Noise reducing heat exchanger and semiconductor apparatus

Abstract

The application relates to a noise reduction heat exchange device and a semiconductor device, which comprises a soundproof room, an air duct and a noise elimination structure, the soundproof room is used for containing functional devices, the air duct comprises an air outlet and an air return opening which are communicated with the soundproof room, airflow can enter the soundproof room through the air outlet and return to the air duct through the air return opening, and the noise elimination structure is arranged in the air duct. The application places the functional devices in the soundproof room, and the air outlet and the air return opening of the air duct are communicated with the soundproof room, so that the heat exchange airflow only circulates between the soundproof room and the air duct, thereby effectively maintaining the internal air cleanliness while reducing the possibility of external environmental noise entering the soundproof room through the air duct in the reverse direction, meanwhile, the application also sets the noise elimination structure in the air duct to attenuate the heat exchange noise in the air duct during the heat exchange process, thereby reducing the disturbance of the heat exchange noise on the functional devices in the soundproof room and improving the stability of the functional devices.

Description

Technical Field

[0001] This application relates to the field of mechanical technology, and in particular to a noise reduction heat exchange device and a semiconductor device. Background Technology

[0002] High-precision equipment, containing precision mechanical components or sensors sensitive to micro-vibrations, typically has extremely high requirements for temperature and acoustic environments during operation. Taking semiconductor manufacturing equipment as an example, excessively high or low temperatures during semiconductor production can lead to problems such as material thermal expansion mismatch, process parameter drift, abnormal film stress, or sensor reference misalignment, affecting process stability and product consistency. Simultaneously, high-precision positioning bases, wafer stages, micro-actuators, and precision sensors are widely used in equipment for processes such as vapor deposition, photolithography, metrology, and electron beam processing. These components are extremely sensitive to noise excitation; if environmental noise is not completely isolated, it can be transmitted to these acoustically sensitive components through air propagation or structural conduction, inducing undesirable micro-vibrations. This can ultimately lead to defects such as wafer position misalignment, uneven target sputtering, inaccurate film thickness distribution, increased particle formation, or measurement signal distortion, reducing product yield.

[0003] To address this, semiconductor equipment typically incorporates noise-reducing heat exchange devices to suppress external noise interference with acoustically sensitive components while regulating the operating temperature of functional devices. However, during the heat exchange process of these devices, temperature fluctuations, humidity changes, and airflow disturbances from the external environment can be directly transmitted to the device through its ductwork. This makes it difficult to maintain the thermal stability of the internal environment. Simultaneously, external noise can also enter the device through the ductwork, causing undesirable micro-vibrations in the acoustically sensitive components, thereby affecting the final molding quality of the product.

[0004] Therefore, how to improve the noise interference resistance of high-precision equipment while maintaining its thermal stability has become an urgent problem to be solved. Summary of the Invention

[0005] This application discloses a noise reduction heat exchange device and a semiconductor device, which are used to maintain the thermal stability of high-precision equipment while improving the anti-noise interference capability of high-precision equipment.

[0006] In a first aspect, this application provides a noise reduction heat exchange device, comprising: Soundproof room, used to house functional components; The air duct includes an air outlet and an air return outlet that connect to the soundproof room. Airflow can enter the soundproof room through the air outlet and then return to the air duct through the air return outlet. The sound-absorbing structure is located inside the air duct.

[0007] This application places the functional components within a soundproof chamber and connects both the air outlet and return air inlet of the duct to the soundproof chamber. This allows the heat exchange airflow to circulate only between the soundproof chamber and the duct, without exchanging gases with the external environment. This effectively maintains the cleanliness of the internal air while reducing the possibility of external environmental noise being transmitted back into the soundproof chamber via the duct, thus minimizing the interference of external noise on the functional components. Simultaneously, this application also incorporates a sound-absorbing structure within the duct to attenuate the heat exchange noise during the heat exchange process, thereby reducing the disturbance of heat exchange noise to the functional components within the soundproof chamber and improving the operational stability of the functional components.

[0008] In one possible implementation, the noise reduction structure includes a first noise reduction component, which surrounds and forms a first noise reduction channel, which is spirally arranged. In this way, the transmission path of sound waves in the air duct is extended, the contact area and contact time between the sound waves and the first silencer are increased, and the absorption efficiency of the silencer structure for sound wave energy is improved. At the same time, the spiral arrangement of the first silencer channel can also cause the sound waves to be reflected and scattered multiple times on the inner wall of the channel, so that the noise repeatedly passes through the first silencer during the propagation process, thereby enhancing the attenuation effect of the first silencer on airflow noise and reducing the acoustic interference of heat exchange airflow on the functional devices in the soundproof room.

[0009] In one possible implementation, the first silencing channel satisfies: 1 / D1≥20; in, 1 represents the length of the first silencing channel; D1 is the equivalent diameter of the first silencing channel.

[0010] Under this ratio constraint, the energy absorption efficiency of the first silencer for airflow noise can be effectively improved, the attenuation effect of the first silencer for airflow noise can be enhanced, and the acoustic interference of heat exchange airflow on functional components in the soundproof room can be reduced.

[0011] In one possible implementation, the first silencing channel also satisfies: ; Where c is the speed of sound; D1 is the equivalent diameter of the first silencing channel; f0 is the main noise frequency in the air duct.

[0012] Under the constraints of this relationship, the cutoff frequency of the first silencing channel 32 can be effectively increased, the coverage of the first silencing channel 32 on the main noise frequency of the air duct can be increased, so that the high-frequency sound waves in the air duct still propagate in the form of plane waves and fully react with the porous silencing material on the first silencing component, thereby improving the silencing effect of the first silencing channel.

[0013] In one possible implementation, the air duct includes a first wall and a second wall disposed opposite to each other along a first direction. The sound-absorbing structure further includes a second sound-absorbing component and a third sound-absorbing component. The second sound-absorbing component is disposed on the first wall and spaced apart from the second wall, and the third sound-absorbing component is disposed on the second wall and spaced apart from the first wall. The second sound-absorbing component and the third sound-absorbing component are arranged alternately and spaced apart along a second direction, and the second direction is perpendicular to the first direction. A second silencing channel is formed between the second and third silencing components, and the return air vent is connected to the air outlet through the second silencing channel.

[0014] The second and third sound-absorbing components are made of porous sound-absorbing materials. By utilizing the frictional resistance and viscosity of sound waves propagating in the porous sound-absorbing materials, sound energy is converted into heat energy to achieve the purpose of sound absorption. Furthermore, the staggered layout of the second and third sound-absorbing components creates abrupt changes in cross-section. By utilizing acoustic impedance matching, sound waves are emitted and interfered at the abrupt cross-section, thus achieving the purpose of sound absorption.

[0015] In one possible implementation, the second silencing channel satisfies: 2×D²≤ 3≤4×D2; Where D2 is the equivalent diameter of the second silencing channel; 3 represents the equivalent noise reduction length of the second noise reduction channel.

[0016] This embodiment sets the equivalent silencing length of the second silencing channel between two and four times its equivalent diameter. This avoids the situation where the equivalent silencing length of the second silencing channel is too small, causing the sound waves to not fully contact and interact with the second and third silencing components within a single silencing cycle. It also avoids the situation where the equivalent silencing length of the second silencing channel is too long, increasing the wind resistance of the second silencing channel and affecting the heat exchange efficiency.

[0017] In one possible implementation, the gap between adjacent second and third silencing elements is adjustable.

[0018] In this way, by adjusting the gap between the second and third silencers, the flow cross-sectional area and sound wave reflection path of the second silencer channel can be changed, thereby adapting to noise reduction requirements under different airflow or noise spectrum conditions. Simultaneously, during the maintenance phase of the noise reduction heat exchanger, the second and third silencers can be slid out of the duct by sliding or other means, allowing for replacement and maintenance of the second and third silencers without disassembling the main duct body, thus improving the maintenance efficiency of the noise reduction heat exchanger.

[0019] In one possible implementation, the soundproof room has a top and a side, and the air duct includes a first air duct cavity and a second air duct cavity that are connected to each other. The first air duct cavity is located at the top of the soundproof room, and the second air duct cavity is located at the side of the soundproof room. The air outlet is located in the first air duct cavity, and the air return outlet is located in the second air duct cavity. The noise reduction structure includes a first noise reduction component, a second noise reduction component, and a third noise reduction component. The first noise reduction component is located in the first air duct cavity, and the second and third noise reduction components are located in the second air duct cavity.

[0020] This embodiment sets up a bend in the air duct, places the air outlet in the first air duct cavity at the top of the soundproof room, and places the return air outlet in the second air duct cavity on the side of the soundproof room, so that the airflow can pass through the entire soundproof room from top to bottom, thereby extending the residence path of the airflow in the soundproof room, increasing the heat exchange time between the airflow and the functional devices in the soundproof room, and improving the heat exchange efficiency between the airflow and the functional devices.

[0021] Meanwhile, this embodiment places the first silencing component in the first air duct cavity and the second and third silencing components in the second air duct cavity. In this way, the structural characteristics of the first, second and third silencing components are utilized to achieve precise noise reduction for the first and second air duct cavities.

[0022] In one possible implementation, the noise reduction heat exchange device further includes a fan configured to deliver airflow into the soundproof room through an air outlet. In this way, by actively supplying air through the air outlet and passively returning air through the return air outlet, the air intake volume at the air outlet is greater than the air return volume at the return air outlet, thereby maintaining the soundproof room in a positive pressure state at all times. This reduces the possibility of external dust or gas entering the soundproof room through the gaps in the soundproof room, and reduces the interference of particulate matter, water vapor and environmental noise in the external air on the working environment of the functional devices in the soundproof room.

[0023] In one possible implementation, the noise reduction heat exchange device further includes a fan and a silencer pipe, the fan being located inside the air duct, the fan having an air outlet, and the silencer pipe being located at the air outlet. The silencer duct has at least one expansion cavity, which includes a first opening and a second opening that are connected to each other. The first opening is located closer to the air outlet than the second opening, and the cross-sectional area of ​​the first opening is smaller than that of the second opening. Thus, the abrupt change in cross-section between the first and second openings of the expansion cavity creates an acoustic impedance mismatch, causing some incident sound waves to be reflected back to the sound source at the opening. This results in destructive interference between the incident sound waves generated by the fan and the sound waves reflected at the abrupt change in cross-section at a specific frequency, thereby attenuating the aerodynamic noise and turbulent airflow pulsation noise generated by the fan operation that propagate downstream along the duct.

[0024] In one possible implementation, the cross-sectional area of ​​the first opening is A, and the cross-sectional area of ​​the second opening is B, with 1.5 ≤ B / A ≤ 2.5. Under this proportional constraint, it is possible to avoid the expansion angle of the expansion cavity being too small, resulting in insufficient change in cross-sectional area, which would weaken the sound wave reflection and interference effect of the silencer and affect the silencer's noise reduction effect. It is also possible to avoid the expansion angle of the expansion cavity being too large, which would easily cause the boundary layer to detach from the pipe wall, forming a backflow zone and periodic vortex, reducing the fan's air delivery efficiency.

[0025] In one possible implementation, the silencer pipe satisfies: sin 2 (k )=1; Where k is the wave number of the sound wave; This is the axial length of the silencer pipe.

[0026] Under the constraints of this relationship, the noise reduction of the expansion cavity section for the fan noise can reach the theoretical peak value, thereby maximizing the noise reduction capability of the noise reduction component for the fan noise, reducing the impact of fan noise on functional components, and improving the operational stability of functional components.

[0027] In one possible implementation, the noise reduction heat exchange device includes a duct plate, the duct plate is arranged to form a soundproof chamber, the duct is arranged inside the duct plate, and the duct plate is provided with a limiting part. The noise reduction heat exchange device also includes a soundproof door and a first sealing element. The soundproof door is rotatably connected to the air duct and has an open state and a closed state. The mating part is used to cooperate with the limiting part when the soundproof door is in the closed state to seal the soundproof chamber. The first sealing element is located at the mating part, and the height of the end face of the first sealing element gradually decreases along the closing direction of the soundproof door.

[0028] This embodiment utilizes a limiting part on the air duct plate and a mating part on the soundproof door to enable the opening and closing of the soundproof room. Simultaneously, a first sealing element is provided between the limiting part and the mating part, with the end face height of the first sealing element gradually decreasing along the closing direction of the soundproof door. With this configuration, when the soundproof door closes, the lower end of the first sealing element can contact the limiting part first, thereby reducing the resistance of the first sealing element to the limiting part at initial contact. As the soundproof door continues to rotate towards the closed position, the first sealing element is gradually compressed, with the compression amount continuously increasing along the closing stroke, thus increasing the sealing pressure. Finally, when the soundproof door is fully closed and the mating part abuts against the limiting part, the first sealing element reaches the preset compression amount, forming a reliable airtight seal. In this way, while achieving a seal on the soundproof door, the obstruction of the first sealing element to the movement of the soundproof door is reduced, improving the smoothness of the soundproof door's movement.

[0029] Secondly, this application also proposes a semiconductor device, which includes the noise reduction heat exchange device of any one of the first aspects and a functional device, wherein the functional device is disposed within the noise reduction heat exchange device.

[0030] This application places the functional components within a soundproof chamber and connects both the air outlet and return air inlet of the duct to the soundproof chamber. This allows the heat exchange airflow to circulate only between the soundproof chamber and the duct, without exchanging gases with the external environment. This effectively maintains the cleanliness of the internal air while reducing the possibility of external environmental noise being transmitted back into the soundproof chamber via the duct, thus minimizing the interference of external noise on the functional components. Simultaneously, this application also incorporates a sound-absorbing structure within the duct to attenuate the heat exchange noise during the heat exchange process, thereby reducing the disturbance of heat exchange noise to the functional components within the soundproof chamber and improving the operational stability of the functional components. Attached Figure Description

[0031] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0032] Figure 1 A schematic diagram of the structure of an embodiment of the semiconductor device provided in this application; Figure 2 for Figure 1 A schematic diagram of a structural embodiment of a noise reduction heat exchange device; Figure 3 for Figure 1 Cross-sectional view of the stroke duct slab; Figure 4 for Figure 1 A schematic diagram of the three-dimensional structure; Figure 5 for Figure 2 Assembly diagram of the soundproof door and the air duct panel; Figure 6 for Figure 2 Cross-sectional view of the soundproof door; Figure 7 for Figure 2 Schematic diagram of the intermediate clamping mechanism; Figure 8 for Figure 4 A structural diagram of the mating structure between the soundproof door and the air duct panel; Figure 9 for Figure 8 Schematic diagram of the structure of the first sealing element; Figure 10 for Figure 8A schematic diagram of the structure of the first sealing element in another embodiment; Figure 11 for Figure 1 Schematic diagram of airflow direction in the central stenosis channel; Figure 12 for Figure 11 Schematic diagram of airflow in the first air duct cavity; Figure 13 for Figure 11 Schematic diagram of airflow in the second air duct cavity; Figure 14 for Figure 1 Schematic diagram of the first silencing channel Figure 15 for Figure 14 Top view; Figure 16 for Figure 1 Schematic diagram of the structure of the second anechoic chamber; Figure 17 for Figure 16 A cross-sectional view of the second muffler component; Figure 18 For airflow in Figure 16 A schematic diagram of the flow in the silencing unit; Figure 19 for Figure 12 Cross-sectional view of the silencer pipe.

[0033] Explanation of reference numerals in the attached figures: 1000 - Semiconductor Equipment; 100-Noise Reduction Heat Exchanger; 1-Soundproof room; 2-Air duct, 21-Air outlet, 22-Air return outlet, 23-First air duct cavity, 231-Air supply port, 24-Second air duct cavity, 25-First wall surface, 26-Second wall surface; 3-Silence-absorbing structure, 31-First silencer, 311-First sound-absorbing layer, 312-First support layer, 313-Second sound-absorbing layer, 314-Second support layer, 315-Third sound-absorbing layer, 32-First silencer channel, 33-Second silencer, 331-Fourth sound-absorbing layer, 332-Third support layer, 34-Third silencer, 35-Second silencer channel, 351-Silence-absorbing unit; 4-Air duct plate, 41-Limiting part, 411-First limiting section, 412-Second limiting section, 413-Third limiting section, 42-Supporting component, 43-Sound absorbing component; 5-Silencer tube, 51-Expansion cavity section, 511-First opening, 512-Second opening; 6-Soundproof door, 6a-First soundproof door, 6b-Second soundproof door, 61-Matching part, 611-First mating section, 612-Second mating section, 613-Third mating section, 62-First external support layer, 63-First moisture-proof layer, 64-First sound insulation felt layer, 65-Sound insulation board layer, 66-Second sound insulation felt layer, 67-Second moisture-proof layer, 68-Foam sound-absorbing layer, 69-Second external support layer; 7-First sealing element, 71-First sealing section, 72-Second sealing section; 8-Second seal; 9- Fan; 10 - Heater; 110 - Door handle; 120 - Clamping mechanism, 1201 - Fixing component, 1202 - Clamping component; 200 - Functional devices. Detailed Implementation

[0034] This application proposes a semiconductor device, which can be a deposition device, such as a physical vapor deposition (PVD) device, a chemical vapor deposition (CVD) device, or an atomic layer deposition (ALD) device; it can also be a metrology device, such as an optical critical dimension metrology system (OCD), a scanning electron microscope (SEM), a transmission electron microscope (TEM), an atomic force microscope (AFM), etc.; or it can be an electron beam device, such as an electron beam mask writer or an electron beam defect inspection tool, etc. This application does not limit the scope of the application.

[0035] For ease of explanation, the following will use semiconductor equipment as an example of physical vapor deposition equipment.

[0036] Please refer to Figure 1The semiconductor equipment 1000 includes functional devices 200, which perform the core functions of the physical vapor deposition process. When the semiconductor equipment 1000 is a physical vapor deposition device, the functional devices 200 include, but are not limited to: a base for supporting and temperature-controlling the wafer, a sputtering target assembly for providing a sputtering material source, a plasma generation unit for exciting process gases to generate plasma, a gas distribution system for uniformly delivering reactive gases to the process chamber, and a wafer transport mechanism for realizing wafer entry, exit, and positioning in a vacuum environment, etc. This application does not limit these.

[0037] The functional device 200 has stringent requirements for the acoustic cleanliness and temperature of the environment. During the operation of the functional device 200, excessively high or low temperatures may cause problems such as material thermal expansion mismatch, process parameter drift, abnormal film stress, or sensor reference offset, affecting process stability and product consistency. At the same time, if the noise in the environment is not effectively isolated, the noise may be transmitted to the interior of the functional device 200 through air or structural conduction, and induce undesired vibrations in the high-precision positioning base, wafer stage, micro actuator, precision sensor and other sound-sensitive components inside the functional device 200. This can ultimately lead to problems such as wafer position offset, uneven target sputtering, inaccurate film thickness distribution, increased particle generation or measurement signal distortion, reducing the film quality of the product.

[0038] To this end, the semiconductor device 1000 also includes a noise reduction heat exchange device 100, which is used to house the functional device 200, so as to provide efficient thermal management for the functional device 200, while constructing an acoustic isolation barrier, suppressing the transmission of external noise to the functional device 200, reducing the undesired vibration of the acoustically sensitive parts of the functional device 200, and improving the stability of the operation of the functional device 200.

[0039] In some embodiments, the noise reduction heat exchange device 100 includes a soundproof chamber 1 and an air duct 2. The soundproof chamber 1 is used to form an acoustically isolated space capable of accommodating the functional device 200, thereby reducing the interference of external noise on the functional device 200. The air duct 2 is connected to the soundproof chamber 1 to guide airflow into or out of the soundproof chamber 1, thereby achieving heat exchange for the functional device 200.

[0040] In related technologies, the air duct 2 is typically connected to the external environment, allowing airflow from the external environment to enter the soundproof chamber 1 via the air duct 2 and then exit the soundproof chamber 1 via the air duct 2 again. Under this configuration, temperature fluctuations, humidity changes, and airflow disturbances from the external environment can be directly transmitted to the interior of the soundproof chamber 1 through the air duct 2, making it difficult to maintain the thermal stability of the environment in which the functional device 200 is located, which is detrimental to the temperature control of the functional device 200. Simultaneously, external noise can also enter the soundproof chamber 1 through the air duct 2, disrupting the acoustic isolation barrier originally constructed by the soundproof chamber 1, causing undesirable micro-vibrations in the acoustically sensitive components of the functional device 200, thereby affecting the final molding quality of the product.

[0041] To solve the above problems, in this application, the air duct 2 includes an air outlet and a return air outlet that are connected to the soundproof room 1. The airflow can enter the soundproof room 1 through the air outlet and then return to the air duct 2 through the return air outlet. At the same time, the noise reduction heat exchange device 100 provided in this application also includes a sound-absorbing structure, which is disposed in the air duct 2.

[0042] This application places the functional device 200 inside the soundproof chamber 1 and connects the air outlet and return air outlet of the air duct 2 to the soundproof chamber 1, so that the heat exchange airflow only circulates between the soundproof chamber 1 and the air duct 2 without exchanging gases with the external environment. This effectively maintains the cleanliness of the internal air while reducing the possibility of external environmental noise being transmitted back into the soundproof chamber 1 through the air duct 2, thus reducing the interference of external noise on the functional device 200. At the same time, this application also sets a sound-absorbing structure in the air duct 2 to attenuate the heat exchange noise in the air duct 2 during the heat exchange process, thereby reducing the disturbance of heat exchange noise to the functional device 200 in the soundproof chamber 1 and improving the operational stability of the functional device 200.

[0043] The noise reduction heat exchange device 100 provided in this application will now be described in detail with reference to the accompanying drawings.

[0044] Please refer to Figure 2 In some embodiments, the noise reduction heat exchange device 100 includes a soundproof chamber 1 and an air duct 2. The soundproof chamber 1 is used to house the functional device 200 in order to reduce the interference of external environmental noise on the functional device 200 inside the soundproof chamber 1.

[0045] To form a soundproof room 1, in some embodiments, the noise reduction heat exchange device 100 includes a plurality of air duct plates 4, which are arranged around the functional device 200 and interconnected to enclose and form a soundproof room 1 for housing the functional device 200; the air duct plates 4 also have airflow channels that communicate with the soundproof room 1, and the airflow channels in each air duct plate 4 are interconnected to jointly constitute the air duct 2 provided in this application.

[0046] Please refer to Figure 2 and Figure 3The duct panel 4 may include stacked support members 42 and sound-absorbing members 43. The support members 42 provide support for the sound-absorbing members 43 to ensure the overall strength and stability of the duct panel. The support members 42 may be made of steel, aluminum, rigid plastic, or other composite materials that can provide support. The sound-absorbing members 43 are composed of porous sound-absorbing materials to absorb sound wave energy in the environment, thereby suppressing the transmission of environmental noise and reducing the interference of external environmental noise on the functional devices 200 in the soundproof room 1. The sound-absorbing members 43 may be made of glass wool, rock wool, or other sound-absorbing materials; this application does not limit this.

[0047] In other possible implementations, the duct plate may also be composed of only sound-absorbing elements, and this application does not limit this.

[0048] Understandably, in addition to being enclosed by a duct plate, in other possible embodiments, the soundproof room can also be enclosed by an independently set soundproof outer shell, with both the soundproof room and the duct located inside the outer shell. This application directly uses the duct plate 4 used to form the duct 2 as the enclosure structure of the soundproof room 1, eliminating the need for additional independent soundproof walls, thereby simplifying the structure of the noise reduction heat exchange device and reducing the manufacturing cost of the noise reduction heat exchange device. At the same time, the sound-absorbing component 43 used to form the duct plate 4 can effectively absorb the airflow noise in the duct 2 while suppressing the transmission of external environmental noise, reducing the impact of duct airflow noise on functional devices and improving the operational stability of functional devices.

[0049] Please refer to Figures 4 to 6 To facilitate the installation and maintenance of the functional device 200, in some embodiments, the soundproof chamber 1 formed by the air duct plate 4 has an operating port on at least one side; correspondingly, the noise reduction heat exchange device 100 also includes a soundproof door 6, which can open the operating port to provide an operating channel when the functional device 200 needs to be installed, debugged or routinely maintained; and close the operating port when the semiconductor equipment is running normally to maintain the stability of the internal environment of the soundproof chamber 1.

[0050] To prevent external noise from entering the soundproof room 1 through the soundproof door 6, such as Figure 6 As shown, in some embodiments, the soundproof door 6 may include a first external support layer 62, a first moisture-proof layer 63, a first sound-insulating felt layer 64, a sound-insulating board layer 65, a second sound-insulating felt layer 66, a second moisture-proof layer 67, a foam sound-absorbing layer 68, and a second external support layer 69, which are stacked sequentially. The first external support layer 62 and the second external support layer 69 are used to provide support for other structures of the soundproof door to ensure the stability of the overall strength of the soundproof door. The materials of the first external support layer 62 and the second external support layer 69 may be steel, aluminum, or other hard metal materials, and this application does not limit them.

[0051] The first moisture-proof layer 63 and the second moisture-proof layer 67 are used to block external moisture from penetrating into the soundproof door 6 and to prevent the sound-absorbing and sound-insulating materials from deteriorating due to moisture. The materials of the first moisture-proof layer 63 and the second moisture-proof layer 67 can be polymer moisture-proof boards, aluminum composite films, or moisture-proof coatings. This application does not limit these materials.

[0052] The first sound insulation felt layer 64 and the second sound insulation felt layer 66 are made of porous sound-absorbing material to absorb sound energy in the environment and suppress the transmission of mid-to-high frequency noise. The materials of the first sound insulation felt layer 64 and the second sound insulation felt can be butyl rubber composite sound insulation felt, asphalt damping sound insulation felt, polymer-based composite sound insulation felt, or other flexible sound insulation materials. This application does not limit these materials.

[0053] The sound insulation layer 65 is used to form an acoustic barrier to block the transmission of mid-to-low frequency noise. The material of the sound insulation layer 65 can be lead plate, steel plate, cement fiberboard, or high-density gypsum board, and this application does not limit this. The foam sound-absorbing layer 68 is used to absorb residual sound energy in the cavity inside the door, suppress standing wave resonance, and attenuate high-frequency noise, thereby improving the overall sound insulation performance of the soundproof door 6. The material of the foam sound-absorbing layer 68 can be melamine foam, polyurethane foam, or open-cell rubber and plastic foam material, and this application does not limit this.

[0054] Understandably, in other possible implementations, the soundproof door 6 may also adopt other soundproof structures, and this application does not limit this.

[0055] The soundproof door 6 is movably disposed at the opening to close the opening in the closed state to maintain the acoustic integrity of the soundproof room 1, and to provide an access passage for the functional devices 200 in the open state.

[0056] There are several ways in which the soundproof door 6 can be moved into the opening. The soundproof door 6 can be moved into the opening by sliding or by rotating. This application does not limit this.

[0057] Please refer to Figure 7 In some embodiments, the noise reduction heat exchange device may also include a door handle 110, which is used by a user to open or close the soundproof door 6.

[0058] In some embodiments, the noise reduction heat exchange device further includes a pressing mechanism for pressing the soundproof door 6 to improve the sound insulation effect of the soundproof door 6 on the soundproof room. Specifically, in this embodiment, the soundproof door 6 includes a first soundproof door 6a and a second soundproof door 6b, which are rotatably connected to the air duct plate; the pressing mechanism 120 includes a fixing member 1201 and a pressing member 1202, the fixing member 1201 being connected to the first soundproof door 6a; the pressing member 1202 being rotatably connected to the fixing member 1021 and having a locked position and an unlocked position. When the fixing member is in the unlocked position, the fixing member is separated from the door handle 110 provided on the second soundproof door 6b, so as to allow the first soundproof door 6a and the second soundproof door 6b to rotate freely. When the clamping member 1202 is in the locked position, the clamping member 1202 contacts the door handle 110 of the second soundproof door 6b, thereby tightly pressing the first soundproof door 6a and the second soundproof door 6b together to improve the overall sound insulation effect of the soundproof door 6 for the soundproof room.

[0059] Please refer to Figure 8 In some embodiments, the soundproof door 6 is rotatably connected to the adjacent air duct plate 4 via a pivot or hinge, so that the soundproof door 6 can rotate to open and close around a vertical or horizontal axis; at the same time, the air duct plate 4 is provided with a limiting part 41, and the soundproof door 6 is provided with a corresponding mating part 61. The mating part 61 is used to abut against the limiting part 41 when the soundproof door 6 is in the closed state, so as to seal the soundproof room 1.

[0060] The structures of the limiting part 41 and the mating part 61 can vary. In some embodiments, the limiting part 41 includes a first limiting segment 411, a second limiting segment 412, and a third limiting segment 413 connected in sequence. Correspondingly, the mating part 61 includes a first mating segment 611, a second mating segment 612, and a third mating segment 613. The first limiting segment 411, the third limiting segment 413, the first mating segment 611, and the third mating segment 613 are aligned with the closing direction of the soundproof door 6, while the second limiting segment 412 and the second mating segment 612 are perpendicular to the closing direction of the soundproof door 6. In practical applications… In use, when the soundproof door 6 closes inward, the first limiting segment 411 of the limiting part 41 contacts the first mating segment 611 of the mating part 61, and the third limiting segment 413 contacts the third mating segment 613 of the mating part 61. In this way, the soundproof door 6 is guided and initially positioned at both ends in the closing direction. When the soundproof door 6 moves to the limit position, the second limiting segment 412 of the limiting part 41 abuts against the second mating segment 612 of the mating part 61 to form a rigid stop, preventing the soundproof door 6 from moving further inward, thereby limiting the soundproof door 6 to the preset position to complete the sealing of the soundproof room 1.

[0061] In some embodiments, the noise reduction heat exchange device 100 further includes a first seal 7. The first seal 7 is disposed in the first mating section 611 and / or the third mating section 613 of the mating part 61. The material of the first seal 7 may be silicone rubber, EPDM rubber, nitrile rubber, or other elastic materials with high resilience, aging resistance and good compression deformation performance. This application does not limit the material in this regard.

[0062] The first seal 7 is used to form a seal between the first mating section 611 and the first limiting section 411, or between the third mating section 613 and the third limiting section 413, thereby reducing the gap between the first mating section 611 and the first limiting section 411 or between the third mating section 613 and the third limiting section 413, reducing the possibility of external moisture or noise entering the soundproof room 1 through the gap between the first mating section 611 and the first limiting section 411 or between the third mating section 613 and the third limiting section 413, and improving the airtightness and quietness of the soundproof room 1.

[0063] In some embodiments, the end face height of the first seal 7 gradually decreases along the closing direction of the soundproof door 6. With this configuration, when the soundproof door 6 is closed, the lower end of the first seal 7 can contact the limiting part 41 first, thereby reducing the resistance of the first seal 7 to the limiting part 41 at the initial contact. As the soundproof door 6 continues to rotate towards the closed position, the first seal 7 is gradually compressed, with the compression amount continuously increasing along the closing stroke, and the sealing pressure increasing accordingly. Finally, when the soundproof door 6 is fully closed and the mating part 61 abuts against the limiting part 41, the first seal 7 reaches the preset compression amount, forming a reliable airtight seal. Thus, while sealing the soundproof door 6, the obstruction of the first seal 7 to the movement of the soundproof door 6 is reduced, improving the smoothness of the soundproof door 6's movement.

[0064] Please refer to Figure 9 and Figure 10 When the height of the end face of the first sealing element 7 gradually decreases along the closing direction of the soundproof door 6, the first sealing element can... Figure 9 As shown, it includes a first sealing section 71 and a second sealing section 72. One end of the first sealing section 71 and the second sealing section 72 are connected to each other, and the other end is spaced apart along the height direction of the first sealing member 7, so that the end face height of the first sealing member 7 gradually decreases; it can also be formed as follows: Figure 10 The wedge-shaped structure shown allows the height of the end face of the first seal 7 to gradually decrease.

[0065] In some embodiments, the noise reduction heat exchange device 100 further includes a second seal 8, which is disposed in the second mating section 612. The material of the second seal 8 may be silicone rubber, EPDM rubber, nitrile rubber, or other elastic materials with high resilience, aging resistance and good compression deformation performance. This application does not limit the material of the seal 8.

[0066] The second seal 8 is used to form a seal between the second mating section 612 and the third limiting section 413, thereby reducing the gap between the second mating section 612 and the second limiting section 412, reducing the possibility of external moisture or noise entering the soundproof room 1 through the gap between the second mating section 612 and the second limiting section 412, and improving the airtightness and quietness of the soundproof room 1.

[0067] In some embodiments, the noise reduction heat exchange device 100 includes the aforementioned first seal 7 and second seal 8. The first seal 7 and second seal 8 cooperate to reduce the noise leakage of the soundproof chamber 1 between the duct plate 4 and the soundproof door 6, thereby improving the airtightness and quietness of the soundproof chamber 1. The formula for calculating the sound insulation loss due to the sealing gap is as follows: =10lg ; Where n is the frequency correlation index. When the sound wave frequency f < 1000 Hz, n = 4, and when the sound wave frequency f ≥ 1000 Hz, n = 6.

[0068] This represents the total sealing area of ​​the first and second seals.

[0069] This refers to the total area of ​​the gap between the air duct panel and the soundproof door.

[0070] This represents the sound insulation under ideal, leak-free conditions.

[0071] This refers to the sound insulation loss due to the sealing gap.

[0072] From the formula for calculating the sound insulation loss due to the sealing gap, it can be seen that when When significantly reduced, Consequently, the actual sound insulation performance approaches the theoretical value. Experimental measurements show that, compared to using only the first sealing element, the combination of the first and second sealing elements can achieve [the desired effect]. Reduce the sound insulation loss caused by the sealing gap to less than 25% of the amount of the first seal alone. This represents a reduction of approximately 3.6 dB, or 26.1%, meaning the loss value is reduced to approximately 73.9% of that of a conventional structure.

[0073] Please refer to Figures 11 to 13 The air duct 2 is connected to the soundproof room. The air duct 2 is used to guide airflow into or out of the soundproof room to exchange heat with the functional components 200 inside the soundproof room, thereby maintaining the stability of the functional components 200.

[0074] In this application, the air duct 2 adopts an internal circulation air duct, through which airflow enters the soundproof chamber 1 and then returns to the air duct 2 via the soundproof chamber 1. Specifically, in this application, the air duct 2 includes an air outlet 21 and a return air inlet 22. Correspondingly, the soundproof chamber 1 includes an air inlet and an air outlet. The air duct 2 is located outside the soundproof chamber 1, and the air outlet 21 of the air duct 2 is connected to the air inlet of the soundproof chamber 1, while the return air inlet 22 of the air duct 2 is connected to the air outlet of the soundproof chamber 1. In practical applications, airflow can enter the soundproof chamber 1 through the air outlet 21 of the air duct 2 and the air inlet of the soundproof chamber 1, and return to the air duct 2 through the air outlet of the soundproof chamber 1 and the return air inlet 22 of the air duct 2, thereby achieving circulation within the air duct 2 and the soundproof chamber 1 to complete heat exchange with the functional components 200 within the soundproof chamber 1.

[0075] In some embodiments, the noise reduction heat exchange device further includes a filter device located at the air outlet 22 or air return 21 of the air duct 2 to filter the airflow in the air duct 2, thereby reducing the impact of dust and impurities generated during the operation of the functional device on its operation. The filter device can be a filter element, a filter screen, activated carbon, or other components capable of filtering airflow, such as a high-efficiency particulate air filter (HEPA). This application does not limit the scope of the application.

[0076] In some embodiments, the soundproof chamber 1 has a top and a side, and the air duct 2 includes a first air duct cavity 23 and a second air duct cavity 24 that are connected. The first air duct cavity 23 is located at the top of the soundproof chamber 1, and the second air duct cavity 24 is located at the side of the soundproof chamber 1. The air outlet 21 is located in the first air duct cavity 23, and the air return vent 22 is located in the second air duct cavity 24. In this way, the airflow can pass through the entire soundproof chamber 1 from top to bottom, thereby prolonging the residence path of the airflow in the soundproof chamber 1, increasing the heat exchange time between the airflow and the functional devices 200 in the soundproof chamber 1, and improving the heat exchange efficiency between the airflow and the functional devices 200.

[0077] It should be noted that the heat exchange between the airflow and the functional device 200 can be either for dissipating heat from the functional device 200 or for heating it; this application does not impose any limitations on this. In some embodiments, the noise reduction heat exchange device further includes a heater, which is located in the airflow path of the duct. When the functional device 200 needs to be heated, the noise reduction heat exchange device can activate the heater to heat the airflow, thereby heating the functional device 200. When the functional device 200 needs to dissipate heat, the noise reduction heat exchange device can deactivate the heater and dissipate heat from the functional device 200 by allowing the airflow to directly contact the functional device 200. The heater can be an electric heating wire, a ceramic heating element, an infrared heater, or other heating structures; this application does not impose any limitations on this.

[0078] In some embodiments, the noise reduction heat exchange device further includes a noise reduction structure 3, which is disposed in the air duct 2 to attenuate the airflow noise in the air duct 2 during the heat exchange process, thereby reducing the disturbance of the airflow in the air duct to the functional device 200 in the soundproof room 1 and improving the stability of the operation of the functional device 200.

[0079] Please refer to Figure 14 and Figure 15 There are various forms of noise reduction structure. In some embodiments, the noise reduction structure includes a first noise reduction component 31, which is provided with porous sound-absorbing material to absorb airflow noise in the air duct 2, thereby reducing the impact of airflow in the air duct on the functional components 200 in the soundproof room.

[0080] For example, the first sound-absorbing component 31 includes a first sound-absorbing layer 311, a first support layer 312, a second sound-absorbing layer 313, a second support layer 314, and a third sound-absorbing layer 315 stacked sequentially. The first sound-absorbing layer 311, the second sound-absorbing layer 313, and the third sound-absorbing layer 315 are made of porous sound-absorbing materials to absorb noise sound waves in the air duct 2, thereby attenuating the propagation of noise in the air duct 2. The materials of the first sound-absorbing layer 311, the second sound-absorbing layer 313, and the third sound-absorbing layer 315 can be glass wool, rock wool, or other sound-absorbing materials, and this application does not limit them.

[0081] The first support layer 312 and the second support layer 314 are used to provide support for the first sound-absorbing layer 311, the second sound-absorbing layer 313, and the third sound-absorbing layer 315 to ensure the stability of the first sound-absorbing component 31 structure. The materials of the first support layer 312 and the second support layer 314 can be steel, aluminum, rigid plastic, or other rigid materials, and this application does not limit them.

[0082] The first silencing component 31 is arranged to form a first silencing channel 32, which is spirally arranged. This extends the transmission path of sound waves in the air duct 2, increases the contact area and contact time between the sound waves and the first silencing component 31, and improves the absorption efficiency of sound wave energy by the silencing structure 3. At the same time, the spiral arrangement of the first silencing channel 32 can also cause sound waves to be reflected and scattered multiple times on the inner wall of the channel, so that noise repeatedly passes through the first silencing component 31 during propagation, thereby enhancing the attenuation effect of the first silencing component 31 on airflow noise and reducing the acoustic interference of heat exchange airflow on the functional devices 200 in the soundproof room 1.

[0083] In some implementations, the first silencing channel satisfies: 1 / D1≥20; where, 1 represents the length of the first silencing channel 32; D1 represents the equivalent diameter of the first silencing channel 32. This is to improve the noise absorption capacity of the first silencing channel 32 for the air duct 2.

[0084] Specifically, the silencing structure of the first silencing channel 32 is a single-channel straight pipe silencing structure, and its silencing amount is calculated as follows: =

[0085] Where P is the effective perimeter of the first silencing channel 32 cross section.

[0086] S represents the effective cross-sectional area of ​​the first silencing channel 32.

[0087] The effective length of the first silencing channel 32.

[0088] D1 is the equivalent diameter of the first silencing channel 32.

[0089] The average normal sound absorption coefficient is the sound-absorbing material of the first sound-absorbing layer 311, the second sound-absorbing layer 313, and the third sound-absorbing layer 315.

[0090] The sound attenuation coefficient of the first sound-absorbing component is based on the sound-absorbing materials of the first sound-absorbing layer 311, the second sound-absorbing layer 313, and the third sound-absorbing layer 315.

[0091] As can be seen from the above calculation formula, the sound attenuation amount of the first silencing channel 32 for sound waves is... The ratio of the length of the first silencing channel 32 to the equivalent diameter of the first silencing channel 32 1 / D1 is directly proportional, therefore, by setting 1 / D1≥20, to improve the noise absorption capacity of the first silencing channel 32 for the air duct 2.

[0092] On the other hand, fluid simulation and acoustic testing verify that when the length L1 of the first silencing channel 32 and the equivalent diameter D1 of the first silencing channel 32 satisfy... When 1 / D1≥20, effective noise attenuation can be achieved in the 500 Hz–5 kHz frequency band. Testing showed that the noise within duct 2 is mainly concentrated between 500 Hz and 5 kHz. Therefore, this embodiment constructs the first silencing channel 32 to meet the requirements... The spiral structure with 1 / D1≥20 effectively improves the energy absorption efficiency of the first silencer for airflow noise, enhances the attenuation effect of the first silencer for airflow noise, and reduces the acoustic interference of heat exchange airflow on the functional components 200 in the soundproof room.

[0093] In some implementations, the first silencing channel 32 also satisfies: Where c is the speed of sound; D1 is the equivalent diameter of the first silencing channel 32; and f0 is the main noise frequency in the duct 2. This ensures that the noise in the duct 2 can fully utilize the sound-absorbing surface of the first silencing channel 32, improving the energy absorption efficiency of the first silencing component for airflow noise.

[0094] Specifically, the formula for calculating the silencing frequency is as follows: = ; in, This is the noise cutoff frequency.

[0095] D1 is the equivalent diameter of the first silencing channel 32.

[0096] c represents the speed of sound.

[0097] The silencing effect of the same silencing component varies depending on the noise frequency. Generally speaking, the silencing channel has better sound absorption in the mid-to-high frequency range, but when the noise frequency rises to the cutoff frequency of the silencing channel... When the sound wave transitions from a plane wave to a higher-order mode, the sound energy concentrates in the central region of the silencing channel, making it difficult for it to fully contact the silencing components installed on the inner wall of the silencing channel. This results in a decrease in the actual silencing performance of the silencing channel. Furthermore, according to the silencing frequency calculation formula, the equivalent diameter D1 of the first silencing channel 32 is related to the silencing cutoff frequency. Inversely proportional, the smaller D1 is, The larger it is, the better. Therefore, in Under the constraints, the cutoff frequency of the first silencing channel 32 can be effectively increased, the coverage of the first silencing channel 32 on the main noise frequency of the air duct can be increased, so that the high-frequency sound waves in the air duct can still propagate in the form of plane waves and fully react with the porous silencing material on the first silencing component, thereby improving the silencing effect of the first silencing channel.

[0098] Please refer to Figure 16 and Figure 17 In some embodiments, the noise reduction structure further includes a second noise reduction element 33 and a third noise reduction element 34, which are formed of porous sound-absorbing material.

[0099] For example, the second sound-absorbing component 33 includes a stacked fourth sound-absorbing layer 331 and a third support layer 332. The fourth sound-absorbing layer 331 is made of porous sound-absorbing material to absorb noise sound waves in the air duct 2, thereby attenuating the propagation of noise in the air duct 2. The material of the fourth sound-absorbing layer 331 can be glass wool, rock wool, or other sound-absorbing materials, and this application does not limit this.

[0100] The third support layer 332 provides support for the fourth sound-absorbing layer 331 to maintain the stability of the second sound-absorbing component 33 structure. The material of the third support layer 332 can be steel, aluminum, rigid plastic, or other rigid materials, and this application does not limit this. The structure of the third sound-absorbing component is similar to that of the second sound-absorbing component, and will not be described in detail here.

[0101] The third sound-absorbing component includes a layered fifth sound-absorbing layer and a fourth supporting layer. The fifth sound-absorbing layer uses a porous sound-absorbing material to absorb noise waves within the air duct, thereby attenuating the propagation of noise within the air duct. The material of the fifth sound-absorbing layer can be glass wool, rock wool, or other sound-absorbing materials; this application does not impose any restrictions on this.

[0102] The fourth support layer provides support for the fifth sound-absorbing layer to maintain the stability of the third sound-absorbing component structure. The material of the fourth support layer can be steel, aluminum, rigid plastic, or other rigid materials; this application does not impose any limitations on this. The structure of the third sound-absorbing component is similar to that of the second sound-absorbing component, and will not be described in detail here.

[0103] The air duct 2 includes a first wall surface 25 and a second wall surface 26 arranged opposite each other along a first direction X. A second silencing component 33 is disposed on the first wall surface 25 and spaced apart from the second wall surface 26. A third silencing component 34 is disposed on the second wall surface 26 and spaced apart from the first wall surface 25. The second silencing component 33 and the third silencing component 34 are arranged at intervals along a second direction Y to form a second silencing channel 35. The second direction Y is perpendicular to the first direction X. The number of the second silencer 33 and the third silencer 34 can be one or more, and this application does not limit this. For example, the silencer structure includes three second silencers 33 and three third silencers 34, which are arranged alternately and at intervals along the second direction Y. In this way, while achieving silencer, the overall length of the second silencer channel is reduced, thereby reducing the impact of the second silencer channel on airflow resistance.

[0104] When multiple second and third silencers 33 and 34 are provided, a silencer unit 351 is formed between each adjacent second and third silencers 33 and 34. Each silencer unit 351 has an air inlet section and an air outlet. The silencer unit 351 is connected to the previous silencer unit 351 through the air inlet section and to the next silencer unit 351 through the air outlet, and finally forms a second silencer channel 35. In this way, the sound energy is converted into heat energy by utilizing the frictional resistance and viscosity of the sound waves when they propagate in the porous sound-absorbing material, so as to achieve the purpose of silence. Moreover, the staggered layout of the second and third silencers 33 and 34 forms a sudden change in cross section. By using acoustic impedance matching, the sound waves are emitted and interfered at the sudden change in cross section, so as to achieve the purpose of silence.

[0105] Please refer to Figure 18 The staggered arrangement of the second and third silencers in the second direction Y is also known as a labyrinth arrangement. The second silencer channel formed by the second and third silencers can also be called a labyrinth silencer channel. The noise reduction of the second silencer channel can be calculated using the noise reduction formula of the labyrinth silencer structure. The calculation formula is as follows: =-10lg

[0106] in, This represents the noise reduction amount of the second noise reduction channel.

[0107] The cross-sectional area of ​​the air inlet 3511 or air outlet 3512 of the silencing unit 351.

[0108] D is the distance between the air inlet 3511 and the air outlet 3512 of the silencing unit 351.

[0109] The effective sound absorption area of ​​the sound-absorbing layer inside a sound-absorbing unit 351.

[0110] The spatial angle of the silencing unit 351, H is the distance between adjacent first and second mufflers, and W is the average length of the first and second mufflers along the first direction.

[0111] It represents the average sound absorption coefficient of the porous sound-absorbing material inside the second and third sound-absorbing components.

[0112] Please refer to Figure 16 In some implementations, the second silencing channel satisfies: 2×D²≤ 3≤4×D2; where D2 is the equivalent diameter of the second silencing channel; 3 represents the equivalent noise reduction length of the second noise reduction channel.

[0113] It should be noted that the equivalent silencing length of the second silencing channel 35 refers to the acoustic path length through which the airflow actually participates in effective sound energy dissipation when passing through the channel. When the projections of the first silencing component 31 and the second silencing component 33 overlap in the second direction Y, the equivalent silencing length of the second silencing channel 35 is the sum of the length of the second silencing component 33 in the second direction Y, the length of the third silencing component 34 in the second direction Y, and the distance between adjacent second silencing components 33 and third silencing components 34, minus the overlapping length of the projections of the second silencing component 33 and third silencing component 34 in the second direction Y. When the projections of the first silencing component 31 and the second silencing component 33 in the second direction Y are staggered, the equivalent silencing length is directly taken as the sum of the length of the second silencing component 33 in the second direction Y, the length of the third silencing component 34 in the second direction Y, and the distance between adjacent second silencing components 33 and third silencing components 34.

[0114] This embodiment sets the equivalent silencing length of the second silencing channel 35 between twice and four times its equivalent diameter. This avoids the situation where the equivalent silencing length of the second silencing channel 35 is too small, causing the sound waves to not fully contact and interact with the second silencing component 33 and the third silencing component 34 in a single silencing cycle. It also avoids the situation where the equivalent silencing length of the second silencing channel 35 is too long, increasing the wind resistance of the second silencing channel 35 and affecting the heat exchange efficiency.

[0115] In some embodiments, the gap between adjacent second silencer 33 and third silencer 34 is adjustable. This allows for changes in the flow cross-sectional area and sound wave reflection path of the second silencer channel 35, adapting to noise reduction requirements under different airflow or noise spectrum conditions. Simultaneously, during maintenance of the noise reduction heat exchange device 100, the second silencer 33 and third silencer 34 can be slid out of the duct 2 by sliding or other means. This allows for replacement and maintenance of the second silencer 33 and third silencer 34 without disassembling the main body of the duct 2, improving the maintenance efficiency of the noise reduction heat exchange device 100.

[0116] It should be noted that there are various ways to adjust the gap between the second and third mufflers. In some embodiments, the second muffler 33 is slidably disposed on the first wall surface 25 along the second direction Y; and / or the second muffler 33 is slidably disposed on the second wall surface 26 along the second direction Y. In specific applications, the position of the second muffler 33 on the first wall surface 25 or the third muffler 34 on the second wall surface 26 can be changed by sliding, and then the second muffler 33 or the third muffler 34 can be fixed by means of clips, threads, etc., thereby realizing the adjustment of the gap between the second muffler 33 and the third muffler 34.

[0117] Understandably, in other possible implementations, the second silencing component can be slidably disposed on the first wall surface via a slide rail, and the third silencing component can be slidably disposed on the second wall surface. The second and third silencing components can then be connected to each other via a motor screw or other drive structure, thereby achieving the gap adjustment between the second and third silencing components. This application does not limit this.

[0118] Please refer to Figure 11 In some embodiments, the first noise reduction component 31 is disposed in the first air duct cavity 23, and the second noise reduction component 33 and the third noise reduction component 34 are disposed in the second air duct cavity 24. In this way, the structural characteristics of the first noise reduction component 31, the second noise reduction component 33 and the third noise reduction component 34 are utilized to achieve precise noise reduction for the first air duct cavity 23 and the second air duct cavity 24.

[0119] Specifically, the first air duct cavity 23 is the air outlet cavity of the air duct 2. The airflow noise in the first air duct cavity 23 is mostly high-frequency noise. High-frequency noise has the characteristics of short wavelength, concentrated energy, and easy dissipation. Therefore, in this embodiment, by placing the first silencing component 31 in the first air duct cavity 23, the spirally extending first silencing channel 32 formed by the first silencing component 31 is used to force high-frequency sound waves to graze repeatedly in a limited space. Through repeated grazing and penetration of the first silencing component 31, the contact area between the high-frequency sound waves generated by the fan 9 and the first silencing component 31 per unit distance is increased, the dissipation speed of the high-frequency sound waves is accelerated, and the impact of noise in the first air duct cavity 23 on the functional device 200 is reduced.

[0120] The noise source of the second air duct cavity 24 is mainly the mid-to-low frequency regenerated noise generated when the return airflow passes through abrupt changes, bends, or obstacles. This noise has a long wavelength and is difficult to be directly absorbed by conventional sound-absorbing materials, but it is highly sensitive to changes in acoustic impedance caused by the geometry of the air duct. Therefore, this embodiment sets up a second silencing component 33 and a third silencing component 34 arranged in an alternating manner in the second air duct cavity 24, and forms a second silencing channel 35 by the second silencing component 33 and the third silencing component 34. This induces scattering, phase interference, and local eddy current dissipation of mid-to-low frequency sound waves through geometric disturbance, effectively destroying the coherence of mid-to-low frequency sound waves and enhancing energy attenuation. This reduces the impact of the regenerated noise of the airflow on the functional device 200 and improves the operational stability of the functional device 200.

[0121] Understandably, in other possible implementations, the first silencing component 31 may be disposed in the second air duct cavity 24, the second silencing component 33 and the third silencing component 34 may be disposed in the first air duct cavity 23, or the first silencing component 31, the second silencing component 33 and the third silencing component 34 may all be disposed in the first air duct cavity 23 or all in the second air duct cavity 24. This application does not limit this.

[0122] Please refer to Figure 11 and Figure 12 In some embodiments, the noise reduction heat exchange device also includes a fan 9, which is located in the air duct 2 and is used to drive the airflow into the soundproof room 1 through the air outlet 21. After exchanging heat with the functional device 200, the airflow returns to the air duct 2 through the return air outlet 22, thereby forming a closed internal circulation airflow.

[0123] The fan 9 can be a centrifugal fan, an axial fan, or other blower or induced draft device that can provide stable airflow delivery capability; this application does not limit this.

[0124] The fan 9 can be located in the first air duct cavity 23 or the second air duct cavity 24. This application does not limit this. In some embodiments, the fan 9 is located in the first air duct cavity 23 and is configured to send airflow into the soundproof room 1 through the air outlet 21. With this configuration, on the one hand, the air outlet 21 can actively supply air and the return air outlet 22 can passively return air, ensuring that the air intake of the air outlet 21 is greater than the air return of the return air outlet 22. This maintains the soundproof room 1 in a positive pressure state, reduces the possibility of external dust or gas entering the soundproof room 1 through the gaps in the soundproof room 1, and reduces the interference of particulate matter, water vapor and environmental noise in the external air on the working environment of the functional devices 200 in the soundproof room 1.

[0125] On the other hand, the noise generated by the operation of the fan 9 is the main reason for the high-frequency noise in the first air duct cavity 23. Therefore, the high-frequency noise of the fan 9 can also be absorbed by the first silencing channel 32 provided in the first air duct cavity 23, thereby reducing the impact of the operating noise of the fan 9 on the functional device 200.

[0126] In some embodiments, the first air duct cavity 23 is provided with an air supply hole 231, and the air inlet of the fan 9 is set corresponding to the air supply hole 231 of the first air duct cavity 23. The external airflow can enter the air duct 2 through the air supply hole 231 under the action of the fan 8 to supplement the air source of the air duct 2 and maintain the stability of the airflow in the air duct 2.

[0127] In some embodiments, the noise reduction heat exchange device 100 further includes a silencer pipe 5, which is located at the air outlet of the fan 9 to pre-attenuate the aerodynamic noise at the air outlet of the fan 9.

[0128] For details, please refer to Figure 19The silencer duct 5 has at least one expansion cavity section 51, which includes a first opening 511 and a second opening 512 that are connected to each other. The first opening 511 is located closer to the air outlet than the second opening 512, and the cross-sectional area of ​​the first opening 511 is smaller than that of the second opening 512. In this way, the change in cross-section of the expansion cavity section 51 between the first opening 511 and the second opening 512 creates an acoustic impedance mismatch, causing some of the incident sound waves to be reflected back to the sound source side at the opening. This causes the incident sound waves generated by the fan 9 to undergo destructive interference with the sound waves reflected at the abrupt change in cross-section at a specific frequency, thereby attenuating the aerodynamic noise and airflow turbulence noise generated by the operation of the fan 9 that propagate downstream along the duct.

[0129] In one possible implementation, the cross-sectional area of ​​the first opening 511 is A, and the cross-sectional area of ​​the second opening 512 is B, where 1.5 ≤ B / A ≤ 2.5. Under this proportional constraint, it is possible to avoid the expansion angle of the expansion cavity 51 being too small, resulting in insufficient change in cross-sectional area, which would weaken the sound wave reflection and interference effect of the silencer 5 and affect the sound-absorbing effect of the silencer 5. It is also possible to avoid the expansion angle of the expansion cavity 51 being too large, which would easily cause the boundary layer to detach from the pipe wall, forming a backflow zone and periodic vortex, thus reducing the air supply efficiency of the fan 9.

[0130] The cross-sectional area of ​​the expansion section 51 of the silencer 5 can change abruptly from the first opening 511 to the second opening 512, or it can change gradually from the first opening 511 to the second opening 512. In some embodiments, the cross-sectional area of ​​the expansion section 51 gradually increases along the direction from the first opening 511 to the second opening 512. This ensures the stability of the airflow velocity change within the silencer 5, reduces turbulence and regenerated noise caused by local velocity changes, and improves the quietness of the fan 9 operation.

[0131] The cross-sectional shape of the silencer 5 can be circular, rectangular, or other regular or irregular shapes, and this application does not impose any limitations on this. In some embodiments, the cross-section of the silencer 5 is formed as an ellipse or spindle shape. In this way, the asymmetric curved surface is used to break the axisymmetry of the cross-section, disrupt the regular reflection path of the sound waves in the cavity, avoid the superposition or focusing of sound modes in a specific direction caused by the circular or square cross-section, weaken the directional concentration of sound wave energy, reduce the local sound pressure peak, and improve the sound field uniformity and noise attenuation stability of the silencer 5 in a wide frequency range.

[0132] In some implementations, the silencer 5 satisfies: sin 2 (k =1, so as to maximize the noise reduction capability of the silencer 5 for the fan 9, reduce the impact of the fan 9 noise on the functional device 200, and improve the operational stability of the functional device 200.

[0133] Specifically, the formula for calculating the noise reduction of silencer 5 is as follows: = ; Where m is the expansion ratio of the silencer 5, that is, the area ratio of the second opening to the first opening; This represents the noise reduction of silencer 5. k is the wave number of the sound wave, k = 2π / λ, and λ is the wavelength of the noise. This is the axial length of the silencer pipe 5.

[0134] From the formula for calculating the noise reduction of silencer 5, it can be seen that the sound transmission loss within silencer 5 is related to the length of the expansion cavity of silencer 5, and when sin2(k )=1, meaning the length of the expansion cavity When the noise reduction of the expansion cavity reaches its theoretical peak value, equal to an odd multiple of one-quarter of the wavelength of the sound wave corresponding to the target noise frequency, the noise reduction of the fan 9 reaches its theoretical peak value. This maximizes the noise reduction capability of the silencer 5 for the fan 9, reduces the impact of the fan 9 noise on the functional device 200, and improves the operational stability of the functional device 200.

[0135] It should be understood that although this application uses semiconductor equipment as an example for illustration, the application of the noise reduction heat exchange device is not limited to this. In other possible embodiments, the noise reduction heat exchange device can also be used as an independent functional module to accommodate or cover other types of high-precision equipment, or it can be used to accommodate existing semiconductor equipment that does not have a noise reduction heat exchange device, thereby achieving thermal management and noise suppression of the equipment without changing the main structure of the original equipment.

Claims

1. A noise-reducing heat exchange device, characterized in that, include: Soundproof room, used to house functional components; The air duct includes an air outlet and an air return outlet that are connected to the soundproof room. Airflow can enter the soundproof room through the air outlet and then return to the air duct through the air return outlet. A noise reduction structure is provided inside the air duct.

2. The noise reduction heat exchange device according to claim 1, characterized in that, The noise reduction structure includes a first noise reduction component, which surrounds and forms a first noise reduction channel, and the first noise reduction channel is spirally arranged. The air outlet is located within the first silencing channel, and the return air outlet is connected to the air outlet via the first silencing channel.

3. The noise reduction heat exchange device according to claim 2, characterized in that, The first silencing channel satisfies: L1 / D1≥20; Wherein, L1 is the length of the first noise reduction channel; D1 is the equivalent diameter of the first silencing channel.

4. The noise reduction heat exchange device according to claim 2 or 3, characterized in that, The first silencing channel also satisfies: ; Where c is the speed of sound; D1 is the equivalent diameter of the first silencing channel; f0 is the main noise frequency in the air duct.

5. The noise reduction heat exchange device according to any one of claims 1-4, characterized in that, The air duct includes a first wall and a second wall that are arranged opposite to each other along a first direction. The sound-absorbing structure also includes a second sound-absorbing component and a third sound-absorbing component. The second sound-absorbing component is disposed on the first wall and spaced apart from the second wall. The third sound-absorbing component is disposed on the second wall and spaced apart from the first wall. The second direction is perpendicular to the first direction. A second silencing channel is formed between the first wall surface, the second wall surface, the second silencing component, and the third silencing component, and the return air vent is connected to the air outlet via the second silencing channel.

6. The noise reduction heat exchange device according to claim 5, characterized in that, The second silencing channel satisfies: 2×D2≤L2≤4×D2; Where D2 is the equivalent diameter of the second silencing channel; L2 is the equivalent noise reduction length of the second noise reduction channel.

7. The noise reduction heat exchange device according to claim 5, characterized in that, The gap between adjacent second and third silencing components is adjustable.

8. The noise reduction heat exchange device according to any one of claims 1-7, characterized in that, The soundproof room has a top and a side. The air duct includes a first air duct cavity and a second air duct cavity that are connected to each other. The first air duct cavity is located at the top of the soundproof room, and the second air duct cavity is located at the side of the soundproof room. The air outlet is located in the first air duct cavity, and the air return outlet is located in the second air duct cavity. The noise reduction structure includes a first noise reduction component, a second noise reduction component, and a third noise reduction component. The first noise reduction component is disposed in the first air duct cavity, and the second and third noise reduction components are disposed in the second air duct cavity.

9. The noise reduction heat exchange device according to any one of claims 1-8, characterized in that, It also includes a fan configured to deliver airflow into the soundproof room via the air outlet.

10. The noise reduction heat exchange device according to any one of claims 1-9, characterized in that, It also includes a fan and a silencer pipe, wherein the fan is located in the air duct, the fan has an air outlet, and the silencer pipe is located at the air outlet; The silencer pipe has at least one expansion cavity section, the expansion cavity including a first opening and a second opening that are connected to each other, the first opening being located closer to the air outlet than the second opening, and the cross-sectional area of ​​the first opening being smaller than the cross-sectional area of ​​the second opening.

11. The noise reduction heat exchange device according to claim 10, characterized in that, The cross-sectional area of ​​the first opening is A, the cross-sectional area of ​​the second opening is B, and 1.5 ≤ B / A ≤ 2.

5.

12. The noise reduction heat exchange device according to claim 10 or 11, characterized in that, The silencer pipe satisfies: sin 2 (k )=1; Where k is the wave number of the sound wave; The axial length of the expansion cavity segment.

13. The noise reduction heat exchange device according to any one of claims 1-12, characterized in that, It also includes a duct panel, which surrounds the soundproof room, the duct is disposed inside the duct panel, and the duct panel is provided with a limiting part; The noise reduction heat exchange device also includes a soundproof door and a first sealing element. The soundproof door is rotatably connected to the air duct and has an open state and a closed state. The mating part is used to cooperate with the limiting part when the soundproof door is in the closed state to seal the soundproof chamber. The first sealing element is disposed at the mating part, and the height of the end face of the first sealing element gradually decreases along the closing direction of the soundproof door.

14. A semiconductor device, characterized in that, It includes the noise reduction heat exchange device and functional device as described in any one of claims 1-13, wherein the functional device is disposed within the noise reduction heat exchange device.

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