A two-axis gyroscope

Abstract

This invention relates to the field of gyroscope technology and discloses a two-axis gyroscope, defining a first direction, a second direction, and a third direction that are perpendicular to each other. The two-axis gyroscope includes: four decoupling frames and four driving frames. The four decoupling frames are orthogonally and symmetrically distributed along the first and second directions, and the decoupling frames and driving frames are alternately distributed with the four driving frames diagonally distributed; four detection frames, each corresponding to one of the four decoupling frames and orthogonally and symmetrically distributed, with two detection frames distributed along the first direction elastically connected to their corresponding decoupling frames along the second direction, and two detection frames distributed along the second direction elastically connected to their corresponding decoupling frames along the first direction; four detection decoupling beams, each corresponding to one of the four decoupling frames and connected to them; and detection electrodes for detecting angular velocities along the first and second directions. The two-axis gyroscope disclosed in this invention solves the technical problem of existing gyroscopes' inability to simultaneously achieve high precision, high sensitivity, and simplified structural design.

Description

Technical Field

[0001] This invention relates to the field of gyroscope technology, and more particularly to a two-axis gyroscope. Background Technology

[0002] Gyroscopes are core components of inertial measurement and attitude control, and their detection accuracy and sensitivity directly determine the overall performance of the application system. However, existing gyroscopes struggle to balance high performance with simplified structural design: to pursue high accuracy, traditional solutions typically rely on complex mechanical structures and precision circuits, which, while improving response capabilities, also increase manufacturing complexity and costs, leading to decreased reliability. Conversely, simplified structural designs adopted to meet miniaturization and low-cost requirements are susceptible to orthogonal errors and environmental noise, severely limiting their detection accuracy and sensitivity, making them unsuitable for high-performance applications. Therefore, existing gyroscopes struggle to achieve a balance between performance and structural simplification, severely restricting their integration and development in miniaturized, low-cost devices. Summary of the Invention

[0003] Based on the above, the purpose of this invention is to provide a two-axis gyroscope that solves the technical problem of existing gyroscopes being unable to balance high precision, high sensitivity, and simplified structural design. While ensuring detection performance, it reduces structural complexity, which is conducive to the integrated application and development of gyroscopes in miniaturized and low-cost devices.

[0004] To achieve the above objectives, the present invention adopts the following technical solution: A two-axis gyroscope, defining a first direction, a second direction, and a third direction that are perpendicular to each other, the two-axis gyroscope comprising: The system comprises four decoupling frames and four driving frames. The four decoupling frames are orthogonally and symmetrically distributed along the first direction and the second direction. The decoupling frames and the driving frames are alternately distributed, and the four driving frames are diagonally distributed. Each driving frame is connected to two decoupling frames. In the driving mode, two driving frames located at one set of diagonal positions reciprocate along driving directions that are facing each other or opposite to each other, while two driving frames located at another set of diagonal positions reciprocate along driving directions that are facing each other or opposite to each other, so as to drive two decoupling frames distributed along the first direction to move in the opposite direction along the second direction. At the same time, it drives two decoupling frames distributed along the second direction to move in the opposite direction along the first direction. The angle between the driving direction and the first direction is a preset angle. Four detection frames are respectively corresponding to four decoupling frames and are orthogonally and symmetrically distributed along the first direction and the second direction. Two of the detection frames distributed along the first direction are elastically connected to the corresponding decoupling frames along the second direction, and the other two detection frames distributed along the second direction are elastically connected to the corresponding decoupling frames along the first direction. Four detection decoupling beams are provided, each of which corresponds to and is connected to one of the four decoupling frames. The four detection decoupling beams and the four driving frames are arranged alternately, and each detection decoupling beam is connected to two driving frames. A detection electrode is disposed on the detection frame and is used to detect angular velocities about the first direction and the second direction.

[0005] As a preferred embodiment of a two-axis gyroscope, the detection decoupling beam includes a long detection decoupling beam and a short detection decoupling beam connected to its center. The two ends of the long detection decoupling beam are respectively connected to the two drive frames, and the short detection decoupling beam is connected to the decoupling frame and perpendicular to the long detection decoupling beam.

[0006] As a preferred embodiment of a two-axis gyroscope, the two-axis gyroscope further includes four drive decoupling beams, which correspond one-to-one with the four decoupling frames and the four detection frames. Each drive decoupling beam is connected to both the decoupling frame and the detection frame. The drive decoupling beam can extend and retract along the motion direction of the decoupling frame connected to it in the drive mode, and can also deform along the third direction.

[0007] As a preferred embodiment of a two-axis gyroscope, the drive decoupling beam includes a drive decoupling elastic beam and a drive decoupling straight beam connected to its center. Both ends of the drive decoupling elastic beam are connected to the decoupling frame, and the drive decoupling straight beam is connected to the detection frame. The drive decoupling elastic beam can extend and retract along the motion direction of the decoupling frame connected to it in the drive mode, and the extension direction of the drive decoupling straight beam is perpendicular to the extension and retraction direction of the drive decoupling elastic beam.

[0008] As a preferred embodiment of a two-axis gyroscope, the mass of each detection frame is equal to the mass of each detection frame.

[0009] As a preferred embodiment of a two-axis gyroscope, the detection electrode includes: A first detection electrode is formed by the detection frame distributed along the first direction and a substrate facing it, and the first detection electrode is used to detect the angular velocity in the first direction; The second detection electrode is formed by the detection frame distributed along the second direction and the substrate directly opposite it, and the second detection electrode is used to detect the angular velocity in the second direction.

[0010] As a preferred embodiment of a two-axis gyroscope, the two-axis gyroscope further includes: The central anchor point is fixed to the substrate; Four stress-isolated elastic beams are capable of deforming along the first direction or the second direction, wherein two of the stress-isolated elastic beams are distributed along the first direction and are capable of expanding and contracting along the first direction, and the other two stress-isolated elastic beams are distributed along the second direction and are capable of expanding and contracting along the second direction. A connecting frame assembly is located between and connected to the stress-isolated elastic beam and the detection frame, and the connecting frame assembly is deformable along the third direction.

[0011] As a preferred embodiment of a two-axis gyroscope, the connecting frame assembly includes: A first central frame and a second central frame are fitted together. The first central frame is connected to each of the stress-isolation elastic beams. The central anchor point and the four stress-isolation elastic beams are all located inside the first central frame. Four first central connecting beams, each of which is connected to the first central frame and the second central frame, wherein two of the first central connecting beams are distributed along the first direction and extend along the first direction, and the other two first central connecting beams are distributed along the second direction and extend along the second direction. Four second central connecting beams are provided, each of which is located between two detection frames and is connected to both the second central frame and the two detection frames.

[0012] As a preferred embodiment of a two-axis gyroscope, the preset angle is 45°, and the second central connecting beam includes a central connecting long straight beam and a central connecting short straight beam perpendicularly connected to its midpoint. The angles between the central connecting long straight beam and the central connecting short straight beam and the first direction are both 45°.

[0013] As a preferred embodiment of a two-axis gyroscope, the stress-isolated elastic beam includes a stress-isolated elastic frame and a stress-isolated elastic connector. Both the stress-isolated elastic frame and the stress-isolated elastic connector are capable of extending and retracting along the first direction or the second direction. The middle part of one side of the stress-isolated elastic frame is connected to the central anchor point, and the middle part of the other side is connected to the middle part of the stress-isolated elastic connector. Both ends of the stress-isolated elastic connector are connected to the connecting frame assembly.

[0014] The beneficial effects of this invention are as follows: The two-axis gyroscope disclosed in this invention features four orthogonally symmetrically distributed decoupling frames. The decoupling frames and driving frames alternate, with the four driving frames diagonally positioned. Each decoupling frame is connected to two driving frames, and each detection decoupling beam is also connected to two driving frames. The four detection decoupling beams correspond one-to-one with and are connected to the four decoupling frames. This results in a more compact and simpler structure, easier manufacturing, and significantly optimized internal chip layout, effectively reducing the total chip surface area. The added decoupling frames avoid errors caused by orthogonal coupling of the gyroscope, improving detection accuracy. The decoupling design increases the consistency of decoupling frame movement, avoiding detection errors caused by displacement differences in the decoupling frames due to inconsistent driving forces. This improves detection sensitivity and anti-interference capability. In driving mode, two driving frames located at a diagonal position... The drive frames reciprocate along opposing or opposite driving directions, while two drive frames located at opposite or opposite diagonal positions reciprocate along opposing or opposite driving directions. This drives two decoupling frames distributed along the first direction to move in the opposite direction along the second direction. Simultaneously, it drives two decoupling frames distributed along the second direction to move in the opposite direction along the first direction. This structural design significantly reduces the possibility of decoupling frames becoming skewed or coupled during movement, thus effectively ensuring the smoothness and controllability of its movement. It suppresses mechanical interference between the driving mode and the detection mode from the source, enhances the motion stability of the decoupling frames, and improves the measurement accuracy and long-term stability of the gyroscope's angular velocity detection. It solves the contradiction between high precision, high sensitivity, and simplified structural design, and helps the gyroscope to be integrated and developed into miniaturized, low-cost devices. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments of the present invention will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of the present invention and these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of a two-axis gyroscope provided in a specific embodiment of the present invention; Figure 2 This is a schematic diagram of the drive frame, drive electrodes, and drive detection electrodes of a two-axis gyroscope provided in a specific embodiment of the present invention; Figure 3 This is a schematic diagram of the central part of a two-axis gyroscope provided in a specific embodiment of the present invention; Figure 4 This is a schematic diagram of a two-axis gyroscope in driving mode provided in a specific embodiment of the present invention; Figure 5 This is a schematic diagram of a two-axis gyroscope detecting angular velocity in the X-axis direction according to a specific embodiment of the present invention; Figure 6 This is a schematic diagram of a two-axis gyroscope detecting angular velocity in the Y-axis direction, provided in a specific embodiment of the present invention.

[0017] In the picture: 11. Decoupling box; 1101. First decoupling sub-box; 1102. Second decoupling sub-box; 1103. Third decoupling sub-box; 1104. Fourth decoupling sub-box; 21. Drive frame; 2101. First drive sub-frame; 2102. Second drive sub-frame; 2103. Third drive sub-frame; 2104. Fourth drive sub-frame; 22. Drive electrode; 221. Drive movable comb tooth; 222. Drive fixed comb tooth; 23. Drive detection electrode; 231. Drive detection movable comb tooth; 232. Drive detection fixed comb tooth; 31. Detection frame; 3101. First detection sub-frame; 3102. Second detection sub-frame; 3103. Third detection sub-frame; 3104. Fourth detection sub-frame; 321. First detection electrode; 322. Second detection electrode; 41. Detect the decoupling beam; 411. Detect the decoupling long straight beam; 412. Detect the decoupling short straight beam; 42. Drive the decoupling beam; 421. Drive the decoupling elastic beam; 422. Drive the decoupling straight beam; 51. Central anchor point; 52. Stress-isolated elastic beam; 521. Stress-isolated elastic frame; 522. Stress-isolated elastic connector; 53. First central frame; 54. Second central frame; 55. First central connecting beam; 56. Second central connecting beam; 561. Central connecting long straight beam; 562. Central connecting short straight beam; 61. Drive the fixed anchor point; 62. Drive the elastic connecting beam; 63. Decouple the fixed anchor point; 64. Decouple the elastic connecting beam. Detailed Implementation

[0018] To make the technical problems solved by the present invention, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0019] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions.

[0020] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to fixed connections or detachable connections; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; or internal connections between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0021] This embodiment provides a two-axis gyroscope, defining a first direction, a second direction, and a third direction that are perpendicular to each other, such as... Figures 1 to 3 As shown, the two-axis gyroscope includes four decoupling frames 11, four drive frames 21, four detection frames 31, four detection-decoupling beams 41, and detection electrodes. The four decoupling frames 11 are orthogonally and symmetrically distributed along a first direction and a second direction. The decoupling frames 11 and drive frames 21 are alternately distributed, and the four drive frames 21 are diagonally distributed. Each drive frame 21 is connected to two decoupling frames 11. In the drive mode, two drive frames 21 located at one set of diagonal positions reciprocate along driving directions that are facing each other or opposite to each other, while two drive frames 21 located at another set of diagonal positions reciprocate along driving directions that are facing each other or opposite to each other, so as to drive two decoupling frames 11 distributed along the first direction to move in the opposite direction along the second direction, and at the same time, drive two decoupling frames 11 distributed along the second direction to move in the opposite direction along the first direction. The angle between the driving direction and the first direction is a preset angle. Four detection frames 31 correspond one-to-one with four decoupling frames 11 and are orthogonally and symmetrically distributed along the first and second directions. Two detection frames 31 distributed along the first direction are elastically connected to their corresponding decoupling frames 11 along the second direction, and the other two detection frames 31 distributed along the second direction are elastically connected to their corresponding decoupling frames 11 along the first direction. Four detection decoupling beams 41 correspond one-to-one with and are connected to the four decoupling frames 11. The four detection decoupling beams 41 and four driving frames 21 are arranged alternately, with each detection decoupling beam 41 connected to two driving frames 21. Detection electrodes are mounted on the detection frames 31 and are used to detect the angular velocity around the first and second directions.

[0022] Specifically, such as Figure 1 As shown, in this embodiment, the first direction is the X-axis direction, the second direction is the Y-axis direction, and the third direction is the Z-axis direction. This two-axis gyroscope is used to detect the angular velocities in the X-axis and Y-axis directions. When detecting the angular velocity around the X-axis, the two decoupling frames 11 and two detection frames 31 distributed along the X-axis can move along the Z-axis. At this time, the detection decoupling beam 41 connected to the two decoupling frames 11 can deform along the Z-axis, so that the decoupling frames 11 will not drive the drive frame 21 to move, thus achieving decoupling of detection and drive. When detecting the angular velocity around the Y-axis, the two decoupling frames 11 and two detection frames 31 distributed along the Y-axis can move along the Z-axis. At this time, the detection decoupling beam 41 connected to the two decoupling frames 11 can deform along the Z-axis, so that the decoupling frames 11 will not drive the drive frame 21 to move, thus achieving decoupling of detection and drive.

[0023] The two-axis gyroscope provided in this embodiment has four decoupling frames 11 orthogonally and symmetrically distributed. The decoupling frames 11 and driving frames 21 are alternately distributed, and the four driving frames 21 are diagonally arranged. Each detection decoupling beam 41 is connected to two driving frames 21, and the four detection decoupling beams 41 correspond one-to-one with and are connected to the four decoupling frames 11. The structure is more compact and simple, easier to manufacture, and greatly optimizes the internal space layout of the chip, thereby effectively reducing the total surface area of ​​the chip. The added decoupling frames 11 can avoid the errors caused by the orthogonal coupling of the gyroscope and improve the detection accuracy. The decoupling design increases the consistency of the movement of the decoupling frames 11, avoiding the detection error caused by the displacement difference of the decoupling frames 11 due to the inconsistent driving force of the driving frames 21, thus improving the detection sensitivity and anti-interference ability. Each decoupling frame 11 is connected to two driving frames 21. In the driving mode, they are located in a pair Two drive frames 21 at the corner positions reciprocate along driving directions that are either facing each other or moving away from each other, while two drive frames 21 at another set of diagonal positions reciprocate along driving directions that are either facing each other or moving away from each other. This drives two decoupling frames 11 distributed along the first direction to move in the opposite direction along the second direction. At the same time, it drives two decoupling frames 11 distributed along the second direction to move in the opposite direction along the first direction. This structural design greatly reduces the possibility of the decoupling frames 11 becoming skewed or coupled during movement, thus effectively ensuring the smoothness and controllability of its movement. It suppresses the mechanical interference between the driving mode and the detection mode from the source, enhances the movement stability of the decoupling frames 11, and thus improves the measurement accuracy and long-term stability of the gyroscope angular velocity detection. It solves the problem of the contradiction between high precision, high sensitivity and simplified structural design, and helps the gyroscope to be integrated and developed in miniaturized, low-cost devices.

[0024] like Figure 2As shown, in this embodiment, each drive frame 21 is provided with a drive electrode 22 and a drive detection electrode 23. The drive electrode 22 includes a drive movable comb tooth 221 and a drive fixed comb tooth 222, and the drive detection electrode 23 includes a drive detection movable comb tooth 231 and a drive detection fixed comb tooth 232. The drive movable comb tooth 221 and the drive detection movable comb tooth 231 are both disposed on the drive frame 21, and the drive fixed comb tooth 222 and the drive detection fixed comb tooth 232 are both disposed on the substrate. The drive electrode 22 on each drive frame 21 can drive the corresponding drive frame 21 to move along the drive direction, and the drive detection electrode 23 can detect the movement of the drive frame 21 in real time, thereby feeding back to the drive electrode 22 to ensure the stability of the drive frame 21's movement in the drive mode.

[0025] like Figure 2 As shown, the two-axis gyroscope in this embodiment also includes drive fixed anchor points 61 and drive elastic connecting beams 62. The drive fixed anchor points 61 are fixed on the substrate, one end of the drive elastic connecting beams 62 is fixed to the drive fixed anchor points 61, and the other end of the drive elastic connecting beams 62 is connected to the drive frame 21. The drive elastic connecting beams 62 can extend and retract along the drive direction of the drive frame 21 to which they are connected. Each drive frame 21 corresponds to four drive elastic connecting beams 62 and four drive fixed anchor points 61. The four drive elastic connecting beams 62 correspond to the four corners of the drive frame 21, enabling the drive frame 21 to move stably along the drive direction.

[0026] In addition, such as Figure 1 As shown, the two-axis gyroscope in this embodiment also includes decoupling fixed anchor points 63 and decoupling elastic connecting beams 64. The decoupling fixed anchor points 63 are fixed on the substrate, one end of the decoupling elastic connecting beams 64 is fixed to the decoupling fixed anchor points 63, and the other end of the decoupling elastic connecting beams 64 is connected to the decoupling frame 11. The decoupling elastic connecting beams 64 can extend and retract along the direction of motion of the decoupling frame 11 in the driving mode. Each decoupling frame 11 corresponds to two decoupling fixed anchor points 63 and two decoupling elastic connecting beams 64. For two decoupling frames 11 distributed along the X-axis direction, the two decoupling elastic connecting beams 64 corresponding to the decoupling frame 11 are located on both sides of the decoupling frame 11 along the Y-axis direction; for two decoupling frames 11 distributed along the Y-axis direction, the two decoupling elastic connecting beams 64 corresponding to the decoupling frame 11 are located on both sides of the decoupling frame 11 along the X-axis direction.

[0027] like Figure 1 As shown, the detection electrode in this embodiment includes a first detection electrode 321 and a second detection electrode 322. The first detection electrode 321 is formed by a portion of the structure of a detection frame 31 distributed along a first direction and a substrate directly opposite it. The first detection electrode 321 is used to detect the angular velocity about the first direction. Figure 1The dashed boxes on the two detection frames 31 distributed along the first direction are shown. The second detection electrode 322 is formed by a portion of the structure of the detection frames 31 distributed along the second direction and the substrate directly opposite them. The second detection electrode 322 is used to detect the angular velocity about the second direction. Figure 1 The dashed boxes on the two detection frames 31 distributed along the second direction are shown. Specifically, when detecting the angular velocity around the X-axis, the two detection frames 31 arranged along the X-axis move in opposite directions along the Z-axis. At this time, the first detection electrode 321 can detect the angular velocity in the X-axis direction. When detecting the angular velocity around the Y-axis, the two detection frames 31 arranged along the Y-axis move in opposite directions along the Z-axis. At this time, the second detection electrode 322 can detect the angular velocity around the Y-axis.

[0028] like Figure 1 As shown, each detection decoupling beam 41 includes a detection decoupling long straight beam 411 and a detection decoupling short straight beam 412 connected to its center. The two ends of the detection decoupling long straight beam 411 are connected to two drive frames 21 respectively, and the detection decoupling short straight beam 412 is connected to the decoupling frame 11 and is perpendicular to the detection decoupling long straight beam 411. This structure of the detection decoupling beam 41 further improves the anti-interference capability of the gyroscope.

[0029] like Figure 1 As shown, the two-axis gyroscope in this embodiment also includes four drive decoupling beams 42. Each of the four drive decoupling beams 42 corresponds one-to-one with a decoupling frame 11 and a detection frame 31. Each drive decoupling beam 42 is connected to one decoupling frame 11 and one detection frame 31. The drive decoupling beam 42 can extend and retract along the direction of motion of the decoupling frame 11 in the drive mode, and can also deform in a third direction. In the drive mode, the drive frame 21 drives the decoupling frame 11 to move, and the drive decoupling beam 42 extends and retracts along the direction of motion of the decoupling frame 11 in the drive mode, so that the detection frame 31 does not move accordingly, thus achieving decoupling of the drive from the detection.

[0030] Specifically, such as Figure 1 As shown, each drive decoupling beam 42 includes a drive decoupling elastic beam 421 and a drive decoupling straight beam 422 connected to its center. Both ends of the drive decoupling elastic beam 421 are connected to the decoupling frame 11, and the drive decoupling straight beam 422 is connected to the detection frame 31. The drive decoupling elastic beam 421 can extend and retract along the motion direction of the decoupling frame 11 connected to it in the drive mode. The extension direction of the drive decoupling straight beam 422 is perpendicular to the extension and retraction direction of the drive decoupling elastic beam 421.

[0031] The two-axis gyroscope in this embodiment is a fully decoupled gyroscope. For a fully decoupled gyroscope, its detection capacitance sensitivity C dps The calculation formula is as follows:

[0032] In the formula, y dps It is the detection displacement sensitivity of the detection frame 31; C s It is a detection capacitor; d is the electrode gap of the corresponding first detection electrode 321 or second detection electrode 322.

[0033] The displacement detection sensitivity y of the two-axis gyroscope dps The vibration amplitude of the detection frame 31 in the detection mode is directly related to the vibration amplitude. This vibration amplitude is determined by the Coriolis force on the decoupling frame 11 in the detection direction and its transmission characteristics. Specifically, the Coriolis force on the decoupling frame 11 is proportional to its mass and the driving speed of the driving frame 21. Therefore, under the condition that the driving amplitude (driving displacement and frequency) remains constant, increasing the mass m of the decoupling frame 11... c This can effectively enhance the Coriolis force, thereby increasing the response of the detection mode and ultimately improving y. dps .

[0034] The detection displacement sensitivity y of detection frame 31 dps The calculation formula is as follows:

[0035] In the formula, x is the driving amplitude; Δf is the frequency difference between the driving frequency and the detection frequency.

[0036] make Then the above equation can be transformed into:

[0037] Detection capacitor C s The size is proportional to the size of the detection box 31, i.e., m s The larger C s The larger the value, the following relationship exists between the two:

[0038] In the formula, C is a fixed coefficient.

[0039] For a space-constrained gyroscope, the mass m of the decoupling frame 11 is... c The mass m of the detection frame 31 s The sum M is a constant. The mass ratio of decoupling box 11 and detection box 31 can balance the generation efficiency of Coriolis force and the response degree of detection displacement, thereby improving the sensitivity of capacitance detection and ultimately achieving the desired gyroscope capacitance sensitivity C. dps Optimization.

[0040] Combining the above formulas, the sensitivity C of the detection capacitor can be obtained. dpsThe calculation formula is as follows:

[0041] From the above formula, we can see that when m c When m = M / 2, that is, the mass m of decoupling box 11 c The mass m of the detection frame 31 is equal to s C dps The value is the largest. Therefore, within a limited space, the two-axis gyroscope has the highest sensitivity when the mass of each detection box 31 is equal to the mass of each decoupling box 11.

[0042] like Figure 3 As shown, the two-axis gyroscope in this embodiment also includes a central anchor point 51, four stress-isolated elastic beams 52, and a connecting frame assembly. The central anchor point 51 is fixed on the substrate. The four stress-isolated elastic beams 52 can deform along a first direction or a second direction. Two of the stress-isolated elastic beams 52 are distributed along the first direction and can extend and retract along the first direction. The other two stress-isolated elastic beams 52 are distributed along the second direction and can extend and retract along the second direction. The connecting frame assembly is located between the stress-isolated elastic beams 52 and the detection frame 31 and is connected to both. The connecting frame assembly can deform along a third direction.

[0043] Furthermore, such as Figure 3 As shown, the connecting frame assembly includes a first central frame 53 and a second central frame 54, four first central connecting beams 55, and four second central connecting beams 56. The second central frame 54 is fitted outside the first central frame 53. The first central frame 53 is connected to each stress-isolation elastic beam 52. The central anchor point 51 and the four stress-isolation elastic beams 52 are all located inside the first central frame 53. Each first central connecting beam 55 is connected to both the first central frame 53 and the second central frame 54. Two of the first central connecting beams 55 are distributed and extend along a first direction, and the other two are distributed and extend along a second direction. Each second central connecting beam 56 is located between two detection frames 31, and each second central connecting beam 56 is connected to both the second central frame 54 and the two detection frames 31. The first central frame 53 is square, and the second central frame 54 is octagonal. The eight sides of the second central frame 54 are sequentially connected to the first central connecting beams 55 and the second central connecting beams 56.

[0044] The preset angle in this embodiment is 45°, such as Figure 3As shown, the second central connecting beam 56 includes a centrally connected long straight beam 561 and a centrally connected short straight beam 562 perpendicularly connected to its midpoint. The angles between the centrally connected long straight beam 561 and the centrally connected short straight beam 562 and the first direction are both 45°, and the angles between the centrally connected long straight beam 561 and the centrally connected short straight beam 562 and the second direction are also both 45°. That is, in this embodiment, the driving direction of the two-axis gyroscope's driving frame 21 in the driving mode forms a 45° angle with both the first and second directions. This arrangement ensures that the driving speeds of the four decoupling frames 11 in the driving mode are the same, guaranteeing the stability of the two-axis gyroscope's motion. It should be noted that in other embodiments of the present invention, the preset angle is not limited to the 45° specified in this embodiment; it can also be 30°, 60°, or other angle values, specifically set according to actual needs.

[0045] like Figure 3 As shown, the stress-isolation elastic beam 52 in this embodiment includes a stress-isolation elastic frame 521 and a stress-isolation elastic connector 522. Both the stress-isolation elastic frame 521 and the stress-isolation elastic connector 522 can extend and retract along a first direction or a second direction, that is, the stress-isolation elastic beam 52 can extend and retract along one of the first and second directions. The middle part of one side of the stress-isolation elastic frame 521 is connected to the central anchor point 51, and the middle part of the other side is connected to the middle part of the stress-isolation elastic connector 522. Both ends of the stress-isolation elastic connector 522 are connected to the connecting frame assembly. Specifically, the stress-isolation elastic frames 521 and stress-isolation elastic connectors 522 of two stress-isolation elastic beams 52 distributed along the first direction can extend and retract along the first direction, while the stress-isolation elastic frames 521 and stress-isolation elastic connectors 522 of two stress-isolation elastic beams 52 distributed along the second direction can extend and retract along the second direction. When the external environment vibrates, the vibration is transmitted to the central anchor point 51. The presence of the stress isolation elastic beam 52 prevents the stress from being transmitted to the first central frame 53. That is, the stress isolation elastic beam 52 absorbs the stress from the central anchor point 51 through its own deformation, ensuring that the two-axis gyroscope is not affected by the external environment.

[0046] like Figures 4 to 6As shown, in this embodiment, the four driving frames 21 are defined as the first driving sub-frame 2101, the second driving sub-frame 2102, the third driving sub-frame 2103, and the fourth driving sub-frame 2104, respectively; the four decoupling frames 11 are defined as the first decoupling sub-frame 1101, the second decoupling sub-frame 1102, the third decoupling sub-frame 1103, and the fourth decoupling sub-frame 1104, respectively; and the four detection frames 31 are defined as the first detection sub-frame 3101, the second detection sub-frame 3102, the third detection sub-frame 3103, and the fourth detection sub-frame 2104, respectively. The detection sub-frame 3104 includes a first decoupling sub-frame 1101, a first detection sub-frame 3101, a second detection sub-frame 3102, and a second decoupling sub-frame 1102 distributed sequentially along the X-axis. The third decoupling sub-frame 1103, a third detection sub-frame 3103, a fourth detection sub-frame 3104, and a fourth decoupling sub-frame 1104 distributed sequentially along the Y-axis. The first driving sub-frame 2101 is directly opposite the second driving sub-frame 2102, and the third driving sub-frame 2103 is directly opposite the fourth driving sub-frame 2104.

[0047] like Figure 4 As shown, in the driving mode, when the first driving sub-frame 2101 and the second driving sub-frame 2102 move in opposite driving directions, and the third driving sub-frame 2103 and the fourth driving sub-frame 2104 move in opposite driving directions, the first decoupling sub-frame 1101 moves along the positive Y-axis direction under the drive of the first driving sub-frame 2101 and the fourth driving sub-frame 2104, and the second decoupling sub-frame 1102 moves along the negative Y-axis direction under the drive of the second driving sub-frame 2102 and the third driving sub-frame 2103, and the third decoupling sub-frame 1103 moves along the negative Y-axis direction under the drive of the first driving sub-frame 2101 and the fourth driving sub-frame 2104. Driven by the third drive sub-frame 2103, it moves along the negative X-axis direction. Driven by the second drive sub-frame 2102 and the fourth drive sub-frame 2104, it moves along the positive X-axis direction. When the first drive sub-frame 2101 and the second drive sub-frame 2102 move in opposite driving directions, and the third drive sub-frame 2103 and the fourth drive sub-frame 2104 move in opposite driving directions, the first decoupling sub-frame 1101, the second decoupling sub-frame 1102, the third decoupling sub-frame 1103, and the fourth decoupling sub-frame 1104 all move in their respective opposite driving directions.

[0048] It should be noted that in the driving mode, the driving decoupling beam 42 connected to the first detection sub-frame 3101 and the second detection sub-frame 3102 stretches and deforms along the Y-axis direction, while the driving decoupling beam 42 connected to the third detection sub-frame 3103 and the fourth detection sub-frame 3104 stretches and deforms along the X-axis direction, so that the decoupling frame 11 will not drive the detection frame 31 connected to it to move along the X-axis or Y-axis direction, thus realizing the decoupling from driving to detection.

[0049] When detecting angular velocity around the X-axis, its working principle is as follows: Figure 5As shown, when an external angular velocity signal about the X-axis is input, due to the Coriolis effect, the first decoupling sub-frame 1101 and the second decoupling sub-frame 1102 vibrating along the Y-axis will be subjected to a Coriolis force in the Z-axis direction. Since the first decoupling sub-frame 1101 and the second decoupling sub-frame 1102 move in opposite directions along the Y-axis in the driving mode, the Coriolis forces they experience are in opposite directions, resulting in opposite movements along the positive and negative Z-axis directions, respectively. This opposite movement is transmitted to the detection frame 31 through the driving decoupling beam 42, causing the first detection sub-frame 3101 and the second detection sub-frame 3102 connected to it to synchronously displace along the Z-axis direction. The displacement of the first detection sub-frame 3101 and the second detection sub-frame 3102 causes a change in the gap between them and the substrate, which in turn causes a corresponding change in the capacitance value of the first detection electrode 321. After the capacitance change is converted into a capacitance voltage, filtered, demodulated and converted into an analog-to-digital signal by the on-chip integrated signal processing circuit, an electrical signal proportional to the magnitude of the angular velocity can be extracted. Finally, the angular velocity value in the X-axis direction is obtained through a calibration algorithm.

[0050] It should be noted that when detecting the angular velocity around the X-axis, the detection decoupling beam 41 connected to the first decoupling sub-frame 1101 and the second decoupling sub-frame 1102 deforms along the Z-axis. That is, the detection decoupling beam 41 absorbs the displacement in the Z-axis direction, and the drive frame 21 will not move along the Z-axis direction with the decoupling frame 11, thus realizing the decoupling of detection and drive.

[0051] When detecting angular velocity around the Y-axis, its working principle is as follows: Figure 6 As shown, when an external angular velocity signal about the Y-axis is input, due to the Coriolis effect, the third decoupling sub-frame 1103 and the fourth decoupling sub-frame 1104, which vibrate along the X-axis, will be subjected to Coriolis force in the Z-axis direction. Since the third decoupling sub-frame 1103 and the fourth decoupling sub-frame 1104 move in opposite directions along the X-axis in the driving mode, the Coriolis forces they experience are in opposite directions, resulting in opposite movements along the positive and negative Z-axis directions, respectively. This opposite movement is transmitted through the driving decoupling beam 42, causing the rigidly connected third detection sub-frame 3103 and the fourth detection sub-frame 3104 to synchronously displace along the Z-axis direction. The displacement of the third detection sub-frame 3103 and the fourth detection sub-frame 3104 causes a change in the gap between them and the substrate, which in turn causes a corresponding change in the capacitance value of the second detection electrode 322. After the capacitance change is converted, filtered, demodulated and converted from analog to digital by the on-chip integrated signal processing circuit, an electrical signal proportional to the magnitude of the angular velocity can be extracted. Finally, the angular velocity value in the Y-axis direction is obtained through a calibration algorithm.

[0052] It should be noted that when detecting the angular velocity around the Y-axis, the detection decoupling beam 41 connected to the third decoupling sub-frame 1103 and the fourth decoupling sub-frame 1104 deforms along the Z-axis. That is, the detection decoupling beam 41 absorbs the displacement in the Z-axis direction, and the drive frame 21 will not move along the Z-axis direction with the decoupling frame 11, thus realizing the decoupling of detection and drive.

[0053] Note that the above description is merely a preferred embodiment of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and various obvious changes, readjustments, and substitutions can be made without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments, and may include many other equivalent embodiments without departing from the concept of the present invention, the scope of which is determined by the scope of the appended claims.

Claims

1. A two-axis gyroscope, characterized in that, The two-axis gyroscope comprises: a first direction, a second direction, and a third direction that are mutually perpendicular; The system comprises four decoupling frames and four driving frames. The four decoupling frames are orthogonally and symmetrically distributed along the first direction and the second direction. The decoupling frames and the driving frames are alternately distributed, and the four driving frames are diagonally distributed. Each driving frame is connected to two decoupling frames. In the driving mode, two driving frames located at one set of diagonal positions reciprocate along driving directions that are facing each other or opposite to each other, while two driving frames located at another set of diagonal positions reciprocate along driving directions that are facing each other or opposite to each other, so as to drive two decoupling frames distributed along the first direction to move in the opposite direction along the second direction. At the same time, it drives two decoupling frames distributed along the second direction to move in the opposite direction along the first direction. The angle between the driving direction and the first direction is a preset angle. Four detection frames are respectively corresponding to four decoupling frames and are orthogonally and symmetrically distributed along the first direction and the second direction. Two of the detection frames distributed along the first direction are elastically connected to the corresponding decoupling frames along the second direction, and the other two detection frames distributed along the second direction are elastically connected to the corresponding decoupling frames along the first direction. Four driving decoupling beams are provided, each corresponding to one of the four decoupling frames and the four detection frames. Each driving decoupling beam is connected to both the decoupling frame and the detection frame. The driving decoupling beam can extend and retract along the direction of motion of the decoupling frame connected to it in the driving mode, and can also deform along the third direction. Four detection decoupling beams are provided, each of which corresponds to and is connected to one of the four decoupling frames. The four detection decoupling beams and the four driving frames are arranged alternately, and each detection decoupling beam is connected to two driving frames. A detection electrode is disposed on the detection frame and is used to detect angular velocities about the first direction and the second direction.

2. The two-axis gyroscope according to claim 1, characterized in that, The detection decoupling beam includes a long detection decoupling beam and a short detection decoupling beam connected to its center. The two ends of the long detection decoupling beam are respectively connected to the two drive frames. The short detection decoupling beam is connected to the decoupling frame and is perpendicular to the long detection decoupling beam.

3. The two-axis gyroscope according to claim 1, characterized in that, The driving decoupling beam includes a driving decoupling elastic beam and a driving decoupling straight beam connected to its center. Both ends of the driving decoupling elastic beam are connected to the decoupling frame, and the driving decoupling straight beam is connected to the detection frame. The driving decoupling elastic beam can extend and retract along the movement direction of the decoupling frame connected to it in the driving mode. The extension direction of the driving decoupling straight beam is perpendicular to the extension and retraction direction of the driving decoupling elastic beam.

4. The two-axis gyroscope of claim 1, wherein, The mass of each detection box is equal to the mass of each decoupling box.

5. The two-axis gyroscope of claim 1, wherein, The detection electrode includes: A first detection electrode is formed by the detection frame distributed along the first direction and a substrate facing it, and the first detection electrode is used to detect the angular velocity in the first direction; The second detection electrode is formed by the detection frame distributed along the second direction and the substrate directly opposite it, and the second detection electrode is used to detect the angular velocity in the second direction.

6. The two-axis gyroscope according to claim 1, characterized in that, The two-axis gyroscope also includes: The central anchor point is fixed to the substrate; Four stress-isolated elastic beams are capable of deforming along the first direction or the second direction, wherein two of the stress-isolated elastic beams are distributed along the first direction and are capable of expanding and contracting along the first direction, and the other two stress-isolated elastic beams are distributed along the second direction and are capable of expanding and contracting along the second direction. A connecting frame assembly is located between and connected to the stress-isolated elastic beam and the detection frame, and the connecting frame assembly is deformable along the third direction.

7. The two-axis gyroscope according to claim 6, characterized in that, The connection frame component includes: A first central frame and a second central frame are fitted together. The first central frame is connected to each of the stress-isolation elastic beams. The central anchor point and the four stress-isolation elastic beams are all located inside the first central frame. Four first central connecting beams, each of which is connected to the first central frame and the second central frame, wherein two of the first central connecting beams are distributed along the first direction and extend along the first direction, and the other two first central connecting beams are distributed along the second direction and extend along the second direction. Four second central connecting beams are provided, each of which is located between two detection frames and is connected to both the second central frame and the two detection frames.

8. The two-axis gyroscope according to claim 7, characterized in that, The preset angle is 45°. The second central connecting beam includes a central connecting long straight beam and a central connecting short straight beam perpendicular to its midpoint. The angle between the central connecting long straight beam and the central connecting short straight beam and the first direction is 45°.

9. The two-axis gyroscope according to claim 6, characterized in that, The stress-isolated elastic beam includes a stress-isolated elastic frame and a stress-isolated elastic connector. Both the stress-isolated elastic frame and the stress-isolated elastic connector are capable of extending and retracting along the first direction or the second direction. The middle part of one side of the stress-isolated elastic frame is connected to the central anchor point, and the middle part of the other side is connected to the middle part of the stress-isolated elastic connector. Both ends of the stress-isolated elastic connector are connected to the connecting frame assembly.

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