一种改性基底氮掺杂碳薄膜、制备方法及其应用

By employing a multi-step process combining etching modification, impregnation modification, and magnetron sputtering deposition with high-temperature annealing, the problems of poor adhesion between nitrogen-doped carbon films and substrates, low density of active sites, and insufficient catalytic activity were solved, achieving efficient and stable oxygen reduction catalytic performance suitable for fuel cell applications.

CN122136378BActive Publication Date: 2026-07-17CHANGCHUN NORMAL UNIV

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
CHANGCHUN NORMAL UNIV
Filing Date
2026-05-08
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing nitrogen-doped carbon thin films suffer from poor adhesion to the substrate, low density of active sites, insufficient catalytic activity, and difficulty in controlling substrate surface uniformity, which affects device stability and electrocatalytic performance.

Method used

A multi-step process combining etching modification, impregnation modification, and magnetron sputtering deposition with high-temperature annealing is employed. Through the synergistic effect of electrocatalytic active modifiers, etching modifiers, and impregnation modification liquids, a uniform nanoscale rough structure is formed on the substrate surface, which enhances the bonding strength between the film and the substrate and the density of active sites, thereby achieving precise control over the composition and structure of the film.

Benefits of technology

It significantly improves the oxygen reduction catalytic activity and stability of nitrogen-doped carbon films on modified substrates, reduces catalyst costs, and facilitates industrial production.

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Abstract

本发明涉及薄膜制备技术领域,具体为一种改性基底氮掺杂碳薄膜、制备方法及其应用,包括以下制备步骤:S1.基底蚀刻改性;S2.基底浸渍改性;S3.氮掺杂碳薄膜沉积;S4.高温退火处理。本发明通过“蚀刻改性‑浸渍改性‑磁控溅射沉积‑高温退火”多步工艺的协同作用,实现了对薄膜组成、结构与界面性能的精准调控,使最终得到的改性基底氮掺杂碳薄膜在燃料电池中表现出优异的氧还原催化活性、良好的稳定性,大幅降低了催化剂成本,易于实现工业化生产。
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