A photolithography mold deposition electroforming integrated processing equipment and a processing method

Abstract

The application relates to the technical field of electroforming, in particular to a photoetching mold deposition electroforming integrated processing equipment and a processing method, which comprises a shell, two electroforming cavities and two sliding cavities are arranged in the interior of the shell, a filling port is arranged in the side wall of the shell, and the filling port, the two electroforming cavities and the two sliding cavities are uniformly distributed in the interior of the shell in a circumferential shape. The work stations in the interior of the shell can be directly switched, the turnover between the electroforming and cleaning processes can be realized without manual intervention, the contact frequency of the mold core with the outside world is reduced, the uniformity of the electroforming layer and the surface smoothness are improved, the batch processing efficiency is improved, the rotating flow formed by the electroforming liquid and the plasma liquid and the reciprocating sliding of the core mold break the mass transfer and dissolution dead zones of the core mold dead corners, the metal ions can be quickly supplemented to the core mold dead corners during the electroforming, the uniform deposition of the plating layer is ensured, meanwhile, the bubbles can be quickly separated from the surface of the core mold, and the problems of the plating layer pinholes and the interlayer caused by the bubble adhesion are avoided.

Description

Technical Field

[0001] This invention relates to the field of electroforming technology, and in particular to an integrated processing equipment and method for photolithography mold deposition electroforming. Background Technology

[0002] Current photolithography mold electroforming processes generally employ a discrete tooling structure. The core mold needs to be manually or robotically transferred multiple times between the electroforming tank, cleaning tank, and drying chamber. However, during the transfer process, the acrylic core mold is frequently exposed to the atmospheric environment, which not only causes copper plating oxidation, surface contamination, and microscopic defects, but also induces plating stress distortion due to temperature and humidity fluctuations, resulting in decreased plating adhesion and increased dimensional accuracy deviations. At the same time, traditional electroforming methods only involve immersing the core mold in the electroforming solution for static electroforming, which easily leads to low mass transfer efficiency, delayed replenishment of metal ions in dead zones, and bubble retention. This results in defects such as uneven plating thickness, increased pinhole rate, decreased bonding strength, edge passivation, and insufficient filling of the inner cavity. Furthermore, if the electroforming solution is not completely removed after electroforming, it will not only affect the stability of secondary electroforming, but also corrode the copper substrate during subsequent demolding, thereby reducing the reliability of demolding and the life of the mold. Summary of the Invention

[0003] The purpose of this invention is to solve the problems in the background art by proposing an integrated processing equipment and method for photolithography mold deposition and electroforming.

[0004] To achieve the above objectives, the present invention adopts the following technical solution: An integrated processing equipment for photolithography mold deposition and electroforming includes a housing. The housing has two electroforming cavities and two sliding cavities inside. The side wall of the housing has a filling port. The filling port, the two electroforming cavities, and the two sliding cavities are evenly distributed in a circumferential shape inside the housing. The sliding cavities and electroforming cavities are arranged alternately. The filling port is located between one of the electroforming cavities and one of the sliding cavities. A switching assembly is movably installed inside the housing. The switching assembly includes a turntable and five pull blocks. The turntable is rotatably installed inside the housing, and the five pull blocks are evenly distributed in a circular shape on the side wall of the turntable and are slidably inserted into the outer peripheral wall of the turntable. The housing has an internal movable cavity located above the turntable. A drive assembly is movably installed inside the movable cavity. The drive assembly includes a sliding disk and a rotating cylinder. The rotating cylinder is movably installed inside the sliding disk. The sliding disk is slidably installed inside the movable cavity. The bottom of the sliding disk has two pressure plates (first and second) integrally formed.

[0005] Preferably, four of the pull blocks correspond to two electroforming cavities and two sliding cavities respectively, and the other pull block corresponds to the filling port. The first pressure plate corresponds to the electroforming cavity, and the second pressure plate corresponds to the sliding cavity. A movable plate is slidably installed inside each pull block. The two first pressure plates and the two second pressure plates abut against the movable plate. A spring is provided between the bottom of the movable plate and the pull block. Several evenly distributed hooks are welded below the movable plate.

[0006] Preferably, a cleaning cylinder is slidably installed inside the two sliding cavities, and a stir bar is placed inside both the cleaning cylinder and the electroforming cavity. A drive cavity is opened at the bottom of the shell, and four gears are rotatably installed inside the drive cavity. The four gears are respectively located below the two cleaning cylinders and the two electroforming cavities. A turntable is rotatably installed at the bottom of the cleaning cylinder, and the turntable is slidably installed on the side wall of the corresponding gear. Magnetic blocks are fixedly installed on the top of both the turntable and the gear below the electroforming cavity.

[0007] Preferably, a second motor is fixedly installed at the bottom of the housing, and a gear is fixedly connected to the output shaft of the second motor. The gear and the gear mesh with each other. Several evenly distributed locking grooves are opened on the outer side of the output shaft of the second motor. Several evenly distributed spring locking blocks are slidably installed on the inner side of the turntable. The spring locking blocks correspond one-to-one with the locking grooves and are slidably inserted into the inner side of the locking grooves.

[0008] Preferably, the top of the sliding disc has two air cylinders integrally formed, the inside of the pressure plate one has an air cavity, the air cavity and the air cylinder are corresponding, the side wall of the air cylinder has a number of evenly distributed air holes two, the inside of the pressure plate two has an air hole one, the inside of the housing is fixedly installed with an air pump, the output end of the air pump is fixedly connected to an air pipe, and the end of the air pipe is fixedly connected to the inside of the movable cavity and located above the sliding disc.

[0009] Preferably, piston discs are slidably installed inside both the air chamber and the air cylinder, and the two piston discs are fixedly connected by a sliding rod. The piston disc inside the air cylinder is located above the second air hole. A movable cylinder is movably installed on the side wall of the second pressure plate. The side wall of the movable cylinder has several evenly distributed arc-shaped air holes three, which are connected to the first air hole. A second spring is provided between the side wall of the movable cylinder and the inner wall of the second pressure plate.

[0010] Preferably, a motor is fixedly installed on the top of the housing, the output shaft of the motor is located inside the rotating cylinder, a ratchet is slidably installed on the outside of the output shaft of the motor, the outside of the ratchet is fixedly installed on the inside of the rotating cylinder, a spring locking block is slidably installed on the top of the rotating cylinder, a locking groove is provided on the top of the movable cavity, and the spring locking block is slidably inserted into the inside of the locking groove.

[0011] Preferably, the output shaft of the motor is fixedly connected to a rotating ring, and the top of the rotating ring and the bottom of the rotating cylinder are integrally formed with a plurality of evenly distributed protruding teeth, which mesh with each other. A bidirectional sliding groove is provided on the outer side of the rotating cylinder, and a sliding ball is integrally formed on the inner side of the sliding disc, which is slidably installed inside the bidirectional sliding groove.

[0012] A method for integrated photolithography mold deposition and electroforming processing, using the aforementioned integrated photolithography mold deposition and electroforming processing equipment, specifically includes the following steps: S1, Pre-treatment stage: The operator places the photolithographically conductive acrylic core mold on a dust-free operating table, gently wipes the surface dust with a dust-free cloth, checks the integrity of the conductive layer, and lightly sprays the core mold surface with low-pressure plasma water to remove minor impurities adsorbed on the surface. After the acrylic core mold has naturally dried, the pull block corresponding to the filling port is pulled out. After pulling out, the dried acrylic core mold is fixed with a suspension hanger, which is then hung on a hook below the movable plate. At this time, the pull block is pushed into the interior of the housing 1 through the filling port, so that the pull block is inserted into the side wall of the turntable 1; S2, Station switching stage: After the operator completes the loading of the pull block, the motor 2 starts and reverses. This causes the second motor to drive the first turntable to reverse to a preset angle via the first spring lock block and the first lock groove. This causes the loaded pull block to move to the top of the electroforming chamber. At this time, each pull block changes its position, causing the pull block located above the electroforming chamber to move to the top of the cleaning cylinder. The pull block above the cleaning cylinder between the two electroforming chambers moves to the top of the electroforming chamber between the two cleaning cylinders. The pull block above the cleaning cylinder near the filling port moves to the position corresponding to the filling port. This allows the worker to remove the acrylic core mold after electroforming. By directly switching the position inside the shell, the core mold can be accurately transferred between electroforming and cleaning processes without manual intervention during the electroforming process. This reduces the frequency of contact between the core and the outside world, avoids the risk of oxidation and contamination caused by contact between the core and air, and significantly improves the uniformity and surface finish of the electroformed layer while significantly improving the batch processing efficiency.S3, Electroforming Stage: After the station switching is completed, motor two reverses to forward rotation, causing spring locking block one to disengage from locking groove one. Motor two drives the magnetic block to rotate via gear one and gear two, causing the magnetic block to drive the stir bar to rotate. This causes the stir bar to uniformly stir the electroforming liquid in the electroforming chamber and the plasma liquid inside the cleaning cylinder, forming a stable swirling flow field to ensure dynamic balance between the concentration gradient and ion distribution of the electroforming liquid. At this time, motor one starts and drives the rotating cylinder to rotate via the ratchet. Spring locking block two slides out of the locking groove two, and the rotating ring and rotating cylinder rotate synchronously. This causes the rotating cylinder to drive the sliding disk downward through the bidirectional sliding groove and the sliding ball, causing the sliding disk to abut against pressure plate one and pressure plate two and drive the movable disk to slide downward. At this time, the movable disc squeezes the first spring, causing the acrylic core mold to be immersed in the electroforming liquid and plasma liquid for electroforming deposition and cleaning respectively. Simultaneously, the first motor drives the rotating ring to reverse, causing the second spring locking block to lock the rotating cylinder through the second locking groove. The protruding teeth at the top of the rotating ring and the protruding teeth at the bottom of the rotating cylinder abut against each other, causing the rotating cylinder to drive the ratchet to slide back and forth on the outside of the output shaft of the first motor. The sliding disc follows the rotating cylinder in this back and forth motion, causing the first pressure plate, the second pressure plate, and the first spring to drive the movable disc in a back and forth motion. This results in the acrylic core mold sliding longitudinally within the electroforming liquid and plasma liquid. Through the swirling flow formed by the electroforming liquid and plasma liquid and the longitudinal sliding of the acrylic core mold, the mass transfer and dissolution dead zones in the dead corners of the acrylic core mold are broken. This ensures that metal ions can be quickly replenished to the dead corners of the mandrel during electroforming, guaranteeing uniform deposition of the coating. Simultaneously, it allows bubbles generated during electroforming to quickly detach from the mandrel surface, avoiding pinholes and inclusions in the coating caused by bubble adhesion. Furthermore, during cleaning, plasma water can quickly dissolve electrolyte residues in dead corners, improving the thoroughness of cleaning. S4, Temporary Storage Stage: After cleaning, the air pump is started, and nitrogen is injected into the upper part of the sliding plate through the air pipe. The injected nitrogen enters the air cylinder and pressure plate two through air holes one and two, respectively. The nitrogen inside the air cylinder pushes the piston plate inside the air cylinder upwards, causing the piston plate inside pressure plate one to move upwards, resulting in a slight negative pressure inside the electroforming chamber. The nitrogen inside pressure plate two pushes the movable cylinder downwards, causing... The movable cylinder moves downwards, simultaneously pressurizing the interior of the sliding cavity, causing the cleaning cylinder 31 to slide downwards. The acrylic core mold is removed from the plasma solution. At this time, the movable cylinder blows air onto the acrylic core mold through the three air holes, directly drying the acrylic core mold. This allows the sliding cavity to be filled with nitrogen while maintaining a slight positive pressure. Through the pressure changes inside the electroforming cavity and the sliding cavity, the tightness of the plating layer is enhanced during electroforming. At the same time, air bubbles inside the core mold are further removed, avoiding problems such as pinholes and inclusions in the plating layer. The sliding cavity achieves a combined cleaning of liquid washing and air blowing, quickly blowing away residual cleaning liquid and electrolyte in the dead corners of the core mold. The nitrogen filling extends the temporary storage time of the acrylic core mold, further preventing the problem of copper layer oxidation.S5. Post-processing stage: After electroforming, motor one rotates forward, driving the rotating cylinder to rotate. This causes the rotating cylinder to drive the sliding disk upward and reset via a bidirectional sliding groove and ball bearing. At this time, nitrogen gas above the sliding disk enters the sliding cavity. The moving disk is reset by spring one. The acrylic core mold detaches from the electroforming liquid and moves to the inside of the pulling block. At this time, motor one is turned off, and motor two drives the rotating disk one to reverse to the preset angle again, so that each pulling block changes to a different station. During the movement of the pulling block, when the nitrogen gas inside the sliding cavity escapes from the inside of the pulling block into the interior of housing 1 and is discharged through the filling port, the cleaning cylinder moves upward and resets. The nitrogen gas escapes from the sliding cavity, providing secondary protection for the acrylic core mold during the movement, further preventing oxidation of the acrylic core mold due to contact with air, ensuring that the copper layer surface is smooth and dense, without oxidation spots or micro-defects. After the workers remove the acrylic core mold after electroforming, the acrylic core mold and the internal metal are demolded.

[0013] Compared with existing technologies, the beneficial effects of this invention are as follows: 1. By directly switching workstations inside the shell, the core mold can be accurately transferred between electroforming and cleaning processes without manual intervention during electroforming. This reduces the frequency of contact between the core and the outside world, avoids the risk of oxidation and contamination caused by contact between the core and air, and significantly improves the uniformity and surface finish of the electroformed layer while significantly increasing batch processing efficiency.

[0014] 2. By using the swirling flow formed by the electroforming solution and the plasma solution, and the reciprocating longitudinal sliding of the acrylic core mold, the mass transfer and dissolution dead zones in the dead corners of the acrylic core mold are broken. This ensures that metal ions can be quickly replenished to the dead corners of the core mold during electroforming, guaranteeing uniform deposition of the coating. At the same time, it allows the bubbles generated during the electroforming process to quickly detach from the surface of the core mold, avoiding problems such as pinholes and inclusions in the coating caused by bubble adhesion. Furthermore, during cleaning, the plasma water can quickly dissolve the electrolyte residue in the dead corners, improving the cleanliness without dead corners.

[0015] 3. By varying the pressure inside the electroforming chamber and the sliding chamber, the tightness of the plating layer is enhanced during electroforming. At the same time, air bubbles inside the core mold are further removed, avoiding problems such as pinholes and inclusions in the plating layer. The sliding chamber achieves a combined cleaning process of liquid washing and air blowing, quickly blowing away residual cleaning fluid and electrolyte in the dead corners of the core mold. The nitrogen filling extends the temporary storage time of the acrylic core mold, further preventing the oxidation of the copper layer.

[0016] 4. By allowing nitrogen to escape from inside the sliding cavity, the nitrogen provides secondary protection to the acrylic core mold during its movement, further preventing oxidation of the acrylic core mold upon contact with air, and ensuring that the copper layer surface is smooth and dense, free of oxidation spots and microscopic defects. Attached Figure Description

[0017] Figure 1 This is a three-dimensional structural diagram of the present invention; Figure 2 This is a cross-sectional view of the overall structure of the present invention; Figure 3 For the present invention Figure 2 Enlarged schematic diagram of the structure at point A; Figure 4 For the present invention Figure 2 Enlarged schematic diagram of the structure at point B; Figure 5 This is a cross-sectional view of the shell structure in this invention; Figure 6 This is a schematic diagram of the structure after removing the shell in this invention; Figure 7 This is a disassembly diagram of the driving component in this invention; Figure 8 This is a cross-sectional view of the movable cylinder in this invention; Figure 9 This is a disassembly diagram of the transposition component in this invention; Figure 10 This is a schematic diagram of the installation of the internal structure of the drive cavity in this invention.

[0018] In the diagram: 1. Shell; 11. Filling port; 12. Air pump; 121. Air pipe; 122. Electroforming chamber; 123. Sliding chamber; 124. Movable chamber; 125. Drive chamber; 126. Locking groove two; 21. Turntable one; 211. Pull block; 212. Movable disc; 213. Spring one; 214. Spring locking block one; 22. Sliding disc; 221. Air cylinder; 222. Piston disc; 223. Pressure plate one; 224. Air chamber; 225. Pressure plate two; 226. Air hole 1. Air Hole 2; 228. Sliding Ball; 23. Moving Cylinder; 231. Air Hole 3; 232. Spring 2; 233. Motor 1; 234. Rotating Ring; 235. Ratchet; 236. Rotating Cylinder; 237. Convex Tooth; 238. Bidirectional Slide; 239. Spring Lock Block 2; 31. Cleaning Cylinder; 311. Motor 2; 312. Gear 1; 313. Stirring Piece; 314. Turntable 2; 315. Gear 2; 316. Locking Groove 1; 317. Magnetic Block. Detailed Implementation

[0019] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.

[0020] In the description of this invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0021] Reference Figure 1 - Figure 10 As shown, an integrated processing equipment for photolithography mold deposition and electroforming includes a housing 1. The housing 1 has two electroforming cavities 122 and two sliding cavities 123 inside. The side wall of the housing 1 has a filling port 11. The filling port 11, the two electroforming cavities 122 and the two sliding cavities 123 are evenly distributed in a circumferential shape inside the housing 1. The sliding cavities 123 and the electroforming cavities 122 are arranged alternately. The filling port 11 is located between one of the electroforming cavities 122 and one of the sliding cavities 123. A switching assembly is movably installed inside the housing 1. The switching assembly includes a turntable 21 and five pull blocks 211. The turntable 21 is rotatably installed inside the housing 1. The five pull blocks 211 are evenly distributed in a circular shape on the side wall of the turntable 21 and are slidably inserted into the outer peripheral wall of the turntable 21. The housing 1 has an internal movable cavity 124 located above the turntable 21. A drive assembly is movably installed inside the movable cavity 124. The drive assembly includes a sliding disk 22 and a rotating cylinder 236. The rotating cylinder 236 is movably installed inside the sliding disk 22. The sliding disk 22 is slidably installed inside the movable cavity 124. The bottom of the sliding disk 22 is integrally formed with two pressure plates 223 and two pressure plates 225.

[0022] like Figure 2 , Figure 5 , Figure 6 and Figure 9 As shown, four pull blocks 211 correspond to two electroforming chambers 122 and two sliding chambers 123 respectively, another pull block 211 corresponds to the filling port 11, pressure plate one 223 corresponds to the electroforming chamber 122, pressure plate two 225 corresponds to the sliding chamber 123, and each pull block 211 has a movable plate 212 slidably installed inside. The two pressure plates one 223 and the two pressure plates two 225 all abut against the movable plate 212. A spring one 213 is provided between the bottom of the movable plate 212 and the pull block 211. Several evenly distributed hooks are welded to the bottom of the movable plate 212.

[0023] When replacing the acrylic core mold inside the pull block 211, the worker pulls out the pull block 211 corresponding to the filling port 11, and after pulling it out, fixes the drained acrylic core mold with a suspension hanger and hangs the hanger on the hook below the movable plate 212. At this time, the pull block 211 is pushed into the interior of the housing 1 through the filling port 11, so that the pull block 211 is inserted into the side wall of the turntable 21, and the filling is completed.

[0024] like Figure 2 , Figure 4 and Figure 6 As shown, a cleaning cylinder 31 is slidably installed inside the two sliding cavities 123. A stirring bar 313 is placed inside both the cleaning cylinder 31 and the electroforming cavity 122. A driving cavity 125 is opened at the bottom of the housing 1. Four gears 315 are rotatably installed inside the driving cavity 125. The four gears 315 are located below the two cleaning cylinders 31 and the two electroforming cavities 122, respectively. A turntable 314 is rotatably installed at the bottom of the cleaning cylinder 31. The turntable 314 is slidably installed on the side wall of the corresponding gear 315. A magnetic block 317 is fixedly installed on the top of both the turntable 314 and the gear 315 below the electroforming cavity 122.

[0025] like Figure 2 , Figure 9 and Figure 10 As shown, a second motor 311 is fixedly installed at the bottom of the housing 1. A gear 312 is fixedly connected to the output shaft of the second motor 311. Gear 312 and gear 315 mesh with each other. Several evenly distributed locking grooves 316 are opened on the outer side of the output shaft of the second motor 311. Several evenly distributed spring locking blocks 214 are slidably installed on the inner side of the turntable 21. The spring locking blocks 214 and the locking grooves 316 correspond one-to-one and are slidably inserted into the inner side of the locking grooves 316.

[0026] After the worker loads the pull block 211, the second motor 311 starts and reverses, causing the second motor 311 to drive the turntable 21 to reverse to a preset angle via the spring lock block 214 and the lock groove 316. This moves the loaded pull block 211 above the electroforming chamber 122. At this time, each pull block 211 changes position, causing the pull block 211 above the electroforming chamber 122 to move to the top of the cleaning cylinder 31, the pull block 211 above the cleaning cylinder 31 between the two electroforming chambers 122 to move to the top of the electroforming chamber 122 between the two cleaning cylinders 31, and the pull block 211 above the cleaning cylinder 31 near the loading port 11 to move to the position corresponding to the loading port 11. This allows the worker to remove the electroformed acrylic core mold and directly switch it inside the housing 1. The station allows for precise transfer of the core mold between electroforming and cleaning processes without manual intervention, reducing the frequency of contact between the core and the outside world, avoiding the risk of oxidation and contamination caused by contact between the core and air, improving the uniformity and surface finish of the electroformed layer, and significantly increasing batch processing efficiency. After the station switch is completed, the second motor 311 reverses to forward rotation, causing the first spring locking block 214 to disengage from the first locking groove 316. The second motor 311 drives the magnetic block 317 to rotate through the first gear 312 and the second gear 315, causing the magnetic block 317 to drive the stirrer 313 to rotate. This causes the stirrer 313 to uniformly stir the electroforming liquid in the electroforming chamber 122 and the plasma liquid inside the cleaning cylinder 31, forming a stable swirling field to ensure the dynamic balance between the concentration gradient and ion distribution of the electroforming liquid. The bottom of the cleaning cylinder 31 and the bottom of the sliding cavity 123 are sealed, so that when there is positive pressure between the cleaning cylinder 31 and the pull block 211, the cleaning cylinder 31 slides downward and when there is normal pressure between the cleaning cylinder 31 and the pull block 211, the cleaning cylinder 31 slides upward and returns to its original position. During the movement of the cleaning cylinder 31, the turntable 314 moves with the cleaning cylinder 31. After electroforming is completed, motor 233 rotates forward, driving the rotating cylinder 236 to rotate. This causes the rotating cylinder 236 to drive the sliding disk 22 upward and reset via the bidirectional sliding groove 238 and the sliding ball 228. At this time, nitrogen gas above the sliding disk 22 enters the sliding cavity 123, and the movable disk 212 is reset by spring 213. The acrylic core mold then detaches from the electroforming liquid and moves to the inside of the pull block 211. Motor 233 then shuts off, and motor 311 drives the rotating disk 21 to rotate back to the preset angle. Each pull block 211 is moved to a different station. During the movement of the pull block 211, when the nitrogen gas inside the sliding cavity 123 escapes into the housing 1 through the inner side of the pull block 211 and is discharged through the filling port 11, the cleaning cylinder 31 moves upward and resets. The nitrogen gas escapes from the sliding cavity 123, so that the nitrogen gas provides secondary protection for the acrylic core mold during the movement, further avoiding the problem of oxidation of the acrylic core mold when it comes into contact with air, and ensuring that the copper layer surface is smooth and dense, without oxidation spots and micro defects.

[0027] like Figures 5-7 As shown, a motor 233 is fixedly installed on the top of the housing 1. The output shaft of the motor 233 is located inside the rotating cylinder 236. A ratchet 235 is slidably installed on the outside of the output shaft of the motor 233. The outside of the ratchet 235 is fixedly installed on the inside of the rotating cylinder 236. A spring locking block 239 is slidably installed on the top of the rotating cylinder 236. A locking groove 126 is opened on the top of the movable cavity 124. The spring locking block 239 is slidably inserted into the inside of the locking groove 126.

[0028] like Figure 7 As shown, the output shaft of the motor 233 is fixedly connected to a rotating ring 234. The top of the rotating ring 234 and the bottom of the rotating cylinder 236 are integrally formed with several evenly distributed protruding teeth 237, which mesh with each other. A bidirectional sliding groove 238 is provided on the outer side of the rotating cylinder 236. A sliding ball 228 is integrally formed on the inner side of the sliding disk 22, and the sliding ball 228 is slidably installed inside the bidirectional sliding groove 238.

[0029] When motor 211 switches from reverse to forward rotation, motor 233 starts and drives rotating cylinder 236 to rotate via ratchet 235. Spring locking block 239 slides out of locking groove 126. Rotating ring 234 and rotating cylinder 236 rotate synchronously, causing rotating cylinder 236 to drive sliding disk 22 to slide downward via bidirectional sliding groove 238 and sliding ball 228. This causes sliding disk 22 to abut against pressure plate 1 223 and pressure plate 225, driving movable disk 212 to slide downward. At this time, movable disk 212 squeezes spring 1 213 and drives acrylic core mold to be immersed in electroforming liquid and plasma liquid for electroforming deposition and cleaning, respectively. At this time, motor 233 drives rotating ring 234 to reverse, causing spring locking block 239 to lock rotating cylinder 236 via locking groove 126. The protrusion 237 at the top of rotating ring 234 and the bottom of rotating cylinder 236... The protruding teeth 237 abut against each other, causing the rotating cylinder 236 to drive the ratchet 235 to slide back and forth on the outside of the output shaft of the motor 233. The sliding disk 22 follows the rotating cylinder 236 to slide back and forth, causing the pressure plate 223, the pressure plate 225 and the spring 213 to drive the movable disk 212 to slide back and forth. This causes the acrylic core mold to slide longitudinally back and forth inside the electroforming liquid and the plasma liquid. Through the swirling flow formed by the electroforming liquid and the plasma liquid and the longitudinal sliding of the acrylic core mold, the mass transfer and dissolution dead zones in the dead corners of the acrylic core mold are broken, ensuring that metal ions can be quickly replenished to the dead corners of the core mold during electroforming, ensuring uniform deposition of the coating. At the same time, the bubbles generated during the electroforming process can be quickly removed from the surface of the core mold, avoiding problems such as pinholes and interlayers caused by bubble adhesion. During cleaning, the plasma water can quickly dissolve the electrolyte residue in the dead corners, improving the cleanliness without dead corners.

[0030] like Figure 2 and Figures 5-7 As shown, the top of the sliding disk 22 has two air cylinders 221 integrally formed. The inside of the pressure plate 223 is provided with an air chamber 224, which corresponds to the air cylinder 221. The side wall of the air cylinder 221 is provided with several evenly distributed air holes 227. The inside of the pressure plate 225 is provided with an air hole 226. An air pump 12 is fixedly installed inside the housing 1. The output end of the air pump 12 is fixedly connected to an air pipe 121. The end of the air pipe 121 is fixedly connected to the inside of the movable cavity 124 and is located above the sliding disk 22.

[0031] like Figure 2 , Figure 3 and Figure 8As shown, piston discs 222 are slidably installed inside both the air chamber 224 and the air cylinder 221. The two piston discs 222 are fixedly connected by a sliding rod. The piston disc 222 inside the air cylinder 221 is located above the second air hole 227. A movable cylinder 23 is movably installed on the side wall of the second pressure plate 225. Several arc-shaped and evenly distributed third air holes 231 are opened on the side wall of the movable cylinder 23. The third air hole 231 is connected to the first air hole 226. A second spring 232 is provided between the side wall of the movable cylinder 23 and the inner wall of the second pressure plate 225.

[0032] The air pump 12 is fixedly connected to an external nitrogen tank. After cleaning, the air pump 12 is started and nitrogen is injected into the upper part of the sliding plate 22 through the air pipe 121. The injected nitrogen enters the air cylinder 221 and the pressure plate 225 through the air hole 1 226 and the air hole 227 respectively. The nitrogen inside the air cylinder 221 pushes the piston plate 222 inside the air cylinder 221 upward, causing the piston plate 222 inside the pressure plate 223 to move upward, resulting in a slight negative pressure inside the electroforming chamber 122. The nitrogen inside the pressure plate 225 pushes the movable cylinder 23 downward, causing the movable cylinder 23 to move downward, and at the same time pressurizes the inside of the sliding chamber 123 (the position between the cleaning cylinder 31 and the pull block 211), causing the cleaning cylinder 31 to slide downward, and the acrylic core mold moves out of the plasma. When the liquid is applied, the movable cylinder 23 blows air onto the acrylic core mold through the air hole 231, directly drying the acrylic core mold. This allows the sliding cavity 123 to be filled with nitrogen while maintaining a slight positive pressure. Through the pressure changes inside the electroforming cavity 122 and the sliding cavity 123, the tightness of the plating layer is enhanced during electroforming, while further removing air bubbles inside the core mold, avoiding problems such as pinholes and interlayers in the plating layer. The sliding cavity 123 also achieves a combined cleaning of liquid washing and air blowing, quickly blowing away residual cleaning liquid and electrolyte in the dead corners of the core mold. The nitrogen filling extends the temporary storage time of the acrylic core mold, further avoiding the problem of copper layer oxidation. After the sliding cavity 123 is under slight positive pressure, the air pump 12 is turned off, and the movable cylinder 23 is reset by the spring 232.

[0033] A method for integrated photolithography mold deposition and electroforming processing, using the aforementioned integrated photolithography mold deposition and electroforming processing equipment, specifically includes the following steps: S1, Pre-treatment stage: The operator places the photolithographically conductive acrylic core mold on a dust-free operating table, gently wipes the surface dust with a dust-free cloth, checks the integrity of the conductive layer, and lightly sprays the core mold surface with low-pressure plasma water to remove minor impurities adsorbed on the surface. After the acrylic core mold has naturally dried, the pull block 211 corresponding to the filling port 11 is pulled out. After pulling out, the dried acrylic core mold is fixed with a suspension hanger, which is then hung on the hook below the movable plate 212. At this time, the pull block 211 is pushed into the interior of the housing 1 through the filling port 11, so that the pull block 211 is inserted into the side wall of the turntable 21; S2, Station switching stage: After the operator has finished loading the pull block 211, the second motor 311 is started and reversed, so that the second motor 311 is driven by a spring. Locking block 214 and locking groove 316 drive turntable 21 to reverse to a preset angle, causing the loaded pull block 211 to move above the electroforming chamber 122. At this time, each pull block 211 changes its position, causing the pull block 211 above the electroforming chamber 122 to move above the cleaning cylinder 31, the pull block 211 above the cleaning cylinder 31 between the two electroforming chambers 122 to move above the electroforming chamber 122 between the two cleaning cylinders 31, and the pull block 211 above the cleaning cylinder 31 near the filling port 11 to move to the position corresponding to the filling port 11, so that the operator can take out the acrylic core mold after electroforming. By directly switching the position inside the shell 1, the core mold can be accurately transferred between electroforming and cleaning processes without manual intervention during the electroforming process, reducing the frequency of contact between the core and the outside world, avoiding the risk of oxidation and contamination caused by contact between the core and air, improving the uniformity and surface finish of the electroforming layer, and significantly improving the batch processing efficiency.S3, Electroforming Stage: After the station switching is completed, motor 211 reverses to forward rotation, causing spring locking block 214 to disengage from locking groove 316. Motor 211 drives magnetic block 317 to rotate via gears 312 and 315, causing magnetic block 317 to drive stirrer 313 to rotate. This stirrer 313 uniformly stirs the electroforming liquid in electroforming chamber 122 and the plasma liquid inside cleaning cylinder 31, forming a stable swirling flow field to ensure dynamic balance between the concentration gradient and ion distribution of the electroforming liquid. At this time, motor 211... 33 is started and the ratchet 235 drives the rotating cylinder 236 to rotate. The spring locking block 239 slides out of the locking groove 126. The rotating ring 234 and the rotating cylinder 236 rotate synchronously, so that the rotating cylinder 236 drives the sliding disk 22 to slide downward through the bidirectional sliding groove 238 and the sliding ball 228. This causes the sliding disk 22 to abut against the pressure plate 1 223 and the pressure plate 225 and drive the movable disk 212 to slide downward. At this time, the movable disk 212 squeezes the spring 1 213 and drives the acrylic core mold to be immersed in the electroforming liquid and the plasma liquid for electroforming respectively. During sedimentation and cleaning, motor 233 drives rotating ring 234 to reverse, causing spring locking block 239 to lock rotating cylinder 236 through locking groove 126. The protruding teeth 237 at the top of rotating ring 234 and at the bottom of rotating cylinder 236 abut against each other, causing rotating cylinder 236 to drive ratchet 235 to reciprocate on the outside of motor 233's output shaft. Sliding disc 22 follows rotating cylinder 236 in reciprocating motion, causing pressure disc 223, pressure disc 225, and spring 213 to drive movable disc 212 in reciprocating motion. This causes the acrylic core mold to slide longitudinally back and forth inside the electroforming liquid and plasma liquid. Through the swirling flow formed by the electroforming liquid and plasma liquid and the reciprocating longitudinal sliding of the acrylic core mold, the mass transfer and dissolution dead zones in the dead corners of the acrylic core mold are broken. This ensures that metal ions can be quickly replenished to the dead corners of the core mold during electroforming, ensuring uniform deposition of the coating. At the same time, it allows the bubbles generated during the electroforming process to quickly detach from the surface of the core mold, avoiding problems such as pinholes and inclusions in the coating caused by bubble adhesion. Furthermore, during cleaning, the plasma water can quickly dissolve the electrolyte residue in the dead corners, improving the cleanliness without dead corners.S4. Temporary Storage Stage: After cleaning, the air pump 12 is started and nitrogen is injected into the upper part of the sliding plate 22 through the air pipe 121. The injected nitrogen enters the air cylinder 221 and the pressure plate 225 through the air hole 1 226 and the air hole 227 respectively. The nitrogen in the air cylinder 221 pushes the piston plate 222 inside the air cylinder 221 upward, causing the piston plate 222 inside the pressure plate 223 to move upward, resulting in a slight negative pressure inside the electroforming chamber 122. The nitrogen in the pressure plate 225 pushes the movable cylinder 23 downward, causing the movable cylinder 23 to move downward, and at the same time pressurizing the inside of the sliding chamber 123, causing the cleaning cylinder 31 to... As the acrylic core mold slides downwards, it exits the plasma liquid. At this time, the movable cylinder 23 blows air onto the acrylic core mold through the air vent 231, directly drying the acrylic core mold. This allows the sliding cavity 123 to be filled with nitrogen while maintaining a slight positive pressure. Through the pressure changes inside the electroforming cavity 122 and the sliding cavity 123, the tightness of the plating layer is enhanced during electroforming. At the same time, air bubbles inside the core mold are further removed, avoiding problems such as pinholes and delamination in the plating layer. Furthermore, the sliding cavity 123 achieves a combined cleaning of liquid washing and air blowing, quickly blowing away residual cleaning liquid and electrolyte in the dead corners of the core mold. The nitrogen filling extends the acrylic... The time for the core mold to be temporarily stored further avoids the problem of copper layer oxidation; S5, Post-processing stage: After electroforming is completed, motor 233 rotates forward and drives the rotating cylinder 236 to rotate, so that the rotating cylinder 236 drives the sliding disk 22 to move upward and reset through the bidirectional sliding groove 238 and the sliding ball 228. At this time, the nitrogen gas above the sliding disk 22 enters the interior of the sliding cavity 123, and the movable disk 212 is reset by spring 213. At this time, the acrylic core mold is separated from the electroforming liquid and moves to the inside of the pull block 211. At this time, motor 233 is turned off, and motor 311 drives the rotating disk 21 to reverse again to the preset angle, so that each Each time the pull block 211 moves to another station, during the movement of the pull block 211, the nitrogen gas inside the sliding cavity 123 escapes into the interior of the housing 1 through the inner side of the pull block 211 and is discharged through the filling port 11. At this time, the cleaning cylinder 31 moves upward and resets. The escape of nitrogen gas inside the sliding cavity 123 provides secondary protection for the acrylic core mold during the movement, further preventing oxidation of the acrylic core mold due to contact with air, ensuring that the copper layer surface is smooth and dense, without oxidation spots or micro-defects. After the worker removes the acrylic core mold after electroforming, the acrylic core mold and the internal metal are demolded.

[0034] To further clarify, the aforementioned fixed connection should be interpreted broadly unless otherwise explicitly specified and limited. For example, it may be welding, gluing, or integral molding, or other conventional methods well known to those skilled in the art.

[0035] The above description is only a preferred embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in the present invention, based on the technical solution and inventive concept of the present invention, should be covered within the scope of protection of the present invention.

Claims

1. An integrated processing equipment for photolithography mold deposition and electroforming, comprising a housing (1), characterized in that: The housing (1) has two electroforming cavities (122) and two sliding cavities (123) inside. The side wall of the housing (1) has a filling port (11). The filling port (11), the two electroforming cavities (122) and the two sliding cavities (123) are evenly distributed in a circular shape inside the housing (1). The sliding cavities (123) and the electroforming cavities (122) are arranged alternately. The filling port (11) is located between one of the electroforming cavities (122) and one of the sliding cavities (123). The housing (1) is movably installed with a shifting assembly, which includes a turntable (21) and five pull blocks (211). The turntable (21) is rotatably installed inside the housing (1), and the five pull blocks (211) are evenly distributed in a circular shape on the side wall of the turntable (21) and are slidably inserted into the outer peripheral wall of the turntable (21). The housing (1) has an open movable cavity (124) inside. The movable cavity (124) is located above the turntable (21). A drive assembly is movably installed inside the movable cavity (124). The drive assembly includes a sliding disk (22) and a rotating cylinder (236). The rotating cylinder (236) is movably installed inside the sliding disk (22). The sliding disk (22) is slidably installed inside the movable cavity (124). The bottom of the sliding disk (22) has two pressure plates (223) and two pressure plates (225) integrally formed.

2. The integrated processing equipment for photolithography mold deposition and electroforming according to claim 1, characterized in that: Four of the pull blocks (211) correspond to two electroforming cavities (122) and two sliding cavities (123) respectively, and another pull block (211) corresponds to the filling port (11). The first pressure plate (223) corresponds to the electroforming cavity (122), and the second pressure plate (225) corresponds to the sliding cavity (123). Each pull block (211) has a movable disc (212) slidably installed inside. The two first pressure plates (223) and the two second pressure plates (225) are in contact with the movable disc (212). A spring (213) is provided between the bottom of the movable disc (212) and the pull block (211). Several evenly distributed hooks are welded to the bottom of the movable disc (212).

3. The integrated processing equipment for photolithography mold deposition and electroforming according to claim 2, characterized in that: A cleaning cylinder (31) is slidably installed inside the two sliding cavities (123). A stirrer (313) is placed inside the cleaning cylinder (31) and the electroforming cavity (122). A drive cavity (125) is opened at the bottom of the housing (1). Four gears (315) are rotatably installed inside the drive cavity (125). The four gears (315) are located below the two cleaning cylinders (31) and the two electroforming cavities (122). A turntable (314) is rotatably installed at the bottom of the cleaning cylinder (31). The turntable (314) is slidably installed on the side wall of the corresponding gear (315). A magnetic block (317) is fixedly installed on the top of the turntable (314) and the gear (315) below the electroforming cavity (122).

4. The integrated processing equipment for photolithography mold deposition and electroforming according to claim 3, characterized in that: The bottom of the housing (1) is fixedly installed with a second motor (311). The output shaft of the second motor (311) is fixedly connected with a gear (312). The gear (312) and the gear (315) mesh with each other. Several evenly distributed locking grooves (316) are opened on the outer side of the output shaft of the second motor (311). Several evenly distributed spring locking blocks (214) are slidably installed on the inner side of the turntable (21). The spring locking blocks (214) and the locking grooves (316) correspond one-to-one and are slidably inserted into the inner side of the locking grooves (316).

5. The integrated processing equipment for photolithography mold deposition and electroforming according to claim 4, characterized in that: The top of the sliding disk (22) has two air cylinders (221) integrally formed. The pressure plate (223) has an air chamber (224) inside. The air chamber (224) corresponds to the air cylinder (221). The side wall of the air cylinder (221) has several evenly distributed air holes (227). The inner side of the pressure plate (225) has an air hole (226). An air pump (12) is fixedly installed inside the housing (1). The output end of the air pump (12) is fixedly connected to an air pipe (121). The end of the air pipe (121) is fixedly connected to the inside of the movable cavity (124) and located above the sliding disk (22).

6. The integrated processing equipment for photolithography mold deposition and electroforming according to claim 5, characterized in that: Piston discs (222) are slidably installed inside the air chamber (224) and the air cylinder (221). The two piston discs (222) are fixedly connected by a sliding rod. The piston disc (222) inside the air cylinder (221) is located above the second air hole (227). A movable cylinder (23) is movably installed on the side wall of the second pressure plate (225). The side wall of the movable cylinder (23) is provided with several arc-shaped and evenly distributed third air holes (231). The third air hole (231) is connected to the first air hole (226). A second spring (232) is provided between the side wall of the movable cylinder (23) and the inner wall of the second pressure plate (225).

7. The integrated processing equipment for photolithography mold deposition and electroforming according to claim 6, characterized in that: The top of the housing (1) is fixedly installed with a motor (233). The output shaft of the motor (233) is located inside the rotating cylinder (236). A ratchet (235) is slidably installed on the outside of the output shaft of the motor (233). The outside of the ratchet (235) is fixedly installed on the inside of the rotating cylinder (236). A spring locking block (239) is slidably installed on the top of the rotating cylinder (236). A locking groove (126) is opened on the top of the movable cavity (124). The spring locking block (239) is slidably inserted into the inside of the locking groove (126).

8. The integrated processing equipment for photolithography mold deposition and electroforming according to claim 7, characterized in that: The output shaft of the motor (233) is fixedly connected to a rotating ring (234). The top of the rotating ring (234) and the bottom of the rotating cylinder (236) are integrally formed with several evenly distributed protruding teeth (237). The protruding teeth (237) mesh with each other. A bidirectional sliding groove (238) is provided on the outer side of the rotating cylinder (236). A sliding ball (228) is integrally formed on the inner side of the sliding disk (22). The sliding ball (228) is slidably installed inside the bidirectional sliding groove (238).

9. A method for integrated processing of photolithography mold deposition and electroforming, characterized in that: This processing method uses an integrated photolithography mold deposition and electroforming processing equipment as described in claim 8, and specifically includes the following steps: S1. Pre-processing stage: The staff places the photolithographically conductive acrylic core mold on a dust-free operating table, wipes the surface dust with a dust-free cloth, checks whether the conductive layer is intact, and sprays the core mold surface with low-pressure plasma water to remove the tiny impurities adsorbed on the surface. After the acrylic core mold is naturally drained, the pull block (211) corresponding to the filling port (11) is pulled out. After being pulled out, the drained acrylic core mold is fixed with a suspension hanger and the hanger is hung on the hook below the movable plate (212). At this time, the pull block (211) is pushed into the interior of the housing 1 from the filling port (11) so that the pull block (211) is inserted into the side wall of the turntable (21). S2, Station Switching Stage: After the worker loads the pull block (211), the second motor (311) starts and reverses, causing the second motor (311) to drive the turntable (21) to reverse to a preset angle through the spring lock block (214) and the lock groove (316), so that the loaded pull block (211) moves to the top of the electroforming chamber (122). At this time, each pull block (211) changes to a different station, causing the pull block (211) located above the electroforming chamber (122) to move to the top of the cleaning cylinder (31), and the pull block (211) above the cleaning cylinder (31) between the two electroforming chambers (122) moves to the top of the cleaning cylinder (31). Move to the top of the electroforming chamber (122) between the two cleaning cylinders (31), and move the pull block (211) above the cleaning cylinder (31) near the filling port (11) to the position corresponding to the filling port (11), so that the workers can take out the acrylic core mold after electroforming. By directly switching the work station inside the shell (1), the core mold can be accurately transferred between electroforming and cleaning processes without manual intervention during the electroforming process, reducing the frequency of contact between the core and the outside world, avoiding the risk of oxidation and pollution caused by contact between the core and air, improving the uniformity and surface finish of the electroforming layer, and significantly improving the batch processing efficiency. S3, Electroforming Stage: After the station switching is completed, motor two (311) reverses to forward rotation, causing spring locking block one (214) to disengage from locking groove one (316). Motor two (311) drives magnetic block (317) to rotate through gear one (312) and gear two (315), causing magnetic block (317) to drive stirrer (313) to rotate, so that stirrer (313) uniformly stirs the electroforming liquid in electroforming chamber (122) and the plasma liquid inside cleaning cylinder (31), and forms a stable swirling field to ensure dynamic balance between the concentration gradient and ion distribution of electroforming liquid. At this time, motor one ( 233) Start-up and rotation of the rotating cylinder (236) via ratchet (235) cause the spring locking block two (239) to slide out of the locking groove two (126). The rotating ring (234) and the rotating cylinder (236) rotate synchronously, causing the rotating cylinder (236) to drive the sliding disk (22) to slide downward through the bidirectional sliding groove (238) and the sliding ball (228). This causes the sliding disk (22) to abut against the pressure plate one (223) and the pressure plate two (225) and drive the movable disk (212) to slide downward. At this time, the movable disk (212) squeezes the spring one (213) and drives the acrylic core mold to be immersed in the electroforming liquid and plasma. Electroforming deposition and cleaning are performed inside the sub-liquid. At this time, motor one (233) drives the rotating ring (234) to reverse, so that spring locking block two (239) locks the rotating cylinder (236) through locking groove two (126). The protruding teeth (237) at the top of the rotating ring (234) and the protruding teeth (237) at the bottom of the rotating cylinder (236) abut against each other, so that the rotating cylinder (236) drives the ratchet (235) to slide back and forth on the outside of the output shaft of motor one (233). The sliding disk (22) follows the rotating cylinder (236) to slide back and forth, so that pressure plate one (223), pressure plate two (225) and spring One (213) drives the movable plate (212) to slide back and forth, causing the acrylic core mold to slide longitudinally back and forth inside the electroforming liquid and plasma liquid. Through the swirling flow formed by the electroforming liquid and plasma liquid and the longitudinal sliding of the acrylic core mold, the mass transfer and dissolution dead zone of the acrylic core mold dead corner is broken, ensuring that metal ions can be quickly replenished to the core mold dead corner during electroforming, ensuring uniform deposition of the coating. At the same time, the bubbles generated during the electroforming process can be quickly removed from the core mold surface, avoiding problems such as pinholes and interlayers caused by bubble adhesion. In addition, the plasma water can quickly dissolve the electrolyte residue in the dead corner during cleaning, improving the cleanliness without dead corners. S4. Temporary Storage Stage: After cleaning, the air pump (12) is started and nitrogen is injected into the upper part of the sliding plate (22) through the air pipe (121). The injected nitrogen enters the air cylinder (221) and the pressure plate (225) through the air hole one (226) and air hole two (227) respectively. The nitrogen inside the air cylinder (221) pushes the piston plate (222) inside the air cylinder (221) upward, causing the piston plate (222) inside the pressure plate one (223) to move upward, resulting in a slight negative pressure inside the electroforming chamber (122). The nitrogen inside the pressure plate two (225) pushes the movable cylinder (23) downward, causing the movable cylinder (23) to move downward, while increasing the pressure inside the sliding chamber (123), causing the cleaning cylinder 31 to... Slide downwards, and the acrylic core mold is removed from the plasma liquid. At this time, the movable cylinder (23) blows air onto the acrylic core mold through the air hole three (231) to directly air dry the acrylic core mold. This allows the sliding cavity (123) to be filled with nitrogen while maintaining a slight positive pressure. Through the pressure change between the electroforming cavity (122) and the sliding cavity (123), the tightness of the plating layer is strengthened during electroforming. At the same time, the air bubbles inside the core mold are further removed to avoid problems such as pinholes and interlayers in the plating layer. The sliding cavity (123) also achieves a combined cleaning of liquid washing and air blowing, quickly blowing away the residual cleaning liquid and electrolyte in the dead corners of the core mold. The nitrogen filling extends the temporary storage time of the acrylic core mold, further avoiding the problem of copper layer oxidation. S5. Post-processing stage: After electroforming is completed, motor one (233) rotates forward and drives the rotating cylinder (236) to rotate, so that the rotating cylinder (236) drives the sliding disk (22) to move upward and reset through the bidirectional slide groove (238) and the sliding ball (228). At this time, the nitrogen gas above the sliding disk (22) enters the interior of the sliding cavity (123), and the movable disk (212) is reset by spring one (213). At this time, the acrylic core mold is separated from the electroforming liquid and moves to the inside of the pull block (211). At this time, motor one (233) is turned off, and motor two (311) drives the rotating disk one (21) to reverse to the preset angle again, so that each pull block (211) moves upward and resets. 11) Change to another station again. During the movement of the pull block (211), when the nitrogen gas inside the sliding cavity (123) escapes into the interior of the housing 1 through the inner side of the pull block (211) and is discharged through the filling port (11), the cleaning cylinder (31) moves upward and resets. Through the escape of nitrogen gas inside the sliding cavity (123), the nitrogen gas provides secondary protection for the acrylic core mold during the movement process, further avoiding the problem of oxidation of the acrylic core mold when it comes into contact with air, ensuring that the copper layer surface is smooth and dense, without oxidation spots and micro defects. After the workers take out the acrylic core mold after electroforming, demold the acrylic core mold and the metal inside.

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