光学元件角度测量装置
By constructing an optical element angle measurement device consisting of a laser source, beam splitter, folding mirror, and differential measurement components, and combining environmental compensation and active vibration isolation, the problem of high precision and stability in optical element angle measurement in beamlines was solved, achieving a resolution of 0.2 nrad and wide adaptability.
CN122192220BActive Publication Date: 2026-07-17SHANGHAI ADVANCED RES INST CHINESE ACADEMY OF SCI
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- SHANGHAI ADVANCED RES INST CHINESE ACADEMY OF SCI
- Filing Date
- 2026-05-11
- Publication Date
- 2026-07-17
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Figure CN122192220B_ABST
Abstract
本发明涉及一种光学元件角度测量装置，其包括激光光源、第一分光镜、第二分光镜、折转镜、第一差分测量组件、环境补偿组件、第二差分测量组件和数据处理装置，激光光源用于发出激光，激光被第一分光镜、第二分光镜和折转镜分为三路光，三路光中的其中两路分别经过第一差分测量组件和第二差分测量组件后被光学元件的反射面反射回第一差分测量组件和第二差分测量组件，第一差分测量组件和第二差分测量组件根据反射回其的光得到第一差分测量信号和第二差分测量信号，三路光中的其余一路被环境补偿组件接收，环境补偿组件根据其得到环境补偿信号，数据处理装置根据第一差分测量信号、第二差分测量信号和环境补偿信号计算光学元件的角度变化值。
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