Cd plane target based on deuterated polystyrene and method for processing thereof

Abstract

The application provides a CD plane target based on deuterated polystyrene and a processing method thereof, and the processing method comprises the following steps: dissolving the deuterated polystyrene in a special solvent meeting preset requirements and adding a silicone or germanium reagent to improve the solubility; fully stirring the solution by using a rotating device; performing ultrasonic treatment and water bath heating on the solution to obtain a CD plane target solution based on deuterated polystyrene; placing a substrate on a spin coater, absorbing the CD material solution and coating the CD material solution on the substrate, and rotating and paving the substrate by using the spin coater; obtaining a CD plane whole material on the substrate by heating and decomposing the deuterated polystyrene; peeling off the CD plane whole material, cutting the CD plane whole material in an array by using a laser, and obtaining the CD plane target. The application can customize the CD plane target with a large thickness in a short time by using different concentrations of the deuterated polystyrene and the viscosity characteristics and performing multiple spin coating, can obtain the CD plane target with high size precision in batches by using laser cutting, and has relatively loose implementation conditions.

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