A membrane circulation treatment process device for tmaH wastewater

Abstract

The application relates to the technical field of TMAH wastewater treatment, in particular to a membrane circulation treatment process device for TMAH wastewater, which comprises an RO membrane filtering mechanism; further comprises an adsorption mechanism and a separation mechanism, and the RO membrane filtering mechanism and the separation mechanism are both installed on the adsorption mechanism; the adsorption mechanism separates sewage from TMAH, the separation mechanism separates impurities in the sewage from the sewage, and the RO membrane filtering mechanism filters the sewage; the device discharges the sewage and a flocculating agent into the adsorption mechanism, flocculates the particulate matter and colloidal flocculating agent in the sewage, forms flocculating material, then separates the sewage from the flocculating material through the separation mechanism, then discharges ion exchange resin into the adsorption mechanism, so that the ion exchange resin adsorbs TMAH in the sewage, then filters the sewage in the adsorption mechanism through the RO membrane filtering mechanism, discharges the filtered sewage, separates the ion exchange resin from TMAH in the adsorption mechanism through the adsorption mechanism, and therefore the practicability of the device is improved.

Description

Technical Field

[0001] This invention relates to the technical field of TMAH wastewater treatment, and in particular to a membrane circulation treatment process device for TMAH wastewater. Background Technology

[0002] TMAH is a highly alkaline, corrosive, and biotoxic organic nitrogen compound with high chemical oxygen demand (COD) and total nitrogen (TN) concentrations. It primarily originates from developer wastewater generated during the photolithography process in semiconductor manufacturing. Traditional treatment methods are inefficient due to the significant inhibitory effect of TMAH on microorganisms (such as nitrifying bacteria).

[0003] Therefore, invention patents such as CN114988644B (disclosed as a wastewater treatment system and method containing tetramethylammonium hydroxide) and CN117105403B (disclosed as a tetramethylammonium hydroxide recovery equipment and method) have emerged to treat TMAH wastewater.

[0004] However, during the treatment process, it was found that the existing treatment equipment uses a lot of consumables and has a poor recovery effect on TMAH. Therefore, there is an urgent need for a membrane circulation treatment process device for TMAH wastewater to improve the above problems. Summary of the Invention

[0005] To address the aforementioned technical problems, this invention provides a membrane circulation treatment process for TMAH wastewater. Wastewater and flocculant are discharged into an adsorption unit to flocculate particulate matter and colloids in the wastewater, forming flocs. The wastewater and flocs are then separated by a separation unit. Ion exchange resin is then discharged into the adsorption unit to adsorb TMAH from the wastewater. The wastewater is then filtered through an RO membrane filtration unit, and the filtered wastewater is discharged. Finally, the adsorption unit separates the ion exchange resin from the TMAH within it, thereby improving the practicality of the equipment.

[0006] The present invention provides a membrane circulation treatment process device for TMAH wastewater, including an RO membrane filtration mechanism; it also includes an adsorption mechanism and a separation mechanism, both of which are mounted on the adsorption mechanism; The adsorption mechanism separates wastewater from TMAH, the separation mechanism separates impurities in the wastewater from the wastewater, and the RO membrane filtration mechanism filters the wastewater. Wastewater and flocculant are discharged into the adsorption unit, where particulate matter and colloids in the wastewater are flocculated to form flocs. The wastewater and flocs are then separated by a separation unit. Ion exchange resin is then discharged into the adsorption unit to adsorb TMAH from the wastewater. The wastewater in the adsorption unit is then filtered through an RO membrane filtration unit and discharged. The ion exchange resin is then separated from the TMAH within it by the adsorption unit, thereby improving the practicality of the equipment.

[0007] Preferably, the adsorption mechanism includes a pressure regulating mechanism, a feeding mechanism, a circulation mechanism, and a condensation mechanism. The feeding mechanism and condensation mechanism are both mounted on the pressure regulating mechanism, and the circulation mechanism is mounted below the pressure regulating mechanism. Wastewater and flocculant are discharged into the pressure regulating mechanism through the feeding mechanism, causing the pressure regulating mechanism to mix the wastewater and flocculant, resulting in the flocculation of particulate matter and colloids in the wastewater. The pressure regulating mechanism then discharges the wastewater into a separation mechanism, where the separation mechanism filters the flocculants in the wastewater. Finally, the wastewater is discharged into the circulation mechanism, which returns the wastewater to the pressure regulating mechanism. In the regulating mechanism, the ion exchange resin is then discharged into the pressure regulating mechanism via the feeding mechanism, allowing the ion exchange resin to adsorb TMAH in the wastewater. After the RO membrane filters and discharges the wastewater, the ion exchange resin inside is heated under negative pressure by the pressure regulating mechanism, causing the ion exchange resin to separate from the TMAH inside. The TMAH evaporates and enters the condensation mechanism, where it is reliquefied and collected. Then, the ion exchange resin in the pressure regulating mechanism is discharged into the separation mechanism for the next use, thereby improving the practicality of the equipment.

[0008] Preferably, the pressure regulating mechanism includes an adsorption cylinder, two sets of pistons, two sets of hydraulic cylinders, a frame, and a vacuum pump. The adsorption cylinder and the two sets of hydraulic cylinders are all mounted on the frame. The two sets of pistons are slidably mounted inside the adsorption cylinder, and one end of each set of hydraulic cylinders is connected to the two sets of pistons. The vacuum pump is mounted on the adsorption cylinder. Wastewater and flocculant are discharged into the adsorption cylinder. The operation of the two sets of hydraulic cylinders causes the two sets of pistons to slide laterally repeatedly, causing the wastewater to slosh inside the adsorption cylinder and mix with the flocculant. When the ion exchange resin is heated, the vacuum pump expels the air from the adsorption cylinder, creating a negative pressure environment inside the adsorption cylinder. During the heating process, the operation of the two sets of hydraulic cylinders causes the two sets of pistons to move towards each other or in opposite directions, thereby regulating the pressure inside the adsorption cylinder and improving the practicality of the equipment.

[0009] Preferably, the feeding mechanism includes a three-way valve, a storage tank, a feed valve, a drive motor, a screw conveyor shaft, and a first conveying valve. The three-way valve and storage tank are both installed on the top of the adsorption cylinder. The first conveying valve is installed on the storage tank. The three-way valve has two sets of inlets and one set of outlets. The outlet of the three-way valve communicates with the interior of the adsorption cylinder. The storage tank communicates with the interior of the adsorption cylinder through the first conveying valve. The feed valve is installed on the top of the storage tank. The drive motor is installed at the bottom of the storage tank. One end of the screw conveyor shaft is installed on the output shaft of the drive motor, and the other end extends into the storage tank. One set of inlets of the three-way valve is connected to the wastewater source, and the other set of inlets is connected to the flocculant source, facilitating the simultaneous discharge of wastewater and flocculant into the adsorption cylinder. Ion exchange resin is discharged into the storage tank through the feed valve. Then, the first conveying valve and the drive motor are opened, and the screw conveyor shaft rotates, discharging the ion exchange resin into the adsorption cylinder through the first conveying valve, thereby improving the practicality of the equipment.

[0010] Preferably, the circulation mechanism includes a circulation tank, a circulation pump, and a circulation pipe. The circulation pump is installed on the circulation tank, and an inlet is provided on the top of the circulation tank. The suction port of the circulation pump is connected to the interior of the circulation tank. One end of the circulation pipe is installed on the discharge port of the circulation pump, and the other end of the circulation pipe extends into the adsorption cylinder. After the sewage and flocculants are separated, the sewage enters the circulation tank. The circulation pump is turned on, so that the sewage in the circulation tank flows through the circulation pump and the circulation pipe and returns to the adsorption cylinder, thereby improving the practicality of the equipment.

[0011] Preferably, the condensation mechanism includes a steam pipe, a water tank, a water collection trough, a water inlet valve, a drain valve, a pressure relief valve, a recovery tank, an air inlet valve, and a discharge valve. The bottom of the steam pipe is installed on the top of the adsorption cylinder, the water tank is installed on the top of the steam pipe, and the bottom of the water tank is a hemispherical structure with an upward convex shape. The water inlet valve and the drain valve are both installed on the water tank. The water collection trough is installed on the inner wall of the steam pipe. The pressure relief valve is installed on the side end of the steam pipe. The recovery tank is installed on the adsorption cylinder, and the recovery tank communicates with the interior of the pressure relief valve. The air inlet valve is installed on the top of the recovery tank, and the discharge valve... Installed at the bottom of the recycling tank; water is drained into the tank through the inlet valve and discharged through the outlet valve to maintain the tank temperature. The evaporated TMAH then enters the steam pipe. Upon reaching the bottom of the tank, the TMAH cools and liquefies. The liquefied TMAH flows into the collection tank and then into the recycling tank for storage. Once enough TMAH has been stored in the recycling tank, the inlet valve and outlet valve are opened to allow air to enter the recycling tank through the inlet valve and discharge the TMAH through the outlet valve, thereby improving the equipment's practicality.

[0012] Preferably, the separation mechanism includes a guide rail, an electric slider, a support, a telescopic tube, two sets of sealing rings, multiple sets of cylinders, and a mesh basket. A drain valve is installed at the bottom of the adsorption cylinder. The guide rail is mounted on the top of the circulation tank. The electric slider is slidably mounted on the guide rail. The support is fixedly mounted on the electric slider. The telescopic tube and the mesh basket are both clamped onto the support. A filter screen is installed inside the telescopic tube. Two sets of sealing rings are respectively installed at the top and bottom of the telescopic tube. Multiple sets of cylinders are all mounted on the support, and the other ends of the multiple sets of cylinders are respectively mounted on the two sets of sealing rings. When separating wastewater from flocculants, the electric slider slides on the guide rail, aligning the two sets of sealing rings with the drain valve and circulation tank of the adsorption cylinder, respectively. The inlet of the tank is then extended by multiple sets of cylinders, causing two sets of sealing rings to fit tightly against the drain valve of the adsorption cylinder and the inlet of the circulation tank, respectively. The drain valve of the adsorption cylinder is then opened, allowing wastewater to flow into the telescopic pipe. The wastewater passes through a filter screen in the telescopic pipe to filter flocculants. The wastewater then passes through the filter screen and enters the circulation tank. After the ion exchange resin and TMAH are separated, an electric slider slides on a guide rail, moving the mesh basket below the drain valve of the adsorption cylinder. The drain valve of the adsorption cylinder is then opened, and the operation of two sets of hydraulic cylinders causes two sets of pistons to push the ion exchange resin in the adsorption cylinder into the drain valve, allowing the ion exchange resin to enter the mesh basket, thus improving the practicality of the equipment.

[0013] Preferably, the RO membrane filtration mechanism includes an RO membrane reverse osmosis filter cartridge, an RO membrane, and a drain pump. A drain valve is provided at the bottom of the adsorption cartridge. The RO membrane reverse osmosis filter cartridge is mounted on a frame, and the RO membrane is installed inside the RO membrane reverse osmosis filter cartridge. One end of the RO membrane is connected to the drain valve of the adsorption cartridge, and the other end is connected to the drain pump. Two sets of hydraulic cylinders operate, causing two sets of pistons to move in opposite directions, pressurizing the wastewater inside the adsorption cartridge. Simultaneously, the drain valve at the bottom of the adsorption cartridge is opened, and then the drain pump is activated, allowing the wastewater to enter the RO membrane for filtration, forming greywater. The greywater is then discharged through the drain pump, thereby improving the practicality of the equipment.

[0014] Preferably, the adsorption cylinder has a double-layer structure, and a steam inlet valve is provided at the top of the adsorption cylinder, and a steam exhaust valve is provided at the bottom of the adsorption cylinder; the steam source is connected to the steam inlet valve, and the steam exhaust valve is connected to the steam exhaust pipeline. By discharging steam into the double-layer structure of the adsorption cylinder, it is convenient to uniformly heat the ion exchange resin in the adsorption cylinder, thereby improving the practicality of the equipment.

[0015] Preferably, the filter screen inside the telescopic tube is removable and replaceable.

[0016] Compared with the prior art, the beneficial effects of the present invention are as follows: 1. By combining the adsorption and separation mechanisms, multiple wastewater treatment processes can be easily completed in the same container, greatly improving the extraction rate of TMAH. The utilization rate is improved by facilitating the reuse of consumables multiple times. 2. By periodically adjusting the pressure, the structural deformation of the ion exchange resin can be alleviated, thus extending the service life of the ion exchange resin. 3. The use of RO membrane filtration improves the purification effect of wastewater. Furthermore, by adsorbing TMAH in the wastewater, the contact between TMAH and the RO membrane is reduced, thus extending the service life of the RO membrane. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the first isometric structure of the present invention; Figure 2 This is a schematic diagram of the second isometric structure of the present invention; Figure 3 This is a front view structural diagram of the present invention; Figure 4 This is a frontal cross-sectional structural diagram of the present invention; Figure 5 This is a schematic diagram of the right-side structure of the present invention; Figure 6 This is an isometric structural diagram of the separation mechanism of the present invention; Figure 7 This is a front view cross-sectional structural schematic diagram of the condensation mechanism of the present invention; Figure 8 This is a front view cross-sectional structural diagram of the storage box of the present invention; Figure 9 This is the present invention. Figure 4 A magnified structural diagram of part A in the diagram; Figure 10 This is a schematic diagram of the right-side structure of the recycling bin of the present invention.

[0018] The attached diagram shows the following components: 1. Adsorption cylinder; 2. Piston; 3. Hydraulic cylinder; 4. Frame; 5. Vacuum pump; 6. Three-way valve; 7. Storage tank; 8. Feed valve; 9. Drive motor; 10. Screw conveyor shaft; 11. Conveying valve one; 12. Circulation tank; 13. Circulation pump; 14. Circulation pipe; 15. Steam pipe; 16. Water tank; 17. Water collection tank; 18. Water inlet valve; 19. Drain valve; 20. Pressure relief valve; 21. Recovery tank; 22. Air inlet valve; 23. Discharge valve; 24. Guide rail; 25. Electric slider; 26. Support; 27. Telescopic pipe; 28. Sealing ring; 29. ​​Cylinder; 30. Mesh basket; 31. RO membrane reverse osmosis filter cylinder; 32. RO membrane; 33. Drain pump; 34. Steam inlet valve; 35. Steam exhaust valve. Detailed Implementation

[0019] To facilitate understanding of the present invention, a more complete description will be given below with reference to the accompanying drawings. The present invention can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.

[0020] Example 1: As Figures 1 to 10 As shown, a membrane circulation treatment device for TMAH wastewater includes an RO membrane filtration mechanism; it also includes an adsorption mechanism and a separation mechanism, both of which are mounted on the adsorption mechanism. The adsorption mechanism separates wastewater from TMAH, the separation mechanism separates impurities in the wastewater from the wastewater, and the RO membrane filtration mechanism filters the wastewater. The adsorption mechanism includes a pressure regulating mechanism, a feeding mechanism, a circulation mechanism, and a condensation mechanism. The feeding mechanism and the condensation mechanism are both installed on the pressure regulating mechanism, and the circulation mechanism is installed below the pressure regulating mechanism. The pressure regulating mechanism includes an adsorption cylinder 1, two sets of pistons 2, two sets of hydraulic cylinders 3, a frame 4, and a vacuum pump 5. The adsorption cylinder 1 and the two sets of hydraulic cylinders 3 are all mounted on the frame 4. The two sets of pistons 2 are slidably mounted inside the adsorption cylinder 1, and one end of each set of hydraulic cylinders 3 is connected to the two sets of pistons 2. The vacuum pump 5 is mounted on the adsorption cylinder 1. The feeding mechanism includes a three-way valve 6, a storage tank 7, a feed valve 8, a drive motor 9, a screw conveyor shaft 10, and a conveying valve 11. The three-way valve 6 and the storage tank 7 are both installed on the top of the adsorption cylinder 1. The conveying valve 11 is installed on the storage tank 7. The three-way valve 6 is provided with two sets of inlets and one set of outlets. The outlet of the three-way valve 6 is connected to the interior of the adsorption cylinder 1. The storage tank 7 is connected to the interior of the adsorption cylinder 1 through the conveying valve 11. The feed valve 8 is installed on the top of the storage tank 7. The drive motor 9 is installed on the bottom of the storage tank 7. One end of the screw conveyor shaft 10 is installed on the output shaft of the drive motor 9, and the other end of the screw conveyor shaft 10 extends into the storage tank 7. The circulation mechanism includes a circulation tank 12, a circulation pump 13, and a circulation pipe 14. The circulation pump 13 is installed on the circulation tank 12, and the top of the circulation tank 12 is provided with a water inlet. The water inlet of the circulation pump 13 is connected to the inside of the circulation tank 12. One end of the circulation pipe 14 is installed on the drain outlet of the circulation pump 13, and the other end of the circulation pipe 14 extends into the adsorption cylinder 1. The condensation mechanism includes a steam pipe 15, a water tank 16, a water collection trough 17, a water inlet valve 18, a drain valve 19, a pressure relief valve 20, a recovery box 21, an air inlet valve 22, and a discharge valve 23. The bottom of the steam pipe 15 is installed on the top of the adsorption cylinder 1, the water tank 16 is installed on the top of the steam pipe 15, and the bottom of the water tank 16 is a hemispherical structure with an upward convex shape. The water inlet valve 18 and the drain valve 19 are both installed on the water tank 16. The water collection trough 17 is installed on the inner wall of the steam pipe 15. The pressure relief valve 20 is installed on the side end of the steam pipe 15. The recovery box 21 is installed on the adsorption cylinder 1, and the recovery box 21 is connected to the interior of the pressure relief valve 20. The air inlet valve 22 is installed on the top of the recovery box 21, and the discharge valve 23 is installed on the bottom of the recovery box 21. The separation mechanism includes a guide rail 24, an electric slider 25, a bracket 26, a telescopic tube 27, two sets of sealing rings 28, multiple sets of cylinders 29, and a mesh basket 30. A drain valve is provided at the bottom of the adsorption cylinder 1. The guide rail 24 is installed on the top of the circulation box 12. The electric slider 25 is slidably installed on the guide rail 24. The bracket 26 is fixedly installed on the electric slider 25. The telescopic tube 27 and the mesh basket 30 are both clamped on the bracket 26. A filter screen is provided inside the telescopic tube 27. Two sets of sealing rings 28 are respectively installed on the top and bottom of the telescopic tube 27. Multiple sets of cylinders 29 are all installed on the bracket 26, and the other end of the multiple sets of cylinders 29 is respectively installed on the two sets of sealing rings 28. The RO membrane filtration mechanism includes an RO membrane reverse osmosis filter cartridge 31, an RO membrane 32, and a drain pump 33. The bottom of the adsorption cartridge 1 is provided with a drain valve. The RO membrane reverse osmosis filter cartridge 31 is installed on the frame 4. The RO membrane 32 is installed in the RO membrane reverse osmosis filter cartridge 31. One end of the RO membrane 32 is connected to the drain valve of the adsorption cartridge 1, and the other end of the RO membrane 32 is connected to the drain pump 33. The filter screen inside the telescopic tube 27 is removable and replaceable; Connect one inlet of the three-way valve 6 to the sewage source and the other inlet of the three-way valve 6 to the flocculant source. Simultaneously, discharge the sewage and flocculant into the adsorption cylinder 1. Then, by operating two sets of hydraulic cylinders 3, the two sets of pistons 2 repeatedly slide laterally, causing the sewage to slosh within the adsorption cylinder 1, thus mixing the sewage with the flocculant. Next, the electric slider 25 slides on the guide rail 24, aligning the two sets of sealing rings 28 with the drain valve of the adsorption cylinder 1 and the inlet of the circulation tank 12, respectively. Then, by extending multiple sets of cylinders 29, the two sets of sealing rings 28 are brought into close contact with the drain valve of the adsorption cylinder 1 and the inlet of the circulation tank 12, respectively. Finally, open the drain valve of the adsorption cylinder 1, discharging the sewage into the telescopic pipe 27. The wastewater is filtered through the filter screen in the telescopic pipe 27 to remove flocculants. The wastewater passes through the filter screen and enters the circulation tank 12. Then, the circulation pump 13 is turned on, allowing the wastewater in the circulation tank 12 to flow back to the adsorption cylinder 1 after passing through the circulation pump 13 and the circulation pipe 14. The delivery valve 11 and the drive motor 9 are turned on, and the screw conveyor shaft 10 rotates, discharging the ion exchange resin into the adsorption cylinder 1 through the delivery valve 11. The ion exchange resin adsorbs TMAH in the wastewater. Then, the two sets of hydraulic cylinders 3 operate, causing the two sets of pistons 2 to move in opposite directions, pressurizing the wastewater in the adsorption cylinder 1. At the same time, the drain valve at the bottom of the adsorption cylinder 1 is opened, and the drain pump 33 is turned on, allowing the wastewater to enter the RO membrane 32. Wastewater is filtered to form greywater, which is then discharged by drain pump 33. The ion exchange resin is then heated while air is expelled from the adsorption cylinder 1 by vacuum pump 5, creating a negative pressure environment inside the adsorption cylinder 1. During heating, two sets of hydraulic cylinders 3 operate, causing two sets of pistons 2 to move in opposite directions or towards each other, regulating the pressure inside the adsorption cylinder 1 and reducing the impact of continuous negative pressure on the ion exchange resin. Water is then discharged into water tank 16 through inlet valve 18 and drained from water tank 16 through drain valve 19, maintaining the temperature of water tank 16. The evaporated TMAH then enters the steam pipe 15, where it cools down upon reaching the bottom of water tank 16. The liquefied TMAH flows into the water collection tank 17 and then into the recycling tank 21 for storage. After enough TMAH is stored in the recycling tank 21, the air inlet valve 22 and the discharge valve 23 are opened to allow air to enter the recycling tank 21 through the air inlet valve 22 and discharge the TMAH in the recycling tank 21 through the discharge valve 23. Then, the electric slider 25 slides on the guide rail 24 to move the mesh basket 30 below the drain valve of the adsorption cylinder 1. The drain valve of the adsorption cylinder 1 is opened, and the operation of the two sets of hydraulic cylinders 3 causes the two sets of pistons 2 to push the ion exchange resin in the adsorption cylinder 1 into the drain valve of the adsorption cylinder 1, so that the ion exchange resin enters the mesh basket 30, thereby improving the practicality of the equipment.

[0021] Example 2: A membrane circulation treatment process device for TMAH wastewater, which, based on Example 1, further includes: The adsorption cylinder 1 has a double-layer structure, and the top of the adsorption cylinder 1 is provided with a steam inlet valve 34, and the bottom of the adsorption cylinder 1 is provided with a steam exhaust valve 35. Connect one inlet of the three-way valve 6 to the sewage source and the other inlet of the three-way valve 6 to the flocculant source. Simultaneously, discharge the sewage and flocculant into the adsorption cylinder 1. Then, by operating two sets of hydraulic cylinders 3, the two sets of pistons 2 slide laterally repeatedly, causing the sewage to slosh inside the adsorption cylinder 1, thus mixing the sewage and flocculant. Then, by sliding the electric slider 25 on the guide rail 24, the two sets of sealing rings 28 are aligned with the drain valve of the adsorption cylinder 1 and the inlet of the circulation tank 12, respectively. Then, by extending multiple sets of cylinders 29, the two sets of sealing rings 28 are pressed tightly against the drain valve of the adsorption cylinder 1 and the inlet of the circulation tank 12, respectively. Finally, open the drain valve of the adsorption cylinder 1, and discharge the sewage into the telescopic pipe 27. The sewage is filtered through the filter screen in the telescopic pipe 27. Flocculants are filtered, and wastewater passes through the filter screen into the circulation tank 12. Then, the circulation pump 13 is turned on, allowing the wastewater in the circulation tank 12 to flow back to the adsorption cylinder 1 after passing through the circulation pump 13 and circulation pipe 14. The delivery valve 11 and drive motor 9 are turned on, and the screw conveyor shaft 10 rotates, discharging the ion exchange resin into the adsorption cylinder 1 through the delivery valve 11, allowing the ion exchange resin to adsorb TMAH in the wastewater. Then, two sets of hydraulic cylinders 3 operate, causing two sets of pistons 2 to move in opposite directions, pressurizing the wastewater in the adsorption cylinder 1. At the same time, the drain valve at the bottom of the adsorption cylinder 1 is opened, and the drain pump 33 is turned on, allowing the wastewater to enter the RO membrane 32 for filtration, forming greywater. The greywater is then discharged by the drain pump 33 and then... The ion exchange resin is heated while air is expelled from the adsorption cylinder 1 via vacuum pump 5, creating a negative pressure environment inside the adsorption cylinder 1. A steam source is then connected to the steam inlet valve 34, and an exhaust valve 35 is connected to the exhaust pipeline. Steam is discharged into the double-layer structure of the adsorption cylinder 1, facilitating uniform heating of the ion exchange resin. Two sets of hydraulic cylinders 3 operate, causing two sets of pistons 2 to move in opposite directions or towards each other, regulating the pressure inside the adsorption cylinder 1 and reducing the impact of continuous negative pressure on the ion exchange resin. Water is discharged into the water tank 16 via the water inlet valve 18 and drained from the water tank 16 via the drain valve 19, maintaining the temperature of the water tank 16. The evaporated TMAH then enters the steam transmission pipe 15. After TMAH reaches the bottom of the water tank 16, it cools and liquefies. The liquefied TMAH flows into the water collection tank 17 and then into the recycling tank 21 for storage. Once enough TMAH has been stored in the recycling tank 21, the air inlet valve 22 and the discharge valve 23 are opened to allow air to enter the recycling tank 21 through the air inlet valve 22 and discharge the TMAH from the recycling tank 21 through the discharge valve 23. Then, the electric slider 25 slides on the guide rail 24 to move the mesh basket 30 below the drain valve of the adsorption cylinder 1. The drain valve of the adsorption cylinder 1 is opened, and the operation of the two sets of hydraulic cylinders 3 causes the two sets of pistons 2 to push the ion exchange resin in the adsorption cylinder 1 into the drain valve of the adsorption cylinder 1, so that the ion exchange resin enters the mesh basket 30, thereby improving the practicality of the equipment.

[0022] The main functions achieved by this invention are: 1. By combining the adsorption and separation mechanisms, multiple wastewater treatment processes can be easily completed in the same container, greatly improving the extraction rate of TMAH. The utilization rate is improved by facilitating the reuse of consumables multiple times. 2. By periodically adjusting the pressure, the structural deformation of the ion exchange resin can be alleviated, thus extending the service life of the ion exchange resin. 3. The use of RO membrane filtration improves the purification effect of wastewater. Furthermore, by adsorbing TMAH in the wastewater, the contact between TMAH and the RO membrane is reduced, thus extending the service life of the RO membrane.

[0023] The membrane circulation treatment process device for TMAH wastewater of the present invention uses common mechanical methods for installation, connection, or setting. Any method that can achieve its beneficial effects can be implemented. The drain valve is equipped with a mesh to prevent ion exchange resin from entering the drain valve. The hydraulic cylinder 3, vacuum pump 5, drive motor 9, circulation pump 13, electric slider 25, cylinder 29, and drain pump 33 of the membrane circulation treatment process device for TMAH wastewater of the present invention are commercially available. Those skilled in the art only need to install and operate them according to the accompanying instruction manual, without requiring any creative work from those skilled in the art.

[0024] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A membrane circulation treatment process device for TMAH wastewater, comprising an RO membrane filtration mechanism; characterized in that, It also includes an adsorption mechanism and a separation mechanism, with both the RO membrane filtration mechanism and the separation mechanism installed on the adsorption mechanism; The adsorption mechanism separates wastewater from TMAH, the separation mechanism separates impurities in the wastewater from the wastewater, and the RO membrane filtration mechanism filters the wastewater.

2. The membrane circulation treatment process device for TMAH wastewater as described in claim 1, characterized in that, The adsorption mechanism includes a pressure regulating mechanism, a feeding mechanism, a circulation mechanism, and a condensation mechanism. The feeding mechanism and the condensation mechanism are both installed on the pressure regulating mechanism, and the circulation mechanism is installed below the pressure regulating mechanism.

3. The membrane circulation treatment process device for TMAH wastewater as described in claim 2, characterized in that, The pressure regulating mechanism includes an adsorption cylinder (1), two sets of pistons (2), two sets of hydraulic cylinders (3), a frame (4), and a vacuum pump (5). The adsorption cylinder (1) and the two sets of hydraulic cylinders (3) are both mounted on the frame (4). The two sets of pistons (2) are slidably mounted inside the adsorption cylinder (1), and one end of each set of hydraulic cylinders (3) is connected to the two sets of pistons (2). The vacuum pump (5) is mounted on the adsorption cylinder (1).

4. The membrane circulation treatment process device for TMAH wastewater as described in claim 3, characterized in that, The feeding mechanism includes a three-way valve (6), a storage tank (7), a feed valve (8), a drive motor (9), a screw conveyor shaft (10), and a first conveyor valve (11). The three-way valve (6) and the storage tank (7) are both installed on the top of the adsorption cylinder (1). The first conveyor valve (11) is installed on the storage tank (7). The three-way valve (6) is provided with two sets of inlets and one set of outlets. The outlet of the three-way valve (6) is connected to the inside of the adsorption cylinder (1). The storage tank (7) is connected to the inside of the adsorption cylinder (1) through the first conveyor valve (11). The feed valve (8) is installed on the top of the storage tank (7). The drive motor (9) is installed on the bottom of the storage tank (7). One end of the screw conveyor shaft (10) is installed on the output shaft of the drive motor (9), and the other end of the screw conveyor shaft (10) extends into the storage tank (7).

5. The membrane circulation treatment process device for TMAH wastewater as described in claim 3, characterized in that, The circulation mechanism includes a circulation tank (12), a circulation pump (13), and a circulation pipe (14). The circulation pump (13) is installed on the circulation tank (12), and the top of the circulation tank (12) is provided with a water inlet. The water inlet of the circulation pump (13) is connected to the inside of the circulation tank (12). One end of the circulation pipe (14) is installed on the drain outlet of the circulation pump (13), and the other end of the circulation pipe (14) extends into the adsorption cylinder (1).

6. The membrane circulation treatment process device for TMAH wastewater as described in claim 3, characterized in that, The condensation mechanism includes a steam pipe (15), a water tank (16), a water collection tank (17), a water inlet valve (18), a drain valve (19), a pressure relief valve (20), a recovery tank (21), an air inlet valve (22), and a discharge valve (23). The bottom of the steam pipe (15) is installed on the top of the adsorption cylinder (1), and the water tank (16) is installed on the top of the steam pipe (15). The bottom of the water tank (16) is a hemispherical structure with an upward convex shape. The water inlet valve (18) 18) and drain valve (19) are both installed on water tank (16), water collection tank (17) is installed on the inner wall of steam pipe (15), pressure relief valve (20) is installed on the side end of steam pipe (15), recovery box (21) is installed on adsorption cylinder (1), and the recovery box (21) is connected to the inside of pressure relief valve (20), air inlet valve (22) is installed on top of recovery box (21), and discharge valve (23) is installed on bottom of recovery box (21).

7. The membrane circulation treatment process device for TMAH wastewater as described in claim 5, characterized in that, The separation mechanism includes a guide rail (24), an electric slider (25), a bracket (26), a telescopic tube (27), two sets of sealing rings (28), multiple sets of cylinders (29), and a mesh basket (30). The bottom of the adsorption cylinder (1) is equipped with a drain valve. The guide rail (24) is installed on the top of the circulation box (12). The electric slider (25) is slidably installed on the guide rail (24). The bracket (26) is fixedly installed on the electric slider (25). The telescopic tube (27) and the mesh basket (30) are both clamped on the bracket (26). A filter screen is installed inside the telescopic tube (27). Two sets of sealing rings (28) are respectively installed on the top and bottom of the telescopic tube (27). Multiple sets of cylinders (29) are all installed on the bracket (26), and the other end of the multiple sets of cylinders (29) is respectively installed on the two sets of sealing rings (28).

8. The membrane circulation treatment process device for TMAH wastewater as described in claim 3, characterized in that, The RO membrane filtration mechanism includes an RO membrane reverse osmosis filter cartridge (31), an RO membrane (32), and a drain pump (33). The bottom of the adsorption cartridge (1) is provided with a drain valve. The RO membrane reverse osmosis filter cartridge (31) is installed on the frame (4). The RO membrane (32) is installed in the RO membrane reverse osmosis filter cartridge (31). One end of the RO membrane (32) is connected to the drain valve of the adsorption cartridge (1), and the other end of the RO membrane (32) is connected to the drain pump (33).

9. The membrane circulation treatment process device for TMAH wastewater as described in claim 3, characterized in that, The adsorption cylinder (1) has a double-layer structure, and the top of the adsorption cylinder (1) is provided with a steam inlet valve (34) and the bottom of the adsorption cylinder (1) is provided with a steam exhaust valve (35).

10. The membrane circulation treatment process device for TMAH wastewater as described in claim 7, characterized in that, The filter screen inside the telescopic tube (27) is removable and replaceable.

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