Anti-deformation base device for a vacuum rotary system

Abstract

The present application relates to the technical field of vacuum equipment, and provides an anti-deformation base device of a vacuum rotating system, the upper surface of the base is connected with a plurality of anti-deformation springs, the anti-deformation spring comprises an upper connecting piece, a lower connecting piece and a spring body, the left segment front surface and the right segment reverse surface of the spring body are opposite in helical angle, and the left segment reverse surface and the right segment front surface are parallel in helical angle; the spring body is used for absorbing axial and radial deformation stress of the base; the axis of the anti-deformation spring is parallel to the base, the upper connecting piece is connected to the upper side of the spring body, and the lower connecting piece is connected to the lower side of the spring body; a supporting body is arranged on the anti-deformation spring, a hollow gear is arranged on the supporting body, and a load support frame is arranged on the hollow gear; a solid gear and a vacuum driving device are arranged on one side of the supporting body, the output shaft of the vacuum driving device is connected with the solid gear, and the solid gear and the hollow gear are engaged. The present application solves the problems of vacuum rotating movement jamming, short service life and the like caused by the deformation of the chamber of the vacuum equipment.

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