A substrate rack rail changing mechanism and a coating device

Abstract

The application discloses a substrate rack track changing mechanism and a coating device, and aims to apply the substrate rack track changing mechanism to the coating device, so that the substrate rack track changing mechanism can realize substrate rack track changing, the substrate can enter and exit the same end of the coating device, and the staff can be facilitated to operate, wherein the substrate rack track changing mechanism comprises a base, a swing frame, a transmission structure and a rotary driving mechanism; the top of the swing frame is hinged with a first lifting assembly, and the bottom of the swing frame is provided with a second lifting assembly; the transmission structure is connected with a first plate body, the swing frame and the first lifting assembly; the rotary driving mechanism is connected with the transmission structure, the rotary driving mechanism drives the transmission structure to move, so as to drive the swing frame and the first lifting assembly to swing; when the swing frame swings, the first lifting assembly lifts a positioning block, meanwhile, the second lifting assembly lifts a grinding rod of the substrate rack, then the substrate rack is driven to move along the Y-axis direction, and belongs to the technical field of sputtering coating. In addition, the application also provides the coating device adopting the track changing mechanism.

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