009. Communication device 1009 allows the detection equipment of the diffractive waveguide to communicate wirelessly or wiredly with other devices to exchange data. Although the figure shows a detection equipment of a diffractive waveguide with various systems, it should be understood that it is not required to implement or possess all the systems shown. More or fewer systems can be implemented alternatively.
[0167] Specifically, according to the embodiments disclosed in this application, the processes described above with reference to the flowcharts can be implemented as computer software programs. For example, embodiments disclosed in this application include a computer program product comprising a computer program carried on a computer-readable medium, the computer program containing program code for performing the methods shown in the flowcharts. In such embodiments, the computer program can be downloaded and installed from a network via a communication device, or installed from storage device 1003, or installed from ROM 1002. When the computer program is executed by processing device 1001, it performs the functions defined in the methods of the embodiments disclosed in this application.
[0168] The detection device for diffractive waveguides provided in this application, employing the detection method for diffractive waveguides in the above embodiments, can solve the technical problem of how to improve the testing efficiency of the grating structure region of diffractive waveguides. Compared with the prior art, the beneficial effects of the detection device for diffractive waveguides provided in this application are the same as those of the detection method for diffractive waveguides provided in the above embodiments, and other technical features in this detection device are the same as those disclosed in the method of the previous embodiment, and will not be repeated here.
[0169] It should be understood that the various parts disclosed in this application can be implemented using hardware, software, firmware, or a combination thereof. In the description of the above embodiments, specific features, structures, materials, or characteristics can be combined in any suitable manner in one or more embodiments or examples.
[0170] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.
[0171] This application provides a computer-readable storage medium having computer-readable program instructions (i.e., a computer program) stored thereon, the computer-readable program instructions being used to execute the detection method of the diffractive waveguide in the above embodiments.
[0172] The computer-readable storage medium provided in this application may be, for example, a USB flash drive, but is not limited to, electrical, magnetic, optical, electromagnetic, infrared, or semiconductor systems or devices, or any combination thereof. More specific examples of computer-readable storage media may include, but are not limited to: electrical connections having one or more wires, portable computer disks, hard disks, random access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM or flash memory), optical fibers, portable compact disk read-only memory (CD-ROM), optical storage devices, magnetic storage devices, or any suitable combination thereof. In this embodiment, the computer-readable storage medium may be any tangible medium containing or storing a program that can be used by or in conjunction with an instruction execution system, system, or device. The program code contained on the computer-readable storage medium may be transmitted using any suitable medium, including but not limited to: wires, optical cables, RF (Radio Frequency), etc., or any suitable combination thereof.
[0173] The aforementioned computer-readable storage medium may be included in the detection device for the diffractive optical waveguide; or it may exist independently and not be assembled into the detection device for the diffractive optical waveguide.
[0174] The aforementioned computer-readable storage medium carries one or more programs, which, when executed by the detection device of the diffracted optical waveguide, cause the detection device of the diffracted optical waveguide to:
[0175] Obtain the target diffraction spectra of multiple sampling points in the coupling region and pupil expansion region of the target diffractive waveguide; compare each target diffraction spectrum with a preset simulated diffraction spectrum to determine whether there are any abnormal sampling points in each sampling point, wherein the target diffraction spectrum of the abnormal sampling point is different from the simulated diffraction spectrum; illuminate the coupling region with a laser and collect the light energy values of each sampling region in the coupling region of the target diffractive waveguide to obtain a target light energy distribution map, wherein the region formed by each sampling region is consistent with the coupling region; compare the target light energy distribution map with a preset simulated light energy distribution map to determine whether there are any abnormal sampling regions in the coupling region, wherein the light energy value of the abnormal sampling region is different from the light energy value corresponding to the abnormal sampling region in the simulated light energy distribution map.
[0176] Computer program code for performing the operations of this application can be written in one or more programming languages or a combination thereof, including object-oriented programming languages such as Java, Smalltalk, and C++, and conventional procedural programming languages such as the "C" language or similar programming languages. The program code can be executed entirely on the user's computer, partially on the user's computer, as a standalone software package, partially on the user's computer and partially on a remote computer, or entirely on a remote computer or server. In cases involving remote computers, the remote computer can be connected to the user's computer via any type of network—including a local area network (LAN) or a wide area network (WAN)—or can be connected to an external computer (e.g., via the Internet using an Internet service provider).
[0177] The flowcharts and block diagrams in the accompanying drawings illustrate the architecture, functionality, and operation of possible implementations of systems, methods, and computer program products according to various embodiments of this application. In this regard, each block in a flowchart or block diagram may represent a module, segment, or portion of code containing one or more executable instructions for implementing a specified logical function. It should also be noted that in some alternative implementations, the functions indicated in the blocks may occur in a different order than those indicated in the drawings. For example, two consecutively indicated blocks may actually be executed substantially in parallel, and they may sometimes be executed in reverse order, depending on the functions involved. It should also be noted that each block in the block diagrams and / or flowcharts, and combinations of blocks in the block diagrams and / or flowcharts, can be implemented using a dedicated hardware-based system that performs the specified function or operation, or using a combination of dedicated hardware and computer instructions.
[0178] The modules described in the embodiments of this application can be implemented in software or hardware. The names of the modules do not necessarily limit the functionality of the unit itself.
[0179] The readable storage medium provided in this application is a computer-readable storage medium that stores computer-readable program instructions (i.e., a computer program) for executing the above-described detection method for diffractive waveguides, thereby solving the technical problem of how to improve the testing efficiency of the grating structure region of the diffractive waveguide. Compared with the prior art, the beneficial effects of the computer-readable storage medium provided in this application are the same as those of the detection method for diffractive waveguides provided in the above embodiments, and will not be repeated here.
[0180] This application also provides a computer program product, including a computer program that, when executed by a processor, implements the steps of the detection method for diffractive waveguides as described above.
[0181] The computer program product provided in this application can solve the technical problem of how to improve the testing efficiency of the grating structure region of a diffractive waveguide. Compared with the prior art, the beneficial effects of the computer program product provided in this application are the same as those of the detection method for diffractive waveguides provided in the above embodiments, and will not be repeated here.
[0182] The above description is only a part of the embodiments of this application and does not limit the patent scope of this application. All equivalent structural transformations made under the technical concept of this application and using the contents of the specification and drawings of this application, or direct / indirect applications in other related technical fields, are included in the patent protection scope of this application.
Claims
1. A method for detecting diffractive optical waveguides, characterized in that, The method includes: Obtain the target diffraction spectrum at multiple sampling points in the coupling region and pupil expansion region of the target diffraction waveguide; Each target diffraction spectrum is compared with a preset simulated diffraction spectrum to determine whether there are any abnormal sampling points in each sampling point, wherein the target diffraction spectrum of the abnormal sampling point is different from the simulated diffraction spectrum; By illuminating the coupling region with a laser, the light energy values of each sampling region in the coupling region of the target diffracted waveguide are collected to obtain a target light energy distribution map, wherein the region formed by each sampling region is consistent with the coupling region; The target light energy distribution map is compared with a preset simulated light energy distribution map to determine whether there is an abnormal sampling region in the coupled region, wherein the light energy value of the abnormal sampling region is different from the light energy value corresponding to the abnormal sampling region in the simulated light energy distribution map.
2. The detection method for diffractive waveguides as described in claim 1, characterized in that, The sampling points include: coupled sampling points and expanded pupil sampling points; the target diffraction spectrum includes coupled diffraction spectra and expanded pupil diffraction spectra; the step of acquiring the target diffraction spectra of multiple sampling points in the coupled region and expanded pupil region of the target diffraction waveguide includes: The coupling diffraction spectra at each coupling sampling point in the coupling region are obtained sequentially by a diffraction spectrometer, wherein each coupling sampling point in the coupling region is uniformly distributed in the coupling region; The diffraction spectra of each of the pupil diffraction sampling points in the pupil diffraction region are obtained sequentially using a diffraction spectrometer, wherein each of the pupil diffraction sampling points in the pupil diffraction region is uniformly distributed in the pupil diffraction region.
3. The detection method for diffractive waveguides as described in claim 2, characterized in that, The simulated diffraction spectrum includes: simulated coupled-in diffraction spectrum and simulated expanded-pupil diffraction spectrum; Before the step of comparing each of the target diffraction spectra with a preset simulated diffraction spectrum, the method further includes: Obtain the simulated coupling diffraction spectrum of the first simulated structure corresponding to the coupling region, wherein the grating structure of the first simulated structure is the same as the grating structure of the coupling region; Obtain the simulated pupil diffraction spectrum of the second simulated structure corresponding to the pupil expansion region, wherein the grating structure of the second simulated structure is the same as the grating structure of the pupil expansion region.
4. The detection method for diffractive waveguides as described in claim 3, characterized in that, The step of comparing each of the target diffraction spectra with a preset simulated diffraction spectrum includes: Each of the stated coupling diffraction spectra is compared with the simulated coupling diffraction spectra; Each of the described expanded pupil diffraction spectra is compared with the simulated expanded pupil diffraction spectra.
5. The detection method for diffractive waveguides as described in claim 1, characterized in that, The step of determining whether there are any abnormal sampling points among the sampling points includes: Traverse each of the target diffraction spectra and compare the target diffraction spectra with the simulated diffraction spectra; If the difference between the target diffraction spectrum and the simulated diffraction spectrum exceeds a preset threshold, then the sampling point corresponding to the target diffraction spectrum is determined to be an abnormal sampling point.
6. The detection method for diffractive waveguides as described in claim 1, characterized in that, The step of acquiring the light energy values of each sampling region in the coupling region of the target diffracting waveguide to obtain the target light energy distribution map includes: The light energy value of each sampling area in the coupled region is collected by a pinhole detector array; The target light energy distribution map is generated by arranging the light energy values according to the pinhole detector array.
7. The detection method for diffractive waveguides as described in claim 1, characterized in that, The step of determining whether there is an abnormal sampling region in the coupling region includes: When the area of the sampling area is a preset minimum detection area, the light energy values corresponding to each sampling area in the target light energy distribution map are traversed to determine the simulated light energy value corresponding to the light energy value in the simulated light energy distribution map. If the light energy value is different from the simulated light energy value, then the sampling area corresponding to the light energy value is determined to be an abnormal sampling area.
8. The detection method for diffractive waveguides as described in claim 7, characterized in that, The step of determining whether there is an abnormal sampling region in the coupling region further includes: If the area of the sampling region is greater than the preset minimum detection area, the light energy values corresponding to each sampling region in the target light energy distribution map are traversed to determine the simulated light energy value corresponding to the light energy value in the simulated light energy distribution map. If the light energy value is different from the simulated light energy value, the sampling area is regarded as an abnormal area to be tested; New sampling areas are identified within the abnormal areas; Collect the light energy values of each of the new sampling areas in the abnormal region to obtain a new target light energy distribution map; Return to the step of traversing the light energy values corresponding to each sampling area in the target light energy distribution map until the area of the abnormal area is less than or equal to the preset minimum detection area, and then take the current abnormal area as the abnormal sampling area.
9. A detection device for a diffractive optical waveguide, characterized in that, The device includes: The direct detection module is used to acquire the target diffraction spectrum of multiple sampling points in the coupling region and pupil expansion region of the target diffraction waveguide; The first anomaly detection module is used to compare the diffraction spectra of each target with the preset simulated diffraction spectra to determine whether there are any abnormal sampling points in each sampling point, wherein the target diffraction spectra of the abnormal sampling points are different from the simulated diffraction spectra. A single-shot positioning module is used to irradiate the coupling region with a laser, collect the light energy values of each sampling region in the coupling region of the target diffractive waveguide, and obtain a target light energy distribution map, wherein the region formed by each sampling region is consistent with the coupling region; The second anomaly detection module is used to compare the target light energy distribution map with a preset simulated light energy distribution map to determine whether there is an abnormal sampling area in the coupled region, wherein the light energy value of the abnormal sampling area is different from the light energy value corresponding to the abnormal sampling area in the simulated light energy distribution map.
10. A detection device for a diffractive optical waveguide, characterized in that, The device includes: a memory, a processor, and a computer program stored in the memory and executable on the processor, the computer program being configured to implement the steps of the detection method for the diffractive waveguide as described in any one of claims 1 to 8.
11. A storage medium, characterized in that, The storage medium is a computer-readable storage medium, and a computer program is stored on the storage medium. When the computer program is executed by a processor, it implements the steps of the detection method for diffractive waveguides as described in any one of claims 1 to 8.