A shear type acceleration and static force monitoring composite sensor, an assembling method and a sensing method

Abstract

The present application belongs to the technical field of sensor, and particularly relates to a shear type acceleration and static force monitoring composite sensor, an assembling method and a sensing method. The present application relates to a square base, a shell cover, a screw rod, a shear type quartz piece, an electrode piece, a diaphragm type mass, a shear type piezoelectric ceramic, an elastic base, a heat shrink alloy ring, a glass sintering base and a double core connector. The base bears a force core body and an acceleration core body, the shell cover receives static force and transmits the static force to the quartz piece through the screw rod to generate a static force signal. The mass concentrates inertial force in the longitudinal direction and compresses the piezoelectric ceramic to generate an acceleration signal. The elastic base cooperates with the heat shrink alloy ring to fix the acceleration core body in the radial direction, the glass sintering base provides insulation and damping, and the double core connector independently leads out two signals. The present application realizes composite monitoring of acceleration and static force, and the two signals are independently output without cross talk. The shear type structure has high sensitivity. The elastic base and the glass sintering base provide buffering insulation and have good stability.

Description

Technical Field

[0001] This invention belongs to the field of sensor technology, specifically relating to a composite sensor for monitoring shear acceleration and static force, its assembly method, and its sensing method. Background Technology

[0002] In the field of precision measurement and monitoring, traditional accelerometers and static force sensors usually adopt a discrete structure design, that is, the acceleration measurement unit and the static force measurement unit are independent of each other, which has problems such as large size, complex structure, large signal crosstalk and limited sensitivity.

[0003] Existing accelerometers mostly employ capacitive or piezoresistive structures, whose sensitivity is limited by material properties and structural design. They are prone to nonlinear responses or signal distortion in high-frequency vibration or low-acceleration measurement scenarios. Static force sensors, on the other hand, often use strain gauges or piezoelectric crystals, but their range and sensitivity are difficult to meet requirements, and they have weak overload resistance.

[0004] Related technologies employ quartz crystals or piezoelectric ceramics, but the shear-type structure design is complex, making it difficult to achieve simultaneous and accurate measurement of acceleration and static force. Furthermore, the stacking of multiple components makes assembly stress difficult to control, affecting measurement accuracy. Summary of the Invention

[0005] This invention provides a composite sensor for shear acceleration and static force monitoring. The components are effectively connected to ensure uniform force on the force core and stable component positions, thereby improving signal acquisition accuracy, ensuring stable and reliable signal transmission, and enhancing the overall stability of the sensor.

[0006] The composite sensor includes: four flexible bases, a heat-shrink alloy ring, and a square base; Four flexible bases are evenly fixed to the inner space of the bottom of the square base through a glass sintering seat; The signal core wire is fixed to the edge of the elastic base, and the signal core wire passes through the signal hole reserved in the square base; A heat-shrinkable alloy ring is fitted onto the outside of the elastic base; a shear-type piezoelectric ceramic is attached to the inner surface of the elastic base; a diaphragm mass block is inserted into the inside of the shear-type piezoelectric ceramic and the elastic base, and the deformation area of ​​the diaphragm mass block is fixedly connected to the inner contact point of the square base. After being shrunk at high temperature, the heat-shrinkable alloy ring forms a fixed constraint force on the shear-type piezoelectric ceramic, the diaphragm mass block and the elastic base, thus forming an acceleration core. The acceleration core is connected to the square base through a glass sintering seat. The first shear-type quartz plate, the electrode plate, and the second shear-type quartz plate are screwed onto the upper end of the square base to form a core; the core leads are set on the electrode plate. The cover is fixedly connected to the square base, and the cover abuts against the end faces of the four screws; The dual-core connector connects to the connector on the square base. The core wire and signal wire pass through the connector hole on the square base and are connected to the two pins of the dual-core connector.

[0007] It should be further noted that the bottom of the square base is a square plate structure with a concave mounting threaded hole on the bottom surface; the top of the square base has a chamfered circular boss with a threaded hole for mounting the screw and the core body. The shell is a square outer shell with a concave inner shell. The top is provided with an annular boss, and the inner side of the annular boss is provided with a chamfered circular opening that fits into the square base.

[0008] It should be further noted that the electrode sheet is compatible with the structure of the first shear-type quartz plate.

[0009] It should be further explained that the diaphragm mass block has an umbrella-shaped structure. The circular thin film at the top concentrates the inertial force strain generated during vibration in the longitudinal direction. The cylindrical structure in the middle and the square structure at the bottom are bonded to the shear-type piezoelectric ceramic, which transmits the longitudinal inertial force to the shear-type piezoelectric ceramic. The shear-type piezoelectric ceramic has a square sheet structure; the elastic base is an L-shaped plate with a circular groove at the bend, used to fix the shear-type piezoelectric ceramic and as a fixed carrier for the signal core wire.

[0010] It should be further noted that the heat-shrinkable alloy ring has a square ring structure and is fitted onto the elastic base; The glass sintering base is sintered and fixed inside the square base to achieve insulation between the elastic base and the square base; The dual-core connector is equipped with two pins and threaded posts for connection to external cables, enabling signal connection between the sensor and external devices.

[0011] According to another embodiment of this application, a method for assembling a composite sensor is provided, the method comprising: S1: Fix four elastic bases evenly to the inner space of the bottom of the square base through a glass sintering seat; Connect the signal core wire to the elastic base and pass the signal core wire through the signal hole reserved in the square base. Place the heat shrinkable alloy ring on the outer periphery of the elastic base. S2: A shear-type piezoelectric ceramic is attached to the inner surface of the elastic base. A diaphragm mass block is inserted into the shear-type piezoelectric ceramic and the inner side of the elastic base. A constraint force is formed on the shear-type piezoelectric ceramic and the diaphragm mass block by a high-temperature shrinking heat-shrinkable alloy ring to prepare an acceleration core. S3: Fix the deformation area of ​​the diaphragm mass block to the inside of the square base, and fix the acceleration core on the square base; S4: Stack the first shearing quartz sheet, the electrode sheet, and the second shearing quartz sheet sequentially on the square edge structure surface of the upper side boss of the square base, and screw the first shearing quartz sheet, the electrode sheet, and the second shearing quartz sheet onto the square base to form a core body; S5: Connect the cover to the square base, apply a pre-tightening force to the cover to make the cover contact the screw, and fix the cover to the square base to form a longitudinal constraint force; S6: Pass the signal wires of the force core and acceleration core through the connector hole of the square base and fix them to the pin of the dual-core connector. Connect the dual-core connector to the square base to complete the sensor assembly.

[0012] It should be further explained that S2 specifically includes the following steps: S21: Coat the inner surface of the elastic base with a high-temperature inorganic adhesive, attach the shear-type piezoelectric ceramic to the adhesive layer, and apply a preset pressure at room temperature until the adhesive is initially cured; S22: Insert the lower square body of the diaphragm mass block vertically into the central space enclosed by four shear-type piezoelectric ceramics, and adjust the position so that the outer side of the diaphragm mass block and the inner side of the shear-type piezoelectric ceramics make contact through a transition fit. S23: The heat-shrinkable alloy ring is placed around the outer periphery of the assembly of the elastic base, shear-type piezoelectric ceramic and diaphragm mass block, so that the inner wall of the heat-shrinkable alloy ring and the outer wall of the elastic base maintain a clearance fit. S24: Place the above components into the heating device, control the temperature to rise above the phase transformation temperature of the heat-shrinkable alloy ring, maintain for a preset time to allow the heat-shrinkable alloy ring to undergo martensitic phase transformation and shrink, and apply uniform radial compressive stress to the internal components after cooling.

[0013] It should be further explained that S3 specifically includes the following steps: S31: Fix the square base with the accelerometer core assembly completed on the welding fixture with the rotating indexing head, so that the upper surface of the square base is kept horizontal and the four sides of the lower square body of the diaphragm mass block are in contact with the inner upper surface of the square base. S32: Align the welding torch of the laser welding machine with the boundary line between the first side of the lower square body of the diaphragm mass block and the upper inner surface of the square base directly below, and perform welding to complete the first weld. S33: Rotate the square base sequentially by rotating the indexing head by 90 degrees, 180 degrees, and 270 degrees, repeating the operation of S32, and complete the second, third, and fourth welds respectively on the boundary lines between the other three sides of the square body at the lower end of the diaphragm mass block and the inner upper surface of the square base. S34: Place the welded semi-finished product on a flat platform, check the gap between the bottom surface of the square body at the lower end of the diaphragm mass block and the upper inner surface of the square base, confirm that there are no visible cracks or pores at all welds, and complete the fixed connection between the acceleration core and the square base.

[0014] It should be further explained that S5 specifically includes the following steps: S51: With the opening end of the outer concave shell facing the square base, align the large-sized circular opening on the inner side of the annular boss at the top of the shell with the circular boss on the upper end of the square base. Move the shell downwards in the vertical direction so that the boss of the square base is embedded inside the opening end of the shell until a gap of a predetermined height is formed between the bottom surface of the concave cavity of the shell and the upper surface of the square base. S52: Use a pressurizing device to apply a downward pressure from the center area of ​​the upper surface of the annular boss at the top of the cover. The magnitude of the pressure is controlled to cause the cover to undergo elastic deformation and move toward the square base until the distance between the bottom surface of the concave cavity inside the cover and the upper surface of the square base is reduced to the critical contact state. At this time, the inner surface of the cover and the cylindrical side of the top of the screw form point contact or line contact. S53: While maintaining the continuous application of the compressive force, a laser beam is used to weld along the circumferential direction of the joint between the shell cover and the square base. The laser beam is focused at the junction of the bottom edge of the shell cover and the outer wall of the square base to form a continuous weld that binds the shell cover and the square base together. After the compressive force is removed, the shrinkage stress of the weld forms a longitudinal constraint force.

[0015] According to another embodiment of this application, a sensing method is also provided, the method comprising: The assembled sensor is fixed by the threaded holes on the square base, or positioned and fixed by the square base. When the annular protrusion at the top of the shell is subjected to static compressive force, the first shear-type quartz plate, the electrode plate and the second shear-type quartz plate of the force core generate charge signals under shear force, thereby realizing static force monitoring. When the sensor is subjected to vibration, the diaphragm mass of the acceleration core generates a longitudinal inertial force and transmits it to the shear piezoelectric ceramic. The shear piezoelectric ceramic generates an electric charge signal due to the shear piezoelectric effect, thus realizing acceleration monitoring.

[0016] As can be seen from the above technical solutions, the present invention has the following advantages: In this invention, the cover adopts an outer square and inner concave structure with an annular boss, which can receive external static compressive force and can also be tightly embedded and welded with the square base to form a reliable seal, protecting the internal core components from damage. The contact design between the annular boss and the screws can evenly distribute the static compressive force to the four screws, ensuring balanced force on all parts of the core and avoiding component damage caused by excessive local force. The uniform outer circular surface of the cylindrical side of the screws further optimizes the force distribution effect, and the inner threaded column can firmly screw the various components of the core onto the square base, providing stable support for the cover. The longitudinal constraint force formed by the cover and the cover can effectively prevent displacement of the core during stress or vibration, ensuring the stability of static force signal acquisition.

[0017] The recessed mounting threaded hole at the bottom of the square base of this invention can accommodate both threaded fixing and positioning installation methods, adapting to different application scenarios. The design of the upper boss and threaded hole enables the installation of the screw and force core, and the rational layout of the inner space allows for the orderly integration of components such as the glass sintering seat and the acceleration core. The umbrella-shaped structure of the diaphragm-type mass block concentrates the inertial force strain generated during vibration in the longitudinal direction, improving the sensitivity of acceleration signal acquisition.

[0018] The L-shaped design of the elastic base and the circular groove at the bend in this invention can produce slight elastic deformation, providing a buffer space for the acceleration core, mitigating the instantaneous impact of inertial forces, and reducing the probability of breakage of the shear-type piezoelectric ceramic. After being shrunk at high temperature, the heat-shrinkable alloy ring forms a uniform and stable fixing constraint force on each component of the acceleration core, ensuring that the relative positions of each component remain unchanged and guaranteeing the effective transmission of inertial forces. The integral sintered structure of the glass sintered base provides stable support for the elastic base and also achieves insulation isolation between the elastic base and the square base. Attached Figure Description

[0019] To more clearly illustrate the technical solution of the present invention, the accompanying drawings used in the description will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 A cross-sectional view of a composite sensor for monitoring shear acceleration and static force; Figure 2 A schematic diagram of a composite sensor for monitoring shear acceleration and static force; Figure 3 Exploded view of a composite sensor for monitoring shear acceleration and static force; Figure 4 This is a schematic diagram of a square base; Figure 5This is a schematic diagram of the bottom of the square base; Figure 6 This is a schematic diagram of the shell cover; Figure 7 This is a schematic diagram of the bottom of the shell cover; Figure 8 This is a schematic diagram of a diaphragm-type mass block. Figure 9 This is a schematic diagram of the first shear-type quartz plate; Figure 10 Here is a schematic diagram of the screw; Figure 11 This is a schematic diagram of a flexible base.

[0021] Explanation of reference numerals in the attached figures: 1-Shell cover, 2-Screw, 3-First shearing type quartz plate, 4-Electrode plate, 5-Square base, 6-Diaphragm mass block, 7-Shearing type piezoelectric ceramic, 8-Elastic base, 9-Heat shrink alloy ring, 10-Glass sintering base, 11-Double core connector, 51-Boss, 52-M5 threaded hole. Detailed Implementation

[0022] The following describes in detail the composite sensor for monitoring shear acceleration and static force involved in this application. Specific details, such as particular system structures and techniques, are presented for illustrative purposes and not for limitation, in order to provide a thorough understanding of the embodiments of this application. However, those skilled in the art will understand that this application can also be implemented in other embodiments without these specific details.

[0023] like Figures 1 to 11 As shown, the composite sensor for monitoring shear acceleration and static force includes: a housing 1, a screw 2, a shear-type quartz plate, an electrode plate 4, a square base 5, a diaphragm mass block 6, a shear-type piezoelectric ceramic 7, an elastic base 8, a heat-shrinkable alloy ring 9, a glass sintering seat 10, and a dual-core connector 11.

[0024] Four flexible bases 8 are evenly fixed to the inner space at the bottom of the square base 5 via glass sintering seats 10. The signal core wire is fixed to the edge of the flexible base 8 and passes through the signal hole reserved in the square base 5.

[0025] A heat-shrinkable alloy ring 9 is fitted onto the outside of the elastic base 8; a shear-type piezoelectric ceramic 7 is attached to the inner surface of the elastic base 8; a diaphragm-type mass block 6 is inserted into the inner side of the shear-type piezoelectric ceramic 7 and the elastic base 8, and the deformation area of ​​the diaphragm-type mass block 6 is fixedly connected to the inner contact point of the square base 5. After being shrunk at high temperature, the heat-shrinkable alloy ring 9 forms a fixed constraint force on the shear-type piezoelectric ceramic 7, the diaphragm-type mass block 6, and the elastic base 8, constituting an acceleration core. The acceleration core is connected to the square base 5 through a glass sintering seat 10.

[0026] The square base 5 of this invention has a square plate structure at its bottom end, with a concave M5 mounting threaded hole on the bottom surface for mounting and fixing the sensor. Optionally, it can be fixed through the mounting threaded hole or directly positioned. The upper end of the square base 5 has a chamfered circular boss 51 and M5 threaded holes 52 on the four sides of the boss for mounting the screw 2 and the force core. The cylindrical side of the screw 2 has a uniform outer circular surface to distribute the force after the shell cover 1 is compressed. The inner side of the screw 2 has an M5 threaded post for screwing and fixing the stacked sheared quartz plates and electrode plates 4 onto the square base 5, providing support for the shell cover 1 and forming a longitudinal constraint force with the shell cover 1.

[0027] Furthermore, the inner space of the square base 5 is used to install the glass sintering seat 10 and the acceleration core, and reserved signal holes and connector holes are used to set the signal core wire and the dual-core connector 11, respectively. The square base 5 is the basic supporting component of the sensor, realizing the integrated installation of various components.

[0028] The elastic base 8 of this invention features an L-shaped base plate design with a circular groove at the bend, enabling elastic deformation and providing buffer and deformation space for the acceleration core. The elastic base 8 is used to mount and fix the shear-type piezoelectric ceramic 7, serving as a welding carrier for the signal core wire, enabling the initial extraction of the acceleration signal, and supporting the stable assembly of the entire acceleration core.

[0029] The heat-shrinkable alloy ring 9 of the present invention is a square ring structure, which is sleeved on the elastic base 8. After being shrunk at high temperature, it forms a stable fixed constraint force on the elastic base 8, shear-type piezoelectric ceramic 7, and diaphragm mass block 6 of the acceleration core, ensuring that the relative positions of each component of the acceleration core remain unchanged, and ensuring the effective transmission of inertial force and the accuracy of acceleration signal acquisition.

[0030] The shear-type piezoelectric ceramic 7 of the present invention has a square sheet structure and serves as a sensitive element of the acceleration core. When it is compressed by the longitudinal inertial force transmitted by the diaphragm mass block 6, it generates an electric charge signal due to the shear piezoelectric effect, thereby realizing the acquisition and conversion of acceleration signals.

[0031] The glass sintering base 10 is an integral sintered structure, sintered and fixed inside the square base 5, providing stable support for the elastic base 8. The glass sintering base 10 has an insulating function, achieving insulation isolation between the elastic base 8 and the square base 5 to avoid signal interference. This invention also provides partial damping force constraint, reducing the impact of vibration on the acceleration core and improving sensor stability.

[0032] The first shear-type quartz plate 3, electrode plate 4, and second shear-type quartz plate of the present invention are screwed onto the upper end of the square base 5 by screws 2 to form a core. The core leads are disposed on the electrode plate 4. The cover 1 is fixedly connected to the square base 5, and the cover 1 abuts against the end faces of the four screws 2. The dual-core connector 11 is connected to the connector of the square base 5, and the core leads and signal cores pass through the connector holes of the square base 5 and are correspondingly connected to the two pins of the dual-core connector 11.

[0033] It should be noted that the cover 1 is a square-shaped, concave-shaped shell with an annular protrusion at the top for receiving external static compressive force. The large circular opening on the inner side of the annular protrusion facilitates insertion and docking with the square base 5, achieving a sealed encapsulation of the sensor body after welding. Through contact with the screw 2, the static compressive force is distributed, ensuring uniform force distribution on the core.

[0034] Furthermore, the shear-type quartz crystal, as the sensitive element of the force core, is subjected to shear force and generates a highly sensitive, high-charge static force signal when the static compressive force transmitted by the shell cover 1 is applied to it, thereby realizing static force monitoring.

[0035] Electrode 4 has the same structure as the shear-type quartz plate and is used to extract the static force-electric signal generated by the shear-type quartz plate. As an intermediate connecting component of the shear-type quartz plate, it ensures the stability of the force core structure and the smoothness of signal transmission.

[0036] The inner side of the dual-core connector 11 of this invention has a dual-pin structure, which is used to solder the acceleration signal core wire and the static force signal lead wire respectively, so as to realize the independent output of the two signals. The outer side of the dual-core connector 11 has an M5 threaded post, which is used to tighten and fix it with an external cable, ensuring the stability and reliability of signal transmission and realizing the signal connection between the sensor and external devices.

[0037] As can be seen, the acceleration core, force core, and other components are packaged and integrated onto a square base 5 to form a composite sensor, enabling simultaneous monitoring of acceleration and static force by the same sensor. The interconnections work together to ensure the stability of each component. Insulation, damping, and force distribution designs reduce signal crosstalk and improve the sensor's sensitivity and reliability.

[0038] The following are embodiments of the assembly method of the composite sensor provided in this disclosure. This method belongs to the same inventive concept as the composite sensors in the above embodiments. For details not described in detail in the embodiments of the assembly method of the composite sensor, please refer to the embodiments of the composite sensor described above.

[0039] The method includes the following steps: S1: Four elastic bases 8 are evenly fixed to the inner space of the bottom of the square base 5 through the glass sintering seat 10. Connect the signal core wire to the elastic base 8 and pass the signal core wire through the signal hole reserved in the square base 5. Place the heat shrinkable alloy ring 9 on the outer periphery of the elastic base 8.

[0040] In some embodiments, the glass sintering base 10 is embedded in the groove at the bottom inner side of the square base 5, ensuring that the upper surface of the glass sintering base 10 is flush with the bottom inner side of the square base 5.

[0041] Four L-shaped elastic bases 8 are placed at equal intervals on the four support points of the glass sintering base 10. The positions of the elastic bases 8 are adjusted so that the circular grooves at the bends of the elastic bases 8 face inwards, and the inner surfaces of the four elastic bases 8 are on the same vertical plane.

[0042] Furthermore, the square base 5, equipped with the glass sintering seat 10 and the elastic base 8, is placed into a high-temperature sintering furnace for sintering. During the sintering process, inert gas is continuously introduced to prevent oxidation of the components. After sintering is completed, the furnace source is turned off. The square base 5 is then removed after naturally cooling to room temperature.

[0043] Furthermore, based on the square annular heat-shrinkable alloy ring 9, according to the outer diameter of the elastic base 8, the heat-shrinkable alloy ring 9 is slowly fitted onto the elastic base 8, ensuring that the heat-shrinkable alloy ring 9 fits tightly against the outer surface of the elastic base 8, which can ensure that the constraint force is evenly distributed after shrinkage. Based on the copper signal core wire, one end of the signal core wire is spot-welded to the preset solder point on the edge of the elastic base 8 using a welding machine. The other end of the signal core wire is passed out through the preset signal hole inside the square base 5. When passing it out, the bending angle of the signal core wire should not exceed 90° to prevent the core wire from breaking. After passing it out, the signal core wire is fixed in the wiring groove inside the square base 5 with an insulating cable tie, leaving a 5-8cm redundancy length.

[0044] S2: A shear-type piezoelectric ceramic 7 is attached to the inner surface of the elastic base 8. A diaphragm mass block 6 is inserted into the shear-type piezoelectric ceramic 7 and the inner side of the elastic base 8. A high-temperature shrinking heat-shrinkable alloy ring 9 is used to form a constraint force on the shear-type piezoelectric ceramic 7 and the diaphragm mass block 6 to prepare an acceleration core.

[0045] As one implementation of step S2 of the present invention, an embodiment is given below, which specifically includes the following steps: S21: A high-temperature inorganic adhesive is coated on the inner surface of the elastic base 8, the shear-type piezoelectric ceramic 7 is attached to the adhesive layer, and a preset pressure is applied at room temperature until the adhesive is initially cured.

[0046] S22: Insert the lower square body of the diaphragm mass block vertically into the central space formed by four shear-type piezoelectric ceramics, and adjust its position so that the outer side of the diaphragm mass block 6 and the inner side of the shear-type piezoelectric ceramic 7 make contact through a transition fit.

[0047] In some embodiments, during insertion, alignment monitoring ensures that the four sides of the diaphragm mass 6 contact the inner surfaces of the four shear-type piezoelectric ceramics 7. The contact state is designed as a transition fit, allowing the mass to slide freely under gravity without significant horizontal wobble or gap.

[0048] S23: The heat-shrinkable alloy ring 9 is fitted around the outer periphery of the assembly of the elastic base 8, the shear-type piezoelectric ceramic 7 and the diaphragm mass block 6, so that the inner wall of the heat-shrinkable alloy ring 9 and the outer wall of the elastic base 8 are in a clearance fit.

[0049] In some embodiments, the heat-shrinkable alloy ring 9 is in an austenitic state at room temperature, with an inner diameter slightly larger than the outer diameter of the elastic base 8 assembly. The annular part is inserted from above, with its lower end face abutting against the stepped surface of the glass sintering seat 10, or suspended in a specific slot position around the elastic base 8, ensuring that the heat-shrinkable alloy ring 9 does not apply any mechanical stress to the internal components before heating.

[0050] S24: Place the above components into the heating device, control the temperature to rise above the phase transformation temperature of the heat-shrinkable alloy ring 9, maintain for a preset time to allow the heat-shrinkable alloy ring 9 to undergo martensitic phase transformation and shrink, and apply uniform radial compressive stress to the internal components after cooling.

[0051] In some embodiments, the component is placed in a heating furnace. During processing, the heat-shrinkable alloy ring 9 undergoes crystal structure rearrangement, and its inner diameter shrinks irreversibly, causing the inner wall to tightly grip the outer wall of the elastic base 8. After cooling to room temperature, the heat-shrinkable alloy ring 9 generates a constant radial clamping force, which is transmitted through the elastic base 8, firmly clamping the shear-type piezoelectric ceramic 7 and the diaphragm mass block 6 in the center. Compared to bolt pre-tightening, the heat-shrink pre-tightening force is extremely uniform, eliminating stress concentration points and improving the stability of the sensor. The heat-shrinkable alloy ring 9 itself acts as a rigid ring, enhancing the structural stiffness of the entire acceleration core, increasing the sensor's resonant frequency, and making the sensor suitable for vibration monitoring over a wider frequency band.

[0052] S3: Fix the deformation area of ​​the diaphragm mass block 6 to the inside of the square base 5, and fix the acceleration core on the square base 5.

[0053] As one implementation of step S3 of the present invention, an embodiment is given below, which specifically includes the following steps: S31: Fix the square base 5, which has been assembled with the accelerometer core, onto the welding fixture with a rotating indexing head, so that the upper surface of the square base is kept horizontal, and ensure that the four sides of the lower square body of the diaphragm mass block are in contact with the inner upper surface of the square base. S32: Align the welding torch of the laser welding machine with the boundary line between the first side of the lower square body of the diaphragm mass block 6 and the inner upper surface of the square base 5 directly below, and perform welding to complete the first weld. S33: Rotate the square base 5 by rotating the indexing head by 90 degrees, 180 degrees and 270 degrees in sequence, repeat the operation of S32, and complete the second, third and fourth welds respectively on the boundary line between the other three sides of the square body at the lower end of the diaphragm mass block 6 and the inner upper surface of the square base 5. S34: Place the welded semi-finished product on a flat platform, check the gap between the bottom surface of the square body at the lower end of the diaphragm mass block 6 and the upper inner surface of the square base 5, confirm that there are no visible cracks or pores at all welds, and complete the fixed connection between the acceleration core and the square base 5.

[0054] In some embodiments, in step S32, the welding torch is aligned with the boundary line between the first side of the lower square body of the diaphragm mass block 6 and the inner upper surface of the square base 5 directly below it. The boundary line is located at the inner edge of the upper boss of the square base 5. Welding is then performed. After completing the first weld, the spindle of the indexing head is rotated 90 degrees so that the second side of the square base 5 is aligned with the welding torch. The second weld is completed on the boundary line between the second side of the lower square body of the diaphragm mass block 6 and the inner upper surface of the square base 5. After completion, the indexing head is rotated 90 degrees again to perform the third weld. Then, it is rotated another 90 degrees to perform the fourth weld. Before each weld, the welding torch alignment is visually checked to ensure that the welding torch axis is perpendicular to the boundary line.

[0055] As can be seen, the lower end of the diaphragm mass block 6 is a square structure with four sides. By rotating the indexing head and welding the four sides sequentially, all welds can be completed without moving the welding torch, ensuring the angular position accuracy of each weld relative to the central axis of the square base 5. The overlapping design of adjacent weld ends is to avoid unwelded gaps at the corners of the square body, as the corners are the boundaries of two sides, where stress is concentrated under load. If these gaps are not welded or the welds are discontinuous, fatigue cracks are likely to occur under vibration. The length of each weld is equal to the width of the square body's side, forming four continuous circumferential welds between the diaphragm mass block 6 and the square base 5 after welding.

[0056] S4: The first shearing quartz sheet 3, the electrode sheet 4, and the second shearing quartz sheet are stacked sequentially on the square edge structure surface of the upper side boss of the square base 5, and the first shearing quartz sheet 3, the electrode sheet 4, and the second shearing quartz sheet are screwed onto the square base 5 by the screw 2 to form a force core.

[0057] In some embodiments, the square base 5 is fixed on the worktable, and the angle of the worktable is adjusted so that the four sides of the square edge structure of the upper boss of the square base 5 are in a horizontal state. Take a sheared quartz sheet and place it on the square edge structure of the upper boss of the square base 5, ensuring that the edge of the sheared quartz sheet is aligned with the edge of the square edge structure.

[0058] An electrode sheet 4 is placed stably on the upper surface of the sheared quartz sheet. The electrode sheet 4 has the same structure as the sheared quartz sheet. When placing it, ensure that the electrode sheet 4 is aligned with the sheared quartz sheet. Then, another sheared quartz sheet is placed on the upper surface of the electrode sheet 4 to form a stacked structure of sheared quartz sheet, electrode sheet, and sheared quartz sheet. The stacking operation of the four sides of the square base 5 upper boss is completed in this way.

[0059] Take four screws 2, each with an M5 threaded inner side, and match them with the M5 threaded holes on the four sides of the square base 5 boss. Align each screw 2 with its corresponding threaded hole and tighten it. Finally, weld the core wire to the preset welding point on each electrode 4. The core wire uses a copper core wire with a specification of 0.15mm-0.2mm.

[0060] The shear-type quartz plate, electrode plate, and stacked structure of the shear-type quartz plate allow the shear-type quartz plate to be subjected to uniform shear force during static compressive force transmission, thereby generating an electric charge signal. The M5 threaded post of the screw 2 matches the threaded hole of the square base 5. The pressure generated when tightening allows the stacked structure to fit tightly, ensuring smooth force transmission. Torque control can prevent the stacked structure from being crushed.

[0061] S5: Connect the cover 1 to the square base 5, apply a pre-tightening force to the cover 1 so that the cover 1 contacts the screw 2, and fix the cover 1 and the square base 5 to form a longitudinal constraint force.

[0062] As one implementation of step S5 of the present invention, an embodiment is given below, which specifically includes the following steps: S51: With the opening end of the outer concave shell facing the square base, align the large-sized circular opening on the inner side of the annular boss at the top of the shell with the circular boss on the upper end of the square base. Move the shell downwards vertically so that the boss of the square base is embedded inside the opening end of the shell until a predetermined gap is formed between the bottom surface of the concave cavity of the shell and the upper surface of the square base.

[0063] In some embodiments, the shell cover is positioned so that the open end of its outer concave shell faces the square base, aligning the large-sized circular opening on the inner side of the annular boss at the top of the shell cover with the circular boss on the upper end of the square base. The shell cover is then moved downwards in a vertical direction so that the boss of the square base is embedded inside the open end of the shell cover until a gap of a predetermined height is formed between the bottom surface of the concave cavity of the shell cover and the upper surface of the square base. This gap height is greater than the height of the screw protruding from the upper surface of the square base after tightening.

[0064] S52: Use a pressurizing device to apply a downward pressure from the center area of ​​the upper surface of the annular boss at the top of the cover. The magnitude of the pressure is controlled to cause the cover to undergo elastic deformation and move toward the square base until the distance between the bottom surface of the concave cavity inside the cover and the upper surface of the square base is reduced to the critical contact state. At this time, the inner surface of the cover and the cylindrical side of the top of the screw form point contact or line contact.

[0065] In some embodiments, a pressure device is used to apply a downward pressure force from the center region of the upper surface of the annular boss at the top of the cover. The magnitude of the pressure force is controlled to cause the cover to elastically deform and move toward the square base until the distance between the bottom surface of the concave cavity of the cover and the upper surface of the square base is reduced to a critical contact state. The inner surface of the cover forms a point contact or line contact with the cylindrical side of the top of the screw. The value of the pressure force is calculated and determined based on the elastic modulus and wall thickness of the cover material, so that the stress value of the cover in the critical contact state is lower than the yield strength of the material.

[0066] Here, the compressive force acts directly on the top of the cover and is evenly transmitted to the screws on all four sides, ensuring that the four sets of force cores are pre-tightened. The point contact or line contact state provides a force transmission path between the cover and the screws, preserving the micro-motion space of the cover in a vibration environment.

[0067] S53: While maintaining the continuous application of the compressive force, a laser beam is used to weld along the circumferential direction of the joint between the shell cover and the square base. The laser beam is focused at the junction of the bottom edge of the shell cover and the outer wall of the square base to form a continuous weld that binds the shell cover and the square base together. After the compressive force is removed, the shrinkage stress of the weld forms a longitudinal constraint force.

[0068] In some embodiments, while maintaining the continuous application of the compressive force, a laser beam is used to weld along the circumferential direction of the joint between the shell cover and the square base. The laser beam is focused at the junction of the bottom edge of the shell cover and the outer wall of the square base to form a continuous weld that binds the shell cover and the square base together. After the compressive force is removed, the shrinkage stress of the weld forms a longitudinal constraint force.

[0069] Here, in-situ welding ensures the maintenance of the pre-tightened state, and the superposition of weld shrinkage stress and pre-tightening force enhances the stability of the longitudinal constraint force. Pulsed laser welding reduces the thermal impact of heat input on internal piezoelectric components and forms a sealed encapsulation structure to prevent external environment from corroding internal sensitive components.

[0070] S6: Pass the signal wires of the force core and acceleration core through the connector hole of the square base 5 and fix them to the pin of the dual-core connector 11. Connect the dual-core connector 11 to the square base 5 to complete the sensor assembly.

[0071] In some embodiments, two signal wires are passed through the pre-set connector holes of the square base 5, ensuring that the wires are not bent when passing through, and leaving a 10-12cm redundant length after passing through to facilitate subsequent soldering with the dual-core connector 11. The wires are then fixed in the wiring groove inside the square base 5 with insulating cable ties.

[0072] Further, take the dual-core connector 11, which has a dual-pin structure on the inside and an M5 threaded post on the outside. Insert the two pins of the dual-core connector 11 into the welding fixture and fix them in a vertical position. Align the protruding force core lead wire with one pin of the dual-core connector 11 and weld the end of the wire to the pin. After welding, wrap the weld joint with insulating tape to prevent short circuits. Weld the signal core wire of the acceleration core to the other pin of the dual-core connector 11 in the same way, ensuring that the two wires do not touch at the welding points.

[0073] Furthermore, after welding, align the outer M5 threaded post of the double-core connector 11 with the threaded interface of the connector hole on the square base 5, and rotate the double-core connector 11 clockwise to ensure a tight fit with the square base 5. After fitting, use a laser welding machine to perform circumferential welding along the joint between the double-core connector 11 and the square base 5. After welding, allow it to cool naturally to room temperature, and check the fixation of the double-core connector 11 to ensure it is not loose.

[0074] In some specific embodiments, the sensing method includes the following steps: Step 1: Fix the assembled sensor through the threaded holes on the square base 5, or position and fix it through the square base 5.

[0075] In some embodiments, if a threaded fixing method is used, a stainless steel bolt that matches the M5 threaded hole is selected, the bolt is passed through the reserved hole of the external mounting base, aligned with the concave M5 mounting threaded hole of the square base 5, and the bolt is tightened.

[0076] Furthermore, if a positioning and fixing method is adopted, a flat and smooth mounting surface is selected, and the square base 5 is placed stably on the surface, so that the square plate at the bottom of the square base 5 is completely in contact with the surface. Positioning blocks are placed on the four sides of the square base 5, and the positioning blocks are tightly in contact with the sides of the square base 5. The positioning blocks are fixed to the surface with bolts to prevent the sensor from shifting during the monitoring process and to ensure that the sensor is in a horizontal position.

[0077] Step 2: When the annular protrusion at the upper end of the shell 1 is subjected to static compressive force, the first shear-type quartz plate 3, the electrode plate 4, and the second shear-type quartz plate of the force core generate charge signals under shear force, thereby realizing static force monitoring.

[0078] In some embodiments, when the static compressive force is applied to the annular boss at the upper end of the housing 1, it is ensured that the force is evenly applied to the entire surface of the annular boss, conforming to the design tolerance range of the sensor. After being subjected to force, the housing 1 transmits the static compressive force to the four screws 2. The screws 2 distribute the force evenly to the four sides of the square edge structure of the upper boss of the square base 5 through their own M5 threaded posts, and then transmit it to the stacked force core structure.

[0079] Furthermore, the force core is formed by stacking the first shear-type quartz plate 3, the electrode plate 4, and the second shear-type quartz plate in sequence. When subjected to force, the two shear-type quartz plates are subjected to shear forces in opposite directions. Due to the shear piezoelectric effect of quartz crystal, equal amounts of opposite charges are generated on the surfaces of the two shear-type quartz plates. The charges are transferred through the force core lead wire welded to the electrode plate 4. The electrode plate 4 plays the role of collecting charges and stabilizing signals, transmitting the charge signals to the corresponding pins of the dual-core connector 11, and then transmitting them to the monitoring equipment through an external cable to complete the acquisition and monitoring of static force signals.

[0080] Step 3: When the sensor is subjected to vibration, the diaphragm mass 6 of the acceleration core generates a longitudinal inertial force and transmits it to the shear piezoelectric ceramic 7. The shear piezoelectric ceramic 7 generates an electric charge signal due to the shear piezoelectric effect, thereby realizing acceleration monitoring.

[0081] In some embodiments, when the environment in which the sensor is located vibrates, the vibration signal is transmitted to the square base 5, and then to the acceleration core fixed on the square base 5. Due to inertia, the diaphragm mass 6 in the acceleration core generates a longitudinal inertial force in the same direction as the vibration. The magnitude of the inertial force is proportional to the vibration acceleration. When the vibration frequency is in the range of 10-1000Hz, the inertial force can be transmitted stably.

[0082] Here, "vertical" refers to the axial direction of the sensor, which is perpendicular to the bottom surface of the square base 5.

[0083] Furthermore, the circular thin film at the top of the diaphragm mass block 6 concentrates the inertial force strain in the longitudinal direction, while the cylindrical structure in the middle and the square structure at the bottom uniformly transmit the inertial force to the attached shear-type piezoelectric ceramic 7. The shear-type piezoelectric ceramic 7 is a square sheet structure that is attached to the inside of the elastic base 8. The circular groove at the L-shaped bend of the elastic base 8 can produce slight elastic deformation to buffer the instantaneous impact of the inertial force.

[0084] Furthermore, after the shear-type piezoelectric ceramic 7 is subjected to shearing action caused by inertial force, it generates charge signal due to shear piezoelectric effect. The charge signal is gathered through the signal core wire that is soldered to the elastic base 8 and transmitted to another pin of the dual-core connector 11. It is transmitted separately from the static force signal. The charge signal is analyzed and processed by external monitoring equipment and converted into acceleration value to complete acceleration monitoring.

[0085] During vibration, the diaphragm-type mass block 6 generates longitudinal inertial force due to inertia. The umbrella-like structure concentrates the strain of this inertial force, improving signal sensitivity. The elastic deformation of the elastic base 8 buffers instantaneous impacts and protects the shear-type piezoelectric ceramic 7. The shear piezoelectric effect of the shear-type piezoelectric ceramic 7 converts inertial force into an electric charge signal. The signal core wire enables signal transmission, and the damping effect of the glass sintered seat 10 reduces external interference.

[0086] It should be understood that when an element or layer is referred to as being "connected" or "coupled" to another element or layer "on" it may be directly connected or coupled to said other element or layer, or there may be intermediate elements or layers. Conversely, when an element is referred to as being "directly connected" or "directly coupled" to another element or layer "on" it is not an intermediate element or layer. Similar figures in all figures indicate similar elements. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0087] Spatially relative terms such as “below,” “under,” “lower,” “above,” “above,” etc., may be used here to describe the relationship between one element or feature and another, as shown in the figure. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation other than those shown in the figure. For example, if the device in the figure were flipped over, the element described as “below” or “under” other elements or features would be facing “above” other elements or features. Thus, the exemplary term “below” can include both above and below orientations. Other orientations (rotation 90 degrees or other orientations) may be adopted, and the spatially relative terms used herein will be interpreted accordingly.

[0088] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the expression within this document. As used herein, the singular forms “a,” “an,” and “the” are intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that, when used in this specification, the term “comprising” means the presence of the stated features, integers, steps, operations, elements, and / or components, but does not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or combinations thereof.

[0089] The above description of the disclosed embodiments enables those skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A composite sensor for monitoring shear acceleration and static force, characterized in that, include: Four flexible bases (8), heat-shrinkable alloy rings (9), and square bases (5); Four elastic bases (8) are evenly fixed to the inner space at the bottom of the square base (5) through glass sintering base (10); The signal core wire is fixed to the edge of the elastic base (8), and the signal core wire passes through the signal hole reserved in the square base (5); A heat-shrinkable alloy ring (9) is fitted on the outside of the elastic base (8); a shear-type piezoelectric ceramic (7) is attached to the inner surface of the elastic base (8); a diaphragm mass block (6) is inserted into the inner side of the shear-type piezoelectric ceramic (7) and the elastic base (8), and the deformation area of ​​the diaphragm mass block (6) is fixedly connected to the inner contact point of the square base (5). After the heat-shrinkable alloy ring (9) shrinks at high temperature, it forms a fixed constraint force on the shear-type piezoelectric ceramic (7), the diaphragm mass block (6) and the elastic base (8), forming an acceleration core. The acceleration core is connected to the square base (5) through the glass sintering seat (10). The first shear-type quartz plate (3), the electrode plate (4), and the second shear-type quartz plate are screwed onto the upper end of the square base (5) by a screw (2) to form a core; the core leads are set on the electrode plate (4); The cover (1) is fixedly connected to the square base (5), and the cover (1) abuts against the end faces of the four screws (2); The dual-core connector (11) is connected to the connector of the square base (5). The core wire and the signal wire pass through the connector hole of the square base (5) and are connected to the two pins of the dual-core connector (11). The bottom of the square base (5) is a square plate structure with a concave mounting thread hole on the bottom surface; the upper end of the square base (5) is provided with a chopped circular boss with a threaded hole for mounting the screw (2) and the core body. The shell cover (1) is a square-shaped shell with a concave interior. The top is provided with an annular boss, and the inner side of the annular boss is provided with a circular opening with a cut edge that is inserted and connected to the square base (5). The diaphragm mass block (6) has an umbrella-shaped structure. The circular thin film at the top concentrates the inertial force strain generated during vibration in the longitudinal direction. The cylindrical structure in the middle and the square structure at the bottom are bonded to the shear-type piezoelectric ceramic (7) to transfer the longitudinal inertial force to the shear-type piezoelectric ceramic (7). The shear-type piezoelectric ceramic (7) has a square sheet structure; the elastic base (8) is an L-shaped plate with a circular groove at the bend, which is used to fix the shear-type piezoelectric ceramic (7) and serve as a fixed carrier for the signal core wire.

2. The composite sensor for monitoring shear-type acceleration and static force according to claim 1, characterized in that, The first shear-type quartz plate (3) and the second shear-type quartz plate are respectively provided with circular through holes, and the electrode plate (4) is adapted to the structure of the first shear-type quartz plate (3).

3. The composite sensor for monitoring shear-type acceleration and static force according to claim 1, characterized in that, The heat-shrinkable alloy ring (9) is a square ring structure and is fitted onto the elastic base (8); The glass sintering base (10) is sintered and fixed inside the square base (5) to achieve insulation isolation between the elastic base (8) and the square base (5); The dual-core connector (11) is equipped with dual pins and threaded post, which are connected to the external cable to realize the signal connection between the sensor and the external device.

4. A method for assembling a composite sensor, characterized in that, The method is used to assemble a composite sensor for monitoring shear-type acceleration and static force as described in any one of claims 1 to 3; The methods include: S1: Fix four elastic bases (8) evenly to the inner space at the bottom of the square base (5) through the glass sintering seat (10); Connect the signal core wire to the elastic base (8) and pass the signal core wire through the signal hole reserved in the square base (5). Place the heat shrinkable alloy ring (9) on the outer periphery of the elastic base (8). S2: A shear-type piezoelectric ceramic (7) is attached to the inner surface of the elastic base (8), and a diaphragm mass block (6) is inserted into the shear-type piezoelectric ceramic (7) and the inner side of the elastic base (8). A constraint force is formed on the shear-type piezoelectric ceramic (7) and the diaphragm mass block (6) by a high-temperature shrinking heat-shrinkable alloy ring (9) to prepare an acceleration core. S3: Fix the deformation area of ​​the diaphragm mass block (6) to the inside of the square base (5) and fix the acceleration core on the square base (5); S4: Stack the first shearing quartz sheet (3), the electrode sheet (4) and the second shearing quartz sheet sequentially on the square edge structure surface of the upper side boss of the square base (5), and screw the first shearing quartz sheet (3), the electrode sheet (4) and the second shearing quartz sheet onto the square base (5) by means of screws (2) to form a core body; S5: Connect the shell cover (1) to the square base (5), apply a pre-tightening force to the shell cover (1) to make the shell cover (1) contact the screw (2), and fix the shell cover (1) and the square base (5) to form a longitudinal constraint force; S6: Pass the signal wires of the force core and acceleration core through the connector hole of the square base (5) and fix them to the pin of the double-core connector (11). Connect the double-core connector (11) and the square base (5) to complete the sensor assembly.

5. The assembly method of the composite sensor according to claim 4, characterized in that, S2 specifically includes the following steps: S21: Coat the inner surface of the elastic base with a high-temperature inorganic adhesive, attach the shear-type piezoelectric ceramic (7) to the adhesive layer, and apply a preset pressure at room temperature until the adhesive is initially cured; S22: Insert the lower square body of the diaphragm mass block vertically into the central space formed by four shear-type piezoelectric ceramics, and adjust the position so that the outer side of the diaphragm mass block (6) and the inner side of the shear-type piezoelectric ceramic (7) make contact through transition fit. S23: The heat shrinkable alloy ring (9) is fitted on the outer periphery of the assembly of the elastic base (8), the shear-type piezoelectric ceramic (7) and the diaphragm mass block (6), so that the inner wall of the heat shrinkable alloy ring (9) and the outer wall of the elastic base (8) are in a clearance fit state. S24: Place the above components into the heating device, control the temperature to rise above the phase transformation temperature of the heat shrinkable alloy ring (9), maintain for a preset time to allow the heat shrinkable alloy ring (9) to undergo martensitic phase transformation and shrink, and apply uniform radial compressive stress to the internal components after cooling.

6. The assembly method of the composite sensor according to claim 4, characterized in that, S3 specifically includes the following steps: S31: Fix the square base (5) with the accelerometer core assembly completed on the welding fixture with the rotating indexing head, so that the upper surface of the square base is kept horizontal, and ensure that the four sides of the square body at the lower end of the diaphragm mass block are in contact with the upper surface of the inner side of the square base. S32: Align the welding torch of the laser welding machine with the boundary line between the first side of the lower square body of the diaphragm mass block (6) and the inner upper surface of the square base (5) directly below, and perform welding to complete the first weld. S33: Rotate the square base (5) by rotating the indexing head in sequence by 90 degrees, 180 degrees and 270 degrees, repeat the operation of S32, and complete the second, third and fourth welds respectively on the boundary line between the other three sides of the square body at the lower end of the diaphragm mass block (6) and the inner upper surface of the square base (5). S34: Place the welded semi-finished product on a flat platform, check the gap between the bottom surface of the square body at the lower end of the diaphragm mass block (6) and the upper inner surface of the square base (5), confirm that there are no visible cracks or pores at all welds, and complete the fixed connection between the acceleration core and the square base (5).

7. The assembly method of the composite sensor according to claim 4, characterized in that, S5 specifically includes the following steps: S51: With the opening end of the outer concave shell facing the square base, align the large-sized circular opening on the inner side of the annular boss at the top of the shell with the circular boss on the upper end of the square base. Move the shell downwards in the vertical direction so that the boss of the square base is embedded inside the opening end of the shell until a gap of a predetermined height is formed between the bottom surface of the concave cavity of the shell and the upper surface of the square base. S52: Use a pressurizing device to apply a downward pressure from the center area of ​​the upper surface of the annular boss at the top of the cover. The magnitude of the pressure is controlled to cause the cover to undergo elastic deformation and move toward the square base until the distance between the bottom surface of the concave cavity inside the cover and the upper surface of the square base is reduced to the critical contact state. At this time, the inner surface of the cover and the cylindrical side of the top of the screw form point contact or line contact. S53: While maintaining the continuous application of the compressive force, a laser beam is used to weld along the circumferential direction of the joint between the shell cover and the square base. The laser beam is focused at the junction of the bottom edge of the shell cover and the outer wall of the square base to form a continuous weld that binds the shell cover and the square base together. After the compressive force is removed, the shrinkage stress of the weld forms a longitudinal constraint force.

8. A sensing method, characterized in that, The method is implemented based on the composite sensor for monitoring shear acceleration and static force as described in any one of claims 1 to 3; The methods include: The assembled sensor is fixed by threaded holes on the square base (5), or positioned and fixed by the square base (5); When the annular protrusion at the upper end of the shell cover (1) is subjected to static compressive force, the first shear-type quartz plate (3), electrode plate (4) and the second shear-type quartz plate of the force core are subjected to shear force to generate charge signals, thereby realizing static force monitoring; When the sensor is subjected to vibration, the diaphragm mass block (6) of the acceleration core generates longitudinal inertial force and transmits it to the shear piezoelectric ceramic (7). The shear piezoelectric ceramic (7) generates charge signal due to the shear piezoelectric effect, thereby realizing acceleration monitoring.

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