Modular electronic grade ammonia water intelligent production system and collaborative control method thereof

Abstract

The application discloses a modular electronic-grade ammonia water intelligent production system, which comprises a hydrogen production module, a synthesis module, a purification module, a hydrogen energy storage unit and a control system, the hydrogen production module, the synthesis module and the purification module are sequentially connected through high-clean pipelines to form an ammonia water production link, the hydrogen energy storage unit is electrically connected with the hydrogen production module and / or the synthesis module to supply power thereto, the control system is connected with a power grid signal to receive a green power fluctuation signal of the power grid in real time, and based on a preset green power response threshold, the control system controls the power supply switching between the hydrogen energy storage unit and the power grid. Through the "green electricity-production-tracing" full-chain green solution, the application significantly improves the production capacity utilization rate, product purity and economic benefits of the electronic-grade ammonia water production system, realizes a breakthrough in technology, and provides key technical support for the green electronic chemical supply chain of the semiconductor industry.

Description

Technical Field

[0001] This invention relates to a modular intelligent production system for electronic-grade ammonia and its collaborative control method, belonging to the field of electronic chemical production technology for semiconductor manufacturing. Background Technology

[0002] The production of electronic-grade ammonia using renewable energy (green electricity) has become an important development direction. However, green electricity, represented by wind and solar power, has significant intermittency and volatility, which poses a severe challenge to electronic-grade ammonia production systems that are traditionally designed for stable load operation.

[0003] In existing technologies, electronic-grade ammonia production systems typically operate under a fixed load, making it impossible to dynamically adjust their operation based on real-time changes in the grid's green electricity output. This leads to a series of technical drawbacks: during periods of abundant green electricity and low electricity prices, the system may be unable to operate at full capacity due to design limitations, resulting in a waste of green electricity resources; during periods of insufficient green electricity and high electricity prices, the system may be forced to reduce production or even shut down, leading to low capacity utilization (e.g., an average of only about 60% annually), causing significant capacity waste and economic losses. Furthermore, existing systems lack effective energy storage coordination mechanisms, failing to store surplus green electricity and release it when needed to achieve a dynamic economic balance of "production during low electricity price periods and energy storage during high electricity price periods."

[0004] Furthermore, existing systems have shortcomings in terms of inter-module connections and purification processes, making it difficult to continuously and stably produce high-purity (e.g., 7N grade) ammonia water that meets the requirements of advanced semiconductor processes under fluctuating operating conditions. Therefore, there is an urgent need for an electronic-grade ammonia water production system and method that can intelligently respond to fluctuations in green electricity, ensure continuous and efficient production, and guarantee high-purity products. Summary of the Invention

[0005] This invention aims to overcome the shortcomings of the prior art and provide a modular intelligent production system for electronic-grade ammonia water, as well as a collaborative control method for the modular intelligent production system for electronic-grade ammonia water. Through innovation in system architecture and control strategy, this invention enables the production of electronic-grade ammonia water to respond in real time and quickly to fluctuations in the green power of the power grid. Under the premise of ensuring production continuity and high product purity, it significantly improves the efficiency of green power utilization and system capacity utilization, reduces production costs, and achieves green traceability of the production process.

[0006] To solve the above-mentioned technical problems, the present invention adopts the following technical solution: a modular electronic-grade ammonia water intelligent production system, including a hydrogen production module, a synthesis module, a purification module, a hydrogen energy storage unit and a control system, wherein the hydrogen production module, the synthesis module and the purification module are connected in sequence through high-purity pipelines to form an ammonia water production chain; The hydrogen energy storage unit is electrically connected to the hydrogen production module and / or synthesis module to supply power to them under specific conditions; the control system is connected to the power grid signal to receive the green power fluctuation signal of the power grid in real time, and controls the power supply switching between the hydrogen energy storage unit and the power grid based on a preset green power response threshold, so as to maintain the continuous and stable operation of the hydrogen production module and synthesis module when green power is insufficient.

[0007] Preferably, the control system communicates with the power grid via the Modbus RTU protocol to achieve real-time signal acquisition and reliable transmission, and to acquire the green power signal of the power grid in real time; when the green power is detected to be lower than the preset green power response threshold, the control system controls the hydrogen energy storage unit to supply power to the hydrogen production module and / or synthesis module within 10 seconds.

[0008] Preferably, the preset green electricity response threshold is not a fixed value, but can be dynamically adjusted according to the wind and solar curtailment rate of the power grid. When the wind and solar curtailment rate is within the fluctuation range of 15%-35%, the control system sets different green electricity response thresholds accordingly. For example, the control system can be set to different response thresholds such as 60%, 50%, and 45% to achieve more refined scenario adaptive control.

[0009] Preferably, it also includes a blockchain traceability unit, which is used to generate a unique digital ID for each batch of electronic-grade ammonia produced, and to store the carbon footprint data, purity test data and production process parameters of the batch of ammonia on the blockchain to achieve reliable traceability throughout the product's entire life cycle.

[0010] Preferably, the hydrogen production module includes a PEM electrolyzer or an AEM electrolyzer with a rated power of 200kW, an operating temperature of 75℃, and an operating pressure of 1.5MPa.

[0011] Preferably, the synthesis module includes a low-temperature, low-pressure ammonia synthesis tower with a rated power of 500kW, an operating pressure of 7.5MPa, and an operating temperature of 450℃.

[0012] Preferably, the purification module includes a catalytic hydrogenation unit, an adsorption unit, a distillation unit, and a terminal treatment unit connected in sequence, forming a gradient purification system for purifying the synthesized ammonia water; the catalytic hydrogenation unit is equipped with a Pd-Pt / TiO2 bimetallic catalyst; the adsorption unit adopts a multi-stage adsorption bed, which includes a first-stage 3A molecular sieve adsorption bed, a second-stage nickel-based catalyst adsorption bed, and a third-stage composite adsorbent adsorption bed arranged in sequence, wherein the composite adsorbent is a mixture of silica gel and activated carbon; the distillation unit is a structured packed distillation column; and the terminal treatment unit includes an ion exchange component and a membrane filtration component.

[0013] A collaborative control method for a modular electronic-grade ammonia water intelligent production system based on green electricity fluctuation response, applied to the aforementioned system, the method comprising: S1. Receive green power fluctuation signals from the power grid in real time; S2. Compare the green electricity power fluctuation signal with a preset green electricity response threshold; S3. When the green power fluctuation signal is lower than the preset green power response threshold, control the hydrogen energy storage unit to supply power to the hydrogen production module and / or synthesis module within 10 seconds to maintain continuous production operation. S4. When the green electricity power fluctuation signal is higher than or equal to the preset green electricity response threshold, control the power grid to supply power to the hydrogen production module and / or synthesis module.

[0014] Preferably, the preset green electricity response threshold is dynamically set according to the wind and solar curtailment rate of the power grid, including: when the wind and solar curtailment rate is 15%, the green electricity response threshold is set to 60%; when the wind and solar curtailment rate is 25%, the green electricity response threshold is set to 50%; when the wind and solar curtailment rate is 35%, the green electricity response threshold is set to 45%.

[0015] Preferably, the method further includes: generating a unique digital ID for each batch of electronic-grade ammonia produced; collecting green electricity carbon footprint data, ammonia purity data, and key process parameters during the production process of that batch; and uploading the unique digital ID, carbon footprint data, purity data, and process parameters to the blockchain for storage.

[0016] Compared with the prior art, the present invention has at least the following beneficial effects: Addressing the inherent intermittency and volatility of green electricity, this invention employs an intelligent response mechanism of "real-time monitoring - threshold judgment - rapid switching," in conjunction with a hydrogen energy storage unit, to effectively solve the fundamental problem of forced shutdowns in traditional fixed-load systems. When green electricity is insufficient, the system can seamlessly switch to energy storage power within 10 seconds, ensuring the continuous and stable operation of core hydrogen production and synthesis processes. This system can effectively improve annual capacity utilization and significantly reduce capacity waste caused by fluctuations in green electricity.

[0017] The core logic of this invention's intelligent response mechanism works in synergy with electricity price signals, naturally achieving the optimal economic strategy of "full-load production during low-electricity-price periods and maintaining operation using affordable energy storage during high-electricity-price periods." This not only smooths out fluctuations in electricity costs but also directly improves production efficiency by enhancing the absorption capacity of high-priced green electricity and increasing product output.

[0018] Although the operating load may be dynamically adjusted due to power supply switching, this invention has two main advantages: first, it adopts a modular high-cleanliness design, with high-cleanliness pipelines between modules, which eliminates secondary contamination from the physical connection; second, it integrates a highly efficient gradient purification system to specifically remove the unique impurities in the green ammonia raw material.

[0019] This invention generates a unique digital ID for each batch of products and automatically uploads real-time green electricity ratios, full-process process parameters, and final quality inspection data to the blockchain for verification. This tamper-proof "digital twin" record provides downstream chip manufacturers with transparent and reliable green quality verification.

[0020] The system of this invention adopts a modular skid-mounted design, with highly integrated functional modules, small footprint, and is easy to transport, install and deploy quickly. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the modular system structure of the present invention; Figure 2 This is a schematic diagram of the green electricity fluctuation response control logic of the present invention.

[0022] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. Detailed Implementation

[0023] The embodiments of the present invention will now be described in detail. It should be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the scope of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0024] On the one hand, the present invention provides a modular electronic-grade ammonia water intelligent production system, which includes a hydrogen production module, a synthesis module, a purification module, a hydrogen energy storage unit, and a control system.

[0025] The hydrogen production module, synthesis module, and purification module are sequentially connected via high-purity pipelines, forming a complete production chain from hydrogen production to the output of high-purity ammonia. The hydrogen energy storage unit is electrically connected to the hydrogen production module and / or synthesis module, providing power to them under specific conditions. The control system is connected to the power grid signal, receiving real-time green electricity power fluctuation signals from the grid and intelligently controlling the power supply switching between the hydrogen energy storage unit and the grid based on a preset green electricity response threshold, thereby maintaining the continuous and stable operation of the hydrogen production module and synthesis module when green electricity is insufficient.

[0026] The control system communicates with the power grid via the Modbus RTU protocol to achieve real-time signal acquisition and reliable transmission. When the real-time green electricity power is detected to be lower than the preset green electricity response threshold, the control system can quickly switch to the mode powered by the hydrogen energy storage unit within 10 seconds.

[0027] The preset green electricity response threshold is not a fixed value, but can be dynamically adjusted according to the wind and solar curtailment rate of the power grid. For example, when the wind and solar curtailment rate is in the typical fluctuation range of 15%-35%, the control system can be set to different response thresholds such as 60%, 50%, and 45% to achieve more refined scenario-adaptive control.

[0028] The system also includes a blockchain traceability unit. This unit generates a unique digital ID for each batch of electronic-grade ammonia produced and stores information such as the carbon footprint data (e.g., the proportion of green electricity used in production), purity test data, and key production process parameters of that batch of products on the blockchain, enabling reliable traceability throughout the entire product lifecycle.

[0029] Regarding the specific structure of each module: The high-cleanliness pipeline is a 316L VIM-VAR stainless steel rail welded pipeline with an inner surface roughness Ra≤0.1μm; the pipeline is cleaned by ultrapure water circulation before leaving the factory until the particle size in the fluid is less than 0.1μm after cleaning.

[0030] The hydrogen production module preferably includes a PEM electrolyzer or an AEM electrolyzer, with a rated power of, for example, 200 kW, an operating temperature of approximately 75 °C, and an operating pressure of approximately 1.5 MPa.

[0031] The synthesis module preferably includes a low-temperature, low-pressure ammonia synthesis tower with a rated power of, for example, 500 kW, an operating pressure of approximately 7.5 MPa, and an operating temperature of approximately 450 °C.

[0032] The purification module is crucial for ensuring the final product achieves electronic-grade purity. It comprises a catalytic hydrogenation unit, an adsorption unit, a distillation unit, and a final treatment unit, connected in sequence, forming a highly efficient gradient purification system. The catalytic hydrogenation unit is equipped with a Pd-Pt / TiO2 bimetallic catalyst to remove trace amounts of oxygen from the feedstock. The adsorption unit employs a multi-stage adsorption bed, including a first-stage 3A molecular sieve adsorption bed, a second-stage nickel-based catalyst adsorption bed, and a third-stage composite adsorbent adsorption bed, arranged sequentially. The distillation unit is preferably a structured packed distillation column for separating light and heavy components. The final treatment unit includes an ion exchange assembly and a membrane filtration assembly for final deep purification and particulate matter control.

[0033] Specifically, the catalytic hydrogenation unit uses a Pd-Pt / TiO2 bimetallic catalyst (Pd 0.5wt%, Pt 0.3wt%), reacting for 90-120 minutes at a precise temperature of 150-170℃ and 2.0MPa to completely convert oxygen into water molecules. When O2 > 1ppm, the catalytic hydrogenation temperature is raised to 170℃ and the adsorbent switching cycle is shortened to 12 hours; when O2 < 1ppm, the temperature is maintained at 150℃ for 24 hours. The system then enters a three-stage adsorption system. The first stage, using a 3A molecular sieve, operates at a constant temperature of -15℃ to precisely control the moisture content to 10ppb. The second stage, using a nickel-based catalyst, operates at a constant temperature of 10℃ to precisely reduce the residual oxygen content to 0.5ppb. The third stage uses a composite adsorbent (silica gel and activated carbon). The system operates at a constant temperature of 20℃ (mass ratio 3:1) to stabilize the heavy metal ion concentration at 0.1 ppb. The distillation unit uses a structured packed column with a strictly maintained operating pressure of 0.8 MPa. The column top temperature is precisely controlled at -50℃ to achieve efficient recovery of light components, and the column bottom temperature is precisely controlled at 35℃ to prevent the decomposition of heat-sensitive impurities through falling film evaporation. The terminal treatment unit sequentially processes the components through chelating resin ion exchange (stabilizing the metal ion concentration at 0.007-0.009 ppt), 0.05 μm pore size PTFE membrane filtration (particulate matter concentration 0.6-0.8 particles / mL), and ultrapure water for precise dilution to a concentration of 29.6%. All process parameters are limited to a single fixed value, avoiding the inefficient process of adding an additional distillation step in traditional processes. It achieves stable production of 7N+ purity electronic-grade ammonia water with a metal ion content of 0.007-0.009ppt, a particulate matter concentration of 0.6-0.8 particles / mL, an ammonia recovery rate of 99.999%, and an energy consumption of 2.3-2.5kWh / kg, breaking through the limitation of traditional multi-stage distillation processes that only achieve a purity of 6N.

[0034] On the other hand, the present invention provides a cooperative control method for the above-mentioned system, which includes the following steps: S1. Receive green power fluctuation signals from the power grid in real time; S2. Compare the green electricity power fluctuation signal with a preset green electricity response threshold; S3. When the green power fluctuation signal is lower than the preset green power response threshold, control the hydrogen energy storage unit to supply power to the hydrogen production module and / or synthesis module within 10 seconds to maintain continuous production operation. S4. When the green electricity power fluctuation signal is higher than or equal to the preset green electricity response threshold, the control grid directly supplies power to the hydrogen production module and / or synthesis module.

[0035] Specifically, the green electricity response threshold of the above method is preferably set dynamically according to the wind and solar curtailment rate of the power grid. For example, when the wind and solar curtailment rate is 15%, the threshold is set to 60%; when it is 25%, the threshold is set to 50%; and when it is 35%, the threshold is set to 45%.

[0036] Specifically, the above method may also include a product traceability step: generating a unique digital ID for each batch of electronic-grade ammonia produced, collecting green electricity carbon footprint data, ammonia purity data and key process parameters during the production process of that batch, and uploading them to the blockchain for evidence storage.

[0037] This invention constructs a green solution across the entire chain of "green electricity-production-traceability," achieving dynamic balance and green premium in the production of electronic-grade ammonia through a breakthrough green electricity fluctuation response mechanism and modular design. Based on the Modbus RTU protocol, it receives grid fluctuation signals in real time, achieving a dynamic balance of "production during low electricity price periods and energy storage during high electricity price periods." For scenarios with wind and solar curtailment rates of 15%-35%, it intelligently and dynamically sets response thresholds, overcoming the limitation of existing systems that only support a single threshold. This achieves full coverage of the green electricity fluctuation response mechanism across the entire fluctuation range, avoiding the shortcomings of traditional systems that result in idle capacity under low volatility or inability to cope under high volatility. Each batch of ammonia water generates a unique digital ID, automatically recording carbon footprint, purity data, and process parameters for on-chain storage, enabling the commercialization of "green attributes." The standard skid-mounted design of the hydrogen production module, synthesis module, and purification module, with 316L VIM-VAR stainless steel high-cleanliness rail welded pipelines between modules, is used. Before leaving the factory, ultrapure water is circulated and cleaned until particles are <0.1μm, ensuring that the product has 0.007-0.009ppt of metal ions and 0.6-0.8 particles / mL, meeting SEMI C8 standards, with a footprint of 200m².

[0038] The key to implementing the system and method described in this invention lies in the synergy of three core components: first, rapid response control of green ammonia fluctuations based on real-time signals and dynamic thresholds; second, modular physical integration to ensure extremely high cleanliness; and third, a deep gradient purification process for green ammonia raw materials. These will be further illustrated below through multiple embodiments and comparative examples.

[0039] Specific Embodiment 1 of the present invention: For the typical wind and solar power curtailment rate fluctuation scenario of 25% in the Chengdu-Chongqing region (grid green power fluctuation range of 40%-60%), the system receives grid signals in real time based on the Modbus RTU protocol. When green power is detected to be <50%, it automatically switches to 500kWh hydrogen storage power supply within 10 seconds to ensure continuous operation of the hydrogen production module (200kW PEM / AEM electrolyzer, operating temperature 75℃, pressure 1.5MPa) and the synthesis module (500kW low-temperature low-pressure ammonia synthesis tower, operating pressure 7.5MPa, temperature 450℃). The modules are connected by 316L VIM-VAR stainless steel high-cleanliness welded pipelines (Ra≤0.1μm), which are cleaned with ultrapure water circulation until particles are <0.1μm before leaving the factory. The purification module directly integrates a four-stage purification system (with fixed parameters such as catalytic hydrogenation temperature of 150℃, adsorption cycle of 24 hours, and distillation pressure of 0.8MPa), ensuring that the product contains 0.008 ppt of metal ions and 0.8 particles / mL, meeting the SEMI C8 standard. Each batch of ammonia water generates a unique digital ID, automatically recording the green electricity carbon footprint (25% wind and solar curtailment rate), purity data, and process parameters, and storing the data on the blockchain.

[0040] After extensive testing, the system's capacity utilization rate stabilized at 90% (annual capacity of 900 tons), a 50% improvement compared to the traditional fixed-load system (60% utilization rate, annual capacity of 600 tons), while reducing annual capacity waste by 40%. The product premium was 30% (selling price of 15,600 yuan / ton), resulting in an additional 1.44 million yuan / year in revenue compared to the traditional 12,000 yuan / ton. This embodiment, by precisely defining the green electricity response threshold (50%), switching time (10 seconds), and module parameters (pressure 7.5MPa, temperature 450℃), circumvented the shortcomings of existing systems that cannot dynamically respond to green electricity fluctuations, verifying the engineering feasibility of the green electricity fluctuation response mechanism.

[0041] Specific Embodiment 2 of the present invention: For the high-fluctuation scenario of 35% wind and solar power curtailment rate in the Chengdu-Chongqing region (grid green power fluctuation range of 35%-55%), the system dynamically optimizes the response threshold based on the Modbus RTU protocol. When green power is detected to be <45%, it automatically switches to 500kWh hydrogen storage power supply within 10 seconds to ensure continuous operation of the hydrogen production module (200kW PEM / AEM electrolyzer, operating temperature 75℃, pressure 1.5MPa) and the synthesis module (500kW low-temperature low-pressure ammonia synthesis tower, operating pressure 7.5MPa, temperature 450℃). The modules are connected by 316L VIM-VAR stainless steel high-cleanliness welded pipelines (Ra≤0.1μm), which are cleaned with ultrapure water circulation until particles are <0.1μm before leaving the factory. The purification module seamlessly integrates a four-stage purification system (with fixed parameters such as catalytic hydrogenation temperature of 150℃, adsorption cycle of 24 hours, and distillation pressure of 0.8MPa), ensuring that the product contains 0.009 ppt of metal ions and 0.7 particles / mL, meeting the SEMI C8 standard. Each batch of ammonia water generates a unique digital ID, automatically recording the green electricity carbon footprint (35% wind and solar curtailment rate), purity data, and process parameters, and storing the data on the blockchain.

[0042] After extensive testing, the system's capacity utilization rate stabilized at 92% (annual capacity of 920 tons), a 53.3% increase compared to the traditional fixed-load system (60% utilization rate, annual capacity of 600 tons), while reducing annual capacity waste by 45.5%. The product premium remained at 30% (selling price of 15,600 yuan / ton), resulting in an additional 1.56 million yuan / year in revenue compared to the traditional 12,000 yuan / ton. This embodiment, by precisely setting the response threshold (45%) for high-fluctuation scenarios and dynamically matching module parameters (pressure 7.5MPa, temperature 450℃), overcomes the limitation of existing systems that only support a single threshold, achieving scenario-adaptive upgrades to the green electricity fluctuation response mechanism. This avoids the technical shortcomings of traditional systems that cannot cope with high volatility, verifying the engineering feasibility of this invention under extreme operating conditions.

[0043] Specific Embodiment 3 of the present invention: For low-fluctuation scenarios in the Chengdu-Chongqing region with a wind and solar power curtailment rate of 15% (grid green power fluctuation range of 30%-50%), the system intelligently sets response thresholds based on the Modbus RTU protocol. When green power is detected to be <60%, it automatically switches to 500kWh hydrogen storage power supply within 10 seconds to ensure continuous operation of the hydrogen production module (200kW PEM / AEM electrolyzer, operating temperature 75℃, pressure 1.5MPa) and the synthesis module (500kW low-temperature, low-pressure ammonia synthesis tower, operating pressure 7.5MPa, temperature 450℃). The modules are connected by 316L VIM-VAR stainless steel high-cleanliness welded pipelines (Ra≤0.1μm), which are cleaned with ultrapure water circulation until particles are <0.1μm before leaving the factory. The purification module seamlessly integrates a four-stage purification system (with fixed parameters such as catalytic hydrogenation temperature of 150℃, adsorption cycle of 24 hours, and distillation pressure of 0.8MPa), ensuring that the product contains 0.007 ppt of metal ions and 0.6 particles / mL, meeting the SEMI C8 standard. Each batch of ammonia water generates a unique digital ID, automatically recording the green electricity carbon footprint (15% wind and solar curtailment rate), purity data, and process parameters, and storing the data on the blockchain.

[0044] After extensive testing, the system's capacity utilization rate stabilized at 88% (annual capacity of 880 tons), a 46.7% increase compared to the traditional fixed-load system (60% utilization rate, annual capacity of 600 tons), while reducing annual capacity waste by 36.7%. The product premium remained at 30% (selling price of 15,600 yuan / ton), resulting in an additional 1.32 million yuan / year in revenue compared to the traditional 12,000 yuan / ton. This embodiment, by precisely setting the response threshold (60%) for low-fluctuation scenarios and matching parameters (pressure 7.5MPa, temperature 450℃), overcomes the limitation of existing systems that only support high-fluctuation scenarios, achieving full coverage of the green electricity fluctuation response mechanism across the entire fluctuation range (15%-35%). It avoids the technical defects of traditional systems where capacity is idle under low fluctuation rates, verifying the engineering universality of this invention in low-fluctuation scenarios.

[0045] Comparative Example 1 (Traditional Fixed Load System): An electronic-grade ammonia production system employing a non-fluctuation response mechanism. The hydrogen production module (200kW PEM / AEM electrolyzer) and the synthesis module (500kW ammonia synthesis tower) operate in a fixed load mode, lacking integrated Modbus RTU protocol for receiving grid fluctuation signals and without a hydrogen energy storage power supply system. When the grid's green power fluctuates to <50%, the system is forced to shut down (response delay >10 minutes), resulting in a capacity utilization rate of only 60% (annual capacity of 600 tons), with an average annual capacity waste of 40%. Module connections use ordinary welded pipes (Ra≥0.5μm), and there is no ultrapure water cleaning process before shipment. The product particulate matter concentration reaches 3.5 particles / mL (5 times exceeding the SEMI C8 standard), and the metal ion content is 3.2ppt (far exceeding the 0.009ppt requirement), failing to meet 7N purity. The product lacks blockchain traceability, downstream enterprises cannot verify its green attributes, and the selling price remains at 12,000 yuan / ton (without premium), resulting in annual revenue of only 7.2 million yuan.

[0046] After long-term testing, the system's capacity utilization rate fluctuated between 55% and 65% in the Chengdu-Chongqing region under a scenario where the wind and solar curtailment rate fluctuated by 25%. Compared with Example 1 of this invention (90% utilization rate), the annual capacity loss was 300 tons, and the annual revenue decreased by 1.44 million yuan.

[0047] The core flaw of this comparative example is that it fails to solve the matching problem of "green electricity fluctuations - production continuity", and cannot achieve a green solution for the entire chain of "raw materials - production - traceability", which fully demonstrates the irreplaceable nature of the green electricity fluctuation response mechanism of this invention.

[0048] Comparative Example 2 (Including only the energy storage system without fluctuation response): An electronic-grade ammonia production system using 500kWh hydrogen energy storage but without an integrated green electricity fluctuation response mechanism. The hydrogen production module (200kW PEM / AEM electrolyzer) and the synthesis module (500kW ammonia synthesis tower) operate at fixed loads. The energy storage system is only used as a backup power source (capacity 500kWh), but it is not configured with Modbus RTU protocol to receive grid fluctuation signals and cannot dynamically adjust the response threshold. When the green electricity power fluctuates to <50%, the system still maintains the original load operation (response delay >5 minutes), resulting in a capacity utilization rate of only 70% (annual capacity of 700 tons), with an average annual capacity waste of 30%. The inter-module connections use ordinary welded pipes (Ra≥0.5μm), and there is no ultrapure water cleaning process before leaving the factory. The product has a metal ion content of 3.2ppt (exceeding the standard by 355 times) and a particulate matter concentration of 3.5 particles / mL (exceeding the standard by 5 times), which cannot meet the SEMI C8 standard. The product lacks blockchain traceability functionality, and its price remains at 12,000 yuan / ton (without premium), generating annual revenue of 8.4 million yuan.

[0049] Tests were conducted in the Chengdu-Chongqing region under a 25% fluctuation scenario of wind and solar curtailment rates. The system's capacity utilization rate remained stable at 65%-75%. Compared to Example 1 of this invention (90% utilization rate), this resulted in an annual capacity loss of 200 tons and a decrease in annual revenue of 1.44 million yuan. The core flaw of this comparative example lies in the fact that the energy storage system is not dynamically linked to grid fluctuations (only static backup), leading to "inability to operate at full capacity during low electricity price periods and inability to effectively store energy during high electricity price periods," thus failing to achieve a closed loop of "fluctuation response - raw material purification." Its static energy storage mode is fundamentally different from the 10-second dynamic response mechanism of this invention, fully demonstrating the irreplaceable nature of the green electricity fluctuation response mechanism.

[0050] The following table shows a detailed comparison of the data from the above embodiments and comparative examples: Table 1: Comparison of Data from Examples Table 2: Comparison between Comparative Example and Example 1 Based on the data comparison of the above specific embodiments, the capacity utilization rate of the present invention increases from 60% to 90% (annual capacity of 900 tons) of the traditional fixed-load system, reduces annual capacity waste by 40%, and increases annual revenue by RMB 1.44-1.56 million (RMB 7.2 million more than the traditional system); the metal ion content of the product decreases from 3.2 ppt to 0.007-0.009 ppt (a reduction of 99.75%), and the particulate matter concentration decreases from 3.5 particles / mL to 0.6-0.8 particles / mL (a reduction of 77.1%), fully complying with the SEMI C8 standard; the modular design occupies 200 m² (the industry average is 400 m²), achieving a dynamic balance of "production during low electricity price periods and energy storage during high electricity price periods". Compared with Comparative Example 1 (traditional fixed-load system), the present invention has significant advantages in terms of capacity utilization rate (+30%), product purity (metal ion content reduced by 99.75%, particulate matter concentration reduced by 77.1%), and economic benefits (annual revenue increase of RMB 7.2 million). This invention discloses a modular intelligent production system for electronic-grade ammonia, comprising a hydrogen production module, a synthesis module, a purification module, a hydrogen energy storage unit, and a control system. The hydrogen production module, synthesis module, and purification module are sequentially connected via high-purity pipelines, forming an ammonia production chain. The hydrogen energy storage unit is electrically connected to the hydrogen production module and / or the synthesis module to supply them with power. The control system is connected to the power grid signal to receive real-time green electricity power fluctuation signals from the grid and control the power supply switching between the hydrogen energy storage unit and the grid based on a preset green electricity response threshold. This invention, through a full-chain green solution encompassing "green electricity-production-traceability," significantly improves the capacity utilization, product purity, and economic benefits of the electronic-grade ammonia production system, achieving a technological breakthrough and providing key technical support for the green electronic chemical supply chain of the semiconductor industry.

Claims

1. A modular electronic-grade ammonia water intelligent production system, characterized in that, It includes a hydrogen production module, a synthesis module, a purification module, a hydrogen energy storage unit, and a control system. The hydrogen production module, synthesis module, and purification module are connected in sequence through high-purity pipelines to form an ammonia water production chain. The hydrogen energy storage unit is electrically connected to the hydrogen production module and / or synthesis module for supplying power to them; The control system is connected to the power grid signal to receive the green power fluctuation signal of the power grid in real time, and controls the power supply switching between the hydrogen energy storage unit and the power grid based on the preset green power response threshold, so as to maintain the continuous operation of the hydrogen production module and the synthesis module.

2. The system according to claim 1, characterized in that, The control system communicates with the power grid via the Modbus RTU protocol to acquire the green power signal of the power grid in real time. When the green electricity power is detected to be lower than the preset green electricity response threshold, the control system controls the hydrogen energy storage unit to supply power to the hydrogen production module and / or synthesis module within 10 seconds.

3. The system according to claim 1, characterized in that, The preset green electricity response threshold can be dynamically adjusted according to the wind and solar curtailment rate of the power grid; when the wind and solar curtailment rate is within the fluctuation range of 15%-35%, the control system sets different green electricity response thresholds accordingly.

4. The system according to claim 1, characterized in that, It also includes a blockchain traceability unit, which is used to generate a unique digital ID for each batch of electronic-grade ammonia produced, and to store the carbon footprint data, purity test data and production process parameters of that batch of ammonia on the blockchain.

5. The system according to claim 1, characterized in that, The hydrogen production module includes a PEM electrolyzer or an AEM electrolyzer with a rated power of 200kW, an operating temperature of 75℃, and an operating pressure of 1.5MPa.

6. The system according to claim 1, characterized in that, The synthesis module includes a low-temperature, low-pressure ammonia synthesis tower with a rated power of 500kW, an operating pressure of 7.5MPa, and an operating temperature of 450℃.

7. The system according to claim 1, characterized in that, The purification module includes a catalytic hydrogenation unit, an adsorption unit, a distillation unit, and a terminal treatment unit connected in sequence, forming a gradient purification system for purifying the synthesized ammonia water. The catalytic hydrogenation unit is equipped with a Pd-Pt / TiO2 bimetallic catalyst; The adsorption unit employs a multi-stage adsorption bed, comprising a first-stage 3A molecular sieve adsorption bed, a second-stage nickel-based catalyst adsorption bed, and a third-stage composite adsorbent adsorption bed arranged sequentially. The composite adsorbent is a mixture of silica gel and activated carbon. The distillation unit is a structured packed distillation column; The terminal processing unit includes an ion exchange component and a membrane filtration component.

8. A collaborative control method for a modular electronic-grade ammonia water intelligent production system based on green electricity fluctuation response, characterized in that, Applied to the system as described in any one of claims 1-7, the method comprises: S1. Receive green power fluctuation signals from the power grid in real time; S2. Compare the green electricity power fluctuation signal with a preset green electricity response threshold; S3. When the green power fluctuation signal is lower than the preset green power response threshold, control the hydrogen energy storage unit to supply power to the hydrogen production module and / or synthesis module within 10 seconds to maintain continuous production operation. S4. When the green electricity power fluctuation signal is higher than or equal to the preset green electricity response threshold, control the power grid to supply power to the hydrogen production module and / or synthesis module.

9. The method according to claim 8, characterized in that, The preset green electricity response threshold is dynamically set based on the wind and solar power curtailment rate of the power grid, including: When the wind and solar curtailment rate is 15%, the green electricity response threshold is set to 60%. When the wind and solar curtailment rate is 25%, the green electricity response threshold is set to 50%. When the wind and solar curtailment rate is 35%, the green electricity response threshold is set to 45%.

10. The method according to claim 8, characterized in that, Also includes: Generate a unique digital ID for each batch of electronic-grade ammonia produced; Collect data on the green electricity carbon footprint, ammonia purity, and key process parameters during the production process of this batch; The unique digital ID, carbon footprint data, purity data, and process parameters are uploaded to the blockchain for storage.

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