基于NV色心与MEMS原子气室层融合的多模态磁成像装置及方法
By integrating an NV color center sensing layer, a spaced coupling layer, and a MEMS atomic gas cell layer on a composite sensing chip, magnetic flux coupling between the NV color center and the SERF atomic magnetometer is achieved, generating a fused magnetic image with both high sensitivity and high spatial resolution. This solves the problems of low signal coupling efficiency and environmental interference in existing technologies.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- 杭州极弱磁场国家重大科技基础设施研究院
- Filing Date
- 2026-04-27
- Publication Date
- 2026-07-17
AI Technical Summary
In the existing technology, magnetic sensors based on NV color centers and atomic magnetometers operating in SERF mode cannot achieve efficient magnetic flux coupling at the chip level, resulting in the inability to achieve both high sensitivity and high spatial resolution in magnetic imaging.
By integrating an NV color center sensing layer, a spacer coupling layer, and a MEMS atomic gas cell layer on a composite sensing chip, the spacer coupling layer is used to isolate and couple near-field magnetic signals. Combined with a processing system, the NV color center sensing layer and the MEMS atomic gas cell layer are put into excitation and SERF working states to generate a fused magnetic image.
The physical fusion of high spatial resolution NV color center detection and high sensitivity SERF atomic magnetometer detection was achieved, generating a fused magnetic image with both nanometer-level spatial resolution and femtotes-level sensitivity, thus solving the problems of low signal coupling efficiency and environmental interference.
Smart Images
Figure CN122109941B_ABST