A substrate feeding and discharging mechanism, a substrate feeding and discharging method, a device and a medium

Abstract

The application relates to the photovoltaic technical field, in particular to a substrate feeding and discharging mechanism, a substrate feeding and discharging method, a device and a medium, which comprise a carrier boat, a flower basket and a suction cup assembly. The carrier boat comprises a plurality of plug-in grooves, each of which has M tooth grooves, each of which has a first carrier piece position and a second carrier piece position for loading a substrate; the flower basket has N third carrier piece positions for loading a substrate, 0.5N<=M<N; the suction cup assembly has a full load of N carrier pieces and is used for corresponding cooperation with the first carrier piece position and / or the second carrier piece position to complete one-time substrate taking and placing, and the single-batch substrate transfer quantity of the suction cup assembly between the flower basket and the carrier boat is N. The number of tooth grooves in the carrier boat and the number of third carrier piece positions in the flower basket are optimized, the suction cup assembly can simultaneously suck substrates from a plurality of carrier boats to achieve the full load state of the suction cup assembly and the flower basket, the number of substrates transferred by the suction cup assembly at a time is increased, and the substrate transfer efficiency between the carrier boat and the flower basket is improved.

Description

Technical Field

[0001] This application relates to the field of photovoltaic technology, specifically to a substrate loading and unloading mechanism, substrate loading and unloading method, apparatus, and dielectric. Background Technology

[0002] Spreader boats and baskets are two commonly used loading containers in substrate production and processing. Throughout the substrate production process, the substrate needs to be transferred back and forth between the spreader boats and baskets to meet the needs of different substrate production processes.

[0003] In existing dual-insertion processes, a substrate carrier boat has several first grooves for loading substrates, each first groove containing two substrate positions, each capable of holding one substrate. A tray has several second grooves for loading substrates, each second groove capable of holding one substrate. For ease of transfer, the number of first and second grooves is typically set to be equal. Substrate transfer between the tray and the carrier boat is performed by a suction cup robot. The suction cup picks up a substrate from one substrate position in each first groove of a carrier boat and transfers it to the tray, filling the tray completely. However, this method limits the transfer efficiency between the carrier boat and the tray, failing to meet the demands of increasingly larger production volumes. Therefore, improving the substrate transfer efficiency between the carrier boat and the tray is a problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0004] The purpose of this application is to provide a substrate loading and unloading mechanism, method, apparatus, and medium to improve the substrate transfer efficiency between the substrate carrier boat and the tray. The specific solution is as follows: A substrate loading and unloading mechanism, comprising: A substrate carrier boat includes multiple substrate insertion slots, each of which has M teeth, where M is a positive integer. Each of the teeth has a first substrate mounting position and a second substrate mounting position, which are respectively used to mount a substrate. The flower basket has N third substrate positions, where N is a positive integer, 0.5N≤M<N, and each third substrate position is used to load one substrate. The suction cup assembly has a full load of N substrates. The suction cup assembly is configured to cooperate with the first substrate position and / or the second substrate position to complete substrate picking or placing. The suction cup assembly transfers N substrates in a single batch between the flower basket and the substrate boat.

[0005] Optionally, the suction cup assembly includes multiple suction cup control areas, each suction cup control area includes multiple suction cups, each suction cup control area can independently pick up and place the substrate, and the multiple suction cup control areas can be linked to control and synchronously pick up and place the substrate.

[0006] Optionally, the suction cup control area is a detachable suction cup module.

[0007] Optionally, the suction cup assembly includes at least one suction cup control area capable of accommodating NM substrates.

[0008] Optionally, M=3N / 4, the suction cup assembly includes a first suction cup control area and a second suction cup control area, the first suction cup control area can accommodate 3N / 4 of the substrates, and the second suction cup control area can accommodate N / 4 of the substrates.

[0009] Optionally, M=3N / 4, the suction cup assembly includes a third suction cup control area and two second suction cup control areas. The third suction cup control area can accommodate N / 2 of the substrates, and the second suction cup control areas can accommodate N / 4 of the substrates. The two second suction cup control areas are respectively located on both sides of the third suction cup control area.

[0010] Optionally, M=3N / 4, and the suction cup assembly includes four second suction cup control areas, each of which can accommodate N / 4 of the substrates.

[0011] Optionally, the number of flower baskets is at least two, wherein at least one flower basket is configured to load raw materials and at least one flower basket is configured to load cooked materials.

[0012] Optionally, the number of substrate carrier boats is at least two, and the suction cup assembly is configured to: transfer M substrates from one of the substrate carrier boats and transfer NM substrates from the other substrate carrier boat during boat-side operation.

[0013] This application also provides a substrate loading and unloading method, applicable to the aforementioned substrate loading and unloading mechanism, which repeatedly performs step A, wherein step A includes: The suction cup assembly picks up N pieces of clinker from at least two insert slots on the ladle and transfers them to an empty basket. The suction cup assembly draws N pieces of raw material from the basket containing raw material and adds them to at least two insert slots on the substrate carrier boat.

[0014] Optionally, M=3N / 4, the slide carrier includes a first slide carrier and a second slide carrier, and step A includes: Step S1: The suction cup assembly picks up 3N / 4 pieces of the clinker from one of the first and second loading positions of the first loading boat, and the suction cup assembly picks up N / 4 pieces of the clinker from one of the first and second loading positions of the second loading boat. The N pieces of clinker picked up by the suction cup assembly are transferred to the empty flower basket. The suction cup assembly picks up N pieces of raw material from the basket containing raw material, wherein 3N / 4 pieces of raw material are added to one of the first and second loading positions of the first loading boat, and N / 4 pieces of raw material are added to one of the first and second loading positions of the second loading boat. Step S2: The suction cup assembly picks up N / 2 pieces of the clinker from the other of the first and second loading positions of the first loading boat, and the suction cup assembly picks up N / 2 pieces of the clinker from the first and second loading positions of the second loading boat. The suction cup assembly then transfers the N pieces of clinker picked up in the two steps to the empty flower basket. The suction cup assembly picks up N pieces of raw material from the basket containing raw material, wherein N / 2 pieces of raw material are added to the other of the first and second sheet-carrying positions of the first sheet-carrying boat, and N / 2 pieces of raw material are added to the other of the first and second sheet-carrying positions of the second sheet-carrying boat. Step S3: The suction cup assembly picks up N / 4 pieces of the clinker from the other of the first and second loading positions of the first loading boat, and the suction cup assembly picks up N3 / 4 pieces of the clinker from the other of the first and second loading positions of the second loading boat. The suction cup then transfers the N pieces of clinker picked up in the two steps to the empty flower basket. The suction cup assembly picks up N pieces of raw material from the basket containing raw material, wherein N / 4 pieces of raw material are added to the other of the first and second sheet-carrying positions of the first sheet-carrying boat, and N3 / 4 pieces of raw material are added to the other of the first and second sheet-carrying positions of the second sheet-carrying boat. The order of steps S1, S2, and S3 can be changed.

[0015] This application also provides a substrate loading and unloading control device, including: processor; Memory for storing the executable instructions of the processor; The processor is configured to execute the aforementioned substrate loading and unloading method by executing the executable instructions.

[0016] This application also provides a computer-readable storage medium storing a computer program that, when executed by a processor, implements the substrate loading and unloading method as described above.

[0017] The technical effects of this application are as follows: The substrate loading and unloading mechanism of this application optimizes the number of slots in the substrate carrier boat and the number of third substrate positions in the basket to satisfy: 0.5N≤M<N, that is, the number N of the third substrate positions in the basket is greater than the number M of a single insert slot in the substrate carrier boat, but less than twice the number M of a single insert slot in the substrate carrier boat. The number of substrates fully loaded by the suction cup assembly is N. When the suction cup assembly performs a substrate transfer task, the suction cup assembly can first pick up the substrates of the first or second substrate positions from the slots of the same insert slot in one substrate carrier boat. Since the maximum number of substrates provided by a single substrate carrier boat at one time is M, which is insufficient to fill the N substrate positions of the suction cup assembly, the suction cup assembly can continue to pick up the remaining required number of substrates from another substrate carrier boat until the N substrate positions are filled and then transferred to the basket at one time, which just fills one basket. By adjusting the specific numerical ratio of M and N (such as N=1.2M, N=1.5M, N=1.8M, etc.), different production cycles can be accommodated. Since the number N of the third substrate loading positions in the tray is less than twice the number M of the slots in a single substrate insertion groove 11 in the substrate carrier boat, the suction cup assembly can achieve full substrate loading by combining the substrates of the two substrate carrier boats, simplifying the operation of the suction cup assembly. Compared to existing technologies, in the substrate loading and unloading mechanism of this application, the suction cup assembly can simultaneously pick up substrates from multiple substrate carrier boats to achieve a full-load state for both the suction cup assembly and the tray, increasing the number of substrates transferred by the suction cup assembly in a single operation, improving the substrate transfer efficiency between the substrate carrier boat and the tray, and adapting to the increasingly large production capacity requirements. Attached Figure Description

[0018] Figure 1 A simplified structural diagram of the substrate loading and unloading mechanism provided in this application, comprising the substrate carrier boat, basket, and suction cup assembly. Figure 2 for Figure 1 Enlarged view of region A in the middle; Figure 3 A simplified structural diagram of the wafer carrier boat and ejection mechanism in a specific embodiment of the substrate loading and unloading mechanism provided in this application; Figure 4 A simplified structural diagram of the substrate loading and unloading mechanism provided in this application, comprising the substrate carrier boat, basket, and suction cup assembly. Figure 5 This is a first state diagram in a specific embodiment of the substrate loading and unloading method provided in this application; Figure 6 This is a second state diagram in a specific embodiment of the substrate loading and unloading method provided in this application; Figure 7 This is a third state diagram in a specific embodiment of the substrate loading and unloading method provided in this application; Figure 8 This is a fourth state diagram in a specific embodiment of the substrate loading and unloading method provided in this application; Figure 9 This is a fifth state diagram in a specific embodiment of the substrate loading and unloading method provided in this application; Figure 10 This is a sixth state diagram in a specific embodiment of the substrate loading and unloading method provided in this application; Figure 11 This is a seventh state diagram in a specific embodiment of the substrate loading and unloading method provided in this application; Figure 12 This is the eighth state diagram in a specific embodiment of the substrate loading and unloading method provided in this application; Figure 13 This is a ninth state diagram in a specific embodiment of the substrate loading and unloading method provided in this application; Figure 14 This is a tenth state diagram in a specific embodiment of the substrate loading and unloading method provided in this application; Figure 15 This is the eleventh state diagram in a specific embodiment of the substrate loading and unloading method provided in this application; Figure 16 This is a twelfth state diagram in a specific embodiment of the substrate loading and unloading method provided in this application; Figure 17 This is the thirteenth state diagram in a specific embodiment of the substrate loading and unloading method provided in this application; Explanation of reference numerals in the attached figures: Film carrier boat 1; first film carrier boat 1-1; second film carrier boat 1-2; film insertion slot 11; toothed groove 111; first film carrier position 111-1; second film carrier position 111-2; Flower basket 2; empty flower basket 2-1; flower basket 2-2 loaded with raw material; third loading position 21; Suction cup assembly 3; suction cup control area 31; first suction cup control area 31-1; second suction cup control area 31-2; third suction cup control area 31-3; Ejector mechanism 4; Ejector tooth 41; Substrate 01; Clinker 01-1; Raw material 01-2. Detailed Implementation

[0019] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0020] The terms "first," "second," etc., used in the specification and claims of this application are used to distinguish similar objects and not to describe a specific order or sequence. It should be understood that such use of data can be interchanged where appropriate so that embodiments of this application can be implemented in orders other than those illustrated or described herein, and the objects distinguished by "first," "second," etc., are generally of the same class and the number of objects is not limited; for example, a first object can be one or more. Furthermore, in the specification and claims, "and / or" indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship.

[0021] It should be understood that the phrase "some embodiments" throughout the specification means that a particular feature, structure, or characteristic related to an embodiment is included in at least one embodiment of this application. Therefore, "some embodiments" appearing throughout the specification does not necessarily refer to the same embodiment. Furthermore, these particular features, structures, or characteristics can be combined in any suitable manner in one or more embodiments.

[0022] In this description, unless otherwise expressly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art will understand the specific meaning of these terms in this document based on the specific circumstances.

[0023] Please refer to Figures 1-3 , Figure 1 A simplified structural diagram of the substrate loading and unloading mechanism provided in this application, comprising the substrate carrier boat, basket, and suction cup assembly. Figure 2 for Figure 1 Enlarged view of region A in the middle; Figure 3 This is a simplified structural diagram of the substrate loading and unloading mechanism and the ejection mechanism in a specific embodiment of the substrate loading and unloading mechanism provided in this application.

[0024] This application provides a substrate loading and unloading mechanism, including: The substrate carrier 1 includes multiple insert slots 11, each insert slot 11 has M teeth 111, where M is a positive integer, and each tooth 111 has a first substrate position 111-1 and a second substrate position 111-2, which are used to load a substrate 01 respectively. Flower basket 2, Flower basket 2 has N third chip slots 21, N is a positive integer, 0.5N≤M<N, each third chip slot 21 is used to load a substrate 01; The suction cup assembly 3 has a full load of N substrates. The suction cup assembly 3 is configured to cooperate with the first substrate carrier position 111-1 and / or the second substrate carrier position 111-2 to complete the picking up or placing of substrates. The suction cup assembly 3 transfers N substrates in a single batch between the flower basket 2 and the substrate carrier boat 1.

[0025] The substrate loading and unloading mechanism of this application optimizes the number of grooves 111 in a single insert slot 11 in the substrate carrier boat 1 and the number of third substrate positions 21 in the flower basket 2 to satisfy: 0.5N≤M<N, that is, the number N of the third substrate positions 21 in the flower basket 2 is greater than the number M of grooves 111 in a single insert slot 11 in the substrate carrier boat 1, but less than twice the number M of grooves 111 in a single insert slot 11 in the substrate carrier boat 1, and the number of fully loaded substrates in the suction cup assembly 3 is N.

[0026] When the suction cup assembly 3 performs a substrate transfer task from the substrate carrier boat 1 to the flower basket 2, the suction cup assembly 3 can first select the first substrate position 111-1 or the second substrate position 111-2 from each toothed groove 111 of the same insert slot 11 in the substrate carrier boat 1. Since the maximum number of substrates 01 provided by a single insert slot 11 is M, which is insufficient to fill the N substrate positions of the suction cup assembly 3, the suction cup assembly 3 can continue to pick up the remaining required number of substrates 01 from another insert slot 11 of the same substrate carrier boat 1 or from another substrate carrier boat 1 until the N substrate positions are filled and then transfer them to the flower basket 2 in one go, filling one flower basket 2.

[0027] When the suction cup assembly 3 performs a substrate transfer task from the basket 2 to the substrate carrier boat 1, the suction cup assembly 3 can first obtain N substrates 01 from the basket 2, and then place the N substrates 01 into two different insertion slots 11 of the same substrate carrier boat 1, or place the N substrates 01 into two insertion slots 11 belonging to different substrate carrier boats 1. When the two insertion slots 11 cooperating with the suction cup assembly 3 belong to one substrate carrier boat 1, the substrate carrier boat 1 is equipped with at least two ejection mechanisms.

[0028] For example, in some embodiments, when N=1.5M, the suction cup assembly 3 can operate simultaneously on two substrate carrier boats 1. For instance, the suction cup assembly 3 can pick up M substrates 01 from one substrate carrier boat 1 and then pick up 0.5M substrates 01 from the other substrate carrier boat 1, achieving a full load of N=1.5M. Subsequently, it can transfer 1.5M substrates 01 to the basket 2 at once, filling the basket 2 completely. By adjusting the specific numerical ratio of M to N (e.g., N=1.2M, N=1.8M, etc.), different production cycles can be accommodated.

[0029] As can be seen from the foregoing description, compared with the prior art, in the substrate loading and unloading mechanism of this application embodiment, the suction cup assembly 3 can simultaneously pick up substrates 01 from multiple insert slots 11 to achieve a full-load state of the suction cup assembly 3 and the basket 2, thereby increasing the number of substrates 01 transferred by the suction cup assembly 3 in a single operation and improving the transfer efficiency of substrates 01 between the substrate carrier boat 1 and the basket 2.

[0030] Depend on Figure 3 As can be seen, in this embodiment of the application, the substrate loading and unloading mechanism also includes an ejection mechanism 4. The ejection mechanism 4 includes M ejector teeth 41. The M ejector teeth 41 have a comb-like structure. The distance between two adjacent ejector teeth 41 is usually equal to the distance between two adjacent tooth grooves 111. Any number of ejector teeth 41 can move synchronously to eject the required number of substrates 01. The distribution direction of the first substrate position 111-1 and the second substrate position 111-2 is defined as the first direction. The ejection mechanism 4 can move along the first direction so that the ejection mechanism 4 can eject the substrate 01 of the first substrate position 111-1 or eject the substrate 01 of the second substrate position 111-2.

[0031] Because the alignment, lifting and other actions of the ejection mechanism 4 require sufficient running time, when the suction cup assembly 3 in this solution is engaged with the current insert slot 11, other insert slots 11 can be engaged with the corresponding ejection mechanism 4 to prepare for the supply or reception of substrates in advance. This reduces the waiting time of the suction cup assembly 3 and can efficiently provide more substrates than a single insert slot 11 can provide at one time.

[0032] Depend on Figure 1 As can be seen, in this embodiment of the application, the suction cup assembly 3 includes multiple suction cup control areas 31, each suction cup control area 31 includes multiple suction cups, each suction cup control area 31 can independently pick up and place the substrate 01, and the multiple suction cup control areas 31 can be linked to control and synchronously pick up and place the substrate 01.

[0033] As set above, this embodiment of the application sets up multiple suction cup control areas 31 in the suction cup assembly 3, which can be independently or linked for control. Each suction cup control area 31 can be configured to correspond to at least one insert slot 11. For example, when the number of substrates 01 in a certain insert slot 11 is sufficient, the corresponding suction cup control area 31 can be activated independently to complete the substrate picking action of the insert slot 11. Multiple suction cup control areas 31 can also be linked for control. By combining two or more suction cup control areas 31, more substrates 01 can be picked up and placed at one time. By switching between individual control and two or more combined linked control, a variety of batch picking and placing substrates 01 combination schemes can be formed to adapt to the change in the number of substrates 01 in the insert slot 11 during operation, so as to achieve the full load of the suction cup assembly 3 with the number N of substrates, ensuring that the suction cup assembly 3 is always in a fully loaded operating state, and improving the transfer efficiency of substrates 01 between the substrate carrier boat 1 and the flower basket 2.

[0034] In this embodiment, the suction cup control area 31 is a detachable suction cup module. The suction cup assembly 3 picks up N pieces of raw material from at least two insert slots 11 on the sheet carrier boat 1 and transfers them to the empty flower basket 2; the suction cup assembly 3 picks up N pieces of raw material from the flower basket 2 loaded with raw material and replenishes them to at least two insert slots 11 on the sheet carrier boat 1.

[0035] As set above, in this embodiment of the application, the suction cup control area 31 is designed as a detachable suction cup module. Different suction cup modules can be replaced according to different numerical ratios of M and N. Different suction cup modules include different numbers of suction cups. The suction cup module can perform the wafer picking / placing action independently, adapting to the situation where the capacity of a single insert slot 11 is inconsistent with the capacity of the suction cup assembly 3, so as to adapt to the substrate transfer requirements of different specifications of baskets 2 and wafer carrier boats 1, ensuring that the number of substrates transferred in a single batch between baskets 2 and wafer carrier boats 1 by the suction cup assembly 3 can always reach the full load of wafer carrier number N, improving the transfer efficiency of substrates 01 between wafer carrier boats 1 and baskets 2, expanding the applicability of the substrate loading and unloading mechanism of this embodiment of the application, and realizing capacity improvement.

[0036] In this embodiment, the suction cup assembly 3 includes at least one suction cup control area 31 capable of accommodating NM substrates 01.

[0037] As configured above, since the number N of the third substrate positions 21 in the flower basket 2 is greater than the number M of the teeth 111 of a single substrate slot 11 in the substrate carrier boat 1, the suction cup assembly 3 needs to pick up substrates 01 from at least two substrate slots 11 to achieve full-load operation. One substrate slot 11 can provide M substrates 01, and the remaining NM substrates 01 need to be picked up from the other substrate slot 11. Based on this, the suction cup assembly 3 has at least one suction cup control area 31 that can accommodate NM substrates 01. For example, when N=1.5M, NM=0.5M. The suction cup assembly 3 has a suction cup control area 31 including M suction cups and a suction cup control area 31 including 0.5M suction cups. The two suction cup control areas 31 are linked to ensure the full-load operation of the suction cup assembly 3. After the substrates are picked up synchronously, the flower basket 2 is filled at once, improving the transfer efficiency of substrates 01 between the substrate carrier boat 1 and the flower basket 2.

[0038] like Figure 1 As shown in the embodiment of this application, M=3N / 4, and the suction cup assembly 3 includes a first suction cup control area 31-1 and a second suction cup control area 31-2. The first suction cup control area 31-1 can accommodate 3N / 4 substrates 01, and the second suction cup control area 31-2 can accommodate N / 4 substrates 01.

[0039] As set up above, the number M of the grooves 111 in a single insert slot 11 of the substrate carrier 1 is three-quarters of the number N of the third substrate carrier positions 21 of the substrate carrier 2. That is, out of the N substrates required for each fully loaded substrate carrier 2, 3N / 4 substrates 01-1 can be obtained from the first insert slot 11, the first substrate carrier position 111-1, or the second substrate carrier position 111-2. The substrates 01-1 from the first insert slot 11, the first substrate carrier position 111-1, or the second substrate carrier position 111-2 are completely removed. N / 4 pieces of clinker 01-1 need to be obtained from one of the second insert slot 11, the first plate carrier position 111-1, and the second plate carrier position 111-2. The clinker 01-1 in the second insert slot 11, the first plate carrier position 111-1, and the second plate carrier position 111-2 are partially removed. The first suction cup control area 31-1 and the second suction cup control area 31-2 are linked and controlled so that the suction cup assembly 3 reaches the full load of the number of plates N, and is transferred to the flower basket 2 in one go to achieve the full loading of the flower basket 2.

[0040] Therefore, the above settings ensure that both the suction cup assembly 3 and the flower basket 2 are fully loaded, increasing the number of substrates 01 transferred by the suction cup assembly 3 in a single operation, and improving the transfer efficiency of substrates 01 between the substrate carrier boat 1 and the flower basket 2.

[0041] After one material retrieval, N / 2 of the remaining clinker 01-1 in the second insert slot 11, one of the first plate carrier positions 111-1 and the second plate carrier position 111-2, is removed. The N / 4 suction cups in the second suction cup control area 31-2 are then controlled to remove N / 4 of the remaining clinker 01-1 from the second insert slot 11, one of the first plate carrier positions 111-1 and the second plate carrier position 111-2. The first suction cup control area 31-1 is then controlled to retrieve 3N / 4 clinker 01-1 from the other of the first insert slot 11, one of the first plate carrier positions 111-1 and the second plate carrier position 111-2. The first suction cup control area 31-1 and the second suction cup control area 31-2 are linked and controlled together. The suction cup assembly 3 reaches the full load of N plates and is transferred to the flower basket 2 in one go to achieve full loading of the flower basket 2.

[0042] After the second material removal, N / 4 of the clinker 01-1 remains in the second insert slot 11, one of the first insert position 111-1 and the second insert position 111-2. All the clinker 01-1 in the first insert slot 11 has been removed. The first suction cup control area 31-1 is controlled to remove 3N / 4 of the clinker 01-1 from the third insert slot, one of the first insert position 111-1 and the second insert position 111-2. The second suction cup control area 31-2 is controlled to remove the remaining N / 4 of the clinker 01-1 from the second insert slot 11, one of the first insert position 111-1 and the second insert position 111-2. The suction cup assembly 3 is just fully loaded with N pieces, and the pieces are transferred to the flower basket 2 in one go to achieve full loading of the flower basket 2.

[0043] After the above three material retrievals, the transfer of clinker 01-1 loaded into the two insert slots 11 is completed, with a transfer quantity of 3N. This combination of 3N / 4 suction cup control area and N / 4 suction cup control area can minimize the number of zones and simplify the suction cup module, electrical control, and related assembly. The step of transferring raw material from the basket side to the boat side can follow the above three steps. Specifically, in the current step, the raw material transferred back is placed in the same location where the clinker was retrieved.

[0044] It is understandable that, with the existing technology, the loading capacity of the suction cup assembly is the same as that of half of the insert slot. To complete the transfer of the substrate 01-1 between the two insert slots 11, four transfer actions of the suction cup assembly 3 are required. However, this application only requires three transfer actions of the suction cup assembly 3, thereby improving the transfer efficiency of the substrate 01 between the substrate carrier boat 1 and the flower basket 2.

[0045] The multiple insert slots 11 mentioned above can be located in the same substrate carrier 1, or they can be located in two or more different substrate carriers 1.

[0046] To facilitate understanding, the above three-stage material handling method is further explained. Define all first wafer positions 111-1 or all second wafer positions 111-2 within any wafer slot 11 as a unit column. Then, under the 3 / 4N+1 / 4N chuck division: Step 1, unit column A provides 3 / 4N, and unit column B provides 1 / 4N; Step 2, unit column C provides 3 / 4N, and unit column B provides 1 / 4N; Step 3, unit column D provides 3 / 4N, and unit column B provides 1 / 4N. That is, the 3 / 4N chuck control distinguishes the three-stage whole-take unit columns A, C, and D, and the 1 / 4N chuck control distinguishes the three-stage zero-take unit column B.

[0047] Please refer to Figure 4 , Figure 4 This is a simplified structural diagram of the substrate loading and unloading mechanism provided in this application, comprising the substrate carrier boat, the basket, and the suction cup assembly.

[0048] In this embodiment of the application, M=3N / 4, and the suction cup assembly 3 includes a third suction cup control area 31-3 and two second suction cup control areas 31-2. The third suction cup control area 31-3 can accommodate N / 2 substrates 01, and the second suction cup control area 31-2 can accommodate N / 4 substrates 01. The two second suction cup control areas 31-2 are located on both sides of the third suction cup control area 31-3.

[0049] As set up above, the number M of the teeth 111 of a single insert slot 11 of the substrate carrier 1 is three-quarters of the number N of the third substrate positions 21 of the flower basket 2, that is, among the N substrates required for each fully loaded flower basket 2; in addition to the substrate retrieval method described in the previous embodiment, the suction cup assembly 3 in this embodiment can also adopt the following substrate retrieval method: The third suction cup control area 31-3 and one of the second suction cup control areas 31-2 retrieve 3N / 4 pieces of clinker 01-1 from one of the first insert slot 11, the first loading position 111-1, and the second loading position 111-2. The clinker 01-1 in the first insert slot 11, the first loading position 111-1, and the second loading position 111-2 is completely removed. The other second suction cup control area 31-2 retrieves N / 4 pieces of clinker 01-1 from one of the second insert slot 11, the first loading position 111-1, and the second loading position 111-2. The clinker 01-1 in the second insert slot 11, the first loading position 111-1, and the second loading position 111-2 is partially removed. The third suction cup control area 31-3 and the two second suction cup control areas 31-2 work together to ensure that the suction cup assembly 3 is fully loaded with N pieces, and transfers them to the flower basket 2 in one go to achieve full loading of the flower basket 2.

[0050] After one material retrieval, N / 2 of the remaining clinker 01-1 in the second insert slot 11, one of the first plate carrier positions 111-1 and the second plate carrier position 111-2, are removed by N / 2 suction cups in the third suction cup control area 31-3. N / 2 suction cups in the two second suction cup control areas 31-2 retrieve N / 2 clinker 01-1 from the other of the first insert slot 11, the first plate carrier position 111-1 and the second plate carrier position 111-2. The third suction cup control area 31-3 and the two second suction cup control areas 31-2 are linked and controlled to achieve full loading of N plates by the suction cup assembly 3, which is then transferred to the flower basket 2 in one go to achieve full loading of the flower basket 2.

[0051] After the second material removal, N / 4 of the clinker 01-1 remains in the first insert slot 11, the other of the first insert position 111-1 and the second insert position 111-2. The other of the second insert slot 11 has 3N / 4 clinker 01-1. The third suction cup control area 31-3 and the two second suction cup control areas 31-2 work together to remove the remaining clinker 01-1 from the two insert slots 11. The suction cup assembly 3 reaches the full load of N pieces and is transferred to the flower basket 2 in one go to achieve full loading of the flower basket 2.

[0052] The multiple insert slots 11 mentioned above can be located in the same substrate carrier boat 1, or they can be located in two or more different substrate carrier boats 1. The step of transferring raw material from the basket side to the boat side can follow the above three steps. Specifically, in the current step, the raw material transferred back is placed in the same place where the cooked material was taken from.

[0053] After the above three material handling processes, the transfer of 01-1 substrate with a loading capacity of 11 in both insertion slots is completed, with a transfer quantity of 3N. This combination of one N / 2 suction cup control area and two N / 4 suction cup control areas can achieve four different substrate loading / unloading actions (N / 4, N / 2, 3N / 4, and N) through linkage control. Combined with the rotation of the suction cup robotic arm, it can adapt to different substrate placement orientations, significantly improving adaptability.

[0054] To facilitate understanding, the above three-stage material handling method will be further explained. Define all first wafer positions 111-1 or all second wafer positions 111-2 within any wafer slot 11 as a unit column. Then, under a suction cup partition of 1 / 2N + 1 / 4N + 1 / 4N: Step 1, unit column A provides 3 / 4N, unit column B provides 1 / 4N; Step 2, unit column B provides 1 / 2N, unit column C provides 1 / 2N; Step 3, unit column C provides 1 / 4N, unit column D provides 3 / 4N; that is, a partition combination of 1 / 2N + 1 / 4N can take the whole number 3 / 4N, while a partition of 1 / 2N or a partition combination of 1 / 4N + 1 / 4N can take 1 / 2N.

[0055] In the dual-insertion process, each groove 111 of the substrate carrier boat 1 has a first substrate carrier position 111-1 and a second substrate carrier position 111-2. The thin film deposition sides of the substrate 01 in the first substrate carrier position 111-1 and the second substrate carrier position 111-2 are opposite. In this embodiment, the two second suction cup control areas 31-2 are respectively located on both sides of the third suction cup control area 31-3. When it is necessary to pick up the substrate from the first substrate carrier position 111-1, the second suction cup control area 31-2 and the third suction cup control area 31-3 on one side can be activated. When it is necessary to pick up the substrate from the second substrate carrier position 111-2, it is only necessary to rotate the suction cup assembly 3 180°, and the second suction cup control area 31-2 and the third suction cup control area 31-3 on the other side can be used to complete the picking up of the substrate. When transferring to the basket 2, it is not necessary to perform another 180° rotation adjustment before it can be directly placed in, which simplifies the action of the suction cup assembly 3 and further improves the transfer efficiency of the substrate 01 between the substrate carrier boat 1 and the basket 2.

[0056] In another embodiment of this application, M=3N / 4, and the suction cup assembly 3 includes a third suction cup control area 31-3 and two second suction cup control areas 31-2. The third suction cup control area 31-3 can accommodate N / 2 substrates 01, and the second suction cup control area 31-2 can accommodate N / 4 substrates 01. The two second suction cup control areas 31-2 are located on the same side of the third suction cup control area 31-3.

[0057] In another embodiment of this application, M=3N / 4, and the suction cup assembly 3 includes four second suction cup control areas 31-2, each of which can accommodate N / 4 substrates 01.

[0058] As set up above, the number M of the teeth 111 of a single insert slot 11 of the substrate carrier 1 is three-quarters of the number N of the third substrate positions 21 of the flower basket 2. That is, of the N substrates required for each fully loaded flower basket 2, three-quarters come from the same insert slot 11 and one-quarter come from another insert slot 11. The three second suction cup control areas 31-2 can operate synchronously to remove 3N / 4 substrates 01 from the same insert slot 11. The other second suction cup control area 31-2 can operate independently to remove N / 4 substrates 01 from another toothed slot 111.

[0059] The suction cup assembly 3 of this embodiment can be applied to the sheet-retrieving methods described in the two embodiments above. The step of transferring raw material from the basket side to the boat side can be performed after the above three steps. Specifically, in the current step, the raw material transferred back is placed at the same location where the cooked material was taken from.

[0060] like Figure 1 As shown in the embodiment of this application, the number of flower baskets 2 is at least two, wherein at least one flower basket 2 is configured to load raw material 01-2 and at least one flower basket 2 is configured to load cooked material 01-1.

[0061] As set above, this embodiment of the application configures at least two baskets 2, with at least one basket 2 set to load raw material 01-2 (substrate without thin film deposition) and at least one basket 2 set to load cooked material 01-1 (substrate with completed thin film deposition). When the suction cup assembly 3 transfers the cooked material 01-1 in the substrate carrier boat 1 to the basket 2 loading the cooked material 01-1, the basket 2 loading the raw material is already pre-loaded, saving the time of unloading the cooked material 01-1 and loading the raw material 01-2, further improving the transfer efficiency of substrate 01 between the substrate carrier boat 1 and the basket 2.

[0062] like Figure 1 As shown in the embodiment of this application, the number of substrate boats 1 is at least two, and the suction cup assembly 3 is configured to: transfer M substrates 01 from one of the substrate boats 1 and transfer NM substrates 01 from the other substrate boat 1 during boat-side operation.

[0063] As mentioned earlier, since the number N of the third substrate positions 21 in the flower basket 2 is greater than the number M of the teeth 111 of a single substrate insertion slot 11 in the substrate carrier boat 1, the suction cup assembly 3 transfers M substrates 01 from one substrate carrier boat 1 and NM substrates 01 from the other substrate carrier boat 1. The sum of the two can just reach the full-load substrate number N of the suction cup assembly 3, ensuring that the suction cup assembly 3 operates at full load. After the substrates are picked up synchronously, the flower basket 2 is filled at once, improving the transfer efficiency of substrates 01 between the substrate carrier boat 1 and the flower basket 2.

[0064] Meanwhile, in the dual-insertion process, the first wafer carrier position 111-1 and the second wafer carrier position 111-2 are located on both sides of the toothed groove 111, respectively. When the suction cup assembly 3 picks up the wafer from the first wafer carrier position 111-1, the ejector mechanism 4 needs to rise to lift the substrate 01 to the picking height. After picking up the wafer, the ejector mechanism 4 needs to descend and reset before the lifting action of the second wafer carrier position 111-2 can be performed. The rising and falling actions of the ejector mechanism 4 both require a certain amount of time. If the substrate 01 is picked up and placed continuously in the same wafer carrier boat 1, the suction cup assembly 3 needs to wait for the ejector mechanism 4 to rise. The action reduces the transfer efficiency of substrate 01; however, the number of substrate carrier boats 1 in this application is at least two, and each substrate carrier boat 1 is equipped with a corresponding ejection mechanism 4. The ejection mechanism 4 of the second substrate carrier boat 1 can use the suction cup assembly 3 to complete the lifting of substrate 01 in advance during the process of the first substrate carrier boat 1 picking up the substrate. After the suction cup assembly 3 finishes picking up the substrate from the first substrate carrier boat 1, the suction cup assembly 3 can immediately turn to the second substrate carrier boat 1 to pick up the substrate, saving the waiting time of the suction cup assembly 3 and further improving the transfer efficiency of substrate 01 between the substrate carrier boat 1 and the basket 2.

[0065] This application embodiment also provides a substrate loading and unloading method, applicable to the aforementioned substrate loading and unloading mechanism, which repeatedly performs step A, step A including: The suction cup assembly 3 picks up N pieces of clinker 01-1 from at least two insert slots 11 on the carrier boat 1 and transfers them to the empty flower basket 2-1; The suction cup assembly 3 picks up N raw material 01-2 from the raw material basket 2-2 and adds them to at least two insert slots 11 on the sheet carrier boat 1.

[0066] The substrate loading and unloading method of this application is applicable to the aforementioned substrate loading and unloading mechanism, and therefore has the same technical effect as the aforementioned substrate loading and unloading mechanism, which will not be repeated here.

[0067] Please refer to Figures 5-17 , Figure 5 This is a first state diagram in a specific embodiment of the substrate loading and unloading method provided in this application; Figure 6 This is a second state diagram in a specific embodiment of the substrate loading and unloading method provided in this application; Figure 7 This is a third state diagram in a specific embodiment of the substrate loading and unloading method provided in this application; Figure 8 This is a fourth state diagram in a specific embodiment of the substrate loading and unloading method provided in this application; Figure 9 This is a fifth state diagram in a specific embodiment of the substrate loading and unloading method provided in this application; Figure 10 This is a sixth state diagram in a specific embodiment of the substrate loading and unloading method provided in this application; Figure 11 This is a seventh state diagram in a specific embodiment of the substrate loading and unloading method provided in this application; Figure 12 This is the eighth state diagram in a specific embodiment of the substrate loading and unloading method provided in this application; Figure 13 This is a ninth state diagram in a specific embodiment of the substrate loading and unloading method provided in this application; Figure 14 This is a tenth state diagram in a specific embodiment of the substrate loading and unloading method provided in this application; Figure 15 This is the eleventh state diagram in a specific embodiment of the substrate loading and unloading method provided in this application; Figure 16 This is a twelfth state diagram in a specific embodiment of the substrate loading and unloading method provided in this application; Figure 17 This is a diagram showing the thirteenth state in a specific embodiment of the substrate loading and unloading method provided in this application.

[0068] Taking M=3N / 4 as an example, the slide carrier 1 includes a first slide carrier 1-1 and a second slide carrier 1-2. Step A includes: Step S1: Combining Figures 5-7 Understand that the suction cup assembly 3 picks up 3N / 4 pieces of clinker 01-1 from one of the first loading position 111-1 and the second loading position 111-2 of the first loading boat 1-1, and the suction cup assembly 3 picks up N / 4 pieces of clinker 01-1 from one of the first loading position 111-1 and the second loading position 111-2 of the second loading boat 1-2, and the N pieces of clinker 01-1 picked up by the suction cup assembly 3 are transferred to the empty flower basket 2-1; Combination Figures 8-9 Understand that the suction cup assembly 3 picks up N raw material 01-2 from the raw material loading basket 2-2, of which 3N / 4 raw material 01-2 are added to one of the first loading position 111-1 and the second loading position 111-2 of the first loading boat 1-1, and N / 4 raw material 01-2 are added to one of the first loading position 111-1 and the second loading position 111-2 of the second loading boat 1-2; Step S2: Combining Figures 10-11 Understand that the suction cup assembly 3 picks up N / 2 pieces of clinker 01-1 from the other of the first loading position 111-1 and the second loading position 111-2 of the first loading boat 1-1, and the suction cup assembly 3 picks up N / 2 pieces of clinker 01-1 from the other of the first loading position 111-1 and the second loading position 111-2 of the second loading boat 1-2, and the suction cup assembly 3 transfers the N pieces of clinker 01-1 picked up in the two pick-ups to the empty flower basket 2-1; Combination Figures 12-13 Understand that the suction cup assembly 3 picks up N raw material 01-2 from the raw material loading basket 2-2, of which N / 2 raw material 01-2 are added to the other of the first sheet loading position 111-1 and the second sheet loading position 111-2 of the first sheet loading boat 1-1, and N / 2 raw material 01-2 are added to the other of the first sheet loading position 111-1 and the second sheet loading position 111-2 of the second sheet loading boat 1-2; Step S3: Combining Figures 14-15Understand that the suction cup assembly 3 picks up N / 4 pieces of clinker 01-1 from the other of the first loading position 111-1 and the second loading position 111-2 of the first loading boat 1-1, and the suction cup assembly 3 picks up N3 / 4 pieces of clinker 01-1 from the other of the first loading position 111-1 and the second loading position 111-2 of the second loading boat 1-2, and the suction cup assembly 3 transfers the N pieces of clinker 01-1 picked up in the two pick-ups to the empty flower basket 2-1; Combination Figures 16-17 Understand that the suction cup assembly 3 picks up N raw material 01-2 from the raw material loading basket 2-2, of which N / 4 raw material 01-2 are added to the other of the first sheet loading position 111-1 and the second sheet loading position 111-2 of the first sheet loading boat 1-1, and N3 / 4 raw material 01-2 are added to the other of the first sheet loading position 111-1 and the second sheet loading position 111-2 of the second sheet loading boat 1-2; The order of steps S1, S2 and S3 can be changed.

[0069] As can be seen from the above description, the substrate loading and unloading method of this application embodiment completes the loading and unloading of one of the insert slots 11 in the two wafer carrier boats 1 through the three steps of "3N / 4+N / 4, N / 2+N / 2, N / 4+3N / 4". In the prior art, to complete the transfer of substrate 01-1 between the two insert slots 11, four transfer actions of the suction cup assembly 3 are required, while this application only requires three transfer actions of the suction cup assembly 3, thus improving the transfer efficiency of substrate 01 between the wafer carrier boat 1 and the basket 2.

[0070] This application embodiment also provides a substrate loading and unloading control device, including: processor; Memory is used to store the processor's executable instructions; The processor is configured to execute the aforementioned substrate loading and unloading method by executing executable instructions.

[0071] The substrate loading and unloading control device of this application embodiment can execute the aforementioned substrate loading and unloading method, and therefore has the same technical effect as the aforementioned substrate loading and unloading method, which will not be repeated here.

[0072] This application also provides a computer-readable storage medium storing a computer program, which, when executed by a processor, implements the aforementioned substrate loading and unloading method.

[0073] The computer-readable storage medium of this application embodiment can realize the aforementioned substrate loading and unloading method, and therefore has the same technical effect as the aforementioned substrate loading and unloading method, which will not be repeated here.

[0074] The substrate loading and unloading mechanism, method, apparatus and medium of this application can be applied to the transfer of silicon wafers between baskets and wafer carriers, and can also be applied to wafers of other materials other than silicon wafers.

[0075] The above are merely preferred embodiments of this application. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principles of this application, and these improvements and modifications should also be considered within the scope of protection of this application.

Claims

1. A substrate loading and unloading mechanism, characterized in that, include: The substrate carrier (1) includes a plurality of insert slots (11), each insert slot (11) having M teeth (111), where M is a positive integer, and each tooth (111) having a first substrate position (111-1) and a second substrate position (111-2), the first substrate position (111-1) and the second substrate position (111-2) being used to load a substrate (01) respectively. Flower basket (2), the flower basket (2) has N third substrate positions (21), N is a positive integer, 0.5N≤M<N, each of the third substrate positions (21) is used to load one of the substrates (01). The suction cup assembly (3) has a full load of N substrates. The suction cup assembly (3) is configured to cooperate with the first substrate position (111-1) and / or the second substrate position (111-2) to complete the picking up or placing of substrates. The suction cup assembly (3) transfers N substrates in a single batch between the flower basket (2) and the substrate boat (1).

2. The substrate loading and unloading mechanism according to claim 1, characterized in that, The suction cup assembly (3) includes multiple suction cup control areas (31), each suction cup control area (31) includes multiple suction cups, each suction cup control area (31) can individually pick up and place the substrate (01), and multiple suction cup control areas (31) can be linked to control and synchronously pick up and place the substrate (01).

3. The substrate loading and unloading mechanism according to claim 2, characterized in that, The suction cup control area (31) is a detachable suction cup module.

4. The substrate loading and unloading mechanism according to claim 2, characterized in that, The suction cup assembly (3) includes at least one suction cup control area (31) capable of accommodating NM substrates (01).

5. The substrate loading and unloading mechanism according to claim 4, characterized in that, M=3N / 4, the suction cup assembly (3) includes a first suction cup control area (31-1) and a second suction cup control area (31-2). The first suction cup control area (31-1) can accommodate 3N / 4 of the substrates (01), and the second suction cup control area (31-2) can accommodate N / 4 of the substrates (01).

6. The substrate loading and unloading mechanism according to claim 4, characterized in that, M=3N / 4, the suction cup assembly (3) includes a third suction cup control area (31-3) and two second suction cup control areas (31-2). The third suction cup control area (31-3) can accommodate N / 2 of the substrates (01), and the second suction cup control area (31-2) can accommodate N / 4 of the substrates (01). The two second suction cup control areas (31-2) are located on both sides of the third suction cup control area (31-3).

7. The substrate loading and unloading mechanism according to claim 4, characterized in that, M=3N / 4, the suction cup assembly (3) includes four second suction cup control areas (31-2), and the second suction cup control areas (31-2) can accommodate N / 4 of the substrates (01).

8. The substrate loading and unloading mechanism according to any one of claims 1-7, characterized in that, The number of flower baskets (2) is at least two, wherein at least one of the flower baskets (2) is configured to load raw material (01-2) and at least one of the flower baskets (2) is configured to load cooked material (01-1).

9. The substrate loading and unloading mechanism according to any one of claims 1-7, characterized in that, The number of the substrate carrier boats (1) is at least two, and the suction cup assembly (3) is configured to transfer M substrates (01) from one of the substrate carrier boats (1) and NM substrates (01) from the other substrate carrier boat (1) during boat-side operation.

10. A substrate loading and unloading method, applicable to the substrate loading and unloading mechanism according to any one of claims 1-9, characterized in that, Repeat step A, which includes: The suction cup assembly (3) picks up N pieces of clinker (01-1) from at least two insert slots (11) on the carrier boat (1) and transfers them to the empty flower basket (2-1). The suction cup assembly (3) draws N raw materials (01-2) from the raw material basket (2-2) and adds them to at least two insert slots (11) on the sheet carrier boat (1).

11. The substrate loading and unloading method according to claim 10, characterized in that, M=3N / 4, the slide carrier (1) includes a first slide carrier (1-1) and a second slide carrier (1-2), and step A includes: Step S1: The suction cup assembly (3) picks up 3N / 4 pieces of the clinker (01-1) from one of the first loading position (111-1) and the second loading position (111-2) of the first loading boat (1-1), the suction cup assembly (3) picks up N / 4 pieces of the clinker (01-1) from one of the first loading position (111-1) and the second loading position (111-2) of the second loading boat (1-2), and the N pieces of the clinker (01-1) picked up by the suction cup assembly (3) are transferred to the empty flower basket (2-1). The suction cup assembly (3) picks up N pieces of raw material (01-2) from the basket (2-2) containing raw material, wherein 3N / 4 pieces of raw material (01-2) are added to one of the first and second sheet-carrying positions of the first sheet-carrying boat, and N / 4 pieces of raw material (01-2) are added to one of the first and second sheet-carrying positions of the second sheet-carrying boat; Step S2: The suction cup assembly (3) picks up N / 2 pieces of the cooked food (01-1) from the other of the first piece carrier position (111-1) and the second piece carrier position (111-2) of the first piece carrier boat (1-1), the suction cup assembly (3) picks up N / 2 pieces of the cooked food (01-1) from the other of the first piece carrier position (111-1) and the second piece carrier position (111-2) of the second piece carrier boat (1-2), and the suction cup assembly (3) transfers the N pieces of cooked food (01-1) picked up twice to the empty flower basket (2-1). The suction cup assembly (3) picks up N pieces of raw material (01-2) from the basket (2-2) containing raw material, wherein N / 2 pieces of raw material (01-2) are added to the other of the first sheet carrier position (111-1) and the second sheet carrier position (111-2) of the first sheet carrier boat (1-1), and N / 2 pieces of raw material (01-2) are added to the other of the first sheet carrier position (111-1) and the second sheet carrier position (111-2) of the second sheet carrier boat (1-2); Step S3: The suction cup assembly (3) picks up N / 4 pieces of the clinker (01-1) from the other of the first piece carrier position (111-1) and the second piece carrier position (111-2) of the first piece carrier boat (1-1), the suction cup assembly (3) picks up N3 / 4 pieces of the clinker (01-1) from the other of the first piece carrier position (111-1) and the second piece carrier position (111-2) of the second piece carrier boat (1-2), and the suction cup assembly (3) transfers the N pieces of clinker (01-1) picked up twice to the empty flower basket (2-1). The suction cup assembly (3) picks up N pieces of raw material (01-2) from the basket (2-2) containing raw material, wherein N / 4 pieces of raw material (01-2) are added to the other of the first sheet carrier position (111-1) and the second sheet carrier position (111-2) of the first sheet carrier boat (1-1), and N3 / 4 pieces of raw material (01-2) are added to the other of the first sheet carrier position (111-1) and the second sheet carrier position (111-2) of the second sheet carrier boat (1-2); The order of steps S1, S2, and S3 can be changed.

12. A substrate loading and unloading control device, characterized in that, include: processor; Memory for storing the executable instructions of the processor; The processor is configured to execute the substrate loading / unloading method of any one of claims 10-11 by executing the executable instructions.

13. A computer-readable storage medium, characterized in that, A computer program is stored on the computer-readable storage medium, which, when executed by a processor, implements the substrate loading and unloading method as described in any one of claims 10-11.

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