A piezoelectric thin film polarization device and polarization method
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- WUHAN PARTULAB TECH CO LTD
- Filing Date
- 2026-02-02
- Publication Date
- 2026-06-09
Smart Images
Figure CN122180303A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of piezoelectric thin film polarization technology, specifically to a piezoelectric thin film polarization device and polarization method. Background Technology
[0002] Polarization is an important step in thin film material processing. Its main purpose is to make the randomly oriented molecular dipole moments in the thin film material uniformly oriented in a specific direction, thereby giving the thin film material piezoelectric properties.
[0003] CN206639814U discloses a polymer thin film polarization device for polarizing a polymer thin film formed in situ on a substrate. The device includes an X-ray generator, an electric field assembly, a stage for supporting an object, and a second potential controller. The X-ray generator provides X-rays, and the stage for supporting the polymer thin film to be polarized is grounded and has a zero potential. The electric field assembly includes a high-voltage electric field end and a low-voltage electric field end. The high-voltage electric field end is located above the stage for supporting the object, and the low-voltage electric field end is located between the high-voltage electric field end and the stage for supporting the object. The potential of the high-voltage electric field end is higher than that of the low-voltage electric field end. The second potential controller controls the potential of the low-voltage electric field end. The ambient gas above the stage for supporting the object can be ionized by X-rays and moves under the electric field formed by the electric field assembly, depositing on the surface of the polymer thin film formed in situ on the substrate. This creates an intrafilm electric field along the thickness direction of the polymer thin film, thereby completing the polarization of the polymer thin film.
[0004] The electric field assembly includes a high-voltage electric field end and a low-voltage electric field end. The ambient gas above the article support stage can be ionized by X-rays and move under the electric field formed by the electric field assembly, and deposited on the surface of the polymer film formed in situ on the substrate. This creates an intrafilm electric field along the thickness direction of the polymer film, thereby completing the polarization of the polymer film. However, since the electric field formed by the electric field assembly cannot be made uniform, the polarization effect in different regions of the film will be different, affecting the polarization effect of the film. Summary of the Invention
[0005] The purpose of this invention is to overcome the above-mentioned technical deficiencies and propose a piezoelectric thin film polarization device and polarization method to solve the technical problem that the uneven polarization electric field in the prior art leads to inconsistent polarization effects in different regions of the thin film.
[0006] To achieve the above-mentioned technical objectives, the present invention adopts the following technical solution:
[0007] In a first aspect, the present invention provides a piezoelectric thin film polarization device, including a frame, a corona component, a clamping component, and a moving component. The corona component is configured to corona polarize the thin film; the clamping component is configured to fix the thin film to be polarized; the moving component is connected to the frame and to the corona component and / or the clamping component, and is configured to drive the clamping component to move relative to the corona component in a plane parallel to the corona component.
[0008] In one embodiment, the moving component is also capable of driving the corona component and the clamping component to move closer and further apart.
[0009] In one embodiment, the corona assembly includes a first frame, a plurality of corona wires, and a metal mesh, wherein the plurality of corona wires are all connected to the first frame and are arranged parallel to each other; the mesh is disposed between the corona wires and the clamping assembly.
[0010] In one embodiment, the corona assembly further includes a second frame and a plurality of tensioning members. The second frame is connected to the first frame and is arranged around the mesh. The plurality of tensioning members are arranged around the mesh. Each tensioning member includes a clamping strip, a fixing strip, at least two elastic portions, and at least two adjusting screws. The clamping strip is connected to the mesh. The fixing strip is spaced apart from the clamping strip. The elastic portion is connected to the clamping strip and the fixing strip. The threaded end of the adjusting screw can rotatably pass through the second frame and is threadedly connected to the fixing strip.
[0011] In one embodiment, the corona assembly further includes a reinforcing rib, a fixing rib, and a locking screw. The reinforcing rib is disposed in the middle of the mesh and connected to the second frame. A reinforcing groove is provided on the side of the reinforcing rib facing the mesh. The shape of the fixing rib matches the shape of the reinforcing groove and is disposed opposite to the reinforcing groove. The threaded end of the locking screw passes through the reinforcing rib and is threadedly connected to the fixing rib.
[0012] In one embodiment, the clamp assembly includes a clamp frame, a plurality of tension blocks, a plurality of elastic elements, and a plurality of pushers. The plurality of tension blocks are circumferentially spaced along the clamp frame. The elastic elements connect the tension blocks and the clamp frame and are used to provide elastic force to the tension blocks as they approach the clamp frame. The pushers connect to the tension blocks and abut against the clamp frame and are configured to push the tension blocks to move away from the clamp frame.
[0013] In one embodiment, the corona assembly includes a frame and multiple corona modules. The frame is connected to the moving assembly, and the multiple corona modules are spaced apart along the Y-axis direction on the frame. Each corona module includes a groove, two insulating members, a corona wire, and an etching mesh. The groove has a through slot, which opens towards the clamping assembly. The two insulating members are located at both ends of the groove and connected to it. The corona wire is embedded in the through slot and arranged along the length of the through slot. The corona wire is fixed to the two insulating members. The etching mesh is located at the open end of the groove and connected to the two insulating members at both ends.
[0014] In one embodiment, two strip grooves are provided at both ends of the etched mesh, and the corona module further includes two first adjusting members. The two first adjusting members are disposed at both ends of the etched mesh. The first adjusting member includes an adjusting plate and a tensioning screw. The adjusting plate has an oval hole along the length of the through groove, and hooks that slide in the strip groove are formed on both sides of the adjusting plate. The threaded end of the tensioning screw passes through the oval hole and is threadedly connected to the insulating member.
[0015] In one embodiment, the corona module further includes two fixing blocks, two second adjusting members, and a spring. The two fixing blocks are slidably connected to the two insulating members along the length of the through groove. The second adjusting members correspond one-to-one with the fixing blocks and connect the fixing blocks and the insulating members, thereby driving the fixing blocks to slide along the length of the through groove to adjust the fixed position of the fixing blocks along the length of the through groove. The two sides of the corona wire are respectively sleeved on the two fixing blocks. The insulating component has a sliding groove along the length of the through groove, the fixing block is slidably embedded in the sliding groove, the fixing block has a limiting groove on each side wall of the sliding groove, the limiting groove is arranged along the length of the through groove, and the two sides of the corona wire are respectively embedded between the limiting groove and the inner wall of the sliding groove. One end of the spring is connected to the fixing block, and the other end of the spring is in the shape of a hook. The hooked end of the spring hooks the corona wire, and the spring is used to provide elastic tension to the corona wire.
[0016] Secondly, the present invention also provides a piezoelectric thin film polarization method, which utilizes the above-mentioned piezoelectric thin film polarization device and includes the following steps: The thin film to be polarized is fixed to the fixture assembly; By energizing the corona component, a polarization electric field is formed at the thin film to be polarized; The clamping assembly and the thin film to be polarized are driven by the moving component to move or rotate in a W-shape in a plane parallel to the corona assembly.
[0017] Compared with the prior art, the piezoelectric thin film polarization device and polarization method provided by the present invention use a clamping assembly to clamp and fix the thin film to be polarized, keeping it in a flat and stretched state. After the corona assembly is energized, its corona wire generates corona discharge under high voltage, ionizing the air and forming a strong electric field near the surface of the thin film, causing the dipoles inside the thin film to align along the direction of the electric field, thus achieving polarization. The moving assembly drives the clamping assembly to move the thin film to be polarized in a plane parallel to the corona assembly, so that different areas of the thin film surface are exposed to the corona electric field in sequence, achieving uniform and continuous polarization treatment.
[0018] By moving relative to each other in the plane, each region of the thin film to be polarized is subjected to corona treatment in sequence, avoiding the problem of inconsistent polarization caused by uneven distribution of corona electric field or local dwell of the thin film; the relative position of the thin film and the corona component changes continuously during the movement, effectively eliminating the problem of inconsistent polarization effect that may be caused by static polarization, and improving the consistency of the piezoelectric properties of the thin film. Attached Figure Description
[0019] Figure 1 This is a schematic diagram of the structure of a piezoelectric thin film polarization device provided in an embodiment of the present invention; Figure 2 This is a schematic diagram of the structure of a piezoelectric thin film polarization device provided in an embodiment of the present invention; Figure 3 This is a schematic diagram of the corona component in a piezoelectric thin film polarization device according to an embodiment of the present invention; Figure 4 This is a schematic diagram of the corona module in a piezoelectric thin film polarization device according to an embodiment of the present invention; Figure 5 This is a schematic diagram of the corona module in a piezoelectric thin film polarization device according to an embodiment of the present invention; Figure 6 yes Figure 5 A magnified view of a portion of point G in the middle; Figure 7 This is a schematic diagram of a partial structure of the corona module in a piezoelectric thin film polarization device provided in an embodiment of the present invention; Figure 8 This is a schematic diagram of a partial structure of the corona module in a piezoelectric thin film polarization device provided in an embodiment of the present invention; Figure 9 yes Figure 8 A magnified view of a portion of point H in the middle; Figure 10 This is a schematic diagram of the structure of the insulating component, the fixing block, and the first adjusting component in a piezoelectric thin film polarization device according to an embodiment of the present invention; Figure 11This is a schematic diagram of the structure of a piezoelectric thin film polarization device provided in an embodiment of the present invention; Figure 12 This is a schematic diagram of the structure of a piezoelectric thin film polarization device provided in an embodiment of the present invention; Figure 13 yes Figure 12 A magnified view of a portion of point A in the middle; Figure 14 This is a schematic diagram of the structure of the grid, second frame, tensioning member, reinforcing rib, fixing rib and locking screw in the piezoelectric thin film polarization device provided in an embodiment of the present invention; Figure 15 yes Figure 14 A magnified view of a portion of point B in the middle; Figure 16 This is a schematic diagram of the fixture assembly in a piezoelectric thin film polarization device according to an embodiment of the present invention; Figure 17 It is along Figure 16 A sectional view of the C-C line in the middle; Figure 18 yes Figure 17 A magnified view of a portion of point D in the middle; Figure 19 This is a schematic diagram of the Z-axis moving mechanism and corona assembly in a piezoelectric thin film polarization device provided in an embodiment of the present invention; Figure 20 This is a schematic diagram of the Z-axis moving mechanism and corona assembly in a piezoelectric thin film polarization device provided in an embodiment of the present invention; Figure 21 This is a schematic diagram of the structure of the grid, second frame, tensioning member, reinforcing rib, fixing rib and locking screw in the piezoelectric thin film polarization device provided in an embodiment of the present invention; Figure 22 It is along Figure 21 A sectional view along line E-E in the middle; Figure 23 yes Figure 22 A magnified view of a portion of point F in the middle.
[0020] Explanation of reference numerals in the attached figures: Rack 1; Corona assembly 2; First frame 21; Corona wire 22; Mesh 23; Second frame 24; Tensioner 25; Clamping bar 251; Fixing bar 252; Elastic part 253; Tensioning screw 254; Reinforcing rib 26; Fixing rib 27; Locking screw 28; Frame 2a; Corona module 2c; Groove 2c1; Through groove 2c11; Insulating part 2c2; Slide groove 2c21; Corona wire 2c3; Etched mesh 2c4; Strip groove 2c41; First adjusting part 2c5; Adjusting plate 2c51; Tensioning screw 2c52; Hook 2c53; Fixing block 2c6; Limiting groove 2c61; Second adjusting part 2c7; Spring 2c8; Clamp assembly 3; clamp frame 31; tension block 32; elastic element 33; stepped screw 331; fixing spring 332; pusher 34; sleeve 341; pin 342; push spring 343; tension screw 344; spring ball 35; Moving component 4; X-axis moving mechanism 41; Y-axis moving mechanism 42; Z-axis moving mechanism 43; first guide rod 431; lead screw 432; slider 433; connecting rod 434; first pulley 435; second pulley 436; belt 437; first motor 438; second motor 439; second guide rod 43a; linear drive component 43b; platform 44; positioning hole 44a; rotating mechanism 45. Detailed Implementation
[0021] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the invention.
[0022] To address the technical problem of inconsistent polarization effects in different regions of a thin film due to non-uniform polarization electric field, this invention provides a piezoelectric thin film polarization device and method that can achieve uniform polarization of the thin film.
[0023] It should be noted that the piezoelectric thin film polarization device and polarization method described in this invention are used for, but not limited to, the polarization of thin films. For ease of explanation, this invention will only use the application of the piezoelectric thin film polarization device and polarization method to thin film polarization as an example. The principle of the piezoelectric thin film polarization device and polarization method applied to other types of equipment is essentially the same as that applied to thin film polarization, and will not be described in detail here.
[0024] Please see Figure 11 , Figure 11 This is a schematic diagram of the structure of a piezoelectric thin film polarization device in one embodiment of the present invention. In one embodiment, the piezoelectric thin film polarization device includes a frame 1, a corona component 2, a clamping component 3, and a moving component 4. The corona component 2 is configured to corona polarize the thin film; the clamping component 3 is configured to fix the thin film to be polarized; the moving component 4 is connected to the frame 1 and to the corona component 2 and / or the clamping component 3, and is configured to drive the clamping component 3 to move relative to the corona component 2 in a plane parallel to the corona component 2.
[0025] The clamping assembly 3 clamps and fixes the film to be polarized, keeping it in a flat and stretched state. After the corona assembly 2 is energized, its corona wire generates corona discharge under high voltage, ionizing the air and forming a strong electric field near the surface of the film. This causes the dipoles inside the film to align along the direction of the electric field, thus achieving polarization. The moving assembly 4 drives the clamping assembly 3 to move the film to be polarized in a plane parallel to the corona assembly 2, so that different areas of the film surface are exposed to the corona electric field in sequence, achieving uniform and continuous polarization treatment.
[0026] Through relative movement within the plane, each region of the thin film to be polarized is sequentially subjected to corona treatment, avoiding inconsistencies in polarization caused by uneven distribution of the corona electric field or localized stagnation of the thin film. During the movement, the relative position of the thin film and the corona component 2 continuously changes, effectively eliminating the inconsistency in polarization effects that may occur with static polarization and improving the consistency of the thin film's piezoelectric properties. The fixture component 3 or the thin film to be polarized can be grounded to prevent the entire thin film and its contact components (fixture component 3 and stage) from carrying extremely high floating potentials.
[0027] like Figure 11 and Figure 12 As shown, in one embodiment, the moving component 4 can also drive the corona component 2 and the clamping component 3 to move closer and further apart. The moving component 4 can achieve this by using a lifting slide, a lead screw mechanism, or a cylinder, etc.
[0028] The moving component 4 is connected to the corona component 2 and / or the clamping component 3, enabling precise control of the distance between them. The electric field strength generated by corona discharge is related to the spacing. By adjusting this distance, the polarization electric field strength acting on the thin film can be directly and linearly controlled. In-plane movement solves the problem of in-plane uniformity, and spacing adjustment solves the problem of field strength depth. The combination of in-plane movement and spacing adjustment allows for fine-tuning of the spacing according to the needs of the region during polarization to achieve gradient polarization or compensate for the effects of substrate unevenness.
[0029] It should be understood that the moving component 4 can be a three-axis moving mechanism, which is connected to the corona component 2 or the clamping component 3, thereby controlling the clamping component 3 to achieve the above-mentioned movement relative to the corona component 2; the moving component 4 can also be a robotic arm, the movable end of which is connected to the corona component 2 or the clamping component 3, thereby controlling the clamping component 3 to achieve the above-mentioned movement relative to the corona component 2.
[0030] like Figure 11As shown, specifically, in one embodiment, the moving component 4 includes an X-axis moving mechanism 41, a Y-axis moving mechanism 42, and a Z-axis moving mechanism 43. The fixed end of the X-axis moving mechanism 41 is connected to the frame 1, the fixed end of the Y-axis moving mechanism 42 is connected to the movable end of the X-axis moving mechanism, and the fixed end of the Y-axis moving mechanism 42 is connected to the clamping assembly 3 for driving the clamping assembly 3 to move along the X-axis and Y-axis. The fixed end of the Z-axis moving mechanism 43 is connected to the frame 1, and the movable end is connected to the corona electrode assembly 2 for driving the corona electrode assembly 2 to move along the Z-axis. The X-axis, Y-axis, and Z-axis are perpendicular to each other.
[0031] Among them, the X-axis moving mechanism 41, the Y-axis moving mechanism 42 and the Z-axis moving mechanism 43 can be a combination of servo motor and ball screw, or a combination of servo motor and synchronous belt, etc.
[0032] like Figure 19 and Figure 20 As shown, specifically, in one embodiment, the Z-axis moving mechanism 43 includes multiple first guide rods 431, multiple lead screws 432, multiple sliders 433, multiple connecting rods 434, multiple first pulleys 435, two second pulleys 436, two belts 437, a first motor 438, and a second motor 439. The multiple first guide rods 431 are arranged parallel to each other and connected to the frame 1. The multiple lead screws 432 are arranged parallel to each other and rotatably connected to the frame 1. The lead screws 432 are arranged parallel to the first guide rods 431. The sliders 433 are slidably connected to the first guide rods 431 along the guide of the first guide rods 431 and are threadedly connected to the lead screws 432. Each slider... 433 corresponds to two lead screws 432 and a first guide rod 431. The connecting rod 434 connects the slider 433 and the corona component 2. Multiple first pulleys 435 are respectively sleeved on multiple lead screws 432. Two second pulleys 436 can be rotatably connected to the frame 1. Two belts 437 pass around one first pulley 435 corresponding to each slider 433 in sequence, and also pass around one second pulley 436. Another belt 437 passes around one first pulley 435 corresponding to each slider 433 in sequence, and also passes around one second pulley 436. The first motor 438 is fixed to the frame 1 and connected to one second pulley 436. The second motor 439 is fixed to the frame 1 and connected to another second pulley 436.
[0033] When overall lifting is required, the first motor 438 and the second motor 439 are started. The first motor 438 and the second motor 439 drive the second pulley 436 connected to them to rotate, which in turn drives all the first pulleys 435 connected to them to rotate synchronously through two independent belts 437. The first pulleys 435 drive the lead screw 432 to rotate. The slider 433, which is threaded with the lead screw 432, converts the rotational motion of the lead screw 432 into its own linear lifting motion under the constraint of the first guide rod 431. All sliders 433 are rigidly connected to the corona assembly 2 through the connecting rod 434, thereby driving the entire corona assembly 2 to rise and fall vertically smoothly and synchronously like a rigid platform.
[0034] By controlling the first motor 438 and the second motor 439 to generate a small speed difference, a small opposing torque is generated on the lead screw 432 on the same slider 433. These two opposing torques counteract each other inside the slider 433, establishing an adjustable electronic preload. The slider 433 will not experience any backlash or jerking, and the motion response is timely and linear, thus completely eliminating the sway caused by the gap.
[0035] like Figure 1 and Figure 2 As shown, in one embodiment, the moving component 4 includes a Y-axis moving mechanism 42, a Z-axis moving mechanism 43, and a rotating mechanism 45. The fixed end of the Y-axis moving mechanism 42 is connected to the frame 1, and the moving end of the Y-axis moving mechanism 42 can move relative to the fixed end along the Y-axis direction. The fixed end of the rotating mechanism 45 is connected to the moving end of the Y-axis moving mechanism 42, and the rotating end of the rotating mechanism 45 is connected to the clamping assembly 3, with the rotating axis perpendicular to the Y-axis. The fixed end of the Z-axis moving mechanism 43 is connected to the frame 1, and the moving end is connected to the corona electrode assembly 2, used to drive the corona electrode assembly 2 to move along the Z-axis. The Z-axis is parallel to the rotating axis and perpendicular to the Y-axis. The Y-axis moving mechanism 42 and the Z-axis moving mechanism 43 can be a combination of a servo motor and a ball screw, a combination of a servo motor and a synchronous belt, or a hydraulic cylinder and a pneumatic cylinder, etc. The rotating mechanism 45 can be a direct drive motor, a combination of a motor and a reducer, or a rotary table, etc.
[0036] By setting up a Y-axis moving mechanism 42, a Z-axis moving mechanism 43, and a rotating mechanism 45, the Y-axis moving mechanism 42 can drive the clamping assembly 3 and the film to be polarized to move along the Y-axis, so that the film to be polarized can move to below the corona assembly 2 or detach from below the corona assembly 2; the Z-axis moving mechanism 43 can drive the corona assembly 2 to move closer to or further away from the film to be polarized, adjusting the distance between the corona assembly 2 and the film to be polarized; by setting up a rotating mechanism 45, the rotating mechanism 45 can drive the film to be polarized to rotate. During the rotation of the film to be polarized, it can alternately pass through the electric field of different parts of the corona assembly 2, so that the film to be polarized is uniform in all directions in the entire plane, so that the film is uniformly polarized; at the same time, during the rotation of the rotating mechanism 45, it can also be combined with the Y-axis moving mechanism 42 to move along the Y-axis, and combined with the Z-axis moving mechanism 43 to control the raising and lowering of the corona assembly 2, so that the center of the film to be polarized is in different electric field parts of the corona assembly 2, which is beneficial to the uniform polarization of the film to be polarized.
[0037] like Figure 1 and Figure 2 As shown, in one embodiment, the Z-axis moving mechanism 43 includes a plurality of second guide rods 43a and a linear drive member 43b. The plurality of second guide rods 43a are parallel to each other and spaced apart. One end of the plurality of second guide rods 43a is connected to the frame 1, and the other end is slidably connected to the corona assembly 2. The linear drive member 43b is connected to the frame 1 and the corona assembly 2 and is used to drive the corona assembly 2 to move along the Z-axis. The linear drive member 43b can be an electric push rod, a cylinder, or a hydraulic cylinder, etc. The Y-axis is arranged horizontally, and the rotation axis and Z-axis are arranged vertically.
[0038] When it is necessary to control the raising and lowering of the corona component 2, the linear drive 43b is activated, which drives the corona component 2 to rise and fall. The corona component 2 slides relative to the multiple second guide rods 43a, which guide the movement of the corona component 2.
[0039] like Figure 3 As shown, in one embodiment, the corona assembly 2 includes a frame 2a and a plurality of corona modules 2c, which are spaced apart along the Y-axis direction on the frame 2a. The frame 2a is slidably fitted onto a plurality of second guide rods 43a, and a linear drive member 43b connects the frame 1 and the frame 2a.
[0040] Multiple modules are combined to form a wide processing surface. By distributing the multiple modules at intervals, a highly consistent corona treatment effect can be obtained throughout the width direction, avoiding the edge effect and unevenness in the middle that are common in single wide discharge devices.
[0041] like Figure 4 , Figure 5 and Figure 6As shown, in one embodiment, the corona module 2c includes a groove 2c1, two insulating members 2c2, a corona wire 2c3, and an etching mesh 2c4. The groove 2c1 has a through groove 2c11, which opens towards the clamp assembly 3. The two insulating members 2c2 are located at both ends of the groove 2c1 and connected to it. The corona wire 2c3 is embedded in the through groove 2c11 and arranged along its length. The corona wire 2c3 is fixed to the two insulating members 2c2. The etching mesh 2c4 is located at the open end of the groove 2c1 and connected to the two insulating members 2c2 at both ends. The etching mesh 2c4 is a metal structure. The groove 2c1 can be a metal structure or an insulating structure.
[0042] Specifically, the corona wire 2c3 is energized, the metal tank 2c1 serves as the grounded cathode, and the insulating component 2c2 ensures reliable isolation between the high-voltage corona wire 2c3 and the grounded metal tank 2c1, effectively preventing short circuits. The through-slot 2c11 design concentrates the electric field in the opening direction, improving the efficiency and controllability of corona discharge. The etching mesh 2c4 is located at the opening end of the tank 2c1, which can homogenize the electric field distribution, avoid arc discharge, and make the corona treatment more uniform.
[0043] like Figure 9 and Figure 10 As shown, in one embodiment, two strip grooves 2c41 are provided at both ends of the etched mesh 2c4. The corona module 2c also includes two first adjusting members 2c5. The two first adjusting members 2c5 are provided at both ends of the etched mesh 2c4. The first adjusting member 2c5 includes an adjusting plate 2c51 and a tensioning screw 2c52. The adjusting plate 2c51 has an oval hole along the length of the through groove 2c11. Hooks 2c53 that slide and hook into the strip groove 2c41 are formed on both sides of the adjusting plate 2c51. The threaded end of the tensioning screw 2c52 passes through the oval hole and is threadedly connected to the insulating member 2c2.
[0044] The two ends of the etched mesh 2c4 are hooked by the hook 2c53 of the adjusting plate 2c51. Then, the position of the adjusting plate 2c51 is moved. After moving to the set position, the tensioning screw 2c52 is passed through the oval hole and threaded to the insulating part 2c2. The two ends of the etched mesh 2c4 are fixed to the insulating part 2c2, which realizes the tensioning of the etched mesh 2c4 and can fix the tensioned etched mesh 2c4.
[0045] like Figure 9 and Figure 10As shown, in one embodiment, the corona module 2c further includes two fixing blocks 2c6 and two second adjusting members 2c7. The two fixing blocks 2c6 are slidably connected to two insulating members 2c2 along the length direction of the through groove 2c11. The second adjusting members 2c7 correspond one-to-one with the fixing blocks 2c6 and connect the fixing blocks 2c6 and the insulating members 2c2, and can drive the fixing blocks 2c6 to slide along the length direction of the through groove 2c11 to adjust the fixed position of the fixing blocks 2c6 along the length direction of the through groove 2c11. The two sides of the corona wire 2c3 are respectively sleeved on the two fixing blocks 2c6. The corona wire 2c3 can be annular or linear. In this embodiment, the corona wire 2c3 is annular.
[0046] The second adjusting component 2c7 can precisely drive the fixed block 2c6 to slide, thereby actively and continuously maintaining the optimal tension of the corona wire 2c3, ensuring the long-term stability of the discharge intensity and treatment effect. The annular corona wire 2c3 is sleeved on the fixed block 2c6. During installation and disassembly, the position of the fixed block 2c6 is adjusted, and then the annular corona wire 2c3 is sleeved on or detached from the fixed block 2c6. The installation, replacement, and tensioning of the corona wire 2c3 are simple, reliable, and convenient.
[0047] It should be understood that the fixed block 2c6 and the insulating part 2c2 can be slidably connected through the groove 2c21, the slide rail, or the guide rod and guide hole. Specifically, the insulating part 2c2 has a groove 2c21 along the length of the through groove 2c11, and the fixed block 2c6 is slidably embedded in the groove 2c21. The second adjusting part 2c7 can be an electric push rod, a cylinder, or a hydraulic cylinder, etc. Specifically, the second adjusting part 2c7 is a bolt. The threaded end of the bolt can rotate through the insulating part 2c2 and be threadedly connected to the fixed block 2c6. By rotating the bolt, the position of the fixed block 2c6 along the length of the through groove 2c11 can be adjusted.
[0048] like Figure 9 and Figure 10 As shown, in one embodiment, the fixing block 2c6 has a limiting groove 2c61 on both sides of the sliding groove 2c21. The limiting groove 2c61 is arranged along the length direction of the through groove 2c11. The two sides of the annular corona wire 2c3 are respectively embedded between the limiting groove 2c61 and the inner wall of the sliding groove 2c21.
[0049] By setting a limiting groove 2c61, the inner wall of the limiting groove 2c61 and the sliding groove 2c21 are combined to form a channel that restricts the corona wire 2c3 from sliding along the direction of the vertical through groove 2c11, thus preventing the corona wire 2c3 from moving along the direction of the vertical through groove 2c11, and also ensuring that the corona wire 2c3 can slide along the length direction of the limiting groove 2c61 without obstructing the adjustment of the tightness of the corona wire 2c3.
[0050] like Figure 8 and Figure 9 As shown, in one embodiment, the corona module 2c further includes a spring 2c8, one end of which is connected to the fixing block 2c6, and the other end of which is hooked. The hooked end of the spring 2c8 hooks onto the corona wire 2c3, and the spring 2c8 is used to provide elastic tension to the corona wire 2c3.
[0051] When the corona wire 2c3 is in operation, it heats up due to the current passing through it, causing thermal expansion. The spring 2c8 can immediately and automatically absorb this increase in length, converting it into elastic potential energy to maintain tension, rather than causing relaxation that leads to a decrease in tension. This ensures that the discharge intensity remains stable throughout the process. When the corona wire 2c3 is under high tension for a long time, the material will undergo slight plastic creep. The continuous elastic force provided by the spring 2c8 can actively and gradually compensate for this irreversible relaxation, so that the corona wire 2c3 is effectively and stably tensioned, preventing the corona wire 2c3 from relaxing. Vibration during equipment operation or shaking during material conveyor belt movement may cause high-frequency micro-vibration of the corona wire 2c3. As a damping buffer, spring 2c8 can effectively suppress these disturbances, making the movement of corona wire 2c3 smoother and the discharge more concentrated and uniform. In extreme cases such as cold start, corona wire 2c3 is not fully heated. If the initial tension is set too high, its thermal expansion may cause a surge in stress. The elasticity of spring 2c8 provides a safety margin, preventing the tension from rising uncontrollably and protecting corona wire 2c3 from the risk of overload breakage.
[0052] like Figure 19 As shown, in one embodiment, the corona assembly 2 includes a first frame 21 and a plurality of corona wires 22, all of which are connected to the first frame 21 and are arranged in parallel to each other.
[0053] When the high voltage power supply applies the same high voltage to all the corona wires 22, a strong corona discharge is generated around each corona wire 22. Since the multiple corona wires 22 are arranged in parallel, they together form a strip-shaped corona discharge region above the film, covering the entire electrode array. When the film moves in a plane parallel to this array of corona wires 22, the surface of the film is sequentially swept across this strong electric field region generated by the multiple corona wires 22, thereby achieving polarization treatment of the entire film area.
[0054] Compared to a single corona wire 22 or a needle-tip electrode, a parallel array of multiple corona wires 22 can generate a polarized electric field over a wider area at once; the thin film can be fully processed with only one or fewer scans.
[0055] like Figure 14 , 19 , Figure 21As shown, in one embodiment, the corona assembly 2 further includes a metal mesh 23 disposed between the corona wire 22 and the clamp assembly 3.
[0056] The electric field generated by the corona wire 22 under high voltage is non-uniform. The electric field lines need to pass through the metal grid 23 to reach the thin film to be polarized. The metal grid 23, as an equipotential body, is grounded and has zero potential, thus homogenizing the originally non-uniform electric field and forming a more uniform electrostatic field with a direction more perpendicular to the thin film surface. The metal grid 23 divides the space between the corona wire 22 and the thin film to be polarized into a corona discharge region and a polarization region, which can effectively suppress arcing from the corona wire 22 to the surface discharge or spark breakdown of the thin film.
[0057] The presence of wrinkles, depressions, or localized relaxation in the grid 23 will distort the electric field lines in its vicinity, creating weak polarization regions or distortion regions at the corresponding locations on the thin film. Therefore, as... Figure 14 , 15 As shown in Figures 19, 21, 22, and 23, in one embodiment, the corona assembly 2 further includes a second frame 24 and a plurality of tensioning members 25. The second frame 24 is connected to the first frame 21 and is arranged around the mesh 23. The plurality of tensioning members 25 are arranged around the mesh 23. Each tensioning member 25 includes a clamping strip 251, a fixing strip 252, at least two elastic parts 253, and at least two adjusting screws 254. The clamping strip 251 is connected to the mesh 23, the fixing strip 252 is spaced apart from the clamping strip 251, the elastic part 253 is connected to the clamping strip 251 and the fixing strip 252, and the threaded end of the adjusting screw 254 can rotatably pass through the second frame 24 and is threadedly connected to the fixing strip 252. The elastic part 253 can be a spring, an elastic strip, or an elastic block, etc. The second frame 24 is connected to the connecting rod 434 in the Z-axis moving mechanism 43.
[0058] Multiple tensioning elements 25 are distributed around the mesh 23. Rotating the adjusting screw 254 pushes the fixing strip 252, which is connected to the clamping strip 251 that directly clamps the edge of the mesh 23 via the elastic part 253, applying a controllable tension to the clamping strip 251. By rotating the adjusting screw 254 on the multiple tensioning elements 25 around the mesh 23, an independent, controllable, and adjustable preload can be applied to each edge of the mesh 23, or even each local area. This eliminates inherent wrinkles in the mesh 23 material or local slack introduced by installation, taut it into a flat plane from the initial state. Furthermore, during polarization, corona discharge causes uneven thermal expansion or stress changes in the mesh 23 due to ion bombardment and electric field forces. At this time, the stretched elastic part 253 can absorb and compensate for these small, uneven deformation stresses, maintaining a basically constant tension applied to the mesh 23 and preventing local slack or twisting of the mesh 23.
[0059] like Figure 21 , 22 and Figure 23 As shown, for a large-span mesh 23, its central area may still experience millimeter-level or even greater elastic sagging under tension and gravity. Therefore, in one embodiment, the corona assembly 2 further includes a reinforcing rib 26, a fixing rib 27, and a locking screw 28. The reinforcing rib 26 is located in the middle of the mesh 23 and connects to the second frame 24. A reinforcing groove is provided on the side of the reinforcing rib 26 facing the mesh 23. The shape of the fixing rib 27 matches the shape of the reinforcing groove and is positioned relative to it. The cross-section of the fixing rib 27 is trapezoidal, and its dimensions gradually decrease towards the reinforcing rib 26. The fixing rib 27 is located below the mesh 23, with both ends spaced from the inner wall of the second frame 24. The threaded end of the locking screw 28 passes through the reinforcing rib 26 and is threadedly connected to the fixing rib 27.
[0060] In this embodiment, the reinforcing ribs 26, fixing ribs 27, and locking screws 28 provide a solid upward support point at the center point or line of the grid 23, directly offsetting the downward deflection deformation; the rigid fixation of the central area greatly increases the natural frequency and stiffness of the overall structure of the grid 23, making it difficult for low-frequency, large-amplitude vibrations to occur during equipment operation or airflow disturbances, and avoiding high-frequency micro-amplitude vibrations.
[0061] The trapezoidal fixing rib 27 cooperates with the reinforcing groove. The reinforcing groove can guide the fixing rib 27 into the reinforcing groove and guide the fixing rib 27 to slide to the correct position. The fixing rib 27 can push part of the mesh 23 into the reinforcing groove to form a mechanical interlock, preventing any micro-slippage that may occur in the mesh 23 under long-term vibration, temperature cycling or electric field force. The reinforcing rib 26 spans the middle of the mesh 23. The two ends of the reinforcing rib 26 are close to the second frame 24, which can prevent wrinkles formed at the ends of the reinforcing rib 26 from affecting the polarization of the film. Alternatively, the reinforcing groove can be inserted through the reinforcing rib 26 along the length direction, so that the two ends of the reinforcing rib 26 can extend out of the mesh 23, avoiding the formation of irregular recessed areas at the ends of the mesh 23.
[0062] like Figure 14 and Figure 15 As shown, in one embodiment, the clamp assembly 3 includes a clamp frame 31, a plurality of tension blocks 32, a plurality of elastic members 33, and a plurality of pushers 34. The plurality of tension blocks 32 are distributed circumferentially at intervals along the clamp frame 31. The elastic members 33 connect the tension blocks 32 and the clamp frame 31 and are used to provide elastic force to the tension blocks 32 as they approach the clamp frame 31. The pushers 34 are connected to the tension blocks 32 and abut against the clamp frame 31 and are configured to push the tension blocks 32 to move away from the clamp frame 31.
[0063] When the film is not clamped, under the tension of the elastic member 33, all the stretching blocks 32 abut against the clamp frame 31, laying the film flat on the clamp frame 31, and connecting multiple stretching blocks 32 around the film. The pusher 34 is operated to generate an outward force, which overcomes the elastic force of the elastic member 33, causing the stretching blocks 32 to move the edge of the film, so that the film is stretched evenly on the plane until the expected tension is achieved.
[0064] By using multiple independent, movable, and elastically connected tension blocks 32, a uniformly distributed radial tension can be applied to the entire edge contour of the film, making the internal stress distribution of the film uniform, thereby obtaining a flat, wrinkle-free film, which facilitates the uniform polarization of the film.
[0065] like Figure 13 , 16 As shown in Figures 17 and 18, in one embodiment, the moving end of the Y-axis moving mechanism 42 has a platform, and positioning holes are provided around the platform. The clamp frame 31 has mounting holes relative to the positioning holes. The clamp assembly 3 also includes a spring ball 35, which is threadedly connected to the mounting hole. The ball in the spring ball 35 is positioned relative to the positioning hole and can be embedded in the positioning hole to position the clamp frame 31 and the platform.
[0066] When changing the film, the operator simply aligns the clamp frame 31 with the platform and lowers it. The ball bearings of the spring ball bearing 35 will retract first and then spring into the positioning hole after aligning with it. For disassembly, simply lift the clamp frame 31 upwards, which facilitates the clamping and disassembly of the film.
[0067] like Figure 13 , 16 As shown in 17 and 18, in one embodiment, the elastic element 33 includes a stepped screw 331 and a fixing spring 332. The stepped screw 331 has a head, a large diameter section, and a small diameter section that are connected and approach the tension block 32 in sequence. The head and the large diameter section of the stepped screw 331 are slidably connected to the clamp frame 31, and the small diameter section of the stepped screw 331 is threadedly connected to the tension block 32. The fixing spring 332 is sleeved on the stepped screw 331, and its two ends abut against the clamp frame 31 and the head of the stepped screw 331, respectively.
[0068] When the tension block 32 slides away from the clamp frame 31, the tension block 32 drives the stepped screw 331 to slide relative to the clamp frame 31. The clamp block and the head of the stepped screw 331 squeeze the fixing spring 332, and the fixing spring 332 forms an elastic restoring force. When the film is tensioned to the required degree, the pushing stops. At this time, the outward pushing force of the pushing member 34 and the inward elastic force of the fixing spring 332 are balanced. During the process of controlling the tension block 32 to be pulled out, the tension force applied to the film can be linearly and accurately controlled.
[0069] like Figure 13 , 16 As shown in Figures 17 and 18, specifically, in one embodiment, the tension block 32 has a first threaded hole relative to the clamp frame 31, and the clamp frame 31 has a first countersunk hole relative to the first threaded hole. The smaller diameter section of the first countersunk hole is closer to the tension block 32 than the larger diameter section. The smaller diameter section of the stepped screw 331 is threadedly connected to the first threaded hole, and the larger diameter section of the stepped screw 331 passes through the first countersunk hole and abuts against the tension block 32. The fixing spring 332 is built into the larger diameter section of the first countersunk hole. One end of the fixing spring 332 abuts against the inner wall of the larger diameter section of the first countersunk hole, and the other end abuts against the head of the stepped screw 331.
[0070] In this embodiment, when the pusher 34 drives the tension block 32 to move away from the clamp frame 31, the tension block 32 drives the stepped screw 331 to slide relative to the first countersunk hole. The stepped screw 331 cooperates with the inner wall of the first countersunk hole to compress and fix the spring 332. The stepped screw 331 sliding in the first countersunk hole can provide guidance and limit for the sliding of the tension block 32 relative to the clamp frame 31.
[0071] like Figure 13 , 16 As shown in 17 and 18, in one embodiment, the pusher 34 includes a sleeve 341, a pin 342, a push spring 343, and a tension screw 344. The sleeve 341 abuts against the clamp frame 31. The pin 342 is slidably inserted into the sleeve 341. The push spring 343 is built into the sleeve 341 and abuts against the sleeve 341 and the pin 342. The tension screw 344 is threadedly connected to the tension block 32 and abuts against the pin 342.
[0072] When the film is not installed, the elastic element 33 pushes the tension block 32 to fit against the clamp frame 31, fixing the film to multiple tension blocks 32 on all four sides. Then, the tension screw 344 is rotated, and the tension screw 344 slides towards the sleeve 341, pushing the pin 342 into the sleeve 341. The pin 342 squeezes the push spring 343, and the push spring 343 is compressed to form a reverse elastic force. The elastic force is finally converted into a thrust that pushes the tension block 32 to move outward. This thrust overcomes the rebound force of the elastic element 33 and pulls the film outward. When the film reaches the required tension, the rotation of the tension screw 344 is stopped. At this time, the outward thrust of the push element 34 is balanced with the inward pull force of the elastic element 33. Since the tension screw 344 and the tension block 32 are threaded, their position is mechanically self-locked, thereby locking the entire thrust system in this balanced state.
[0073] The push spring 343 is an elastic force transmission element. When the pushing resistance increases suddenly due to misoperation or accident, the spring will be compressed to absorb excessive displacement, avoiding overstretching damage to the diaphragm or rigid impact on the mechanism. The outward pushing force is applied through the push spring 343, and the inward pushing restoring force is applied through the fixing spring 332 of the elastic element 33. During polarization, if the diaphragm undergoes slight deformation due to factors such as thermal expansion and contraction, the push spring 343 and the elastic element 33 can play a buffering role. If the diaphragm contracts slightly, the push spring 343 can release a little compression to prevent a sudden increase in pushing force. If the diaphragm relaxes, the pull force of the elastic element 33 will cause the tension block 32 to move inward and slightly compress the push spring 343. The system automatically finds a new equilibrium point to achieve dynamic tension stabilization.
[0074] The present invention also provides a piezoelectric thin film polarization method, which utilizes the above-described piezoelectric thin film polarization device and includes the following steps: The thin film to be polarized is fixed to the clamp assembly 3; When the corona component 2 is energized, a polarization electric field is formed at the thin film to be polarized; The moving component 4 drives the clamping component 3 and the thin film to be polarized to move or rotate in a W-shape in a plane parallel to the corona component 2.
[0075] Because the electric field generated by the corona component 2 may be non-uniform, leading to inconsistent polarization effects in different regions of the thin film, this invention employs a W-shaped movement of the clamping component 3 within a plane parallel to the corona component 2. This W-shaped movement is a composite vector motion. During polarization, the trajectory of any point on the thin film is not simply along the X or Y axis, but rather alternates periodically in both the X and Y directions. This ensures that the piezoelectric properties of the polarized thin film are uniform in all directions across the entire plane, resulting in uniform polarization. Furthermore, controlling the rotation of the thin film to be polarized allows it to alternately pass through the electric field of different parts of the corona component 2, ensuring uniform polarization across the entire plane. Simultaneously, the rotation of the thin film, combined with movement along the Y and Z axes, ensures that the center of the polarized film is located at different electric field locations within the corona component 2, further promoting uniform polarization.
[0076] Although Z-shaped scanning is also composed of line segments, W-shaped paths have fewer turning points and smoother movement when covering the same area. Each W-shaped movement path covers a wider area, reducing the impact on the mechanical system caused by sudden acceleration changes at turning points during high-speed reciprocating motion and the resulting vibrations, which helps maintain the stability and flatness of the film during dynamic processes.
[0077] The specific embodiments of the present invention described above do not constitute a limitation on the scope of protection of the present invention. Any other corresponding changes and modifications made in accordance with the technical concept of the present invention should be included within the scope of protection of the claims of the present invention.
Claims
1. A piezoelectric thin film polarization device, characterized in that, include: frame; A corona component configured to corona polarize a thin film; A clamping assembly configured to hold the thin film to be polarized; and A movable component, connected to the frame and to the corona assembly and / or the clamping assembly, is configured to drive the clamping assembly to move relative to the corona assembly in a plane parallel to the corona assembly.
2. The piezoelectric thin film polarization device according to claim 1, characterized in that, The moving component can also drive the corona component and the clamping component to move closer and further apart.
3. The piezoelectric thin film polarization device according to claim 2, characterized in that, The corona assembly includes a first frame, a plurality of corona wires, and a metal mesh. The plurality of corona wires are all connected to the first frame and are arranged in parallel with each other. The mesh is disposed between the corona wires and the clamp assembly.
4. The piezoelectric thin film polarization device according to claim 3, characterized in that, The corona assembly further includes a second frame and a plurality of tensioning members. The second frame is connected to the first frame and is arranged around the mesh. The plurality of tensioning members are arranged around the mesh. Each tensioning member includes a clamping strip, a fixing strip, at least two elastic parts, and at least two adjusting screws. The clamping strip is connected to the mesh. The fixing strip is spaced apart from the clamping strip. The elastic parts are connected to the clamping strip and the fixing strip. The threaded end of the adjusting screw can rotatably pass through the second frame and is threadedly connected to the fixing strip.
5. The piezoelectric thin film polarization device according to claim 4, characterized in that, The corona assembly also includes reinforcing ribs, fixing ribs, and locking screws. The reinforcing ribs are located in the middle of the mesh and connected to the second frame. The reinforcing ribs have a reinforcing groove on the side facing the mesh. The shape of the fixing ribs matches the shape of the reinforcing grooves and is positioned opposite to the reinforcing grooves. The threaded end of the locking screws passes through the reinforcing ribs and is threadedly connected to the fixing ribs.
6. The piezoelectric thin film polarization device according to claim 1, characterized in that, The clamping assembly includes a clamping frame, a plurality of tension blocks, a plurality of elastic elements, and a plurality of pushers. The plurality of tension blocks are distributed circumferentially at intervals along the clamping frame. The elastic elements connect the tension blocks and the clamping frame and are used to provide elastic force to the tension blocks as they approach the clamping frame. The pushers connect to the tension blocks and abut against the clamping frame and are configured to push the tension blocks to move away from the clamping frame.
7. The piezoelectric thin film polarization device according to claim 1, characterized in that, The corona assembly includes a frame and multiple corona modules. The frame is connected to the moving assembly, and the multiple corona modules are spaced apart along the Y-axis direction on the frame. Each corona module includes a groove, two insulating members, a corona wire, and an etching mesh. The groove has a through slot, which opens towards the clamping assembly. The two insulating members are located at both ends of the groove and connected to it. The corona wire is built into the through slot and arranged along the length of the through slot. The corona wire is fixed to the two insulating members. The etching mesh is located at the open end of the groove and connected to the two insulating members at both ends.
8. The piezoelectric thin film polarization device according to claim 7, characterized in that, Two strip grooves are provided at both ends of the etched mesh. The corona module also includes two first adjustment components. The two first adjustment components are provided at both ends of the etched mesh. The first adjustment component includes an adjustment plate and a tensioning screw. The adjustment plate has an oval hole along the length of the through groove. Hooks that slide in the strip groove are formed on both sides of the adjustment plate. The threaded end of the tensioning screw passes through the oval hole and is threadedly connected to the insulating component.
9. The piezoelectric thin film polarization device according to claim 7, characterized in that, The corona module further includes two fixing blocks, two second adjusting members, and a spring. The two fixing blocks are slidably connected to the two insulating members along the length of the through groove. The second adjusting members correspond one-to-one with the fixing blocks and connect the fixing blocks and the insulating members, thereby driving the fixing blocks to slide along the length of the through groove to adjust the fixed position of the fixing blocks along the length of the through groove. The two sides of the corona wire are respectively sleeved on the two fixing blocks. The insulating component has a sliding groove along the length of the through groove, the fixing block is slidably embedded in the sliding groove, the fixing block has a limiting groove on each side wall of the sliding groove, the limiting groove is arranged along the length of the through groove, and the two sides of the corona wire are respectively embedded between the limiting groove and the inner wall of the sliding groove. One end of the spring is connected to the fixing block, and the other end of the spring is in the shape of a hook. The hooked end of the spring hooks the corona wire, and the spring is used to provide elastic tension to the corona wire.
10. A method for polarizing a piezoelectric thin film, characterized in that, Using the piezoelectric thin film polarization device as described in any one of claims 1-9, the method includes the following steps: The thin film to be polarized is fixed to the fixture assembly; By energizing the corona component, a polarization electric field is formed at the thin film to be polarized; The clamping assembly and the thin film to be polarized are driven by the moving component to move or rotate in a W-shape in a plane parallel to the corona assembly.