Purification chamber parameter detection device and purification chamber parameter monitoring method

Abstract

The present application relates to a kind of purification chamber parameter detection device and purification chamber parameter monitoring method.The purification chamber parameter detection device includes: mobile bearing platform, for moving in purification chamber according to preset trajectory, test station is provided on mobile bearing platform;Space positioning component, set up on mobile bearing platform, for obtaining the coordinate position to be measured of the to-be-measured site in purification chamber;Parameter acquisition component, set up on test station and connect space positioning component, parameter acquisition component includes detector, space positioning component is used to adjust the position of detector to coordinate position to be measured, detector is used to detect the parameter of to-be-measured site, detector includes any one or more than two combinations of air particle concentration detector, wind speed detector, temperature detector and humidity detector.The present application realizes the automatic detection and monitoring of parameter in purification chamber, improves the accuracy of to-be-measured site position, avoids the emergence of detection blind area.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing technology, and in particular to a cleanroom parameter detection device and a cleanroom parameter monitoring method. Background Technology

[0002] Cleanrooms are core production spaces in high-end manufacturing industries such as biopharmaceuticals and semiconductors. Parameters such as air particle size, temperature and humidity, fan filter unit (FFU) wind speed, and colony count directly determine the quality and pass rate of the products produced. Therefore, accurate, real-time, and comprehensive detection and monitoring of various parameters in cleanrooms is a key aspect of production management in related industries.

[0003] Traditional methods for detecting and monitoring various parameters within cleanrooms primarily rely on manual testing. This approach has several significant drawbacks: First, for large cleanrooms with numerous rooms and sampling points requiring testing, a comprehensive manual test is time-consuming, resulting in long testing cycles and low efficiency. Second, manual testing requires not only specialized personnel but also dedicated protective clothing. Personnel must undergo cumbersome cleaning procedures before entering the cleanroom, and their own activities can cause contamination, affecting the accuracy and reliability of the results. Third, manual testing lacks comprehensive coverage and repeatability, leading to poor comparability of historical data and hindering effective trend analysis. Fourth, manually recorded data requires manual entry, processing, and analysis, increasing workload and increasing the risk of errors and omissions. Furthermore, the lack of real-time feedback prevents timely detection and intervention of anomalies, potentially causing production quality issues.

[0004] Therefore, improving the accuracy and reliability of indoor parameter detection and monitoring in cleanrooms, while enhancing the efficiency of detection and monitoring, achieving real-time feedback, reducing blind spots, increasing the coverage and flexibility of detection and monitoring, and ensuring production efficiency and quality are urgent technical problems that need to be solved. Summary of the Invention

[0005] This invention provides a cleanroom parameter detection device and a cleanroom parameter monitoring method, which improves the accuracy and reliability of cleanroom parameter detection and monitoring, while also improving the efficiency of detection and monitoring, enabling real-time feedback, reducing detection blind spots, increasing the coverage and flexibility of detection and monitoring, and ensuring production efficiency and quality.

[0006] According to some embodiments, the present invention provides a cleanroom parameter detection device, comprising: A mobile carrier platform is used to move within a cleanroom according to a preset trajectory, and a test station is provided on the mobile carrier platform; A spatial positioning component is disposed on the mobile carrier platform, and the spatial positioning component is used to obtain the coordinate position of the test site in the clean room; A parameter acquisition component is set on the test station and connected to the spatial positioning component. The parameter acquisition component includes a detector. The spatial positioning component is used to adjust the position of the detector to the coordinate position to be measured. The detector is used to detect the parameters of the site to be measured. The detector includes any one or a combination of two or more of the following: an air particle concentration detector, a wind speed detector, a temperature detector, and a humidity detector.

[0007] In some embodiments, the mobile carrier platform includes: A mobile actuator is used to move within a cleanroom according to a preset trajectory. A lifting platform is installed on the mobile actuator. The lifting platform can move up and down in the vertical direction, and the test station is set on the lifting platform.

[0008] In some embodiments, the spatial positioning component includes: A layout diagram loading structure is used to load the layout diagram of the cleanroom, the layout diagram including the installation positions of multiple fan filter units in the cleanroom; The positioning structure is connected to the layout diagram loading structure and is used to obtain the target coordinates of the target fan filter unit according to the layout diagram, and to obtain at least one coordinate position within a preset range around the target coordinates as the coordinate position to be measured. The structure is adjusted to connect the positioning structure and the detector, thereby adjusting the position of the detector to the coordinate position to be measured.

[0009] In some embodiments, the positioning structure includes: An identification mechanism is used to obtain the current location of the mobile carrier platform; A first coordinate generation mechanism, connected to the identification mechanism and the layout map loading structure, is used to obtain the target coordinates of the target wind turbine filter unit based on the current position of the mobile carrier platform and the layout map. The second coordinate generation mechanism, connected to the first coordinate generation mechanism, is used to generate multiple coordinate positions within a preset range around the target coordinates as multiple coordinate positions to be measured, according to preset rules.

[0010] In some embodiments, the adjustment structure includes: A rotating mechanism is connected to the detector, and the rotating mechanism is capable of rotating within a preset angle range; A vertical telescopic mechanism is connected to the detector, and the vertical telescopic mechanism is capable of telescopic movement in the vertical direction; A horizontal telescopic mechanism is connected to the detector, and the horizontal telescopic mechanism is capable of telescopic movement along a horizontal direction that intersects perpendicularly with the vertical direction.

[0011] In some embodiments, it also includes: A data processing component is connected to the parameter acquisition component. The data processing component includes a transmission structure, which is used to transmit the parameters of the test site acquired by the parameter acquisition component to a remote monitoring terminal via a wireless network.

[0012] In some embodiments, the data processing component further includes: Memory, used to store parameter threshold ranges; An alarm, connected to the memory, is used to issue an alarm after confirming that the parameters of the test site acquired by the parameter acquisition component exceed the threshold range.

[0013] According to other embodiments, the present invention also provides a method for monitoring parameters in a cleanroom, comprising the following steps: Provide the cleanroom parameter detection device as described above; The mobile carrier platform is driven to move to the initial test site according to the preset trajectory; The spatial positioning component is controlled to obtain the coordinate position of the test site in the clean room, and the position of the detector is adjusted to the coordinate position of the test site. The detector is used to obtain the parameters of the site to be tested.

[0014] In some embodiments, the spatial positioning component is loaded with a layout diagram of the cleanroom, the layout diagram including the installation positions of multiple fan filter units within the cleanroom; the specific steps of controlling the spatial positioning component to obtain the coordinate position of the test site within the cleanroom and adjusting the position of the detector to the coordinate position of the test site include: The current location of the mobile carrier platform is obtained through the spatial positioning component; The target coordinates of the target fan filter unit are obtained based on the current position of the mobile carrier platform and the layout diagram. Multiple coordinate positions within a preset range around the target coordinates are generated according to preset rules as multiple coordinate positions to be measured.

[0015] In some embodiments, after obtaining the parameters of the site to be tested through the detector, the following steps are further included: The parameters of the site to be tested are transmitted to the remote monitoring terminal via a wireless network, and it is determined whether the parameters of the site to be tested collected by the parameter acquisition component exceed the threshold range. If so, an alarm is issued.

[0016] The cleanroom parameter detection device and cleanroom parameter monitoring method provided by this invention, through the coordinated operation of a mobile carrier platform, a spatial positioning component, and a parameter acquisition component, can achieve unmanned automated detection and monitoring of cleanroom parameters, reducing the investment cost of personnel and the difficulty of operation for personnel; at the same time, no personnel need to enter during the detection and monitoring process, reducing the probability of contamination to the cleanroom.

[0017] This invention uses a mobile platform to move the parameter acquisition component to the vicinity of the test site, achieving preliminary positioning (coarse positioning). Then, the spatial positioning component further determines the specific coordinates of the test site (precise positioning), improving the accuracy of the test site's location, eliminating positional and angular errors caused by manual operation, and ensuring standardized and unified detection and monitoring operations. Simultaneously, the movement of the mobile platform and the positioning of the spatial positioning component enable full-area, full-coverage detection and monitoring within the cleanroom, avoiding blind spots. Furthermore, the coordinated operation of the mobile platform, spatial positioning component, and parameter acquisition component improves the automation level and efficiency of parameter detection and monitoring within the cleanroom, enabling real-time feedback and ensuring production efficiency and quality.

[0018] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and are not intended to limit the invention. Techniques, methods, and apparatus known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and apparatus should be considered part of the specification. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the structure of the cleanroom parameter detection device in a specific embodiment of the present invention; Figure 2 This is a control block diagram of the cleanroom parameter detection device in a specific embodiment of the present invention; Figure 3 This is a flowchart of a cleanroom parameter monitoring method in a specific embodiment of the present invention.

[0021] Explanation of reference numerals in the attached figures 10 Mobile Host Platform 11 Mobile Actuators 12 lifting platforms 13 spatial positioning components 14 Parameter Acquisition Components 20 detectors 21 Data Processing Components 22 Transmission Structure 23 Memory 24-hour alarm 25 Layout Diagram Loading Structure 26 Identification Agencies 27 First coordinate generation mechanism 28 Second coordinate generation mechanism 29 Adjusting the structure Detailed Implementation The technical solutions in the embodiments of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0022] This specific embodiment provides a cleanroom parameter detection device. Figure 1 This is a schematic diagram of the structure of the cleanroom parameter detection device in a specific embodiment of the present invention. Figure 2 This is a control block diagram of the cleanroom parameter detection device in a specific embodiment of the present invention. Figure 1 and Figure 2 As shown, the cleanroom parameter detection device includes: The mobile carrier platform 10 is used to move within the cleanroom according to a preset trajectory, and a test station is provided on the mobile carrier platform 10. A spatial positioning component 13 is disposed on the mobile carrier platform 10. The spatial positioning component 13 is used to obtain the coordinate position of the test site in the clean room. A parameter acquisition component 14 is set on the test station and connected to the spatial positioning component 13. The parameter acquisition component 14 includes a detector 20. The spatial positioning component 13 is used to adjust the position of the detector 20 to the coordinate position to be measured. The detector 20 is used to detect the parameters of the site to be measured. The detector 20 includes any one or a combination of two or more of the following: an air particle concentration detector, a wind speed detector, a temperature detector, and a humidity detector.

[0023] Specifically, the cleanroom parameter detection device is used to detect environmental parameters within the cleanroom. The cleanroom parameter detection device includes a mobile support platform 10, a spatial positioning component 13, and a parameter acquisition component 14. The mobile support platform 10 carries the spatial positioning component 13 and the parameter acquisition component 14, and the mobile support platform 10 can move within the cleanroom along a preset trajectory, thereby transferring the spatial positioning component 13 and the parameter acquisition component 14 to an initial detection point (i.e., the vicinity of the point to be tested), to achieve preliminary positioning (i.e., coarse positioning) of the point to be tested. In one example, the mobile support platform 10 plans a movement path from its initial position based on the layout diagram of the cleanroom and the position of the point to be tested in the layout diagram, and uses the planned movement path as the preset trajectory to quickly transfer the spatial positioning component 13 and the parameter acquisition component 14 to the initial detection point. The spatial positioning component 13 is used to accurately locate the test site after the mobile carrier platform 10 reaches the initial detection site, determine the accurate coordinate position of the test site, i.e., the test coordinate position, and automatically adjust the position of the detector 20 to the test coordinate position to obtain the parameters of the test coordinate position. In one example, the test site is the location of a fan filter unit, and the parameters include any one or a combination of two or more of the following: air particle concentration, fan filter unit outlet air velocity, average air velocity, air velocity uniformity, temperature, and humidity. In another example, the parameters also include colony count.

[0024] This specific embodiment integrates the mobile support platform 10, the spatial positioning component 13, and the parameter acquisition component 14 into the cleanroom parameter detection device, thereby enabling unmanned automated detection and monitoring of cleanroom parameters. This reduces the investment cost and operational difficulty for staff. Furthermore, no personnel are required to enter the cleanroom during detection and monitoring, reducing the probability of contamination. Moreover, this embodiment improves the automation level and efficiency of cleanroom parameter detection and monitoring through the coordinated operation of the mobile support platform, spatial positioning component, and parameter acquisition component, enabling real-time feedback and ensuring production efficiency and quality. The mobile support platform 10 moves the parameter acquisition component 14 to the vicinity of the test site for preliminary positioning (coarse positioning). The spatial positioning component 13 then further determines the specific coordinates of the test site (precise positioning), improving the accuracy of the test site's location, eliminating positional and angular errors caused by manual operation, and ensuring the standardization and uniformity of detection and monitoring operations. Meanwhile, through the movement of the mobile carrier platform 10 and the positioning of the spatial positioning component 13, full-area, full-coverage detection and monitoring of the cleanroom can be achieved, avoiding blind spots. Furthermore, the detector 20 in the parameter acquisition component 14 of this specific embodiment includes any one or a combination of two or more of the following: an air particle concentration detector, a wind speed detector, a temperature detector, and a humidity detector. This allows for the simultaneous detection of multiple parameters without the need for multiple individual detection devices, improving the integration and flexibility of the detection process.

[0025] In some embodiments, the mobile carrier platform 10 includes: The mobile actuator 11 is used to move within the cleanroom according to a preset trajectory. The lifting platform 12 is installed on the mobile actuator 11. The lifting platform 12 can move up and down in the vertical direction. The test station is set on the lifting platform 12.

[0026] In one example, the mobile actuator 11 can be an automated guided vehicle (AGV). The AAV can be made of anti-static, flame-retardant, and easy-to-clean stainless steel to avoid interference from particles or static electricity generated during operation. The AAV can be equipped with a navigation unit, a path planning unit, and a motion execution unit. The navigation unit may include a camera. In one example, the camera is used to acquire real-time images of the cleanroom and transmit them to a remote monitoring terminal, allowing staff to remotely control the AAV to move along a preset trajectory. In another example, the AAV can also autonomously plan a detection path as the preset trajectory based on the layout of the cleanroom and the location of the initial detection point, achieving unmanned automated detection. The lifting platform 12 is fixedly installed on the mobile actuator 11, so that the movement of the mobile actuator 11 synchronously drives the movement of the lifting platform 12. The lifting platform 12 can move vertically, and the test station is set on the lifting platform 12 to adjust its vertical height.

[0027] In some embodiments, the spatial positioning component 13 includes: The layout diagram loading structure 25 is used to load the layout diagram of the clean room, which includes the installation positions of multiple fan filter units in the clean room. The positioning structure is connected to the layout diagram loading structure 25 and is used to obtain the target coordinates of the target fan filter unit according to the layout diagram, and to obtain at least one coordinate position within a preset range around the target coordinates as the coordinate position to be measured. Adjustment structure 29 connects the positioning structure and the detector 20 to adjust the position of the detector 20 to the coordinate position to be measured.

[0028] In some embodiments, the positioning structure includes: Identification mechanism 26 is used to obtain the current location of the mobile carrier platform 10; The first coordinate generation mechanism 27 is connected to the identification mechanism 26 and the layout map loading structure 25, and is used to obtain the target coordinates of the target fan filter unit according to the current position of the mobile carrier platform 10 and the layout map. The second coordinate generation mechanism 28 is connected to the first coordinate generation mechanism 27 and is used to generate multiple coordinate positions within a preset range around the target coordinates as multiple coordinate positions to be measured according to preset rules.

[0029] Specifically, the spatial positioning component 13 is used to accurately locate the position of the test site to be detected by the detector 20. The spatial positioning component 13 includes the layout map loading structure 25, which loads the layout map of the clean room. The layout map includes the installation positions of multiple fan filter units in the clean room, the number of each fan filter unit, and other information. The test site is located around a fan filter unit (i.e., the target fan filter unit). After the mobile carrier platform 10 arrives near the target fan filter unit (e.g., below the target fan filter unit) according to the preset trajectory, the identification mechanism 26 can obtain the current position of the mobile carrier platform 10 by combining visual recognition, laser positioning, and indoor navigation positioning. The first coordinate generation mechanism 27 obtains the target coordinates of the target fan filter unit based on the current position of the mobile carrier platform 10 and the layout map. The second coordinate generation mechanism 27 generates multiple coordinate positions within a preset range around the target coordinates as multiple coordinate positions to be measured, according to preset rules. For example, the preset rules generate coordinate positions directly above, below, to the left, to the right, in front of, and behind the target coordinates as the coordinate positions to be measured. In this specific embodiment, "multiple" refers to two or more.

[0030] In some embodiments, the adjustment structure 29 includes: A rotating mechanism is connected to the detector 20, and the rotating mechanism is capable of rotating within a preset angle range; A vertical telescopic mechanism is connected to the detector 20, and the vertical telescopic mechanism is capable of telescopic movement in the vertical direction; A horizontal telescopic mechanism is connected to the detector 20, and the horizontal telescopic mechanism is capable of telescopic movement along a horizontal direction that is perpendicular to the vertical direction.

[0031] Specifically, through the coordinated operation of the rotating mechanism, the vertical telescopic mechanism, and the horizontal telescopic mechanism, the position of the detector 20 can be adjusted in three-dimensional space to precisely position the detector 20 at the coordinates to be measured. In one example, the vertical telescopic mechanism may include a vertical telescopic rod, the horizontal telescopic mechanism may include a horizontal telescopic rod, and the rotating mechanism includes a rotating shaft and a driver.

[0032] In some embodiments, the cleanroom parameter detection device further includes: The data processing component 21 is connected to the parameter acquisition component 14. The data processing component 21 includes a transmission structure 22, which is used to transmit the parameters of the test site acquired by the parameter acquisition component 14 to a remote monitoring terminal via a wireless network.

[0033] In some embodiments, the data processing component 21 further includes: Memory 23 is used to store parameter threshold ranges; An alarm 24 is connected to the memory 23. The alarm 24 is used to issue an alarm after confirming that the parameters of the test site collected by the parameter acquisition component 14 exceed the threshold range.

[0034] Specifically, after the data receiving port in the data processing component 21 receives the parameters of the test site (e.g., air particle concentration, air velocity at the outlet of the fan filter unit, average wind speed, wind speed uniformity, temperature, and humidity, or any combination of two or more) collected by the parameter acquisition component 14, the transmission structure 22 transmits the parameters of the test site collected by the parameter acquisition component 14 to the remote monitoring terminal in real time via a wireless network, realizing remote real-time monitoring of the parameters of the test site. Simultaneously, the data processing component 21 also includes a data analysis structure, which compares the parameters received by the data receiving port with the parameter threshold range stored in the memory 23. If it is confirmed that the parameters of the test site collected by the parameter acquisition component 14 exceed the threshold range, the alarm 24 is controlled to issue an alarm so that staff can promptly detect parameter anomalies and take intervention measures. In one example, the data analysis structure can also perform curve fitting on the parameters received multiple times to intuitively reflect the parameter change trend in the cleanroom.

[0035] In one example, the cleanroom parameter detection device further includes a power supply unit for providing power to the mobile carrier platform 10, the parameter acquisition component 14, the data processing component 21, and the spatial positioning component 13.

[0036] This specific embodiment also provides a method for monitoring cleanroom parameters. Figure 3 This is a flowchart of a cleanroom parameter monitoring method according to a specific embodiment of the present invention. A schematic diagram of the cleanroom parameter detection device used in the cleanroom parameter monitoring method can be found in [reference needed]. Figure 1 and Figure 2 .like Figures 1-3 As shown, the cleanroom parameter monitoring method includes the following steps: Step S31: Provide the cleanroom parameter detection device as described above; Step S32: Drive the mobile carrier platform 10 to move to the initial test site according to the preset trajectory; Step S33: Control the spatial positioning component 13 to obtain the coordinate position of the test site in the clean room, and adjust the position of the detector 20 to the coordinate position of the test site. Step S34: Obtain the parameters of the site to be tested through the detector 20.

[0037] In some embodiments, the spatial positioning component 13 is loaded with a layout diagram of the cleanroom, the layout diagram including the installation positions of multiple fan filter units in the cleanroom; the specific steps of controlling the spatial positioning component to obtain the coordinate position of the test site in the cleanroom and adjusting the position of the detector 20 to the coordinate position of the test site include: The current position of the mobile carrier platform 10 is obtained through the spatial positioning component 13; The target coordinates of the target fan filter unit are obtained based on the current position of the mobile carrier platform 10 and the layout diagram; Multiple coordinate positions within a preset range around the target coordinates are generated according to preset rules as multiple coordinate positions to be measured.

[0038] In some embodiments, after obtaining the parameters of the site to be tested through the detector 20, the following steps are further included: The parameters of the site to be tested are transmitted to the remote monitoring terminal via a wireless network, and it is determined whether the parameters of the site to be tested collected by the parameter acquisition component 14 exceed the threshold range. If so, an alarm is issued.

[0039] The cleanroom parameter detection device and cleanroom parameter monitoring method provided in this specific embodiment, through the coordinated operation of a mobile carrier platform, a spatial positioning component, and a parameter acquisition component, can achieve unmanned automated detection and monitoring of cleanroom parameters, reducing the investment cost of personnel and lowering the operational difficulty for personnel; at the same time, no personnel need to enter during the detection and monitoring process, reducing the probability of contamination to the cleanroom.

[0040] This specific embodiment uses the mobile carrier platform to move the parameter acquisition component to the vicinity of the test site, achieving preliminary positioning (coarse positioning) of the test site. Then, the spatial positioning component further determines the specific coordinates of the test site (i.e., precise positioning), improving the accuracy of the test site's location, eliminating positional and angular errors caused by manual operation, and ensuring the standardization and uniformity of detection and monitoring operations. Simultaneously, the movement of the mobile carrier platform and the positioning of the spatial positioning component enable full-area, full-coverage detection and monitoring of the cleanroom, avoiding blind spots. Furthermore, this specific embodiment, through the coordinated operation of the mobile carrier platform, spatial positioning component, and parameter acquisition component, improves the automation level and efficiency of parameter detection and monitoring within the cleanroom, enabling real-time feedback and ensuring production efficiency and quality.

[0041] It should be noted that references to "an embodiment," "an embodiment," "an exemplary embodiment," "some embodiments," etc., in the specification indicate that the described embodiments may include specific features, structures, or characteristics, but each embodiment may not necessarily include that specific feature, structure, or characteristic. Furthermore, such phrases do not necessarily refer to the same embodiment. In addition, when a specific feature, structure, or characteristic is described in connection with an embodiment, whether explicitly described or not, implementing such a feature, structure, or characteristic in conjunction with other embodiments is within the knowledge of those skilled in the art.

[0042] It should be noted that the terms "comprising" and "having," and their variations, used in this invention document are intended to cover non-exclusive inclusion. The terms "first," "second," etc., are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence, unless explicitly indicated by the context. It should be understood that such data used interchangeably where appropriate. Furthermore, embodiments and features within embodiments of this invention can be combined with each other unless otherwise specified. In addition, descriptions of well-known components and technologies have been omitted in the above description to avoid unnecessarily obscuring the concepts of this invention. In the various embodiments described above, each embodiment focuses on its differences from other embodiments; similar or identical parts between embodiments can be referred to interchangeably.

[0043] The above description is only a preferred embodiment of the present invention. It should be noted that those skilled in the art can make several improvements and modifications without departing from the principle of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A cleanroom parameter detection device, characterized in that, include: A mobile carrier platform is used to move within a cleanroom according to a preset trajectory, and a test station is provided on the mobile carrier platform; A spatial positioning component is disposed on the mobile carrier platform, and the spatial positioning component is used to obtain the coordinate position of the test site in the clean room; A parameter acquisition component is set on the test station and connected to the spatial positioning component. The parameter acquisition component includes a detector. The spatial positioning component is used to adjust the position of the detector to the coordinate position to be measured. The detector is used to detect the parameters of the site to be measured. The detector includes any one or a combination of two or more of the following: an air particle concentration detector, a wind speed detector, a temperature detector, and a humidity detector.

2. The cleanroom parameter detection device according to claim 1, characterized in that, The mobile carrier platform includes: A mobile actuator is used to move within a cleanroom according to a preset trajectory. A lifting platform is installed on the mobile actuator. The lifting platform can move up and down in the vertical direction, and the test station is set on the lifting platform.

3. The cleanroom parameter detection device according to claim 1, characterized in that, The spatial positioning component includes: A layout diagram loading structure is used to load the layout diagram of the cleanroom, the layout diagram including the installation positions of multiple fan filter units in the cleanroom; The positioning structure is connected to the layout diagram loading structure and is used to obtain the target coordinates of the target fan filter unit according to the layout diagram, and to obtain at least one coordinate position within a preset range around the target coordinates as the coordinate position to be measured. The structure is adjusted to connect the positioning structure and the detector, thereby adjusting the position of the detector to the coordinate position to be measured.

4. The cleanroom parameter detection device according to claim 3, characterized in that, The positioning structure includes: An identification mechanism is used to obtain the current location of the mobile carrier platform; A first coordinate generation mechanism, connected to the identification mechanism and the layout map loading structure, is used to obtain the target coordinates of the target wind turbine filter unit based on the current position of the mobile carrier platform and the layout map. The second coordinate generation mechanism, connected to the first coordinate generation mechanism, is used to generate multiple coordinate positions within a preset range around the target coordinates as multiple coordinate positions to be measured, according to preset rules.

5. The cleanroom parameter detection device according to claim 4, characterized in that, The adjustment structure includes: A rotating mechanism is connected to the detector, and the rotating mechanism is capable of rotating within a preset angle range; A vertical telescopic mechanism is connected to the detector, and the vertical telescopic mechanism is capable of telescopic movement in the vertical direction; A horizontal telescopic mechanism is connected to the detector, and the horizontal telescopic mechanism is capable of telescopic movement along a horizontal direction that intersects perpendicularly with the vertical direction.

6. The cleanroom parameter detection device according to claim 1, characterized in that, Also includes: A data processing component is connected to the parameter acquisition component. The data processing component includes a transmission structure, which is used to transmit the parameters of the test site acquired by the parameter acquisition component to a remote monitoring terminal via a wireless network.

7. The cleanroom parameter detection device according to claim 6, characterized in that, The data processing component also includes: Memory, used to store parameter threshold ranges; An alarm, connected to the memory, is used to issue an alarm after confirming that the parameters of the test site acquired by the parameter acquisition component exceed the threshold range.

8. A method for monitoring parameters in a cleanroom, characterized in that, Includes the following steps: Provide a cleanroom parameter detection device as described in claim 1; The mobile carrier platform is driven to move to the initial test site according to the preset trajectory; The spatial positioning component is controlled to obtain the coordinate position of the test site in the clean room, and the position of the detector is adjusted to the coordinate position of the test site. The detector is used to obtain the parameters of the site to be tested.

9. The method for monitoring cleanroom parameters according to claim 8, characterized in that, The spatial positioning component is loaded with a layout diagram of the cleanroom, the layout diagram including the installation positions of multiple fan filter units within the cleanroom; the specific steps of controlling the spatial positioning component to obtain the coordinate position of the test site within the cleanroom and adjusting the position of the detector to the coordinate position of the test site include: The current location of the mobile carrier platform is obtained through the spatial positioning component; The target coordinates of the target fan filter unit are obtained based on the current position of the mobile carrier platform and the layout diagram. Multiple coordinate positions within a preset range around the target coordinates are generated according to preset rules as multiple coordinate positions to be measured.

10. The method for monitoring cleanroom parameters according to claim 8, characterized in that, After obtaining the parameters of the site to be tested through the detector, the following steps are also included: The parameters of the site to be tested are transmitted to the remote monitoring terminal via a wireless network, and it is determined whether the parameters of the site to be tested collected by the parameter acquisition component exceed the threshold range. If so, an alarm is issued.

Images