一种超低能单色化电子束产生与传输装置
By designing an ultra-low energy monochromatic electron beam generation and transmission device, the problems of large energy dispersion and poor monochromaticity in the existing technology have been solved. The device achieves continuous energy adjustment and high monochromaticity in the range of 0 electron volts to 5 electron volts, improves beam transmission efficiency, and is suitable for surface analysis techniques such as electron diffraction, energy spectrum analysis, and microscopic imaging.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- EAST CHINA NORMAL UNIV
- Filing Date
- 2026-04-28
- Publication Date
- 2026-07-17
AI Technical Summary
Existing ultra-low energy electron beam sources suffer from large energy dispersion, poor monochromaticity, significant beam loss and aberrations, making it difficult to balance tunability and monochromaticity in the 0 electron volt to 5 electron volt range, and lacking compatibility and versatility.
Design an ultra-low energy monochromatic electron beam generation and transmission device, including an electron generation unit, an injection lens unit, a monochromator unit, and a deceleration and focusing lens unit. Through coordinated operation, the energy can be continuously adjusted from 0 electron volts to 5 electron volts. Active edge field compensation electrodes and electrostatic lens structures are used to optimize the energy screening and transmission of the electron beam.
It achieves ultra-low energy electron beam output with continuously adjustable energy from 0 electron volts to 5 electron volts, significantly improving monochromaticity and beam transmission efficiency, reducing energy broadening, and meeting the needs of high-resolution surface analysis.
Smart Images
Figure CN122117515B_ABST