A vacuum molecular pump processing apparatus and method

Abstract

The application provides a vacuum molecular pump processing equipment and method. The vacuum molecular pump processing equipment and method comprise a main rod, a processing end head is fixedly installed on one side of the top end of the main rod through an extension arm, and a cooling liquid spray head in communication with an external cooling liquid supply device is connected below the processing end head. The vacuum molecular pump processing equipment and method provided by the application are characterized in that an adjusting assembly is fixedly installed at the bottom end of each station on the workbench, a clamping assembly capable of stretching up and down is sleeved on the adjusting assembly, whether the station assembly and the workbench are locked is controlled by the up-and-down stretching of the clamping assembly, and then the long-time locking by the motor and the driving clamping by a large number of hydraulic telescopic rods are not needed, and only the rotation of the adjusting assembly is needed to drive the bottom end of the clamping assembly to move thereon, and the clamping parts of the two symmetrical clamping assemblies are provided in a diamond structure, so that the clamped parts can be always kept in the middle position.

Description

Technical Field

[0001] This invention relates to the field of vacuum molecular pump processing equipment, and more particularly to a vacuum molecular pump processing equipment and method. Background Technology

[0002] Vacuum molecular pumps are core equipment in semiconductor manufacturing, scientific research and testing, and other fields. Their key components, such as rotors, stators, and bearing housings, require high-precision forming through a combination of milling and boring. The machining accuracy directly determines the vacuum level, speed, and service life of the molecular pump. Currently, vacuum molecular pumps are machined using a combination of milling and boring, but existing machining equipment still has some problems in use, as follows:

[0003] Existing machining equipment requires clamping of parts during processing to facilitate stable subsequent machining. Most existing clamping methods rely on mechanical grippers or elastic grippers, which have poor applicability and cannot accommodate a large number of parts. Furthermore, the position of the clamped part is highly dependent on the elastic coefficient of the symmetrically arranged clamping springs on both sides of the structure. The springs on both sides cannot guarantee consistency, and this problem becomes more pronounced after prolonged use. This results in the clamped part not being positioned correctly on the worktable, necessitating the addition of an additional positioning structure to determine the part's position before machining. This not only increases the structural complexity of the equipment but also raises overall costs and maintenance frequency. Additionally, existing machining processes use coolant to cool the machining area, but the coolant cannot be effectively collected, resulting in coolant pooling on the worktable and causing wear on subsequent parts, especially in multi-station machining environments. Therefore, we propose a vacuum molecular pump machining device and method.

[0004] Therefore, it is necessary to provide a vacuum molecular pump processing equipment and method to solve the above-mentioned technical problems. Summary of the Invention

[0005] This invention provides a vacuum molecular pump processing equipment and method, which solves the problems mentioned in the background art.

[0006] To solve the above-mentioned technical problems, the present invention provides a vacuum molecular pump processing equipment, including a main rod. A processing end is fixedly installed on one side of the top end of the main rod via an extension arm. A coolant nozzle connected to an external coolant supply device is connected below the processing end. A magnetic suction assembly is fixedly installed at the bottom end of the processing end. A worktable is fixedly installed on the main rod. Circular grooves are evenly formed around the worktable, and a partition assembly is movably installed inside the grooves. Guide rings are evenly fixedly installed around the worktable. An adjustment assembly is fixedly installed at the bottom inside the partition assembly. A locking control assembly is movably connected to the adjustment assembly. A clamping assembly is movably connected above the locking control assembly. A collecting assembly is connected to the bottom end of the adjustment assembly. A separator ring is fixedly installed at the bottom end of the worktable.

[0007] Preferably, the magnetic suction assembly is connected to the processing end via a hanging rod in the vertical direction at the location of each corresponding sub-assembly. The magnetic suction assembly is electrically controlled, and the guide ring is a ring structure with high ends and low middle, and is set along the outer ring of the sub-assembly.

[0008] Preferably, the platform assembly includes a platform body, a limiting rotating ring is provided on the outer side of the platform body, and a vertical groove is provided in the middle of the platform body.

[0009] Preferably, the platform is rotatably mounted within a circular groove on the workbench. A limit slot is evenly provided at the bottom of the circular groove inside the workbench, and a protruding ring is provided at the height of the limit rotation ring. The protruding ring is fitted and engaged with the limit rotation ring. The vertical groove extends through the upper and lower ends of the platform, and an adjustment component is provided through the vertical groove.

[0010] Preferably, the adjusting assembly includes a body, a connector is fixedly installed at the bottom of the body, a drive screw is movably installed laterally on the body, a rotating wheel and a gear are fixedly installed at both ends of the drive screw, a base block is movably connected to the drive screw, a plug structure is fixedly installed at the top of the base block, the body is fixedly installed at the bottom of the platform in the middle of the vertical groove, a collecting assembly is movably connected to the bottom of the connector, the drive screw is rotatably installed laterally on the body, and the two sides of the drive screw are symmetrically provided with threads in opposite directions, the diameter of the rotating wheel is smaller than the diameter of the gear, the gear and the collecting assembly are detachably meshed, and the plug structure is movably installed inside the vertical groove.

[0011] Preferably, the insertion rod structure includes a rod body, a slot is provided in the middle of the rod body, a short groove is provided through the bottom end of the slot, the bottom end of the rod body is fixedly connected to the top end of the base block, the slot is provided through the top end of the rod body but not through the bottom end of the rod body, the cross-sectional area of ​​the short groove is smaller than the cross-sectional area of ​​the slot, and a transverse channel penetrating both sides is provided at the bottom of the short groove, and the locking control component is slidably disposed in the channel.

[0012] Preferably, the locking control assembly includes a main tube with a cavity inside. Symmetrical through slots are formed on both sides of the upper part of the main tube. A base plate is symmetrically fixedly mounted on both sides inside the cavity. A spring is fixedly mounted on the outer side of the base plate. A pin is fixedly mounted on one end of each spring. Connecting ropes are fixedly mounted on both sides of the middle portion of the main tube. The middle portions of both sides of the main tube are fixedly connected to the bottom end of the vertical groove via connecting arms. The through slots connect the cavity and the interior of the vertical groove. The bottom end of the clamping assembly is inserted into and movably disposed within the cavity. A horizontal slot is formed in the middle of the base plate. The connecting rope passes through the horizontal slot and is fixedly connected to one end of a pin on the side. The pin is inserted into a limiting slot on the platform.

[0013] Preferably, the clamping assembly includes a vertical pole, on which a pair of clamping arms are movably sleeved; a vertical rod is fixedly installed at the bottom end of the vertical pole; a short rod is fixedly installed at the bottom end of the vertical rod; the vertical pole is positioned above the worktable; the clamping arms are configured in a diamond shape; the vertical rod is movably inserted into the insert structure; and a roller is provided at the bottom end of the short rod, with the roller positioned below and fitted against the connecting rope.

[0014] Preferably, the collecting assembly includes a straight rod, the bottom end of which is connected to a collecting chamber via a movable insert rod. An intermediate ring is movably disposed above the collecting chamber. Toothed rings are provided at both the upper and lower ends of the inner side of the intermediate ring. Long rods are symmetrically fixedly installed on both sides of the top of the intermediate ring. An end block is fixedly installed at the top of the long rod. The inner top of the straight rod is provided with a threaded structure that is threadedly connected to a connector. An arc groove is provided on the side of the intermediate ring. The end block is movably disposed inside the platform.

[0015] A method for using a vacuum molecular pump processing device, the specific steps of which are as follows:

[0016] S1. The operator places the part into the clamping arm from one of the positions on the worktable, then rotates the clamping arm, which drives the adjustment component at the bottom to rotate as a whole. This causes the gears to rotate, thereby driving the movement of the bottom blocks on both sides and completing the clamping and fixing of the part.

[0017] S2. The worktable rotates so that the part is clamped and moved to the bottom of the corresponding processing end. The power supply inside the magnetic suction component is turned on so that it generates magnetic force, which causes the end block to move up. Under the isolation effect of the separator ring, the gear does not mesh with the gear ring. When the part position needs to be adjusted, the upright is lifted, which causes the short rod at the bottom to bend the connecting rope. This causes the connecting rope to pull the pin connected to one end to retract, thereby unlocking the rotation restriction of the split table component. After rotating to the corresponding position, the pin is automatically reinserted and locked under the action of the spring.

[0018] S3. After locking, the part is processed by the processing end. During the processing, external coolant is supplied for cooling. After use, the coolant is concentrated in the middle by the guide ring and flows along the side of the vertical groove to the collection chamber below for collection.

[0019] S4. Regularly clean the collected coolant and replace the collection chamber. After the processed parts lose their magnetic attraction, rotate the clamping assembly to open and unlock the clamping assembly, and then remove the parts.

[0020] Compared with related technologies, the vacuum molecular pump processing equipment and method provided by the present invention have the following beneficial effects:

[0021] (1) The present invention provides a vacuum molecular pump processing equipment and method. An adjustment component is fixedly installed at the bottom of each station on the worktable. A clamping component that can extend and retract vertically is sleeved on the adjustment component. The extension and retraction of the clamping component is used to control whether the station component and the worktable are locked. Therefore, it is not necessary to lock it by motor for a long time, and it is not necessary to use a large number of hydraulic telescopic rods to drive the clamping. The bottom end of the clamping component can be moved on it by the rotation of the adjustment component. The clamping parts of the two symmetrical clamping components are set as a rhombus structure. This can always keep the clamped part in the middle position. The rhombus structure can also be adapted to the processing and clamping of various parts with different shapes, which greatly improves the clamping adaptability of the processing equipment and ensures the processing effect of the subsequent parts.

[0022] (2) The present invention provides a vacuum molecular pump processing equipment and method. By setting a movable collection component at the bottom of the adjustment component, the magnetic attraction component is used to generate magnetic attraction force to control the overall movement state of the collection component. The up and down movement of the collection component is used to control its meshing position with the gear. The meshing state of the gear with the upper and lower parts of the internal structure of the collection component corresponds to the clamping and releasing state of the clamping component on the part, respectively. Thus, the clamping and releasing of the part can be achieved by controlling the meshing part of the collection component while keeping the clamping component rotating in the same direction. The collection component can also collect and recover the coolant used for processing in a timely manner. At the same time, a non-closed partition ring is set at the bottom of the worktable. The partition ring can be used to attract the collection component upward and move it to a position where it does not mesh with the gear during the processing. This can avoid the clamping component from being rotated by the gear meshing, which would cause the part to loosen. This ensures the stability of the part during processing and avoids the hydraulic rod failure and frequent subsequent maintenance that may be caused by the extensive use of electric hydraulic rods in the prior art. This greatly improves the stability of the equipment. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the first three-dimensional structure of the present invention;

[0024] Figure 2 This is a schematic diagram of the second three-dimensional structure of the present invention;

[0025] Figure 3 This is a partial three-dimensional cross-sectional view of the present invention;

[0026] Figure 4 For the present invention Figure 3 Enlarged structural diagram at point A in the middle;

[0027] Figure 5 This is a three-dimensional structural diagram of the split-unit component of the present invention;

[0028] Figure 6 This is a partial three-dimensional structural diagram of the present invention.

[0029] Figure 7 This is a three-dimensional structural diagram of the clamping component of the present invention;

[0030] Figure 8 This is a schematic diagram of a partial three-dimensional structure at the bottom of the present invention;

[0031] Figure 9 This is a three-dimensional structural diagram of the locking control component of the present invention.

[0032] Numbered components in the diagram: 1. Main rod, 2. Machining end, 3. Magnetic suction assembly, 4. Worktable, 5. Divider assembly, 51. Table body, 52. Limiting rotating ring, 53. Vertical slot, 6. Guide ring, 7. Adjustment assembly, 71. Machine body, 72. Connector, 73. Drive screw, 74. Rotary wheel, 75. Gear, 76. Base block, 77. Insert rod structure, 771. Rod body, 772. Slot, 773. Short slot, 8. 81. Locking control assembly; 82. Main pipe; 83. Cavity; 84. Through slot; 85. Base plate; 86. Spring; 87. Pin; 98. Connecting rope; 99. Clamping assembly; 91. Upright pole; 92. Clamping arm; 93. Vertical rod; 94. Short rod; 10. Collection assembly; 101. Straight rod; 102. Collection chamber; 103. Intermediate ring; 104. Toothed ring; 105. Long rod; 106. End block; 11. Separating ring. Detailed Implementation

[0033] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0034] Please refer to the following: Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 , Figure 7 , Figure 8 and Figure 9 ,in, Figure 1 This is a schematic diagram of the first three-dimensional structure of the present invention; Figure 2 This is a schematic diagram of the second three-dimensional structure of the present invention; Figure 3 This is a partial three-dimensional cross-sectional view of the present invention; Figure 4 For the present invention Figure 3 Enlarged structural diagram at point A in the middle; Figure 5 This is a three-dimensional structural diagram of the split-unit component of the present invention; Figure 6 This is a partial three-dimensional structural diagram of the present invention. Figure 7 This is a three-dimensional structural diagram of the clamping component of the present invention; Figure 8 This is a schematic diagram of a partial three-dimensional structure at the bottom of the present invention; Figure 9This is a three-dimensional structural diagram of the locking control component of the present invention. The vacuum molecular pump processing equipment includes: a main rod 1, a processing end head 2 fixedly installed on one side of the top of the main rod 1 via an extension arm, a coolant nozzle connected to the lower part of the processing end head 2 and communicating with an external coolant supply device, a magnetic suction component 3 fixedly installed at the bottom of the processing end head 2, a worktable 4 fixedly installed on the main rod 1, a circular groove evenly opened on the worktable 4, and a partition component 5 movably installed inside the groove, a guide ring 6 evenly fixedly installed on the worktable 4, an adjustment component 7 fixedly installed at the bottom inside the partition component 5, a locking control component 8 movably connected to the adjustment component 7, a clamping component 9 movably connected above the locking control component 8, a collecting component 10 connected to the bottom of the adjustment component 7, and a partition ring 11 fixedly installed at the bottom of the worktable 4;

[0035] Compared with the prior art, this application has an adjustment component 7 fixedly installed at the bottom of each station on the workbench 4. A vertically extendable clamping component 9 is sleeved on the adjustment component 7. The vertical extension of the clamping component 9 controls whether the substation component 5 and the workbench 4 are locked, thus eliminating the need for prolonged motor locking and the use of numerous hydraulic telescopic rods for driving the clamping. The rotation of the adjustment component 7 is sufficient to move the bottom of the clamping component 9. The clamping parts of the two symmetrical clamping components 9 are designed with a rhomboid structure, ensuring that the clamped part is always in the center position. The rhomboid structure also adapts to the processing and clamping of various parts with different shapes, greatly improving the clamping adaptability of the processing equipment and ensuring the subsequent processing effect. Simultaneously, a movable collection component 10 is provided at the bottom of the adjustment component 7. The movement of the collection component 10 is controlled by whether the magnetic attraction component 3 is energized or not, generating magnetic attraction. The up-and-down movement of component 10 controls its engagement position with gear 75. The engagement states of gear 75 with the upper and lower parts of the internal structure of the collecting component 10 correspond to the clamping and releasing states of the clamping component 9 on the part, respectively. Thus, by simply rotating the clamping component 9 in the same direction, the engagement position of the collecting component 10 can be controlled to clamp and release the part. The collecting component 10 can also collect and recover the coolant used for processing in a timely manner. At the same time, a non-closed partition ring 11 is provided at the bottom of the worktable 4. Using this partition ring 11, the collecting component 10 can be attracted upward and moved to a position where it is not engaged with gear 75 during processing. This avoids the clamping component 9 from being rotated due to the engagement of gear 75, which would cause the part to loosen. This ensures the stability of the part during processing and avoids the hydraulic rod failure and frequent subsequent maintenance that may occur with the extensive use of electro-hydraulic rods in the prior art. This greatly improves the stability of the equipment.

[0036] A vacuum molecular pump processing device includes a magnetic suction component 3. The magnetic suction component 3 is connected to the processing end 2 in the vertical direction at the location of each corresponding sub-unit component 5 via a hanging rod. The magnetic suction component 3 is electrically controlled. The flow guide ring 6 is a ring structure with high ends and low middle, and is set along the outer ring of the sub-unit component 5.

[0037] In this embodiment, it should be noted that the magnetic force generated by the electronic control of the magnetic suction component 3 is used to control the up and down movement of the adjustment component 7. During the processing stage, the magnetic force is used to move the adjustment component 7 upward, and the separation ring 11 prevents the clamping component 9 from being unlocked during rotation, thus ensuring the stability of the parts during processing. At the same time, the cooling oil used during processing can be guided by the flow guide ring 6 to prevent excessive overflow, thus ensuring the centralized recovery effect of the cooling oil.

[0038] A vacuum molecular pump processing device includes a stage assembly 5, which includes a stage body 51. A limiting rotating ring 52 is provided on the outer side of the stage body 51, and a vertical groove 53 is provided in the middle of the stage body 51.

[0039] In this embodiment, it should be noted that the platform 51 is rotatably mounted within a circular groove on the worktable 4. Limiting slots are evenly spaced at the bottom of the circular groove inside the worktable 4, and a protruding ring is located at the height of the limiting rotating ring 52. This protruding ring is fitted and engaged with the limiting rotating ring 52. A vertical groove 53 extends through the upper and lower ends of the platform 51, and an adjusting component 7 is installed within the vertical groove 53. During use, the locking control component 8 can be used to unlock and lock the rotation of the platform component 5, ensuring the flexibility of the parts during subsequent processing and guaranteeing the processing effect. The adjusting component 7 can move symmetrically in opposite directions on both sides of the vertical groove 53 to control the upper clamping component 9, achieving a clamping effect on the parts and ensuring the reliability of the equipment.

[0040] A vacuum molecular pump processing device includes an adjustment component 7, which includes a body 71. A connector 72 is fixedly installed at the bottom end of the body 71. A drive screw 73 is laterally movably installed on the body 71. A rotating wheel 74 and a gear 75 are fixedly installed at both ends of the drive screw 73, respectively. A base block 76 is movably connected to the drive screw 73. A plug structure 77 is fixedly installed at the top end of the base block 76.

[0041] In this embodiment, it should be noted that the machine body 71 is fixedly installed at the bottom end of the platform 51 in the middle of the vertical groove 53. The bottom end of the connector 72 is movably connected to the collection component 10. The drive screw 73 is horizontally rotatably installed on the machine body 71. The two sides of the drive screw 73 are symmetrically provided with threads in opposite directions. The diameter of the rotating wheel 74 is smaller than the diameter of the gear 75. The gear 75 is detachably engaged with the collection component 10. The insertion rod structure 77 is movably installed inside the vertical groove 53. In this way, during use, the drive adjustment can be achieved by manually adjusting the rotating clamping component 9. The entire assembly 7 rotates, and the meshing state of gear 75 can control whether the clamping assembly 9 can rotate the part, thereby adjusting the processing position during the machining process and ensuring the adaptability of the equipment. The bottom block 76 can also adjust the position of the two bottom blocks 76 by controlling the meshing state of gear 75 when the clamping assembly 9 drives the adjusting assembly 7 to rotate, thereby achieving stable clamping of the part. In the machining state, the mechanical structure of pure thread locking can ensure the stability of the part, thereby ensuring the subsequent machining effect of the part.

[0042] A vacuum molecular pump processing device includes a rod structure 77, the rod structure 77 includes a rod body 771, a slot 772 is provided in the middle of the interior of the rod body 771, and a short groove 773 is provided through the bottom end of the slot 772.

[0043] In this embodiment, it should be noted that the bottom end of the rod 771 is fixedly connected to the top end of the base block 76. The slot 772 is opened through the top end of the rod 771 but not through the bottom end. The cross-sectional area of ​​the short groove 773 is smaller than that of the slot 772. A transverse channel penetrating both sides is also opened at the bottom of the short groove 773. The locking control component 8 is slidably arranged in this channel. In this way, during use, when the entire rod structure 77 is driven to move by the rotation of the drive screw 73, the rod 771 can slide along the locking control component 8. This can ensure the stability of the rod structure 77 when it moves, and can also ensure that the locking state of both sides of the locking control component 8 can be unlocked by lifting the clamping component 9 set inside the slot 772, thereby ensuring the structural linkage of the entire device.

[0044] A vacuum molecular pump processing device includes a locking control assembly 8. The locking control assembly 8 includes a main pipe 81, a cavity 82 is opened inside the main pipe 81, and through slots 83 are symmetrically opened on both sides of the upper part of the main pipe 81. A base plate 84 is symmetrically fixedly installed on both sides inside the cavity 82. A spring 85 is fixedly installed on the outer side of the base plate 84. A pin 86 is fixedly installed on one end of the spring 85. Connecting ropes 87 are fixedly installed on both sides of the middle part of the main pipe 81.

[0045] In this embodiment, it should be noted that the middle of both sides of the main tube 81 is fixedly connected to the bottom of the vertical groove 53 through connecting arms. The through groove 83 connects the cavity 82 and the interior of the vertical groove 53. The bottom end of the clamping component 9 is inserted into the cavity 82 and is movably disposed. The middle of the base plate 84 has a horizontal groove. The connecting rope 87 passes through the horizontal groove and is fixedly connected to one end of the side pin 86. The pin 86 is inserted into the limiting slot on the platform 51. In this way, during the use of the equipment, when the clamping component 9 moves laterally with the drive of the adjusting component 7, its bottom end can move laterally inside the cavity 82. When it is necessary to unlock the rotation restriction of the split platform component 5, simply pull the clamping component 9 upward, so that its bottom end pulls the connecting rope 87 upward and bends it, which will cause the side pin 86 to retract inward, thereby unlocking the rotation lock state of the split platform component 5, so as to realize the rotatability during the part processing and ensure the processing effect of the part.

[0046] A vacuum molecular pump processing device includes a clamping assembly 9, which includes a vertical rod 91. A pair of clamping arms 92 are movably sleeved on the vertical rod 91. A vertical rod 93 is fixedly installed at the bottom end of the vertical rod 91, and a short rod 94 is fixedly installed at the bottom end of the vertical rod 93.

[0047] In this embodiment, it should be noted that the upright rod 91 is positioned above the workbench 4, the clamping arm 92 has a rhomboid structure, the vertical rod 93 is inserted into the insert rod structure 77 and is movable, and the bottom end of the short rod 94 is provided with a roller, which is positioned below and close to the connecting rope 87. In this way, when the clamping assembly 9 is pulled upward, the roller at the bottom of the short rod 94 can lift and bend the connecting rope 87. This structural design allows the short rod 94 to unlock the locking state of the pin 86 no matter where it is moved, thus achieving the flexibility of use of this structural design and ensuring the processing effect of the parts.

[0048] A vacuum molecular pump processing device includes a collection component 10, which includes a straight rod 101. The bottom end of the straight rod 101 is connected to a collection chamber 102 via a movable insert rod. An intermediate ring 103 is movably arranged above the collection chamber 102. Toothed rings 104 are provided at both the upper and lower ends of the inner side of the intermediate ring 103. Long rods 105 are symmetrically fixed on both sides of the top end of the intermediate ring 103. An end block 106 is fixedly installed at the top end of the long rod 105.

[0049] In this embodiment, it should be noted that the inner top of the straight rod 101 is provided with a threaded structure and is threadedly connected to the connector 72. The side of the intermediate ring 103 is provided with an arc groove. The end block 106 is located inside the platform 51 and is movably disposed. In this way, during use, the magnetic attraction effect can be controlled by whether the magnetic attraction component 3 is energized. The magnetic attraction force can be used to move the end block 106 up and down. When it moves to the maximum extent, the gear 75 can mesh with the lower gear ring 104. When the power is off, the gear 75 meshes with the upper gear ring 104 under its own weight. This controls the clamping state of the part when the clamping component 9 rotates. Furthermore, the separation ring 11 can prevent the gear 75 from meshing with any gear ring 104. This ensures that even if the clamping component 9 rotates, it will not affect the clamping state of the part, thus ensuring the stability of the part throughout the entire processing.

[0050] A method for using a vacuum molecular pump processing device, the specific steps of which are as follows:

[0051] S1. The operator places the part into the clamping arm 92 at one of the positions on the workbench 4, and then rotates the clamping arm 92, which drives the bottom adjustment component 7 to rotate as a whole. This causes the gear 75 to rotate, thereby driving the movement of the bottom blocks 76 on both sides and completing the clamping and fixing of the part.

[0052] S2. The worktable 4 rotates so that the part is clamped and moved to the bottom of the corresponding processing end 2. The power supply inside the magnetic suction component 3 is turned on so that it generates magnetic attraction, which causes the end block 106 to move up. Under the isolation effect of the separator ring 11, the gear 75 does not mesh with the gear ring 104. When the part position needs to be adjusted, the upright 91 is lifted, which causes the short rod 94 at the bottom to bend the connecting rope 87. This causes the connecting rope 87 to pull the pin 86 connected at one end to retract, thereby unlocking the rotation restriction of the separation table component 5. After rotating to the corresponding position, the pin 86 is automatically reinserted and locked under the action of the spring 85.

[0053] S3. After locking, the part is processed by the processing end 2. During the processing, external coolant is supplied for cooling. After use, the coolant is concentrated in the middle by the guide ring 6 and flows along the side of the vertical groove 53 to the collection chamber 102 below for collection.

[0054] S4. Regularly clean the collected coolant and replace the collection chamber 102. After the processed parts lose their magnetic attraction, rotate the magnetic suction component 3 to open and unlock the clamping component 9, and then remove the parts.

[0055] Compared with related technologies, the vacuum molecular pump processing equipment and method provided by the present invention have the following beneficial effects:

[0056] This application features an adjustment component 7 fixedly installed at the bottom of each station on the workbench 4. A vertically extendable clamping component 9 is sleeved on the adjustment component 7. The vertical extension of the clamping component 9 controls the locking between the substation component 5 and the workbench 4, eliminating the need for prolonged motor locking and the use of numerous hydraulic telescopic rods for clamping. The rotation of the adjustment component 7 alone moves the bottom of the clamping component 9. The two symmetrical clamping components 9 have a rhomboid clamping structure, ensuring the clamped part remains centered. This rhomboid structure also accommodates various shapes of parts, significantly improving the clamping adaptability of the processing equipment and guaranteeing the subsequent processing effect. Furthermore, a movable collecting component 10 is located at the bottom of the adjustment component 7. The movement of the collecting component 10 is controlled by the magnetic attraction force generated by the energization of the magnetic attraction component 3. The up-and-down movement controls the engagement position with gear 75. The engagement states of gear 75 with the upper and lower parts of the internal structure of the collecting assembly 10 correspond to the clamping and releasing states of the clamping assembly 9 on the part, respectively. Thus, by simply rotating the clamping assembly 9 in the same direction, the engagement position of the collecting assembly 10 can be controlled to clamp and release the part. The collecting assembly 10 can also collect and recover the coolant used for processing in a timely manner. At the same time, a non-closed partition ring 11 is provided at the bottom of the worktable 4. Using this partition ring 11, the collecting assembly 10 can be attracted upwards and moved away from engaging with gear 75 by magnetic attraction during processing. This avoids the clamping assembly 9 from being rotated due to engagement of gear 75, which would cause the part to loosen. This ensures the stability of the part during processing and avoids the hydraulic rod failure and frequent subsequent maintenance that may be caused by the extensive use of electro-hydraulic rods in the prior art. This greatly improves the stability of the equipment.

[0057] The above description is merely an embodiment of the present invention and does not limit the patent scope of the present invention. Any equivalent structural or procedural transformations made based on the content of the present invention specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of the present invention.

Claims

1. A vacuum molecular pump processing device, characterized in that, include: The main rod (1) has a processing end (2) fixedly installed on one side of the top end of the main rod (1) via an extension arm. A coolant nozzle connected to an external coolant supply device is connected below the processing end (2). A magnetic suction component (3) is fixedly installed at the bottom end of the processing end (2). A worktable (4) is fixedly installed on the main rod (1). A circular groove is evenly opened on the worktable (4), and a partition component (5) is movably installed inside the groove. A guide ring (6) is evenly fixedly installed on the worktable (4). An adjustment component (7) is fixedly installed at the bottom end inside the partition component (5). A locking control component (8) is movably connected to the adjustment component (7). A clamping component (9) is movably connected above the locking control component (8). A collection component (10) is connected to the bottom end of the adjustment component (7). A partition ring (11) is fixedly installed at the bottom end of the worktable (4).

2. The vacuum molecular pump processing equipment according to claim 1, characterized in that, The magnetic suction component (3) is connected to the processing end (2) in the vertical direction of each corresponding sub-unit component (5) via a hanging rod. The magnetic suction component (3) is electrically controlled. The guide ring (6) is a ring structure with high ends and low middle, and is set along the outer ring of the sub-unit component (5).

3. The vacuum molecular pump processing equipment according to claim 1, characterized in that, The platform assembly (5) includes a platform body (51), a limit rotating ring (52) is provided on the outer side of the platform body (51), and a vertical groove (53) is provided in the middle of the platform body (51).

4. The vacuum molecular pump processing equipment according to claim 3, characterized in that, The platform (51) is rotatably mounted in the circular groove on the workbench (4). The bottom of the circular groove inside the workbench (4) is evenly provided with a limiting slot, and a protruding ring is provided at the height of the limiting rotating ring (52). The protruding ring is adapted to and engaged with the limiting rotating ring (52). The vertical groove (53) is provided through the upper and lower ends of the platform (51), and an adjustment component (7) is provided through the vertical groove (53).

5. The vacuum molecular pump processing equipment according to claim 1, characterized in that: The adjustment assembly (7) includes a body (71), a connector (72) is fixedly installed at the bottom of the body (71), a drive screw (73) is movably mounted laterally on the body (71), a rotating wheel (74) and a gear (75) are fixedly installed at both ends of the drive screw (73), a base block (76) is movably connected to the drive screw (73), and a plug structure (77) is fixedly installed at the top of the base block (76). The body (71) is located at the bottom of the platform (51). The connector (72) is fixedly installed in the middle of the vertical groove (53). The bottom end of the connector (72) is movably connected to the collection component (10). The drive screw (73) is installed horizontally on the body (71). The drive screw (73) has symmetrical threads in opposite directions on both sides. The diameter of the wheel (74) is smaller than the diameter of the gear (75). The gear (75) and the collection component (10) are detachably meshed. The insertion rod structure (77) is movably installed inside the vertical groove (53).

6. The vacuum molecular pump processing equipment according to claim 5, characterized in that: The insert structure (77) includes a rod body (771), a slot (772) is provided in the middle of the inside of the rod body (771), a short groove (773) is provided through the bottom end of the slot (772), the bottom end of the rod body (771) is fixedly connected to the top end of the base block (76), the slot (772) is provided through the top end of the rod body (771) but not through the bottom end of the rod body (771), the cross-sectional area of ​​the short groove (773) is smaller than the cross-sectional area of ​​the slot (772), and a transverse channel penetrating both sides is provided at the bottom of the short groove (773), and the locking control component (8) is slidably disposed in the channel.

7. The vacuum molecular pump processing equipment according to claim 1, characterized in that: The locking control assembly (8) includes a main tube (81), the inside of which is provided with a cavity (82). Through slots (83) are symmetrically provided on both sides of the upper part of the main tube (81). Base plates (84) are symmetrically fixedly installed on both sides of the inside of the cavity (82). A spring (85) is fixedly installed on the outer surface of the base plate (84). A pin (86) is fixedly installed at one end of the spring (85). Connecting ropes (87) are fixedly installed on both sides of the middle part of the main tube (81). The two sides of the main tube (81) are fixedly connected to the bottom of the vertical groove (53) through the connecting arm. The through groove (83) connects the cavity (82) and the interior of the vertical groove (53). The bottom end of the clamping assembly (9) is inserted into the cavity (82) and is movably disposed. The middle part of the base plate (84) is provided with a horizontal groove. The connecting rope (87) passes through the horizontal groove and is fixedly connected to one end of the pin (86) on the side. The pin (86) is inserted into the limiting slot on the platform (51).

8. The vacuum molecular pump processing equipment according to claim 1, characterized in that: The clamping assembly (9) includes a vertical rod (91), on which a pair of clamping arms (92) are movably sleeved. A vertical rod (93) is fixedly installed at the bottom end of the vertical rod (91), and a short rod (94) is fixedly installed at the bottom end of the vertical rod (93). The vertical rod (91) is positioned above the workbench (4). The clamping arms (92) are arranged in a diamond shape. The vertical rod (93) is inserted into the insert rod structure (77) and is movably arranged. A roller is provided at the bottom end of the short rod (94), and the roller is positioned below the connecting rope (87) and fits against it.

9. The vacuum molecular pump processing equipment according to claim 1, characterized in that: The collection assembly (10) includes a straight rod (101). The bottom end of the straight rod (101) is connected to a collection chamber (102) via a movable insert rod. An intermediate ring (103) is movably arranged above the collection chamber (102). Toothed rings (104) are provided at both the upper and lower ends of the inner side of the intermediate ring (103). Long rods (105) are symmetrically fixed on both sides of the top end of the intermediate ring (103). An end block (106) is fixedly installed at the top end of the long rod (105). The inner top end of the straight rod (101) is provided with a threaded structure and is threadedly connected to the connector (72). An arc groove is provided on the side of the intermediate ring (103). The end block (106) is movably arranged inside the platform (51).

10. The method of using the vacuum molecular pump processing equipment according to any one of claims 1-9, characterized in that, The specific usage steps are as follows: S1. The worker places the part into the clamping arm (92) at one of the positions on the workbench (4), and then rotates the clamping arm (92) to drive the bottom adjustment component (7) to rotate as a whole. This will cause the gear (75) to rotate and drive the movement of the bottom blocks (76) on both sides, thus completing the clamping and fixing of the part. S2. The worktable (4) rotates so that the part is clamped and moved to the bottom of the corresponding processing end (2). The power supply inside the magnetic suction assembly (3) is turned on so that it generates magnetic force, thereby causing the end block (106) to move up. Under the isolation effect of the separator ring (11), the gear (75) does not mesh with the gear ring (104). When the part position needs to be adjusted, the upright (91) is lifted, thereby causing the short rod (94) at the bottom to bend the connecting rope (87), thereby causing the connecting rope (87) to pull the pin (86) connected at one end to retract, thereby unlocking the rotation restriction of the partition assembly (5). After rotating to the corresponding position, the pin (86) is automatically reinserted and locked under the action of the spring (85). S3. After locking, the part is processed by the processing end (2). During the processing, external coolant is supplied for cooling. After use, the coolant is concentrated in the middle under the guidance of the guide ring (6) and flows along the side of the vertical groove (53) to the collection chamber (102) below for collection. S4. Regularly clean the collected coolant and replace the collection chamber (102). After the processed parts lose their magnetic attraction, rotate the magnetic suction assembly (3) to open and unlock the clamping assembly (9) to remove the parts.

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