High power co2 gas laser resonator and method of operation thereof

Abstract

This invention discloses a high-power CO2 gas laser resonant cavity and its operating method, relating to the field of laser technology. The resonant cavity comprises a coupling module, a corner module, a tail mirror, a corner mirror, an output mirror, a discharge tube, an anode sleeve, a cathode mounting plate, a cathode pad, an aperture, a cathode, screws, a borosilicate glass T-tube, a borosilicate glass cross tube, and Invar alloy rods. The laser is mounted at the bottom. The coupling module and the corner module, as well as two corner modules, are connected by double-layer Invar alloy rods, forming a rectangular structure. The bottom of the resonant cavity is connected to the laser mounting frame via a DOF module. The resonant cavity structure improves the laser's output power, reduces thermal expansion deformation, and fixes the position of the output port and optical axis, thereby comprehensively improving the overall performance of the laser, including stability, accuracy, and durability. This provides a more efficient and reliable laser solution for industrial processing, scientific research experiments, and other fields.

Description

Technical Field

[0001] This invention relates to the field of water quality analysis and monitoring, specifically to a high-power CO2 gas laser resonator and its operating method. Background Technology

[0002] In traditional high-power laser design, electromagnetic waves oscillate repeatedly in the working medium within the resonant cavity to achieve laser amplification. This process places extremely high demands on the structural stability of the resonant cavity and the precision of the optical path.

[0003] In existing technologies, the structural design and material selection of lasers often fail to simultaneously meet the following key requirements: First, maintaining high stability of the resonant cavity to ensure efficient and stable oscillation of electromagnetic waves, which requires the resonant cavity to have extremely small deformation and precise optical axis positioning; second, ensuring uniform circulation of the working medium (such as gas) within the resonant cavity, which is crucial for the uniformity and stability of laser output power; third, resisting structural deformation caused by factors such as temperature changes and mechanical stress to maintain the relative fixation of the output port position and the stability of the optical axis direction; fourth, solving the problem of material aging and corrosion caused by extreme conditions such as high-voltage discharge and high temperature within the resonant cavity, ensuring the insulation and heat resistance performance of the cavity; and fifth, eliminating the impact of defects that may be introduced during processing on laser quality.

[0004] However, existing technologies often have shortcomings in these aspects. For example, traditional or irregularly shaped laser architectures cannot simultaneously guarantee structural stability and gas circulation uniformity; commonly used materials are prone to deformation when subjected to high temperatures and mechanical stresses generated by high-power discharge, affecting the performance and lifespan of the laser; the insulating and heat-resistant materials inside the resonant cavity may experience performance degradation due to aging or corrosion during long-term operation; and tiny defects that may exist in the optical path can interfere with the purity and directionality of the laser beam. Summary of the Invention

[0005] Based on the shortcomings of the prior art described above, the purpose of this invention is to provide a high-power CO2 gas laser resonator and its operating method to solve the above-mentioned technical problems.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a high-power CO2 gas laser resonator, comprising: The coupling module is equipped with an output mirror and a tail mirror. The output mirror is equipped with an output mirror aperture, and the tail mirror is equipped with a tail mirror aperture. The output mirror and the tail mirror are fixed to the coupling module by a mirror mount and a sealing O-ring. Three corner modules, each equipped with a corner mirror, are fixed to the corner module by a mirror mount and a sealing O-ring. The three corner modules and a coupling module together form a rectangular four-corner structure. The discharge tube is used to connect to the corner module to form a channel for gas discharge. The cathode is mounted on the discharge tube via a cathode mounting plate. The anode sleeve is installed on the discharge tube at the position opposite to the cathode, and the anode needle is installed on the anode sleeve; A high borosilicate glass T-tube, with its two ends connected between two cathodes and its third end connected to a high borosilicate glass cross tube, is used to distribute and connect the discharge gas. The high borosilicate glass cross tube is mounted on the laser mounting bracket through the high borosilicate glass cross tube flange, and together with the high borosilicate glass T-tube, it forms the circulation path of the discharge gas. The first sealing assembly is used to seal the connection between the high borosilicate glass T-tube and the discharge tube; The second sealing assembly is used to seal the connection between the high borosilicate glass T-tube and the high borosilicate glass cross tube. A double-layer Invar alloy rod connects the coupling module and the corner module, as well as the two corner modules, forming a rectangular structural frame to ensure that the deformation of the overall resonant cavity structure is minimized. The inner ring of the Invar alloy rod is connected by a bidirectional clamping block, and the outer ring is connected by a unidirectional clamping block. A hardened hemisphere is set on the coupling module and the corner module. The pads configured at the bottom of the hardened hemisphere include cross-shaped pads, straight pads and flat pads, which are respectively set at the bottom of one corner module adjacent to the coupling module and the bottom of the other two corner modules. A cathode pad is placed at the bottom of the cathode and fixed to the laser mounting bracket; The laser mounting bracket is located at the bottom of the resonant cavity and is connected to the resonant cavity via a DOF module. It is used to eliminate deformation caused by mechanical or thermal expansion, ensuring that the position of the light outlet remains fixed and the direction of the optical axis does not change. An aperture, including an output mirror aperture and a tail mirror aperture, is used to eliminate processing defects in the resonant cavity and improve the quality of the laser beam. All components are secured with fasteners to ensure structural stability and sealing.

[0007] The present invention is further configured such that the anode sleeve is made of alumina ceramic to avoid aging or corrosion caused by long-term high-voltage discharge.

[0008] The present invention is further configured such that the DOF module is used to connect the resonant cavity to the laser mounting bracket, and the DOF module is used to absorb deformation caused by mechanical or thermal expansion, thereby ensuring that the position of the light outlet is fixed and the optical axis direction is stable.

[0009] The present invention is further configured such that the resonant cavity is constructed with an Invar alloy material frame, the Invar alloy material having a low coefficient of thermal expansion, which is used to maintain dimensional stability in the range of 0-100°C and ensure the optical path accuracy of the resonant cavity.

[0010] The present invention is further configured such that a circulation channel for the laser working gas is formed between the high borosilicate glass cross tube and the high borosilicate glass T-tube. The efficient gas circulation through the turbopump is used to maintain the low-temperature operating environment of the resonant cavity below 150°C, thereby improving the output stability of the laser.

[0011] The present invention is further configured such that the DOF module is connected to the laser mounting bracket via a hardened hemisphere, and the bottom of the hardened hemisphere is provided with a star-shaped pad, a straight pad, and a flat pad to distribute the load and maintain the balance of the resonant cavity.

[0012] The present invention is further configured such that the rectangular structure of the overall frame of the resonant cavity is designed to achieve uniformity of gas circulation, and the symmetrically distributed corner mirrors are used to optimize the laser optical path and improve the laser output quality.

[0013] The present invention also provides a method for operating a high-power CO2 gas laser, which acts on the above-mentioned high-power CO2 gas laser resonant cavity, including: S1: Power on the laser and start circulating cooling water; S2: Turn on the vacuum pump to pump the pressure inside the resonant cavity to 10 mbar to ensure that there are no impurities contaminating the cavity; S3: Fill the resonant cavity with the mixed gas Lasal42 until the pressure reaches 180mbar.

[0014] S4: Start the turbopump and simultaneously monitor the temperature of the bearings at both ends of the turbopump. Gradually increase the turbopump speed to 30,000 rpm, ensuring that the air-fuel mixture circulates for 6,000 m³ / h at this speed. 3 / h is used to fully cool the temperature inside the resonant cavity, ensuring it is below 150 degrees Celsius. During operation, the pressure ratio between the outlet and inlet of the turbine pump is maintained within the range of 1.6-1.7. S5: Once the turbine pump speed is normal, start the high-voltage switching power supply of the laser and dynamically monitor the voltage of the high-voltage power supply to maintain it above 18kV. At the same time, gradually increase the current of the high-voltage power supply until it reaches above 200mA. Use a power meter to dynamically monitor the power of the laser output port. S6: During laser operation, the changes in high-voltage power supply ripple are dynamically monitored to ensure that the ripple is maintained within a safe range, in order to prevent uneven discharge from affecting the laser output power. S7: When the laser stops working, disconnect the high-voltage power supply, stop the turbine operation, and backfill with N2 or mixed gas to one atmosphere.

[0015] The present invention is further configured such that the mixed gas Lasal42 includes N2, CO2 and He, wherein the contents of N2, CO2 and He are 19.3%, 3.7% and 77%, respectively.

[0016] This invention provides a high-power CO2 gas laser resonator and its operating method. The resonator includes a coupling module on which an output mirror and a tail mirror are mounted. The output mirror has an output mirror aperture, and the tail mirror has a tail mirror aperture. The output mirror and tail mirror are fixed to the coupling module by a mirror mount and a sealing O-ring. Three corner modules are also included, each with a corner mirror mounted on it. The corner mirrors are fixed to the corner modules by a mirror mount and a sealing O-ring. The three corner modules and the coupling module together form a rectangular four-corner structure. A discharge tube is used to connect the corner modules to form a gas discharge channel. The system consists of: a cathode mounted on the discharge tube via a cathode mounting plate; an anode sleeve mounted on the discharge tube opposite the cathode, with an anode needle mounted on the anode sleeve; a borosilicate glass T-tube connecting the two cathodes at both ends and a borosilicate glass cross tube at the third end, used for distributing and connecting the discharge gas; a borosilicate glass cross tube mounted on the laser mounting bracket via a borosilicate glass cross tube flange, forming the discharge gas circulation path together with the borosilicate glass T-tube; a first sealing assembly for sealing the connection between the borosilicate glass T-tube and the discharge tube; and a second sealing assembly. The components include: a sealing element for the connection between the high borosilicate glass T-tube and the high borosilicate glass cross tube; a double-layer Invar alloy rod connecting the coupling module and the corner module, as well as the space between the two corner modules, forming a rectangular structural frame to ensure minimal deformation of the overall resonant cavity structure; the inner ring of the Invar alloy rod is connected by a bidirectional clamping block, and the outer ring is connected by a unidirectional clamping block; and a hardened hemisphere, mounted on the coupling module and the corner module, with pads at the bottom of the hardened hemisphere including a star-shaped pad, a straight pad, and a flat pad, each positioned adjacent to one of the coupling modules. The corner module and the bottom of the other two corner modules; the cathode pad, located at the bottom of the cathode and fixed to the laser mounting bracket; the laser mounting bracket, located at the bottom of the resonant cavity and connected to the resonant cavity via the DOF module, used to eliminate deformation caused by mechanical or thermal expansion, ensuring that the position of the output port remains fixed and the direction of the optical axis does not change; the aperture, including the output mirror aperture and the tail mirror aperture, used to eliminate processing defects in the resonant cavity and improve the quality of the laser beam; all components are fixed by fasteners to ensure the stability and sealing of the structure, resulting in the following beneficial effects: 1. The resonant cavity design of this invention can generate high-power CO2 lasers of over 8kW, significantly improving the output power of the laser and meeting the needs of high-energy-density laser sources in fields such as industrial processing and scientific research experiments.

[0017] 2. The resonant cavity has a relatively compact appearance and a symmetrical and balanced structure, which optimizes space utilization, makes gas circulation and distribution more uniform, improves the efficiency and stability of the laser, and the symmetrical and balanced structure also helps to reduce the vibration of the cavity during operation, further improving the quality of the laser beam.

[0018] 3. Invar alloy has an extremely low coefficient of thermal expansion. Using Invar alloy as the main structural material of the resonant cavity can significantly reduce the influence of environmental thermal expansion deformation, making the size of the resonant cavity relatively fixed.

[0019] 4. By adopting a DOF module, this invention ensures that the position of the light outlet and the optical axis remains fixed, and can maintain the stability of the laser propagation direction even when affected by various external factors during operation.

[0020] In summary, the resonant cavity design of this invention not only improves the output power of the laser, but also optimizes the structure, reduces thermal expansion deformation, and fixes the position of the output port and optical axis, thereby comprehensively improving the overall performance of the laser, including stability, accuracy, and durability, and providing a more efficient and reliable laser solution for industrial processing, scientific research experiments and other fields.

[0021] The above description is only an overview of the technical solution of this application. In order to better understand the technical means of this application and to implement it in accordance with the contents of the specification, and to make the above and other objects, features and advantages of this application more obvious and understandable, specific embodiments of this application are given below. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. In the drawings: Figure 1 A schematic diagram of the structure of a high-power CO2 gas laser resonator is shown as an exemplary embodiment of the present invention; Figure 2 A schematic diagram of the structure of a DOF module of a high-power CO2 gas laser resonator cavity is shown as an exemplary embodiment of the present invention; Figure 3 A flowchart illustrating a method for operating a high-power CO2 gas laser, as shown in an exemplary embodiment of the present invention; The components are as follows: 1. Coupling module; 2. Output mirror; 3. Output mirror aperture; 4. First sealing assembly; 5. Cathode; 6. Cathode mounting plate; 7. Discharge tube; 8. Corner module; 9. High borosilicate glass T-tube; 10. Invar alloy rod; 11. Anode sleeve; 12. Second sealing assembly; 13. Anode needle; 14. Cooling plate; 15. Invar alloy rod unidirectional clamp; 16. Invar alloy rod bidirectional clamp; 17. Hardened hemisphere; 18. Cross-shaped pad; 19. High borosilicate glass cross tube flange; 20. High borosilicate glass cross tube; 21. Laser mounting bracket; 22. Cathode pad; 23. Tail mirror aperture; 24. Tail mirror; 25. Corner mirror; 26. Flat pad; 27. Straight pad. Detailed Implementation

[0023] The embodiments of the present invention will be described below with reference to the accompanying drawings and preferred embodiments. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present invention. It should be understood that the preferred embodiments are only for illustrating the present invention and not for limiting the scope of protection of the present invention.

[0024] It should be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of the present invention. Therefore, the drawings only show the components related to the present invention and are not drawn according to the actual number, shape and size of the components in the actual implementation. In the actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0025] In the following description, numerous details are explored to provide a more thorough explanation of embodiments of the invention. However, it will be apparent to those skilled in the art that embodiments of the invention may be practiced without these specific details. In other embodiments, well-known structures and devices are shown in block diagram form rather than in detail to avoid obscuring embodiments of the invention. Example

[0026] A high-power CO2 gas laser resonator, such as Figure 1 As shown, it includes: The coupling module 1 is equipped with an output mirror 2 and a tail mirror 24. The output mirror 2 is provided with an output mirror aperture 3, and the tail mirror 24 is provided with a tail mirror aperture 23. The output mirror 2 and the tail mirror 24 are fixed to the coupling module 1 by a mirror mount and a sealing O-ring. Three corner modules 8, each corner module 8 is equipped with a corner mirror 25, the corner mirror 25 is fixed to the corner module 8 by a mirror base and a sealing O-ring, the three corner modules 8 and a coupling module 1 together form a rectangular four-corner structure; Discharge tube 7 is used to connect to corner module 8 to form a gas discharge channel; The cathode 5 is mounted on the discharge tube 7 via the cathode mounting plate 6; Anode sleeve 11 is installed on discharge tube 7 at a position opposite to cathode 5, and anode needle 13 is installed on anode sleeve 11; The high borosilicate glass T-tube 9 has two ends connected between the two cathodes 5 and the third end connected to the high borosilicate glass cross tube 20, which is used to distribute and connect the discharge gas. The high borosilicate glass cross tube 20 is mounted on the laser mounting bracket 21 through the high borosilicate glass cross tube flange 19, and together with the high borosilicate glass T-tube 9, it forms the circulation path of the discharge gas. The first sealing component 4 is used to seal the connection between the high borosilicate glass T-tube 9 and the discharge tube 7. The second sealing assembly 12 is used to seal the connection between the high borosilicate glass T-tube 9 and the high borosilicate glass cross tube 20. The double-layer Invar alloy rod 10 connects the coupling module 1 and the corner module 8, as well as the two corner modules 8, to form a rectangular structural frame to ensure that the deformation of the overall structure of the resonant cavity is minimized; wherein, the inner ring of the Invar alloy rod 10 is connected by the Invar alloy rod bidirectional clamp 16, and the outer ring is connected by the Invar alloy rod unidirectional clamp 15. A hardened hemisphere 17 is set on the coupling module 1 and the corner module 8. The pads configured at the bottom of the hardened hemisphere 17 include a star-shaped pad 18, a straight pad 27 and a flat pad 26, which are respectively set at the bottom of one adjacent corner module 8 of the coupling module 1 and the bottom of the other two corner modules 8. A cathode pad 22 is located at the bottom of the cathode 5 and fixed on the laser mounting bracket 21; The laser mounting bracket 21 is set at the bottom of the resonant cavity and is connected to the resonant cavity through the DOF module. It is used to eliminate deformation caused by mechanical or thermal expansion, and to ensure that the position of the light outlet is fixed and the direction of the optical axis does not change. The aperture, including the output mirror aperture 3 and the tail mirror aperture 23, is used to eliminate processing defects in the resonant cavity and improve the quality of the laser beam. All components are secured with fasteners to ensure structural stability and sealing.

[0027] Specifically, the installation preparation on the marble platform is as follows: Place the coupling module 1 at the designated corner of the marble platform and fix it to the marble platform using two M5*35 screws; place corner modules 8 at the other three corners of the marble platform and fix each corner module 8 to the marble platform using one M5*100 screw; take 16 Invar alloy rods 10, and symmetrically attach a high-pressure resistant film to 8 of them at a distance of 35mm from the end face; use 16 Invar alloy rod unidirectional clamps 15 and 8 Invar alloy rod bidirectional clamps 16, and fix the Invar alloy rods to the coupling module 1 and corner modules 8 with 56 M5*20 screws, ensuring that the rods with the high-pressure resistant film are located at the bottom; take 4 hardened hemispheres 17 and install them onto the 4 corner blocks of the coupling module 1 and corner modules 8 respectively.

[0028] Installation on laser mounting bracket 21: Transfer the entire structure of coupling module 1, corner module 8, and Invar alloy rod 10, already mounted on the marble platform, to the laser mounting bracket 21 frame. Place coupling module 1 at one end of the star-shaped pad 18. Place the corner module 8, coaxial with the laser output optical axis, on the straight pad 27, and the other two corner modules 8 on the flat pad 26. Take the high borosilicate glass cross tube 20, high borosilicate glass cross tube flange 19, and O-ring 117.07*3.5, and use six M5*16 screws to install the high borosilicate glass cross tube 20 onto the laser mounting bracket 21 frame. Take eight cathode mounting plates 6 and eight Φ6*12 straight pins, as well as sixteen M5*20 spring washers and sixteen flat washers. Install the cathode mounting plate 6 onto the cathode pad 22, and install the second sealing assembly 12 in sequence. Attach O-rings 52.39*3.53 to one corner of the borosilicate glass cross tube 20. Secure two cathodes 5 and two O-rings 56.82*2.62 to the small ends of the two cathode mounting plates 6 using four Φ4*16 pins. Take eight 82*2 O-rings and insert them into the grooves on the right-angle surfaces of the corner module 8 and the coupling module 1. Then, install the anode sleeves 11 onto the cylindrical pins on the right-angle surfaces of the corner module 8 and the coupling module 1, respectively, and secure them to the corner module 8 and the coupling module 1 using four M4*80 socket head cap screws. Install the cooling plate 14 onto the cathode 5. Install four anode needles 13 on each anode sleeve 11. Connect the discharge tube 7 directly to the anode sleeve 11 and the cathode 5, ensuring a good seal. Take a high borosilicate glass T-tube 9, insert the second sealing component 12 and O-ring into the long end, and the first sealing component 4 and O-ring into the short end. Use eight M4*70 flat washers to thread through the holes of the parts inserted sequentially at the short end. Connect the assembled high borosilicate glass T-tube 9 to the cathode mounting plate 6 and the high borosilicate glass cross tube 20, using four M4*60 flat washers for connection. Tighten the screws on the high borosilicate glass cross tube flange 19, and install the cathode heat dissipation ring and O-ring 39.69*3.53 onto the cathode 5.

[0029] Installation of optical components: Take three corner mirrors 25 and install them sequentially on the mirror mounts of corner modules 8, starting with the corner module closest to the light output port. Ensure that the center of each corner mirror 25 is on the optical axis and at a 45-degree angle to the optical axis. Install the tail mirror aperture 23 on the tail mirror 24 end of the coupling module 1. Remove the tail mirror 24, ensure its airtightness, and install it outside the tail mirror aperture 23, so that the mirror surface is perpendicular to the optical axis and its center position coincides with the optical axis. Install the output mirror aperture 3 on the output mirror 2 end of the coupling module 1. Remove the output mirror 2, ensure its airtightness, and install it outside the output mirror aperture 3, so that the mirror surface is perpendicular to the optical axis and its center position coincides with the optical axis.

[0030] A carbon dioxide laser is a type of laser that uses CO2 as its working medium. Its working principle involves introducing a suitable gas mixture, typically containing N2, He, and CO2, into a resonant cavity with a tail mirror and an output mirror. During laser generation, CO2 is the working gas, N2 increases the excitation efficiency of the upper energy level of the laser, and He lowers the temperature of the working gas, increasing the output power. The resonant cavity has charged electrodes that excite the CO2 molecules to discharge current, causing electrons in the CO2 to transition from higher energy levels to lower energy levels. During this transition, photons are released, and these photons generate laser light through resonance within the resonant cavity.

[0031] Its working principle can be divided into three steps: 1. Excitation process: Under the action of current discharge, electrons collide with CO2 molecules and excite them to an excited state. These excited-state molecules have high energy, and the number of high-energy electrons continuously increases within the resonant cavity. 2. Transition process: When excited-state CO2 molecules collide with other CO2 molecules, they undergo non-radiative collisional transitions to a lower excited state. During the transition, the CO2 molecules release specific photon energy. 3. Amplification process: One end of the resonant cavity is a partially reflected output window. Photons continuously resonate within the resonant cavity, increasing their amplitude, and are emitted as a laser beam through the window.

[0032] The present invention is further configured such that the anode sleeve 11 is made of alumina ceramic to avoid aging or corrosion caused by long-term high-voltage discharge.

[0033] The present invention is further configured such that the DOF module is used to connect the resonant cavity to the laser mounting bracket 21, and the DOF module is used to absorb deformation caused by mechanical or thermal expansion, thereby ensuring that the position of the light outlet is fixed and the optical axis direction is stable.

[0034] The present invention is further configured such that the resonant cavity is constructed with an Invar alloy material frame, the Invar alloy material having a low coefficient of thermal expansion, which is used to maintain dimensional stability in the range of 0-100°C and ensure the optical path accuracy of the resonant cavity.

[0035] The present invention is further configured such that a circulation channel for laser working gas is formed between the high borosilicate glass cross tube 20 and the high borosilicate glass T-tube 9. The efficient gas circulation through the turbo pump is used to maintain the low-temperature operating environment of the resonant cavity below 150°C and improve the output stability of the laser.

[0036] The present invention is further configured such that the DOF module is connected to the laser mounting bracket 21 via a hardened hemisphere 17, and the bottom of the hardened hemisphere 17 is provided with a star-shaped pad 18, a straight pad 27 and a flat pad 26 to distribute the load and maintain the balance of the resonant cavity.

[0037] The invention is further configured such that the rectangular structure of the overall resonant cavity frame is designed to achieve uniform gas circulation, and the symmetrically distributed corner mirrors 25 are used to optimize the laser optical path and improve the laser output quality. Specifically, the rectangular structure of the resonant cavity ensures that the pressure distribution at its inlet and outlet is maintained at a relatively balanced level. The corner mirrors in the optical path make the laser resonant cavity structure relatively compact and symmetrically distributed. The DOF module ensures that the laser outlet position remains unchanged and that the laser optical path propagates along the optical axis. The anode needles are positioned symmetrically at 90° within the anode sleeve, ensuring uniform discharge. The Invar alloy rod is used to connect the corner module and the coupling module because its coefficient of thermal expansion is the smallest in the 0-100°C range, ensuring minimal relative positional change between each module. The 99.7% pure Al2O3 ceramic discharge tube, anode sleeve, and cathode mounting plate are high-temperature resistant, corrosion resistant, and insulating, preventing the resonant cavity from aging due to long-term discharge. Example

[0038] Please see Figure 2 This exemplary method for operating a high-power CO2 gas laser, applied to the aforementioned high-power CO2 gas laser resonator, includes: S1: Power on the laser and start circulating cooling water; S2: Turn on the vacuum pump to pump the pressure inside the resonant cavity to 10 mbar to ensure that there are no impurities contaminating the cavity; S3: Fill the resonant cavity with the mixed gas Lasal42 until the pressure reaches 180mbar.

[0039] S4: Start the turbopump and simultaneously monitor the temperature of the bearings at both ends of the turbopump. Gradually increase the turbopump speed to 30,000 rpm, ensuring that the air-fuel mixture circulates for 6,000 m³ / h at this speed. 3 / h is used to fully cool the temperature inside the resonant cavity, ensuring it is below 150 degrees Celsius. During operation, the pressure ratio between the outlet and inlet of the turbine pump is maintained within the range of 1.6-1.7. S5: Once the turbine pump speed is normal, start the high-voltage switching power supply of the laser and dynamically monitor the voltage of the high-voltage power supply to maintain it above 18kV. At the same time, gradually increase the current of the high-voltage power supply until it reaches above 200mA. Use a power meter to dynamically monitor the power of the laser output port. S6: During laser operation, the changes in high-voltage power supply ripple are dynamically monitored to ensure that the ripple is maintained within a safe range, in order to prevent uneven discharge from affecting the laser output power. S7: When the laser stops working, disconnect the high-voltage power supply, stop the turbine operation, and backfill with N2 or mixed gas to one atmosphere.

[0040] The present invention is further configured such that the mixed gas Lasal42 includes N2, CO2 and He, wherein the contents of N2, CO2 and He are 19.3%, 3.7% and 77%, respectively.

[0041] The above embodiments can be implemented, in whole or in part, by software, hardware, firmware, or any other combination thereof. When implemented using software, the above embodiments can be implemented, in whole or in part, as a computer program product. The computer program product includes one or more computer instructions or computer programs. When the computer instructions or computer programs are loaded or executed on a computer, all or part of the processes or functions described in the embodiments of this application are generated. The computer can be a general-purpose computer, a special-purpose computer, a computer network, or other programmable device. The computer instructions can be stored in a computer-readable storage medium or transmitted from one computer-readable storage medium to another. For example, the computer instructions can be transmitted from one website, computer, server, or data center to another website, computer, server, or data center via wired (e.g., infrared, wireless, microwave, etc.) means. The computer-readable storage medium can be any available medium that a computer can access or a data storage device such as a server or data center that includes one or more sets of available media. The available medium can be a magnetic medium (e.g., floppy disk, hard disk, magnetic tape), an optical medium (e.g., DVD), or a semiconductor medium. A semiconductor medium can be a solid-state drive.

[0042] It should be understood that the term "and / or" in this article is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone. A and B can be singular or plural. Additionally, the character " / " in this article generally indicates an "or" relationship between the preceding and following related objects, but it can also represent an "and / or" relationship. Please refer to the context for a more accurate understanding.

[0043] In this application, "at least one" means one or more, and "more than one" means two or more. "At least one of the following" or similar expressions refer to any combination of these items, including any combination of single or multiple items. For example, at least one of a, b, or c can mean: a, b, c, ab, ac, bc, or abc, where a, b, and c can be single or multiple.

[0044] It should be understood that in the various embodiments of this application, the order of the above-mentioned processes does not imply the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of this application.

[0045] Those skilled in the art will recognize that the units and algorithm steps of the various examples described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are implemented in hardware or software depends on the specific application and design constraints of the technical solution. Those skilled in the art can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of this application.

[0046] Those skilled in the art will understand that, for the sake of convenience and brevity, the specific working processes of the systems, devices, and units described above can be referred to the corresponding processes in the foregoing method embodiments, and will not be repeated here.

[0047] In the several embodiments provided in this application, it should be understood that the disclosed system can be implemented in other ways. For example, the device embodiments described above are merely illustrative. For instance, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the coupling or direct coupling or communication connection shown or discussed may be through some interfaces; the indirect coupling or communication connection between devices or units may be electrical, mechanical, or other forms.

[0048] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0049] In addition, the functional units in the various embodiments of this application can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit.

[0050] If the aforementioned functions are implemented as software functional units and sold or used as independent products, they can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or a portion of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of this application. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

[0051] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A resonant cavity for a high-power CO2 gas laser, characterized in that, include: The coupling module (1) is equipped with an output mirror (2) and a tail mirror (24). The output mirror (2) is provided with an output mirror aperture (3), and the tail mirror (24) is provided with a tail mirror aperture (23). The output mirror (2) and the tail mirror (24) are fixed to the coupling module (1) by a mirror mount and a sealing O-ring. Three corner modules (8), each corner module (8) is equipped with a corner mirror (25), the corner mirror (25) is fixed to the corner module (8) by a mirror mount and a sealing O ring, the three corner modules (8) and a coupling module (1) together form a rectangular four-corner structure; The discharge tube (7) is used to connect to the corner module (8) to form a channel for gas discharge; The cathode (5) is mounted on the discharge tube (7) via the cathode mounting plate (6); The anode sleeve (11) is installed on the discharge tube (7) at a position opposite to the cathode (5), and the anode needle (13) is installed on the anode sleeve (11); A high borosilicate glass T-tube (9) is connected at both ends between two cathodes (5) and at the third end to a high borosilicate glass cross tube (20) for distributing and connecting discharge gas; The high borosilicate glass cross tube (20) is mounted on the laser mounting bracket (21) through the high borosilicate glass cross tube flange (19), and together with the high borosilicate glass T-tube (9), it forms the circulation path of the discharge gas; The first sealing assembly (4) is used to seal the connection between the high borosilicate glass T-tube (9) and the discharge tube (7); The second sealing assembly (12) is used to seal the connection between the high borosilicate glass T-tube (9) and the high borosilicate glass cross tube (20); A double-layer Invar alloy rod (10) connects the coupling module (1) and the corner module (8), and the two corner modules (8) form a rectangular structural frame to ensure that the deformation of the overall structure of the resonant cavity is minimized; wherein, the inner ring of the Invar alloy rod (10) is connected by the Invar alloy rod bidirectional clamp (16), and the outer ring is connected by the Invar alloy rod unidirectional clamp (15). A hardened hemisphere (17) is set on the coupling module (1) and the corner module (8). The pads configured at the bottom of the hardened hemisphere (17) include a cross-shaped pad (18), a straight pad (27), and a flat pad (26), which are respectively set at the bottom of one adjacent corner module (8) of the coupling module (1) and the bottom of the other two corner modules (8). A cathode pad (22) is placed at the bottom of the cathode (5) and fixed on the laser mounting bracket (21); The laser mounting bracket (21) is set at the bottom of the resonant cavity and connected to the resonant cavity through the DOF module. It is used to eliminate deformation caused by mechanical or thermal expansion, and to ensure that the position of the light outlet is fixed and the direction of the optical axis does not change. The aperture, including the output mirror aperture (3) and the tail mirror aperture (23), is used to eliminate processing defects in the resonant cavity and improve the quality of the laser beam; All components are secured with fasteners to ensure structural stability and sealing.

2. The high-power CO2 gas laser resonator according to claim 1, characterized in that, The anode sleeve (11) is made of alumina ceramic to prevent aging or corrosion caused by long-term high-voltage discharge.

3. The high-power CO2 gas laser resonator according to claim 1, characterized in that, The DOF module is used to connect the resonant cavity to the laser mounting bracket (21). The DOF module is used to absorb deformation caused by mechanical or thermal expansion, thereby ensuring that the position of the light outlet is fixed and the optical axis direction is stable.

4. The high-power CO2 gas laser resonator according to claim 1, characterized in that, The resonant cavity is constructed with an Invar alloy frame, which has a low coefficient of thermal expansion to maintain dimensional stability within the 0-100°C range and ensure the optical path accuracy of the resonant cavity.

5. The high-power CO2 gas laser resonator according to claim 1, characterized in that, The high borosilicate glass cross tube (20) and the high borosilicate glass T-tube (9) form a circulation channel for the laser working gas. The efficient gas circulation through the turbo pump is used to maintain the low temperature operating environment of the resonant cavity below 150°C and improve the output stability of the laser.

6. The high-power CO2 gas laser resonator according to claim 3, characterized in that, The DOF module is connected to the laser mounting bracket (21) via a hardened hemisphere (17). The bottom of the hardened hemisphere (17) is provided with a cross-shaped pad (18), a straight pad (27), and a flat pad (26) to distribute the load and maintain the balance of the resonant cavity.

7. The resonant cavity for a high-power CO2 gas laser according to claim 1, characterized in that, The rectangular structure of the overall resonant cavity frame is designed to achieve uniform gas circulation, and the symmetrically distributed corner mirrors (25) are used to optimize the laser optical path and improve the laser output quality.

8. A method for operating a high-power CO2 gas laser, applied to a resonant cavity of a high-power CO2 gas laser as described in any one of claims 1-7, characterized in that, include: S1: Power on the laser and start circulating cooling water; S2: Turn on the vacuum pump to pump the pressure inside the resonant cavity to 10 mbar to ensure that there are no impurities contaminating the cavity; S3: The mixed gas Lasal42 is introduced into the resonant cavity to a pressure of 180 mbar, wherein the mixed gas Lasal42 includes N2, CO2 and He, and the contents of N2, CO2 and He are 19.3%, 3.7% and 77%, respectively; S4: Start the turbopump and simultaneously monitor the temperature of the bearings at both ends of the turbopump. Gradually increase the turbopump speed to 30,000 rpm, ensuring that the air-fuel mixture circulates for 6,000 m³ / h at this speed. 3 / h is used to fully cool the temperature inside the resonant cavity, ensuring it is below 150 degrees Celsius. During operation, the pressure ratio between the outlet and inlet of the turbine pump is maintained within the range of 1.6-1.

7. S5: Once the turbine pump speed is normal, start the high-voltage switching power supply of the laser and dynamically monitor the voltage of the high-voltage power supply to maintain it above 18kV. At the same time, gradually increase the current of the high-voltage power supply until it reaches above 200mA. Use a power meter to dynamically monitor the power of the laser output port. S6: During laser operation, the changes in high-voltage power supply ripple are dynamically monitored to ensure that the ripple is maintained within a safe range, in order to prevent uneven discharge from affecting the laser output power. S7: When the laser stops working, disconnect the high-voltage power supply, stop the turbine operation, and backfill with N2 or mixed gas to one atmosphere.

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