半导体炉管温度数据的自适应滤波方法、系统、原位测量装置
By using an adaptive filtering method to dynamically adjust the filter window length, the problems of metal contamination and temperature measurement error in traditional semiconductor furnace tube temperature measurement methods are solved, achieving synergistic optimization of high precision, stability, and dynamic response.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- SHANGHAI CHEYITIAN TECH CO LTD
- Filing Date
- 2026-05-09
- Publication Date
- 2026-07-17
AI Technical Summary
Traditional semiconductor furnace tube temperature measurement methods suffer from problems such as metal contamination risk, large temperature measurement error, and poor dynamic response, making it difficult to meet the requirements of high-end semiconductor processes for temperature measurement accuracy and stability.
An adaptive filtering method is adopted. By acquiring digital voltage signals, preset noise thresholds and current process parameters, the instantaneous temperature sequence and signal-to-noise ratio are calculated, the length of the filtering window is dynamically adjusted, and filtering is performed to output the final temperature.
It improves measurement accuracy and stability, optimizes dynamic response performance, adapts to temperature measurement under different process windows, and reduces the risk of metal contamination.
Smart Images
Figure CN122159834B_ABST