基于弹性微球增强的SnBi低温热压键合方法及结构

By employing a low-temperature hot-press bonding method for SnBi reinforced with elastic microspheres, the problems of brittle fracture and overflow of SnBi solder joints are solved by utilizing the pre-stress interlocking mechanism of metallized elastic microspheres and a precise hot-press cooling sequence, thus achieving a low-temperature interconnect structure with high reliability and high yield.

CN122121074BActive Publication Date: 2026-07-17江苏中科智芯集成科技有限公司 +1

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
江苏中科智芯集成科技有限公司
Filing Date
2026-04-23
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing SnBi interconnect technology suffers from brittle fracture and overflow issues in thermocompression bonding applications, making it difficult to achieve both high mechanical reliability and high yield.

Method used

A SnBi low-temperature hot-press bonding method based on elastic microsphere reinforcement was adopted. By preparing a composite solder paste containing metallized elastic microspheres, the prestress interlocking mechanism of the metallized elastic microspheres was utilized. Combined with a precise hot-pressing and cooling sequence, the internal rebound compressive stress of the solder joint was used to offset the external impact, and the deformation of the metallized elastic microspheres was used to prevent the liquid solder from overflowing.

Benefits of technology

It effectively overcomes the brittle fracture problem of SnBi solder joints, avoids short circuits in solder pads, achieves a low-temperature interconnect structure with high reliability and high yield, and improves drop resistance.

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Abstract

本发明涉及半导体封装技术领域,尤其涉及一种基于弹性微球增强的SnBi低温热压键合方法及结构,方法包括:S1:制备包含金属化弹性微球的SnBi基复合焊膏,金属化弹性微球均匀散布在复合焊膏中;S2:通过印刷工艺将复合焊膏涂覆至基板的焊盘;S3:将芯片对位并放置于焊膏上,随后通过加热头对芯片进行预热;S4:通过加热头对芯片施加竖向压力并升温至复合焊膏熔点以上,实施热压键合,使焊膏熔融并压缩金属化弹性微球;S5:在维持对加热头竖向压力不变的条件下进行强制冷却,待焊料凝固后,加热头卸除压力,完成键合。通过本发明,能够克服SnBi低温焊点容易发生脆性断裂、且能够避免溢料导致焊盘短路的问题。
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