一种MEMS压电风扇的双环封装气腔密封结构
By employing a double-ring nested sealing structure and an intermediate cavity design, the wear and failure issues of the MEMS piezoelectric fan air cavity sealing structure are solved, achieving higher airtightness and structural durability, and meeting the miniaturization and long-term stability requirements of MEMS devices.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- GUANGZHOU UNIVERSITY
- Filing Date
- 2026-05-09
- Publication Date
- 2026-07-17
AI Technical Summary
Existing MEMS piezoelectric fans' air chamber sealing structures are prone to sealing failure and wear during long-term use, making it difficult to meet the requirements of miniaturization and long-term stability. In particular, the contact stress on the sealing surface of a single sealing structure increases under high-pressure conditions, leading to accelerated wear.
The sealing structure adopts a double-ring nested design with an additional intermediate cavity. The inner ring sealing structure is a gold-tin alloy sealing ring, and the outer ring sealing structure is a copper-based sealing ring. The intermediate cavity is used to buffer and decompose pressure difference, forming a "throttling-stabilizing-rethrottling" fluid flow pattern, which improves airtightness and structural durability.
It significantly improves the airtightness and long-term stability of MEMS piezoelectric fans, reduces the wear rate of the sealing structure, adapts to the miniaturization and long-term operation requirements of MEMS devices, and enhances the mechanical strength and aging resistance of the sealing structure.
Smart Images
Figure CN122161338B_ABST