一种复合材料及其制备方法、底盘及半导体设备

By constructing a silicon-carbon bilayer shell structure on the surface of silicon carbide particles and adding carbon nanosheets and amorphous powder, combined with a vacuum pressure infiltration process, the problems of interfacial wettability and thermal expansion coefficient mismatch in aluminum-silicon-silicon carbide composite materials were solved, and the high thermal conductivity and dimensional stability were improved.

CN122147122BActive Publication Date: 2026-07-17NANTONG SANZER PRECISION CERAMICS CO LTD +1

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
NANTONG SANZER PRECISION CERAMICS CO LTD
Filing Date
2026-05-11
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing aluminum-silicon-silicon carbide composite materials suffer from bottlenecks in terms of interfacial wettability and thermal expansion coefficient mismatch, resulting in insufficient thermal conductivity and dimensional stability. Traditional modification methods are unable to simultaneously meet the requirements of low interfacial thermal resistance and high interfacial bonding strength.

Method used

A silicon-carbon bilayer shell structure was constructed on the surface of silicon carbide particles. Carbon nanosheets and hypereutectic aluminum-silicon amorphous powder were prepared as functional additives. Composite materials were prepared by vacuum pressure infiltration process to form a multilayer composite interface, regulate the matrix structure and interface reaction, and optimize the coefficient of thermal expansion.

Benefits of technology

The overall thermal conductivity of the material was significantly improved, and the coefficient of thermal expansion was controllably adjusted by regulating the dosage of each additive and process parameters, thereby improving the dimensional stability and mechanical properties of the material.

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Abstract

本发明属于复合材料制备技术领域,提供了一种复合材料及其制备方法、底盘及半导体设备;首先在碳化硅颗粒表面依次内层硅与外层碳的双层壳结构;同时制备碳纳米片,并制备亚稳态的过共晶铝硅非晶粉末;将上述三种功能添加剂与基体合金粉末混合并压制成预制体,采用真空压力浸渗工艺使熔融的铝硅合金浸渗入预制体中,在浸渗过程中,双层壳结构生成梯度界面,实现润湿并缓冲界面应力,碳纳米片作为异质形核点细化基体组织,非晶粉末则通过晶化效应触发基体组织的自发重构,有效降低界面热阻并构建多尺度热膨胀约束网络,从而获得兼具高导热率与热膨胀系数可调性的高性能复合材料。
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