一种机械损耗测量装置

By designing clamping components and laser interference structures with frequencies higher than those of the test substrate, the problem of existing technologies being unable to measure the mechanical loss of optical thin films at low frequencies of 100Hz and below and at extremely low temperatures of 4K has been solved, achieving high-precision mechanical loss measurement and supporting the low-noise environment of optical atomic clocks and gravitational wave detection systems.

CN122150195BActive Publication Date: 2026-07-17UNIV OF SCI & TECH OF CHINA +1

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
UNIV OF SCI & TECH OF CHINA
Filing Date
2026-05-06
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing technologies cannot meet the requirements for measuring the mechanical loss of optical thin films at low frequencies of 100Hz and below and at extremely low temperatures of 4K. This results in the inability to meet the key noise frequency band requirements of precision measurement systems such as optical atomic clocks and gravitational wave detectors, thus limiting the research progress in the field of thin film mechanical loss.

Method used

A mechanical loss measurement device was designed, comprising a vacuum chamber, a clamping assembly, and a driving assembly. The intrinsic frequency of the clamping assembly is higher than the frequency of the test substrate. A laser interferometry structure is used to measure vibration noise, and mechanical loss information is obtained by using laser reflection. The device ensures that there is no air damping or resonant coupling in the test environment, and achieves stable measurement at low frequency and extremely low temperature.

Benefits of technology

It achieves stable mechanical loss measurement in the low frequency band of 100Hz and below, provides accurate mechanical loss data, ensures the accuracy and reliability of measurement results, supports the measurement of mechanical loss of optical thin films in extreme low temperature environments of 4K, and meets the needs of precision measurement systems.

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Abstract

本发明提供了一种机械损耗测量装置,涉及材料力学技术领域。该机械损耗测量装置包括:容纳组件,形成真空腔室;夹持组件,安装于真空腔室内,用于夹持测试衬底的第一部分,测试衬底的第二部分从夹持组件伸出,第二部分上形成有待测光学薄膜;驱动组件,适用于驱动第二部分振动;夹持组件的本征频率大于测试衬底的本征频率,以避免夹持组件与测试衬底发生共振耦合;第一入射激光穿过透光部入射至待测光学薄膜,被待测光学薄膜反射后得到携带待测光学薄膜的振动信息的第一反射激光,第一反射激光用于确定待测光学薄膜的机械损耗。该机械损耗测量装置能够使测试衬底能在100Hz及以下低频段被稳定激发本征振动,使机械损耗的测量结果具有准确性。
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