一种基于LSTM的MEMS变形镜振动干扰预测与补偿方法及系统
By proposing a vibration interference prediction and compensation method for MEMS deformable mirrors based on LSTM, the problem of high-frequency vibration compensation in complex environments of traditional systems is solved. This method achieves high-precision wavefront correction and beam stability improvement, reduces hardware resource consumption, and has high scalability.
CN122131622BActive Publication Date: 2026-07-17NANJING UNIV OF INFORMATION SCI & TECH
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- NANJING UNIV OF INFORMATION SCI & TECH
- Filing Date
- 2026-05-08
- Publication Date
- 2026-07-17
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Figure CN122131622B_ABST
Abstract
本发明公开了一种基于LSTM的MEMS变形镜振动干扰预测与补偿方法及系统，方法首先获取MEMS变形镜的光学图像并解算生成基础电压控制字；并行采集环境机械振动信号，经滤波与特征提取后生成归一化振动序列；利用LSTM网络将归一化序列与基础控制字作为联合输入，预测补偿电压，并在数字域完成前馈融合生成目标控制字；对目标控制字进行高速差分编码与传输，并在驱动端进行自适应解码，据此动态调节PWM驱动电路，以控制MEMS变形镜产生形变。本发明利用LSTM超前预测克服了传统闭环延迟瓶颈，并在数字域实现控制字融合，大幅节省了下位机逻辑资源，显著提升了复杂振动环境下的波前校正精度及系统稳定性。
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